CN115412818A - MEMS microphone system, MEMS microphone testing and trimming circuit and MEMS microphone testing and trimming method - Google Patents

MEMS microphone system, MEMS microphone testing and trimming circuit and MEMS microphone testing and trimming method Download PDF

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Publication number
CN115412818A
CN115412818A CN202110587058.0A CN202110587058A CN115412818A CN 115412818 A CN115412818 A CN 115412818A CN 202110587058 A CN202110587058 A CN 202110587058A CN 115412818 A CN115412818 A CN 115412818A
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signal
mems microphone
trimming
module
data
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赵新毅
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Yaoxin Microelectronics Technology Shanghai Co ltd
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Yaoxin Microelectronics Technology Shanghai Co ltd
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/005Electrostatic transducers using semiconductor materials
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/04Microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00Monitoring arrangements; Testing arrangements
    • H04R29/004Monitoring arrangements; Testing arrangements for microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use

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  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)

Abstract

The invention provides an MEMS microphone system, an MEMS microphone testing and trimming circuit and a method, wherein the MEMS microphone system comprises an MEMS microphone testing and trimming circuit and an MEMS microphone module, and the MEMS microphone testing and trimming circuit comprises: the device comprises a data output module, a detection module and an identification module; the MEMS microphone module is tested and modified by multiplexing a data port of the MEMS microphone module without adding an additional port; the MEMS microphone testing and trimming circuit has the advantages of simple circuit structure and lower power consumption, and does not increase too much area and power consumption of MEMS microphone system chips; the communication protocol between the MEMS microphone testing and trimming circuit and the single chip microcomputer is simple.

Description

MEMS microphone system, MEMS microphone testing and trimming circuit and method
Technical Field
The invention relates to a chip trimming technology, in particular to an MEMS microphone system, an MEMS microphone testing trimming circuit and an MEMS microphone testing trimming method.
Background
In order to ensure that each integrated circuit can meet higher precision requirements, precise trimming is usually performed after the integrated circuit is packaged and before the integrated circuit is shipped. In order to facilitate the testing of parameters of an integrated circuit, an important line node is usually sealed out from a port for testing, or after the integrated circuit is set to a test mode by a test mode setting circuit integrated inside the integrated circuit, a part of the parameters are tested. Whether the test is passed through the sealed memory port or the test mode is entered, the normal application of the integrated circuit cannot be influenced.
The communication interface that test trimming circuit commonly used has SPI, I2C and single bus, needs to occupy 4 lines to SPI interface circuit, and I2C interface circuit needs to occupy two lines. The single bus is a line, namely a one-wire bus, is a peripheral serial expansion bus technology promoted by DALLAS company in America, is different from Serial Peripheral Interface (SPI) and I2C serial data communication modes, adopts a single signal line, not only transmits a clock but also transmits data, and has bidirectional data transmission, so that the single bus has the advantages of saving I/O port lines, simple resource structure, low cost, convenience in bus expansion and maintenance and the like; the single bus is a system consisting of a bus master node or a plurality of slave nodes, data reading is carried out on the slave chips through a root signal line, and each slave chip conforming to the one-wire protocol has a unique address which comprises a 48-bit serial number, an 8-bit family code and an 8-bit CRC code. The master chip addresses the slave chips according to the difference of the 64 bits. The single bus realizes bidirectional communication by using one wire, so the protocol has strict requirements on time sequences, such as response time sequences and the like, and the basic time sequences comprise reset and response time sequences, a bit writing time sequence and a bit reading time sequence. In the reset and response sequence, after the master device sends out a reset signal, the slave device is required to send back a response signal within a specified time; in the bit read and bit write sequences, the master device reads fixed or write data within a specified time.
However, the test trimming circuit is only used once before factory test, and the communication interface circuit does not work after factory test, so that for the test trimming circuit which does not need to work for a long time, the single bus protocol is complex, and occupies area resources and power consumption resources of a chip, which is not allowed for the MEMS microphone.
Therefore, how to provide a testing and trimming circuit and a method for a MEMS microphone, which can meet the requirements of a specific scenario, and have a simple circuit structure, a simple protocol, and a small power consumption, has become one of the problems to be solved urgently by related people.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present invention is to provide a MEMS microphone system, a MEMS microphone testing and trimming circuit and a method thereof, which are used to solve the problems of complex circuit structure and protocol and large power consumption in the prior art.
