CN115524845A - MEMS (micro-electromechanical system) micromirror scanning system with active tunable mirror surface - Google Patents
MEMS (micro-electromechanical system) micromirror scanning system with active tunable mirror surface Download PDFInfo
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- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- G—PHYSICS
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- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
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- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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Abstract
The invention discloses an MEMS (micro-electromechanical system) micromirror scanning system with an active tunable mirror, which comprises the active tunable mirror and a two-dimensional MEMS actuator capable of providing two-degree-of-freedom torsional motion; the two-dimensional MEMS actuator comprises a first MEMS actuator and a second MEMS actuator, the second MEMS actuator is positioned in the first MEMS actuator, and the torsion directions of the first MEMS actuator and the second MEMS actuator are mutually orthogonal; the active tunable mirror is supported by a second MEMS actuator. The mirror actuator is coupled to the back of the MEMS mirror surface, so that prestress acting on the MEMS mirror surface can be generated in a self-adaptive manner, dynamic deformation of the MEMS mirror surface can be improved by active adjustment, and high dynamic optical flatness of the mirror surface is ensured; meanwhile, two actuators are used for twisting around a fast axis (X) direction and a slow axis (Y) direction which are orthogonal to each other, two-dimensional deflection is provided for the active tunable mirror, and high integration of the system is ensured.
Description
Technical Field
The invention relates to a MEMS micro-mirror scanning system with an active tunable mirror surface.
Background
With the rapid development of consumer electronics market, augmented Reality (AR) scene technology with MEMS (Micro electro mechanical systems) laser scanners as core components is favored, so that MEMS micromirrors, one of MEMS laser scanner core devices, are also widely focused to implement imaging display and 3D sensing by spatially modulating and projecting laser light, and are generally divided into high-frequency scanning in the (fast axis) X direction and quasi-static or linear scanning in the (slow axis) Y direction. The MEMS laser scanner is applied to high resolution, high optical power, large visual field experience and high reliability AR display, and the core component MEMS laser scanner is required to realize high resolution, large visual field angle, high system integration and higher laser energy bearing, so that the MEMS micro-mirror is required to have high scanning frequency, large scanning angle, large reflecting mirror surface, reliable structural fracture strength and mirror surface dynamic deformation not higher than +/-lambda/10 under the condition of smaller device volume so as to ensure high optical flatness of mirror surface dynamic, and lambda is the shortest laser wavelength used in scanning application;
in the formula (1), δ is the dynamic deformation of the mirror surface, f is the scanning frequency, θ is the scanning angle, t is the mirror thickness, L is the mirror size, and E is the young's modulus. The dynamic deformation of the mirror surface is inversely proportional to the 5 th power of the mirror surface size, the 2 nd power of the scanning frequency and the scanning angle, and the larger dynamic deformation of the mirror surface can be brought by the realization of the larger size, the high scanning frequency and the large scanning angle of the mirror surface, so the key point of realizing the larger size, the high scanning frequency and the large scanning angle of the mirror surface is to improve the dynamic deformation of the mirror surface;
the dynamic deformation of the mirror surface can be improved and reduced by increasing the thickness of the mirror surface, but the larger mass and mass moment of inertia of the micromirror require higher rigidity of the torsion beam to maintain a certain resonant frequency, and simultaneously, the stress of the torsion beam is increased, so that the realization of higher scanning frequency is limited, the requirement of extra mass on driving force is increased, and the resonant frequency of a non-planar mode and the reliability of a system are reduced;
in the existing solution, the thickness of the reflector is increased, and a part of area is removed at the back of the reflector to reduce the mass of the reflector, so that the torsional rigidity of the torsion beam is reduced, and the dynamic deformation is not improved enough; a plurality of torsion beams are adopted to improve the deformation of the mirror surface, so that the size and the scanning angle of the reflecting mirror surface are limited; the structure for supporting the MEMS mirror surface is improved to improve the dynamic deformation of the MEMS mirror surface, so that a more complex system structure is realized, and meanwhile, the more complex structure can also cause the load of a slow axis to be increased, and the scanning frequency and the scanning angle in the Y direction are reduced;
the double one-dimensional (1D) MEMS micro-mirror designs the X-direction scanning module and the Y-direction scanning module as independent devices to be separately placed, although the target performance can be realized, the complexity of an optical system is improved, the integration level of the system is low, and the 2D MEMS micro-mirror is a better solution for the requirement of the application scene;
methods for implementing the 2D MEMS micro-mirror driving include electromagnetic driving, piezoelectric driving, thermoelectric driving, and electrostatic driving. Under the condition of ensuring the flatness of the reflecting mirror surface, the electromagnetic drive has great driving force, but the electromagnetic drive is not suitable for high-frequency scanning while realizing the driving of a large mirror surface and a large angle; the piezoelectric drive meets the requirements of high-frequency scanning and large-size mirror surfaces, and simultaneously limits smaller driving force, so that the scanning angle of the slow axis in a quasi-static mode cannot be further improved; the thermoelectric driving is not suitable for application scenes such as micro-display and micro-scanning due to the low response speed; the electrostatic driving has small driving force, so that the driving of a large-size reflecting mirror surface is extremely difficult to realize;
the existing 2D MEMS scanning micro mirror adopts the single driving mode, and also adopts the combination of electrostatic driving and piezoelectric driving, and the combination of electromagnetic driving and electrostatic driving, but the design constraint brought by the dynamic deformation of the MEMS reflecting mirror surface is not solved, and the scanning angle, the scanning frequency and the structural reliability can not be improved under the condition of realizing the size design of a large reflecting mirror surface.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an active tunable MEMS micro-mirror scanning system which can generate a prestress acting on an MEMS reflecting mirror surface in a self-adaptive manner by coupling an MEMS actuator on the back of the MEMS reflecting mirror surface, can actively adjust to improve the dynamic deformation of the MEMS reflecting mirror surface and ensure the high dynamic optical flatness of the reflecting mirror surface; and simultaneously, two-dimensional deflection is provided for the active tunable mirror by twisting the two actuators around a fast axis (X) direction and a slow axis (Y) direction which are orthogonal to each other, so that a system scanning architecture with high integration is ensured.
