CN115489580A - Crystal bar turnover vehicle of single crystal furnace - Google Patents

Abstract

The embodiment of the invention provides a single crystal furnace crystal bar turnover vehicle, which belongs to the related technical field of crystal bars and is used for the crystal bars, and the turnover vehicle comprises: a turnover vehicle body; the clamping mechanism is connected with the upper surface of the turnover vehicle body and can rotate, and the clamping mechanism is used for clamping the crystal bar and driving the crystal bar to rotate; the bearing mechanism is connected with the upper surface of the turnover vehicle body and is positioned on the side surface of the clamping mechanism, so that the bearing mechanism can bear the crystal bar which is separated from the clamping mechanism and is clamped by the clamping mechanism; the wire cutting mechanism is connected with the upper surface of the turnover vehicle body and positioned on the side surface of the bearing mechanism and used for cutting off the crystal bar in the bearing mechanism from head to tail; the technical effect of shortening the process flow during the processing of the crystal bar is achieved.

Description

Crystal bar turnover vehicle of single crystal furnace

Technical Field

The invention relates to the technical field of crystal bars, in particular to a crystal bar turnover vehicle of a single crystal furnace.

Background

The czochralski silicon growing furnace is the main equipment for preparing the monocrystalline silicon material, and is also called a monocrystalline silicon growing furnace or a monocrystalline furnace. The equipment melts the high-purity polysilicon raw material contained in the quartz crucible in a graphite heating mode, and under the protection of continuous low-pressure argon, the silicon crystal gradually crystallizes on a fine seed crystal to form a single crystal at proper temperature and growth speed.

In the prior art, a traditional czochralski type hard-axis monocrystalline silicon growth furnace generally takes out a monocrystalline silicon rod from a cavity of an auxiliary furnace chamber through a manipulator, then takes a crystal bar from the manipulator through a manually operated crystal taking trolley, and then transfers the crystal bar to a next process point through the operated crystal taking trolley, wherein in the next process, firstly, the crystal bar needs to be cut off from the head and the tail, and then the subsequent operation of the crystal bar can be carried out.

Therefore, the technical problems of the prior art are as follows: the technological process of processing the crystal bar is long.

Disclosure of Invention

The embodiment of the application provides a single crystal furnace crystal bar turnover vehicle, which solves the technical problem of long technological process of crystal bar processing in the prior art; the technical effect of shortening the process flow during the processing of the crystal bar is achieved.

The embodiment of the application provides a single crystal growing furnace crystal bar turnover vehicle acts on the crystal bar, and the turnover vehicle includes: a turnover vehicle body; the clamping mechanism is connected with the upper surface of the turnover vehicle body and can rotate, and the clamping mechanism is used for clamping the crystal bar and driving the crystal bar to rotate; the bearing mechanism is connected with the upper surface of the turnover vehicle body and is positioned on the side surface of the clamping mechanism, so that the bearing mechanism can bear the crystal bar which is separated from the clamping mechanism; and the line cutting mechanism is connected with the upper surface of the turnover vehicle body and is positioned on the side surface of the bearing mechanism, and the line cutting mechanism is used for cutting the crystal bars in the bearing mechanism end to end.

Preferably, the transfer cart further comprises: the switching mechanism is located on the side face of the clamping mechanism and connected with the upper surface of the turnover vehicle body, the switching mechanism is connected with the clamping mechanism in a rotating mode, and the switching mechanism is used for driving the clamping mechanism to rotate.

Preferably, the clamping mechanism includes: the connecting plate is connected with the upper surface of the turnover vehicle body, is rotatably connected with the conversion mechanism, and can rotate under the action of the conversion mechanism; the clamping assembly is positioned on the side face of the connecting plate, is connected with the connecting plate and is used for clamping a crystal bar; and the bearing component is positioned below the clamping mechanism, the bearing component and the clamping component are positioned on the same side face of the connecting plate, the bearing component is connected with the connecting plate, and the bearing component is used for bearing the crystal bar.

Preferably, the conversion mechanism includes: the rotating shaft can be connected with a driving source; the hold-in range, the hold-in range cup joints the connecting plate, just the hold-in range cup joints the pivot drives fixture upset through the hold-in range.

Preferably, the carrying mechanism includes: the bearing seat is used for bearing the crystal bar; the lifting mechanism acts on the bearing seat, so that the lifting mechanism drives the bearing seat to lift; and the rotating mechanism acts on the bearing seat and is connected with the lifting mechanism, so that the rotating mechanism drives the bearing seat to rotate.

