CN115421227A - Novel bionic antireflection film structure - Google Patents

Novel bionic antireflection film structure Download PDF

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CN115421227A
CN115421227A CN202211235979.1A CN202211235979A CN115421227A CN 115421227 A CN115421227 A CN 115421227A CN 202211235979 A CN202211235979 A CN 202211235979A CN 115421227 A CN115421227 A CN 115421227A
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main convex
longitudinal section
antireflection
convex structure
ring
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CN115421227B (en
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周祖鹏
周旭光
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Guilin University of Electronic Technology
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    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/118Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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Abstract

The invention relates to the technical field of antireflection films, and particularly discloses a novel bionic antireflection film structure which comprises a base, wherein an antireflection structure is arranged at the top of the base, the antireflection structure is composed of a unit microstructure array, each unit microstructure comprises a main convex structure and an annular structure, the main convex structure is positioned at the central position of the annular structure, the bottoms of the main convex structure and the annular structure are both arranged at the top of the base, and a gap is formed between the main convex structure and the annular structure. According to the novel bionic anti-reflection film structure, a better gradual change optical layer is formed on the surface and inside of the whole structure and in the gap between the annular structure and the main convex structure when the light wave contacts the structure, fresnel reflection is resisted, and the reflectivity is better reduced. By utilizing the lower imaginary refractive index of polydimethylsiloxane and the submicron optical characteristic of the structure, the average reflectivity of the novel bionic antireflection film structure in a medium wave band of 3-8um is below 0.5%, and the antireflection effect is obvious.