The purpose of the invention is realized by the following technical scheme: a MEMS micro-mirror scanning system with an active tunable mirror comprises the active tunable mirror and a two-dimensional MEMS actuator capable of providing two-degree-of-freedom torsional motion; the two-dimensional MEMS actuator comprises a first MEMS actuator providing at least one direction of torsional motion and a second MEMS actuator providing at least one direction of torsional motion; the second MEMS actuator is positioned in the first MEMS actuator, and the torsional directions of the first MEMS actuator and the second MEMS actuator are mutually orthogonal; the active tunable mirror is supported by a second MEMS actuator.
Furthermore, the first MEMS actuator comprises an outer frame and two symmetrically arranged outer torsion beams, the second MEMS actuator comprises an inner frame and two symmetrically arranged inner torsion beams, the outer frame is connected with the inner frame through the outer torsion beams, and the inner frame is fixedly connected with the active tunable mirror surface through the inner torsion beams; the outer torsion beam and the inner torsion beam are orthogonal to each other, the first MEMS actuator twists around the outer torsion beam, and the second MEMS actuator drives the active tunable mirror to twist around the inner torsion beam through the inner torsion beam.
The first MEMS actuator comprises an outer frame, a first substrate and two outer torsion beams, wherein the first substrate is positioned in the outer frame, the two outer torsion beams are symmetrically arranged, the outer frame is connected with and supports the first substrate through the outer torsion beams, and a hollowed area is arranged in the middle of the first substrate;
the second MEMS actuator comprises an inner frame, a second substrate and two inner torsion beams, wherein the second substrate is positioned in the inner frame, the two inner torsion beams are symmetrically arranged, the inner frame is connected with and supports the second substrate through the inner torsion beams, and the active tunable mirror surface is fixed in the second substrate; the inner frame is located at the edge position of the first substrate, the inner torsion beam and the outer torsion beam are orthogonal to each other, the first MEMS actuator twists around the outer torsion beam, and the second MEMS actuator drives the active tunable mirror to twist around the inner torsion beam through the inner torsion beam.
Further, the first and second MEMS actuators employ piezoelectric actuation, electrostatic actuation, or electromagnetic actuation.
The first MEMS actuator is driven by electromagnetism, and two permanent magnets are symmetrically arranged on the outer side of the outer frame and used for driving the first MEMS actuator; the first MEMS actuator twists around the outer torsion beam, namely a slow axis, which is marked as a Y axis;
coils are distributed in the first substrate, the coils are led out through the outer torsion beam and are divided into a feedback coil and a driving coil, the driving coil generates Lorentz force through coupling with an external permanent magnet to realize driving of the first substrate, and the feedback coil realizes feedback of the movement frequency and the movement angle of the first substrate by utilizing the electromagnetic induction phenomenon;
the pair of permanent magnets provides a constant magnetic field, a Lorentz force acting on the first MEMS actuator can be generated by applying a modulated alternating current signal with a specific waveform through the driving coil, so that the outer torsion beam of the first MEMS actuator is twisted in the Y direction and drives the outer frame of the second MEMS actuator and the active tunable mirror to realize integral deflection in the Y direction, and the feedback and driving control of the deflection action of the first MEMS actuator are realized through an electric signal generated by the electromagnetic induction phenomenon of the feedback coil;
the second MEMS actuator is driven by piezoelectric and is twisted around the inner torsion beam, namely a fast axis which is marked as an X axis; symmetrically arranging the piezoelectric driving structures at the bottoms of the inner frames on two sides of the inner torsion beam or directly bonding and combining the second MEMS actuator and the external piezoelectric driving material;
the piezoelectric driving structure consists of an upper electrode layer, a lower electrode layer and a piezoelectric film material between the upper electrode layer and the lower electrode layer; the wires of the upper and lower electrodes are led out from the edge of the inner frame; the second MEMS actuator leads out a lead through an electrode of the piezoelectric driving structure, applies a modulated voltage signal with a specific waveform, and enables the inner torsion beam to drive the active tunable mirror surface to realize X-direction deflection under a torsional resonance mode according to a piezoelectric driving principle;
or the second MEMS actuator and the external piezoelectric driving material are bonded and combined, and a modulating voltage signal is applied through a lead led out from the piezoelectric driving material to drive the external piezoelectric driving structure to vibrate, so that the internal torsion beam drives the active tunable mirror surface to realize X-direction deflection under a torsional resonance mode;
the feedback mechanism of the second MEMS actuator is achieved by the piezo-electric effect characteristic of piezoelectric materials: the piezoelectric film material deposited at the connecting part of the inner torsion beam and the inner frame is used for picking up the electric signal change generated by the deformation of the piezoelectric material caused by the deflection of the inner torsion beam, so that the angle and the motion frequency feedback in the X direction are realized; or a feedback coil is manufactured on the back of the second substrate, and the angle and the motion frequency of the inner frame in the X torsion direction are fed back by utilizing the electromagnetic induction phenomenon.
