CN113504585A - Polarization-independent superlens - Google Patents
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Abstract
本发明公开了一种偏振非依赖型超透镜,包括基底层和在基底层上构建超表面阵列的超单元,所述超单元包括单圆柱、环形柱及同心柱,所述偏振非依赖型超透镜通过传播相位和补偿相位相结合的方式控制入射线偏振光的波前和消除色差。本发明中采取的入射线偏振光垂直照射超表面结构,根据所选择的入射中心波长,对介质柱进行结构参数扫描和优化,通过改变圆柱硅的尺寸能得到所需的补偿相位,并且实现高透过率,保证结构选择与传播相位相结合的方法能控制入射光的波前和消除色差。
The invention discloses a polarization-independent super-lens, comprising a base layer and a super-unit for constructing a metasurface array on the base layer. The super-unit includes a single cylinder, an annular cylinder and a concentric cylinder. The lens controls the wavefront of incident polarized light and eliminates chromatic aberration through a combination of propagating phase and compensating phase. The incident ray polarized light adopted in the present invention vertically irradiates the metasurface structure, according to the selected incident center wavelength, the structural parameters of the dielectric column are scanned and optimized, the required compensation phase can be obtained by changing the size of the cylindrical silicon, and the high The transmittance ensures that the combination of structure selection and propagation phase can control the wavefront of incident light and eliminate chromatic aberration.
Description
技术领域technical field
本发明属于复合材料超表面技术领域,具体涉及一种偏振非依赖型超透镜。The invention belongs to the technical field of composite material metasurfaces, in particular to a polarization-independent superlens.
背景技术Background technique
波长色散是光学材料的一个重要特性,在光学元件和系统的设计中一直起着重要的作用,在大多数介质中,像玻璃,折射率随波长的增加而减小,这称为正常色散,利用这种材料,相比于短波长,在较长波长处折射透镜将具有更大的焦距,而棱镜将以更小的角度偏转,这种色差严重降低了全色光学应用的性能,如通信、检测、成像、显示等。目前,有超透镜使用多层结构实现双波长和三波长色差的消除,这一策略虽然取得了成功,但增加了光学系统的重量、复杂性和成本,极大地限制了它们的使用;且这些超透镜都受限于偏振依赖性,只能聚焦圆偏振光。Wavelength dispersion is an important property of optical materials and has always played an important role in the design of optical components and systems. In most media, like glass, the refractive index decreases with increasing wavelength. This is called normal dispersion. With this material, refractive lenses will have a larger focal length at longer wavelengths than at shorter wavelengths, and prisms will deflect at a smaller angle, this chromatic aberration severely degrades the performance of panchromatic optical applications such as communications, Detection, imaging, display, etc. Currently, there are metalens that use multilayer structures to achieve dual-wavelength and triple-wavelength chromatic aberration cancellation. Although this strategy has been successful, it increases the weight, complexity, and cost of optical systems, greatly limiting their use; and these Metalens are all limited by polarization dependence and can only focus circularly polarized light.
因此,最近的研究主要集中在可见光和近红外的偏振不敏感消色差超透镜的设计上,然而,如何设计一种不受偏振影响的消色差超透镜来消除中红外波段的色差效应仍是一个巨大的挑战。Therefore, recent studies have mainly focused on the design of polarization-insensitive achromatic metalens in the visible and near-infrared, however, how to design a polarization-independent achromatic metalens to eliminate the chromatic aberration effect in the mid-infrared band is still a problem. huge challenge.
发明内容SUMMARY OF THE INVENTION
本发明的目的是提供一种偏振非依赖型超透镜,以克服上述技术问题。The purpose of the present invention is to provide a polarization-independent superlens to overcome the above-mentioned technical problems.
