CN115468916A - On-chip fluid control module, acoustic fluid chip and analysis device - Google Patents
On-chip fluid control module, acoustic fluid chip and analysis device Download PDFInfo
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Abstract
The application relates to the technical field of micro-electro-mechanical systems, and provides a module is controlled to on-chip fluid, including the miniflow channel, be located the lamb wave syntonizer of miniflow channel base, lamb wave syntonizer includes parallel interdigital electrode, the electrode direction can be: perpendicular to the extending direction of the micro flow channel or parallel to the extending direction of the micro flow channel, and a magnet can be arranged on the opposite side; or a bent portion provided with a microchannel. The functions of an on-chip flow resistor, a liquid stirrer, a particle catcher and a fluid driver can be realized by different combination modes of the micro-channel and the lamb wave resonator, and the lamb wave resonator is stable in acoustic fluid effect, so that the driving efficiency for driving the on-chip fluid is high, and the problem of bubble oscillation is reduced.
Description
Technical Field
The present application relates to the field of micro-electromechanical systems, and in particular, to an on-chip fluid control module, an acoustic fluid chip, and an analysis apparatus.
Background
Point-of-care testing (POCT) is a novel in vitro diagnostic means for rapid detection at the sampling site using a portable analyzer and a kit, has gradually become a substitute for sample detection in traditional large hospitals and central laboratories due to its advantages of high portability, good sensitivity, short detection time, simple usage flow, low comprehensive cost, etc., and has shown great potential in the directions of health management, environmental monitoring, food safety analysis, bio-safety detection, etc. Among them, the microfluidic device is one of the ideal platforms for real-time testing, because it can process a small volume of sample, reduce reagent consumption, shorten response time, and miniaturize the volume. However, the conventional microfluidic platform still needs peripheral pumps, valves, mixers and optical detection components to complete the biochemical detection.
Therefore, to achieve true point-of-care testing, self-driven microfluidic devices have been proposed and developed; techniques for constructing fluid manipulation components on a sheet can be divided into two broad categories: passive and active. In contrast, active steering techniques are advantageous in regulating the flow rate and the movement direction of a fluid, and mainly include electrical methods, magnetic methods, photothermal methods, and acoustic methods. Among them, the fluid manipulation technology based on the acoustic method has attracted extensive attention of researchers due to its small volume, convenient driving, easy integration, good biocompatibility and low dependency on media.
Several typical electromechanical transducers, including bubble-based piezoelectric ceramic transducers, bulk acoustic wave resonators, surface acoustic wave resonators, have been used to construct on-chip fluid driven components. However, they still have problems of low energy conversion efficiency, unstable bubble oscillation, and the like.
Disclosure of Invention
The application provides an on-chip fluid control module, an acoustic fluid chip and an analysis device, which are used for improving the energy conversion rate and reducing the problems of bubble oscillation and the like.
This application first aspect provides a module is controlled to on-chip fluid, includes the microchannel, is located the lamb wave syntonizer of microchannel base, lamb wave syntonizer includes parallel interdigital electrode, the extending direction of electrode direction perpendicular to microchannel to be used for realizing the flow resistor function when producing the lamb wave.
The application second aspect provides a module is controlled to on-chip fluid, includes the microchannel, is located the lamb wave syntonizer of microchannel base, lamb wave syntonizer includes parallel interdigital electrode, the electrode direction is on a parallel with the extending direction of microchannel to be used for realizing on-chip liquid stirring function when producing the lamb wave.
The third aspect of the application provides an on-chip fluid control module, including the miniflow channel, be located the lamb wave syntonizer of miniflow channel basement, the lamb wave syntonizer includes parallel interdigital electrode, the electrode direction is on a parallel with the extending direction of miniflow channel, just a miniflow channel lateral wall department on the other lamb wave syntonizer is provided with the magnet to be used for realizing on-chip particle trapper function when producing the lamb wave.
The utility model provides a module is controlled to on-chip fluid, including the miniflow channel, the miniflow channel includes the kink, is located the lamb wave syntonizer of miniflow channel kink base, lamb wave syntonizer includes parallel interdigital form electrode, the electrode direction is on a parallel with the fluid entry direction of miniflow channel kink, the fluid outlet direction of perpendicular to miniflow channel kink to realize the on-chip fluid driver function when being used for producing the lamb wave.
