CN115478244A - Net tensioning equipment and control method thereof - Google Patents
Net tensioning equipment and control method thereof Download PDFInfo
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- CN115478244A CN115478244A CN202110602413.7A CN202110602413A CN115478244A CN 115478244 A CN115478244 A CN 115478244A CN 202110602413 A CN202110602413 A CN 202110602413A CN 115478244 A CN115478244 A CN 115478244A
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- 238000000034 method Methods 0.000 title claims description 34
- 230000007246 mechanism Effects 0.000 claims abstract description 169
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- 230000001276 controlling effect Effects 0.000 claims 3
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- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 238000001704 evaporation Methods 0.000 description 28
- 230000008020 evaporation Effects 0.000 description 27
- 238000010586 diagram Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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Abstract
The invention provides a net-opening device, which is used for fixing a target object on a target net frame, and comprises: the device comprises at least one pair of motion adjusting mechanisms, a first moving unit and a second moving unit, wherein each pair of motion adjusting mechanisms are arranged along a first direction and are arranged on two opposite sides of a target object in parallel; the visual device is arranged above the clamping unit and is used for acquiring the current position coordinate of the clamping unit by aligning with the marking unit; the control device is used for calculating the position deviation between the current position coordinate and the target position coordinate, and controlling the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate. The invention reduces the adjusting times of the movement adjusting mechanism, improves the adjusting efficiency of the net stretching equipment, and is beneficial to improving the net stretching operation efficiency.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a net tensioning device and a control method of the net tensioning device.
Background
The screen stretching device is a key device of an evaporation production line of OLED (organic light emitting diode) small-molecule organic materials and is mainly used for fixing an evaporation screen printing plate with high precision. The effective evaporation region (composed of pixel hole array) of the evaporation screen plate has a specific pattern. After various organic materials and inorganic materials are subjected to vacuum evaporation, a film layer with a specific pattern is formed on a glass substrate. The fixing condition of the evaporation screen printing plate is good, so that the specific pattern on the evaporation screen printing plate is correct in position and does not deform or distort in the subsequent working process.
And in the process of stretching the screen, the screen stretching equipment clamps the evaporation screen through the motion adjusting mechanism, and the vision device aligns and measures a plurality of marks on the evaporation screen to obtain a deviation value with an expected position. And adjusting the motion adjusting mechanism according to the deviation value, retesting the deviation value of the mark and the expected position by using a vision device, and adjusting the motion adjusting mechanism until the marks on the evaporation screen are all adjusted within the precision range, so that the screen expanding operation is completed.
Because the motion adjusting mechanism is influenced by factors such as reversing gaps, hysteresis loops, nonlinear intervals and the like, as shown in fig. 1, the displacement relationship between the moving unit and the clamping unit of the motion adjusting mechanism is not a linear relationship. In addition, in the wire-stretching operation, it is desirable that the difference of the stretching parameters of the movement adjusting mechanisms used is as small as possible, and actually, the movement adjusting mechanisms have mechanical installation errors, and each movement adjusting mechanism has difference. This results in different stretching parameters of the movement adjusting mechanism, and the movement adjusting mechanism cannot accurately reach the desired position, so that the number of times of adjusting the movement adjusting mechanism needs to be increased in the process of each mesh opening operation, which results in low efficiency of the mesh opening operation and influences the yield of the mesh opening equipment.
Disclosure of Invention
The invention aims to provide a net stretching device and a control method of the net stretching device, which can reduce the adjustment times of a movement adjusting mechanism and improve the efficiency of net stretching operation.
In order to achieve the above object, the present invention provides a screen stretching apparatus for fixing a target object to a target screen frame, comprising:
the motion adjusting mechanisms comprise clamping units, first moving units and marking units, the clamping units are used for clamping the target object, and the first moving units are used for moving along the first direction so as to drive the clamping units to move along the first direction;
the visual device is arranged above the clamping unit and used for acquiring the current position coordinate of the clamping unit by aligning with the marking unit;
and the control device is used for calculating the position deviation between the current position coordinate and the target position coordinate and controlling the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate.
Optionally, the web tensioning device includes a plurality of pairs of motion adjusting mechanisms, the plurality of pairs of motion adjusting mechanisms are sequentially arranged along the second direction, the motion adjusting mechanism further includes a second moving unit, the second moving unit is configured to move along the second direction, so as to drive the clamping unit and the first moving unit to move along the second direction, wherein the second direction is perpendicular to the first direction.
Optionally, the method for the control device to control the first mobile unit to move according to the position deviation further includes:
and judging whether the position deviation is smaller than an error threshold value, if not, controlling the first moving unit to move in a direction of compensating the position deviation according to the position deviation.
Optionally, the clamping unit includes first plummer, upper jaw and lower clamping jaw, the mark unit set up in the plummer, the upper jaw with the lower clamping jaw is in the lateral wall of plummer is followed the direction of height of plummer takes place relative movement, and is right target object carries out the centre gripping.
Optionally, the net tensioning device further comprises a second bearing table, which is used for bearing the motion adjusting mechanism and the visual device, and the second bearing table is a vibration reduction platform.
In addition, the invention also provides a control method of the net opening device, which comprises the following steps:
step S1: inputting the target position coordinates of the clamping unit to the control device;
step S2: the method comprises the following steps of carrying out alignment measurement on a marking unit through a vision device, and obtaining the current position coordinate of a clamping unit;
and step S3: and the control device calculates the position deviation between the current position coordinate and the target position coordinate, and controls the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate.
Optionally, the method for controlling a web tensioning device further includes: when step S1 is executed, an error threshold is input to the control device, and when step S3 is executed, the control device determines whether the position deviation is smaller than the error threshold, and if not, controls the first moving unit to move in a direction of compensating for the position deviation according to the position deviation.
Optionally, the method for controlling a web tensioning device further includes: before executing step S1, the control device performs zero calibration on the clamping unit to obtain a zero position deviation, and when executing step S3, the control device calculates the position deviation according to the zero position deviation, the current position coordinate, and the target position coordinate.
