CN115532431A - Iron removal device for silicon carbide micro powder for semiconductor and use method - Google Patents

Iron removal device for silicon carbide micro powder for semiconductor and use method Download PDF

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Publication number
CN115532431A
CN115532431A CN202211264764.2A CN202211264764A CN115532431A CN 115532431 A CN115532431 A CN 115532431A CN 202211264764 A CN202211264764 A CN 202211264764A CN 115532431 A CN115532431 A CN 115532431A
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frame
screening
silicon carbide
micro powder
barrel
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CN202211264764.2A
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CN115532431B (en
Inventor
黄威
徐天兵
刘峰
黄叶任
韩平
刘世凯
左立杰
贺毅强
吴志远
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Lianyungang Woxin Advanced Material Co ltd
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Lianyungang Woxin Advanced Material Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C1/00Magnetic separation
    • B03C1/02Magnetic separation acting directly on the substance being separated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C1/00Magnetic separation
    • B03C1/02Magnetic separation acting directly on the substance being separated
    • B03C1/30Combinations with other devices, not otherwise provided for

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Abstract

The invention relates to the field of silicon carbide micro powder processing. The invention discloses a silicon carbide micro powder deironing device for a semiconductor and a using method thereof, and aims to solve the problems that the silicon carbide micro powder on a permanent magnet is more complicated to remove, and the deironing work of the discharged silicon carbide micro powder by the permanent magnet causes the contact surface between the permanent magnet and the silicon carbide micro powder to be limited, so that the iron of the silicon carbide micro powder cannot be completely removed. The iron removal device disclosed by the invention realizes the iron removal work in the silicon carbide micro powder discharging process by the discharging barrel, the screening barrel and the iron removal equipment, can remove iron in the silicon carbide micro powder in the screening barrel, simultaneously avoids the silicon carbide micro powder from adhering to the iron removal equipment, and can increase the contact area of the screening magnetic frame and the iron element in the silicon carbide micro powder to the maximum extent, thereby quickly and completely removing the iron element in the silicon carbide micro powder.

Description

Iron removal device for silicon carbide micro powder for semiconductor and use method
Technical Field
The invention relates to the field of processing of silicon carbide micro powder, in particular to a silicon carbide micro powder deironing device for a semiconductor and a using method thereof.
Background
The silicon carbide micro powder is micron-sized silicon carbide powder which is subjected to superfine grinding and classification by using a JZFZ device, the silicon carbide micro powder mainly comprises 1200# and 1500#, the silicon carbide micro powder is mainly used in the abrasive industry, so that special requirements are provided for classification of the micro powder, large particles cannot appear in the micro powder, international and domestic product requirements are met, the JZF classification device is adopted for high-precision classification in general production, the domestic silicon carbide micro powder mainly comprises black silicon carbide micro powder and green silicon carbide micro powder, some iron powder can be mixed in the existing silicon carbide micro powder in the production process, and the iron powder needs to be removed in order to ensure the service performance of the silicon carbide micro powder.
The prior patent (publication number: CN 107115965B) discloses a silicon carbide micro powder deironing device and a using method thereof. The silicon carbide micro powder screening device is simple in structure, convenient to operate, easy to implement, free of waste of silicon carbide micro powder and chemical raw materials, the first permanent magnet and the second permanent magnet are used in the second screening device, the direction of magnetic lines of force of the first permanent magnet is changed through the second permanent magnet to adsorb and unload iron impurities in the silicon carbide micro powder, energy is saved, environment is protected, pollution to the environment is reduced, and the manufacturing cost is low. In the process of implementing the invention, the inventor finds that at least the following problems in the prior art are not solved:
according to the invention, the permanent magnet is used for removing iron from the silicon carbide micro powder, and the silicon carbide micro powder falls on the permanent magnet in the process of iron absorption when the permanent magnet is in contact with the silicon carbide micro powder, so that the silicon carbide micro powder on the permanent magnet is removed after the operation and processing are finished, the operation is complicated, and the iron removal of the discharged silicon carbide micro powder by the permanent magnet causes the contact surface of the permanent magnet and the silicon carbide micro powder to be limited, so that the iron of the silicon carbide micro powder cannot be completely removed.
Disclosure of Invention
The invention aims to provide a silicon carbide micro powder deironing device for a semiconductor and a using method thereof, which aim to solve the problems in the background technology. In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a carborundum miropowder deironing device for semiconductor, includes supporting seat, unloading barrel, screening barrel and deironing equipment, the supporting seat is the level and places, deironing equipment sets up the top at the supporting seat, the screening barrel slides and sets up on deironing equipment, the bottom of unloading barrel cooperates with the top joint of screening barrel, deironing equipment includes electromagnetic component, fluctuation piece, collision piece and screening magnetic frame, the electromagnetic component sets up the top at the supporting seat, collision piece set up on the electromagnetic component and with electromagnetic component normal running fit, fluctuation piece set up on the electromagnetic component and with electromagnetic component sliding fit, screening magnetic frame is fixed to be set up on fluctuation piece and be located the screening barrel.
