CN115400807B - Driving method of microfluidic device and microfluidic device - Google Patents
Driving method of microfluidic device and microfluidic device Download PDFInfo
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Abstract
The invention discloses a driving method of a microfluidic device and the microfluidic device, and relates to the technical field of microfluidics, wherein the driving method comprises the following steps: introducing liquid drops into the first channel; in the first stage, a first driving voltage is formed between the driving electrode and the common electrode, and liquid drops are fixed right above the N driving electrode, wherein N is more than or equal to 1 and less than or equal to M; in the second stage, canceling the first signal supplied to the nth driving electrode, forming a second driving voltage between the nth driving electrode and the common electrode, the absolute value of the second driving voltage being greater than 0 and less than the absolute value of the first driving voltage; in the third stage, a first signal is provided to the (n+1) th driving electrode, and a first driving voltage is formed between the (n+1) th driving electrode and the common electrode; wherein the second phase overlaps the third phase. And the smooth driving of the liquid drops is ensured, and the driving power consumption is reduced.
Description
Technical Field
The invention relates to the technical field of microfluidics, in particular to a driving method of a microfluidic device and the microfluidics.
Background
Microfluidic (Micro Fluidics) technology is an emerging interdisciplinary subject related to chemistry, fluid physics, microelectronics, new materials, biology and biomedical engineering, can precisely control droplet movement, realize operations such as droplet fusion and separation, and complete various biochemical reactions, and is a technology with the main characteristics of controlling fluid in a micrometer scale space. In recent years, the microfluidic chip has the advantages of small volume, low power consumption, low cost, small required sample and reagent amount, capability of realizing independent and accurate control of liquid drops, short detection time, high sensitivity, easiness in integration with other devices and the like, and is widely applied to the fields of biology, chemistry, medicine and the like.
In the prior art, the principle of electrowetting is often used to control the flow position of a liquid in a microfluidic device by setting at least one substrate voltage. At present, a common mode is to drive liquid drops to flow in a direct current driving mode, and in the liquid drop driving process, continuous direct current voltage is adopted to greatly increase driving power consumption. At present, how to effectively reduce the power consumption of droplet driving becomes one of the technical problems to be solved.
Disclosure of Invention
In view of the above, the present invention provides a driving method of a microfluidic device and a microfluidic device, which aim to ensure smooth driving of droplets and reduce driving power consumption.
In a first aspect, the present invention provides a driving method of a microfluidic device, where the microfluidic device includes a first substrate, a driving layer, and a microfluidic structure layer, the driving layer is located between the first substrate and the microfluidic structure layer, the driving layer includes a plurality of driving electrodes and a common electrode disposed opposite to the driving electrodes, the microfluidic structure layer includes at least one first channel, and the first channel includes M driving electrodes sequentially arranged;
the driving method includes:
Introducing liquid drops into the first channel;
in a first stage, providing a first signal to an Nth driving electrode overlapped with the liquid drop, providing a constant signal to the common electrode, forming a first driving voltage between the driving electrode and the common electrode, and fixing the liquid drop right above the Nth driving electrode, wherein N is more than or equal to 1 and less than or equal to M;
in a second stage, canceling a first signal supplied to the nth driving electrode, forming a second driving voltage between the nth driving electrode and the common electrode, the absolute value of the second driving voltage being greater than 0 and less than the absolute value of the first driving voltage;
in a third stage, the first signal is provided to an n+1th driving electrode, and the first driving voltage is formed between the n+1th driving electrode and the common electrode;
wherein the second stage overlaps the third stage. .
In a second aspect, based on the same inventive concept, the present invention also provides a microfluidic device comprising: the micro-fluidic structure layer comprises at least one first channel, wherein M driving electrodes are sequentially arranged in the first channel;
The driving layer further comprises a plurality of switch control lines, a plurality of data lines and a plurality of driving circuits corresponding to the driving electrodes; at least part of the driving circuit comprises a first transistor, a first capacitor and a second capacitor; in the same first channel, in the driving circuits corresponding to the nth driving electrode and the (n+1) th driving electrode, the grid electrodes of the first transistors are respectively connected with different switch control lines, the first poles of the first transistors are connected with the same data line, and the second poles of the different first transistors are respectively connected with different driving electrodes; the driving electrode is connected with a first pole of the first capacitor, and a second pole of the first capacitor receives a fixed voltage signal; the N-th driving electrode is electrically connected with the switch control line corresponding to the (n+1) -th driving electrode through a second capacitor, and N is more than or equal to 1 and less than M.