Preferably, the elevating mechanism includes: a moving assembly; the connecting rod assembly comprises a plurality of connecting rods, the connecting rods are in a cross shape and are connected at the cross positions of the connecting rods through external hinges, and the bottom end of the connecting rod assembly is connected with the moving assembly, so that the height of the connecting rod assembly can be adjusted under the moving action of the moving assembly; and the top plate is positioned above the connecting rod assembly, the first end surface of the top plate is connected with the upper end of the connecting rod assembly, and the second end surface of the top plate is connected with the bearing seat.

Preferably, the rotating mechanism includes: the revolving stage, the side of revolving stage is connected with a power supply, the revolving stage with bear the seat and connect, the revolving stage drives bear the seat and rotate.

Preferably, the moving assembly includes: the lead screw nut assembly is connected with the turnover vehicle body; the linear guide rail assembly is connected with the connecting rod assembly, and the linear guide rail assembly drives the connecting rod assembly to lift under the action of the screw nut assembly.

Preferably, the thread cutting mechanism includes: a mobile station; the line cutting power assembly is installed on the moving platform and moves under the action of power of the moving platform, so that the crystal bar is cut end to end.

Preferably, the mobile station includes: the first mobile station can be connected with a power source and drives the first mobile station to move through the power source; the second mobile station, the moving direction of second mobile station with the moving direction of first mobile station is perpendicular, the second mobile station with first mobile station is connected, a power supply is connected to the second mobile station, through the power supply drive the second mobile station removes, the second mobile station with the power component is connected is cut to the line, the second mobile station drives thereby the power component is cut to the line removes to the crystal bar carries out the end to the end and cuts.

One or more technical solutions in the embodiments of the present application have at least one or more of the following technical effects:

1. in the embodiment of the application, the crystal bar comes out of the hard shaft single crystal furnace, is clamped by the clamping mechanism in the transfer vehicle and is borne by the bearing mechanism, and finally is cut end to end by the wire cutting mechanism, so that the crystal bar is prevented from being taken out of the single crystal furnace and then sent to the next processing point, the operation of cutting the end to end of the crystal bar is needed, and the technical problem of long process flow of crystal bar processing in the prior art is solved; the technical effect of shortening the process flow during the processing of the crystal bar is achieved.

2. In this application embodiment, the crystal bar gets brilliant operation through the turnover vehicle, can avoid the manual work to get the brilliant difference that has the operation proficiency simultaneously, when leading to the manual work to get the brilliant, the crystal bar easily collides, influences the quality of crystal bar to be favorable to the crystal bar to get into the operation behind the next process.

3. In the embodiment of the application, the crystal bar is covered by the housing by the dust or powder generated when the crystal bar is cut off from the head to the tail in the transfer process, and the cut-off crystal bar is collected by the collecting tank from the head to the tail, so that the cleanness of the surrounding environment is facilitated.

Drawings

FIG. 1 is a schematic structural diagram of a single crystal furnace ingot trolley in an embodiment of the present application;

FIG. 2 is a schematic view of the structure of FIG. 1 from another perspective;

FIG. 3 is a top view of FIG. 1;

FIG. 4 is a cross-sectional view of FIG. 3 with the cover removed;

FIG. 5 is an enlarged view of FIG. 4 at B;

FIG. 6 is a left side view of FIG. 1 with the cover removed;

FIG. 7 isbase:Sub>A sectional view taken along line A-A of FIG. 3;

FIG. 8 is a schematic view of a structure of a connection between a susceptor and a crystal bar;

FIG. 9 is a schematic view of another structure of the susceptor and the ingot bar.

Reference numerals are as follows:

100. a turnover vehicle body; 110. collecting tank; 200. a switching mechanism; 210. a rotating shaft; 220. a synchronous belt; 300. a clamping mechanism; 310. a holding assembly; 320. a clamping assembly; 330. a connecting plate; 331. a first connecting plate; 332. a second connecting plate; 3321. a connecting member; 400. a carrying mechanism; 410. a lifting mechanism; 411. a moving assembly; 4111. a lead screw nut assembly; 41111. a lead screw; 41112. a nut; 4112. a linear guide assembly; 41121. a slider; 41122. a guide rail; 412. a connecting rod assembly; 4121. a connecting rod; 413. a top plate; 420. a rotation mechanism; 421. a rotating table; 430. a bearing seat; 431. v-shaped; 432. crystal support; 500. a wire cutting mechanism; 510. a mobile station; 511. a first mobile station; 512. a second mobile station; 520. a linear cutting power assembly; 521. a driving wheel; 522. a driven wheel; 523. cutting a line; 600. crystal bar; 700. and (4) a housing.

