CN115683443B - Pressure sensor based on fiber bragg grating and pressure detection method - Google Patents
Pressure sensor based on fiber bragg grating and pressure detection method Download PDFInfo
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Abstract
The application provides a pressure sensor based on fiber bragg grating and a pressure detection method, wherein the sensor comprises the following components: the pressure sensor main body is closed at the bottom and provided with an opening at the top; the pressure sensing film is covered on the top opening of the pressure sensor main body; the pressure sensing film deforms along with the pressure difference between the inside and the outside of the cavity in the pressure sensor main body; the fiber bragg grating sensor is adhered and arranged on the pressure sensing film along the radial direction, and a grating of the fiber bragg grating sensor is arranged in the center of the pressure sensing film. According to the pressure detection method, a pressure sensor is placed in an environment to be detected, the Bragg wavelength variation to be detected is obtained through detection, and the Bragg wavelength variation to be detected is substituted into a standard pressure function to calculate and obtain the pressure of the environment to be detected. The application can not be influenced by environmental factors when measuring pressure intensity, and the measurement result is more accurate.
Description
Technical Field
The application relates to the technical field of optical fiber sensing, in particular to a pressure sensor based on an optical fiber grating and a pressure detection method.
Background
The pressure sensor is widely applied to the fields of meteorology, military, aviation, navigation, agriculture, measurement, geology, industrial and mining enterprises, scientific research and the like. The traditional pressure sensor is mostly electronic, but cannot guarantee the accuracy of measurement when facing special environments. For example, the problem of electromagnetic interference exists in a strong electromagnetic field environment, the problem that long-term real-time online monitoring cannot be realized in a large-area environment exists, the problem that temperature drift is large in a quick-temperature-change environment exists, and the problem can influence the measurement accuracy of a traditional pressure sensor.
Disclosure of Invention
In view of the above, the embodiment of the application provides a pressure sensor based on a fiber bragg grating and a pressure detection method, so as to solve the problems that the measurement result of the existing pressure sensor is easily affected by the environment, the measurement precision is low and the resolution is poor.
One aspect of the present application provides a fiber grating-based pressure sensor comprising:
the pressure sensor body is a cavity with a closed bottom and an opening at the top;
the pressure sensing film is covered on the top opening of the pressure sensor main body to close the top opening; the pressure sensing film deforms along with the pressure difference between the inside and the outside of the cavity in the pressure sensor main body, the pressure sensing film bulges outwards when the pressure in the cavity is higher than the external pressure, and the pressure sensing film is inwards sunken when the pressure in the cavity is lower than the external pressure; under the condition that the pressure sensing film is not deformed, filling preset media into the pressure sensor main body and the pressure sensing film, and recording the internal pressure as preset standard pressure; the pressure sensing film is a polyimide film;
the fiber bragg grating sensor is adhered and arranged on the pressure sensing film along the radial direction, and a grating of the fiber bragg grating sensor is arranged in the center of the pressure sensing film;
the pressure sensing film is raised or recessed by the change of external pressure to cause the surface stress change of the pressure sensing film, the fiber bragg grating sensor converts the stress change into Bragg wavelength change, so that the Bragg wavelength is determined by detecting the wavelength of reflected light, and a corresponding detection pressure value is calculated according to the change amount of the Bragg wavelength and the preset standard pressure.
In some embodiments, the pressure sensor body is fabricated from a stainless steel material, and the stainless steel cavity wall thickness of the pressure sensor body is 5mm or greater.
In some embodiments, when measuring the gas pressure, the pressure sensor body is filled with an inert gas, which is helium or argon.
In some embodiments, the pressure sensor body is filled with deionized water when measuring the liquid pressure.
In some embodiments, the pressure sensor body is filled with kerosene when the measured liquid is oil.
In some embodiments, the polyimide film has a thickness of 0.3 to 1mm.
