CN115400807A - Driving method of microfluidic device and microfluidic device - Google Patents
Driving method of microfluidic device and microfluidic device Download PDFInfo
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Abstract
The invention discloses a driving method of a microfluidic device and the microfluidic device, and relates to the technical field of microfluidic control, wherein the driving method comprises the following steps: introducing liquid drops into the first channel; in the first stage, a first driving voltage is formed between the driving electrode and the common electrode, liquid drops are fixed right above an Nth driving electrode, and N is more than or equal to 1 and less than or equal to M; in the second stage, canceling a first signal provided for the Nth driving electrode, and forming a second driving voltage between the Nth driving electrode and the common electrode, wherein the absolute value of the second driving voltage is greater than 0 and smaller than that of the first driving voltage; in the third phase, providing a first signal to the (N + 1) th driving electrode, and forming a first driving voltage between the (N + 1) th driving electrode and the common electrode; wherein the second stage overlaps the third stage. And the smooth driving of liquid drops is ensured, and meanwhile, the driving power consumption is favorably reduced.
Description
Technical Field
The invention relates to the technical field of microfluidics, in particular to a driving method of a microfluidic device and microfluidics.
Background
The Micro-fluidic (Micro Fluidics) technology is a new interdisciplinary subject related to chemistry, fluid physics, microelectronics, new materials, biology and biomedical engineering, can accurately control the movement of liquid drops, realizes the operations of fusion, separation and the like of the liquid drops, completes various biochemical reactions, and is a technology which is mainly characterized by controlling the fluid in a micron-scale space. In recent years, the micro-fluidic chip is widely applied to the fields of biology, chemistry, medicine and the like by virtue of the advantages of small volume, low power consumption, low cost, less required samples and reagents, capability of realizing independent and accurate control of liquid drops, short detection time, high sensitivity, easiness in integration with other devices and the like.
In the prior art, the principle of electrowetting is commonly used to control the position of the flow of a liquid in a microfluidic device by setting at least one substrate voltage. At present, a common mode is to drive the liquid drops to flow by adopting a direct current driving mode, and in the liquid drop driving process, the driving power consumption is increased to a great extent by adopting continuous direct current voltage. At present, how to effectively reduce the power consumption of droplet driving becomes one of the technical problems to be solved urgently.
Disclosure of Invention
In view of this, the present invention provides a driving method of a microfluidic device and the microfluidic device, aiming to reduce driving power consumption while ensuring smooth driving of droplets.
In a first aspect, the present invention provides a driving method for a microfluidic device, where the microfluidic device includes a first substrate, a driving layer, and a microfluidic structure layer, the driving layer is located between the first substrate and the microfluidic structure layer, the driving layer includes a plurality of driving electrodes and a common electrode disposed opposite to the driving electrodes, the microfluidic structure layer includes at least one first channel, and the first channel includes M driving electrodes arranged in sequence;
the driving method includes:
introducing liquid drops into the first channel;
in the first stage, a first signal is provided for an Nth driving electrode overlapped with the liquid drop, a constant signal is provided for the common electrode, a first driving voltage is formed between the driving electrode and the common electrode, the liquid drop is fixed right above the Nth driving electrode, and N is more than or equal to 1 and less than or equal to M;
in a second stage, a first signal provided for the Nth driving electrode is cancelled, a second driving voltage is formed between the Nth driving electrode and the common electrode, and the absolute value of the second driving voltage is greater than 0 and smaller than that of the first driving voltage;
in a third phase, providing the first signal to an (N + 1) th driving electrode, and forming the first driving voltage between the (N + 1) th driving electrode and the common electrode;
wherein the second stage overlaps the third stage. .