本发明的上述技术目的是通过以下技术方案得以实现的:The above-mentioned technical purpose of the present invention is achieved through the following technical solutions:
一种偏振非依赖型超透镜,包括基底层和在基底层上构建超表面阵列的超单元,所述超单元包括单圆柱、环形柱及同心柱;A polarization-independent superlens, comprising a base layer and a super-unit for constructing a metasurface array on the base layer, the super-unit comprising a single cylinder, an annular cylinder and a concentric cylinder;
所述偏振非依赖型超透镜通过传播相位和补偿相位相结合的方式控制入射线偏振光的波前和消除色差;The polarization-independent superlens controls the wavefront of the incident polarized light and eliminates chromatic aberration by combining the propagation phase and the compensation phase;
其中,利用传播相位作为聚焦相位,入射线偏振光垂直照射超单元,入射波长范围为3.7-4.7μm,通过传播相位的原理选择所述超单元控制入射线偏振光的波前,使在选定的中心波长处进行聚焦;Among them, using the propagation phase as the focusing phase, the incident ray polarized light irradiates the super unit vertically, and the incident wavelength range is 3.7-4.7 μm, and the super unit is selected by the principle of the propagation phase to control the wave front of the incident ray polarized light, so that the selected Focus at the center wavelength of ;
其中,通过所述超单元中三种不同类型结构获得需要的不同补偿相位值,保证在选取的入射波长范围内,补偿相位与入射波长的倒数呈线性关系,以消除在中心波长外的入射波长处的色差效应。The required different compensation phase values are obtained through three different types of structures in the superunit, to ensure that within the selected incident wavelength range, the compensation phase is linearly related to the inverse of the incident wavelength, so as to eliminate incident wavelengths outside the central wavelength. chromatic aberration effect.
进一步地,所述单圆柱、环形柱及同心柱均为Si纳米结构,且所述单圆柱、环形柱及同心柱的高度H为4.5μm。Further, the single column, the annular column and the concentric column are all Si nanostructures, and the height H of the single column, the annular column and the concentric column is 4.5 μm.
进一步地,所述基底层的材质采用CaF2。Further, the material of the base layer is CaF 2 .
进一步地,所述超单元中的所述单圆柱、环形柱及同心柱的外直径保持一致。Further, the outer diameters of the single cylinder, the annular cylinder and the concentric cylinder in the super unit are kept the same.
进一步地,所述偏振非依赖型超透镜的相位分布的公式φ(x,λ)=(2πλ)neffH,其中,neff表示纳米结构的有效折射率,H表示超单元中各结构的高度。Further, the formula of the phase distribution of the polarization-independent metalens is φ(x, λ)=(2πλ)ne ff H, where n eff represents the effective refractive index of the nanostructure, and H represents the high.
进一步地,所述构建超表面阵列的超单元之间的距离为1.8μm。Further, the distance between the super-units for constructing the meta-surface array is 1.8 μm.
有益效果:Beneficial effects:
本发明所设计的超表面实现的消色差是连续带宽范围内的,除了可以单独用超表面实现消色差,还可与传统光学器件相结合,从而提高超表面消色差器件的性能和尺寸,扩展应用范围;The achromatic achromat realized by the metasurface designed in the present invention is within the continuous bandwidth range. In addition to the metasurface can be used alone to realize achromatic achromat, it can also be combined with traditional optical devices, thereby improving the performance and size of the metasurface achromatic device. scope of application;
本发明中采取的入射线偏振光垂直照射超表面结构,根据所选择的入射中心波长,对介质柱进行结构参数扫描和优化,通过改变圆柱硅的尺寸能得到所需的补偿相位,并且实现高透过率,保证结构选择与传播相位相结合的方法能控制入射光的波前和消除色差;The incident ray polarized light adopted in the present invention vertically irradiates the metasurface structure, according to the selected incident center wavelength, the structural parameters of the dielectric column are scanned and optimized, the required compensation phase can be obtained by changing the size of the cylindrical silicon, and the high The transmittance ensures that the combination of structure selection and propagation phase can control the wavefront of incident light and eliminate chromatic aberration;
本发明中的基于介质超表面的偏振非依赖宽带消色差器件,另一方面是实现了连续带宽范围内的消色差,较以往器件而言,大大减小了体积与成本。The polarization-independent broadband achromatic device based on the dielectric metasurface in the present invention, on the other hand, realizes achromatic achromaticity in a continuous bandwidth range, which greatly reduces the volume and cost compared with the previous devices.