Detailed Description

The numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings). In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be considered as limiting the present application.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In order to better understand the technical solution, the technical solution will be described in detail with reference to the drawings and the specific embodiments.

In order to solve the technical problem of long process flow of crystal bar processing in the prior art, the embodiment of the application provides a crystal bar turnover vehicle of a single crystal furnace. As shown in the attached figures 1-6, a single crystal furnace crystal bar turnover vehicle acts on a crystal bar 600. The transfer cart includes a transfer cart body 100, a switching mechanism 200, a gripping mechanism 300, a carrying mechanism 400, and a thread cutting mechanism 500. The cart body 100 supports the switching mechanism 200, the chucking mechanism 300, the supporting mechanism 400, and the wire cutting mechanism 500. The switching mechanism 200 is used for driving the clamping mechanism 300 to rotate. The clamping mechanism 300 can clamp the ingot 600. The carrier mechanism 400 may receive the ingot 600 released from the clamp mechanism 300. The wire cutting mechanism 500 is used for cutting the crystal bar 600 in the bearing mechanism 400 end to end. The conversion mechanism 200 is located on the side face of the clamping mechanism 300, the conversion mechanism 200 is connected with the upper surface of the turnover vehicle body 100, the conversion mechanism 200 is rotatably connected with the clamping mechanism 300, and the conversion mechanism 200 is used for driving the clamping mechanism 300 to rotate. The clamping mechanism 300 is connected with the upper surface of the turnover vehicle body 100, the clamping mechanism 300 can rotate, and the clamping mechanism 300 is used for clamping the crystal bar 600 and driving the crystal bar 600 to rotate. The carrying mechanism 400 is connected with the upper surface of the turnover vehicle body 100, and the carrying mechanism 400 is located at the side of the clamping mechanism 300, so that the carrying mechanism 400 can receive the crystal bar 600 which is released from the clamping mechanism 300. The line cutting mechanism 500 is connected with the upper surface of the turnover vehicle body 100, the line cutting mechanism 500 is located on the side surface of the bearing mechanism 400, and the line cutting mechanism 500 is used for cutting the crystal bar 600 in the bearing mechanism 400 end to end. Preferably, the center of the thread cutting mechanism 500, the center of the supporting mechanism 400, and the center of the clamping mechanism 300 are sequentially located on the same straight line from front to back. Therefore, after the crystal bar 600 passes through the switching mechanism 200, the clamping mechanism 300, the bearing mechanism 400 and the wire cutting mechanism 500 on the turnover vehicle body 100, the crystal bar 600 can quickly enter the next process, so that the crystal bar 600 can be quickly removed from the single crystal furnace, and therefore, the crystal taking automation degree is high, and the operation efficiency is high.

It should be noted that the turnover vehicle body 100 has the functions of conventional AGV laser guidance and automatic charging, and can realize unattended operation. Specifically, the turnover vehicle has a self-positioning function and can be butted with a hard-axis single crystal furnace manipulator (not shown). In other words, the transfer car body 100 can scan the transfer environment with the 3D laser sensor around the car body and then generate a map for navigation, and illuminate the object with the laser sensor before approaching the robot connected to the single crystal furnace, thereby measuring the distance to the object. Be equipped with transceiver (not shown in the figure) on turnover vehicle body 100, thereby every transceiver launches the pulse light fast, and measure the pulse of reflection in order to confirm the distance between manipulator and the turnover vehicle body 100, be convenient for adjust turnover vehicle body 100's position in real time, realize that the turnover vehicle can be smoothly from the purpose of taking off crystal bar 600 on the hard axis single crystal growing furnace manipulator, thereby be favorable to crystal bar 600 to get into in the next process, it is high to get brilliant operating efficiency, degree of automation is high, avoid manual operation to get the brilliant risk of breaking apart or colliding with crystal bar 600, the big not enough of the operation degree of difficulty.