Another aspect of the present application provides a pressure detection method, including:
acquiring a standard pressure function of the Bragg wavelength variation corresponding to each preset standard pressure, and each preset standard pressure and the standard internal pressure of the sensor;
and placing the pressure sensor based on the fiber bragg grating in an environment to be detected, detecting to obtain the Bragg wavelength variation to be detected, substituting the Bragg wavelength variation to be detected into the standard pressure function, and calculating to obtain the pressure of the environment to be detected.
In some embodiments, before obtaining the standard pressure function related to the standard internal pressure of the sensor, each preset standard pressure and the bragg wavelength variation corresponding to each preset standard pressure, the method further includes:
placing the pressure sensor based on the fiber bragg grating in a plurality of preset standard pressure environments, and respectively detecting Bragg wavelength variation corresponding to each preset standard pressure;
acquiring the standard internal pressure of the sensor when the pressure sensing film is not deformed in the pressure sensor based on the fiber bragg grating;
and fitting according to the standard internal pressure of the sensor, the pressure value of each preset standard pressure and the Bragg wavelength variation corresponding to each preset standard pressure to obtain a standard pressure function.
The application has the advantages that:
according to the pressure sensor and the pressure detection method based on the fiber bragg grating, the pressure difference is formed between the pressure sensor and the internal preset standard pressure under the action of the external environment pressure, so that the pressure sensing film is outwards protruded or inwards recessed, the fiber bragg grating sensor is adopted to convert the deformation of the pressure sensing film into the Bragg wavelength change, and therefore a mapping relation between the Bragg wavelength change and the pressure change is established, and the monitoring of the external pressure is realized. The fiber bragg grating sensor has the characteristics of interference resistance, high sensitivity, high spatial resolution, corrosion resistance and the like, so that the pressure sensor can accurately measure the pressure in a complex environment.
Further, the pressure sensor main body is made of stainless steel materials, so that the pressure sensor main body can be prevented from being damaged under a large pressure difference.
Furthermore, the polyimide film is used as the pressure sensing film, and has good elastic deformation capability, so that the Bragg wavelength of the fiber bragg grating sensor is changed more remarkably under the same pressure difference, and the sensitivity of the pressure sensor is improved. Meanwhile, because of the good elastic deformation capability of the polyimide film, the pressure sensor based on the fiber bragg grating can be used in high-altitude low-pressure areas.
Furthermore, the pressure sensor based on the fiber bragg grating provided by the application has the advantages of simple structure, easiness in installation, small size, light weight and convenience in measurement and carrying.
Additional advantages, objects, and features of the application will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the application. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and drawings.
It will be appreciated by those skilled in the art that the objects and advantages that can be achieved with the present application are not limited to the above-described specific ones, and that the above and other objects that can be achieved with the present application will be more clearly understood from the following detailed description.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate and together with the description serve to explain the application. The components in the figures are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the application. Corresponding parts in the drawings may be exaggerated, i.e. made larger relative to other parts in an exemplary device actually manufactured according to the present application, for convenience in showing and describing some parts of the present application. In the drawings:
fig. 1 is a schematic diagram of a pressure sensor based on a fiber grating according to an embodiment of the application.
FIG. 2 is a graph of the variation of Bragg wavelength versus external atmospheric pressure according to one embodiment of the present application.
100: a pressure sensor body; 200: a pressure sensing membrane; 300: a fiber grating sensor.
Detailed Description
The present application will be described in further detail with reference to the following embodiments and the accompanying drawings, in order to make the objects, technical solutions and advantages of the present application more apparent. The exemplary embodiments of the present application and the descriptions thereof are used herein to explain the present application, but are not intended to limit the application.
It should be noted here that, in order to avoid obscuring the present application due to unnecessary details, only structures and/or processing steps closely related to the solution according to the present application are shown in the drawings, while other details not greatly related to the present application are omitted.
It should be emphasized that the term "comprises/comprising" when used herein is taken to specify the presence of stated features, elements, steps or components, but does not preclude the presence or addition of one or more other features, elements, steps or components.
It is also noted herein that the term "coupled" may refer to not only a direct connection, but also an indirect connection in which an intermediate is present, unless otherwise specified.
