CN115452236A - Vacuum pressure measuring device, method and system - Google Patents
Vacuum pressure measuring device, method and system Download PDFInfo
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- CN115452236A CN115452236A CN202210965074.3A CN202210965074A CN115452236A CN 115452236 A CN115452236 A CN 115452236A CN 202210965074 A CN202210965074 A CN 202210965074A CN 115452236 A CN115452236 A CN 115452236A
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
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Abstract
The invention discloses a vacuum pressure measuring device, a method and a system, wherein the vacuum pressure measuring device comprises: the device comprises a cavity for simulating an application scene air pressure environment, a vacuum pressure sensor arranged in the cavity and an electric signal measuring instrument connected with the vacuum pressure sensor; the vacuum pressure sensor includes: the substrate is connected with the electric signal measuring instrument; a light emitting element connected to the substrate for generating light; a light receiving element connected to the substrate for receiving the light emitted from the light emitting element and generating an electrical signal; the bubble film is coated on the light-emitting element and the light-receiving element and used for reflecting the light emitted by the light-emitting element; the electric signal measuring instrument is used for detecting the electric signal generated by the light receiving element; and the air pressure intensity in the cavity can be measured and calculated according to the variable quantity of the electric signal measured by the electric signal measuring instrument. The invention can directly read the pressure change from the variable quantity of the electric signal without the data analysis and processing process, and has simpler measuring mode and quick response.
Description
Technical Field
The invention relates to the technical field of air pressure measurement, in particular to a vacuum pressure measuring device, method and system.
Background
At present, with the development of scientific technology, more and more instruments and equipment need to work in a low-pressure or high-pressure environment. Thus, a high-precision, high-resolution, small-volume, low-power-consumption vacuum pressure sensor is needed to monitor the pressure change of the working environment in real time.
Optical sensors commonly used to measure gas pressure are graphene sensors, zinc oxide nanostructure sensors, capacitive sensors, and the like. However, the problems common to the existing vacuum pressure sensors are: the measurement mode is complex, and auxiliary equipment is needed to analyze and process the measured data to obtain a corresponding pressure value; the response is slow, some devices need several seconds to several tens of seconds of preparation time before measurement, and some devices need several seconds of recovery time after measurement, so that the overall hysteresis rate is high.
Accordingly, there is a need for improvements and developments in the art.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a vacuum pressure measuring apparatus, method and system, so as to solve the problems of complex measuring method and slow response of the existing optical sensor for measuring air pressure.
The technical scheme of the invention is as follows:
a vacuum pressure measurement apparatus, comprising: the device comprises a cavity for simulating an application scene air pressure environment, a vacuum pressure sensor arranged in the cavity and an electric signal measuring instrument connected with the vacuum pressure sensor; wherein the vacuum pressure sensor comprises:
the substrate is connected with the electric signal measuring instrument;
a light emitting element connected to the substrate for generating light;
a light receiving element connected to the substrate for receiving the light emitted from the light emitting element and generating an electrical signal;
the bubble film is coated on the light-emitting element and the light-receiving element and used for reflecting the light emitted by the light-emitting element;
the electric signal measuring instrument is used for detecting the electric signal generated by the light receiving element;
and the air pressure intensity in the cavity can be measured and calculated according to the variable quantity of the electrical signal measured by the electrical signal measuring instrument.
In a further aspect of the present invention, the vacuum pressure measuring device further comprises: a power source; the power supply is connected with the substrate and used for supplying power to the vacuum pressure sensor.
In a further aspect of the present invention, the vacuum pressure measuring device further comprises: a light coupling layer; the light coupling layer is connected among the air bubble film, the light emitting element and the light receiving element; wherein, the bubble film is coated on the outer side of the optical coupling layer.
According to the invention, a closed space is arranged in the bubble film, a plurality of bubbles are arranged in the closed space, and the volume of the bubbles is changed along with the air pressure intensity in the cavity.
According to the further arrangement of the invention, the air bubble film is made of flexible material.
According to a further development of the invention, the flexible material is polydimethylsiloxane.
In a further aspect of the present invention, the vacuum pressure measuring device further comprises: a base; the cavity and the vacuum pressure sensor are arranged on the base.