Description

Novel bionic antireflection film structure
Technical Field
The invention belongs to the technical field of antireflection films, and particularly relates to a novel bionic antireflection film structure.
Background
When light waves enter another medium from one medium, interface reflection is generated between an interface formed by air and a substrate and is caused by the abrupt change of the refractive indexes of different propagation media on two sides of the interface. On one hand, in real life, light reflection can bring convenience to people, and for example, automobile reflectors, periscopes and the like change the light propagation path by utilizing the reflection phenomenon of light so as to realize multi-directional observation. On the other hand, however, inconvenience and obstruction are brought to people by light reflection, reflected light pollution is easily caused by light reflection, the retina and the iris of a person are damaged to different degrees when the person is in a reflected light polluted environment for a long time, discomfort such as dizziness and headache occurs, and the body health of the person is affected; the reflection of light causes a great deal of light energy loss, which is not favorable for the utilization of light energy. The light energy loss is one of the key factors influencing the conversion efficiency of the solar cell, the silicon-based solar cell occupies a leading position in the photovoltaic market at present, the refractive index of the surface of the untreated silicon-based solar cell can reach 30% due to the abrupt change of the refractive index of the interface between the silicon surface and the air, and how to reduce the light reflection loss is a problem to be solved urgently at present.
The antireflection film is one of effective ways for reducing light reflection loss, and the traditional method is to prepare a multilayer antireflection film on the surface of a battery, but the applicable waveband range of the antireflection film is narrow, and the defects of poor adhesion, instability and the like exist due to the introduction of different materials. The above problems can be avoided by making improvements from the antireflection film structure. The structure of the antireflection film in recent years is mainly a pyramid-shaped structure, and the antireflection film with the structure is an optical film which is widely applied at present and has the largest yield. The reflective film has the main function of reducing the reflection of light by the prism, the lens and the plane mirror, thereby reducing the reflectivity of the elements or reducing the optical pollution in life, and can also be used for a silicon solar cell to improve the photoelectric conversion efficiency of the solar cell. For the research of the antireflection film, the bionic film also becomes a new mainstream research field at present, and the biological structures of the infrared sensors of moth eyes and the beetles are all achieved in the aspect of the antireflection film.
The existing antireflection film is mainly divided into the selection of new materials, the improvement of a deposition process and the design of a new structure in the aspect of optimization, and the structure plays a decisive role in the antireflection effect of the antireflection film. The structure of the traditional antireflection film is mainly a conical structure, and the flatness of the side surface can influence the reflection effect, so that the antireflection effect is relatively poor. The prior literature reports that when the side surface structure of the film is a polished surface, the antireflection effect is better, and the antireflection effect is mainly concentrated on a near infrared band (0.75-3 mu m); the research on the medium-wave infrared 3-8 um is less, and the antireflection effect of the antireflection film in the wave band needs to be further reduced.
Disclosure of Invention
The invention aims to provide a novel bionic antireflection film structure, which realizes low reflection of 3-8 um medium wave infrared and has an obvious antireflection effect.
In order to achieve the purpose, the invention provides a novel bionic anti-reflection film structure, which comprises a base, wherein an anti-reflection structure is arranged on the top of the base, the anti-reflection structure is composed of a unit micro-structure array, the unit micro-structure comprises a main convex structure and an annular structure, the main convex structure is positioned at the central position of the annular structure, the bottom of the main convex structure and the bottom of the annular structure are both arranged on the top of the base, and a gap exists between the main convex structure and the annular structure.
Preferably, in the above novel bionic antireflection film structure, the unit microstructure array is arranged in a close-packed square manner.
Preferably, in the above-mentioned novel bionic anti-reflection film structure, the cross section of the main convex structure is circular, the longitudinal section of the main convex structure is semi-elliptical, and the longitudinal section of the main convex structure is at a height t 1 Width of (r) 1 (t 1 ) The following conditions are satisfied:
Figure BDA0003877674090000021
wherein S 1 Width of bottom of longitudinal section of main convex structure, L 1 The total height of the main convex structure.
Preferably, in the above novel bionic anti-reflective film structure, the cross section of the annular structure is a circular ring, the longitudinal section of the annular structure is a semi-ellipse, and the longitudinal section of the annular structure is at a height t 2 Width r of 2 (t 2 ) The following conditions are satisfied:
Figure BDA0003877674090000022
wherein S 2 The bottom width, L, of a longitudinal section of the ring structure 2 The total height of the ring structure.
Preferably, in the above novel bionic antireflection film structure, the total height L of the main convex structure 1 1.7-2.6 μm, and the bottom width S of the longitudinal section of the main convex structure 1 0.4 to 0.6 μm.
Preferably, in the above novel bionic antireflection film structure, the total height L of the main convex structure 1 2.3 μm, a bottom width S of the longitudinal section of the main convex structure 1 And 0.55 μm.
Preferably, in the above novel bionic antireflection film structure, the total height L of the ring-shaped structure 2 1.3 to 1.5 μm, and a bottom width S of a longitudinal section of the ring-shaped structure 2 0.7 to 1.0 μm.
Preferably, in the above novel bionic antireflection film structure, the total height L of the ring-shaped structure 2 1.4 μm, a bottom width S of a longitudinal section of the ring-shaped structure 2 And 0.875 μm.
Preferably, in the above novel bionic anti-reflection film structure, the width of the bottom surface of the unit microstructure is 3 to 3.5 μm.