Optionally, the zero calibration step includes:
inputting theoretical position coordinates of the clamping unit in the net-tensioning device to the control device;
under the condition that the screen stretching equipment is in an idle state, the alignment measurement is carried out on the marking unit through the vision device so as to obtain the actual position coordinate of the clamping unit in the screen stretching equipment;
and the control device calculates the zero position deviation according to the actual position coordinates and the theoretical position coordinates.
Optionally, the method for controlling a web tensioning device further includes: before executing the step S1, the control device performs first direction shafting deviation calibration and second direction shafting deviation calibration on the clamping unit to obtain first direction shafting position deviation and second direction shafting position deviation, respectively, and when executing the step S3, the control device further calculates the position deviation according to the first direction shafting position deviation, the second direction shafting position deviation, the zero position deviation, the current position coordinate and the target position coordinate.
Optionally, the first direction shafting position deviation includes: the axis scaling error compensation amount of the first direction axis and the axis shifting crosstalk compensation amount of the first direction axis to the second direction axis.
Optionally, the second direction shafting position deviation includes: the second direction axis scaling error compensation amount and the second direction axis to first direction axis shift crosstalk compensation amount.
Optionally, the step of calibrating, by the control device, the first direction shafting deviation of the clamping unit includes:
under the idle state of the screen stretching equipment, the alignment measurement is carried out on the marking unit through the vision device, and a first theoretical position coordinate of the clamping unit in the screen stretching equipment is obtained;
the clamping unit is axially stepped by n steps along a first fixed step distance along a first direction, and the visual device carries out alignment measurement on the marking unit once the clamping unit moves to obtain a first actual position coordinate of the clamping unit;
subtracting the first theoretical position coordinate and the first actual position coordinate to obtain a first position deviation amount (Δ x) 1 ,Δy 1 )、(Δx 3 ,Δy 3 )、…(Δx i ,Δy i )；
By the formula
Obtaining an axis scaling error compensation quantity of the first direction axis;
by the formula
And obtaining the axial movement crosstalk compensation quantity of the second direction axis to the first direction axis.
Optionally, the step of calibrating, by the control device, the second direction shafting deviation of the clamping unit includes:
under the idle state of the screen stretching equipment, the alignment measurement is carried out on the marking unit through the vision device, and a second theoretical position coordinate of the clamping unit in the screen stretching equipment is obtained;
the clamping unit is axially stepped by n steps along a second fixed step distance along a second direction, and the visual device carries out alignment measurement on the marking unit once moving so as to obtain a second actual position coordinate of the clamping unit;
subtracting the second theoretical position coordinate and the second actual position coordinate to obtain a second position deviation amount (delta x' 1 ,Δy’ 1 )、(Δx’ 2 ,Δy’ 2 )、…、(Δx’ i ,Δy’ i )；
By the formula
Obtaining an axis scaling error compensation quantity of the second direction axis;
by the formula
And obtaining the compensation amount of the axial movement crosstalk of the first direction axis to the second direction axis.
The net tensioning device provided by the invention is used for fixing a target object on a target net frame, and comprises at least one pair of motion adjusting mechanisms, each pair of motion adjusting mechanisms are arranged along a first direction and are arranged on two opposite sides of the target object side by side, a clamping unit of each motion adjusting mechanism is used for clamping the target object, a first moving unit of each motion adjusting mechanism is used for driving the clamping unit to move along a first direction shaft, and a positioning mark is arranged on the clamping unit. The vision device is used for carrying out alignment measurement on the positioning mark so as to obtain the current position coordinate of the clamping unit and transmitting the current position coordinate to the control system. The control device is used for calculating the position deviation between the current position coordinate and the target position coordinate, and controlling the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate. According to the net stretching equipment provided by the invention, the control unit is used for calculating the position deviation between the current position coordinate and the target position coordinate, and controlling the first moving unit to move according to the position deviation, so that the moving precision of the first moving unit can be improved, the adjusting times of the motion adjusting mechanism are reduced, the adjusting efficiency of the net stretching equipment is improved, and the net stretching operation efficiency is improved.
Correspondingly, the invention also provides a control method of the net tensioning equipment, wherein the control device calculates the position deviation between the current position coordinate and the target position coordinate, and controls the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate. The adjustment times of the movement adjusting mechanism are reduced, the adjustment efficiency of the movement adjusting mechanism is improved, and the net-opening operation efficiency is improved.
In addition, the control device performs zero calibration on the clamping unit to obtain zero position deviation, and the control device calculates the position deviation according to the zero position deviation, the current position coordinates and the target position coordinates, so that the positioning accuracy of the movement adjusting mechanism can be improved.
In addition, the control device performs first direction shafting deviation calibration and second direction shafting deviation calibration on the clamping unit to respectively obtain first direction shafting position deviation and second direction shafting position deviation, and the control device further calculates the position deviation according to the first direction shafting position deviation, the second direction shafting position deviation, the zero position deviation, the current position coordinate and the target position coordinate. The positioning accuracy of the movement adjusting mechanism can be further improved.
Drawings
Fig. 1 is a diagram showing a displacement relationship between a moving unit and a holding unit of a motion adjusting mechanism.