Preferably, the unloading barrel includes urceolus frame and inner tube the urceolus frame is fixed to be set up on the supporting seat, the top of inner tube is equipped with the supplementary unloading piece of toper, the inner tube is fixed to be set up on the electromagnetism piece, be equipped with the annular feed opening of carborundum miropowder unloading between the inner wall of urceolus frame and the outer wall of inner tube, form the unloading cavity between the supplementary unloading piece of urceolus frame and toper.
Preferably, still be equipped with on the supplementary unloading piece of toper and scrape the material piece, scrape the material piece including rotating the motor and scraping the frame, rotate the fixed main shaft that sets up in the inner tube and rotate the motor and scrape the one end fixed connection of frame, and scrape the scraping face overlap joint of frame on the supplementary unloading piece of toper on the surface, the main shaft and the supporting seat normal running fit of rotation motor, scrape the frame setting on the main shaft of rotation motor and with the supplementary unloading piece sliding fit of toper.
Preferably, the electromagnetism spare includes a supporting cylinder, a lower supporting cylinder, a storage battery, a supporting plate, a supporting column, a strong magnet and circular telegram guide frame, the fixed top that sets up at the supporting seat of lower supporting cylinder, the fixed inner wall that sets up at lower supporting cylinder of supporting plate, the fixed bottom that sets up in the supporting plate and go up a supporting cylinder is connected to the supporting column, it is connected with the inner tube to go up a supporting cylinder, the strong magnet cover is established on the supporting column, storage battery sets up on the supporting column, the one end of circular telegram guide frame is connected with storage battery and rotates around the centre of a circle of supporting column through the magnetic field that the strong magnet formed.
Preferably, the piece that fluctuates includes regulation pole, regulating block and elastic spring, be equipped with the spout on the circular telegram guide frame, the regulating block setting in the spout and with spout sliding fit, adjust the fixed setting on the regulating block of pole and with circular telegram guide frame sliding fit, elastic spring's both ends are connected with regulating block and circular telegram guide frame respectively, screening magnetic frame sets up on the regulating block.
Preferably, an annular track is formed between the upper supporting cylinder and the lower supporting cylinder, the screening magnetic frame is in sliding fit with the annular track, a triangular stop block is fixedly arranged on the upper supporting cylinder, and the triangular stop block is in interference fit with the screening magnetic frame.
Preferably, the collision piece includes torsional spring, rotating turret and conflict piece, the rotating turret rotates and sets up on the support column, the both ends of torsional spring are connected with last supporting cylinder and support column respectively, conflict piece is fixed to be set up on the rotating turret and with the conflict cooperation of screening magnetic frame, it keeps off the frame still to be equipped with on the supporting cylinder, keep off the frame and conflict the cooperation with conflict piece.
Preferably, the fixed baffle that is equipped with on the outer wall of lower support cylinder, the baffle is located the screening barrel and is located the orbital below of ring, hinders the powder to get into the operation that influences deironing equipment in support cylinder and the lower support cylinder through the ring track when the baffle that sets up makes the carborundum miropowder screening in the screening barrel.
Preferably, be equipped with the slide on the outer wall of under bracing section of thick bamboo, the screening barrel sets up on the slide and with slide sliding fit, the bottom joint cooperation of screening barrel and unloading barrel, be equipped with a plurality of holes on the screening magnetic frame, make the screening magnetic frame adsorb on the screening magnetic frame and carborundum miropowder accessible hole drops to carborundum miropowder deironing during operation iron through a plurality of holes that set up.