In a second aspect, based on the same inventive concept, the present invention further provides a microfluidic device comprising: the micro-fluidic structure layer comprises at least one first channel, wherein the first channel comprises M driving electrodes which are sequentially arranged;
the driving layer also comprises a plurality of switch control lines, a plurality of data lines and a plurality of driving circuits corresponding to the driving electrodes; at least part of the driving circuit comprises a first transistor, a first capacitor and a second capacitor; in a driving circuit corresponding to an nth driving electrode and an (N + 1) th driving electrode in the same first channel, a gate of the first transistor is connected to different switch control lines, a first pole of the first transistor is connected to the same data line, and second poles of different first transistors are connected to different driving electrodes; the driving electrode is connected with a first pole of the first capacitor, and a second pole of the first capacitor receives a fixed voltage signal; the Nth driving electrode is electrically connected with the switch control line corresponding to the (N + 1) th driving electrode through a second capacitor, and N is more than or equal to 1 and less than M.
Compared with the related art, the driving method of the microfluidic device and the microfluidic device provided by the invention at least realize the following beneficial effects:
the microfluidic device provided by the embodiment of the invention is provided with the driving layer and the microfluidic structure layer, wherein the microfluidic structure layer comprises at least one first channel, and the first channel is used for accommodating liquid drops. The driving layer comprises a driving electrode and a common electrode which are oppositely arranged, and when an electric signal is supplied to the driving electrode and the common electrode, a driving voltage for driving the liquid drop to move is formed between the driving electrode and the common electrode. In the control method of the microfluidic device provided by the embodiment of the invention, after liquid drops are introduced into a first channel, the liquid drops are driven through three stages, in the first stage, a first signal is provided for an Nth driving electrode overlapped with the liquid drops, a constant signal is provided for a common electrode to form a first driving voltage, and the liquid drops are fixed right above the Nth driving electrode; in the second stage, the signal provided to the Nth driving electrode is cancelled, and the voltage between the Nth driving electrode and the common electrode does not disappear suddenly but is gradually reduced to form a second driving voltage; in the third phase, a first signal is provided to the (N + 1) th driving electrode, a first driving voltage is formed between the (N + 1) th driving electrode and the common electrode, and the third phase and the second phase overlap, that is, a second driving voltage provided by the (N) th driving electrode to the droplet and a first driving voltage provided by the (N + 1) th driving electrode to the droplet exist simultaneously, at this time, the front portion (the portion adjacent to the (N + 1) th driving electrode) of the droplet starts to move, and the tail portion does not start, at this time, the moving speed of the gravity center of the droplet is faster. And as the liquid drop moves for a distance towards the direction of the (N + 1) th driving electrode, the tail of the liquid drop starts to move, a dragging force is formed on the front of the liquid drop, and the overall speed of the liquid drop is reduced. When the tail of the droplet catches up with the front of the droplet, that is, the speeds of the droplet and the front of the droplet are the same, the droplet speed is accelerated under the driving voltage and moves towards the (N + 1) th electrode, and the contact area between the droplet and the (N + 1) th driving electrode is larger and larger. The first driving voltage fixes the droplet above the (N + 1) th driving electrode when the center of gravity of the droplet coincides with the center of the (N + 1) th driving electrode. In the second stage, even if the electric signal provided to the Nth driving electrode is removed, the second driving voltage between the Nth driving electrode and the common electrode can still be maintained for a period of time to maintain the form of the liquid drop. When the first signal is applied to the (N + 1) th driving electrode in the third stage, the droplet is still partially located on the (N) th driving electrode, and the small second driving voltage at the corresponding position of the (N) th driving electrode can still drive the droplet to continuously move towards the (N + 1) th driving electrode, so that the first signal with the large voltage value is not required to be continuously provided for the (N) th driving electrode in the driving process of the droplet, and the driving power consumption is favorably reduced while the normal movement of the droplet is ensured.
Of course, it is not necessary for any product in which the present invention is practiced to achieve all of the above-described technical effects simultaneously.
Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments thereof, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.