Fig. 2 is a schematic structural diagram of a net tensioning device in the embodiment of the present invention;
FIG. 3 is a schematic view of a first motion adjustment mechanism in an embodiment of the present invention;
fig. 4 is a flowchart of a control method of a web expanding device in the embodiment of the present invention;
FIG. 5 is a flow chart of zero calibration in an embodiment of the present invention;
FIG. 6 is a schematic diagram of zero calibration of the movement adjustment mechanism in an embodiment of the present invention;
FIG. 7 is a schematic diagram of X-axis misalignment calibration in this embodiment;
FIG. 8 is a schematic diagram of Y-axis misalignment calibration in this embodiment;
wherein the reference numbers are as follows:
100-evaporating a screen printing plate; 110-effective evaporation area; 120-non-active evaporation area; 121-clamping lugs 121;
200-a motion adjustment mechanism; 210-a first motion adjustment mechanism; 211-a first X axial movement unit; 212-a first clamping unit; 212A, an upper clamping jaw; 212B-lower jaw; 213-first positioning mark; 214-a first Y-axis movement unit; 220-a second motion adjustment mechanism; 221-a second X-axis moving unit; 222-a second clamping unit; 223-second positioning mark; 224-a second Y-axis moving unit; 230-a third motion adjustment mechanism; 231-a third X-axis moving unit; 232-a third clamping unit; 233-a third positioning mark; 234-a third Y-axis moving unit; 240-a fourth motion adjustment mechanism; 241-a fourth X axial movement unit; 242-a fourth clamping unit; 243-fourth positioning mark; 244-fourth Y axial moving unit; 250-a fifth motion adjustment mechanism; 251-a fifth X axial moving unit; 252-a fifth clamping unit; 253-fifth positioning mark; 254-a fifth Y-axis moving unit; 260-a sixth motion adjustment mechanism; 261-a sixth X axial movement unit; 262-a sixth clamping unit; 263-sixth positioning marker; 264-sixth Y axial moving unit;
300-a vision device 300;
400-second carrier stage.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Fig. 2 is a schematic structural diagram of a screen stretching apparatus in this embodiment, as shown in fig. 2, the screen stretching apparatus is configured to fix a target object on a target frame, in this embodiment, the target object is an evaporation screen 100, the screen stretching apparatus includes at least one pair of motion adjusting mechanisms 200, a control device, a second carrying table 400 and a vision device 300, and each pair of motion adjusting mechanisms 200 is symmetrically distributed on two opposite side edges of the evaporation screen 100. The motion adjusting mechanism 200 includes a clamping unit for clamping the target object, a first moving unit for moving along a first direction to drive the clamping unit to move along the first direction, and a marking unit disposed on the clamping unit. The control device also judges whether the position deviation is smaller than an error threshold value before controlling the first moving unit to move according to the position deviation, and if not, the control device controls the first moving unit to move in a direction of compensating the position deviation according to the position deviation.
When the net-spreading equipment comprises a plurality of pairs of motion adjusting mechanisms 200, the plurality of pairs of motion adjusting mechanisms 200 are sequentially arranged along a second direction, the motion adjusting mechanisms 200 further comprise second moving units, the second moving units are used for moving along the second direction so as to drive the clamping units and the first moving units to move along the second direction, wherein the second direction is perpendicular to the first direction.
For ease of understanding, the first direction is hereinafter referred to as the X-axis direction and the second direction is hereinafter referred to as the Y-axis direction, in accordance with the directions shown in fig. 2. Accordingly, the first moving unit is also referred to as an X-axis moving unit, and the second moving unit is also referred to as a Y-axis moving unit. It should be understood, however, that the X-axis and Y-axis are not limiting of the present application.
In a specific implementation, the deposition screen 100 includes an effective deposition region 110 (formed by an array of pixel apertures) and a non-effective deposition region 120, a plurality of clamping lugs 121 are provided on both sides of the deposition screen 100, and the number of the clamping lugs 121 determines the number of the motion adjusting mechanisms 200.
Two symmetrical second bearing tables 400 are arranged on two sides of the evaporation screen 100 and are used for bearing the motion adjusting mechanism 200 and the vision device 300. It should be appreciated that the second carrier 400 may be a horizontal base.
In an embodiment of this embodiment, the second bearing platform 400 is a vibration reduction platform, and the vibration reduction platform is used to bear the motion adjustment mechanism 200 and the visual device 300, and the vibration reduction platform can reduce the vibration caused by the inside or outside of the stretching device. Therefore, measurement errors caused by vibration are reduced, and the net stretching device can have higher net stretching precision. The movement adjusting mechanism 200 is disposed above the second stage 400.
In the present embodiment, there are three pairs of motion adjustment mechanisms 200 on both sides of the deposition screen 100. A first motion adjustment mechanism 210, a second motion adjustment mechanism 220, a third motion adjustment mechanism 230, a fourth motion adjustment mechanism 240, a fifth motion adjustment mechanism 250, and a sixth motion adjustment mechanism 260, respectively.
The movement adjustment mechanism 200 will be described in detail with reference to the accompanying drawings, which take the first movement adjustment mechanism 210 as an example.
Fig. 3 is a schematic structural diagram of the first motion adjustment mechanism 210 in this embodiment. As shown in fig. 3, the first motion adjustment mechanism 210 has a first clamping unit 212, a first X-axis moving unit 211, and a first Y-axis moving unit 214, wherein the first clamping unit 212 is used for clamping the evaporation screen 100. The first direction axial direction is perpendicular to the second direction axial direction, and the first X axial direction moving unit 211 and the first Y axial direction moving unit 214 are respectively used for driving the first clamping unit 212 to move along the X axis and the Y axis.
Further, the first Y-axis moving unit 214 is located above the second carrier 400 and can move on the second carrier 400 along the Y-axis, the first clamping unit 212 and the first X-axis moving unit 211 are fixedly connected and both located above the first Y-axis moving unit 214, and the first X-axis moving unit 211 can move on the first Y-axis moving unit 214 along the X-axis.
Specifically, the first X-axis moving unit 211 and the first Y-axis moving unit 214 are both in a structure of sliding block and sliding rail matching. The first Y axial moving unit 214 includes a Y slider, a Y slide rail, and a Y motor, wherein the Y slide rail is fixedly disposed on the second plummer 400 along the Y axial direction, the Y slider can slide on the Y slide rail, and the Y motor drives the Y slider to move. The first X axial moving unit 211 includes an X slider, and an X motor, wherein the X slider is fixed to the Y slider along the X axial direction, the X slider can slide on the X slider, and the X motor drives the X slider to move.