Preferably, the use method of the silicon carbide micro powder deironing device for the semiconductor comprises the following steps:
s1: an operator pours silicon carbide micro powder into the blanking cavity, then the motor is rotated to drive the scraping frame to rotate, the silicon carbide micro powder is slowly scraped into the annular blanking port along the outer edge of the conical auxiliary blanking block through the scraping frame, the silicon carbide micro powder is blanked through the annular blanking port, and therefore the phenomenon that blanking is blocked through a funnel in the prior art is avoided, and the screening magnetic frame can perform iron removing operation on the falling silicon carbide micro powder by matching with the rotation of the screening magnetic frame in the process of blanking the silicon carbide micro powder through the scraping frame, so that the iron removing operation can be performed while the blanking efficiency is improved;
s2: when the silicon carbide micro powder falls into the screening cylinder from the annular feed opening, the storage battery supplies power to the power-on guide frame, the stress directions of two ends of the power-on guide frame are opposite through an annular magnetic field formed by strong magnets, so that the power-on guide frame rotates on the supporting column, and at the moment, the power-on guide frame is provided with magnetism and transmits the magnetism to the screening magnetic frame through the adjusting block, so that the screening magnetic frame can rotate around the screening cylinder to perform iron removal screening work on the discharged silicon carbide micro powder;
s3: when the screening magnetic frame rotates in the circular track to carry out iron removal work on the silicon carbide micro powder in the screening cylinder, the screening magnetic frame rotates to the triangular stop block and can be abutted against the triangular stop block, at the moment, the screening magnetic frame can displace along the shape of the triangular stop block to enable the screening magnetic frame to generate a vertically fluctuating state, the fluctuation of the screening magnetic frame forms air flow in the screening cylinder so as to drive the silicon carbide micro powder in the screening cylinder to fluctuate in the screening cylinder, and the screening magnetic frame can carry out iron removal work on the silicon carbide micro powder in the screening cylinder through the fluctuation of the silicon carbide micro powder, so that the iron removal efficiency of the silicon carbide micro powder is higher, and iron contained in the silicon carbide micro powder cannot be left and omitted;
s4: when the screening magnetic frame rotates in the circular track, the screening magnetic frame can drive the rotating frame to rotate on the supporting column simultaneously, when the screening magnetic frame is in contact with the triangular check block to fluctuate, the contact block on the rotating frame can be abutted to the blocking frame, the screening magnetic frame fluctuates upwards, so that the screening magnetic frame is swept over the contact block, the rotating frame can be pulled to be retracted through the arrangement of a torsion spring, the screening magnetic frame can be touched when the rotating direction of the screening magnetic frame and the rotating frame is opposite, and the silicon carbide micro powder on the screening magnetic frame can be shaken down into the screening cylinder from the hole when the rotating frame is touched with the screening magnetic frame;
s5: after the deironing of the silicon carbide micro powder is finished, the screening cylinder can be moved through the slide way on the lower supporting cylinder by an operator, so that the silicon carbide micro powder in the screening cylinder is collected and treated, and iron on the screening magnetic frame is removed through the power failure of the storage battery to finish the deironing work of the silicon carbide micro powder.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, when the sieving magnetic frame rotates in the circular track to carry out iron removal work on the silicon carbide micro powder in the sieving cylinder, the sieving magnetic frame can be abutted against the triangular stop block when rotating to the triangular stop block, at the moment, the sieving magnetic frame can be displaced along the shape of the triangular stop block to enable the sieving magnetic frame to be in an up-and-down fluctuating state, the fluctuation of the sieving magnetic frame forms air flow in the sieving cylinder to drive the silicon carbide micro powder in the sieving cylinder to fluctuate in the sieving cylinder, and the sieving magnetic frame can carry out iron removal work on the silicon carbide micro powder in the sieving cylinder through fluctuation of the silicon carbide micro powder, so that the iron removal efficiency of the silicon carbide micro powder is higher, and iron left and omitted in the silicon carbide micro powder cannot be removed.
According to the invention, when the screening magnetic frame rotates in the circular track, the screening magnetic frame can drive the rotating frame to rotate on the supporting column simultaneously, when the screening magnetic frame is contacted with the triangular stop block to fluctuate, the contact block on the rotating frame can be contacted with the blocking frame, the screening magnetic frame fluctuates upwards to enable the screening magnetic frame to pass over the contact block, at the moment, the rotating frame can be pulled to retract through the arrangement of the torsion spring, at the moment, the screening magnetic frame can be contacted with the rotating frame in the opposite direction, and further, when the rotating frame is contacted with the screening magnetic frame, the silicon carbide micro powder on the screening magnetic frame can be shaken from the hole into the screening cylinder.
According to the invention, an operator pours silicon carbide micropowder into the blanking cavity, then the motor is rotated to drive the scraping frame to rotate, the silicon carbide micropowder is slowly scraped into the annular blanking port along the outer edge of the conical auxiliary blanking block through the scraping frame, the silicon carbide micropowder is blanked through the annular blanking port, so that the phenomenon of blanking blockage through a funnel in the prior art is avoided, and the screening magnetic frame can perform iron removal operation on the falling silicon carbide micropowder by matching with the rotation of the screening magnetic frame in the process of blanking the silicon carbide micropowder through the scraping frame, so that the blanking efficiency is improved, and the iron removal operation can be performed.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is an expanded view of a partial perspective structure of the present invention;
FIG. 3 is a top view of the three-dimensional structure of the blanking barrel of the present invention;
FIG. 4 is a three-dimensional structural sectional view of the blanking barrel of the present invention;
FIG. 5 is a partial three-dimensional structural cross-sectional view of the blanking barrel of the present invention;
FIG. 6 is a partial perspective sectional view of the present invention;
FIG. 7 is a schematic perspective view of an iron removal apparatus according to the present invention;
FIG. 8 is an expanded view of the three-dimensional structure of the iron removing equipment of the present invention;
FIG. 9 is a first schematic perspective view of an iron removing apparatus according to the present invention;
FIG. 10 is a schematic perspective view of a second iron removing apparatus according to the present invention;
fig. 11 is a partial perspective view of the present invention.