Compared with the related art, the driving method of the microfluidic device and the microfluidic device provided by the invention have the advantages that at least the following effects are realized:
in the microfluidic device provided by the embodiment of the invention, the driving layer and the microfluidic structure layer are arranged, wherein the microfluidic structure layer comprises at least one first channel, and the first channel is used for accommodating liquid drops. The driving layer includes a driving electrode and a common electrode disposed opposite to each other, and a driving voltage for driving movement of the droplet is formed between the driving electrode and the common electrode when an electric signal is supplied to the driving electrode and the common electrode. In the control method of the microfluidic device provided by the embodiment of the invention, after liquid drops are introduced into the first channel, the liquid drops are driven through three stages, in the first stage, first a first signal is provided for an N-th driving electrode overlapped with the liquid drops, and a constant signal is provided for a common electrode, so that a first driving voltage is formed, and the liquid drops are fixed right above the N-th driving electrode; in the second stage, the signal provided to the nth driving electrode is canceled, and the voltage between the nth driving electrode and the common electrode does not suddenly disappear, but gradually decreases to form a second driving voltage; in the third stage, a first signal is supplied to the n+1th driving electrode, a first driving voltage is formed between the n+1th driving electrode and the common electrode, and the third stage and the second stage overlap, that is, the second driving voltage supplied to the droplet by the N-th driving electrode and the first driving voltage supplied to the droplet by the n+1th driving electrode coexist, at this time, the front portion (the portion adjacent to the n+1th driving electrode) of the droplet starts to move, and the tail portion is not started, at this time, the movement speed of the center of gravity of the droplet is faster. As the droplet moves a distance in the direction of the n+1th drive electrode, the tail of the droplet starts to move and creates a drag force on the front of the droplet, reducing the overall velocity of the droplet. When the tail part of the liquid drop catches up with the front part of the liquid drop, namely the speeds of the tail part and the front part are consistent, the speed of the liquid drop is accelerated under the driving voltage, the liquid drop moves towards the direction of the (n+1) th electrode, and the contact area of the liquid drop and the (n+1) th driving electrode is larger and larger. The first driving voltage fixes the droplet above the n+1th driving electrode when the center of gravity of the droplet coincides with the center of the n+1th driving electrode. In the second stage, even if the electric signal supplied to the nth driving electrode is removed, the second driving voltage between the nth driving electrode and the common electrode can be maintained for a while to maintain the morphology of the droplet. When the first signal is applied to the (N+1) th driving electrode in the third stage, the liquid drop still has part of the second driving voltage at the position corresponding to the (N) th driving electrode, and the smaller second driving voltage at the position corresponding to the (N) th driving electrode can still drive the liquid drop to continuously move towards the (N+1) th driving electrode, so that the first signal with a larger voltage value is not required to be continuously provided for the (N) th driving electrode in the driving process of the liquid drop, and the driving power consumption is reduced while the normal movement of the liquid drop is ensured.
Of course, it is not necessary for any one product embodying the invention to achieve all of the technical effects described above at the same time.
Other features of the present invention and its advantages will become apparent from the following detailed description of exemplary embodiments of the invention, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.
Fig. 1 is a flowchart of a driving method of a microfluidic device according to an embodiment of the present invention;
fig. 2 is a driving timing chart of a driving method of a microfluidic device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a microfluidic device according to an embodiment of the present invention;
FIG. 4 is a diagram showing a relative positional relationship between a droplet and a driving electrode in a first stage;
FIG. 5 is a diagram showing a relative positional relationship between the droplet and the driving electrode in the second stage;
FIG. 6 is a diagram showing a relative positional relationship between the droplet and the driving electrode in the third stage;
FIG. 7 is a diagram showing a relative positional relationship between the droplet and the driving electrode in the third stage;
FIG. 8 is a diagram showing a relative positional relationship between the droplet and the driving electrode in the third stage;
FIG. 9 is a diagram showing a relative positional relationship between the droplet and the driving electrode in the third stage;
fig. 10 is a driving timing chart of a driving method of a microfluidic device according to an embodiment of the present invention;
FIG. 11 is a schematic diagram of a drive electrode and associated switch control and data lines;
FIG. 12 is a schematic diagram showing a variation of the driving signals generated by the N-th driving electrode and the common electrode;
FIG. 13 is a schematic diagram of a driving circuit corresponding to the microfluidic driving device according to the present invention;
FIG. 14 is a driving timing diagram corresponding to the driving circuit in FIG. 13;
FIG. 15 is a schematic diagram of a driving circuit corresponding to the microfluidic driving device according to the present invention;
FIG. 16 is a driving timing diagram corresponding to the driving circuit in FIG. 15;
FIG. 17 is a schematic diagram of a membrane layer of a driving layer in a microfluidic device;
FIG. 18 is a schematic diagram of a driving circuit corresponding to M driving electrodes;
fig. 19 is a schematic structural view of a driving electrode according to an embodiment of the present invention.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise.
The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses.
Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but are intended to be part of the specification where appropriate.
In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of exemplary embodiments may have different values.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims (the claims) and their equivalents. The embodiments provided by the embodiments of the present invention may be combined with each other without contradiction.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
Fig. 1 is a flowchart of a driving method of a microfluidic device according to an embodiment of the present invention, and fig. 2 is a driving timing chart of a driving method of a microfluidic device according to an embodiment of the present invention, where PN represents a driving voltage of a droplet at a position where an nth driving electrode P is located, pn+1 represents a driving voltage of a droplet at a position where an n+1th driving electrode P is located, and pn+2 represents a driving voltage of a droplet at a position where an n+2th driving electrode P is located. Fig. 3 is a schematic structural diagram of a microfluidic device according to an embodiment of the present invention, referring to fig. 1 and 3, the microfluidic device includes a first substrate 00, a driving layer 10 and a microfluidic structure layer 20, the driving layer 10 is located between the first substrate 00 and the microfluidic structure layer 20, the driving layer 10 includes a plurality of driving electrodes P and a common electrode 11 opposite to the driving electrodes P, the microfluidic structure layer 20 includes at least one first channel 21, and the first channel 21 includes M driving electrodes P sequentially arranged;
the driving method comprises the following steps:
s101, introducing liquid drops 30 into the first channel 21;
s102, in a first stage t1, please refer to FIGS. 2 and 4, a first signal is provided to an N-th driving electrode P overlapping with the droplet 30, a constant signal is provided to the common electrode 11, a first driving voltage V1 is formed between the driving electrode P and the common electrode 11, the droplet is fixed right above the N-th driving electrode P, N is not less than 1 and not more than M, wherein FIG. 4 shows a relative positional relationship between the droplet and the driving electrode P in the first stage.