Fig. 1 is a flowchart illustrating a method of driving a microfluidic device according to an embodiment of the present invention;
fig. 2 is a timing chart illustrating a driving method of a microfluidic device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a microfluidic device according to an embodiment of the present invention;
FIG. 4 is a diagram showing a relative position of a droplet and a drive electrode in a first phase;
FIG. 5 is a diagram showing a relative position of the droplet and the driving electrode in the second stage;
FIG. 6 is a diagram showing a relative position of a droplet and a drive electrode in a third stage;
FIG. 7 is a diagram showing a relative position of a droplet and a drive electrode at a third stage;
FIG. 8 is a diagram showing a relative position of a droplet and a drive electrode in a third stage;
FIG. 9 is a diagram showing a relative position of a droplet and a drive electrode in a third stage;
fig. 10 is a timing chart illustrating a driving method of a microfluidic device according to an embodiment of the present invention;
FIG. 11 is a schematic diagram of the drive electrodes and the switch control and data lines connected thereto;
FIG. 12 is a schematic diagram illustrating a variation of driving signals generated by the Nth driving electrode and the common electrode;
fig. 13 is a schematic diagram of a driving circuit corresponding to the microfluidic driving device according to the present invention;
FIG. 14 is a driving timing diagram of the driving circuit of FIG. 13;
fig. 15 is a schematic diagram of a corresponding driving circuit of the microfluidic driving device according to the present invention;
FIG. 16 is a timing diagram of the driving circuit shown in FIG. 15;
FIG. 17 is a schematic diagram of a membrane layer of a driving layer in a microfluidic device;
FIG. 18 is a diagram of a driving circuit corresponding to M driving electrodes;
fig. 19 is a schematic structural diagram of a driving electrode according to an embodiment of the invention.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.
The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.
Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.
In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention cover the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents. It should be noted that the embodiments provided in the embodiments of the present invention can be combined with each other without contradiction.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
Fig. 1 is a flowchart illustrating a driving method of a microfluidic device according to an embodiment of the present invention, and fig. 2 is a driving timing diagram illustrating the driving method of the microfluidic device according to the embodiment of the present invention, where PN represents a driving voltage for a droplet at a position of an nth driving electrode P, PN +1 represents a driving voltage for a droplet at a position of an N +1 th driving electrode P, and PN +2 represents a driving voltage for a droplet at a position of an N +2 th driving electrode P. Fig. 3 is a schematic structural diagram of a microfluidic device according to an embodiment of the present invention, and referring to fig. 1 and fig. 3, a driving method of a microfluidic device according to an embodiment of the present invention includes a first substrate 00, a driving layer 10, and a microfluidic structure layer 20, where the driving layer 10 is located between the first substrate 00 and the microfluidic structure layer 20, the driving layer 10 includes a plurality of driving electrodes P and a common electrode 11 disposed opposite to the driving electrodes P, the microfluidic structure layer 20 includes at least one first channel 21, and the first channel 21 includes M driving electrodes P arranged in sequence;
the driving method comprises the following steps:
s101, introducing liquid drops 30 into the first channel 21;
s102, in a first stage t1, referring to FIGS. 2 and 4, a first signal is provided to the Nth driving electrode P overlapped with the droplet 30, a constant signal is provided to the common electrode 11, a first driving voltage V1 is formed between the driving electrode P and the common electrode 11, and the droplet is fixed right above the Nth driving electrode P, where N is greater than or equal to 1 and less than or equal to M, and FIG. 4 is a relative position relationship diagram of the droplet and the driving electrode P in the first stage.
S103, in a second stage t2, referring to fig. 2 and 5, the first signal provided to the nth driving electrode P is cancelled, a second driving voltage V2 is formed between the nth driving electrode P and the common electrode 11, an absolute value of the second driving voltage is greater than 0 and smaller than an absolute value of the first driving voltage, where fig. 5 is a relative position relationship diagram of the droplet and the driving electrode P in the second stage t 2; it should be noted that the cancellation of the first signal supplied to the nth driving electrode P in the present invention means that the electric signal is no longer supplied to the first driving electrode P. Optionally, the first signal is a dc voltage signal, and when the first signal provided to the nth driving electrode P is cancelled, that is, when the droplet has not completely left the position corresponding to the nth driving electrode P, the electrical signal provided to the nth driving electrode P is cancelled, and a continuous dc signal is not provided to the nth electrode.