In the figure: 1. a supporting base; 2. a blanking barrel; 21. an outer cylinder frame; 22. an inner barrel; 23. a conical auxiliary blanking block; 24. an annular feed opening; 25. a blanking chamber; 26. scraping the material; 261. rotating the motor; 262. a scraping frame; 3. screening the cylinder body; 4. iron removal equipment; 5. an electromagnetic member; 51. an upper support cylinder; 52. a lower support cylinder; 53. a battery pack; 54. a support plate; 55. a support pillar; 56. strong magnets; 57. a power-on guide frame; 58. a chute; 59. a circular ring track; 591. a triangular stop block; 592. a barrier frame; 593. a baffle plate; 594. a slideway; 6. a relief member; 61. adjusting a rod; 62. an adjusting block; 63. an elastic spring; 7. a collision member; 71. a torsion spring; 72. a rotating frame; 73. a contact block; 8. screening a magnetic frame; 81. and (4) holes.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a worker skilled in the art based on the embodiments of the present invention without making creative efforts, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 11, the present invention provides a technical solution: the utility model provides a carborundum miropowder deironing device for semiconductor, includes supporting seat 1, unloading barrel 2, screening barrel 3 and deironing equipment 4, supporting seat 1 is the level and places, deironing equipment 4 sets up the top at supporting seat 1, screening barrel 3 slides and sets up on deironing equipment 4, the bottom of unloading barrel 2 and the cooperation of the top joint of screening barrel 3, deironing equipment 4 includes electromagnetic component 5, fluctuation 6, collision 7 and screening magnetic frame 8, electromagnetic component 5 sets up the top at supporting seat 1, collision 7 sets up on electromagnetic component 5 and with electromagnetic component 5 normal running fit, fluctuation 6 sets up on electromagnetic component 5 and with electromagnetic component 5 sliding fit, screening magnetic frame 8 is fixed to be set up on fluctuation 6 and is located screening barrel 3.
In this embodiment, as shown in fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, and fig. 6, the discharging cylinder 2 includes an outer cylinder frame 21 and an inner cylinder 22, the outer cylinder frame 21 is fixedly disposed on the supporting seat 1, a conical auxiliary discharging block 23 is disposed on the top of the inner cylinder 22, the inner cylinder 22 is fixedly disposed on the electromagnetic element 5, an annular discharging opening 24 for discharging silicon carbide micropowder is disposed between an inner wall of the outer cylinder frame 21 and an outer wall of the inner cylinder 22, a discharging chamber 25 is formed between the outer cylinder frame 21 and the conical auxiliary discharging block 23, a scraping element 26 is further disposed on the conical auxiliary discharging block 23, the scraping element 26 includes a rotating motor 261 and a scraping frame 262, the rotating motor 261 is fixedly disposed in the inner cylinder 22, a main shaft of the rotating motor 261 is fixedly connected with one end of the scraping frame 262, a scraping surface of the scraping frame 262 is lapped on a surface of the conical auxiliary discharging block 23, the main shaft of the rotating motor 261 is rotatably engaged with the supporting seat 1, and the scraping frame 262 is disposed on a main shaft of the rotating motor 261 and slidably engaged with the conical auxiliary discharging block 23; during unloading cavity 25 is poured into with carborundum miropowder to operating personnel, rotate motor 261 drive afterwards and scrape the rotation of frame 262, scrape the frame 262 slowly scrape carborundum miropowder to annular feed opening 24 along the outward flange of the supplementary feed block 23 of toper through scraping, thereby through annular feed opening 24 to carborundum miropowder unloading thereby avoided among the prior art can appear the phenomenon that the unloading blockked up through the funnel and carry out the rotation of unloading with carborundum miropowder cooperation screening magnetic frame 8 through scraping frame 262 and make screening magnetic frame 8 can carry out the deferrization operation to the carborundum miropowder of whereabouts, and then the deironing work that can play when improving unloading efficiency.