S103, in a second stage t2, please refer to FIG. 2 and FIG. 5, the first signal provided to the N-th driving electrode P is canceled, a second driving voltage V2 is formed between the N-th driving electrode P and the common electrode 11, and the absolute value of the second driving voltage is greater than 0 and less than the absolute value of the first driving voltage, wherein FIG. 5 is a diagram showing a relative positional relationship between the droplet and the driving electrode P in the second stage t 2; note that, canceling the first signal supplied to the nth driving electrode P in the present invention means that the electric signal is not supplied to the first driving electrode P any more. Alternatively, the first signal is a dc voltage signal, and when the first signal provided to the nth driving electrode P is cancelled, that is, when the droplet has not completely left the position corresponding to the nth driving electrode P, the electrical signal provided to the nth driving electrode P is cancelled, and no continuous dc signal is provided to the nth driving electrode.
S104, in a third stage t3, please refer to fig. 2, 5-9, a first signal is provided to the n+1st driving electrode P, and a first driving voltage is formed between the n+1st driving electrode P and the common electrode 11, wherein the second stage t2 overlaps the third stage, and fig. 6-9 respectively show a relative positional relationship between the droplet and the driving electrode P in the third stage.
It should be noted that fig. 2 illustrates only one structure of the microfluidic device, and does not represent the actual structure of the microfluidic device. Fig. 4 to 6 only show the relative positional relationship between the driving electrode P and the droplet, and do not limit the actual shapes and sizes of the driving electrode P and the droplet.
Specifically, referring to fig. 1 to 9, in the microfluidic device provided in the embodiment of the invention, the device includes a first substrate 00, a driving layer 10 disposed on the first substrate 00, and a microfluidic structure layer 20 disposed on a side of the driving layer 10 away from the first substrate 00, where the microfluidic structure layer 20 includes at least one first channel 21, and optionally, a plurality of first channels 21, and the first channels 21 are used for accommodating droplets that can be driven to flow. The driving layer 10 includes a plurality of driving electrodes P and a common electrode 11 disposed opposite to the driving electrodes P, and a driving voltage for driving movement of the liquid droplets in the first channel 21 can be formed by supplying an electric signal to the driving electrodes P and the common electrode 11.
In the control method of the microfluidic device provided by the embodiment of the invention, after the liquid drop 30 is introduced into the first channel 21, the liquid drop 30 is driven through three stages, and in the first stage t1, please combine fig. 2 and fig. 4, first a first signal is provided to the nth driving electrode P overlapped with the liquid drop, and a constant signal is provided to the common electrode 11, so as to form a first driving voltage V1, and the liquid drop is fixed right above the nth driving electrode P; in the second stage t2, the signal supplied to the nth driving electrode P is canceled, and the voltage between the nth driving electrode P and the common electrode 11 does not suddenly disappear, but gradually decreases to form a second driving voltage V2; referring to fig. 2 and 5, in the third stage, the first signal is supplied to the n+1th driving electrode P, the first driving voltage V2 is formed between the n+1th driving electrode P and the common electrode 11, and the third stage t3 and the second stage t2 overlap, that is, the second driving voltage supplied to the droplet by the n+1th driving electrode P and the first driving voltage supplied to the droplet by the n+1th driving electrode P coexist, at this time, the front portion (the portion adjacent to the n+1th driving electrode P) of the droplet starts to move, and referring to fig. 5, the tail portion is not started, at this time, the moving speed of the center of gravity of the droplet is fast. Referring to fig. 6, as the droplet moves a distance toward the n+1th driving electrode P, the tail of the droplet starts to move and a drag force is formed on the front of the droplet, and the overall velocity of the droplet decreases. Referring to fig. 7 to 9, when the tail of the droplet catches up with the front of the droplet, i.e. the speeds of the two are the same, the droplet speed is increased under the driving voltage, the droplet moves toward the n+1th electrode, and the contact area between the droplet and the n+1th driving electrode P is larger. When the center of gravity of the droplet coincides with the center of the n+1th driving electrode P, the first driving voltage fixes the droplet above the n+1th driving electrode P. In the second stage t2, even if the electric signal supplied to the nth driving electrode P is removed, the second driving voltage between the nth driving electrode P and the common electrode 11 can be maintained for a while to maintain the form of the droplet. When the first signal is applied to the n+1th driving electrode P in the third stage, the droplet still has a part of the second driving voltage V2 at the position corresponding to the N driving electrode P, which still drives the droplet to move in the direction of the n+1th driving electrode P, so that the first signal with a larger voltage value is not required to be continuously provided to the N driving electrode P in the driving process of the droplet, thereby ensuring the normal movement of the droplet and reducing the driving power consumption.
Fig. 10 is a driving timing chart of a driving method of a microfluidic device according to an embodiment of the present invention, where in an alternative embodiment of the present invention, a start time of the second stage t2 coincides with a start time of the third stage t 3.
Specifically, in the second stage t2, the electric signal supplied to the nth driving electrode P is canceled, and in the third stage t3, the supply of the first signal to the n+1th driving electrode P is started. When the start time of the second stage t2 coincides with the start time of the third stage t3, this means that the first signal is supplied to the n+1th driving electrode P while the supply of the electric signal to the N-th driving electrode P is canceled. That is, although the first driving voltage is not provided to the droplet by the nth driving electrode P, the first driving voltage is provided to the droplet by the n+1th driving electrode P, which is beneficial to ensuring the continuity of the droplet in the process of moving from the position corresponding to the nth driving electrode P to the position corresponding to the n+1th driving electrode P, so that the driving power consumption is reduced, and the starting moments of the second stage t2 and the third stage are overlapped, which is beneficial to improving the driving efficiency.
Fig. 11 is a schematic diagram of driving electrodes P and a switch control line G and a data line S connected to each driving electrode P, wherein each driving electrode P is correspondingly connected to a first transistor T1, a gate of the first transistor T1 is connected to the switch control line G, a first pole is connected to the data line S, a second pole is connected to the driving electrode P, and when a signal on the switch control line G controls the first transistor T1 to be turned on, the signal on the data line S can be transmitted to the driving electrode P through the first transistor T1. The embodiment is described taking the first transistor T1 as an N-type transistor as an example, and the first transistor T1 is turned on at a high level and turned off at a low level, but the type of the first transistor T1 is not limited, and in some other embodiments of the present invention, the first transistor T1 may also be embodied as a P-type transistor, etc., which is not particularly limited in this invention. In an alternative embodiment of the invention, the second driving voltage is gradually reduced during the second phase t 2.