The switching mechanism 200, as shown in fig. 1-3, is configured to drive the clamping mechanism 300 to rotate, so as to provide power for the rotation of the clamping mechanism 300. The conversion mechanism 200 is located on the side surface of the clamping mechanism 300, the conversion mechanism 200 is connected with the upper surface of the turnover vehicle body 100, the conversion mechanism 200 is connected with the clamping mechanism 300 in a rotating mode, the conversion mechanism 200 is used for driving the clamping mechanism 300 to rotate, and therefore the conversion mechanism 200 can convert the crystal bar 600 from a vertical state to a horizontal state. In one embodiment, the switching mechanism 200 includes a rotating shaft 210 and a timing belt 220. The shaft 210 may be connected to a driving source. The synchronous belt 220 is sleeved on the connecting plate 330, and the synchronous belt 220 is sleeved on the rotating shaft 210, and the clamping mechanism 300 is driven to turn through the synchronous belt 220. The shaft 210 may be connected to a driving source, so that the shaft 210 can be driven to rotate by the driving source. Specifically, the driving source may be a servo motor driving a speed reducer to rotate, and the rotating shaft 210 is connected to the speed reducer, so that the driving source can drive the rotating shaft 210 to rotate. Therefore, the switching mechanism 200 can drive the clamping mechanism 300 to rotate through the action of the timing belt 220 and the rotating shaft 210. It should be noted that the structure of the conversion mechanism 200 can be in various forms, as long as the conversion mechanism 200 can drive the clamping mechanism 300 to rotate, so that the ingot 600 falls onto the supporting mechanism 400 from the vertical state to the horizontal state, and there are no other limitations on the conversion mechanism 200. Further, the timing belt 220 may be replaced with a belt or a chain, and the timing belt 220 is preferably a belt 220 because the advantages of belt drive and chain drive are combined with each other.

The clamping mechanism 300, as shown in fig. 1-4, can clamp the ingot 600 coming out of the robot of the single crystal furnace by the clamping mechanism 300. In one embodiment, the clamping mechanism 300 includes a retainer assembly 310, a clamping assembly 320, and a connecting plate 330. The connecting plate 330 is connected to the upper surface of the cart body 100, the connecting plate 330 is rotatably connected to the conversion mechanism 200, and the connecting plate 330 is rotatable by the conversion mechanism 200. The clamping assembly 320 is located at the side of the connection plate 330, and the clamping assembly 320 is connected with the connection plate 330, and the clamping assembly 320 is used for clamping the crystal bar 600. The support component 310 is located below the clamping component 320, the support component 310 and the clamping component 320 are located on the same side of the connecting plate 330, the support component 310 is connected with the connecting plate 330, and the support component 310 is used for supporting the crystal bar 600. It should be noted that, before the clamping component 320 on the turnover vehicle touches the ingot 600 on the manipulator of the hard axis single crystal furnace, both the clamping component 320 and the supporting component 310 are opened, after the turnover vehicle reaches the final butt joint position, the manipulator of the hard axis single crystal furnace drives the ingot 600 to move downwards, and after the ingot 600 falls on the supporting component 310, the clamping component 320 above the supporting component 310 clamps the ingot 600. Meanwhile, a corresponding clamp (not shown) on the hard shaft single crystal furnace manipulator is loosened, and the turnover vehicle moves for a section to finish the unloading process of the crystal bar 600 from the hard shaft single crystal furnace manipulator.

It is worth explaining that, as shown in fig. 1, 2, and 4, the connection plate 330 includes a first connection plate 331 and a second connection plate 332. And a connecting member 3321 is provided at a side of the second connecting plate 332. The first connecting plate 331 is located above the second connecting plate 332, and the first connecting plate 331 is connected to both the holding member 320 and the supporting member 310. The side of the first connection plate 331 is connected to the conversion mechanism 200. When the transmission in the conversion mechanism 200 is the transmission of the synchronous belt 220, the connecting element 3321 and the synchronous belt 220 are sleeved, so that the first connecting plate 331 is driven to rotate around the second connecting plate 332 under the action of the synchronous belt 220 and the rotating shaft 210, and the crystal bar 600 is supported by the supporting mechanism 400 after being converted from the vertical state to the horizontal state. Further, the first connecting plate 331 and the first end of the second connecting plate 332 are rotatably connected, and the second end of the second connecting plate 332 is connected to the surface of the turnover vehicle body 100. The first connecting plate 331 and the second connecting plate 332 may be connected by a rotating shaft, or the first connecting plate 331 and the second connecting plate 332 may be connected by a hinge. As long as the first connecting plate 331 can rotate around the second connecting plate 332, so that the crystal bar 600 clamped by the clamping assembly 320 can be loaded by the loading mechanism 400 after being converted from the vertical state to the lying state.