In this embodiment, as shown in fig. 1, fig. 2, fig. 6, fig. 7, fig. 8, fig. 9, and fig. 10, the electromagnetic component 5 includes an upper support cylinder 51, a lower support cylinder 52, a battery pack 53, a support plate 54, a support column 55, a strong magnet 56, and an energizing guide 57, the lower support cylinder 52 is fixedly disposed at the top of the support base 1, the support plate 54 is fixedly disposed on the inner wall of the lower support cylinder 52, the support column 55 is fixedly disposed on the support plate 54 and connected to the bottom of the upper support cylinder 51, the upper support cylinder 51 is connected to the inner cylinder 22, the strong magnet 56 is sleeved on the support column 55, the battery pack 53 is disposed on the support column 55, one end of the energizing guide 57 is connected to the battery pack 53 and rotates around the center of the support column 55 through a magnetic field formed by the strong magnet 56; when carborundum miropowder from annular feed opening 24 fall to screening barrel 3 in, storage battery 53 circular telegram guide frame 57 circular telegram, the annular magnetic field that forms through strong magnet 56 makes the atress opposite direction at circular telegram guide frame 57 both ends and then makes circular telegram guide frame 57 take place to rotate on support column 55, then can be with magnetism and then pass to screening magnet frame 8 through regulating block 62 on with magnetism on circular telegram guide frame 57 this moment and make screening magnet frame 8 can rotate around screening barrel 3 and carry out deironing screening work to the carborundum miropowder of unloading.
In this embodiment, as shown in fig. 1, fig. 2, fig. 6, fig. 7, fig. 8, fig. 9 and fig. 10, the undulation member 6 includes an adjusting rod 61, an adjusting block 62 and an elastic spring 63, the electrified guide frame 57 is provided with a sliding groove 58, the adjusting block 62 is disposed in the sliding groove 58 and is in sliding fit with the sliding groove 58, the adjusting rod 61 is fixedly disposed on the adjusting block 62 and is in sliding fit with the electrified guide frame 57, two ends of the elastic spring 63 are respectively connected with the adjusting block 62 and the electrified guide frame 57, the sieving magnetic frame 8 is disposed on the adjusting block 62, an annular rail 59 is formed between the upper supporting cylinder 51 and the lower supporting cylinder 52, the sieving magnetic frame 8 is in sliding fit with the annular rail 59, the upper supporting cylinder 51 is fixedly provided with a triangular stopper 591, and the triangular stopper 591 is in abutting fit with the sieving magnetic frame 8; when the screening magnetic frame 8 rotates in the circular track to the silicon carbide micropowder deironing during operation in the screening barrel 3, screening magnetic frame 8 rotates to triangle-shaped dog 591 department then can contradict with triangle-shaped dog 591, screening magnetic frame 8 then can take place the displacement and then make screening magnetic frame 8 produce the state of fluctuation from top to bottom along the shape of triangle-shaped dog 591 this moment, screening magnetic frame 8 fluctuates then forms the air current and then can drive the silicon carbide micropowder in the screening barrel 3 and fluctuate in screening barrel 3, it can carry out deironing work to the silicon carbide micropowder in the screening barrel 3 to make silicon carbide micropowder deironing efficiency higher to make silicon carbide micropowder, can not have the iron that remains to omit and contain the silicon carbide micropowder not get rid of.
In this embodiment, as shown in fig. 1, fig. 2, fig. 6, fig. 7, fig. 8, fig. 9, and fig. 10, the collision member 7 includes a torsion spring 71, a rotating frame 72, and a collision block 73, the rotating frame 72 is rotatably disposed on the supporting column 55, two ends of the torsion spring 71 are respectively connected to the upper supporting cylinder 51 and the supporting column 55, the collision block 73 is fixedly disposed on the rotating frame 72 and is in collision fit with the sieving magnetic frame 8, the upper supporting cylinder 51 is further provided with a blocking frame 592, and the blocking frame 592 is in collision fit with the collision block 73; when the screening magnetic frame 8 rotates in the circular ring track 59, the screening magnetic frame 8 can drive the rotating frame 72 to rotate on the supporting column 55 at the same time, when the screening magnetic frame 8 is in contact with the triangular stop dog 591 to fluctuate, the contact block 73 on the rotating frame 72 can be abutted to the blocking frame 592, the screening magnetic frame 8 fluctuates upwards to enable the screening magnetic frame 8 to pass over the contact block 73, at the moment, the rotating frame 72 can be pulled to be recycled through the arrangement of the torsion spring 71, at the moment, the screening magnetic frame 8 is in contact with the rotating frame 72 in the opposite direction, and further, when the rotating frame 72 is in contact with the screening magnetic frame 8, the silicon carbide powder on the screening magnetic frame 8 can be shaken down into the screening cylinder 3 from the holes 81, so that the screening magnetic frame 8 can remove iron from the silicon carbide powder in the screening cylinder 3 and shake down the silicon carbide powder on the screening magnetic frame 8, the large enough area of the screening magnetic frame 8 can be in contact with the iron carbide powder, and the efficiency of iron carbide powder separation can be improved.
In this embodiment, as shown in fig. 1, fig. 2, fig. 6, fig. 7, fig. 8, fig. 9, and fig. 10, a baffle 593 is fixedly disposed on an outer wall of the lower support cylinder 52, the baffle 593 is located in the sieving cylinder 3 and below the circular ring rail 59, and the baffle 593 is arranged to prevent powder from entering the upper support cylinder 51 and the lower support cylinder 52 through the circular ring rail 59 to affect the operation of the iron removing device 4 when the fine silicon carbide powder in the sieving cylinder 3 is sieved.