Based on the same inventive concept, the invention also provides a vacuum pressure measuring method applied to the vacuum pressure measuring device, which comprises the following steps:
the air pressure change needing to be monitored in the air pressure environment of the application scene is simulated by adjusting the air pressure intensity in the cavity;
the bubble film enables the refraction angle of partial light emitted by the light-emitting element to change under the action of the change of air pressure;
the light intensity of the light reflected by the bubble film is received by the light receiving element to generate corresponding change, so that the electric signal generated by the light receiving element generates corresponding change;
the electric signal measuring instrument detects the variation of the electric signal according to the electric signal generated by the light receiving element;
and measuring and calculating the intensity of the air pressure in the cavity according to the variable quantity of the electric signal.
The invention further provides that the step of simulating the air pressure change to be monitored in the air pressure environment of the application scene by adjusting the air pressure intensity in the cavity comprises the following steps:
starting the electric signal measuring instrument and electrifying the vacuum pressure sensor;
and measuring the electric signal generated by the light receiving element.
Based on the same inventive concept, the invention also provides a vacuum pressure measuring system, which comprises a processor and the vacuum pressure measuring device; the processor is connected with the electric signal measuring instrument and used for measuring and calculating the air pressure intensity in the cavity according to the variable quantity of the electric signal measured by the electric signal measuring instrument.
The invention provides a vacuum pressure measuring device, a method and a system, wherein the vacuum pressure measuring device comprises: the device comprises a cavity for simulating an application scene air pressure environment, a vacuum pressure sensor arranged in the cavity and an electric signal measuring instrument connected with the vacuum pressure sensor; wherein the vacuum pressure sensor comprises: the substrate is connected with the electric signal measuring instrument; a light emitting element connected to the substrate for generating light; a light receiving element connected to the substrate for receiving the light emitted from the light emitting element and generating an electrical signal; the bubble film is coated on the light-emitting element and the light-receiving element and is used for reflecting the light emitted by the light-emitting element; the electric signal measuring instrument is used for detecting the electric signal generated by the light receiving element; and the air pressure intensity in the cavity can be measured and calculated according to the variation of the electric signal measured by the electric signal measuring instrument. The air pressure change to be monitored in the air pressure environment of the application scene is simulated by adjusting the air pressure intensity in the cavity, when the air pressure in the cavity changes, the light intensity of the light reflected by the bubble film received by the light receiving element changes, so that the magnitude of the electric signal generated by the light receiving element correspondingly changes, and then the electric signal measuring instrument detects the variation of the electric signal according to the electric signal generated by the light receiving element and measures and calculates the magnitude of the air pressure intensity in the cavity according to the variation of the electric signal. Therefore, the pressure intensity measuring device can directly read the pressure intensity change from the variable quantity of the electric signal, a complex data analysis and processing process is omitted, the measuring mode is simpler, and the response is fast.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic view of the overall structure of the vacuum pressure measuring apparatus of the present invention.
Fig. 2 is a schematic view of the structure of the vacuum pressure sensor of the present invention.
Fig. 3 is a schematic diagram of a vacuum pressure sensor in accordance with the present invention.
FIG. 4 is a functional block diagram of a vacuum pressure measurement system of the present invention.
Fig. 5 is a flow chart illustrating a vacuum pressure measuring method according to the present invention.
In the drawings, the reference numbers: 100. a vacuum pressure measuring device; 110. a cavity; 120. a vacuum pressure sensor; 121. a substrate; 122. a light emitting element; 123. a light receiving element; 124. a bubble film; 1241. air bubbles; 125. a light coupling layer; 130. an electrical signal measuring instrument; 140. a power source; 150. a base; 200. a processor.
Detailed Description
The invention provides a vacuum pressure measuring device, a method and a system, which can greatly save required space and energy in space ships and various outer space detectors which require refinement on various devices, and in the related field of medical health requiring better stability and response speed. In order to make the objects, technical solutions and effects of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
In the description and claims, the terms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. If there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.
