CN115480347B - Method for improving perpendicularity of array waveguide fiber and slab waveguide in wavelength division multiplexer - Google Patents
Method for improving perpendicularity of array waveguide fiber and slab waveguide in wavelength division multiplexer Download PDFInfo
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- CN115480347B CN115480347B CN202210662728.5A CN202210662728A CN115480347B CN 115480347 B CN115480347 B CN 115480347B CN 202210662728 A CN202210662728 A CN 202210662728A CN 115480347 B CN115480347 B CN 115480347B
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000000835 fiber Substances 0.000 title claims abstract description 23
- 239000013307 optical fiber Substances 0.000 claims abstract description 27
- 238000003384 imaging method Methods 0.000 claims abstract description 13
- 238000002360 preparation method Methods 0.000 claims abstract description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 7
- 230000036544 posture Effects 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000000708 deep reactive-ion etching Methods 0.000 claims description 3
- 238000011161 development Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3664—2D cross sectional arrangements of the fibres
- G02B6/3672—2D cross sectional arrangements of the fibres with fibres arranged in a regular matrix array
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
- G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
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Abstract
The invention provides a method for improving perpendicularity of an array waveguide fiber and a slab waveguide in a wavelength division multiplexer, which comprises the following steps: s1, preparing an input slab waveguide and an output slab waveguide by using a micro-nano through hole array preparation method; s2, respectively placing CCD cameras in the axial directions of the input slab waveguide and the output slab waveguide; s3, respectively adjusting the input slab waveguide, the output slab waveguide and the corresponding CCD camera to be parallel; s4, respectively inserting the input end and the output end of the optical fiber in the array waveguide into the input slab waveguide and the output slab waveguide, respectively imaging light spots on the output surfaces of the input end and the output end of the optical fiber by using the imaging surfaces of the two CCD cameras, and respectively adjusting the included angle between the input end of the optical fiber and the input slab waveguide and the included angle between the output end of the optical fiber and the output slab waveguide to be right angles according to the light spot positions. The invention can effectively improve the perpendicularity of the array waveguide fiber, the input slab waveguide and the output slab waveguide in the wavelength division multiplexer.
Description
Technical Field
The invention relates to the technical field of micro-nano device preparation, in particular to a method for improving perpendicularity of an array waveguide fiber and a slab waveguide in a wavelength division multiplexer.
Background
The wavelength division multiplexer has wide application, and is especially suitable for use in optical communication network, optical information transmission and processing system, spectrum measurement, sensing, laser level instrument, integrated photoelectronic device and other core device or key parts. As shown in fig. 1, the wavelength division multiplexer is generally composed of five parts, i.e., an input waveguide 1, an output waveguide 2, an input slab waveguide 3, an output slab waveguide 4, and an array waveguide 5. To maximize beam energy transfer and reduce fiber insertion loss, it is desirable to increase the perpendicularity between the arrayed waveguide fiber and the input/output slab waveguide. At present, no better solution is available to solve the problem, so it is important to find a method for improving the perpendicularity between the arrayed waveguide fiber and the input/output slab waveguide in the wavelength division multiplexer.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, and provides a method for improving the perpendicularity of an array waveguide fiber and a flat waveguide in a wavelength division multiplexer, so that the perpendicularity between the array waveguide fiber and an input/output flat waveguide meets the requirement of maximum transmission beam energy.