As a possible implementation manner of any one of the first to the fourth aspects, the vertical direction includes a positive and negative angle margin, or the horizontal direction includes a positive and negative angle margin, and the angle margin is smaller than 45 degrees.
A fifth aspect of the present application provides an on-chip fluid handling module comprising a combination of at least two of the on-chip fluid handling modules of any of the first to fourth aspects.
As a possible implementation manner of the fifth aspect, the combination of the at least two includes: a combination of at least two on-chip fluid manipulation modules of the same kind, or a combination of at least two on-chip fluid manipulation modules of a different kind.
As a possible implementation manner of the fifth aspect, the combination of the at least two includes: at least two on-chip fluid handling modules of the first aspect, wherein the outlets of the on-chip fluid handling modules of the third aspect are connected after being communicated, and then the outlets of the on-chip fluid handling modules of the fourth aspect are connected.
The sixth aspect of the present application provides an acoustic fluid chip, comprising a substrate, wherein a micro flow channel is provided on the substrate, and the micro flow channel is provided with any one of the on-chip fluid control modules of the first to fifth aspects.
A seventh aspect of the present application provides an analysis device comprising the acoustic fluidic chip of the sixth aspect, a driving device for driving the lamb wave resonator on the acoustic fluidic chip, and an optical sensor facing the acoustic fluidic chip.
In view of the above, the on-chip fluid control module, the acoustic fluid chip, and the analysis apparatus of the present application employ the lamb wave resonator, and the lamb wave resonator can generate horizontal lamb waves, and the acoustic fluid effect of the lamb wave resonator is stable, so that the driving efficiency for driving the on-chip fluid is high, i.e., the energy conversion rate is high, and the problems of bubble oscillation and the like can be reduced. Moreover, the structure of the first to fourth aspects of the present invention can realize the control of different functions, and the fifth aspect of the present invention can realize the combination of multiple functions to form a composite function. The acoustic fluid chip and the analysis device adopting the on-chip fluid control module in the first to fifth aspects also have the technical effects.
Drawings
FIG. 1 is a schematic diagram of a lamb wave resonator generating a lamb wave;
FIG. 2 is a schematic diagram of an acoustic fluidic chip provided in an embodiment of the present application;
fig. 3a1 is an embodiment of an on-chip fluid handling module as a fluidic resistor according to the present application;
fig. 3a2 is a specific embodiment of the on-chip fluid handling module as a fluidic resistor according to an embodiment of the present application;
FIG. 3b1 is a schematic diagram of an embodiment of an on-chip fluid manipulation module as an agitator according to the present disclosure;
FIG. 3b2 is a diagram illustrating an embodiment of an on-chip fluid manipulation module as an agitator according to the present application;
fig. 3c1 is an embodiment of an on-chip fluid handling module as a fluid driver according to the present application;
fig. 3c2 is a specific embodiment of the on-chip fluid handling module as a fluid driver according to the present application;
fig. 4 is a schematic structural diagram of an analysis apparatus according to an embodiment of the present application.
Description of reference numerals: the acoustic wave sensor comprises a first lamb wave resonator 11, a second lamb wave resonator 12, a third lamb wave resonator 13, a fourth lamb wave resonator 14, a magnet 15, a micro channel 16, a substrate 17, a board-level radio frequency power amplifier 21, an acoustic fluid chip 22, an optical sensor 23, a circuit board 24, a first micro vortex 31, a second micro vortex 32, a third micro vortex 33 and a fourth micro vortex 34.
It should be understood that the dimensions and forms of the various blocks in the block diagrams described above are for reference only and should not be construed as exclusive of the embodiments of the present application. The relative positions and the inclusion relations among the blocks shown in the structural schematic diagram are only used for schematically representing the structural associations among the blocks, and do not limit the physical connection manner of the embodiment of the application.
Detailed Description
The technical solution provided by the present application is further described below by referring to the drawings and the embodiments. It should be understood that the device structure and the service scenario provided in the embodiments of the present application are mainly for illustrating possible implementations of the technical solutions of the present application, and should not be construed as the only limitations on the technical solutions of the present application. As can be known to those skilled in the art, with the evolution of the structure of the device and the appearance of new service scenarios, the technical solution provided in the present application is also applicable to similar technical problems.