It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or wirelessly coupled. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
In addition, technical solutions between the embodiments may be combined with each other, but must be based on the realization of the technical solutions by a person skilled in the art, and when the technical solutions are contradictory to each other or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The inventor researches and discovers that the existing optical sensors commonly used for measuring air pressure comprise a graphene sensor, a zinc oxide nano-structure sensor, a capacitance sensor and the like. The problems of the existing vacuum pressure sensor are that: the manufacture is complex, and chemical vapor deposition or other deposition etching methods are needed; the cost is high, and the price of the used materials is high; the measurement mode is complex, and auxiliary equipment is needed to analyze and process the measured data to obtain a corresponding pressure value; the response is slow, some devices need several seconds to several tens of seconds of preparation time before measurement, and some devices need several seconds of recovery time after measurement, so that the overall hysteresis rate is high.
In order to solve the above technical problems, the present invention provides a vacuum pressure measuring apparatus, method and system, wherein the vacuum pressure measuring apparatus comprises: the device comprises a cavity for simulating an application scene air pressure environment, a vacuum pressure sensor arranged in the cavity and an electric signal measuring instrument connected with the vacuum pressure sensor; wherein the vacuum pressure sensor comprises: the substrate is connected with the electric signal measuring instrument; a light emitting element connected to the substrate for generating light; a light receiving element connected to the substrate for receiving the light emitted from the light emitting element and generating an electrical signal; the bubble film is coated on the light-emitting element and the light-receiving element and used for reflecting the light emitted by the light-emitting element; the electric signal measuring instrument is used for detecting the electric signal generated by the light receiving element. The air pressure change to be monitored in the air pressure environment of the application scene is simulated by adjusting the air pressure intensity in the cavity, when the air pressure in the cavity changes, the light intensity of the light reflected by the bubble film received by the light receiving element changes, so that the magnitude of the electric signal generated by the light receiving element correspondingly changes, the electric signal measuring instrument detects the change amount of the electric signal according to the electric signal generated by the light receiving element, and the magnitude of the air pressure intensity in the cavity is measured and calculated according to the change amount of the electric signal. Therefore, the pressure intensity measuring device can directly read the pressure intensity change from the variable quantity of the electric signal, saves the complex data analysis and processing process, and has the advantages of simpler measuring mode, quick response, simple manufacture and lower cost.
Referring to fig. 1 to 3, the present invention provides a vacuum pressure measuring device according to a preferred embodiment.
Referring to fig. 1 to 3, a vacuum pressure measuring apparatus 100 according to the present invention includes: the air pressure measuring device comprises a cavity 110 for simulating an air pressure environment of an application scene, a vacuum pressure sensor 120 arranged in the cavity 110, and an electric signal measuring instrument 130 connected with the vacuum pressure sensor 120. Wherein the vacuum pressure sensor 120 includes: a substrate 121 connected to the electrical signal measuring instrument 130; a light emitting element 122 connected to the substrate 121 for generating light; a light receiving element 123 connected to the substrate 121, for receiving the light emitted from the light emitting element 122 and generating an electrical signal; a bubble film 124 coated on the light emitting element 122 and the light receiving element 123 for reflecting the light emitted by the light emitting element 122; the electrical signal measuring instrument 130 is configured to detect an electrical signal generated by the light receiving element 123; the air pressure intensity in the cavity 110 can be calculated according to the variation of the electrical signal measured by the electrical signal measuring instrument 130.
Specifically, the light emitting element 122 is a light source, and the light receiving element 123 is a light detector, which can receive a light signal emitted by the light source and convert the light signal into an electrical signal, such as a photocurrent signal (induced current). The electrical signal generated by the optical detector can be transmitted to the electrical signal measuring instrument 130 through the substrate 121. The chamber 110 has a certain accommodating space, and the vacuum pressure sensor 120 may be accommodated in the chamber 110. The principle of the cavity 110 for simulating the application scene air pressure environment is that air in the cavity 110 is pumped out by using a vacuum pump or air valve is opened to put air into the cavity 110, so that the air pressure in the cavity 110 becomes smaller or larger, and therefore the air pressure change needing to be monitored in the application environment is simulated. The bubble film 124 can reflect the light emitted from the light source to the light detector, and when the air pressure of the cavity 110 changes, the light intensity reflected by the bubble film 124 also changes, so that the light intensity received by the light detector changes correspondingly.