Fig. 12 is a schematic diagram showing a variation of the driving signals generated by the nth driving electrode P and the common electrode 11, and referring to fig. 2, 10, 11 and 12, in the first stage, when the first signal is provided to the nth driving electrode P through the data line S, the driving signal is a high level signal, and the corresponding voltage is a first driving voltage. In the second stage t2, when the first signal supplied to the nth driving electrode P is canceled, the driving signal applied to the droplet in the region corresponding to the nth driving electrode P is not directly extinguished due to the characteristics of the driving circuit itself connected to the nth driving electrode P. In driving the droplet, after completing the driving of the droplet from the first driving electrode to the last driving electrode in the first channel, optionally, the next time the droplet is driven, the polarity of the signal on the data line is inverted. In this process, a feedback voltage is generated, so that the driving voltage provided to the droplet drops by a certain value δvp from the first driving voltage, and even if the first signal is not provided to the nth driving electrode P, the position corresponding to the nth driving electrode P can still provide the smaller second driving voltage to the droplet. Wherein δvp= (cgs+ Cpg) (VGH-VGL)/(c1+cgs+ Cpg), where C1, cgs, and Cpg are respectively a storage capacitor in the driving circuit (the capacitor C1 will be described in the following embodiments), a parasitic capacitor between the gate and the source of the first transistor T1, and a parasitic capacitor between the gate and the driving electrode P, VGH is an on-state voltage provided by the switch control line G to the first transistor T1, and VGL is an off-state voltage provided by the switch control line G to the first transistor T1. From the above formula, δvp is strongly related to Cgs and Cpg, and both parameters can be properly enlarged by structural design.
When the first signal is applied to the n+1th driving electrode P, the droplet is still located at the N driving electrode P, and if the driving voltage of the region corresponding to the N driving electrode P is disappeared, the droplet may be deformed and locally changed, thereby reducing the moving speed of the droplet across the gap between the adjacent two driving electrodes P. In the present application, after the first signal provided to the nth electrode is cancelled in the second stage t2, the above formula can determine that the second driving voltage is still generated in the area corresponding to the nth electrode, so that the driving signals applied to the droplets between two adjacent driving electrodes P can be connected. After the liquid drops are driven to move, the first signal provided to the Nth driving electrode P is canceled, so that the driving voltage applied to the liquid drops at the position of the Nth driving electrode P is gradually reduced, the liquid drops can still be driven to move, the driving power consumption can be effectively reduced, and the energy efficiency is improved.
With continued reference to fig. 6-7, in an alternative embodiment of the present application, a first gap is included between the nth driving electrode P and the n+1th driving electrode P, and in the second stage t2, the droplet overlaps the nth driving electrode P and the n+1th driving electrode P, respectively, and the center of gravity of the droplet overlaps the first gap, or the center of gravity of the droplet overlaps the n+1th driving electrode P.
Specifically, when the center of gravity of the droplet passes over the gap between the adjacent two driving electrodes P when the droplet moves from the nth electrode to the n+1th electrode, the driving force of the tail of the droplet starts to move backward, that is, the droplet is not driven to move forward, and the droplet starts to decelerate. At this time, the driving voltage of the region corresponding to the nth driving electrode P does not affect the moving speed of the droplet too much, so that when the moment when the center of gravity of the droplet overlaps the first gap or the moment when the center of gravity of the droplet overlaps the n+1th driving electrode P is used as the starting moment of the second stage t2, the lower second driving voltage generated at the position of the nth driving electrode P does not affect the advancing speed of the droplet even if the first signal provided to the nth driving electrode P is cancelled. Conversely, if the second stage t2 continues to provide the first signal (e.g., dc voltage) to the nth driving electrode P, power consumption is wasted. Therefore, the invention selects to cancel the first signal provided to the nth driving electrode P at the moment when the center of the droplet overlaps with the first gap or overlaps with the (n+1) th driving electrode P, thereby not only ensuring the normal movement of the droplet, but also being beneficial to reducing the driving power consumption.
Fig. 13 is a schematic diagram of a driving circuit corresponding to a microfluidic driving device according to the present invention, and fig. 14 is a driving timing diagram corresponding to the driving circuit in fig. 13, wherein PN represents a driving voltage applied to a droplet at a position of an nth driving electrode P, pn+1 represents a driving voltage applied to a droplet at a position of an n+1th driving electrode P, GN represents a signal on a switch control line G corresponding to a first transistor T1 connected to the nth driving electrode P, and gn+1 represents a signal on a switch control line G corresponding to a first transistor T1 connected to the n+1th driving electrode P. The present embodiment only shows the connection relation of the driving circuits corresponding to the two consecutive driving electrodes P, and does not illustrate the driving circuits actually included, and alternatively, each driving electrode P is provided with a corresponding driving circuit.
Referring to fig. 13 and 14, in an alternative embodiment of the present invention, the driving layer 10 includes a plurality of switch control lines G, a plurality of data lines S, and a plurality of driving circuits corresponding to the driving electrodes P, wherein the driving circuits include a first transistor T1 and a first capacitor C1; in the driving circuit corresponding to the nth driving electrode P and the (n+1) th driving electrode P, the grid electrode of the first transistor T1 is respectively connected with different switch control lines G, the first pole of the first transistor T1 is connected with the same data line S, the second pole of the first transistor T1 is respectively connected with different driving electrodes P, the driving electrode P is connected with the first pole of the first capacitor C1, and the second pole of the first capacitor C1 receives a fixed voltage signal;
In the first stage T1, the switch control line G corresponding to the nth driving electrode P supplies an on signal to the first transistor T1 corresponding to the nth driving electrode P;
in the third stage T3, the switch control line G corresponding to the n+1th driving electrode P supplies an on signal to the first transistor T1 corresponding to the n+1th driving electrode P;
the first phase t1 and the third phase t3 do not overlap.