It should be understood that the on-chip fluid manipulation scheme provided in the embodiments of the present application includes an on-chip fluid manipulation module and a manipulation method, an acoustic fluid chip, an on-chip fluid analysis apparatus and an analysis method, and because the principles of solving the problems of these technical solutions are the same or similar, some of the repeated points may not be repeated in the following description of the specific embodiments, but it should be understood that these specific embodiments are mutually cited and can be mutually combined.
Before further detailed description of the specific embodiments of the present invention, terms and expressions in the embodiments of the present invention and their corresponding uses, functions, and so on in the present invention are described, and the terms and expressions in the embodiments of the present invention are applicable to the following explanations:
1) Lamb (Lamb) wave resonator: a resonator for generating lamb waves, such as the one shown in fig. 1, employs an interdigital electrode structure. When the lamb wave resonator acts on the liquid in the micro flow channel, four micro vortices which are basically symmetrical are generated as shown in fig. 1. In which, viewed in three-dimensional space, four micro-vortex shapes are formed which diverge obliquely outward (with the lamb wave resonator as a reference plane) from near the center of the lamb wave resonator. Here, the lamb wave is originally a special sound wave which is transmitted only in the horizontal direction, and in the present application, since the micro vortex mostly corresponds to a component force in the horizontal direction, the resonator is also referred to as a lamb wave resonator.
Since the forces of the four vortices are substantially symmetrical, the flow velocity at the center of the lamb wave resonator is rather low, and one application of the lamb wave resonator is according to the characteristic that: micro-vortices are used to capture particles (e.g., nanoparticles) in a liquid and concentrate in the middle of four micro-vortices, the concentrated particles being schematically shown in the middle of four micro-vortices in fig. 1. The invention further provides other application modes of the lamb wave resonator, which will be explained in the following embodiments.
2) Acoustic fluid effects: refers to the effect of driving a resonator (e.g., a lamb wave resonator in the embodiments of the present application) to generate high frequency acoustic waves that couple into the fluid and create a large volume force that pushes the fluid into motion.
3) Micro-Electro-Mechanical System (MEMS): also called microelectromechanical systems, microsystems, micromachines, etc., refer to high-tech devices with dimensions of a few millimeters or even less, whose internal structures can generally reach the micrometer or even nanometer scale.
4) Fluid on chip: refers to the fluid in a microchannel on a chip, such as a microchannel on an acoustic fluidic chip.
The on-chip fluid control scheme provided by the embodiment of the application belongs to the technical field of micro electro mechanical systems, and different modules with control functions can be realized through different combination modes of a lamb wave resonator and a micro channel, for example: the lamb wave resonator is coupled with liquid in the micro-channel, and when the formed micro-vortex blocks the flow of the liquid in the micro-channel, the function of the flow resistor is realized; when the formed micro vortex drives the liquid in the micro channel to flow, the function of the micro pump is realized; when the formed micro vortex drives the mixing of a plurality of liquids in the micro flow channel, the function of the mixer is realized; the function of the particle trap can be realized by acting as a mixer and combining a magnet. The realization of the various control functions can be combined at will to realize richer control functions. Further, the detection of the captured particles may be realized by further combining an optical sensor, an electrical sensor, or a change in resonance frequency of the lamb wave resonator itself. The present application will now be described in further detail with reference to the various figures.
Fig. 2 shows an embodiment of an acoustic fluid chip, and the embodiment shown in fig. 2 is formed by combining a plurality of on-chip fluid manipulation modules, which may be used alone or in any combination. For convenience of description, when each on-chip fluid manipulation module is individually introduced, it can also be described with reference to fig. 2 as a reference. The on-chip fluid handling module provided by the present application is first described below.
The application provides a first on-chip fluid control module, including microchannel 16, be located the third lamb wave syntonizer 13 of microchannel base, third lamb wave syntonizer 13 includes parallel interdigital electrode, the extending direction of electrode direction perpendicular to microchannel to realize the flow resistor function when producing the lamb wave.