In specific implementation, the magnitude of the air pressure intensity in the cavity 110 is adjusted by a vacuum pump to simulate an air pressure change to be monitored in an application scene air pressure environment, when the air pressure in the cavity 110 changes, the light intensity of the light reflected by the bubble film 124 received by the light receiving element 123 changes, so that the magnitude of the electrical signal generated by the light receiving element 123 changes correspondingly, then the electrical signal measuring instrument 130 detects the variation of the electrical signal according to the electrical signal generated by the light receiving element 123, and measures and calculates the magnitude of the air pressure intensity in the cavity 110 according to the variation of the electrical signal, specifically, the magnitude of the air pressure intensity can be obtained through a linear negative correlation between the pressure and the variation of the corresponding electrical signal which are established before. Therefore, the pressure intensity change can be directly read from the variable quantity of the electric signal, the complex data analysis and processing process is omitted, the measuring mode is simpler, the response is fast, the sensitivity is good, and the repeatability is good. In addition, when the vacuum pressure measuring device 100 provided by the invention is manufactured, chemical vapor deposition or other deposition etching methods are not needed, and the used materials are simpler, so that the manufacturing process and the cost are relatively lower, the whole volume after completion is smaller, the structure is simple, and the light emitting element 122 and the light receiving element 123 have the advantages of long service life, low power consumption and stable light emission, so that the durability of the vacuum pressure measuring device 100 is better.
Referring to fig. 1, in a further implementation of an embodiment, the vacuum pressure measuring device 100 further includes: a power supply 140; the power supply 140 is connected to the substrate 121 for supplying power to the vacuum pressure sensor 120.
Specifically, the power source 140 is connected to the substrate 121 of the vacuum pressure sensor 120 to supply power to the light emitting element 122 and the light receiving element 123 through the substrate 121. In some embodiments, the light source may also power the electrical signal measuring instrument 130.
Referring to fig. 2, in a further implementation of an embodiment, the vacuum pressure measuring apparatus 100 further includes: a light coupling layer 125; the light coupling layer 125 is connected between the bubble film 124 and the light emitting element 122 and the light receiving element 123; wherein, the bubble film 124 covers the outer side of the light coupling layer 125.
Specifically, the light coupling layer 125 is used as a substrate of the light emitting element 122 and the light receiving element 123, and the light emitting element 122 and the light receiving element 123 are integrated on the light coupling layer 125 to form a light receiving and emitting chip, and then are coupled to the substrate 121, so as to facilitate the mounting of the light emitting element 122 and the light receiving element 123. After the light emitting element 122 and the light receiving element 123 are coupled to the substrate 121, the bubble film 124 is covered on the light coupling layer 125.
Referring to fig. 2 and fig. 3, in a further implementation manner of an embodiment, a closed space is disposed in the bubble film 124, a plurality of bubbles 1241 are disposed in the closed space, and a volume of the bubbles 1241 varies with a magnitude of the air pressure intensity in the cavity 110.
Specifically, a closed space is provided in the bubble film 124 for adapting to the air pressure variation induction, and a plurality of bubbles 1241 are made in the closed space of the bubble film 124 by means of stirring, injection and the like, wherein the size of the bubbles 1241 is micron-sized. The bubble film 124 is made of a flexible material, and when the pressure at the periphery of the bubble film 124 changes, the volume of the bubbles 1241 in the bubble film 124 changes, that is, the volume of the bubbles 1241 becomes larger or smaller, so that the refraction angle of the part of the light reflected by the bubble film 124 changes, the light intensity reflected by the bubble film 124 collected by the light collecting element 123 becomes smaller or larger, and the electrical signal generated by the light collecting element 123 becomes smaller or larger.
In one implementation, the flexible material may be, but is not limited to being, a Polydimethylsiloxane (PDMS) material.
Referring to fig. 1, in a further implementation of an embodiment, the vacuum pressure measuring apparatus 100 further includes: a base 150; the chamber 110 and the vacuum pressure sensor 120 are disposed on the base 150.