It should be noted that when the first motion adjustment mechanism 210 stretches the evaporation screen 100, the evaporation screen 100 generates a reaction force to the first motion adjustment mechanism 210, and the reaction force causes the first Y axis moving unit 214 and the first X axis moving unit 211 in the first motion adjustment mechanism 210 to slightly rotate, and the rotation angles are different from each other. The rotation caused by the above factors has two adverse effects: first, when the first X-axis moving unit 211 applies a pulling force to the evaporation screen 100, the direction of the pulling force changes and is no longer parallel to the X-axis direction, so that wrinkles appear on the evaporation screen 100, which affects the yield of vacuum evaporation. Secondly, the magnitude of the pulling force applied to the deposition screen 100 is different from the expected value, which results in uncontrollable screen stretching operation and affects the efficiency of the screen stretching operation.
Optionally, the movement adjusting mechanism 200 is made of a demagnetizing material, a permanent magnet is disposed in the movement adjusting mechanism 200, and an electromagnetic control device is disposed in the second plummer 400.
In detail, continuing with the first movement adjusting mechanism 210 as an example, the first clamping unit 212, the X slider, and the Y slider in the first movement adjusting mechanism 210 are made of a demagnetizing material, and permanent magnets are disposed in the first clamping unit 212, the X slider, and the Y slider. The electromagnetic control mechanism is a coil with a core. Since the cored coil can generate a magnetic field when being energized, the electromagnetic control device can attract the permanent magnet, and thus, the second bearing table 400 generates an attraction force on the first movement adjusting mechanism 210, which enhances the rigidity between the first Y-axis moving unit and the second bearing table 400 in the first movement adjusting mechanism 210, and also enhances the rigidity between the first Y-axis moving unit 214 and the first X-axis moving unit 211.
When the first movement adjusting mechanism 210 does not need to be moved, the electromagnetic control device is turned on to cause the second carrier table 400 to generate an attractive force to the first movement adjusting mechanism 210, thus enhancing the rigidity between the first Y-axis moving unit, the first X-axis moving unit, and the second carrier table 400 in the first movement adjusting mechanism 210. When the first motion adjusting mechanism 210 stretches the evaporation screen 100, the first Y-axis moving unit and the first X-axis moving unit are prevented from rotating slightly, so that the screen stretching precision is improved, the yield of vacuum evaporation is improved, and the screen stretching operation efficiency is also improved.
Optionally, the movement adjusting mechanism 200 is provided with a lead screw shaft sleeve, the second bearing table 400 is provided with a rotating motor and a lead screw, the second bearing table 400 rotates the lead screw through the rotating motor, and the movement adjusting mechanism 200 is passively moved by the lead screw shaft sleeve to achieve the control purpose. It should be understood that the manner of controlling the movement of the motion adjustment mechanism 200 can also be set according to experience of a person skilled in the art, and is not limited herein. Optionally, the first clamping unit 212 includes a first carrying table, an upper clamping jaw 212A and a lower clamping jaw 212B, the marking unit is disposed on the first carrying table, and the upper clamping jaw 212A and the lower clamping jaw 212B move relatively along a height direction (i.e., a Z-axis direction) of the first carrying table on a side wall of the first carrying table, so as to clamp the evaporation screen 100.
Specifically, one surface of the first clamping unit 212, which faces away from the evaporation screen 100, is fixedly connected to the first X-axis moving unit, one surface of the first clamping unit 212, which faces toward the evaporation screen 100, is provided with an upper clamping jaw 212A and a lower clamping jaw 212B, and the upper clamping jaw 212A can move toward the lower clamping jaw 212B to clamp the clamping lug 121 of the evaporation screen 100, so that the function of clamping the evaporation screen 100 by the first clamping unit 212 is realized.
The marking unit on the first clamping unit 212 includes the first positioning mark 213, and by performing alignment measurement on the first positioning mark 213, the influence of the first motion adjustment mechanism 210 itself due to the existence of commutation gap, hysteresis, and non-linear section, etc. can be avoided. Because the first positioning mark 213 is located on the first clamping unit 212, the position information of the first clamping unit 212 can be directly obtained, so that the position information of the first clamping unit 212 is more accurate, the improvement of the positioning precision of the net tensioning device each time is facilitated, the number of times of adjusting the movement adjusting mechanism 200 is reduced in the net tensioning operation process of the net tensioning device, and the net tensioning operation efficiency and the net tensioning device yield are improved.
With continued reference to fig. 3, the vision device 300 performs alignment measurement on the first positioning mark 213 to acquire position information of the first clamping unit 212 and transmits the position information to the control device. The vision device 300 may be a CCD camera and an image processing unit, and the image obtained by the CCD camera is processed by the image processing unit to obtain the position coordinate of the first positioning mark 213 in the whole machine coordinate system of the web-spreading equipment, that is, to obtain the position information of the first clamping unit 212.
The control device obtains a position deviation of the first clamping unit 212 according to the position information of the first clamping unit 212, the target position coordinate of the first clamping unit 212 and an error threshold, and controls the first X-axis moving unit 211 and the first Y-axis moving unit 214 to perform position compensation according to the position deviation, so as to realize visual closed-loop control on the first motion adjustment mechanism 210. The vision closed-loop control is adopted to reduce the adjustment times of the movement adjusting mechanism 200, improve the adjustment efficiency of the movement adjusting mechanism 200 and facilitate the improvement of the net-opening operation efficiency. Meanwhile, the vision closed-loop control improves the positioning precision of the motion adjusting mechanism 200 and the precision of the stretching, and is beneficial to improving the yield of the subsequent vacuum evaporation process.
The positional deviation includes an X-axis direction and amount of displacement and a Y-axis direction and amount of displacement. The first X-axis moving unit 211 and the first Y-axis moving unit 214 perform position compensation according to the position deviation, and it is understood that the first X-axis moving unit 211 moves according to the X-axis moving direction and the displacement amount in the position deviation, and the first Y-axis moving unit 214 moves according to the Y-axis moving direction and the displacement amount in the position deviation.
Correspondingly, the invention also provides a control method of the net tensioning equipment.
Fig. 4 is a flowchart of a control method of the network expanding device in this embodiment. As shown in fig. 4, the control method of the mesh opening device is used for controlling the movement adjusting mechanism 200, and specifically includes the following steps:
step S1: inputting the target position coordinates of the clamping unit to the control device;
step S2: carrying out alignment measurement on the marking unit through a vision device 300 to obtain the current position coordinates of the clamping unit;
and step S3: and the control device calculates the position deviation between the current position coordinate and the target position coordinate, and controls the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate.