In order to achieve the above purpose, the present invention adopts the following specific technical scheme:
The invention provides a method for improving perpendicularity between an array waveguide fiber and a slab waveguide in a wavelength division multiplexer, which comprises the following steps:
s1, preparing an input slab waveguide and an output slab waveguide by using a micro-nano through hole array preparation method;
S2, respectively placing a first CCD camera and a second CCD camera in the axial directions of the input flat waveguide and the output flat waveguide;
s3, respectively connecting reflection gratings on the input flat waveguide, the output flat waveguide, the first CCD camera and the second CCD camera; the first reflection grating and the third reflection grating form a first grating pair, and the second reflection grating and the fourth reflection grating form a second grating pair;
S4, adjusting the first grating pair to be parallel and the second grating pair to be parallel by using a laser level, and respectively adjusting the input slab waveguide to be parallel with the first CCD camera, and the output slab waveguide to be parallel with the second CCD camera;
S5, respectively inserting the input end and the output end of the optical fiber in the array waveguide into the input slab waveguide and the output slab waveguide, respectively imaging light spots on the emergent surfaces of the input end and the output end of the optical fiber by using the imaging surfaces of the first CCD camera and the second CCD camera, and respectively adjusting the included angle between the input end and the input slab waveguide of the optical fiber and the included angle between the output end and the output slab waveguide of the optical fiber to be right angles according to the light spot positions.
Preferably, the step S1 specifically includes the following steps:
s101, growing a resist layer on a substrate, coating photoresist on the resist layer and performing pre-baking;
S102, manufacturing a hole-shaped photoresist mask on the surface of the photoresist by utilizing an ultraviolet exposure development mode;
S103, transferring the pattern of the hole-shaped photoresist mask to a resist layer by utilizing wet etching solution, and then processing the circular hole groove shape of the substrate by utilizing a deep reactive ion etching method to form an input slab waveguide and an output slab waveguide.
Preferably, in step S4, the method of adjusting the parallelism of the first grating pair includes the steps of:
S41, adjusting the postures of the first reflection grating and the third reflection grating;
S42, placing a laser level at a proper position;
s43, placing a piece of white paper in the light path for observation;
S44, adjusting angles of the first reflection grating and the third reflection grating, and observing positions of all light rays on the white paper until the first reflection grating is parallel to the third reflection grating.
Preferably, in step S41, the pitch of the first reflection grating and the third reflection grating is adjusted so that the incident light and the reflected light coincide.
Preferably, in step S41, the directions of the reticles of the first and third reflection gratings are adjusted so that the diffracted light and the incident light overlap.
Preferably, in step S42, the vertical light of the laser level is taken as incident light, and is incident on the first reflection grating or the third reflection grating at a littrow angle.
Preferably, in step S43, the white paper is fixed at a position between the first reflection grating and the third reflection grating, and the lower edge of the white paper is slightly lower than the upper edges of the first reflection grating and the third reflection grating, so long as the white paper does not block the laser.
Preferably, in step S44, when all the light rays on the white paper are overlapped, the first reflection grating is parallel to the third reflection grating.
Preferably, the following steps are further included after step S5:
s6, moving the positions of the input flat waveguide and the output flat waveguide by using the five-dimensional adjusting table, adjusting the positions of the next through holes on the input flat waveguide and the output flat waveguide to be concentric with the imaging surface of the CCD camera, and adjusting the perpendicularity of the next optical fiber in the array waveguide.
The invention can obtain the following technical effects:
the invention can effectively improve the perpendicularity of the array waveguide fiber, the input slab waveguide and the output slab waveguide in the wavelength division multiplexer, and has direct important value for meeting the requirement of maximum transmission beam energy.
Drawings
FIG. 1 is a schematic diagram of a wavelength division multiplexer in the prior art;
Fig. 2 is a flow chart of a method for improving perpendicularity between an arrayed waveguide fiber and a slab waveguide in a wavelength division multiplexer according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an input slab waveguide and an output slab waveguide in an embodiment of the present invention;
FIGS. 4-7 are schematic diagrams illustrating a first grating pair parallelism adjustment method according to an embodiment of the invention;
Fig. 8 is a schematic diagram of adjusting perpendicularity between an optical fiber of an array waveguide and an input slab waveguide and an output slab waveguide in an embodiment of the present invention.