To achieve the above and other related objects, the present invention provides a MEMS microphone testing trimming circuit, including: the device comprises a detection module, an identification module and a data output module;
the input end of the detection module is connected with a data port of the MEMS microphone module, receives an instruction signal sent by a single chip microcomputer, extracts a clock signal in the instruction signal and outputs the clock signal;
the identification module receives the clock signal and the instruction signal, codes and converts the instruction signal based on the clock signal, and outputs an identification signal;
the MEMS microphone module receives the identification signal and outputs a data signal corresponding to the identification signal;
the data output module receives the identification signal and the data signal, reads and converts the data signal based on the clock signal to generate a trimming signal, and the trimming signal is output to a single chip microcomputer through a data port of the MEMS microphone module.
Optionally, the detection module includes a comparator, a first bias unit, a second bias unit, a trigger unit, and a delay unit;
the comparator receives the instruction signal, compares the instruction signal with a preset level and outputs a comparison signal;
the first bias unit receives the comparison signal and an external bias current and outputs a first bias signal;
the trigger unit is connected with the output end of the comparator and the output end of the first bias unit, receives the comparison signal and the first bias signal and outputs a trigger signal;
the second bias unit is connected with the output end of the trigger unit, receives the trigger signal and outputs a second bias signal;
the delay unit is connected with the output end of the second bias circuit, delays the second bias signal and outputs the clock signal.
Optionally, the identification module includes an encoder and a serial-to-parallel conversion unit;
the encoder receives the instruction signal, encodes the instruction signal based on the clock signal and outputs an encoded signal;
and the serial-parallel conversion unit is connected with the output end of the encoder, receives the coded signal, performs parallel conversion on the coded signal and outputs an identification signal.
Optionally, the data output module includes a falling edge detection unit, a counter and a parallel-serial conversion unit;
the falling edge detection unit receives the identification signal, detects the falling edge of the identification signal based on the clock signal and outputs a reading signal;
the counter is connected with the output end of the falling edge detection unit, receives the reading signal, reads the data signal based on the reading signal and counts the data signal;
and the parallel-serial conversion unit is connected with the output end of the counter, and is used for performing serial conversion on the data read by the counter and outputting a trimming signal.
The invention further provides an MEMS microphone system, and the MEMS microphone testing and trimming circuit and the MEMS microphone module of the MEMS microphone system are provided.
The invention also provides a MEMS microphone testing and trimming method, which at least comprises the following steps:
s1: the MEMS microphone system is powered on, sends out an instruction signal and outputs the instruction signal through a data port of the MEMS microphone module;
s2: receiving the instruction signal, extracting a clock signal in the instruction signal, and outputting the clock signal;
s3: based on the clock signal, coding the instruction signal and outputting a coded signal;
s4: performing parallel conversion on the coded signals and outputting identification signals;
s5: adjusting specific parameters of the MEMS microphone module;
s6: receiving the identification signal and outputting a data signal corresponding to the identification signal;
s7: reading, counting and converting the data signals based on the identification signals to generate trimming signals, and outputting the trimming signals to a single chip microcomputer through a data port of the EMS microphone module;
s8: receiving a trimming signal, and detecting whether the trimming signal meets requirements; when the requirement is not met, jumping to the step S5; when the requirement is met, jumping to the step S9;
s9: and sending a communication forbidding instruction to the MEMS microphone testing trimming circuit, so that the MEMS microphone testing trimming circuit forbids communication permanently.
Optionally, the code signal is used to represent data 0 and 1 in the command signal by different ratios of high and low level durations in one cycle.
Optionally, a ratio of the high level duration to the low level duration in one cycle of the code signal is 5.
Optionally, the data signal corresponds to a test parameter of the MEMS microphone module, which can reflect the size of the test parameter.
Optionally, the test parameter comprises a receive sensitivity or a power consumption.
Optionally, the specific parameter comprises a voltage, a current or a gain.
As described above, the MEMS microphone testing and trimming circuit and method of the present invention have the following beneficial effects:
1, testing and trimming a finished product by multiplexing a data port of an MEMS microphone without adding an extra port;
2, the circuit structure of the MEMS microphone testing and trimming circuit is simple, the power consumption is low, and the area and the power consumption of a system chip of the MEMS microphone are not increased too much;
and 3, the protocol of communication between the MEMS microphone testing and trimming circuit and the single chip microcomputer is simple.