The carrying mechanism 400, as shown in fig. 1, 3 and 4, can receive the ingot 600 released from the clamping mechanism 300 by the carrying mechanism 400. In one embodiment, the carrier mechanism 400 includes a lifting mechanism 410, a rotating mechanism 420, and a carrier 430. The susceptor 430 is used for carrying the ingot 600. The lifting mechanism 410 acts on the susceptor 430, so that the lifting mechanism 410 drives the susceptor 430 to lift. The rotating mechanism 420 acts on the carrying seat 430, and the rotating mechanism 420 is connected to the lifting mechanism 410, so that the rotating mechanism 420 drives the carrying seat 430 to rotate. The positional relationship between the lifting mechanism 410 and the rotating mechanism 420 may be such that the lifting mechanism 410 is located below the rotating mechanism 420, or the lifting mechanism 410 is located above the rotating mechanism 420. When the ingot 600 is driven by the conversion mechanism 200 to convert the ingot 600 from the vertical state to the horizontal state, the lifting mechanism 410 moves upward to support the horizontally-lying ingot 600. And then is rotated by the rotating mechanism 420 so that the head and the tail of the ingot 600 can be cut by the wire cutting mechanism 500. The turnover vehicle body 100 is provided with a collecting tank 110, and the collecting tank 110 is located below the linear cutting mechanism 500. Therefore, after the head and the tail of the crystal bar 600 are cut off by the line cutting mechanism 500, the cut-off head and tail of the crystal bar 600 enter the collecting tank 110 and are uniformly sent to a processing point for processing through the collecting tank 110.

Further, as shown in fig. 4 and 5, the lifting mechanism 410 includes a moving assembly 411, a connecting rod assembly 412, and a top plate 413. The link assembly 412 includes a plurality of connecting rods 4121, and the plurality of connecting rods 4121 are of a cross type, and are connected by an external hinge at the intersection of the connecting rods 4121, and the bottom end of the link assembly 412 is connected to the moving assembly 411, so that the height of the link assembly 412 becomes adjustable by the movement of the moving assembly 411. The top plate 413 is located above the connecting rod assembly 412, a first end surface of the top plate 413 is connected to the upper end of the connecting rod assembly 412, and a second end surface of the top plate 413 is connected to the bearing seat 430. It should be noted that in one embodiment, the lifting mechanism 410 is located below the rotating mechanism 420. The movement assembly 411 includes a lead screw nut assembly 4111 and a linear guide assembly 4112. The lead screw nut component 4111 is connected with the turnover vehicle body 100. The linear guide assembly 4112 is connected with the connecting rod assembly 412, and the linear guide assembly 4112 drives the connecting rod assembly 412 to ascend and descend under the action of the lead screw nut assembly 4111. It should be explained that, among other things, the screw nut assembly 4111 includes a screw 41111 and a nut 41112. Nut 41112 is threaded on lead screw 41111, and nut 41112 is connected to linear guide assembly 4112 via a connector. At least two linear guide assemblies 4112 are provided, and the linear guide assemblies 4112 are symmetrically distributed on both sides of the connecting rod assembly 412. The linear guide assembly 4112 includes a slider 41121 and a guide 41122. One end surface of the slider 41121 is connected to the link assembly 412, and the other end surface corresponding to the slider 41121 is connected to the end surface of the top plate 413 through the guide rail 41122, or the other end surface corresponding to the slider 41121 is connected to the cart body 100 through the guide rail 41122. It should be noted that there are at least two groups of connecting rods 4121, two groups of connecting rods 4121 are symmetrically distributed on two sides of the moving assembly 411, two groups of connecting rods 4121 are distributed up and down, two groups of connecting rods 4121 are in a cross shape, and are hinged at the intersection of the two groups of connecting rods 4121 through an external hinge, wherein a first end of one connecting rod 4121 is connected with the slider 41121, and a second end of one connecting rod 4121 is hinged with an end surface of the top plate 413. A first end of another connecting rod 4121 is connected to the slider 41121, and a second end of the other connecting rod 4121 is hinged to the cart body 100. Thereby when nut 41112 in lead screw nut assembly 4111 moves along lead screw 41111, drive slider 41121 and slide along guide rail 41122 for the height of connecting rod 4121 becomes adjustable, thereby the height-adjustable of roof 413 is favorable to crystal bar 600 to be supported by bearing mechanism 400 after overturning through switching mechanism 200.