Further, the active tunable mirror comprises a MEMS mirror and a mirror actuator on the back of the MEMS mirror, and the mirror actuator is driven by adopting piezoelectricity;
the mirror surface actuator consists of two electrode layers and a piezoelectric thin film material between the two electrode layers;
the mirror surface actuator can generate a prestress acting on the MEMS reflecting mirror surface in a self-adaptive manner, and the dynamic deformation of the MEMS reflecting mirror surface is improved by active adjustment, so that the dynamic high optical flatness of the reflecting mirror surface is ensured; the specific method comprises the following steps: an electrode layer lead of the mirror surface actuator is led out through the inner torsion beam, an alternating current signal with a specific waveform is applied to the two electrode layers through the lead by utilizing the inverse piezoelectric effect of the piezoelectric material, the piezoelectric film material can deform and apply prestress to the MEMS reflecting mirror surface, the fluctuation of the micro-mirror during high-speed scanning is limited, and the high optical flatness of the mirror surface dynamic state is ensured.
The active tunable mirror comprises a MEMS mirror and a mirror actuator on the back of the MEMS mirror; the mirror surface actuator is an electrothermal driving structure and consists of a heating electrode layer and a substrate film layer or two film layers made of film materials with different thermal expansion coefficients and the heating electrode layer between the two film layers; the lead of the heating electrode layer is led out through the inner torsion beam, the characteristic that materials with high thermal expansion coefficients can deflect towards materials with low thermal expansion coefficients is utilized, electric signals are applied through the lead to generate joule heat and conduct the joule heat to the two thin film layers, the two thin film layers deflect and stress according to the difference of the thermal expansion coefficients, the fluctuation of the mirror surface is limited when the micro-mirror scans at high speed, the dynamic deformation of the MEMS reflecting mirror surface is improved, and the high optical flatness of the mirror surface is ensured.
The active tunable mirror comprises a MEMS mirror and a mirror actuator on the back of the MEMS mirror; the mirror surface actuator is an electric driving structure and consists of two non-contact electrodes;
the wires of the two electrodes are led out through the inner torsion beam, and the electrostatic force between the electrodes is utilized to apply electric signals to the two electrodes through the wires, so that the electrostatic force can be generated between the electrodes, the fluctuation of the mirror surface of the micro-mirror during high-speed scanning is limited, the dynamic deformation of the MEMS reflecting mirror surface is improved, and the dynamic high optical flatness of the mirror surface is ensured.
The piezoelectric film material is any one of lead zirconate titanate, zinc oxide, polyvinylidene fluoride, aluminum nitride or a composite material consisting of a thermoplastic polymer and an inorganic piezoelectric material. The MEMS reflecting mirror surface is made of a thin film material; the MEMS reflecting mirror surface is deposited with a reflecting coating material, and the coating material adopts a metal or dielectric film lamination.
The beneficial effects of the invention are as follows: the invention combines the MEMS actuator on the back of the MEMS reflecting mirror surface into an active tunable mirror surface, the mirror actuator can generate a prestress acting on the MEMS reflecting mirror surface in a self-adaptive manner, and the mirror actuator can be actively adjusted to improve the dynamic deformation of the MEMS reflecting mirror surface and ensure the high dynamic optical flatness of the reflecting mirror surface, so that the design constraint of synchronously increasing the scanning frequency, the scanning angle and the diameter of the reflecting mirror surface is solved under the condition of reducing the load of the MEMS reflecting mirror surface as much as possible. The 2D MEMS actuator of the invention comprises a first MEMS actuator and a second MEMS actuator supporting a central active tunable mirror, wherein the two actuators are twisted around a fast axis (X) direction and a slow axis (Y) direction which are orthogonal to each other, so that two-dimensional deflection is provided for the active tunable mirror, and a system scanning framework with high integration is ensured.