Specifically, the surface of the base 150 is a plane, the vacuum pressure sensor 120 can be placed on the base 150, and the cavity 110 is mounted on the base 150 and covers the vacuum pressure sensor 120.
Referring to fig. 4, in some embodiments, the present invention further provides a vacuum pressure measurement system, which includes a processor 200 and the vacuum pressure measurement apparatus 100 as described above; the processor 200 is connected to the electrical signal measuring instrument 130, and is configured to measure and calculate the air pressure intensity in the cavity 110 according to the variation of the electrical signal measured by the electrical signal measuring instrument 130.
Specifically, the vacuum pressure measuring apparatus 100 measures the variation of the electrical signal in the pressure variation range to be monitored, obtains the magnitude of the variation of the electrical signal corresponding to the pressure magnitude, and establishes the linear negative correlation between the pressure and the variation of the corresponding electrical signal through the processor 200. When measuring the pressure in the working environment, the vacuum pressure measuring apparatus 100 transmits an electrical signal (e.g., a photocurrent signal) to the processor 200 after obtaining the electrical signal, and the processor 200 may obtain the pressure by comparing the established pressure-current variation relationship. The vacuum pressure measuring apparatus 100 is specifically described in the above embodiments of the vacuum pressure measuring apparatus 100, and is not described herein again.
Referring to fig. 5, in some embodiments, the present invention further provides a vacuum pressure measuring method applied to the vacuum pressure measuring apparatus, which includes the steps of:
s100, simulating the air pressure change needing to be monitored in the air pressure environment of the application scene by adjusting the air pressure intensity in the cavity;
s200, changing the refraction angle of partial light emitted by the light-emitting element by the bubble film under the action of the change of air pressure;
s300, the light intensity of the light reflected by the bubble film is received by the light receiving element to generate corresponding change, so that the electric signal generated by the light receiving element generates corresponding change;
s400, detecting the variation of the electric signal by the electric signal measuring instrument according to the electric signal generated by the light receiving element;
s500, measuring and calculating the air pressure intensity in the cavity according to the variable quantity of the electric signal.
Specifically, the air pressure intensity in the cavity is adjusted through the vacuum pump to simulate the air pressure change to be monitored in an application scene air pressure environment, when the air pressure in the cavity changes, the light intensity of the light reflected by the bubble film received by the light receiving element changes, so that the magnitude of the electric signal generated by the light receiving element correspondingly changes, the electric signal measuring instrument detects the variation of the electric signal according to the electric signal generated by the light receiving element, and measures and calculates the magnitude of the air pressure intensity in the cavity according to the variation of the electric signal, specifically, the magnitude of the air pressure intensity can be obtained through the linear negative correlation between the pressure and the variation of the corresponding electric signal which are established before. Therefore, the pressure intensity measuring device can directly read the pressure intensity change from the variable quantity of the electric signal, a complex data analysis and processing process is omitted, the measuring mode is simpler, and the response is fast. In addition, the vacuum pressure measuring device provided by the invention does not need to use chemical vapor deposition or other deposition etching methods during manufacturing, and the used materials are simpler, so the manufacturing process and the cost are relatively lower.
In some embodiments, step S100 further comprises, before step S:
s110, starting an electric signal measuring instrument and electrifying the vacuum pressure sensor;
and S120, measuring the electric signal generated by the light receiving element.
Specifically, when the working air pressure environment is monitored, firstly, the electric signal measuring instrument is turned on, power is supplied to the vacuum pressure sensor through the power supply, namely, the vacuum pressure sensor supplies power to the light emitting element and the light receiving element, then, the electric signal measuring instrument starts to detect the electric signal generated by the light receiving element, when the pressure in the cavity changes, the light intensity of light reflected by the bubble film received by the light receiving element correspondingly changes, the induced electric signal generated by the light receiving element changes accordingly, and the change of the electric signal can be detected through the electric signal measuring instrument.