S104, in a third stage t3, please refer to fig. 2, 5 to 9, a first signal is provided to the (N + 1) th driving electrode P, a first driving voltage is formed between the (N + 1) th driving electrode P and the common electrode 11, wherein the second stage t2 overlaps with the third stage, and fig. 6 to 9 respectively show a relative position relationship diagram of the droplet and the driving electrode P in the third stage.
It should be noted that fig. 2 illustrates only one structure of the microfluidic device, and does not represent the actual structure of the microfluidic device. Fig. 4 to 6 only illustrate the relative positional relationship between the driving electrode P and the droplet, and do not limit the actual shape and size of the driving electrode P and the droplet.
Specifically, referring to fig. 1 to 9, the microfluidic device provided in the embodiment of the present invention includes a first substrate 00, a driving layer 10 disposed on the first substrate 00, and a microfluidic structure layer 20 disposed on a side of the driving layer 10 away from the first substrate 00, where the microfluidic structure layer 20 includes at least one first channel 21, and optionally, a plurality of first channels 21, and the first channels 21 are used for accommodating droplets that can be driven to flow. The driving layer 10 includes a plurality of driving electrodes P and a common electrode 11 disposed opposite to the driving electrodes P, and an electric signal is supplied to the driving electrodes P and the common electrode 11 to form a driving voltage for driving the movement of the liquid droplets in the first channel 21.
In the control method of the microfluidic device provided in the embodiment of the present invention, after the droplet 30 is introduced into the first channel 21, the droplet 30 is driven through three stages, and in the first stage t1, referring to fig. 2 and 4, first, a first signal is provided to the nth driving electrode P overlapped with the droplet, and a constant signal is provided to the common electrode 11 to form a first driving voltage V1, and the droplet is fixed right above the nth driving electrode P; in the second stage t2, the signal provided to the nth driving electrode P is cancelled, and the voltage between the nth driving electrode P and the common electrode 11 does not suddenly disappear, but gradually decreases to form a second driving voltage V2; referring to fig. 2 and 5, in the third stage, a first signal is provided to the (N + 1) th driving electrode P, a first driving voltage V2 is formed between the (N + 1) th driving electrode P and the common electrode 11, and the third stage t3 overlaps with the second stage t2, that is, the second driving voltage provided by the (N + 1) th driving electrode P to the droplet and the first driving voltage provided by the (N + 1) th driving electrode P to the droplet exist at the same time, at this time, the front portion (the portion adjacent to the (N + 1) th driving electrode P) of the droplet starts to move, referring to fig. 5, the tail portion does not start, and at this time, the moving speed of the center of gravity of the droplet is faster. Referring to fig. 6, as the droplet moves a distance toward the (N + 1) th driving electrode P, the tail of the droplet starts to move, and a dragging force is formed on the front of the droplet, so that the overall velocity of the droplet is reduced. Referring to fig. 7 to 9, when the tail of the droplet catches up with the front of the droplet, i.e. the two speeds are the same, the droplet speed is increased under the driving voltage, and moves toward the (N + 1) th electrode, and the contact area between the droplet and the (N + 1) th driving electrode P is larger and larger. When the center of gravity of the droplet coincides with the center of the (N + 1) th driving electrode P, the first driving voltage fixes the droplet above the (N + 1) th driving electrode P. In the second phase t2, even if the electrical signal provided to the nth driving electrode P is removed, the second driving voltage between the nth driving electrode P and the common electrode 11 is maintained for a period of time to maintain the droplet shape. When the first signal is applied to the (N + 1) th driving electrode P in the third stage, the droplet is still partially located on the (N) th driving electrode P, and the small second driving voltage V2 at the position corresponding to the (N) th driving electrode P can still drive the droplet to continuously move towards the (N + 1) th driving electrode P, so that the first signal with the large voltage value is not required to be continuously provided to the (N) th driving electrode P in the driving process of the droplet, and the driving power consumption is favorably reduced while the normal movement of the droplet is ensured.
Fig. 10 is a driving timing chart of a driving method of a microfluidic device according to an embodiment of the present invention, in an alternative embodiment of the present invention, the start time of the second stage t2 coincides with the start time of the third stage t 3.