Drawings
FIG. 1 is a schematic structural diagram of a MEMS micro-mirror scanning system of embodiment 1;
FIG. 2 is an assembly diagram of the MEMS micro-mirror scanning system of embodiment 1;
FIG. 3 is a first schematic view of an assembly of the MEMS micro-mirror scanning system of embodiment 2;
FIG. 4 is a second schematic view of the assembly of the MEMS micro-mirror scanning system of embodiment 2;
FIG. 5 is a schematic diagram of the structure of a first MEMS actuator and a second MEMS actuator;
FIG. 6 is a schematic view of a second MEMS actuator and an external piezoelectric driving material bonded together;
FIG. 7 is a schematic diagram of the fabrication of a feedback coil on the back side of the inner frame;
FIG. 8 is a schematic diagram of the operation of the MEMS micro-mirror scanning system;
FIG. 9 is a first schematic structural diagram of a piezoelectric mirror actuator;
FIG. 10 is a schematic diagram of a second piezoelectric mirror actuator;
FIG. 11 is a schematic structural diagram of a piezoelectric mirror actuator;
FIG. 12 is a first schematic view of an electro-thermally driven mirror actuator;
FIG. 13 is a second schematic structural view of an electro-thermally driven mirror actuator;
FIG. 14 is a third schematic structural view of an electro-thermally driven mirror actuator;
FIG. 15 is a fourth schematic structural view of an electro-thermally driven mirror actuator;
FIG. 16 is a first schematic view of an electrostatically driven mirror actuator;
FIG. 17 is a second schematic structural diagram of an electrostatically driven mirror actuator;
FIG. 18 is a third schematic view of an electrostatically driven mirror actuator;
1-a first MEMS actuator, 2-a second MEMS actuator, 3-an active tunable mirror, 4-a MEMS mirror, 5-a mirror actuator, 6-an outer torsion beam, 7, 20-an inner frame, 8-an inner torsion beam, 9-an outer frame, 10-a piezo-driven top electrode layer, 11-a piezo-driven bottom electrode layer, 12-a piezo-film material, 13-a drive coil, 14-a second substrate, 15-a permanent magnet, 16-a first substrate, 17-a piezo-driven structure, 18-a feedback coil, 19-a piezo-film material, 21-a laser, 22-a laser scanning pattern, 23-a top film layer, 24-an intermediate electrode layer, 25-a bottom film layer, 26-a heat generating electrode layer, 27-a base film layer, 28-an electrostatic driven bottom electrode, 29-an electrostatic driven top electrode, 30-a support cavity, 31-a feedback coil, 32-an external piezo-driven material.
Detailed Description
The invention provides an MEMS (micro-electromechanical system) micromirror scanning system with an active tunable mirror, which structurally comprises the active tunable mirror; a two-dimensional (2D) MEMS actuator providing two-degree-of-freedom torsional motion. The active tunable mirror structure includes: the MEMS mirror surface actuator can generate a prestress acting on the MEMS mirror surface in a self-adaptive manner, and can be actively adjusted to improve the dynamic deformation of the MEMS mirror surface and ensure the dynamic high optical flatness of the mirror surface; the 2D MEMS actuator includes a first MEMS actuator and a second MEMS actuator supporting a central active tunable mirror, twisted about fast (X) and slow (Y) axis directions orthogonal to each other, ensuring a high integration of the system scanning architecture. The dynamic deformation of the reflector can be improved under the condition of reducing the load of the MEMS reflector as much as possible, so that the high dynamic optical flatness of the reflector can be ensured under the condition of maintaining smaller device volume, and the design constraint of synchronously increasing the scanning frequency, the scanning angle and the diameter of the reflector is solved.
The technical scheme of the invention is further explained by adding figures and specific embodiments.
Example 1
As shown in fig. 1, a MEMS micro-mirror scanning system with an active tunable mirror comprises an active tunable mirror 3 and a two-dimensional MEMS actuator capable of providing two-degree-of-freedom torsional motion; the two-dimensional MEMS actuator comprises a first MEMS actuator 1 providing at least one directional torsional motion and a second MEMS actuator 2 providing at least one directional torsional motion; the second MEMS actuator 2 is positioned in the first MEMS actuator 1, and the torsion directions of the first MEMS actuator 1 and the second MEMS actuator 2 are mutually orthogonal; an active tunable mirror 3 is supported by a second MEMS actuator 2.
In this embodiment, the first MEMS actuator 1 and the second MEMS actuator 2 are coupled in one plane, and the active tunable mirror 3 is independently designed and then combined on the second MEMS actuator 2, as shown in fig. 2. The first MEMS actuator 1 comprises an outer frame 9 and two symmetrically arranged outer torsion beams 6, the second MEMS actuator 2 comprises an inner frame 7 and two symmetrically arranged inner torsion beams 8, the outer frame 9 is connected with the inner frame 7 through the outer torsion beams 6, and the inner frame 7 is fixedly connected with the active tunable mirror surface 3 through the inner torsion beams 8; the outer torsion beam 6 and the inner torsion beam 8 are orthogonal to each other, the first MEMS actuator 1 twists around the outer torsion beam 6, and the second MEMS actuator 2 drives the active tunable mirror 3 to twist around the inner torsion beam through the inner torsion beam 8.
Example 2
A MEMS micro-mirror scanning system with an active tunable mirror comprises an active tunable mirror 3 and a two-dimensional MEMS actuator capable of providing two-degree-of-freedom torsional motion; the two-dimensional MEMS actuator comprises a first MEMS actuator 1 providing at least one direction of torsional motion and a second MEMS actuator 2 providing at least one direction of torsional motion; the second MEMS actuator 2 is positioned in the first MEMS actuator 1, and the torsion directions of the first MEMS actuator 1 and the second MEMS actuator 2 are mutually orthogonal;
in the embodiment, the first MEMS actuator 1, the second MEMS actuator 2 and the active tunable mirror 3 are respectively and independently designed and then combined, as shown in fig. 3; or the first MEMS actuator 1 is designed independently, and the second MEMS actuator 2 and the active tunable mirror 3 are coupled in one plane and combined on the first MEMS actuator 1, as shown in fig. 4;
the second MEMS actuator 2 is located within the first MEMS actuator 1; an active tunable mirror 3 is located within the second MEMS actuator 2, supported by the second MEMS actuator 2.