The principle of the embodiment shown in fig. 3a1 is described below with reference to the vertical and horizontal directions of fig. 3a1, in which the upper first micro-vortex 31 and the upper second micro-vortex 32 include portions that start from the electrodes upward, and the lower third micro-vortex 33 and the lower fourth micro-vortex 34 include portions that start from the electrodes downward. Accordingly, when the electrode direction is perpendicular to the extending direction of the micro channel (two vertical black lines on the left and right of fig. 3a1 indicate the side wall of the micro channel), or the electrode direction is perpendicular to the side wall of the micro channel, that is, when the electrode direction is perpendicular to the channel boundary by 90 degrees, and the fluid in the micro channel flows to the electrodes corresponding to the first micro vortex 31 and the second micro vortex 32, the force of the micro vortex from the electrode of the first micro vortex 31 and the second micro vortex 32 hinders the liquid flow in the micro channel, thereby realizing the function of the flow resistor. The direction of the electrode perpendicular to the side wall of the micro flow channel (or 90 degrees) may have a positive or negative angle margin, wherein the maximum value of the angle margin is less than 45 degrees, and may be, for example, 10 degrees or 5 degrees.
For the first on-chip fluid manipulation module, in some embodiments, the intensity of the lamb wave is controlled by controlling the power of the third lamb wave resonator 13, so that full blocking or blocking with a certain degree of openness of the fluid in the flow channel by the flow resistor can be realized.
Fig. 3a2 shows a specific implementation of the on-chip fluid manipulation module provided by the embodiment of the present application as a fluidic resistor, wherein the size of the lamb wave resonator in this implementation is about 150 × 200 μm 2 Wherein the electrode direction is a length direction, the height of the micro flow channel can be 50 micrometers, and the width of the micro flow channel can be 200 micrometers. The above dimensions are only one specific embodiment and are not limited to the dimensions of the present invention, and for example, the height of the micro flow channel may be 40 to 60 micrometers, the width may be 50 to 100 micrometers, or the like, or other dimensions, and the lamb wave resonator may be 50 × 100 to 200 × 600 micrometers 2 Or other dimensions.
In some embodiments, the length of the lamb wave resonator dimension may be close to the width of the microchannel, thereby facilitating the generation of a micro-vortex that substantially matches the width of the microchannel to achieve better flow resistance.
The application provides a second on-chip fluid control module, including microchannel 16, be located microchannel substrate's second lamb wave syntonizer 12, second lamb wave syntonizer 12 is including parallel interdigital electrode, the electrode direction is on a parallel with the extending direction of microchannel, and the electrode direction is 180 degrees with the border of microchannel promptly for realize on-chip liquid stirring function when producing the lamb wave.
The principle of this will be described with reference to fig. 3b1, and as shown in fig. 3b1, when the fluid in the micro flow channel (two black lines parallel to each other in the upper and lower sides of fig. 3b1 indicate the side wall of the micro flow channel) is parallel to the electrodes, the first micro vortex 31 and the second micro vortex 32 act on the liquid flowing through, and the liquid is stirred by the micro vortices, thereby realizing the on-chip liquid stirring function. The third micro vortex 33 and the fourth micro vortex 34 also act on the liquid flowing through, and the liquid is stirred by the micro vortices, thereby realizing the on-chip liquid stirring function. The electrode direction may be parallel to the side wall of the micro flow channel (or 180 degrees), and there may be a positive or negative angle margin, where the maximum value of the angle margin is less than 45 degrees, and may be, for example, 10 degrees or 5 degrees.
For the second on-chip fluid manipulation module, in some embodiments, the intensity of the lamb waves is controlled by controlling the power of the second lamb wave resonator 12, which may enable control of the intensity of the agitation.
FIG. 3b2 shows an embodiment of the on-chip fluid manipulation module provided in the examples of the present application as a stirrer, wherein the lamb wave resonator has a size of about 150X 200 μm 2 Wherein the electrode direction is the length direction, the height of the micro flow channel can be 50 micrometers, and the width of the micro flow channel is 600 micrometers. The above dimensions are only one specific embodiment and are not limited to the dimensions of the present invention, and for example, the height of the micro flow channel may be 40 to 60 micrometers, the width may be 50 to 100 micrometers, or the like, or other dimensions, and the lamb wave resonator may be 50 × 100 to 200 × 600 micrometers 2 Or other dimensions.
In some embodiments, the width of the lamb wave resonator may be smaller than the width of the microchannel, for example, the ratio of the width of the lamb wave resonator to the width of the microchannel may be 0.2 to 0.5, so that the generated micro vortex has enough space to disturb the fluid in the microchannel to achieve a better liquid stirring function.