Wherein reference numerals include: an input waveguide 1, an output waveguide 2, an input slab waveguide 3, an output slab waveguide 4, an array waveguide 5, a first reflection grating 6, a second reflection grating 7 and a laser level 8.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, a detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
Fig. 2 is a flow chart of a method for improving perpendicularity between an arrayed waveguide fiber and a slab waveguide in a wavelength division multiplexer according to an embodiment of the present invention.
As shown in fig. 2, the method for improving perpendicularity between an arrayed waveguide fiber and a slab waveguide in a wavelength division multiplexer provided by the embodiment of the invention includes the following steps:
s1, preparing an input slab waveguide and an output slab waveguide by using a micro-nano through hole array preparation method.
The step S1 specifically comprises the following steps:
s101, growing a resist layer on a substrate, coating photoresist on the resist layer and performing pre-baking;
S102, manufacturing a hole-shaped photoresist mask on the surface of the photoresist by utilizing an ultraviolet exposure development mode;
S103, transferring the pattern of the hole-shaped photoresist mask to a resist layer by utilizing wet etching solution, and then processing the circular hole groove shape of the substrate by utilizing a deep reactive ion etching method to form an input slab waveguide and an output slab waveguide.
The input slab waveguide and the output slab waveguide have the same structure as shown in fig. 3.
Before step S103, post-baking is performed on the photoresist-coated substrate, so as to avoid the hole-shaped photoresist mask from being corroded by the etching solution in the etching process, and the pattern transfer failure of the hole-shaped photoresist mask is caused.
S2, respectively placing a first CCD camera and a second CCD camera in the axial directions of the input flat waveguide and the output flat waveguide.
As shown in fig. 1, a first CCD camera is provided in an inlet direction of the input slab waveguide, and a second CCD camera is provided in an outlet direction of the output slab waveguide.
The two CCD cameras are used for calibrating the perpendicularity of the optical fiber and the input/output slab waveguide.
S3, respectively connecting reflection gratings on the input flat waveguide, the output flat waveguide, the first CCD camera and the second CCD camera; the first reflection grating and the third reflection grating form a first grating pair, and the second reflection grating and the fourth reflection grating form a second grating pair.
The first reflection grating is detachably arranged on one side of the input flat waveguide, the second reflection grating is detachably arranged on one side of the output flat waveguide, the third reflection grating is detachably arranged on one side of the first CCD camera, and the fourth reflection grating is detachably arranged on one side of the second CCD camera.
And S4, adjusting the first grating pair to be parallel and the second grating pair to be parallel by using a laser level, and respectively adjusting the input slab waveguide to be parallel with the first CCD camera, and the output slab waveguide to be parallel with the second CCD camera.
Since the first reflection grating is mounted on the input slab waveguide and the third reflection grating is mounted on the first CCD camera, the input slab waveguide and the first CCD camera are parallel when the first reflection grating and the third reflection grating are adjusted to be parallel.
The parallel adjustment method of the first reflection grating and the third reflection grating is as shown in fig. 4-7:
S41, adjusting the independent postures of the first reflection grating 6 and the third reflection grating 7 respectively, wherein the method mainly comprises two aspects: the pitch of the grating and the verticality of the grating line are the first one. The laser level is placed in front of the first reflection grating 6, the position of the laser level is adjusted, and three horizontal lines can be found due to diffraction and reflection of the first reflection grating 6: the reflection lines, diffraction lines and divergent incident rays of the first reflection grating 6. Firstly, the pitching of the first reflection grating 6 is adjusted to enable incident light and reflected light to coincide, then the grating dividing direction is adjusted to enable diffraction light and incident light to coincide, and finally the posture of the first reflection grating 6 is adjusted. The posture of the third reflection grating 7 is adjusted in the same way.
As shown in fig. 4, the laser level 8 is placed at a suitable position, and the vertical light is taken as incident light ①, and the incident light enters the first reflection grating 6 at the Littrow angle of the first reflection grating 6, and at this time, the diffracted light ② of the first reflection grating 6 coincides with the incident light ①.