Preferably, in the above novel bionic anti-reflection film structure, the base and the unit microstructure are made of polydimethylsiloxane or silicon dioxide.
Preferably, in the above novel bionic anti-reflection film structure, the base and the unit microstructure are made of polydimethylsiloxane.
Compared with the prior art, the invention has the following beneficial effects:
according to the novel bionic anti-reflection film structure, unit microstructures consisting of the main convex structures and the annular structures are closely arranged, and a better gradual change optical layer is formed on the surface and inside of the whole structure and in the gaps between the annular structures and the main convex structures when the light waves contact the structure, so that Fresnel reflection is resisted, and the reflectivity is better reduced. By utilizing the lower imaginary part refractive index of polydimethylsiloxane and the submicron optical characteristic of the structure, the average reflectivity of the novel bionic antireflection film structure in a medium wave band of 3-8 um is below 0.5%, and the antireflection effect is obvious. The novel bionic anti-reflection film structure can be applied to camera lenses, improves imaging capability, can also be applied to optical devices such as military night-vision instruments and camera lenses and silicon-based solar cells, and reduces reflection interference, reflection loss and the like.
Drawings
Fig. 1 is a schematic structural diagram of the novel bionic antireflection film structure of the invention.
Fig. 2 is a front view of the novel bionic anti-reflection film structure of the invention.
Fig. 3 is a schematic structural diagram of a unit microstructure in the novel bionic anti-reflection film structure of the invention.
Fig. 4 is a top view of a unit microstructure in the novel bionic anti-reflection film structure of the invention.
Fig. 5 is a schematic longitudinal cross-sectional view of a unit microstructure in the novel bionic anti-reflection film structure of the invention.
Fig. 6 is a reflectivity curve diagram of the novel bionic anti-reflection film structure of the invention.
Description of the main reference numerals:
1-main convex structure, 2-annular structure, 3-base and 4-antireflection structure.
Detailed Description
The following detailed description of specific embodiments of the invention is provided, but it should be understood that the scope of the invention is not limited to the specific embodiments. In the description of the present invention, it should be noted that the terms "central", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the invention.
In the description of the present invention, the meaning of a plurality of means is one or more, the meaning of a plurality of means is two or more, and larger, smaller, larger, etc. are understood as excluding the number, and larger, smaller, inner, etc. are understood as including the number. The terms "first", "second" and "third", if any, are used for descriptive purposes only and for distinguishing between technical features and are not to be construed as indicating or implying relative importance or implying a number of indicated technical features or a precedence of indicated technical features.
Example 1
As shown in fig. 1 to 5, a novel bionic anti-reflection film structure comprises a base 3 and an anti-reflection structure 4, wherein the anti-reflection structure 4 is arranged on the top of the base 3, the anti-reflection structure 4 is composed of an array of unit microstructures, and the unit microstructures are arranged in a close-packed square manner; the unit microstructure is composed of a main convex structure 1 and an annular structure 2, wherein the main convex structure 1 is positioned at the right center of the annular structure 2. The cross section of the main convex structure 1 is circular, the longitudinal section 2 is semi-elliptical, and the longitudinal section of the main convex structure 1 is at the height t 1 Width r of 1 (t 1 ) The following conditions are satisfied:
Figure BDA0003877674090000041
wherein S 1 Is the bottom width, L, of the longitudinal section of the main convex structure 1 1 The total height of the main male structure 1. The cross section of the annular structure 2 is a circular ring, the longitudinal section of the annular structure 2 is a semi-ellipse, and the longitudinal section of the annular structure 2 is at the height t 2 Width r of 2 (t 2 ) The following conditions are satisfied:
Figure BDA0003877674090000051
wherein S 2 Is the bottom width, L, of the longitudinal section of the ring structure 2 2 The total height of the ring structure 2.
The total height L of the main convex structure 1 in this embodiment 1 2.3 μm, a bottom width S of the longitudinal section 1 0.55 μm; overall height L of the ring structure 2 2 1.4 μm, a bottom width S of the longitudinal section 2 0.875 μm; the width S of the bottom surface of the unit microstructure was 3.5. Mu.m. The base and the unit microstructure are made of polydimethylsiloxane.
The reflection reducing performance of the novel bionic antireflection film structure of the embodiment in the wave band of 3-8 μm is analyzed by using COMSOL, and a reflectivity curve diagram of the novel bionic antireflection film structure is obtained, as shown in fig. 6. The average reflectivity of the novel bionic anti-reflection film structure under the irradiation of infrared light of 3-8 um is only 0.278 percent, the maximum difference value of the reflectivity is 0.692 percent, the reflectivity curve is relatively more stable, and the anti-reflection effect is obvious.
Example 2
This example is the same as example 1 except that the width S of the bottom surface of the unit microstructure is 3.0 μm.
Comparative example 1
This comparative example is the same as example 1 except that the main convex structure 1 has a total height L 1 Is 1.1 μm.
Comparative example 2
This comparative example is the same as example 1 except that the width S of the bottom surface of the unit microstructure was 4.0. Mu.m.
The reflection performance data of the anti-reflection film structures of the embodiments 1 to 2 and the comparative examples 1 to 2 are shown in table 1, and as can be seen from table 1, the average reflectivity and the maximum difference value of the reflectivity of the anti-reflection film structure of the embodiment of the invention are both lower than those of the comparative example group, which shows that the novel bionic anti-reflection film structure of the invention has excellent overall anti-reflection effect.
Table 1 reflection properties of anti-reflection thin film structures of examples and comparative examples
Figure BDA0003877674090000052
Figure BDA0003877674090000061
The foregoing descriptions of specific exemplary embodiments of the present invention have been presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable one skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications. It is intended that the scope of the invention be defined by the claims and their equivalents.