In this embodiment, as shown in fig. 1, fig. 2, fig. 6, fig. 7, fig. 8, fig. 9 and fig. 10, a slide 594 is provided on the outer wall of the lower support cylinder 52, the screening cylinder 3 is provided on the slide 594 and is in sliding fit with the slide 594, the screening cylinder 3 is in clamping fit with the bottom of the blanking cylinder 2, a plurality of holes 81 are provided on the screening magnetic frame 8, iron is adsorbed on the screening magnetic frame 8 through the plurality of holes 81, and silicon carbide micro powder can fall through the holes 81 when the screening magnetic frame 8 removes iron from silicon carbide micro powder during operation; after the iron removal of the silicon carbide micro powder is finished, the screening cylinder 3 can be moved by sliding on the lower support cylinder 52 by an operator, so that the silicon carbide micro powder in the screening cylinder 3 is collected and processed, and iron on the screening magnetic frame 8 is removed by powering off the storage battery 53 to finish the iron removal work of the silicon carbide micro powder.
The use method and the advantages of the invention are as follows: the use method of the silicon carbide micro powder deironing device for the semiconductor comprises the following working processes:
as shown in fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, fig. 6, fig. 7, fig. 8, fig. 9, fig. 10, and fig. 11:
s1: an operator pours the silicon carbide micro powder into the blanking cavity 25, then the motor 261 is rotated to drive the scraping frame 262 to rotate, the silicon carbide micro powder is slowly scraped into the annular blanking port 24 along the outer edge of the conical auxiliary blanking block 23 through the scraping frame 262, the silicon carbide micro powder is blanked through the annular blanking port 24, and therefore the phenomenon that blanking blockage can occur through a funnel in the prior art is avoided, the screening magnetic frame 8 can perform iron removing operation on the falling silicon carbide micro powder by matching with the rotation of the screening magnetic frame 8 in the process of blanking the silicon carbide micro powder through the scraping frame 262, and further iron removing work can be performed while blanking efficiency is improved;
s2: when the silicon carbide micro powder falls into the screening cylinder 3 from the annular feed opening 24, the storage battery 53 energizes the energizing guide frame 57, the annular magnetic field formed by the strong magnet 56 enables the stress directions of the two ends of the energizing guide frame 57 to be opposite, so that the energizing guide frame 57 rotates on the support column 55, at the moment, the energizing guide frame 57 is accompanied by magnetism, and the magnetism is transmitted to the screening magnetic frame 8 through the adjusting block 62, so that the screening magnetic frame 8 can rotate around the screening cylinder 3 to carry out iron removal screening work on the discharged silicon carbide micro powder;
s3: when the screening magnetic frame 8 rotates in the circular track to perform iron removal work on the silicon carbide micro powder in the screening cylinder 3, the screening magnetic frame 8 rotates to the triangular stop dog 591 and then can be abutted against the triangular stop dog 591, at the moment, the screening magnetic frame 8 can be displaced along the shape of the triangular stop dog 591 to enable the screening magnetic frame 8 to be in a vertically fluctuating state, the screening magnetic frame 8 fluctuates and then forms airflow in the screening cylinder 3 to further drive the silicon carbide micro powder in the screening cylinder 3 to fluctuate in the screening cylinder 3, and the screening magnetic frame 8 can perform iron removal work on the silicon carbide micro powder in the screening cylinder 3 through fluctuation of the silicon carbide micro powder, so that the iron removal efficiency of the silicon carbide micro powder is higher, and iron contained in the silicon carbide micro powder cannot be left and omitted;
s4: when the screening magnet frame 8 rotates in the circular ring rail 59, the screening magnet frame 8 can drive the rotating frame 72 to rotate on the supporting column 55 at the same time, when the screening magnet frame 8 is contacted with the triangular stop piece 591 to fluctuate, the contact block 73 on the rotating frame 72 can be contacted with the blocking frame 592, the screening magnet frame 8 fluctuates upwards to enable the screening magnet frame 8 to pass over the contact block 73, at the moment, the rotating frame 72 can be pulled to be retracted through the arrangement of the torsion spring 71, at the moment, the screening magnet frame 8 and the rotating frame 72 can be contacted in the opposite direction, and further, when the rotating frame 72 and the screening magnet frame 8 are contacted, the silicon carbide micro powder on the screening magnet frame 8 can be shaken from the hole 81 to the screening cylinder 3, at the moment, the contact area of iron elements in the screening magnet frame 8 and the silicon carbide micro powder can be increased to the maximum extent, and the iron elements in the silicon carbide micro powder can be rapidly cleaned;
s5: after the deironing of carborundum miropowder is finished then can be removed screening barrel 3 through slide 594 on the lower support cylinder 52 by operating personnel to the carborundum miropowder in the screening barrel 3 is collected and is handled and is got rid of the deironing work of accomplishing carborundum miropowder through the iron that storage battery 53 outage on with screening magnetic frame 8.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and the preferred embodiments of the present invention are described in the above embodiments and the description, and are not intended to limit the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (8)

1. The utility model provides a carborundum miropowder deironing device for semiconductor, includes supporting seat (1), unloading barrel (2), screening barrel (3) and deironing equipment (4), supporting seat (1) is the level and places, deironing equipment (4) set up the top at supporting seat (1), screening barrel (3) slide to set up on deironing equipment (4), the bottom of unloading barrel (2) and the cooperation of the top joint of screening barrel (3), its characterized in that: deironing equipment (4) include electromagnetism piece (5), fluctuation piece (6), collision piece (7) and screening magnetic frame (8), electromagnetism piece (5) set up the top at supporting seat (1), collision piece (7) set up on electromagnetism piece (5) and with electromagnetism piece (5) normal running fit, fluctuation piece (6) set up on electromagnetism piece (5) and with electromagnetism piece (5) sliding fit, screening magnetic frame (8) are fixed to be set up on fluctuation piece (6) and are located screening barrel (3).