The application provides a module is controlled to third kind on-chip fluid, including micro-channel 16, is located the second lamb wave syntonizer 12 of micro-channel basement, second lamb wave syntonizer 12 is including parallel interdigital electrode, the electrode direction is on a parallel with the extending direction of micro-channel, and the border that is electrode direction and micro-channel promptly is 180 degrees, is provided with magnet 15 in the other micro-channel lateral wall department with this second lamb wave syntonizer 12 to be used for when producing lamb wave, attract the biological particle in the fluid of catching through the magnetic adsorption simultaneously, realize on-chip particle catcher function.
The principle of this will be described with reference to fig. 1, and as shown in fig. 1, when the fluid in the micro flow channel is parallel to the electrodes, the first micro vortex 31 and the second micro vortex 32 act on the flowing liquid, the liquid is stirred by the micro vortex, and the micro vortex also has a capturing effect on the particles in the liquid, and the particles captured by the micro vortex are concentrated beside the magnet 15 by the magnetic adsorption effect of the magnet 15, thereby realizing the function of the on-chip particle trap. The electrode direction may be parallel to the side wall of the micro flow channel (or 180 degrees), and there may be a positive or negative angle margin, where the maximum value of the angle margin is less than 45 degrees, and may be, for example, 10 degrees or 5 degrees.
For the third on-chip fluid manipulation module, in some embodiments, the intensity of the lamb wave is controlled by controlling the power of the second lamb wave resonator 12, which may allow for control of the intensity of the micro-vortices, and thus capture of different particles (e.g., different diameters, or different masses).
The application provides a fourth kind of piece fluid control module on chip, including micro channel 16, the micro channel includes the kink, is located the first lamb wave syntonizer 11 of micro channel kink base, lamb wave syntonizer 11 is including parallel interdigital form electrode, the electrode direction is on a parallel with the fluid entry direction of micro channel kink, and the fluid export direction of electrode direction perpendicular to micro channel kink, and the electrode direction is 180 degrees with the border that micro channel entered the mouth promptly, is 90 degrees with the border that micro channel exported for when producing lamb wave realize piece fluid driver function on chip.
As shown in fig. 3c1, when the lamb wave resonator 11 is located at the bending part of the micro channel (two black L-shaped lines in fig. 3c1 indicate the side wall of the micro channel), for example, the second micro vortex 32 and the fourth micro vortex 34 correspond to the fluid inlet, the force of the micro vortex generated by the second micro vortex 32 and the fourth micro vortex 34 drives the fluid to flow to the lamb wave resonator 11, and the force of the third micro vortex 33 and the fourth micro vortex 34 drives the fluid flowing through the lamb wave resonator 11 to flow to the outlet, so as to realize the on-chip fluid driver function. Wherein, the electrode direction and the parallel (or 180 degrees) of the side wall of the inlet of the micro-flow channel can have a certain positive and negative angle allowance, wherein the maximum value of the angle allowance is less than 45 degrees. Similarly, the electrode direction may have a positive or negative angular margin with respect to the outlet (or 90 degrees) of the outlet side wall of the microchannel, wherein the maximum value of the angular margin is less than 45 degrees, and may be, for example, 10 degrees, 5 degrees, etc.
For the fourth on-chip fluid manipulation module, in some embodiments, the intensity of the lamb wave is controlled by controlling the power of the first lamb wave resonator 11, so as to control the driving force of the driver.
FIG. 3c2 shows an embodiment of an on-chip fluid manipulation module as a fluid driver, wherein the lamb wave resonator has a size of about 150X 200 μm 2 The electrode direction is a length direction, the height of the micro flow channel can be 50 micrometers, the width of the micro flow channel in the fluid inlet direction can be 240 micrometers, and the width of the micro flow channel in the fluid outlet direction is less than 200 micrometers, for example, 50 micrometers, 100 micrometers, 200 micrometers, and the like. The above dimensions are only one specific embodiment and are not limited to the dimensions of the present invention, and for example, the height of the micro flow channel may be 40 to 60 micrometers, the width may be 50 to 100 micrometers, or the like, or other dimensions, and the lamb wave resonator may be 50 × 100 to 200 × 600 micrometers 2 Or other dimensions.