Hereinafter, embodiments of the present application will be described with reference to the accompanying drawings. In the drawings, the same reference numerals represent the same or similar components, or the same or similar steps.
The traditional electronic pressure sensor has low measurement precision and poor resolution, and is easily affected by the environment to cause inaccurate measurement results, so the application provides the pressure sensor based on the fiber bragg grating.
The optical fiber sensing technology is an emerging sensing technology, has the advantages of being passive, resistant to electromagnetic interference, long in information transmission distance, reliable in data information transmission and the like, and is widely applied to various fields, thus being an important electric power monitoring technical means.
Fiber gratings are most commonly used in fiber sensing technology, and are manufactured by processing the fiber core so that the refractive index of the fiber core region changes, and small periodic modulation is generated. Today's technologyThe main stream fiber grating is prepared by ultraviolet exposure preparation method and CO 2 Laser preparation, arc discharge preparation, femtosecond laser preparation, etching and grooving preparation, etc. When the fiber grating is subjected to stress change or the temperature at which the fiber grating is positioned is changed, the wavelength of the fiber grating is changed. Wherein stretching and increasing the temperature of the grating increases the wavelength of the grating and compressing and decreasing the temperature of the grating decreases the wavelength of the grating.
The application provides a pressure sensor based on fiber bragg grating, as shown in fig. 1, which comprises:
the pressure sensor body 100, the pressure sensor body 100 is a cavity with a closed bottom and an opening at the top.
In some embodiments, the pressure sensor body 100 is fabricated from a stainless steel material. The stainless steel cavity can ensure that the pressure sensor body 100 is not damaged under a large pressure difference.
In this embodiment, the wall thickness of the stainless steel cavity of the pressure sensor main body 100 is greater than or equal to 5mm, so as to ensure that the pressure sensor main body 100 has better strength and cannot be damaged under a larger pressure difference.
A pressure sensing diaphragm 200, the pressure sensing diaphragm 200 being overlaid on the top opening of the pressure sensor body 100 to close the top opening. The pressure sensing diaphragm 200 deforms according to the pressure difference between the inside and the outside of the cavity in the pressure sensor body 100, the pressure sensing diaphragm 200 bulges outwards when the pressure in the cavity is higher than the external pressure, and the pressure sensing diaphragm 200 bulges inwards when the pressure in the cavity is lower than the external pressure.
In other embodiments, a sealing rubber ring is disposed at the top opening of the pressure sensor main body 100, so that when the pressure sensing membrane 200 is covered on the top opening of the pressure sensor main body 100, a sealing effect can be increased, and leakage of gas or liquid in the pressure sensor main body 100 can be prevented.
The fiber bragg grating sensor 300 is adhered and arranged on the pressure sensing film 200 along the radial direction, and the grating of the fiber bragg grating sensor 300 is arranged at the center of the pressure sensing film. The fiber bragg grating sensor 300 is attached to the pressure-sensitive film 200 by an optical epoxy adhesive.
The fiber grating sensor 300 has the characteristics of interference resistance, high sensitivity, high spatial resolution, corrosion resistance and the like, so that the pressure can be measured in a complex environment.
In this embodiment, the pressure sensing thin film 200 is raised or depressed by the external pressure, resulting in a surface stress change of the pressure sensing thin film 200, and the fiber grating sensor 300 converts the stress change into a bragg wavelength change to determine the bragg wavelength by detecting the wavelength of the reflected light, and calculates the corresponding pressure.
The fiber grating sensor 300 operates on the principle that: when the stress of the fiber grating sensor changes, the grating pitch and refractive index of the fiber grating change, so that the Bragg wavelength changes. The bragg wavelength is determined by detecting the wavelength of the light reflected from the fiber bragg grating sensor 300, so that corresponding pressure information can be obtained according to the bragg wavelength.
Further, in the present embodiment, the working principle of the pressure sensor based on the fiber bragg grating is: the pressure sensing thin film 200 is deformed due to the change of the pressure difference between the inside and outside of the cavity of the pressure sensor main body 100, so that the surface of the pressure sensing thin film 200 generates a stress change, the fiber bragg grating sensor 300 converts the received stress change into a bragg wavelength change, determines the bragg wavelength through the wavelength of the reflected light, and calculates the corresponding pressure according to the change of the bragg wavelength.