2. The silicon carbide micropowder de-ironing device for semiconductors according to claim 1, characterized in that: the blanking barrel (2) comprises an outer barrel frame (21) and an inner barrel (22), the outer barrel frame (21) is fixedly arranged on the supporting seat (1), a conical auxiliary blanking block (23) is arranged at the top of the inner barrel (22), the inner barrel (22) is fixedly arranged on the electromagnetic part (5), an annular blanking opening (24) for blanking silicon carbide micro powder is arranged between the inner wall of the outer barrel frame (21) and the outer wall of the inner barrel (22), and a blanking chamber (25) is formed between the outer barrel frame (21) and the conical auxiliary blanking block (23);
still be equipped with on supplementary lower material piece of toper (23) and scrape material piece (26), scrape material piece (26) including rotating motor (261) and scraping frame (262), rotate the fixed main shaft that sets up in inner tube (22) and rotate motor (261) and the one end fixed connection who scrapes frame (262), and scrape the face overlap joint that scrapes frame (262) and on the surface of supplementary lower material piece of toper (23), the main shaft and supporting seat (1) normal running fit of rotation motor (261), scrape frame (262) set up on the main shaft of rotation motor (261) and with supplementary lower material piece (23) sliding fit of toper.
3. The apparatus for removing iron from silicon carbide fine powder for semiconductors according to claim 2, characterized in that: electromagnetic component (5) are including last supporting barrel (51), lower supporting barrel (52), storage battery (53), backup pad (54), support column (55), strong magnet (56) and circular telegram guide frame (57), lower supporting barrel (52) are fixed to be set up at the top of supporting seat (1), backup pad (54) are fixed to be set up on the inner wall of lower supporting barrel (52), support column (55) are fixed to be set up in backup pad (54) and are connected with the bottom of last supporting barrel (51), it is connected with inner tube (22) to go up supporting barrel (51), strong magnet (56) cover is established on support column (55), storage battery (53) set up on support column (55), the one end of circular telegram guide frame (57) is connected with storage battery (53) and rotates around the centre of a circle of support column (55) through the magnetic field that storage battery (56) formed, be provided with triangle-shaped stop block (591) on supporting barrel (51), and triangle-shaped stop block (591) contradict the cooperation with screening magnetic frame (8), it is provided with the separation frame (592) on supporting barrel (51), be equipped with the outer wall (594) the slide (593) of baffle (594) and the outer wall of the lower supporting barrel (593), be equipped with the slide (594) on the slide (594) the slide (593).
4. The silicon carbide micropowder de-ironing device for semiconductors according to claim 3, characterized in that: the fluctuation piece (6) is including adjusting pole (61), regulating block (62) and elastic spring (63), be equipped with spout (58) on circular telegram guide frame (57), regulating block (62) set up in spout (58) and with spout (58) sliding fit, adjust pole (61) fixed set up on regulating block (62) and with circular telegram guide frame (57) sliding fit, the both ends of elastic spring (63) are connected with regulating block (62) and circular telegram guide frame (57) respectively, screening magnetic frame (8) set up on regulating block (62).
5. The silicon carbide micropowder de-ironing device for semiconductors according to claim 3, characterized in that: go up and form ring track (59) between support cylinder (51) and lower support cylinder (52), screening magnetic frame (8) and ring track (59) sliding fit, baffle (593) are located screening barrel (3) and are located the below of ring track (59), hinder the powder to get into the operation of going up support cylinder (51) and lower support cylinder (52) in through ring track (59) and influence deironing equipment (4) through ring track (59) when baffle (593) through setting up make the carborundum miropowder screening in screening barrel (3).