Alternatively, the driving electrodes P in the same column are connected to the same data line S, and the embodiment uses the first transistor T1 as an N-type transistor as an example, but the type of the first transistor T1 is not limited. Taking the N-th driving electrode P and the n+1th driving electrode P adjacent to each other as an example, the first stage and the third stage do not overlap, which means that the first signal is not supplied to the n+1th driving electrode P when the first signal is supplied to the N-th driving electrode P in the first stage to generate the first driving voltage for driving the droplet, and the first signal is supplied to the n+1th driving electrode P after the first signal is not supplied to the N-th driving electrode P. In this way, the total time for providing the first signal to the driving electrode P in the driving process of the droplet is reduced, that is, the time for providing the direct current voltage to the driving electrode P is reduced.
Fig. 15 is a schematic diagram of a driving circuit corresponding to a microfluidic driving device according to the present invention, fig. 16 is a driving timing diagram corresponding to the driving circuit in fig. 15, and compared with the embodiment shown in fig. 13, in this embodiment, a second capacitor C1' is introduced into a part of the driving circuit.
In an alternative embodiment of the present invention, the driving layer 10 includes a plurality of switching control lines G, a plurality of data lines S, and a plurality of driving circuits corresponding to the driving electrodes P, the driving circuits including a first transistor T1, a first capacitor C1, and a second capacitor C1'; in the driving circuit corresponding to the nth driving electrode P and the (n+1) th driving electrode P, the grid electrodes of the first transistors T1 are respectively connected with different switch control lines G, the first poles of the first transistors T1 are connected with the same data line S, and the second poles of the different first transistors T1 are respectively connected with different driving electrodes P; the driving electrode P is connected with a first pole of the first capacitor C1, and a second pole of the first capacitor C1 receives a fixed voltage signal; the N driving electrode P is electrically connected with the switch control line G corresponding to the N+1th driving electrode P through a second capacitor C1'; in the third stage, an on signal is supplied to the first transistor T1 corresponding to the n+1th driving electrode P through the switching control line G, and the on signal is coupled to the nth driving electrode P through the second capacitor C1'.
Specifically, this embodiment provides another driving circuit for driving the driving electrode P in the microfluidic device, and compared with the embodiments shown in fig. 13 and 14, a second capacitor C1' is introduced between the nth driving electrode P and the switch control line G corresponding to the n+1th driving electrode P. In the third stage, after the switch control line G provides the on signal to the first transistor T1 corresponding to the n+1th driving electrode P, since the switch control line G corresponding to the n+1th driving electrode P is connected to the N driving electrode P through the second capacitor C1', when the signal on the switch control line G becomes the high level signal, the voltage on the N driving electrode P will also rise due to the coupling effect of the capacitor, thereby being beneficial to improving the driving voltage at the position corresponding to the N driving electrode P, and thus being beneficial to improving the driving efficiency of the droplet.
Referring to fig. 15 and 16, in an alternative embodiment of the present invention, in a first stage T1, a switch control line G corresponding to an nth driving electrode P provides an on signal to a first transistor T1 corresponding to the nth driving electrode P; the third stage t3 overlaps the first stage t1, and the start time of the third stage t3 is after the start time of the first stage t 1.
With continued reference to fig. 15 and 16, the first stage T1 is a stage of providing the first signal to the nth driving electrode P, the third stage T3 is a stage of providing the first signal to the n+1th driving electrode P, in this embodiment, the third stage T3 overlaps the first stage T1, and the start time of the third stage T3 is located after the start time of the first stage T1, which can be understood that the first transistor T1 corresponding to the n+1th driving electrode P is turned on and the first signal is provided to the n+1th driving electrode P during the first signal is provided to the nth driving electrode P. Since the switch control line G corresponding to the n+1th driving electrode P is connected to the N-th driving electrode P through the second capacitor C1', when the high-level on signal is supplied to the first transistor T1 corresponding to the n+1th driving electrode P through the switch control line G, the driving voltage originally applied to the N-th driving electrode P will be raised due to the coupling effect of the second capacitor C1', which corresponds to the value of the first driving voltage increasing the portion overlapping the third stage T3 in the first stage T1, so that the driving voltage of the droplet in the region corresponding to the N-th driving electrode P can be increased through capacitive coupling without increasing the voltage value of the first signal supplied to the N-th driving electrode P through the data line S.
Based on the same inventive concept, the present invention further provides a microfluidic device, for example, please refer to fig. 3 and 17, fig. 17 is a schematic diagram of a film layer of a driving layer 10 in the microfluidic device, and the microfluidic device includes: the micro-fluidic structure layer 20 comprises at least one first channel 21, wherein the first channel 21 comprises M driving electrodes P which are sequentially arranged;
referring to fig. 15, the driving layer 10 further includes a plurality of switch control lines G, a plurality of data lines S, and a plurality of driving circuits corresponding to the driving electrodes P; at least part of the driving circuit comprises a first transistor T1, a first capacitor C1 and a second capacitor C1'; in the same first channel 21, in the driving circuits corresponding to the nth driving electrode P and the n+1th driving electrode P, the gates of the first transistors T1 are respectively connected to different switch control lines G, the first poles of the first transistors T1 are connected to the same data line S, and the second poles of the different first transistors T1 are respectively connected to different driving electrodes P; the driving electrode P is connected with a first pole of the first capacitor C1, and a second pole of the first capacitor C1 receives a fixed voltage signal; the N-th driving electrode P is electrically connected with the switch control line G corresponding to the N+1th driving electrode P through a second capacitor C1', and N is more than or equal to 1 and less than M.