Preferably, the control method of the web tensioning device further comprises: when step S1 is executed, an error threshold is input to the control device, and when step S3 is executed, the control device determines whether the position deviation is smaller than the error threshold, and if not, controls the first moving unit to move in a direction of compensating for the position deviation according to the position deviation.
The control method of the mesh-opening device is further explained with reference to the accompanying drawings.
With reference to fig. 2 and fig. 3, the first motion adjusting mechanism 210, the second motion adjusting mechanism 220, the third motion adjusting mechanism 230, the fourth motion adjusting mechanism 240, the fifth motion adjusting mechanism 250, and the sixth motion adjusting mechanism 260 of the screen stretching device perform a screen stretching operation on the evaporation screen 100. The clamping ears 121 of the evaporation screen 100 are clamped by the first clamping unit 212, the second clamping unit 222, the third clamping unit 232, the fourth clamping unit 242, the fifth clamping unit 252 and the sixth clamping unit 262. Alignment measurement is performed on the first positioning mark 213, the second positioning mark 223, the third positioning mark 233, the fourth positioning mark 243, the fifth positioning mark 253, and the sixth positioning mark 263 by the vision device 300 to obtain current position coordinates of the first clamping unit 212, the second clamping unit 222, the third clamping unit 232, the fourth clamping unit 242, the fifth clamping unit 252, and the sixth clamping unit 262. The control device calculates the positional deviation of each of the first clamping unit 212, the second clamping unit 222, the third clamping unit 232, the fourth clamping unit 242, the fifth clamping unit 252, and the sixth clamping unit 262 based on the current positional coordinates and the target positional coordinates of each of the first clamping unit 212, the second clamping unit 222, the third clamping unit 232, the fourth clamping unit 242, the fifth clamping unit 252, and the sixth clamping unit 262. It can be understood that the control device simultaneously calculates the positional deviations required for the positional compensation of the first X axial direction moving unit 211, the second X axial direction moving unit 221, the second X axial direction moving unit 231, the fourth X axial direction moving unit 241, the fifth X axial direction moving unit 251, the sixth X axial direction moving unit 261, the first Y axial direction moving unit 214, the second Y axial direction moving unit 224, the third Y axial direction moving unit 234, the fourth Y axial direction moving unit 244, the fifth Y axial direction moving unit 254, and the sixth Y axial direction moving unit 261. Then, the control device simultaneously compares the positional deviation of the first clamping unit 212, the second clamping unit 222, the third clamping unit 232, the fourth clamping unit 242, the fifth clamping unit 252, and the sixth clamping unit 262 with the error threshold. By way of illustration, wherein the positional deviation of the first and second gripper units 212, 222 is greater than the error threshold, the positional deviation of the third, fourth, fifth and sixth gripper units 232, 242, 252, 262 is less than or equal to the error threshold. The first X-axis moving unit 211, the second X-axis moving unit 221, the first Y-axis moving unit 214, and the second Y-axis moving unit 224 move according to the positional deviation of the first and second clamping units 212 and 222. The third, fourth, fifth, and sixth clamping units 232, 242, 252, and 262 do not need to be position-compensated.
The third clamping unit 232, the fourth clamping unit 242, the fifth clamping unit 252 and the sixth clamping unit 262 do not need to be compensated for position, and the control device can choose to end the visual closed-loop control of the third motion adjustment mechanism 230, the fourth motion adjustment mechanism 240, the fifth motion adjustment mechanism 250 and the sixth motion adjustment mechanism 260. Of course, the control device may also choose to continue the visual closed-loop control of the third movement adjustment mechanism 230, the fourth movement adjustment mechanism 240, the fifth movement adjustment mechanism 250, and the sixth movement adjustment mechanism 260. In this embodiment, the control device selects to end the visual closed-loop control of the third motion adjustment mechanism 230, the fourth motion adjustment mechanism 240, the fifth motion adjustment mechanism 250, and the sixth motion adjustment mechanism 260.
After the first X-axis moving unit 211, the second X-axis moving unit 221, the first Y-axis moving unit 214 and the second Y-axis moving unit 224 perform position compensation, the vision device 300 performs alignment measurement on the first positioning mark 213 and the second positioning mark 223 again to obtain current position coordinates of the first clamping unit 212 and the second clamping unit 222, and the control device calculates the position deviation of the first clamping unit 212 and the second clamping unit 222 again by combining the target position coordinates. The control device compares the position deviation of the first clamping unit 212 and the second clamping unit 222 with the error threshold value at the same time again, and determines whether the first clamping unit 212 and the second clamping unit 222 need to perform position compensation. After that, the first clamping unit 212 or the second clamping unit 222 repeats the above steps after performing position compensation until neither the first clamping unit 212 nor the second clamping unit 222 needs to perform position compensation. At this time, the control device ends the visual closed-loop control, and the deposition screen 100 is in a desired extended state. The control device performs visual closed-loop control on the movement adjusting mechanism 200, so that the adjusting times of the movement adjusting mechanism 200 are reduced, the adjusting efficiency of the movement adjusting mechanism 200 is improved, and the improvement of the net-opening operation efficiency is facilitated.
Further, the control method of the web tensioning device further comprises the following steps: before step S1 is executed and before step S1 is executed, the control device performs zero calibration on the clamping unit to obtain a zero position deviation, and when step S3 is executed, the control device calculates the position deviation according to the zero position deviation, the current position coordinate and the target position coordinate.
It should be noted that after the first movement adjusting mechanism 210, the second movement adjusting mechanism 220, the third movement adjusting mechanism 230, the fourth movement adjusting mechanism 240, the fifth movement adjusting mechanism 250, and the sixth movement adjusting mechanism 260 are installed to the stretching apparatus, the movement adjusting mechanism 200 has a position error due to the installation accuracy, the individual difference of the movement adjusting mechanism 200, and the like. Based on this, it is necessary to zero calibrate the first clamping unit 212, the second clamping unit 222, the third clamping unit 232, the fourth clamping unit 242, the fifth clamping unit 252, and the sixth clamping unit 262.