Drawings
FIG. 1 is a schematic diagram of the connection between the MEMS microphone system and the single chip microcomputer according to the present invention;
FIG. 2 is a schematic diagram of a MEMS microphone system of the present invention;
FIG. 3 is a schematic diagram of an encoded signal according to the present invention;
FIG. 4 is a schematic diagram of a detection module according to the present invention;
FIG. 5 is a schematic diagram of an identification module of the present invention;
FIG. 6 is a schematic diagram of a data output module according to the present invention.
Description of the element reference numerals
1 MEMS microphone system
11 MEMS microphone test trimming circuit
111. Data output module
112. Detection module
113. Identification module
12 MEMS microphone module
S1-S9, S21-S25, S71-S74 steps
Detailed Description
The following embodiments of the present invention are provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1-6. It should be noted that the drawings provided in this embodiment are only for schematically illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings and not drawn according to the number, shape and size of the components in actual implementation, and the form, quantity and proportion of each component in actual implementation may be arbitrarily changed, and the component layout may be more complicated.
Example one
As shown in fig. 2, the MEMS microphone test trimming circuit 11 includes: a detection module 112, an identification module 113 and a data output module 111;
the input end of the detection module 112 is connected with the data port of the MEMS microphone module 12, receives an instruction signal sent by the single chip, extracts a clock signal in the instruction signal, and outputs the clock signal;
the input end of the identification module 113 is connected with the output end of the detection module 112 and the single chip microcomputer, receives the clock signal and the instruction signal, encodes and converts the instruction signal based on the clock signal, and outputs an identification signal;
the MEMS microphone module 12 is connected to an output port of the identification module 113, receives the identification signal, and outputs a data signal corresponding to the identification signal;
the input end of the data output module 111 is connected to the data port of the MEMS microphone module 12, the output port of the identification module 113, and the output port of the detection module 112, receives the identification signal and the data signal, reads and converts the data signal based on the clock signal, generates a trimming signal, and outputs the trimming signal to a single chip microcomputer through the data port of the MEMS microphone module.
The connecting lines and arrows in fig. 2 only indicate the flow of signals, and do not indicate the connection relationship between the modules.
Specifically, as shown in fig. 4, the detection module 112 includes a comparator, a first bias unit, a second bias unit, a trigger unit and a delay unit;
the comparator receives the instruction signal, compares the instruction signal with a preset level and outputs a comparison signal;
the first bias unit receives the comparison signal and an external bias current and outputs a first bias signal;
the trigger unit is connected with the output end of the comparator and the output end of the first bias unit, receives the comparison signal and the first bias signal and outputs a trigger signal;
the second bias unit is connected with the output end of the trigger unit, receives the trigger signal and outputs a second bias signal;
the delay unit is connected with the output end of the second bias circuit, delays the second bias signal and outputs the clock signal.
Specifically, as shown in fig. 5, the identification module 113 includes an encoder and a serial-parallel conversion unit;
the encoder receives the instruction signal, encodes the instruction signal based on the clock signal and outputs an encoded signal;
and the serial-parallel conversion unit is connected with the output end of the encoder, receives the coded signal, performs parallel conversion on the coded signal and outputs an identification signal.
It should be noted that the identification signal can be directly mapped to the high-low level state of the signal corresponding to the adjustment variable required by the MEMS microphone module 12.
Specifically, as shown in fig. 6, the data output module 111 includes a falling edge detection unit, a counter and a parallel-serial conversion unit;
the falling edge detection unit receives an identification signal, detects the falling edge of the identification signal and outputs a reading signal;
the counter receives the reading signal, and reads and counts corresponding data in the MEMS microphone module 12 based on the reading signal;
the parallel-serial conversion unit is connected with the output end of the counter, when the counter counts to a preset value, reading and counting of corresponding data of the MEMS microphone module 12 are stopped, the read data are converted into serial data, and the serial data are output through a data port of the MEMS microphone module 12.