Specifically, in the microfluidic device provided by the embodiment of the invention, the device comprises a first substrate 00, a driving layer 10 arranged on the first substrate 00, and a microfluidic structure layer 20 arranged on one side of the driving layer 10 away from the first substrate 00, wherein the microfluidic structure layer 20 comprises at least one first channel 21, and optionally, a plurality of first channels 21, and the first channels 21 are used for accommodating liquid drops capable of being driven to flow. The driving layer 10 includes a plurality of driving electrodes P and a common electrode 11 disposed opposite to the driving electrodes P, and a driving voltage for driving movement of the liquid droplets in the first channel 21 is formed by supplying an electric signal to the driving electrodes P and the common electrode 11, alternatively, a constant voltage signal is supplied to the common electrode 11, and a driving voltage for driving movement of the liquid droplets is formed between the driving electrodes P and the common electrode 11 when other signals different from the aforementioned constant voltage signal are supplied to the driving electrodes P.
The driving layer 10 is provided with a switch control line G, a data line S and a driving circuit, wherein the driving circuit comprises a first transistor T1, a first capacitor C1 and a second capacitor C1', and the nth driving electrode P is connected with the switch control line G corresponding to the (n+1) th driving electrode P through the second capacitor C1'. In the third stage, after the switch control line G provides the on signal to the first transistor T1 corresponding to the n+1th driving electrode P, since the switch control line G corresponding to the n+1th driving electrode P is connected to the N driving electrode P through the second capacitor C1', when the signal on the switch control line G becomes the high level signal, the voltage on the N driving electrode P will rise due to the coupling effect of the second capacitor C1', for example, please refer to fig. 16, thereby being beneficial to enhancing the driving voltage at the position corresponding to the N driving electrode P, and thus being beneficial to enhancing the driving efficiency of the droplet.
Referring to fig. 15 and 16, in an alternative embodiment of the present invention, the time when the switching control line G corresponding to the n+1th driving electrode P transmits the active pulse overlaps with the time when the switching control line G corresponding to the N driving electrode P transmits the active pulse.
In this embodiment, the time of transmitting the effective pulse by the switch control signal line corresponding to the n+1th driving electrode P overlaps the time of transmitting the effective pulse by the switch control line G corresponding to the n+1th driving electrode P, and it can be understood that the first transistor T1 corresponding to the n+1th driving electrode P is turned on and the first signal is supplied to the n+1th driving electrode P during the period of supplying the first signal to the N driving electrode P. Since the switch control line G corresponding to the n+1th driving electrode P is connected to the N-th driving electrode P through the second capacitor C1', when the switch control line G is used to provide the high-level on signal to the first transistor T1 corresponding to the n+1th driving electrode P, the driving voltage originally applied to the N-th driving electrode P will be raised due to the coupling effect of the second capacitor C1', which corresponds to the value of the first driving voltage increasing the overlapping portion of the first stage and the third stage, so that the driving voltage of the region corresponding to the N-th driving electrode P to the droplet can be increased by the capacitive coupling without increasing the voltage value of the first signal provided to the N-th driving electrode P through the data line S.
Fig. 18 is a schematic diagram of a driving circuit corresponding to M driving electrodes P, and referring to fig. 3 and 18, in an alternative embodiment of the invention, in the first channel 21, the driving circuits corresponding to the first to M-1 driving electrodes P each include a first transistor T1, a first capacitor C1 and a second capacitor C1', and the driving circuit corresponding to the M driving electrode P includes a first transistor T1 and a first capacitor C1.
Specifically, when the first channel 21 includes M driving electrodes P, the driving circuits corresponding to the first driving electrode P to the M-1 th driving electrode P are each provided with a second capacitor C1 'for electrically connecting the switch control line G corresponding to the current driving electrode P with the previous driving electrode P, so that when the first signal is provided to the current driving electrode P, due to the coupling effect of the second capacitor C1', the driving signal value corresponding to the previous driving electrode P will be raised, and the driving voltage corresponding to the droplet will be raised, so that the driving capability of the driving electrode P other than the driving electrode P of the last stage on the droplet is advantageously raised.
It should be noted that, since the droplet has reached the edge of the driving region when moving to the last driving electrode P in the first channel 21, no further movement is required, and thus no additional signal is provided to the last driving electrode P in the first channel 21 to drive the droplet to move further, the driving circuit corresponding to the last driving electrode P in the first channel 21 does not need to add the second capacitor C1', which is beneficial to simplifying the structure of the driving circuit corresponding to the last driving electrode P.
With continued reference to fig. 17, in an alternative embodiment of the present invention, the driving layer 10 includes a first metal layer M1, a second metal layer M2, and an electrode layer T0, the second metal layer M2 is located between the first metal layer M1 and the electrode layer T0, and the second metal layer M2 is isolated from the first metal layer M1, and the second metal layer M2 is isolated from the electrode layer T0 by an insulating layer; the gate of the first transistor T1 is located in the first metal layer M1, the source and drain of the first transistor T1 and the common electrode 11 are located in the second metal layer M2, and the driving electrode P is located in the electrode layer T0.
Alternatively, the driving layer 10 is disposed on the first substrate 00, and the electrode layer T0 is located on a side of the second metal layer M2 facing away from the first substrate 00. That is, the film layer where the driving electrode P is located is disposed close to the droplet, so as to improve the driving capability of the driving voltage generated by the driving electrode P and the common electrode 11 to the droplet by reducing the distance between the driving electrode P and the droplet.