Specifically, in the second stage t2, the electric signal supplied to the nth driving electrode P is canceled, and in the third stage t3, the supply of the first signal to the (N + 1) th driving electrode P is started. When the starting time of the second stage t2 coincides with the starting time of the third stage t3, it means that the first signal is supplied to the N +1 th driving electrode P while the supply of the electric signal to the nth driving electrode P is cancelled. That is to say, although the first driving voltage is not provided to the liquid droplet by the nth driving electrode P, the first driving voltage is still provided to the liquid droplet by the (N + 1) th driving electrode P, which is beneficial to ensuring the continuity of the liquid droplet in the process of moving from the position corresponding to the nth driving electrode P to the position corresponding to the (N + 1) th driving electrode P, so that while the driving power consumption is reduced, the driving efficiency is also beneficial to being improved by the manner that the starting time of the second stage t2 coincides with the starting time of the third stage.
Fig. 11 is a schematic diagram of driving electrodes P and a switch control line G and a data line S connected to the driving electrodes P, where each driving electrode P is correspondingly connected to a first transistor T1, a gate of the first transistor T1 is connected to the switch control line G, a first pole is connected to the data line S, a second pole is connected to the driving electrode P, and when a signal on the switch control line G controls the first transistor T1 to be turned on, a signal on the data line S can be transmitted to the driving electrode P through the first transistor T1. In this embodiment, the first transistor T1 is taken as an N-type transistor for example, and is turned on at a high level and turned off at a low level, but the type of the first transistor T1 is not limited, and in some other embodiments of the present invention, the first transistor T1 may also be embodied as a P-type transistor, and the like, which is not specifically limited by the present invention. In an alternative embodiment of the invention, the second driving voltage is gradually decreased during the second period t 2.
Fig. 12 is a schematic diagram illustrating a variation of the driving signals generated by the nth driving electrode P and the common electrode 11, please refer to fig. 2, fig. 10, fig. 11 and fig. 12, in a first stage, when the first signal is provided to the nth driving electrode P through the data line S, the driving signal is a high level signal, and the corresponding voltage is a first driving voltage. In the second stage t2, when the first signal provided to the nth driving electrode P is cancelled, the driving signal applied to the droplet by the region corresponding to the nth driving electrode P does not disappear directly due to the characteristics of the driving circuit itself connected to the nth driving electrode P. In the process of driving the liquid drop to move, after the liquid drop is driven from the first driving electrode to the position of the last driving electrode in the first channel, optionally, when the liquid drop is driven next time, the polarity of the signal on the data line is reversed. In this process, a feedback voltage is generated, so that the driving voltage applied to the droplet drops by a certain value δ Vp from the first driving voltage, and even if the first signal is no longer applied to the nth driving electrode P, the position corresponding to the nth driving electrode P can still apply a smaller second driving voltage to the droplet. δ Vp = (Cgs + Cpg) (VGH-VGL)/(C1 + Cgs + Cpg), where C1, cgs, and Cpg are a storage capacitor in the driving circuit (capacitor C1 will be described in the following embodiments), a parasitic capacitor between a gate and a source of the first transistor T1, and a parasitic capacitor between the gate and the driving electrode P, respectively, VGH is an on-state voltage provided by the switch control line G to the first transistor T1, and VGL is an off-state voltage provided by the switch control line G to the first transistor T1. From the above formula, δ Vp has a strong correlation with Cgs and Cpg, and both parameters can be adjusted by structural design.
When the first signal is applied to the (N + 1) th driving electrode P, the droplet is still located at the nth driving electrode P, and if the driving voltage of the region corresponding to the nth driving electrode P disappears, the droplet may be deformed and locally changed, thereby reducing the moving speed of the droplet when the droplet crosses the gap between the two adjacent driving electrodes P. In the present application, after the second stage t2 cancels the first signal provided to the nth electrode, the above formula shows that the region corresponding to the nth electrode still generates the second driving voltage, so that the driving signals applied to the liquid droplet between the two adjacent driving electrodes P can be connected. After the driving liquid drop moves, the first signal provided to the Nth driving electrode P is cancelled, so that the driving voltage applied to the liquid drop at the position of the Nth driving electrode P is gradually reduced, the liquid drop can still be driven to move, the driving power consumption can be effectively reduced, and the energy efficiency is improved.