As shown in fig. 5, if the reflected light ③ from the first reflection grating 6 is incident on the third reflection grating 7 and there is a slight misalignment between the first reflection grating 6 and the third reflection grating 7, the incident angle of the reflected light from the first reflection grating 6 on the third reflection grating 7 is (θ+Δ), and the diffracted light ④ from the third reflection grating 7 cannot return along the path of the incident light ③. At this time, the white paper is fixed at the position a, i.e., the position between the first reflection grating 6 and the third reflection grating 7, and the lower edge of the white paper is slightly lower than the upper edge of the grating, so that the incident light ③ diffracts light ④ and the rest of second, third and fourth diffracted light ⑤⑥⑦ are separated and appear on the paper as shown in fig. 6.
S44, the angle of the third reflective grating 7 is adjusted, ③④ and the other diffraction lines ⑤⑥⑦ on the white paper are observed, when the third reflective grating 7 is adjusted to the direction that the two gratings are parallel to each other, ④ and each other diffraction line ⑤⑥⑦ are close to ③, and when all the light rays are overlapped, the two gratings are parallel as shown in FIG. 7. When the two gratings are parallel, the incident light ③ coincides with the diffracted light ④⑤⑥⑦, at which point the adjustment ends.
The output slab waveguide and the second CCD camera are regulated in parallel in the same way, and are not described herein.
S5, respectively inserting the input end and the output end of the optical fiber in the array waveguide into the input slab waveguide and the output slab waveguide, respectively imaging light spots on the emergent surfaces of the input end and the output end of the optical fiber by using the imaging surfaces of the first CCD camera and the second CCD camera, and respectively adjusting the included angle between the input end of the optical fiber and the input slab waveguide and the included angle between the output end of the optical fiber and the output slab waveguide to be right angles according to the two light spot positions.
When the input end and the output end of the optical fiber in the array waveguide are inserted into the input/output slab waveguide, the imaging surface with the cross wire of the first CCD camera and the second CCD camera is utilized to image light spots on the emergent surfaces of the input end and the output end of the optical fiber.
As shown in fig. 8, the positions of the two light spots are continuously adjusted, and when the center of the light spot coincides with the center of the cross wire, the input end of the optical fiber is perpendicular to the input slab waveguide, and the output end of the optical fiber is perpendicular to the output slab waveguide.
After step S5, the method further comprises the following steps:
s6, moving the positions of the input flat waveguide and the output flat waveguide by using the five-dimensional adjusting table, adjusting the positions of the next through holes on the input flat waveguide and the output flat waveguide to be concentric with the imaging surface of the CCD camera, and adjusting the perpendicularity of the next optical fiber in the array waveguide.
After the first optical fiber in the array waveguide is inserted, the positions of the input flat waveguide and the output flat waveguide are moved by using a five-dimensional adjusting table, the positions of the next through holes on the input flat waveguide and the output flat waveguide are adjusted to be concentric with the imaging surface of the CCD camera, and the perpendicularity adjustment of the next optical fiber in the array waveguide, the input flat waveguide and the output flat waveguide is performed.
In the description of the present specification, the description with reference to the terms "one embodiment," "a particular example," and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
The above embodiments of the present invention do not limit the scope of the present invention. Any of the various other corresponding changes and modifications made by the technical idea of the present invention should be included in the scope of the claims of the present invention.