In some embodiments, the width of the micro channel in the fluid outlet direction of the lamb wave resonator may be smaller than the width of the micro channel in the fluid inlet direction, and the width of the micro channel in the fluid outlet direction may be smaller than the width of the size of the lamb wave resonator, so that the force of the micro vortex generated in the fluid outlet direction of the lamb wave resonator toward the outlet is larger, and a better fluid driving effect is achieved.
In some embodiments, at least two of the first to fourth on-chip fluid manipulation modules may be combined to form a composite on-chip fluid manipulation module, where the combination includes at least two identical on-chip fluid manipulation modules or at least two different on-chip fluid manipulation modules, as exemplified below:
in some embodiments, there may be a plurality of first on-chip fluid manipulation modules (two first on-chip fluid manipulation modules are shown in fig. 2) arranged in parallel, and the outlets are communicated to form a fluid selection switch structure with one inlet and one outlet; or a plurality of first on-chip fluid control modules are arranged in parallel, and inlets are communicated to form a fluid selection switch structure with one inlet and one outlet; or the back of the multi-input and one-output structure is connected with a one-input and multi-output fluid selection switch structure to form a multi-input and multi-output fluid selection switch structure with an optional outlet.
In some embodiments, the one-in-one-out structure may be connected to an inlet of a fourth on-chip fluid manipulation module; or, the outlet of the fourth on-chip fluid manipulation module may be connected in front of the one-in-multiple-out structure, so as to form a structure with a single fluid driver.
In some embodiments, each of the one-in-one-out outlets, or at least one of the one-in-one-out outlets, may be connected to an inlet of a fourth on-chip fluid manipulation module, and a plurality of fluid drivers may be formed as required.
In some embodiments, there may be a plurality of the fourth on-chip fluid manipulation modules, and inlets thereof are communicated to form an in-out structure having a plurality of fluid drivers; or a plurality of the fourth on-chip fluid control modules can be provided, and the outlets of the fourth on-chip fluid control modules are communicated to form a structure with a plurality of fluid drivers and a plurality of inlets and outlets.
In some embodiments, there may be a plurality of the second on-chip fluid manipulation modules, which may be sequentially disposed in the flow channel, so as to enhance a liquid stirring effect.
In some embodiments, a plurality of the third on-chip fluid manipulation modules may be sequentially disposed in the flow channel, and different third on-chip fluid manipulation modules may be driven by different frequencies to generate lamb waves with different frequencies, so as to capture different biological particles.
In the embodiment shown in fig. 2, two first on-chip fluid manipulation modules are included, and a two-in-one-out fluid selection switch structure is formed, and then an outlet of the fluid selection switch structure is connected with a third on-chip fluid manipulation module and then connected with a fourth on-chip fluid manipulation module. Specifically, as shown in fig. 2, the first lamb wave resonator 11 is placed at a right angle of the "L" shaped flow channel (i.e., at a bent portion of the flow channel), and the on-chip fluid pumping is realized by matching the structure of the bent portion of the micro flow channel with the direction of the acoustic fluid, and the first lamb wave resonator serves as an on-chip fluid driver; a second lamb wave resonator 12 is placed in the straight flow channel, and the electrode direction is parallel to the flow channel boundary, and the mixing between various fluids is realized by forming the acoustic fluid vortex, and the second lamb wave resonator 12 is used as an on-chip mixer, and the generated micro vortex has the function of capturing particles, and the magnet 15 (the size of which can be 1 multiplied by 1 millimeter) 3 ) The second lamb wave resonator 12 and the magnet 15 are used as an on-chip particle trap; the third lamb wave resonator 13 and the fourth lamb wave resonator 14 are respectively arranged in a direct flow channel of the branch circuit, the electrode direction is perpendicular to the flow channel boundary, and the fluid movement is blocked by the acoustic jet flow effect in the acoustic fluid effect, so that the third lamb wave resonator 13 and the fourth lamb wave resonator 14 are used as flow resistors and fluid selection switches.
The embodiment of the present application further provides an acoustic fluid chip, which includes a substrate 17, where the substrate 17 has a micro channel and at least one lamb wave resonator located on the micro channel substrate, where the specific position relationship between the lamb wave resonator and the micro channel forms a combination of one or more of the first to fourth on-chip fluid manipulation modules, and the combination manner may refer to the description of combining at least two of the first to fourth on-chip fluid manipulation modules, which is not described herein again. The substrate 17 may be a silicon substrate, and the micro channel and the lamb wave resonator on the substrate may be manufactured by a micro electro mechanical processing (mems) process.