Claims (10)

1. The utility model provides a novel bionical antireflection film structure, a serial communication port, includes base (3), base (3) top is equipped with antireflection structure (4), antireflection structure (4) comprises unit microstructure array, the unit microstructure includes main convex structure (1), annular structure (2), main convex structure (1) is located the central point of annular structure (2) puts, main convex structure (1) bottom, annular structure (2) bottom all set up base (3) top, main convex structure (1) with there is the clearance between annular structure (2).
2. The novel bionic anti-reflection film structure as claimed in claim 1, wherein the unit microstructure array is arranged in a close-packed tetragonal manner.
3. The novel bionic anti-reflection film structure according to claim 1, wherein the main convex structure (1) has a circular cross section and a semi-elliptical longitudinal section, and the longitudinal section of the main convex structure (1) is at a height t 1 Width r of 1 (t 1 ) The following conditions are satisfied:
Figure FDA0003877674080000011
wherein S 1 Width of bottom of longitudinal section of main convex structure, L 1 The total height of the main convex structure.
4. The novel biomimetic anti-reflective film structure according to claim 1, characterised in that the ring is of a ring typeThe cross section of the structure (2) is a circular ring, the longitudinal section is a semiellipse, and the longitudinal section is at the height t 2 Width of (r) 2 (t 2 ) The following conditions are satisfied:
Figure FDA0003877674080000012
wherein S 2 Is the bottom width, L, of the longitudinal section of the ring structure (2) 2 The total height of the ring structure (2).
5. Novel biomimetic anti-reflective film structure according to claim 3, characterized in that the total height L of the main convex structure (1) 1 1.7 to 2.6 mu m, the bottom width S of the longitudinal section of the main convex structure (1) 1 0.4 to 0.6 μm.
6. Novel biomimetic antireflection film structure according to claim 5, characterized in that the total height L of the main convex structure (1) is 1 2.3 mu m, the bottom width S of the longitudinal section of the main convex structure (1) 1 And 0.55 μm.
7. Novel biomimetic antireflection film structure according to claim 4, characterized in that the total height L of the ring-shaped structure (2) is 2 1.3 to 1.5 μm, the bottom width S of the longitudinal section of the ring-shaped structure (2) 2 0.7 to 1.0 μm.
8. Novel biomimetic anti-reflection film structure according to claim 7, characterized in that the total height L of the ring-shaped structure (2) 2 1.4 μm, a bottom width S of the longitudinal section of the ring-shaped structure (2) 2 And 0.875 μm.
9. The novel bionic anti-reflection film structure as claimed in claim 1, wherein the width of the bottom surface of the unit microstructure is 3-3.5 μm.
10. The novel bionic anti-reflection film structure according to claim 1, wherein the base (3) and the unit microstructure are made of polydimethylsiloxane or silicon dioxide.
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