In some embodiments, the pressure sensing membrane 200 is a polyimide membrane having a thickness of 0.3mm-1mm.
In other embodiments, pressure sensing diaphragm 200 is made of pure titanium, TC4 titanium alloy, or beryllium bronze.
In this embodiment, a polyimide film with a thickness of 0.3mm is used as the pressure sensing film 200, and the polyimide film with a thickness of 0.3mm has a higher tensile strength, so that the pressure sensing film 200 can still deform and cannot be damaged under the condition that the pressure difference between the inside and the outside of the cavity in the pressure sensor 100 is larger, and meanwhile, compared with films made of other materials, the polyimide film with a thickness of 0.3mm can generate larger deformation under the same pressure difference, so that the stress variation suffered by the pressure sensing film 200 is more obvious, and the fiber bragg grating sensor 300 can better convert the stress variation into the bragg wavelength variation.
In some embodiments, the pressure sensor body 100 is filled with an inert gas when measuring the gas pressure.
In the present embodiment, when measuring the gas pressure, the inert gas filled in the pressure sensor body 100 is helium or argon. Inert gas is inert in chemical nature and thus serves as a shielding gas to ensure that the pressure sensor body 100 is not damaged under large pressure differentials.
In other embodiments, the inert gas filled within the pressure sensor body 100 is krypton, xenon, or radon.
In some embodiments, deionized water may be filled into the pressure sensor body 100 when measuring the liquid pressure. For example, when measuring the pressure of a body of water in the deep sea, under standard atmospheric pressure, after deionized water is injected into the cavity of the pressure sensor body 100, the pressure sensing film 200 is covered on the top opening of the pressure sensor body 100, and the fiber grating sensor 300 is attached to the pressure sensing film 200 in the radial direction. When the pressure sensor main body 100 is placed in the deep sea, when the pressure of the external water body is higher than the pressure in the cavity of the pressure sensor main body 100, the pressure sensing film 200 is inwards sunken to generate stress, the fiber bragg grating sensor 300 converts the received stress into Bragg wavelength change, and the water body pressure is calculated according to a pressure calculation formula; when the external water pressure is lower than the pressure in the cavity of the pressure sensor main body 100, the pressure sensing film 200 protrudes outwards to generate stress, the fiber bragg grating sensor 300 converts the received stress into Bragg wavelength change, and the water pressure is calculated according to a pressure calculation formula.
In other embodiments, the chamber of the pressure sensor body 100 may be filled with kerosene when measuring the pressure within the oil environment.
Another aspect of the present application provides a pressure detecting method including steps S101 to S102:
step S101: and acquiring a standard pressure function related to the standard internal pressure of the sensor, each preset standard pressure and the Bragg wavelength variation corresponding to each preset standard pressure.
Step S102: and placing the pressure sensor based on the fiber bragg grating in an environment to be detected, detecting to obtain the Bragg wavelength variation to be detected, and substituting the Bragg wavelength variation to be detected into a standard pressure function to calculate to obtain the pressure of the environment to be detected.
Because the pressure sensor based on the fiber bragg grating is preset, the size of the structural parameter and the preset standard pressure of the preset medium filled in the sensor are known, and the standard pressure function cannot change under the condition of determining the structural characteristics, the standard pressure function can be directly acquired in the embodiment within a set life cycle to perform pressure detection.
In some embodiments, before obtaining the standard pressure function related to the standard internal pressure of the sensor, each preset standard pressure, and the bragg wavelength variation corresponding to each preset standard pressure, steps S201 to S203 are further included:
step S201: and placing the pressure sensor based on the fiber bragg grating in a plurality of preset standard pressure environments, and respectively detecting the Bragg wavelength variation corresponding to each preset standard pressure.