An embodiment of the present application further provides an analysis apparatus, including: the acoustic fluidic chip 22 described above; the driving device is used for driving the lamb wave resonator on the acoustic fluid chip 22, can be a plate-level radio frequency power amplifier 21, and the plate-level radio frequency power amplifier 21 applies excitation power to the lamb wave resonator to drive the lamb wave resonator to generate high-frequency sound waves; an optical sensor 23, the optical sensor 23 facing the acoustic fluidic chip 22, can obtain optical signals of particles captured by at least a third type of on-chip fluid manipulation module, and can also obtain optical signals at each on-chip fluid manipulation module on the acoustic fluidic chip 22.
In some embodiments the optical sensor 23 may be located on the upper side of the acoustic fluidic chip 22, and the signal measured by the optical sensor 23 may be transmitted to an analysis device, thereby completing the entire analysis process. The analysis device can be a computer, a mobile phone, a PAD, and the like. The optical sensor 23 may be a visible light sensor, an infrared sensor, a camera, or the like.
In one embodiment of the analysis device shown in fig. 4, a board-level rf power amplifier 21 is placed at the lower part of the analysis device, an acoustic fluid chip 22 is placed at the upper right part of the analysis device, an optical sensor 23 is placed at the upper side of the acoustic fluid chip 22, and a signal processing circuit board 24 connected with the optical sensor 23 is located at the upper left side.
In other embodiments, an electrical sensor may be used instead of the optical sensor 23, for example, an inductive or electromagnetic sensor may be provided to detect the captured particles by the third on-chip fluid manipulation module due to the captured particles.
In other embodiments, the condition of the captured particles can be detected according to the change of the resonant frequency of the third on-chip fluid manipulation module caused by the captured particles.
Where the words "first, second, third etc. or similar words in the description and in the claims are used only to distinguish between similar items and do not denote a particular order of importance, it will be understood that specific orders or sequences may be interchanged where permitted to implement embodiments of the application other than those illustrated or described herein.
In the above description, reference to reference numerals indicating steps, such as S110, S120 … …, etc., does not necessarily indicate that the steps are performed in this order, and the order of the preceding and following steps may be interchanged or performed simultaneously, where permitted.
The term "comprising" as used in the specification and claims should not be construed as being limited to the contents listed thereafter; it does not exclude other elements or steps. It should therefore be interpreted as specifying the presence of the stated features, integers, steps or components as referred to, but does not preclude the presence or addition of one or more other features, integers, steps or components, and groups thereof. Thus, the expression "an apparatus comprising the devices a and B" should not be limited to an apparatus consisting of only the components a and B.
Reference in the specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application. Thus, appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment, but may. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments, as would be apparent to one of ordinary skill in the art from this disclosure.
It is noted that the foregoing is only illustrative of the preferred embodiments of the present application and the technical principles employed. It will be understood by those skilled in the art that the present application is not limited to the particular embodiments described herein and that various obvious changes, rearrangements and substitutions will now be apparent to those skilled in the art without departing from the scope of the present application, for example, although the above embodiments describe electrodes parallel or perpendicular to the microchannel, or electrodes parallel or perpendicular to the direction of the inlet of the microchannel, it will be understood that corresponding functions may be achieved even if not exactly parallel or perpendicular. Therefore, although the present application has been described in more detail with reference to the above embodiments, the present application is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present application.
Claims (10)
1. The on-chip fluid control module is characterized by comprising a micro-channel and a lamb wave resonator positioned on a substrate of the micro-channel, wherein the lamb wave resonator comprises parallel interdigital electrodes, and the direction of the electrodes is perpendicular to the extending direction of the micro-channel so as to realize the function of a flow resistor when the lamb wave is generated.
2. The utility model provides a module is controlled to on-chip fluid which characterized in that, includes the microchannel, is located the lamb wave syntonizer of microchannel base, lamb wave syntonizer includes parallel interdigital electrode, the electrode direction is on a parallel with the extending direction of microchannel to be used for realizing on-chip liquid stirring function when producing lamb wave.