Alternatively, referring to fig. 17 and 18, the switch control line G in the driving layer 10 is located in the first metal layer M1, the data line is located in the second metal layer M2, and the common electrode 11 is also located in the second metal layer M2. In this way, when the switch control line G, the data line S and the first transistor T1 are introduced into the driving layer 10, the layout is realized only by providing two metal layers on the driving layer 10, so that the number of masks required for manufacturing the film layers is effectively reduced, and the process required for manufacturing the driving layer 10 is reduced, thereby being beneficial to simplifying the manufacturing process of the microfluidic device.
With continued reference to fig. 17, in an alternative embodiment of the present invention, the array layer further includes a first auxiliary conductive block K1 disposed on the first metal layer M1 and a second auxiliary conductive block K2 disposed on the second metal layer M2, where the first auxiliary conductive block K1 overlaps the common electrode 11 along the thickness direction of the microfluidic device to form a first capacitor C1, and the second auxiliary conductive block K2 overlaps the gate of the first transistor T1 in the driving circuit corresponding to the n+1th driving electrode P to form a second capacitor C1'; the nth driving electrode P is electrically connected to the first auxiliary conductive block K1 and the second auxiliary conductive block K2 through the connection holes, respectively.
Specifically, fig. 17 shows one relative positional relationship and connection relationship of the nth driving electrode Pn and the first transistor T1 corresponding to the nth driving electrode P and the first transistor T1 corresponding to the n+1th driving electrode P. Referring to fig. 17 and 18, the driving circuit corresponding to the driving electrode P, the switch control line G and the data line S are distributed in the film layer between the electrode layer T0 and the first substrate 00, and in this embodiment, a first auxiliary conductive block K1 is introduced into the first metal layer M1, and the first auxiliary conductive block K1 is used to overlap the common electrode 11 on the second metal layer M2 to form a first capacitor C1; and a second auxiliary conductive block K2 is introduced into the second metal layer M2, where the second auxiliary conductive block K2 is configured to overlap the gate of the first transistor T1 corresponding to the n+1th driving electrode P to form a second capacitor C1', that is, the second capacitor C1' is disposed between the switch control line G corresponding to the n+1th driving electrode P and the N driving electrode P, and when a high level signal is provided to the switch control line G corresponding to the n+1th driving electrode P to control the conduction of the corresponding first transistor T1, due to the coupling effect of the second capacitor C1', the potential on the N driving electrode P will also be increased, so that the driving capability of the region corresponding to the N driving electrode P on the droplet is enhanced. In this embodiment, the existing film structure in the driving layer 10 is used to form the first capacitor C1 and the second capacitor C1', and a new film structure is not required to be introduced into the driving layer 10, so that the driving capability on liquid drops is improved, and meanwhile, the manufacturing process of the driving layer 10 is simplified, and the production efficiency of the microfluidic device is improved.
Fig. 19 is a schematic structural diagram of a driving electrode P according to an embodiment of the present invention, and the driving electrode P is illustrated with an edge of the driving electrode P being wavy. Referring to fig. 4 and 19, in an alternative embodiment of the present invention, the driving electrodes P are identical in shape, and in the first channel 21, the first side B1 of the nth driving electrode P and the second side B2 of the n+1th driving electrode P are adjacent, and the widths of the first gaps between the first side B1 and the second side B2 are equal.
Fig. 4 to 9 and 19 respectively show two shapes of the driving electrode P, in which the driving electrode P is square in the embodiment shown in fig. 4 to 9, and four sides of the driving electrode P are all wavy in the embodiment shown in fig. 19, but the actual structure of the driving electrode P is not limited, and in some other embodiments of the invention, the driving electrode P may also be in other shapes, for example, the edge is saw-toothed, etc.
In this embodiment, the first side B1 of the nth driving electrode P and the second side B2 of the n+1th driving electrode P are adjacent to each other, and the widths of the intervals between the first side B1 and the second side B2 are equal everywhere, so, when the liquid drops reach the interval between the adjacent two driving electrodes P, the phenomenon that the liquid drops are obviously stressed unevenly due to the difference of the widths of the first gaps is avoided.
Referring to fig. 15 and 16, in an alternative embodiment of the present invention, the first transistor T1 in the driving circuit is an amorphous silicon thin film transistor or an oxide transistor. When the amorphous silicon thin film transistor or the oxide transistor is adopted, the grid electrode of the amorphous silicon thin film transistor is conducted when receiving a high-level signal, when a second capacitor C1 'is introduced between the N-th driving electrode P and the switch control line G corresponding to the N+1th driving electrode P, due to the coupling effect of the second capacitor C1', when providing the high-level signal for the switch control line G of the N+1th driving electrode P, the voltage signal on the N-th driving electrode P is also coupled and improved, thereby being beneficial to improving the driving capability of the N-th driving electrode P on liquid drops and reducing the driving power consumption.