It should be noted that, as shown in fig. 1, the ports of the MEMS microphone system 1 include three ports: a power port, a ground port and a data port; as shown in fig. 2, the data port (corresponding to at least one of the input port or the output port) of the MEMS microphone system 1 is connected with the data port of the data output module 111, the data port of the MEMS microphone module 12, the data port of the identification module 113, and the data port of the detection module 112 (the power port and the ground port are not shown in fig. 2); in the MEMS microphone testing and trimming method in the second embodiment, the MEMS microphone system 1 communicates with the single chip microcomputer through the data port, so that the MEMS microphone module 12 is tested and trimmed without adding an additional port by multiplexing the data port of the MEMS microphone module 12.
Example two
The present embodiment discloses a MEMS microphone system 1, where the MEMS microphone system 1 includes a MEMS microphone testing and trimming circuit 11 and a MEMS microphone module 12 according to the first embodiment.
EXAMPLE III
The embodiment discloses a method for testing and trimming an MEMS microphone, which can be implemented based on an MEMS microphone testing and trimming circuit 11 in the first embodiment and an MEMS microphone system 1 in the second embodiment, or based on any circuit capable of implementing the method for testing and trimming the MEMS microphone, without limitation; the present embodiment is described based on the first embodiment and the second embodiment, and the method for testing and trimming the MEMS microphone at least includes the following steps:
s1: the MEMS microphone system 1 is powered on, the single chip microcomputer sends out an instruction signal, and the instruction signal is output through a data port of the MEMS microphone module 12;
s2: the detection module 112 receives the instruction signal, extracts a clock signal in the instruction signal, and outputs the clock signal;
as an example, step S2 may include the following sub-steps, but is not limited to the embodiment:
s21: the comparator receives the instruction signal, compares the instruction signal with a preset level and outputs a comparison signal;
s22: the first bias unit receives the comparison signal and an external bias current and outputs a first bias signal;
s23: the trigger unit is connected with the output end of the comparator and the output end of the first bias unit, receives the comparison signal and the first bias signal and outputs a trigger signal;
s24: the second bias unit is connected with the output end of the trigger unit, receives the trigger signal and outputs a second bias signal;
s25: the delay unit is connected with the output end of the second bias circuit, delays the second bias signal and outputs the clock signal.
S3: the encoder encodes the instruction signal based on the clock signal and outputs an encoded signal;
specifically, the command signal is encoded, and the difference of the ratio of the high-low level duration in one period of the encoded signal is used for representing data 0 and 1 in the command signal.
Specifically, the ratio of the time of the high level duration to the time of the low level duration in one cycle of the code signal is 5.
It should be noted that, the ratio of the duration time of the high and low levels of the coded signal, which represents the data 0 and 1, includes but is not limited to that listed in this embodiment, and any coding rule that can satisfy the communication protocol of the single chip microcomputer and the MEMS microphone testing and trimming circuit 11 satisfies the invention. As an example, the reception instruction signal is encoded, and the data format of the encoded signal is as shown in fig. 3, where T is a period of data, T1 is a time duration of high level, T2 is a time duration of low level, and when T =60us, T1=10us, T2=50us, it represents data 0; when T =60us, T1=50us, T2=10us, data 1 is represented.
S4: the serial-parallel conversion unit carries out parallel conversion on the coded signals and outputs identification signals;
s5: adjusting specific parameters of the MEMS microphone module 12;
as examples, the specific parameter includes a voltage, a current, or a gain. It should be noted that the specific parameters include, but are not limited to, those listed in the present embodiment, and any parameter that can be adjusted according to the design requirement of the MEMS microphone module 12 will satisfy the invention, which is not listed here.
S6: the MEMS microphone module 12 receives the identification signal and outputs a data signal corresponding to the identification signal;
s7: the data output module 111 reads, counts and converts the data signals based on the identification signals to generate trimming signals, and outputs the trimming signals to a single chip microcomputer through a data port of the MEMS microphone module;
specifically, the data signal corresponds to a test parameter of the module of the MEMS microphone, and the data signal can reflect the magnitude of the test parameter corresponding to the module of the MEMS microphone, so as to determine to perform step S5 or step S9 according to whether the identification signal meets an expected requirement; as an example, the test parameters include receive sensitivity and power consumption; it should be noted that the test parameters include, but are not limited to, those listed in this embodiment, and any parameter to be tested according to the design of the MEMS microphone module 12 satisfies the invention, which is not listed here.