As shown in fig. 5, the first MEMS actuator 1 includes an outer frame 9, a first substrate 16 located inside the outer frame 9, and two outer torsion beams 6 symmetrically disposed, where the outer frame 9 is connected to and supports the first substrate 16 through the outer torsion beams 6, respectively, and a hollow area is disposed in the middle of the first substrate 16;
the second MEMS actuator 2 includes an inner frame 20, a second substrate 14 located inside the inner frame 20, and two inner torsion beams 8 symmetrically arranged, the inner frame 20 is connected and supports the second substrate 14 through the inner torsion beams 8, respectively, and the active tunable mirror 3 is fixed inside the second substrate 14; the inner frame 20 is located at an edge position on the first substrate 16, the inner torsion beam 8 and the outer torsion beam 6 are orthogonal to each other, the first MEMS actuator 1 twists around the outer torsion beam 6, and the second MEMS actuator 2 drives the active tunable mirror 3 to twist around the inner torsion beam through the inner torsion beam 8.
The first MEMS actuator 1 and the second MEMS actuator 2 are driven by piezoelectric, electrostatic or electromagnetic driving.
The first MEMS actuator 1 is driven by electromagnetism, and two permanent magnets 15 are symmetrically arranged on the outer side of the outer frame and used for driving the first MEMS actuator 1; the permanent magnet 15 can be made of alnico, ferrite, samarium cobalt, neodymium iron boron and the like; the first MEMS actuator 1 twists around the outer torsion beam, namely a slow axis, which is marked as a Y axis;
coils are distributed in the first substrate 16 and are led out through the outer torsion beam 6, the coils are divided into a feedback coil 18 and a driving coil 13, the driving coil 13 is coupled with an external permanent magnet 15 to generate Lorentz force to drive the first substrate 16, and the feedback coil 18 utilizes the electromagnetic induction phenomenon to realize the feedback of the motion frequency and the angle of the first substrate 16;
a pair of permanent magnets 15 provides a constant magnetic field, a modulated alternating current signal with a specific waveform is applied through a driving coil 13, a lorentz force acting on the first MEMS actuator 1 is generated, so that an outer torsion beam 6 of the first MEMS actuator 1 is twisted in the Y direction and drives an outer frame of the second MEMS actuator 2 and the active tunable mirror surface 3 to realize integral deflection in the Y direction, and feedback and driving control of deflection action of the first MEMS actuator 1 are realized through an electric signal generated by an electromagnetic induction phenomenon of a feedback coil 18;
the second MEMS actuator 2 is driven by piezoelectricity and twists around the inner torsion beam, namely a fast axis which is marked as an X axis; symmetrically arranging the piezoelectric driving structures 17 at the bottoms of the inner frames on two sides of the inner torsion beam or directly bonding and combining the second MEMS actuator 2 and the external piezoelectric driving material 32;
the piezoelectric driving structure 17 is composed of an upper electrode layer, a lower electrode layer and a piezoelectric film material between the upper electrode layer and the lower electrode layer; the wires of the upper and lower electrodes are led out from the edge of the inner frame; the second MEMS actuator 2 leads out a lead through an electrode of the piezoelectric driving structure 17, applies a modulated voltage signal with a specific waveform, and enables the inner torsion beam 8 to drive the active tunable mirror surface 3 to realize X-direction deflection under a torsional resonance mode according to a piezoelectric driving principle;
or the second MEMS actuator 2 and the external piezoelectric driving material 32 are adhesively combined, as shown in fig. 6; a modulation voltage signal is applied through a lead led out from the piezoelectric driving material 32 to drive the external piezoelectric driving structure 32 to vibrate, so that the internal torsion beam 8 drives the active tunable mirror surface 3 to realize X-direction deflection under a torsional resonance mode; the external piezoelectric driving structure 32 can be a PZT piezoelectric ceramic block or a PZT piezoelectric ceramic plate.
The feedback mechanism of the second MEMS actuator 2 is achieved by the piezoelectric effect of the piezoelectric material characteristic of the positive piezoelectricity: the piezoelectric film material 19 deposited at the connecting part of the inner torsion beam 8 and the inner frame 20 picks up the electric signal change generated by the deformation of the piezoelectric material caused by the deflection of the inner torsion beam 8, and realizes the angle and motion frequency feedback in the X direction; or the feedback coil 31 is made on the back side of the second substrate 14, as shown in fig. 7; the angle and the motion frequency feedback of the inner frame 20 in the X torsion direction are realized by utilizing the electromagnetic induction phenomenon.
As shown in fig. 8, when the laser 21 emits laser light to the active tunable mirror 3 while the first MEMS actuator 1 and the second MEMS actuator 2 are driven and closed-loop controlled in the above-described manner, a line-by-line scanning laser light scanning pattern 22 can be generated. Meanwhile, the generated laser scanning pattern can be sampled through the photoelectric sensor, the motion information of the substrate and the inner frame is calculated, and the motion feedback of the substrate and the inner frame is realized.