Step S202: in the fiber bragg grating-based pressure sensor, the standard internal pressure of the sensor is obtained when the pressure sensing film 200 is not deformed.
Step S203: and fitting according to the standard internal pressure of the sensor, the pressure value of each preset standard pressure and the Bragg wavelength variation corresponding to each preset standard pressure to obtain a standard pressure function.
Fiber grating-based pressure sensors can cause some performance differences during manufacturing due to process variations. Meanwhile, in the use process, the equipment is influenced by the environment to cause performance deviation, so that the standard pressure function of the pressure sensor can change, and in some occasions with higher precision requirements, calibration is needed to be carried out again before the equipment is used, and the standard pressure function is determined again so as to ensure the measurement accuracy.
Specifically, in the embodiment, the pressure sensor based on the fiber bragg grating is filled with a preset medium at the initial stage of manufacturing, and the preset medium can be gas or liquid according to the difference of detection objects, and the type of gas and liquid can be set according to the requirements of specific application scenes. After filling the preset medium, the pressure sensor internally forms standard internal pressure, when the external pressure changes, the pressure sensing film can receive the change of the internal pressure and the external pressure difference to generate deformation, when the pressure in the cavity is higher than the external pressure, the pressure sensing film 200 protrudes outwards, and when the pressure in the cavity is lower than the external pressure, the pressure sensing film 200 is recessed inwards. The fiber bragg grating sensor is fixed on the pressure sensing film 200, the Bragg wavelength is changed due to the stress change under the deformation effect, the change quantity of the Bragg wavelength can reflect the pressure difference between the external environment and the standard internal pressure, and the pressure can be detected by establishing the mapping relation.
In the practical application process, the pressure sensor can be used for detecting the Bragg wavelength variation under the environment of a plurality of known pressures, so that a relation diagram of the Bragg wavelength variation and the external pressure is built, a standard pressure function of the pressure sensor is built by further fitting a curve, and the external pressure can be calculated through the standard pressure function.
In general, the internal and external pressure differences of the pressure sensor are linearly related to the ambient pressure, so that the variation of the bragg wavelength is also linearly related to the ambient pressure, and the standard pressure function can be written as:
Y＝aX+b；
wherein Y represents the ambient pressure, X represents the Bragg wavelength variation, and a and b are fixed parameters.
The following description is provided in connection with one embodiment:
the pressure sensor body 100 is a cylindrical cavity with a closed bottom and an opening at the top, the cavity of the pressure sensor body 100 is made of stainless steel with the thickness of 5mm, the pressure sensing film 200 is a polyimide film with the thickness of 0.3mm, the optical epoxy resin glue is utilized to fix the fiber bragg grating sensor 300 on the pressure sensing film 200, and the pressure sensor body 100 cavity is filled with argon gas, so that the standard internal pressure of the pressure sensor is formed. And (3) placing the air pressure sensor in a plurality of environments with known air pressure for detection to obtain Bragg wavelength variation corresponding to each preset standard air pressure, so as to establish a relation diagram of the Bragg wavelength variation of the air pressure sensor and the external air pressure, and further establishing a fitting curve to obtain a standard pressure function of the air pressure sensor as shown in fig. 2.
The calculation formula of the standard pressure function is as follows:
Y＝0.01229x+1021；
wherein Y represents external air pressure, x represents Bragg wavelength variation of the fiber grating, 0.01229 represents pressure-sensitive coefficient of the grating, 1021 represents actual air pressure at the time of measuring each preset standard pressure as 1021hpa.
In summary, according to the pressure sensor and the pressure detection method based on the fiber bragg grating, the pressure difference is formed between the pressure sensor and the internal preset standard pressure under the action of the external environment pressure, so that the pressure sensing film is outwards protruded or inwards recessed, the fiber bragg grating sensor is adopted to convert the deformation of the pressure sensing film into the Bragg wavelength change, and the mapping relation between the Bragg wavelength change and the pressure change is established, so that the monitoring of the external pressure is realized. The fiber bragg grating sensor has the characteristics of interference resistance, high sensitivity, high spatial resolution, corrosion resistance and the like, so that the pressure sensor can accurately measure the pressure in a complex environment.