It should be noted that the data output module 111 further reads or counts the data signal based on the clock signal, and as an example, the step S7 may include the following sub-steps, but is not limited to this embodiment:
s71: the falling edge detection unit receives the identification signal, detects the falling edge of the identification signal based on the clock signal and outputs a reading signal;
s72: the counter receives the reading signal, reads the data signal based on the reading signal and counts the data signal;
s73: judging whether the counter reaches a preset value or not, and executing a step S72 when the counter does not reach the preset value; when the preset value is reached, executing step S74;
s74: stopping reading and counting the corresponding data of the MEMS microphone module, performing serial conversion on the data read by the counter, and outputting a trimming signal through a data port of the MEMS microphone module 12.
S8: the single chip microcomputer receives the trimming signal and detects whether the trimming signal meets the requirement; when the requirement is not met, jumping to the step S5; when the requirement is met, jumping to the step S9;
s9: the single chip microcomputer sends a communication forbidding instruction to the MEMS microphone testing and trimming circuit 11, so that the MEMS microphone testing and trimming circuit 11 forbids communication permanently.
It should be noted that, after receiving the command for prohibiting communication, the MEMS microphone testing and trimming circuit 11 executes a corresponding operation, for example, a fuse for communication is blown, and the communication mode cannot be entered any more, but the present embodiment is not limited thereto.
It should be noted that, in step S8, when the requirement is not satisfied, the process jumps to step S5; when the number of consecutive unsatisfied requirements reaches a preset upper limit, other processing operations may be performed, as an example: when the requirement is not satisfied twice in succession, the MEMS microphone system 1 is treated as a bad piece, but the present embodiment is not limited thereto.
In summary, the present invention provides an MEMS microphone system 1, an MEMS microphone testing and trimming circuit 11, and a method, where the MEMS microphone system 1 includes the MEMS microphone testing and trimming circuit 11 and an MEMS microphone module 12, and the MEMS microphone testing and trimming circuit 11 includes: a data output module 111, a detection module 112 and an identification module 113; the input end of the detection module 112 is connected with the data port of the MEMS microphone module 12, receives an instruction signal sent by the single chip, extracts a clock signal in the instruction signal, and outputs the clock signal; the identification module 113 receives the clock signal and the instruction signal, encodes and converts the instruction signal based on the clock signal, and outputs an identification signal; adjusting specific parameters of the MEMS microphone module 12; the MEMS microphone module 12 receives the identification signal and outputs a data signal corresponding to the identification signal; the data output module 111 receives the identification signal and the data signal, reads, counts and converts the data signal to generate a trimming signal, and outputs the trimming signal to a single chip microcomputer through a data port of the EMS microphone module; adjusting certain parameters of the MEMS microphone module 12 until the requirements are met; when the requirement is met, the single chip microcomputer sends a communication forbidding instruction to the MEMS microphone testing and trimming circuit 11, so that the MEMS microphone testing and trimming circuit 11 forbids communication permanently; a data port of the MEMS microphone system 1 is connected to a data port of the data output module 111, a data port of the MEMS microphone module 12, a data port of the identification module 113, and a data port of the detection module 112; the MEMS microphone system 1 is communicated with the single chip microcomputer through a data port, so that the MEMS microphone module 12 is tested and modified through multiplexing the data port of the MEMS microphone module 12 without adding extra ports; the MEMS microphone testing and trimming circuit 11 has a simple circuit structure and low power consumption, and does not increase too much area and power consumption of a chip of the MEMS microphone system 1; the communication protocol between the MEMS microphone testing and trimming circuit 11 and the single chip microcomputer is simple. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Those skilled in the art can modify or change the above-described embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (11)

1. A MEMS microphone test trimming circuit, characterized in that, the MEMS microphone test trimming circuit comprises: the device comprises a detection module, an identification module and a data output module;
the input end of the detection module is connected with the data port of the MEMS microphone module, receives an instruction signal sent by a single chip microcomputer, extracts a clock signal in the instruction signal and outputs the clock signal;
the identification module receives the instruction signal, codes and converts the instruction signal based on the clock signal, and outputs an identification signal;
the MEMS microphone module receives the identification signal and outputs a data signal corresponding to the identification signal;
the data output module receives the identification signal and the data signal, reads and converts the data signal based on the clock signal to generate a trimming signal, and the trimming signal is output to a single chip microcomputer through a data port of the MEMS microphone module.