Further, as shown in fig. 4 and 6, the rotating mechanism 420 includes a rotating table 421. The side of the rotating platform 421 is connected to a power source, the rotating platform 421 is connected to the carrying base 430, and the rotating platform 421 drives the carrying base 430 to rotate. Therefore, when the ingot 600 is turned over from the conversion mechanism 200 to a proper position, the lifting mechanism 410 of the supporting mechanism 400 lifts the supporting base 430, so that the supporting base 430 can support the ingot 600. Then, the crystal bar 600 is driven to rotate through the rotating mechanism 420, when the crystal bar 600 is cut by the line cutting mechanism 500, the crystal bar 600 is pressed through external force, and the phenomenon that the crystal bar 600 rotates when the crystal bar 600 is cut end to end by the line cutting mechanism 500 to influence the end to end cutting of the crystal bar 600 is avoided.

When the lifting mechanism 410 is positioned below the rotating mechanism 420, the rotating table 421 is positioned on the upper end surface of the top plate 413, and the rotating table 421 contacts the upper end surface of the top plate 413. The end surface of the bearing seat 430 is V-shaped 431, and the V-shaped 431 is contacted with the crystal bar 600, so that the crystal bar 600 can be stably supported by the bearing seat 430. In addition, in order to make line cutting mechanism 500 when cutting the end to end of crystal bar 600, avoid the crystal bar to take place to rotate and influence the end to crystal bar 600, concrete mode that can adopt has, in an embodiment, as shown in fig. 8, be provided with brilliant support 432 in the top of bearing seat 430, brilliant support 432 is connected with the V-arrangement 431 that bears on seat 430, and be stained with glue on brilliant support 432, make crystal bar 600 place on brilliant support 432 after, by gluing between brilliant support 432 and the crystal bar 600, thereby crystal bar 600 is difficult for taking place to rock and is favorable to line cutting mechanism 500 cutting end to crystal bar 600. In another embodiment, as shown in fig. 9, a card cover is disposed above the carrier 430, and the card cover corresponds to the carrier 430, so that the boule 600 is supported by the V-shaped 431 on the carrier 430 after contacting the V-shaped 431 on the carrier 430, and the card cover above the carrier 430 can prevent the boule 600 from shaking together with the carrier 430, thereby being beneficial to the end-to-end cutting of the boule 600 by the line cutting mechanism 500. Which is advantageous to save the time for transferring the whole ingot 600 to the next process. It should be noted that the size of the ingot 600 is divided into 6 inches, 8 inches and 12 inches, wherein the 6 inches and 8 inches of the ingot 600 are elongated, and when the ingot 600 is placed on the susceptor 430 and the end of the ingot 600 is cut, the ingot 600 can be fixed to prevent the ingot 600 from shaking by using the wafer holder 430 or the clamping cover. The shape is short thick for 12 cun crystal bar 600, and this moment crystal bar 600 is heavier to make the crystal bar 600 put the back focus on bearing seat 430 more stable, even do not set up brilliant support 431 and do not set up the card cover corresponding with bearing seat 430 above bearing seat 430, crystal bar 600 also is difficult for taking place to rock on bearing seat 430 to be favorable to line cutting mechanism 500 to cutting off the head and the tail of crystal bar 600. The time spent in the process of transferring the crystal bar 600 is saved, and the process flow is favorably shortened in the processing process of the crystal bar 600.

Regarding the position relationship of the lifting mechanism 410 between the rotating mechanisms 420, in another embodiment, when the lifting mechanism 410 is located above the rotating mechanism 420, at this time, the first end surface of the rotating table 421 in the rotating mechanism 420 is connected to the transferring cart body 100, the second end surface of the rotating table 421 is connected to the lifting mechanism 410, the first end surface of the carrier base 430 is connected to the lifting mechanism 410, and the second end surface of the carrier base 430 is connected to the ingot 600, so that the purpose of the carrier mechanism 400 that can be lifted and rotated can be achieved. There are also many possible forms for the lifting mechanism 410, which are not illustrated here. In addition, in order to avoid that the length of the connecting rod assembly 412 is too long and is not beneficial to the implementation of the lifting function of the bearing mechanism 400, a frame may be disposed inside the turnover vehicle body 100, so that the lifting mechanism 410 and the rotating mechanism 420 are lifted along the central axis direction of the vertical direction of the frame.