With continued reference to fig. 6 to 7, in an alternative embodiment of the present invention, the nth and N +1 th drive electrodes P and P include a first gap therebetween, and in the second phase t2, the droplet overlaps the nth and N +1 th drive electrodes P and P, respectively, and the gravity center of the droplet overlaps the first gap, or the gravity center of the droplet overlaps the N +1 th drive electrode P.
Specifically, when the droplet moves from the nth electrode to the (N + 1) th electrode, and the center of gravity of the droplet crosses the gap between two adjacent driving electrodes P, the driving force at the tail of the droplet starts moving backward, i.e., the droplet does not move forward, and the droplet starts decelerating. At this time, the driving voltage of the region corresponding to the nth driving electrode P does not greatly affect the moving speed of the droplet, and therefore, when the time point at which the center of gravity of the droplet overlaps the first gap or the time point at which the center of gravity of the droplet overlaps the (N + 1) th driving electrode P is used as the start time point of the second stage t2, even if the first signal supplied to the nth driving electrode P is canceled, the low second driving voltage generated at the position of the nth driving electrode P does not affect the moving speed of the droplet. On the contrary, if the second phase t2 still provides the first signal (e.g., the dc voltage) to the nth driving electrode P, the power consumption is wasted. Therefore, the invention cancels the first signal provided to the Nth driving electrode P at the moment when the center of the liquid drop is overlapped with the first gap or the N +1 th driving electrode P, thereby ensuring the normal movement of the liquid drop and being beneficial to reducing the driving power consumption.
Fig. 13 is a schematic diagram of a driving circuit corresponding to the microfluidic driving device in the present invention, and fig. 14 is a driving timing diagram corresponding to the driving circuit in fig. 13, in which PN represents a driving voltage applied to a droplet by a position of an nth driving electrode P, PN +1 represents a driving voltage applied to a droplet by a position of an N +1 th driving electrode P, GN represents a signal on a switch control line G corresponding to a first transistor T1 connected to the nth driving electrode P, and GN +1 represents a signal on a switch control line G corresponding to a first transistor T1 connected to the N +1 th driving electrode P. In this embodiment, only the connection relationship between the driving circuits corresponding to two consecutive driving electrodes P is shown, and the actually included driving circuits are not illustrated, and optionally, one driving circuit is correspondingly disposed for each driving electrode P.
Referring to fig. 13 and 14, in an alternative embodiment of the present invention, the driving layer 10 includes a plurality of switch control lines G, a plurality of data lines S, and a plurality of driving circuits corresponding to the driving electrodes P, and the driving circuits include a first transistor T1 and a first capacitor C1; in the driving circuit corresponding to the nth driving electrode P and the (N + 1) th driving electrode P, the gate of the first transistor T1 is connected to different switch control lines G, the first pole of the first transistor T1 is connected to the same data line S, the second pole of the first transistor T1 is connected to different driving electrodes P, the driving electrode P is connected to the first pole of the first capacitor C1, and the second pole of the first capacitor C1 receives a fixed voltage signal;
in the first stage T1, the switch control line G corresponding to the nth driving electrode P provides a turn-on signal to the first transistor T1 corresponding to the nth driving electrode P;
in the third stage T3, the switch control line G corresponding to the (N + 1) th driving electrode P provides a turn-on signal to the first transistor T1 corresponding to the (N + 1) th driving electrode P;
the first and third stages t1 and t3 do not overlap.
Optionally, the driving electrodes P in the same column are connected to the same data line S, and the first transistor T1 is an N-type transistor in this embodiment, but the type of the first transistor T1 is not limited. Taking the nth driving electrode P and the (N + 1) th driving electrode P adjacent to each other as an example, the first stage and the third stage do not overlap, that is, when the first signal is provided to the nth driving electrode P in the first stage and the first driving voltage for driving the droplet is generated, the first signal is not provided to the (N + 1) th driving electrode P, and the providing of the first signal to the (N + 1) th driving electrode P is performed after the providing of the first signal to the nth driving electrode P is cancelled. Therefore, the total time for providing the first signal to the driving electrode P in the droplet driving process is reduced, that is, the time for providing the direct-current voltage to the driving electrode P is reduced.