2. The MEMS microphone test trimming circuit of claim 1, wherein: the detection module comprises a comparator, a first bias unit, a second bias unit, a trigger unit and a delay unit;
the comparator receives the instruction signal, compares the instruction signal with a preset level and outputs a comparison signal;
the first bias unit receives the comparison signal and an external bias current and outputs a first bias signal;
the trigger unit is connected with the output end of the comparator and the output end of the first bias unit, receives the comparison signal and the first bias signal and outputs a trigger signal;
the second bias unit is connected with the output end of the trigger unit, receives the trigger signal and outputs a second bias signal;
the delay unit is connected with the output end of the second bias circuit, delays the second bias signal and outputs the clock signal.
3. The MEMS microphone test trimming circuit of claim 1, wherein: the identification module comprises an encoder and a serial-parallel conversion unit;
the encoder receives the instruction signal, encodes the instruction signal based on the clock signal and outputs an encoded signal;
and the serial-parallel conversion unit is connected with the output end of the encoder, receives the coded signal, performs parallel conversion on the coded signal and outputs an identification signal.
4. The MEMS microphone test trimming circuit of claim 1, wherein: the data output module comprises a falling edge detection unit, a counter and a parallel-serial conversion unit;
the falling edge detection unit receives the identification signal, detects the falling edge of the identification signal based on the clock signal and outputs a reading signal;
the counter is connected with the output end of the falling edge detection unit, receives the reading signal, reads the data signal based on the reading signal and counts the data signal;
and the parallel-serial conversion unit is connected with the output end of the counter, and is used for performing serial conversion on the data read by the counter and outputting a trimming signal.
5. A MEMS microphone system, characterized by: the MEMS microphone system comprising the MEMS microphone test trimming circuit and the MEMS microphone module of any one of claims 1-4.
6. The MEMS microphone testing and trimming method is characterized by at least comprising the following steps of:
s1: electrifying the MEMS microphone system, sending a command signal, and outputting the command signal through a data port of the MEMS microphone module;
s2: receiving the instruction signal, extracting a clock signal in the instruction signal, and outputting the clock signal;
s3: based on the clock signal, coding the instruction signal and outputting a coded signal;
s4: performing parallel conversion on the coded signals and outputting identification signals;
s5: adjusting specific parameters of the MEMS microphone module;
s6: receiving the identification signal and outputting a data signal corresponding to the identification signal;
s7: reading, counting and converting the data signals based on the identification signals to generate trimming signals, and outputting the trimming signals to a single chip microcomputer through a data port of the EMS microphone module;
s8: receiving a trimming signal, and detecting whether the trimming signal meets requirements; when the requirement is not met, jumping to the step S5; when the requirement is met, jumping to the step S9;
s9: and sending a communication forbidding command to the MEMS microphone testing and trimming circuit, so that the MEMS microphone testing and trimming circuit forbids communication permanently.
7. The MEMS microphone testing and trimming method according to claim 6, wherein: the coded signal is used for representing data 0 and 1 in the command signal through different ratios of high and low level duration in one period.
8. The MEMS microphone testing and trimming method according to claim 7, wherein: the ratio of the high level duration to the low level duration in one cycle of the code signal is 5.
9. The MEMS microphone testing and trimming method according to claim 6, wherein: the data signal corresponds to the testing parameter of the MEMS microphone module, and the size of the testing parameter can be reflected.
10. The MEMS microphone testing and trimming method according to claim 9, wherein: the test parameter includes a reception sensitivity or a power consumption.
11. The MEMS microphone testing and trimming method according to any one of claims 6 to 10, wherein: the specific parameter includes a voltage, a current, or a gain.
CN202110587058.0A 2021-05-27 2021-05-27 MEMS microphone system, MEMS microphone testing and trimming circuit and MEMS microphone testing and trimming method Pending CN115412818A (en)

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* Cited by examiner, † Cited by third party
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CN117171072A (en) * 2023-11-03 2023-12-05 深圳联芯微电子科技有限公司 One-way communication method and system for micro control unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117171072A (en) * 2023-11-03 2023-12-05 深圳联芯微电子科技有限公司 One-way communication method and system for micro control unit
CN117171072B (en) * 2023-11-03 2024-02-23 深圳联芯微电子科技有限公司 One-way communication method and system for micro control unit

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