In summary, the vacuum pressure measuring device, method and system provided by the present invention have the following advantages:
the pressure intensity change can be directly read from the variable quantity of the electric signal based on the light reflection principle, so that the complex data analysis and processing process is omitted, the measurement mode is simpler, and the method has the advantages of quick response, good sensitivity and good repeatability;
when the vacuum pressure measuring device provided by the invention is manufactured, chemical vapor deposition or other deposition etching methods are not needed, and the used materials are simpler, so that the manufacturing process and the cost are relatively lower;
the invention has simple structure, easily obtained materials, smaller overall volume after completion and easier measurement steps, thereby reducing the overall cost;
the light emitting element and the light receiving element have the advantages of long service life, low power consumption and stable light emission, so that the durability of the vacuum pressure measuring device is better.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.
Claims (10)
1. A vacuum pressure measurement device, comprising: the device comprises a cavity for simulating an application scene air pressure environment, a vacuum pressure sensor arranged in the cavity and an electric signal measuring instrument connected with the vacuum pressure sensor; wherein the vacuum pressure sensor comprises:
the substrate is connected with the electric signal measuring instrument;
a light emitting element connected to the substrate for generating light;
a light receiving element connected to the substrate for receiving the light emitted from the light emitting element and generating an electrical signal;
the bubble film is coated on the light-emitting element and the light-receiving element and used for reflecting the light emitted by the light-emitting element;
the electric signal measuring instrument is used for detecting the electric signal generated by the light receiving element;
and the air pressure intensity in the cavity can be measured and calculated according to the variation of the electric signal measured by the electric signal measuring instrument.
2. The vacuum pressure measuring apparatus according to claim 1, further comprising: a power source; the power supply is connected with the substrate and used for supplying power to the vacuum pressure sensor.
3. The vacuum pressure measuring apparatus according to claim 1, further comprising: a light coupling layer; the light coupling layer is connected between the bubble film and the light-emitting element and between the bubble film and the light-receiving element; wherein, the bubble film is coated on the outer side of the light coupling layer.
4. The vacuum pressure measuring device according to claim 1 or 3, wherein a closed space is provided in the bubble film, a plurality of bubbles are provided in the closed space, and the volume of the bubbles changes with the intensity of the air pressure in the chamber.
5. Vacuum pressure measuring device according to claim 4, characterized in that the bubble membrane is made of a flexible material.
6. Vacuum pressure measuring arrangement according to claim 5, characterized in that the flexible material is polydimethylsiloxane.
7. The vacuum pressure measuring apparatus according to claim 1, further comprising: a base; the cavity and the vacuum pressure sensor are arranged on the base.
8. A vacuum pressure measuring method applied to the vacuum pressure measuring apparatus according to any one of claims 1 to 7, comprising:
the air pressure change needing to be monitored in the air pressure environment of the application scene is simulated by adjusting the air pressure intensity in the cavity;
the bubble film enables the refraction angle of partial light emitted by the light-emitting element to change under the action of the air pressure change;
the light intensity of the light reflected by the bubble film is received by the light receiving element to generate corresponding change, so that the electric signal generated by the light receiving element generates corresponding change;
the electric signal measuring instrument detects the variation of the electric signal according to the electric signal generated by the light receiving element;
and measuring and calculating the intensity of the air pressure in the cavity according to the variable quantity of the electric signal.
9. The vacuum pressure measuring method according to claim 8, wherein the step of simulating the air pressure change to be monitored in the application scene air pressure environment by adjusting the air pressure intensity in the cavity is preceded by the steps of:
starting the electric signal measuring instrument and electrifying the vacuum pressure sensor;
and measuring the electric signal generated by the light receiving element.
10. A vacuum pressure measurement system, comprising a processor and a vacuum pressure measurement device according to any of claims 1-7; the processor is connected with the electrical signal measuring instrument and used for measuring and calculating the air pressure intensity in the cavity according to the variable quantity of the electrical signal measured by the electrical signal measuring instrument.
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| CN202210965074.3A CN115452236A (en) | 2022-08-12 | 2022-08-12 | Vacuum pressure measuring device, method and system |
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| CN202210965074.3A CN115452236A (en) | 2022-08-12 | 2022-08-12 | Vacuum pressure measuring device, method and system |
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