Fig. 15 is a schematic diagram of a driving circuit corresponding to the microfluidic driving device of the present invention, and fig. 16 is a driving timing diagram corresponding to the driving circuit of fig. 15, in which a second capacitor C1' is introduced into a portion of the driving circuit, compared with the embodiment shown in fig. 13.
In an alternative embodiment of the present invention, the driving layer 10 includes a plurality of switch control lines G, a plurality of data lines S, and a plurality of driving circuits corresponding to the driving electrodes P, and the driving circuits include a first transistor T1, a first capacitor C1, and a second capacitor C1'; in the driving circuit corresponding to the nth driving electrode P and the (N + 1) th driving electrode P, the gate of the first transistor T1 is connected to different switch control lines G, the first pole of the first transistor T1 is connected to the same data line S, and the second poles of different first transistors T1 are connected to different driving electrodes P; the driving electrode P is connected with a first pole of a first capacitor C1, and a second pole of the first capacitor C1 receives a fixed voltage signal; the Nth driving electrode P is electrically connected with the switch control line G corresponding to the (N + 1) th driving electrode P through a second capacitor C1'; in the third stage, the turn-on signal is provided to the first transistor T1 corresponding to the (N + 1) th driving electrode P through the switch control line G, and the turn-on signal is coupled to the nth driving electrode P through the second capacitor C1'.
Specifically, the present embodiment provides another driving circuit for driving the driving electrode P in the microfluidic device, and compared with the embodiment shown in fig. 13 and 14, a second capacitor C1' is introduced between the nth driving electrode P and the switching control line G corresponding to the (N + 1) th driving electrode P. In the third stage, after the switch control line G provides the turn-on signal to the first transistor T1 corresponding to the (N + 1) th driving electrode P, because the switch control line G corresponding to the (N + 1) th driving electrode P is connected to the nth driving electrode P through the second capacitor C1', when the signal on the switch control line G becomes a high-level signal, due to the coupling effect of the capacitors, the voltage on the nth driving electrode P will rise accordingly, thereby facilitating to promote the driving voltage at the position corresponding to the nth driving electrode P, and thus facilitating to promote the driving efficiency of the liquid droplet.
Referring to fig. 15 and 16, in an alternative embodiment of the present invention, in the first phase T1, the switch control line G corresponding to the nth driving electrode P provides a turn-on signal to the first transistor T1 corresponding to the nth driving electrode P; the third stage t3 overlaps the first stage t1, and the start time of the third stage t3 is after the start time of the first stage t 1.
With continued reference to fig. 15 and 16, the first stage T1 is a stage of providing the first signal to the nth driving electrode P, and the third stage T3 is a stage of providing the first signal to the (N + 1) th driving electrode P, in this embodiment, the third stage T3 overlaps with the first stage T1, and the starting time of the third stage T3 is after the starting time of the first stage T1, it can be understood that, during the period of providing the first signal to the nth driving electrode P, the first transistor T1 corresponding to the (N + 1) th driving electrode P is turned on, and the first signal is provided to the (N + 1) th driving electrode P. Because the switch control line G corresponding to the (N + 1) th driving electrode P is connected to the nth driving electrode P through the second capacitor C1', when a high-level turn-on signal is provided to the first transistor T1 corresponding to the (N + 1) th driving electrode P through the switch control line G, due to the coupling effect of the second capacitor C1', the driving voltage originally applied to the nth driving electrode P will be raised, which is equivalent to increasing the value of the first driving voltage of the portion overlapped with the third stage T3 in the first stage T1, so that the driving voltage of the region corresponding to the nth driving electrode P to the droplet can be increased through a capacitive coupling mode without increasing the voltage value of the first signal provided to the nth driving electrode P through the data line S, and thus, while being beneficial to improving the driving efficiency of the droplet, the overall driving power consumption is also facilitated to be reduced.