3. The utility model provides a module is controlled to fluid on chip which characterized in that includes the microchannel, is located the lamb wave syntonizer of microchannel base, lamb wave syntonizer includes parallel interdigital electrode, the electrode direction is on a parallel with the extending direction of microchannel, just lamb wave syntonizer is other a lateral wall department of microchannel is provided with the magnet to be used for realizing the particle trapper function on the chip when producing lamb wave.
4. The utility model provides a module is controlled to on-chip fluid, its characterized in that, includes the miniflow channel, the miniflow channel includes the kink, is located the lamb wave syntonizer of miniflow channel kink base, lamb wave syntonizer includes parallel interdigital form electrode, the electrode direction is on a parallel with the fluid entry direction of miniflow channel kink, the fluid export direction of perpendicular to miniflow channel kink to realize the on-chip fluid driver function when being used for producing the lamb wave.
5. The on-chip fluid handling module of any of claims 1-4, wherein the vertical comprises a positive and negative angular margin, or the horizontal comprises a positive and negative angular margin, the angular margin being less than 45 degrees.
6. An on-chip fluid handling module comprising a combination of at least two of the on-chip fluid handling modules of any of claims 1-5.
7. The on-chip fluid handling module of claim 6, wherein the combination of at least two comprises: a combination of at least two on-chip fluid manipulation modules of the same kind, or a combination of at least two on-chip fluid manipulation modules of a different kind.
8. The on-chip fluid handling module of claim 6, wherein the combination of at least two comprises:
at least two on-chip fluid handling modules of claim 1, wherein the outlets of the two on-chip fluid handling modules are connected to the inlet of one on-chip fluid handling module of claim 3 and then connected to the inlet of one on-chip fluid handling module of claim 4.
9. An acoustic fluid chip comprising a substrate having micro flow channels thereon, wherein the micro flow channels are provided with the on-chip fluid manipulation module according to any one of claims 1 to 8.
10. An analysis device comprising the acoustic fluidic chip of claim 9, a driving device for driving the lamb wave resonator on the acoustic fluidic chip, and an optical sensor directed toward the acoustic fluidic chip.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012239928A (en) * | 2011-05-16 | 2012-12-10 | Koji Toda | Ultrasonic fluid activation apparatus |
| CN111669143A (en) * | 2020-06-24 | 2020-09-15 | 上海科技大学 | Piezoelectric resonance micro-channel for liquid detection and preparation method thereof |
| CN113198551A (en) * | 2020-01-31 | 2021-08-03 | 安行生物技术有限公司 | Method for detecting biomolecules by using lamb wave resonator and microfluidic device |
| CN113210240A (en) * | 2021-03-23 | 2021-08-06 | 魔音智芯科技(深圳)有限公司 | Lamb wave device of double-sided interdigital transducer and preparation method thereof |
| CN114505105A (en) * | 2022-01-13 | 2022-05-17 | 电子科技大学 | Micro-fluidic chip based on memory calculation |
-
2022
- 2022-08-03 CN CN202210926644.8A patent/CN115468916A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012239928A (en) * | 2011-05-16 | 2012-12-10 | Koji Toda | Ultrasonic fluid activation apparatus |
| CN113198551A (en) * | 2020-01-31 | 2021-08-03 | 安行生物技术有限公司 | Method for detecting biomolecules by using lamb wave resonator and microfluidic device |
| CN111669143A (en) * | 2020-06-24 | 2020-09-15 | 上海科技大学 | Piezoelectric resonance micro-channel for liquid detection and preparation method thereof |
| CN113210240A (en) * | 2021-03-23 | 2021-08-06 | 魔音智芯科技(深圳)有限公司 | Lamb wave device of double-sided interdigital transducer and preparation method thereof |
| CN114505105A (en) * | 2022-01-13 | 2022-05-17 | 电子科技大学 | Micro-fluidic chip based on memory calculation |
Non-Patent Citations (2)
| Title |
|---|
| CHEN XIAN ET AL: "A self-contained acoustofluidic platform for biomarker detection", 《LAB ON A CHIP》, vol. 22, no. 20, 2 September 2022 (2022-09-02), pages 3817 - 3826 * |
| ZHANG HONGXIANG ET AL: "Bioparticle Manipulations Using Lamb Wave Resonator Array", 《2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)》, 2 November 2017 (2017-11-02), pages 1 - 4 * |
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