The wire cutting mechanism 500, as shown in fig. 2, 3 and 7, the wire cutting mechanism 500 is used for cutting the ingot 600 in the carrying mechanism 400 end to end. In one embodiment, the wire cutting mechanism 500 includes a mobile station 510 and a wire cutting power assembly 520. The wire cutting power assembly 520 is mounted on the moving table 510, and the wire cutting power assembly 520 moves under the power of the moving table 510, so as to cut the ingot 600 end to end. It should be noted that, in the process that the turnover vehicle drives the ingot 600 to move forward, the direction of the forward movement is the direction of the arrow in fig. 7. In addition, when the wire cutting mechanism 500 in the transfer cart cuts the end of the ingot 600, dust or powder is generated. When turnover vehicle body 100 drives crystal bar 600 and moves forward, under the existence effect of wind-force, wind can blow to the opposite direction of arrow in figure 7 to wind can cut the dust or the powder that the in-process produced to crystal bar 600 and blow off, and the dust or the powder that blow off enter into operational environment easily, thereby make appear dust or powder influence external environment easily in the environment on every side. Therefore, in order to ensure the cleanness of the external environment, the casing 700 can be installed outside the line cutting mechanism 500, the casing 700 can collect dust or powder under the action of wind, and the head and the tail of the cut crystal bar 600 can be collected by matching the material receiving groove 110 on the turnover vehicle, so that the cleanness of the surrounding environment is facilitated.

Further, as shown in fig. 3, the mobile station 510 includes a first mobile station 511 and a second mobile station 512. The first mobile station 511 may be connected to a power source, and the first mobile station 511 is driven to move by the power source. The moving direction of the second moving table 512 is perpendicular to the moving direction of the first moving table 511, the second moving table 512 is connected with the first moving table 511, the second moving table 512 can be connected with a power source, the second moving table 512 is driven by the power source to move, the second moving table 512 is connected with the wire cutting power assembly 520, and the second moving table 512 drives the wire cutting power assembly 520 to move so as to cut the crystal bar 600 end to end. It should be noted that when the first movable table 511 moves on the transfer cart body 100, the ingot 600 is prevented from being hit by the wire cutting mechanism 500 by the rotation of the rotation mechanism 420 in the carrier mechanism 400. The movement of the second moving stage 512 facilitates the line cutting power assembly 520 to cut the ingot 600. The power source connected to the second movable stage 512 may be a linear module, which is installed on the first movable stage 511, and the linear module is connected to the second movable stage 512, so that the linear module drives the second movable stage 512 to move. The wire cutting power assembly 520 includes a drive wheel 521, a driven wheel 522, and a cutting wire 523. The driving wheel 521 rotates under the action of a power source to drive the driven wheel 522 to rotate, and the cutting line 523 is wound on the driving wheel 521 and the driven wheel 522, so that the cutting line 523 cuts the ingot 600 end to end under the moving action of the on-line cutting power assembly 520.

Working principle/steps:

as shown in fig. 1 to 7, after the ingot 600 is detached from the hard axis single crystal furnace robot, it is held by the holding assembly 320, and the ingot 600 is transferred from the vertical state to the horizontal state by the transfer mechanism 200 and then is supported by the supporting mechanism 400. Under the effect of rotary mechanism 420 in load-bearing mechanism 400, drive crystal bar 600 and take place to rotate to line cutting mechanism 500 can cut the head and the tail of crystal bar 600, and the head and the tail material that is cuted off is collected through collecting vat 110, and cover 700 can be collected the powder or the dust that produce when cutting the head and the tail of crystal bar 600.

The technical effects are as follows:

1. in the embodiment of the application, the crystal bar 600 comes out of the hard shaft single crystal furnace, is clamped by the clamping mechanism 300 in the transfer vehicle and is loaded by the loading mechanism 400, and finally the crystal bar 600 is cut end to end by the line cutting mechanism 500, so that the operation that the crystal bar 600 is cut end to end after being taken out of the single crystal furnace and then is sent to the next processing point is avoided, and the technical problem of long process flow of crystal bar 600 processing in the prior art is solved; the technical effect of shortening the process flow during processing the crystal bar 600 is achieved.

2. In the embodiment of this application, brilliant operation is got through the turnover vehicle to crystal bar 600, can avoid the manual work to get the brilliant difference that has the operation proficiency simultaneously, when leading to the manual work to get the brilliant, crystal bar 600 bumps easily, influences crystal bar 600's quality to be favorable to the operation after crystal bar 600 gets into next process.

3. In the embodiment of the present application, the dust or powder generated when the end of the ingot 600 is cut off during the transfer process is covered by the cover 700, and the end of the cut-off ingot 600 is collected by the collecting tank 110, thereby facilitating the cleanness of the surrounding environment.