The materials of the second substrate 14, the first substrate 16, the outer frame and the inner frame are silicon, glass fiber epoxy resin FR-4, shape memory alloy SMA or amorphous alloy; the coil is made of high-conductivity metal materials, including copper or aluminum.
The active tunable mirror 3 comprises an MEMS mirror 4 and a mirror actuator 5 on the back of the MEMS mirror 4, and the mirror actuator 5 is driven by piezoelectricity;
the mirror actuator 5 is composed of two electrode layers and a piezoelectric thin film material between the two electrode layers; as shown in fig. 9 to 11, the mirror actuator 5 is composed of a top electrode layer 10, a bottom electrode layer 11, and a piezoelectric thin film material 12 between the top electrode layer and the bottom electrode layer, the bottom electrode layer 11 is a whole or divided into N irregular sub-regions, the size of the top electrode layer 10 and the size of the bottom electrode layer 11 are smaller than or equal to the size of the MEMS mirror 4, and the diameter of the MEMS mirror 4 may be larger than 2mm; (ii) a In fig. 9, the bottom electrode 11 is a unitary body; in fig. 10, the bottom electrode layer is irregular N sub-regions;
the mirror surface actuator 5 can generate a prestress acting on the MEMS mirror surface in a self-adaptive manner, and the prestress is actively adjusted to improve the dynamic deformation of the MEMS mirror surface 4 and ensure high optical flatness of the mirror surface dynamic state; the specific method comprises the following steps: the electrode layer lead of the mirror surface actuator 5 is led out through the inner torsion beam 8, and by utilizing the inverse piezoelectric effect of the piezoelectric material, an alternating current signal with a specific waveform is applied to the two electrode layers through the lead, so that the piezoelectric film material can deform and apply prestress to the MEMS reflecting mirror surface 4, the fluctuation of the micro-mirror during high-speed scanning is limited, and the high optical flatness of the mirror surface dynamic state is ensured. The bottom electrode layer 11 is divided into N irregular sub-regions, the direction and the size of the deformation or the mechanical stress of the piezoelectric material can be controlled by utilizing the irregular arrangement of the bottom electrode layer 11, and according to the deformation of the MEMS mirror surface 4 in different regions, voltage signals with different sizes are applied to the inner electrodes or the bottom electrodes in different regions to generate prestress for improving the dynamic deformation of the MEMS mirror surface 4, so that the high optical flatness of the mirror surface dynamic state can be adjusted more accurately.
Example 3
A MEMS micro-mirror scanning system with an active tunable mirror comprises an active tunable mirror 3 and a two-dimensional MEMS actuator capable of providing two-degree-of-freedom torsional motion; the two-dimensional MEMS actuator structure is the same as in embodiment 1 except that the active tunable mirror 3 includes a MEMS mirror 4 and a mirror actuator 5 on the back of the MEMS mirror 4; the mirror actuator 5 is an electrothermal driving structure, and is composed of a heat-generating electrode layer 26 and a substrate thin film layer 27, as shown in fig. 12; or two thin film layers made of thin film materials having different thermal expansion coefficients and a heat generating electrode layer between the two thin film layers, as shown in fig. 13, 14 and 15. In this embodiment, the MEMS actuator 5 is composed of a top thin film layer 23 and a bottom thin film layer 25 made of thin film materials with different thermal expansion coefficients, and a heat generating electrode layer 24 between the top and bottom thin film layers, and the top thin film layer 23, the bottom thin film layer 25 and the middle heat generating electrode layer 24 are integrated as shown in fig. 13; or all the regions are divided into irregular N sub-regions as shown in FIGS. 14 and 15; the lead of the heating electrode layer is led out through the inner torsion beam 8, the characteristic that materials with high thermal expansion coefficients can deflect towards materials with low thermal expansion coefficients is utilized, electric signals are applied through the lead to generate joule heat and conduct the joule heat to the two thin film layers, the two thin film layers deflect and stress according to the difference of the thermal expansion coefficients, the fluctuation of the mirror surface is limited when the micro-mirror scans at high speed, the dynamic deformation of the MEMS reflector surface 4 is improved, and the high optical flatness of the mirror surface is ensured.
Example 4
A MEMS micro-mirror scanning system with an active tunable mirror comprises an active tunable mirror 3 and a two-dimensional MEMS actuator capable of providing two-degree-of-freedom torsional motion; the two-dimensional MEMS actuator structure is the same as in embodiment 1 except that the active tunable mirror 3 includes a MEMS mirror 4 and a mirror actuator 5 on the back of the MEMS mirror 4; the mirror actuator 5 is an electrostatic driving structure composed of a top electrode 29 and a bottom electrode 28 which are not in contact, as shown in fig. 16 to 18; in this embodiment, the top electrode 29 and the bottom electrode 28 are installed in the supporting cavity 30, and are respectively located at the top and the bottom of the supporting cavity 30, and are supported by the supporting cavity 30, so as to ensure that the two electrodes do not contact (the supporting cavity 30 may also adopt other forms, and only needs to support the two electrodes, so that the two electrodes do not contact), and the top electrode 29 is located at the back of the MEMS mirror 4;
the leads of the two electrodes are led out through the inner torsion beam 8, and the electrostatic force between the electrodes is utilized to apply electric signals to the two electrodes through the leads, so that the electrostatic force can be generated between the electrodes, the fluctuation of the mirror surface when the micro-mirror scans at high speed is limited, the dynamic deformation of the MEMS reflecting mirror surface 4 is improved, and the dynamic high optical flatness of the mirror surface is ensured.