6. The apparatus for removing iron from silicon carbide fine powder for semiconductors according to claim 3, characterized in that: collision piece (7) include torsional spring (71), rotating turret (72) and conflict piece (73), rotating turret (72) rotate to set up on support column (55), the both ends of torsional spring (71) are connected with last support cylinder (51) and support column (55) respectively, conflict piece (73) are fixed to be set up on rotating turret (72) and contradict the cooperation with screening magnetic frame (8), conflict piece (73) with separate and keep off the cooperation of frame (592).
7. The silicon carbide micropowder de-ironing device for semiconductors according to claim 1, characterized in that: be equipped with a plurality of holes (81) on screening magnetic frame (8), make screening magnetic frame (8) adsorb on screening magnetic frame (8) and carborundum miropowder accessible hole (81) drop to carborundum miropowder deironing during operation iron through a plurality of holes (81) that set up.
8. The use method of the silicon carbide micro powder deironing device for the semiconductor according to claim 1, comprising the following steps:
s1: an operator pours silicon carbide micro powder into the blanking chamber (25), then the motor (261) is rotated to drive the scraping frame (262) to rotate, the silicon carbide micro powder is slowly scraped into the annular blanking port (24) along the outer edge of the conical auxiliary blanking block (23) through the scraping frame (262), the silicon carbide micro powder is blanked through the annular blanking port (24), so that the phenomenon of blanking blockage caused by a funnel in the prior art is avoided, and the screening magnetic frame (8) can perform iron removal operation on the falling silicon carbide micro powder by matching with the rotation of the screening magnetic frame (8) in the process of blanking the silicon carbide micro powder through the scraping frame (262), and further the iron removal operation can be performed while the blanking efficiency is improved;
s2: when the silicon carbide micro powder falls into the screening cylinder (3) from the annular feed opening (24), the storage battery (53) energizes the energizing guide frame (57), an annular magnetic field formed by the strong magnet (56) enables stress directions at two ends of the energizing guide frame (57) to be opposite, so that the energizing guide frame (57) rotates on the support column (55), and at the moment, the energizing guide frame (57) is accompanied by magnetism and transmits the magnetism to the screening magnetic frame (8) through the adjusting block (62), so that the screening magnetic frame (8) can rotate around the screening cylinder (3) to carry out iron removal screening work on the silicon carbide micro powder subjected to blanking;
s3: when the screening magnetic frame (8) rotates in the circular track to remove iron from the silicon carbide micro powder in the screening cylinder (3), the screening magnetic frame (8) rotates to the triangular stop block (591) and then is abutted against the triangular stop block (591), at the moment, the screening magnetic frame (8) can displace along the shape of the triangular stop block (591) to enable the screening magnetic frame (8) to be in an up-and-down fluctuating state, the screening magnetic frame (8) fluctuates to form airflow in the screening cylinder (3) to drive the silicon carbide micro powder in the screening cylinder (3) to fluctuate in the screening cylinder (3), and the screening magnetic frame (8) can remove iron from the silicon carbide micro powder in the screening cylinder (3) through fluctuation of the silicon carbide micro powder, so that the iron removal efficiency of the silicon carbide micro powder is higher, and iron left and omitted in the silicon carbide micro powder cannot be removed;
s4: when the screening magnetic frame (8) rotates in the circular track (59), the screening magnetic frame (8) can drive the rotating frame (72) to rotate on the supporting column (55) simultaneously, when the screening magnetic frame (8) is contacted with the triangular stop block (591) to fluctuate, the contact block (73) on the rotating frame (72) can be abutted to the blocking frame (592), the screening magnetic frame (8) fluctuates upwards to enable the screening magnetic frame (8) to sweep over the contact block (73), at the moment, the rotating frame (72) can be pulled to be retracted through the arrangement of the torsion spring (71), at the moment, the screening magnetic frame (8) and the rotating frame (72) can be contacted in the opposite direction, further, when the rotating frame (72) and the screening magnetic frame (8) are contacted, the silicon carbide on the screening magnetic frame (8) can be shaken off from the hole (81) to the screening cylinder (3), at the moment, the contact area of the screening magnetic frame (8) and the silicon carbide micro powder in the iron micro powder can be removed quickly;
s5: after the deironing of the silicon carbide micropowder is finished, the screening cylinder body (3) can be moved through a slide way (594) on the lower support cylinder (52) by an operator, so that the silicon carbide micropowder in the screening cylinder body (3) is collected and processed, and the iron on the screening magnetic frame (8) is removed through the power failure of the storage battery pack (53), and the deironing work of the silicon carbide micropowder is completed.
CN202211264764.2A 2022-10-17 2022-10-17 Iron removal device for silicon carbide micro powder for semiconductor and use method Active CN115532431B (en)

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