FIG. 5 is a flow chart of zero calibration in an embodiment. As shown in fig. 5, the zero calibration step includes:
step S101: inputting theoretical position coordinates of the clamping unit in the net-tensioning device to the control device;
step S102: in the state that the screen stretching device is unloaded, the alignment measurement is carried out on the positioning mark through the vision device 300 so as to obtain the actual position coordinate of the clamping unit in the screen stretching device;
step S103: and the control device calculates the zero position deviation according to the actual position coordinates and the theoretical position coordinates.
Fig. 6 is a schematic diagram of zero calibration of the movement adjustment mechanism 200 in the embodiment. As shown in fig. 6, in the idle state of the stretching device, the first movement adjusting mechanism 210, the second movement adjusting mechanism 220, the third movement adjusting mechanism 230, the fourth movement adjusting mechanism 240, the fifth movement adjusting mechanism 250 and the sixth movement adjusting mechanism 260 are all located at zero positions, and alignment measurement is performed on the first main positioning mark 213, the second main positioning mark 223, the third main positioning mark 233, the fourth main positioning mark 243, the fifth main positioning mark 253 and the sixth main positioning mark 263 respectively through the vision device 300, so that actual positions of the first movement adjusting mechanism 210, the second movement adjusting mechanism 220, the third movement adjusting mechanism 230, the fourth movement adjusting mechanism 240, the fifth movement adjusting mechanism 250 and the sixth movement adjusting mechanism 260 when located at the zero positions are a, b, c, d, e and f in fig. 6 respectively. The theoretical positions of the first motion adjustment mechanism 210, the second motion adjustment mechanism 220, the third motion adjustment mechanism 230, the fourth motion adjustment mechanism 240, the fifth motion adjustment mechanism 250, and the sixth motion adjustment mechanism 260 in the zero position are a ', b', c ', d', e ', and f' in fig. 6, respectively, and by comparing the actual positions a, b, c, d, e, and f and the theoretical positions a ', b', c ', d', e ', and f' of the first motion adjustment mechanism 210, the second motion adjustment mechanism 220, the third motion adjustment mechanism 230, the fourth motion adjustment mechanism 240, the fifth motion adjustment mechanism 250, and the sixth motion adjustment mechanism 260 in the zero position, the control device can obtain the deviation amounts of the first motion adjustment mechanism 210, the second motion adjustment mechanism 220, the third motion adjustment mechanism 230, the fourth motion adjustment mechanism 240, the fifth motion adjustment mechanism 250, and the sixth motion adjustment mechanism 260, and compensate the deviation amounts into the position deviation as the fixed offset amount of each motion adjustment mechanism 200, and realize the calibration of the zero position adjustment mechanism 200.
In the invention, the control device acquires a zero position deviation and adds the zero position deviation when calculating the position deviation. The position deviation of the clamping unit can be calculated more accurately, and the positioning precision of the clamping unit is further improved. Thus, the precision of the net-opening operation can be further improved.
Optionally, the method for controlling a web tensioning device further includes:
before executing step S1, the control device performs first direction shafting offset calibration and second direction shafting offset calibration on the clamping unit to obtain a first direction shafting position offset and a second direction shafting position offset, respectively, and when executing step S3, the control device further calculates the position offset according to the first direction shafting position offset, the second direction shafting position offset, the zero position offset, the current position coordinate and the target position coordinate. In the present embodiment, the first direction axis is an X axis, and the second direction axis is a Y axis.
It should be noted that during the adjustment of the first motion adjustment mechanism 210, the second motion adjustment mechanism 220, the third motion adjustment mechanism 230, the fourth motion adjustment mechanism 240, the fifth motion adjustment mechanism 250, and the sixth motion adjustment mechanism 260, since the first X axial moving unit 211, the second X axial moving unit 221, the second X axial moving unit 231, the fourth X axial moving unit 241, the fifth X axial moving unit 251, the sixth X axial moving unit 261, the first Y axial moving unit 214, the second Y axial moving unit 224, the third Y axial moving unit 234, the fourth Y axial moving unit 244, the fifth Y axial moving unit 254, and the sixth Y axial moving unit 261 are moved simultaneously, the motion adjustment mechanism 200 has a problem of axial movement crosstalk.
In addition, the axis moving dimension of the motion adjusting mechanism 200 is different from the coordinate system of the whole stretching device, so that the axis scaling error also exists in the motion adjusting mechanism 200. This results in the accuracy of the movement positioning of the movement adjusting mechanism 200 in the overall coordinate system of the screen-tensioning device.
In order to ensure the moving and positioning accuracy of the movement adjusting mechanism 200 in the whole machine coordinate system of the screen stretching device, the first clamping unit 212, the second clamping unit 222, the third clamping unit 232, the fourth clamping unit 242, the fifth clamping unit 252 and the sixth clamping unit 262 need to be calibrated for the X axis system deviation and the Y axis system deviation to obtain the X axis system position deviation and the Y axis system position deviation, respectively.
Further, the X axis position deviation includes: and calibrating the X-axis deviation of the clamping unit to obtain the X-axis scaling error compensation quantity and the X-axis to Y-axis axial movement crosstalk compensation quantity.
Further, the Y axis position deviation includes: and calibrating the Y-axis deviation of the clamping unit to obtain the Y-axis scaling error compensation quantity and the Y-axis to X-axis axial movement crosstalk compensation quantity.
Further, the step of calibrating the X-axis system deviation of the clamping unit by the control device comprises:
step S201: in the no-load state of the screen tensioning equipment, the alignment measurement is carried out on the positioning mark through the vision device 300, and a first theoretical position coordinate of the clamping unit in the screen tensioning equipment is obtained;
step S202: the clamping unit is made to step by n steps along the X axial direction according to a first fixed step pitch, and the vision device 300 performs alignment measurement on the positioning mark every time the clamping unit moves once so as to obtain a first actual position coordinate of the clamping unit;
step S203: subtracting the first theoretical position coordinate and the first actual position coordinate to obtain a first position deviation amount (Δ x) 1 ,Δy 1 )、(Δx 3 ,Δy 3 )、…(Δx i ,Δy i )；
Step S204: by the formula
Obtaining the axis scaling error compensation quantity of the X axis;
step S205: by the formula
And obtaining the axis movement crosstalk compensation quantity of the Y axis to the X axis.