In the above embodiments, the electrodes are made of metal materials, such as: platinum, titanium, and the like; the piezoelectric thin film material 12 is made of any one of lead zirconate titanate, zinc oxide, polyvinylidene fluoride, aluminum nitride, or a composite material composed of a thermoplastic polymer and an inorganic piezoelectric material.
The MEMS mirror 4 is made of a thin film material, such as a silicon nitride film, or other thin film materials, such as silicon dioxide, silicon oxide, silicon, etc.; a reflective coating material is deposited on the MEMS mirror 4, and the coating material is a metal or dielectric film stack.
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art, having the benefit of this disclosure, may effect numerous modifications thereto and changes may be made without departing from the scope of the invention in its aspects.
Claims (10)
1. A MEMS micro-mirror scanning system with an active tunable mirror is characterized by comprising an active tunable mirror (3) and a two-dimensional MEMS actuator capable of providing two-degree-of-freedom torsional motion; the two-dimensional MEMS actuator comprises a first MEMS actuator (1) providing at least one direction of torsional movement and a second MEMS actuator (2) providing at least one direction of torsional movement; the second MEMS actuator (2) is positioned in the first MEMS actuator (1), and the torsion directions of the first MEMS actuator (1) and the second MEMS actuator (2) are mutually orthogonal; the active tunable mirror (3) is supported by a second MEMS actuator (2).
2. The MEMS micro-mirror scanning system with an active tunable mirror surface according to claim 1, wherein the first MEMS actuator (1) comprises an outer frame (9) and two outer torsion beams (6) symmetrically arranged, the second MEMS actuator (2) comprises an inner frame (7) and two inner torsion beams (8) symmetrically arranged, the outer frame (9) is connected to the inner frame (7) through the outer torsion beams (6), the inner frame (7) is fixedly connected to the active tunable mirror surface (3) through the inner torsion beams (8); the outer torsion beam (6) and the inner torsion beam (8) are orthogonal to each other, the first MEMS actuator (1) twists around the outer torsion beam (6), and the second MEMS actuator (2) drives the active tunable mirror surface (3) to twist around the inner torsion beam through the inner torsion beam (8).
3. The MEMS micromirror scanning system with an active tunable mirror according to claim 1, wherein the first MEMS actuator (1) comprises an outer frame (9), a first substrate (16) inside the outer frame (9), and two outer torsion beams (6) symmetrically arranged, the outer frame (9) is connected to and supports the first substrate (16) through the outer torsion beams (6), respectively, the first substrate (16) has a hollowed area in the middle;
the second MEMS actuator (2) comprises an inner frame (20), a second substrate (14) positioned inside the inner frame (20), and two inner torsion beams (8) which are symmetrically arranged, wherein the inner frame (20) is connected with and supports the second substrate (14) through the inner torsion beams (8), and the active tunable mirror (3) is fixed in the second substrate (14); the inner frame (20) is located at the edge position of the first substrate (16), the inner torsion beam (8) and the outer torsion beam (6) are orthogonal to each other, the first MEMS actuator (1) twists around the outer torsion beam (6), and the second MEMS actuator (2) drives the active tunable mirror (3) to twist around the inner torsion beam through the inner torsion beam (8).
4. The MEMS micromirror scanning system with active tunable mirror according to claim 3, characterized in that the first and second MEMS actuators (1, 2) employ piezo-electric, electrostatic or electromagnetic drive.