附图说明Description of drawings
图1为本发明的结构示意图;Fig. 1 is the structural representation of the present invention;
图2为本发明的色散示意图;2 is a schematic diagram of dispersion of the present invention;
图3为本发明的相位分布图;3 is a phase distribution diagram of the present invention;
图4和图5为本发明中三种原型结构的物理分析;Figure 4 and Figure 5 are physical analysis of three prototype structures in the present invention;
图6为本发明中偏振不敏感BAML的相位分布图;6 is a phase distribution diagram of polarization-insensitive BAML in the present invention;
图中:1、基底层;2、单圆柱;3、环形柱;4、同心柱。In the figure: 1. Base layer; 2. Single cylinder; 3. Ring-shaped column; 4. Concentric column.
具体实施方式Detailed ways
在本发明的描述中,除非另有说明,术语“上”“下”“左”“右”“前”“后”等指示的方位或位置关系仅是为了描述本发明和简化描述,而不是指示或暗示所指的装置或结构必须具有特定的方位,因此不能理解为对本发明的限制。此外,术语“第一”“第二”等仅用于描述目的,而不能理解为指示或暗示相对重要性。In the description of the present invention, unless otherwise specified, the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "front", "rear", etc. is only for describing the present invention and simplifying the description, rather than Indication or implication that the device or structure referred to must have a specific orientation should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," etc. are used for descriptive purposes only and should not be construed to indicate or imply relative importance.
如图1所示,本发明所述的一种偏振非依赖型超透镜包括基底层和在基底层上构建超表面阵列的超单元,其中,所述超单元包括单圆柱、环形柱及同心柱,所述基底层的材质采用CaF2,所述单圆柱、环形柱及同心柱均为Si纳米结构,且所述单圆柱、环形柱及同心柱的高度H为4.5μm,所述超单元中的所述单圆柱、环形柱及同心柱的外直径保持一致,所述构建超表面阵列的超单元之间的距离为1.8μm。As shown in FIG. 1 , a polarization-independent superlens according to the present invention includes a base layer and a super-unit for constructing a metasurface array on the base layer, wherein the super-unit includes a single cylinder, an annular cylinder and a concentric cylinder , the material of the base layer is CaF 2 , the single cylinder, the annular column and the concentric column are all Si nanostructures, and the height H of the single cylinder, the annular column and the concentric column is 4.5 μm, in the super unit The outer diameters of the single cylinder, annular cylinder and concentric cylinder are kept the same, and the distance between the super-units for constructing the metasurface array is 1.8 μm.
所述偏振非依赖型超透镜通过传播相位和补偿相位相结合的方式控制入射线偏振光的波前和消除色差,首先,利用传播相位作为聚焦相位,入射线偏振光垂直照射超单元,入射波长范围为3.7-4.7μm,通过传播相位的原理选择所述超单元控制入射线偏振光的波前,使在选定的中心波长处进行聚焦;其次,通过所述超单元中三种不同类型结构获得需要的不同补偿相位值,保证在选取的入射波长范围内,补偿相位与入射波长的倒数呈线性关系,以消除在中心波长外的入射波长处的色差效应;进一步地,所述偏振非依赖型超透镜的相位分布的公式φ(x,λ)=(2πλ)neffH,其中,neff表示纳米结构的有效折射率,与纳米结构的半径密切相关,H表示超单元中各结构的高度。The polarization-independent superlens controls the wavefront of the incident ray polarized light and eliminates chromatic aberration by combining the propagation phase and the compensation phase. First, using the propagation phase as the focusing phase, the incident ray polarized light irradiates the superunit vertically, and the incident wavelength The range is 3.7-4.7 μm, and the superunit is selected to control the wavefront of the incident ray polarized light through the principle of propagation phase, so as to focus at the selected central wavelength; secondly, through the three different types of structures in the superunit Obtain different compensation phase values required to ensure that within the selected incident wavelength range, the compensation phase has a linear relationship with the reciprocal of the incident wavelength, so as to eliminate the chromatic aberration effect at incident wavelengths outside the central wavelength; further, the polarization independent The formula for the phase distribution of the superlens is φ(x, λ)=(2πλ)ne ff H, where n eff represents the effective refractive index of the nanostructure, which is closely related to the radius of the nanostructure, and H represents the high.