The X-axis misalignment calibration will be further described with reference to the accompanying drawings.
Fig. 7 is a flowchart of the X axis system deviation calibration in this embodiment. As shown in fig. 7, in the state where the net stretching apparatus is unloaded, the movement adjusting mechanism 200 is located at the zero position. Taking the first movement adjustment mechanism 210 as an example, the first primary positioning mark 213 is advanced by the vision device 300The actual position coordinate (x) of the first clamping unit 212 in the coordinate system of the whole machine of the wire-stretching equipment is obtained by line alignment measurement 1 ,y 1 ). The first clamping unit 212 is stepped 5 times along the X-axis by a fixed step dx, and the vision device 300 performs alignment measurement on the first main positioning mark 213 every time the first clamping unit 212 moves, so as to obtain the actual position coordinate (X) of the first clamping unit 212 1 ,y 1 )、(x 2 ,y 2 )、(x 3 ,y 3 )、(x 4 ,y 4 ) And (x) 5 ,y 5 ). Since the first clamping unit 212 moves along the X-axis direction in steps with a fixed step pitch dx, the theoretical position coordinate (X) of the first clamping unit 212 can be calculated 1 ,y 1 )’、(x 2 ,y 2 )’、(x 3 ,y 3 )’、(x 4 ,y 4 ) ' and (x) 5 ,y 5 )'. Further, the position deviation amount between the actual position coordinates and the corresponding theoretical position coordinates is calculated as (Δ x) 1 ,Δy 1 )、(Δx 2 ,Δy 2 )、(Δx 3 ，Δy 3 )、(Δx 4 ，Δy 4 ) And (Δ x) 5 ，Δy 5 )。
Wherein the deviation coefficient Δ X of X reflects the axis scaling error of the X-axis, and therefore, can be represented by the formula:
and obtaining the axis scaling error compensation quantity of the X axis.
Where the deviation coefficient Δ Y of Y reflects the axis shift crosstalk of the X-axis to the Y-axis, therefore, it can be represented by the formula:
and obtaining the axis movement crosstalk compensation quantity of the X axis to the Y axis.
Further, the step of calibrating the Y-axis system deviation of the clamping unit by the control device comprises:
step S301: in the no-load state of the screen stretching equipment, the alignment measurement is carried out on the positioning mark through the vision device 300, and a second theoretical position coordinate of the clamping unit in the screen stretching equipment is obtained;
step S302: the clamping unit is made to step by n steps along the Y axis according to a second fixed step pitch, and the visual device carries out alignment measurement on the positioning mark once the clamping unit moves, so that a second actual position coordinate of the clamping unit is obtained;
step S303: subtracting the second theoretical position coordinate and the second actual position coordinate to obtain a second position deviation amount (delta x' 1 ,Δy’ 1 )、(Δx’ 2 ,Δy’ 2 )、…、(Δx’ i ,Δy’ i )；
Step S304: by the formula
Obtaining the axis scaling error compensation quantity of the Y axis;
step S305: by the formula
And obtaining the axis movement crosstalk compensation quantity of the X axis to the Y axis.
The Y axis offset calibration is further described below with reference to the accompanying drawings.
Fig. 8 is a schematic diagram of Y axis offset calibration in this embodiment. As shown in fig. 8, in the state where the screen apparatus is unloaded, the movement adjusting mechanism 200 is located at the zero position. Taking the first motion adjustment mechanism 210 as an example, the alignment measurement of the first main positioning mark 213 is performed by a vision device, and the actual position coordinate (x ') of the first clamping unit 212 in the entire screen device coordinate system is obtained' 1 ,y’ 1 ). The vision device performs alignment measurement of the first main positioning mark 213 to obtain actual position coordinates (x' 1 ,y’ 1 )、(x’ 2 ,y’ 2 )、(x’ 3 ,y’ 3 )、(x’ 4 ,y’ 4 ) And (x' 5 ,y’ 5 ). Since the first clamping unit 212 is moved stepwise along the Y-axis at a fixed step distance dy ', the theoretical position coordinates (x ') of the first clamping unit 212 can be calculated ' 1 ,y’ 1 )’、(x’ 2 ，y’ 2 )’、(x’ 3 ,y’ 3 )’、(x’ 4 ,y’ 4 ) 'and (x' 5 ，y’ 5 )'. Further, a position deviation amount (delta x ') between the actual position coordinates and the corresponding theoretical position coordinates is calculated' 1 ,Δy’ 1 )、(Δx’ 2 ,Δy’ 2 )、(Δx’ 3 ,Δy’ 3 )、(Δx’ 4 ，Δy’ 4 ) And (Δ x' 5 ,Δy’ 5 )。
Where the deviation coefficient Δ Y 'of Y' reflects the axis scaling error of the Y-axis, and therefore, can be represented by the formula:
and obtaining the axis scaling error compensation quantity of the Y axis.
Wherein the deviation coefficient Δ X 'of X' reflects the axis shift crosstalk of the Y-axis to the X-axis, and thus, can be represented by the formula:
and obtaining the axis movement crosstalk compensation quantity of the Y axis to the X axis.