5. The MEMS micromirror scanning system with actively tunable mirror of claim 4, wherein the first MEMS actuator (1) is driven by electromagnetic, and two permanent magnets (15) are symmetrically placed on the outer side of the outer frame for driving the first MEMS actuator (1); the first MEMS actuator (1) twists around the outer twisting beam (6), namely a slow axis which is marked as a Y axis;
coils are distributed in the first substrate (16), the coils are led out through the outer torsion beam (6), the coils are divided into a feedback coil (18) and a driving coil (13), the driving coil (13) is coupled with an external permanent magnet (15) to generate Lorentz force to drive the first substrate (16), and the feedback coil (18) realizes the feedback of the motion frequency and the motion angle of the first substrate (16) by utilizing the electromagnetic induction phenomenon;
a pair of permanent magnets (15) provides a constant magnetic field, a Lorentz force acting on the first MEMS actuator (1) can be generated by applying a modulated alternating current signal with a specific waveform through a driving coil (13), so that an outer torsion beam (6) of the first MEMS actuator (1) is twisted in the Y direction and drives an outer frame of the second MEMS actuator (2) and the active tunable mirror (3) to realize integral deflection in the Y direction, and feedback and driving control of deflection action of the first MEMS actuator (1) are realized through an electric signal generated by an electromagnetic induction phenomenon of a feedback coil (18);
the second MEMS actuator (2) is driven by piezoelectricity and twists around the inner torsion beam (8), namely a fast axis which is marked as an X axis; symmetrically arranging piezoelectric driving structures (17) at the bottoms of the inner frames on two sides of the inner torsion beam or directly bonding and combining a second MEMS actuator (2) and an external piezoelectric driving material (32);
the piezoelectric driving structure (17) is composed of an upper electrode layer, a lower electrode layer and a piezoelectric film material between the upper electrode layer and the lower electrode layer; the wires of the upper and lower electrodes are led out from the edge of the inner frame; a lead is led out of the second MEMS actuator (2) through an electrode of the piezoelectric driving structure (17), a modulated voltage signal with a specific waveform is applied, and according to the piezoelectric driving principle, the inner torsion beam (8) drives the active tunable mirror surface (3) to realize X-direction deflection under a torsional resonance mode;
or the second MEMS actuator (2) and the external piezoelectric driving material (32) are bonded and combined, and a modulating voltage signal is applied through a lead led out from the piezoelectric driving material (32) to drive the external piezoelectric driving structure (32) to vibrate, so that the internal torsion beam (8) drives the active tunable mirror surface (3) to realize X-direction deflection under a torsional resonance mode;
the feedback mechanism of the second MEMS actuator (2) is achieved by the piezoelectric effect characteristic of piezoelectric materials: the piezoelectric film material (19) deposited at the connecting part of the inner torsion beam (8) and the inner frame (20) is used for picking up the electric signal change generated by the deformation of the piezoelectric material caused by the deflection of the inner torsion beam (8) and realizing the angle and motion frequency feedback in the X direction; or a feedback coil (31) is manufactured on the back surface of the second substrate (14), and the angle and the motion frequency of the inner frame (20) in the X torsion direction are fed back by utilizing the electromagnetic induction phenomenon.
6. The MEMS micro-mirror scanning system with the active tunable mirror surface as claimed in claim 3, wherein the active tunable mirror surface (3) comprises a MEMS mirror surface (4) and a mirror actuator (5) on the back of the MEMS mirror surface (4), the mirror actuator (5) is driven by piezoelectric;
the mirror surface actuator (5) is composed of two electrode layers and a piezoelectric film material between the two electrode layers;
the mirror surface actuator (5) can generate a prestress acting on the MEMS mirror surface in a self-adaptive manner, and the prestress is actively adjusted to improve the dynamic deformation of the MEMS mirror surface (4) and ensure the dynamic high optical flatness of the mirror surface; the specific method comprises the following steps: an electrode layer lead of the mirror surface actuator (5) is led out through the inner torsion beam (8), alternating current signals with specific waveforms are modulated on the two electrode layers through the lead by utilizing the inverse piezoelectric effect of the piezoelectric material, the piezoelectric film material can deform and exert prestress on the MEMS reflecting mirror surface (4), the fluctuation of the mirror surface is limited when the micro mirror scans at high speed, and the high optical flatness of the mirror surface dynamic state is ensured.
7. The MEMS micro-mirror scanning system with an active tunable mirror, as claimed in claim 3, wherein the active tunable mirror (3) comprises a MEMS mirror surface (4) and a mirror actuator (5) on the back of the MEMS mirror surface (4); the mirror surface actuator (5) is an electrothermal driving structure and consists of a heating electrode layer and a substrate film layer or two film layers made of film materials with different thermal expansion coefficients and a heating electrode layer between the two film layers; the lead of the heating electrode layer is led out through the inner torsion beam (8), electric signals are applied through the lead to generate joule heat and are conducted to the two thin film layers, the two thin film layers cause local stress due to mismatch of thermal expansion coefficients, fluctuation of the mirror surface is limited when the micro-mirror scans at high speed, dynamic deformation of the MEMS reflecting mirror surface (4) is improved, and high optical flatness of the mirror surface is ensured.
8. The MEMS micro-mirror scanning system with an active tunable mirror, as claimed in claim 3, wherein the active tunable mirror (3) comprises a MEMS mirror surface (4) and a mirror actuator (5) on the back of the MEMS mirror surface (4); the mirror surface actuator (5) is an electrostatic driving structure and consists of a flat capacitor structure and parallel electrode plates thereof;
the leads of the two electrodes are led out through the inner torsion beam (8), and the electrostatic force between the electrodes is utilized to apply electric signals to the two electrodes through the leads, so that the electrostatic force can be generated between the electrodes, the fluctuation of the mirror surface when the micro-mirror scans at high speed is limited, the dynamic deformation of the MEMS reflecting mirror surface (4) is improved, and the dynamic high optical flatness of the mirror surface is ensured.
9. The MEMS micromirror scanning system with an actively tunable mirror as claimed in claim 6, wherein the piezoelectric thin film material is any one of lead zirconate titanate, zinc oxide, polyvinylidene fluoride, aluminum nitride or composite material composed of thermoplastic polymer and inorganic piezoelectric material.
10. The MEMS micro-mirror scanning system with an active tunable mirror according to claim 6 or 7 or 8, characterized in that the MEMS mirror surface (4) is made with standard MEMS or semiconductor process; and a reflective coating material is deposited on the MEMS reflecting mirror surface (4), and the coating material adopts a metal or dielectric film lamination.
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