In summary, the driving method of the microfluidic device and the microfluidic device provided by the invention at least realize the following beneficial effects:
according to the driving method of the microfluidic device and the microfluidic device provided by the embodiment of the invention, the driving layer and the microfluidic structure layer are arranged in the microfluidic device, wherein the microfluidic structure layer comprises at least one first channel, and the first channel is used for accommodating liquid drops. The driving layer includes a driving electrode and a common electrode disposed opposite to each other, and a driving voltage for driving movement of the droplet is formed between the driving electrode and the common electrode when an electric signal is supplied to the driving electrode and the common electrode. In the control method of the microfluidic device provided by the embodiment of the invention, after liquid drops are introduced into the first channel, the liquid drops are driven through three stages, in the first stage, first a first signal is provided for an N-th driving electrode overlapped with the liquid drops, and a constant signal is provided for a common electrode, so that a first driving voltage is formed, and the liquid drops are fixed right above the N-th driving electrode; in the second phase t2, the signal provided to the nth driving electrode is canceled, and the voltage between the nth driving electrode and the common electrode does not suddenly disappear, but gradually decreases to form a second driving voltage; in the third stage, a first signal is supplied to the n+1th driving electrode, a first driving voltage is formed between the n+1th driving electrode and the common electrode, and the third stage and the second stage t2 overlap, that is, the second driving voltage supplied to the droplet by the N-th driving electrode and the first driving voltage supplied to the droplet by the n+1th driving electrode coexist, at this time, the front portion (the portion adjacent to the n+1th driving electrode) of the droplet starts to move, the tail portion is not started, and at this time, the movement speed of the center of gravity of the droplet is faster. As the droplet moves a distance in the direction of the n+1th drive electrode, the tail of the droplet starts to move and creates a drag force on the front of the droplet, reducing the overall velocity of the droplet. When the tail part of the liquid drop catches up with the front part of the liquid drop, namely the speeds of the tail part and the front part are consistent, the speed of the liquid drop is accelerated under the driving voltage, the liquid drop moves towards the direction of the (n+1) th electrode, and the contact area of the liquid drop and the (n+1) th driving electrode is larger and larger. The first driving voltage fixes the droplet above the n+1th driving electrode when the center of gravity of the droplet coincides with the center of the n+1th driving electrode. In the second stage t2, even if the electric signal supplied to the nth driving electrode is removed, the second driving voltage between the nth driving electrode and the common electrode is maintained for a period of time to maintain the form of the droplet. When the first signal is applied to the (N+1) th driving electrode in the third stage, the liquid drop still has part of the second driving voltage at the position corresponding to the (N) th driving electrode, and the smaller second driving voltage at the position corresponding to the (N) th driving electrode can still drive the liquid drop to continuously move towards the (N+1) th driving electrode, so that the first signal with a larger voltage value is not required to be continuously provided for the (N) th driving electrode in the driving process of the liquid drop, and the driving power consumption is reduced while the normal movement of the liquid drop is ensured.
While certain specific embodiments of the invention have been described in detail by way of example, it will be appreciated by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.
Claims (7)
1. The driving method of the microfluidic device is characterized in that the microfluidic device comprises a first substrate, a driving layer and a microfluidic structure layer, wherein the driving layer is positioned between the first substrate and the microfluidic structure layer, the driving layer comprises a plurality of driving electrodes and a common electrode which is arranged opposite to the driving electrodes, the microfluidic structure layer comprises at least one first channel, and M driving electrodes which are sequentially arranged are arranged in the first channel;
the driving method includes:
introducing liquid drops into the first channel;
in a first stage, providing a first signal to an Nth driving electrode overlapped with the liquid drop, providing a constant signal to the common electrode, forming a first driving voltage between the driving electrode and the common electrode, and fixing the liquid drop right above the Nth driving electrode, wherein N is more than or equal to 1 and less than or equal to M;
In a second stage, canceling a first signal supplied to the nth driving electrode, forming a second driving voltage between the nth driving electrode and the common electrode, the absolute value of the second driving voltage being greater than 0 and less than the absolute value of the first driving voltage;
in a third stage, the first signal is provided to an n+1th driving electrode, and the first driving voltage is formed between the n+1th driving electrode and the common electrode;
wherein the second stage overlaps the third stage.
2. The driving method of a microfluidic device according to claim 1, wherein a start timing of the second stage coincides with a start timing of the third stage.
3. The driving method of a microfluidic device according to claim 1, wherein in the second stage, the second driving voltage is gradually reduced.
4. The driving method of a microfluidic device according to claim 1, wherein a first gap is included between the nth driving electrode and the n+1th driving electrode, the droplet overlaps with the nth driving electrode and the n+1th driving electrode, respectively, and a center of gravity of the droplet overlaps with the first gap or the center of gravity of the droplet overlaps with the n+1th driving electrode in the second stage.
5. The driving method of a microfluidic device according to claim 1, wherein the driving layer includes a plurality of switching control lines, a plurality of data lines, and a plurality of driving circuits corresponding to the driving electrodes, the driving circuits including a first transistor and a first capacitor; in the driving circuit corresponding to the nth driving electrode and the (n+1) th driving electrode, the grid electrode of the first transistor is respectively connected with different switch control lines, the first pole of the first transistor is connected with the same data line, the second pole of the first transistor is respectively connected with different driving electrodes, the driving electrodes are connected with the first pole of the first capacitor, and the second pole of the first capacitor receives a fixed voltage signal;
in the first stage, the switch control line corresponding to the nth driving electrode supplies an on signal to a first transistor corresponding to the nth driving electrode;
in the third stage, a switch control line corresponding to the (n+1) -th driving electrode supplies an on signal to a first transistor corresponding to the (n+1) -th driving electrode;
the first stage and the third stage do not overlap.
6. The driving method of the microfluidic device according to claim 1, wherein the driving layer includes a plurality of switching control lines, a plurality of data lines, and a plurality of driving circuits corresponding to the driving electrodes, the driving circuits including a first transistor, a first capacitor, and a second capacitor; in the driving circuit corresponding to the nth driving electrode and the (n+1) th driving electrode, the grid electrode of the first transistor is respectively connected with different switch control lines, the first pole of the first transistor is connected with the same data line, and the second pole of the different first transistor is respectively connected with different driving electrodes; the driving electrode is connected with a first pole of the first capacitor, and a second pole of the first capacitor receives a fixed voltage signal; the N driving electrode is electrically connected with the switch control line corresponding to the (n+1) th driving electrode through a second capacitor;
In the third stage, an on signal is supplied to the first transistor corresponding to the n+1th driving electrode through the switch control line, and the on signal is coupled to the nth driving electrode through the second capacitor.
7. The driving method of a microfluidic device according to claim 6, wherein in the first stage, the switching control line corresponding to the nth driving electrode supplies an on signal to the first transistor corresponding to the nth driving electrode;
the third phase overlaps the first phase, and a start time of the third phase is subsequent to a start time of the first phase.
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