Further, the pressure sensor main body is made of stainless steel materials, so that the pressure sensor main body can be prevented from being damaged under a large pressure difference.
Furthermore, the polyimide film is used as the pressure sensing film, and has good elastic deformation capability, so that the Bragg wavelength of the fiber bragg grating sensor is changed more remarkably under the same pressure difference, and the sensitivity of the pressure sensor is improved. Meanwhile, because of the good elastic deformation capability of the polyimide film, the pressure sensor based on the fiber bragg grating can be used in high-altitude low-pressure areas.
Furthermore, the pressure sensor based on the fiber bragg grating provided by the application has the advantages of simple structure, easiness in installation, small size, light weight and convenience in measurement and carrying.
Correspondingly, the application also provides a device comprising a computer apparatus, the computer apparatus comprising a processor and a memory, the memory having stored therein computer instructions for executing the computer instructions stored in the memory, the device implementing the steps of the method as described above when the computer instructions are executed by the processor.
It should be understood that the application is not limited to the particular arrangements and instrumentality described above and shown in the drawings. For the sake of brevity, a detailed description of known methods is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method processes of the present application are not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between steps, after appreciating the spirit of the present application.
In this disclosure, features that are described and/or illustrated with respect to one embodiment may be used in the same way or in a similar way in one or more other embodiments and/or in combination with or instead of the features of the other embodiments.
The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, and various modifications and variations can be made to the embodiments of the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (6)
1. A fiber grating-based pressure sensor, comprising:
the pressure sensor body is a cavity with a closed bottom and an opening at the top;
the pressure sensing film is covered on the top opening of the pressure sensor main body to close the top opening; the pressure sensing film deforms along with the pressure difference between the inside and the outside of the cavity in the pressure sensor main body, the pressure sensing film bulges outwards when the pressure in the cavity is higher than the external pressure, and the pressure sensing film is inwards sunken when the pressure in the cavity is lower than the external pressure; under the condition that the pressure sensing film is not deformed, filling preset media into the pressure sensor main body and the pressure sensing film, and recording the internal pressure as preset standard pressure; the pressure sensing film is a polyimide film;
the fiber bragg grating sensor is adhered and arranged on the pressure sensing film along the radial direction, and a grating of the fiber bragg grating sensor is arranged in the center of the pressure sensing film;
the pressure sensing film is raised or recessed by the change of external pressure to cause the surface stress change of the pressure sensing film, the fiber bragg grating sensor converts the stress change into Bragg wavelength change, so that the Bragg wavelength is determined by detecting the wavelength of reflected light, and a corresponding detection pressure value is calculated according to the change amount of the Bragg wavelength and the preset standard pressure.
2. The fiber bragg grating-based pressure sensor of claim 1, wherein the pressure sensor body is made of a stainless steel material, and a stainless steel cavity wall thickness of the pressure sensor body is 5mm or more.
3. The fiber grating-based pressure sensor of claim 1, wherein the pressure sensor body is filled with an inert gas when measuring a gas pressure, the inert gas being helium or argon.
4. The fiber grating-based pressure sensor of claim 1, wherein the pressure sensor body is filled with deionized water when measuring the liquid pressure.
5. The fiber grating-based pressure sensor of claim 1, wherein the pressure sensor body is filled with kerosene when the measured liquid is oil.
6. The fiber grating-based pressure sensor of claim 1, wherein the polyimide film has a thickness of 0.3-1mm.
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| CN111323161A (en) * | 2018-12-14 | 2020-06-23 | 罗斯蒙特航天公司 | Optical pressure integrated atmospheric data probe |
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| CN102095537A (en) * | 2011-02-16 | 2011-06-15 | 南京航空航天大学 | Fiber grating pressure sensor, manufacture method and method for monitoring load of asphalt pavement |
| CN102680162A (en) * | 2012-06-07 | 2012-09-19 | 北京航空航天大学 | Atmospheric pressure meter based on fiber bragg grating |
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