原理说明:Principle description:
首先,如图3所示,从目前来说要实现宽带消色差超透镜,其相位分布的公式为:First, as shown in Figure 3, to achieve broadband achromatic metalens, the formula for the phase distribution is:
其中, in,
其中,式(1)和(2)中λ0是限定的中心波长,本实施例中即λ0选定为4.2μm,因此宽带消色差超透镜只有当和同时被满足时才能实现;第一项是在参考波长λ0处的无色散相位,即如图2所示;第二项是工作波长的函数,与1/λ线性相关,称为补偿相位。Among them, λ 0 in equations (1) and (2) is the limited center wavelength, that is, λ 0 is selected to be 4.2 μm in this embodiment, so the broadband achromatic superlens can only be used when and It can only be achieved when both are satisfied; the first item is the dispersion-free phase at the reference wavelength λ 0 , as shown in Figure 2; the second term is a function of the operating wavelength and is linearly related to 1/λ, called the compensation phase.
简而言之,根据和两个相位设计沿着x轴摆放的宽带消色差超透镜的超单元,然此法仅对具有偏振依赖性的超透镜是可行的,限制了消色差超表面器件的发展。In short, according to and Two-phase design of metaunits of broadband achromatic metalens arranged along the x-axis, however, this method is only feasible for metalens with polarization dependence, which limits the development of achromatic metasurface devices.
为此,在本实施例中超单元使用了新的纳米结构以此实现偏振不敏感的宽带消色差超透镜,具体为:采用在氟化钙(CaF2)基板上放置硅(Si)纳米结构的介质超表面平台,每个Si纳米结构的高度为H=4.5μm;其中,选择CaF2作为基底是因其在设计波长下具有低折射率(n=1.4)和低吸收损耗的特性;对于设计的结构,给定空间坐标x处的相位为φ(x,λ)=(2πλ)neffH,其中neff表示纳米结构的有效折射率,与纳米结构的半径密切相关;在上述中,超单元的子类由三种原型形状构成,即单圆柱、环形柱及同心柱,每种原型的平面几何参数都是可变的,且每个超单元之间的距离为p=1.8μm,在本实施例中,可通过改变每种原型的相关半径来控制它们的光学响应,由于各结构的对称性,保证了消色差超透镜是偏振不敏感的。To this end, in this embodiment, a new nanostructure is used in the superunit to realize a polarization-insensitive broadband achromatic superlens. Specifically, a silicon (Si) nanostructure is placed on a calcium fluoride (CaF 2 ) substrate. Dielectric metasurface platform, each Si nanostructure with a height of H = 4.5 μm; where CaF 2 was chosen as the substrate due to its low refractive index (n = 1.4) and low absorption loss at the design wavelength; for the design , the phase at a given spatial coordinate x is φ(x,λ)=(2πλ)n eff H, where n eff represents the effective refractive index of the nanostructure, which is closely related to the radius of the nanostructure; in the above, the super The subclass of cells consists of three prototype shapes, namely single cylinder, annular cylinder and concentric cylinder. The plane geometric parameters of each prototype are variable, and the distance between each supercell is p = 1.8 μm. In this embodiment, the optical response of each prototype can be controlled by changing the relative radius of each prototype, which ensures that the achromatic metalens are polarization insensitive due to the symmetry of each structure.
其中,单圆柱可为每个相位值提供了最大的补偿相位,因其与具有相同外半径的其他两个原型相比,具有最高的有效折射率;然单圆柱只使每个相位得到单个补偿相位值,即仅通过单圆柱很难找到同时满足和的消色差超透镜的所有超单元;而与单圆柱相比,环形柱和同心柱都有相对较低的有效折射率从而能实现更多的补偿相位;因此,本申请中同时选择上述三种原型来设计超透镜。Of these, a single cylinder provides the largest compensated phase for each phase value because it has the highest effective refractive index compared to the other two prototypes with the same outer radius; however, a single cylinder only allows each phase to be compensated individually phase value, i.e. it is difficult to find by only a single cylinder that simultaneously satisfies and Compared with the single cylinder, both the annular cylinder and the concentric cylinder have relatively low effective refractive index and can achieve more compensation phase; therefore, in this application, the above three are selected at the same time Prototype to design metalens.