In summary, the screen tensioning device provided in the embodiment of the present invention is configured to fix a target object on a target screen frame, and includes: the device comprises at least one pair of motion adjusting mechanisms, a first moving unit and a second moving unit, wherein each pair of motion adjusting mechanisms are arranged along a first direction and are arranged on two opposite sides of a target object in parallel; the visual device is arranged above the clamping unit and is used for acquiring the current position coordinate of the clamping unit by aligning with the marking unit; the control device is used for calculating the position deviation between the current position coordinate and the target position coordinate, and controlling the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate. The invention reduces the adjusting times of the movement adjusting mechanism, improves the adjusting efficiency of the net stretching equipment, and is beneficial to improving the net stretching operation efficiency.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (14)
1. A net-tensioning device for fixing a target object on a target net frame, comprising:
the motion adjusting mechanisms comprise clamping units, first moving units and marking units, the clamping units are used for clamping the target object, and the first moving units are used for moving along the first direction so as to drive the clamping units to move along the first direction;
the visual device is arranged above the clamping unit and used for acquiring the current position coordinate of the clamping unit by aligning with the marking unit;
and the control device is used for calculating the position deviation between the current position coordinate and the target position coordinate, and controlling the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate.
2. The web apparatus according to claim 1, wherein the web apparatus includes a plurality of pairs of movement regulating mechanisms, the plurality of pairs of movement regulating mechanisms being arranged in sequence along a second direction, the movement regulating mechanism further including a second moving unit for moving along the second direction to move the holding unit and the first moving unit along the second direction, wherein the second direction is perpendicular to the first direction.
3. The web apparatus according to claim 1, wherein the method of controlling the movement of the first moving unit by the control means based on the positional deviation further comprises:
and judging whether the position deviation is smaller than an error threshold value, if not, controlling the first moving unit to move in a direction of compensating the position deviation according to the position deviation.
4. The web tensioning device according to claim 1, wherein the clamping unit comprises a first bearing table, an upper clamping jaw and a lower clamping jaw, the marking unit is arranged on the first bearing table, and the upper clamping jaw and the lower clamping jaw are relatively moved on the side wall of the first bearing table along the height direction of the first bearing table so as to clamp the target object.
5. The apparatus of claim 4, further comprising a second carriage for carrying the motion adjustment mechanism and the vision device, the second carriage being a vibration reduction platform.
6. A control method using a sheet tensioning device according to any one of claims 1 to 5, characterized by comprising:
step S1: inputting the target position coordinates of the clamping unit to the control device;
step S2: carrying out alignment measurement on the marking unit through a vision device to obtain the current position coordinate of the clamping unit;
and step S3: and the control device calculates the position deviation between the current position coordinate and the target position coordinate, and controls the first moving unit to move according to the position deviation until the clamping unit moves to the target position coordinate.
7. The control method of a screening apparatus according to claim 6, further comprising: when step S1 is executed, an error threshold is input to the control device, and when step S3 is executed, the control device determines whether the position deviation is smaller than the error threshold, and if not, controls the first moving unit to move in a direction of compensating for the position deviation according to the position deviation.
8. The control method of a screening apparatus according to claim 7, further comprising: before executing step S1, the control device performs zero calibration on the clamping unit to obtain a zero position deviation, and when executing step S3, the control device calculates the position deviation according to the zero position deviation, the current position coordinate, and the target position coordinate.
9. The control method of a screening apparatus according to claim 8, wherein the zero calibration step comprises:
inputting the theoretical position coordinates of the clamping unit in the net tensioning device to the control device;
under the condition that the screen stretching equipment is in an idle state, the alignment measurement is carried out on the marking unit through the vision device so as to obtain the actual position coordinate of the clamping unit in the screen stretching equipment;
and the control device calculates the zero position deviation according to the actual position coordinates and the theoretical position coordinates.
10. The control method of a screening apparatus according to claim 7, further comprising: before executing step S1, the control device performs first direction shafting offset calibration and second direction shafting offset calibration on the clamping unit to obtain a first direction shafting position offset and a second direction shafting position offset, respectively, and when executing step S3, the control device further calculates the position offset according to the first direction shafting position offset, the second direction shafting position offset, the zero position offset, the current position coordinate and the target position coordinate.
11. The control method of a screening apparatus according to claim 10, wherein the first direction shafting positional deviation includes: the axis-scaled error compensation amount of the first directional axis and the axis-shifted crosstalk compensation amount of the first directional axis with respect to the second directional axis.
12. The control method of a sheet tensioning device according to claim 11, wherein the second direction shafting position deviation includes: the second direction axis scaling error compensation amount and the second direction axis to first direction axis shift crosstalk compensation amount.
13. The control method of the screen device according to claim 12, wherein the step of calibrating the first direction shafting deviation of the clamping unit by the control device comprises:
under the idle state of the screen stretching equipment, the alignment measurement is carried out on the marking unit through the vision device, and a first theoretical position coordinate of the clamping unit in the screen stretching equipment is obtained;
the clamping unit is axially stepped by n steps along a first fixed step distance along a first direction, and the visual device carries out alignment measurement on the marking unit once the clamping unit moves to obtain a first actual position coordinate of the clamping unit;
subtracting the first theoretical position coordinate and the first actual position coordinate to obtain a first position deviation amount (Δ x) 1 ,Δy 1 )、(Δx 3 ,Δy 3 )、…(Δx i ,Δy i )；
By the formula
Obtaining an axis scaling error compensation quantity of the first direction axis;
by the formula
And obtaining the axial movement crosstalk compensation quantity of the second direction axis to the first direction axis.
14. The control method of the screen device according to claim 12, wherein the step of calibrating the second direction shafting deviation of the clamping unit by the control device comprises:
under the idle state of the screen stretching equipment, the alignment measurement is carried out on the marking unit through the vision device, and a second theoretical position coordinate of the clamping unit in the screen stretching equipment is obtained;
the clamping unit is axially stepped by n steps along a second fixed step distance along a second direction, and the visual device carries out alignment measurement on the marking unit once moving so as to obtain a second actual position coordinate of the clamping unit;
subtracting the second theoretical position coordinate and the second actual position coordinate to obtain a second position deviation amount (delta x' 1 ,Δy’ 1 )、(Δx’ 2 ,Δy’ 2 )、…、(Δx’ i ,Δy’ i )；
By the formula
Obtaining an axis scaling error compensation quantity of the second direction axis;
by the formula
And obtaining the compensation amount of the axial movement crosstalk of the first direction axis to the second direction axis.
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