While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (10)

1. The utility model provides a single crystal growing furnace crystal bar turnover vehicle, acts on the crystal bar, its characterized in that, turnover vehicle includes:

a turnover vehicle body;

the clamping mechanism is connected with the upper surface of the turnover vehicle body and can rotate, and the clamping mechanism is used for clamping the crystal bar and driving the crystal bar to rotate;

the bearing mechanism is connected with the upper surface of the turnover vehicle body and is positioned on the side surface of the clamping mechanism, so that the bearing mechanism can bear the crystal bar which is separated from the clamping mechanism and is clamped by the clamping mechanism; and

the line cutting mechanism is connected with the upper surface of the turnover vehicle body and located on the side face of the bearing mechanism, and the line cutting mechanism is used for cutting the crystal bars in the bearing mechanism end to end.

2. The single crystal furnace ingot turnover vehicle of claim 1, wherein the turnover vehicle further comprises:

the transfer mechanism is located on the side face of the clamping mechanism and connected with the upper surface of the turnover vehicle body, the transfer mechanism is rotationally connected with the clamping mechanism, and the transfer mechanism is used for driving the clamping mechanism to rotate.

3. The single crystal furnace ingot turnover vehicle of claim 1, wherein the clamping mechanism comprises:

the connecting plate is connected with the upper surface of the turnover vehicle body, is rotatably connected with the conversion mechanism, and can rotate under the action of the conversion mechanism;

the clamping assembly is positioned on the side face of the connecting plate, is connected with the connecting plate and is used for clamping a crystal bar; and

the supporting subassembly, the supporting subassembly is located fixture's below, just the supporting subassembly with the centre gripping subassembly all is located same side of connecting plate, the supporting subassembly with the connecting plate is connected, the supporting subassembly is used for carrying out the bearing to the crystal bar.

4. The single crystal furnace ingot turnover vehicle of claim 2, wherein the conversion mechanism comprises:

the rotating shaft can be connected with a driving source;

the hold-in range, the hold-in range cup joints the connecting plate, just the hold-in range cup joints the pivot drives fixture upset through the hold-in range.

5. The single crystal furnace ingot turnover vehicle of claim 1, wherein the carrying mechanism comprises:

the bearing seat is used for bearing the crystal bar;

the lifting mechanism acts on the bearing seat, so that the lifting mechanism drives the bearing seat to lift; and

the rotating mechanism acts on the bearing seat and is connected with the lifting mechanism, so that the rotating mechanism drives the bearing seat to rotate.

6. The single crystal furnace ingot turnover vehicle as set forth in claim 5, wherein the lifting mechanism comprises:

a moving assembly;

the connecting rod assembly comprises a plurality of connecting rods, the connecting rods are in a cross shape and are connected at the cross positions of the connecting rods through external hinges, and the bottom end of the connecting rod assembly is connected with the moving assembly, so that the height of the connecting rod assembly can be adjusted under the moving action of the moving assembly; and

the top plate is located above the connecting rod assembly, the first end face of the top plate is connected with the upper end of the connecting rod assembly, and the second end face of the top plate is connected with the bearing seat.

7. The single crystal furnace ingot turnover vehicle of claim 5, wherein the rotating mechanism comprises:

the revolving stage, the side of revolving stage is connected with a power supply, the revolving stage with bear the seat and connect, the revolving stage drives bear the seat and rotate.

8. The single crystal furnace ingot turnover vehicle of claim 6, wherein the moving assembly comprises:

the screw nut assembly is connected with the turnover vehicle body;

the linear guide rail assembly is connected with the connecting rod assembly, and the linear guide rail assembly drives the connecting rod assembly to lift under the action of the screw nut assembly.

9. The single crystal furnace ingot turnover vehicle of claim 1, wherein the wire cutting mechanism comprises:

a mobile station;

the line cutting power assembly is installed on the moving platform and moves under the action of power of the moving platform, so that the crystal bar is cut end to end.

10. The single crystal furnace ingot turnover vehicle as set forth in claim 9, wherein said moving table comprises:

the first mobile station can be connected with a power source and drives the first mobile station to move through the power source;

the second mobile station, the moving direction of second mobile station with the moving direction of first mobile station is perpendicular, the second mobile station with first mobile station is connected, a power supply is connected to the second mobile station, through the power supply drive the second mobile station removes, the second mobile station with the power component is connected is cut to the line, the second mobile station drives thereby the power component is cut to the line removes to the crystal bar carries out the end to the end and cuts.

Images