进一步,对三个超单元在x(彩色点)和y(黑点)偏振光入射下的光学特性进行了计算,计算如图4所示,从中可以看出,对x偏振光和y偏振光入射的光学响应是完全一致的;且图4证明了相位和频率(1/λ)在设计波长范围之间的线性关系。Further, the optical properties of the three superunits under the incidence of x (colored dots) and y (black dots) polarized light were calculated. The incident optical response is identical; and Figure 4 demonstrates the phase and frequency (1/λ) linearly over the design wavelength range.
更进一步地分析三种原型的偏振不敏感性,对三种原型中电场的近场分布进行了计算,结果如图5所示,选定的波长为4.3μm,3.9μm和4.0μm,如图4中的虚线所示,分别对应于三个原型,顶部和底部图分别为俯视图和侧视图,上述的x和y偏振入射的这些相同的近场结果表明,所选原型是偏振不敏感的。To further analyze the polarization insensitivity of the three prototypes, the near-field distribution of the electric field in the three prototypes was calculated, and the results are shown in Fig. 5. The selected wavelengths are 4.3 μm, 3.9 μm and 4.0 μm, as shown in Fig. Shown by the dashed lines in 4, corresponding to the three prototypes, with the top and bottom plots being top and side views, respectively, these same near-field results above for x- and y-polarized incidence indicate that the selected prototype is polarization-insensitive.
如此,在本实施例中,提出的超透镜直径为77.4μm,焦距为f=25μm(NA≈0.84),图6分别绘制了相位与空间位置的函数和补偿相位这两个关键量,每个超单元的设计波长为4.2μm;结果表明,选定超单元实现的相位和补偿相位与所需值有良好的一致性。As such, in this embodiment, the proposed metalens have a diameter of 77.4 μm and a focal length of f=25 μm (NA ≈ 0.84). Figure 6 plots the phases respectively as a function of spatial position and compensated phase For these two key quantities, each supercell is designed with a wavelength of 4.2 μm; the results show that the phase and compensated phase achieved by the selected supercell are in good agreement with the desired values.
综上所述,基于传播相位补偿色散累积相位的原理,选取三种不同原型结构,在3.7-4.7μm带宽内实现了消色差超透镜,这三种原型结构实现的补偿相位范围不同,其中圆柱实现的补偿相最大,同轴最小,由等效介质理论也能推导出该结论,由于采用的单元结构都是中心对称结构,几何相位已不能使用,聚焦相位由中心波长4.2μm处的传播相位来满足,此为实现偏振非依赖消色差超表面的关键,通过与色差透镜的对比,可明显看到消色差超透镜能很好地抑制色差效应。To sum up, based on the principle of propagation phase compensation for dispersion accumulation phase, three different prototype structures are selected to realize achromatic metalens in the 3.7-4.7μm bandwidth. The three prototype structures achieve different compensation phase ranges, among which the cylindrical The realized compensation phase is the largest and the coaxiality is the smallest. This conclusion can also be deduced from the equivalent medium theory. Since the unit structures used are all centrosymmetric structures, the geometric phase can no longer be used. The focusing phase is determined by the propagation phase at the center wavelength of 4.2μm. This is the key to realizing the polarization-independent achromatic metasurface. By comparing with the chromatic lens, it can be clearly seen that the achromatic metalens can well suppress the chromatic aberration effect.
为了使本发明的目的、技术方案及优点更加简洁明了,本发明用以上具体实施例进行说明,仅仅用于描述本发明,不能理解为对本发明的范围的限制。应当指出的是,凡在本发明的精神和原则之内所做的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。因此,本发明专利的保护范围应以所附权利要求为准。In order to make the purpose, technical solutions and advantages of the present invention more concise and clear, the present invention is described by the above specific embodiments, which are only used to describe the present invention and should not be construed as limiting the scope of the present invention. It should be pointed out that any modifications, equivalent replacements and improvements made within the spirit and principle of the present invention should be included within the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.
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