Claims (8)
1. The method for improving the perpendicularity of the array waveguide fiber and the slab waveguide in the wavelength division multiplexer is characterized by comprising the following steps:
s1, preparing an input slab waveguide and an output slab waveguide by using a micro-nano through hole array preparation method;
S2, respectively placing a first CCD camera and a second CCD camera in the axial directions of the input flat waveguide and the output flat waveguide;
S3, connecting a first reflection grating on the input flat waveguide, connecting a second reflection grating on the output flat waveguide, connecting a third reflection grating on the first CCD camera, and connecting a fourth reflection grating on the second CCD camera; the first reflection grating and the third reflection grating form a first grating pair, and the second reflection grating and the fourth reflection grating form a second grating pair;
S4, adjusting the first grating pair to be parallel and the second grating pair to be parallel by using a laser level, and respectively adjusting the input slab waveguide to be parallel with the first CCD camera, and the output slab waveguide to be parallel with the second CCD camera;
in step S4, the method for adjusting the parallelism of the first grating pair includes the steps of:
S41, adjusting the postures of the first reflection grating and the third reflection grating;
S42, placing a laser level at a proper position;
s43, placing a piece of white paper in the light path for observation;
S44, adjusting angles of the first reflection grating and the third reflection grating, and observing positions of various light rays on the white paper until the first reflection grating is parallel to the third reflection grating;
S5, respectively inserting the input end and the output end of the optical fiber in the array waveguide into the input slab waveguide and the output slab waveguide, respectively imaging light spots on the emergent surfaces of the input end and the output end of the optical fiber by using the imaging surfaces of the first CCD camera and the second CCD camera, and respectively adjusting the included angle between the input end and the input slab waveguide of the optical fiber and the included angle between the output end and the output slab waveguide of the optical fiber to be right angles according to the light spot positions.
2. The method for improving perpendicularity of an arrayed waveguide fiber and a slab waveguide in a wavelength division multiplexer according to claim 1, wherein the step S1 specifically comprises the steps of:
s101, growing a resist layer on a substrate, coating photoresist on the resist layer and performing pre-baking;
S102, manufacturing a hole-shaped photoresist mask on the surface of the photoresist by utilizing an ultraviolet exposure development mode;
S103, transferring the pattern of the hole-shaped photoresist mask to a resist layer by utilizing wet etching solution, and then processing the circular hole groove shape of the substrate by utilizing a deep reactive ion etching method to form an input slab waveguide and an output slab waveguide.
3. The method for improving perpendicularity of an arrayed waveguide fiber and a slab waveguide in a wavelength division multiplexer according to claim 2, wherein in step S41, pitch of the first reflection grating and the third reflection grating is adjusted so that the incident light and the reflected light coincide.
4. The method of improving perpendicularity of an arrayed waveguide fiber and a slab waveguide in a wavelength division multiplexer according to claim 1, wherein in step S41, a reticle direction of the first reflection grating and a reticle direction of the third reflection grating are adjusted so that diffracted light and incident light coincide.
5. The method for improving perpendicularity of arrayed waveguide fiber and slab waveguide in a wavelength division multiplexer according to claim 1, wherein in step S42, vertical light of a laser level is used as incident light, and the incident light is incident on the first reflection grating or the third reflection grating at a littrow angle.
6. The method for improving perpendicularity of arrayed waveguide fiber and slab waveguide in a wavelength division multiplexer according to claim 1, wherein in step S43, white paper is fixed at a position between the first reflection grating and the third reflection grating, and a lower edge of the white paper is slightly lower than upper edges of the first reflection grating and the third reflection grating, in case that the white paper does not block laser.
7. The method of improving perpendicularity of an arrayed waveguide fiber and a slab waveguide in a wavelength division multiplexer according to claim 1, wherein in step S44, when all light rays on the white paper are overlapped, the first reflection grating is parallel to the third reflection grating.
8. The method for improving perpendicularity of an arrayed waveguide fiber and a slab waveguide in a wavelength division multiplexer according to claim 1, further comprising the steps of, after step S5:
s6, moving the positions of the input flat waveguide and the output flat waveguide by using the five-dimensional adjusting table, adjusting the positions of the next through holes on the input flat waveguide and the output flat waveguide to be concentric with the imaging surface of the CCD camera, and adjusting the perpendicularity of the next optical fiber in the array waveguide.
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