Based on the same inventive concept, the present invention further provides a microfluidic device, for example, please refer to fig. 3 and fig. 17, fig. 17 is a schematic diagram of a membrane layer of a driving layer 10 in the microfluidic device, the microfluidic device includes: the micro-fluidic chip comprises a first substrate 00, a driving layer 10 and a micro-fluidic structure layer 20, wherein the driving layer 10 is positioned between the first substrate 00 and the micro-fluidic structure layer 20, the driving layer 10 comprises a plurality of driving electrodes P and a common electrode 11 arranged opposite to the driving electrodes P, the micro-fluidic structure layer 20 comprises at least one first channel 21, and the first channel 21 comprises M driving electrodes P arranged in sequence;
referring to fig. 15, the driving layer 10 further includes a plurality of switch control lines G, a plurality of data lines S, and a plurality of driving circuits corresponding to the driving electrodes P; at least part of the driving circuit comprises a first transistor T1, a first capacitor C1 and a second capacitor C1'; in the same first channel 21, in the driving circuits corresponding to the nth driving electrode P and the (N + 1) th driving electrode P, the gates of the first transistors T1 are respectively connected to different switch control lines G, the first poles of the first transistors T1 are connected to the same data line S, and the second poles of the different first transistors T1 are respectively connected to different driving electrodes P; the driving electrode P is connected with a first pole of a first capacitor C1, and a second pole of the first capacitor C1 receives a fixed voltage signal; the Nth driving electrode P is electrically connected with the switch control line G corresponding to the (N + 1) th driving electrode P through a second capacitor C1', and N is more than or equal to 1 and less than M.
Specifically, the microfluidic device provided by the embodiment of the present invention includes a first substrate 00 disposed opposite to each other, a driving layer 10 disposed on the first substrate 00, and a microfluidic structure layer 20 disposed on a side of the driving layer 10 facing away from the first substrate 00, where the microfluidic structure layer 20 includes at least one first channel 21 and, optionally, a plurality of first channels 21, and the first channels 21 are used for accommodating droplets that can be driven to flow. The driving layer 10 includes a plurality of driving electrodes P and a common electrode 11 disposed opposite to the driving electrodes P, and an electrical signal is provided to the driving electrodes P and the common electrode 11 to form a driving voltage for driving the liquid drop movement in the first channel 21, alternatively, the signal provided to the common electrode 11 is a constant voltage signal, and when other signals which are different from the constant voltage signal are provided to the driving electrodes P, a driving voltage for driving the liquid drop movement is formed between the driving electrodes P and the common electrode 11.
The driving layer 10 is provided with a switch control line G, a data line S and a driving circuit, wherein the driving circuit includes a first transistor T1, a first capacitor C1 and a second capacitor C1', and the nth driving electrode P is connected to the switch control line G corresponding to the (N + 1) th driving electrode P through the second capacitor C1'. In the third stage, after the switch control line G provides the turn-on signal to the first transistor T1 corresponding to the (N + 1) th driving electrode P, because the switch control line G corresponding to the (N + 1) th driving electrode P is connected to the nth driving electrode P through the second capacitor C1', when the signal on the switch control line G becomes a high-level signal, due to the coupling effect of the second capacitor C1', the voltage on the nth driving electrode P will also rise accordingly, for example, refer to fig. 16, which is favorable for promoting the driving voltage at the position corresponding to the nth driving electrode P, and thus is favorable for promoting the driving efficiency of the liquid droplet.
Referring to fig. 15 and 16, in an alternative embodiment of the present invention, the time when the switch control line G corresponding to the (N + 1) th driving electrode P sends the effective pulse overlaps with the time when the switch control line G corresponding to the nth driving electrode P sends the effective pulse.
In this embodiment, the time when the switch control signal line corresponding to the (N + 1) th driving electrode P transmits the effective pulse overlaps with the time when the switch control signal line G corresponding to the nth driving electrode P transmits the effective pulse, and it can be understood that, during the period of supplying the first signal to the nth driving electrode P, the first transistor T1 corresponding to the (N + 1) th driving electrode P is turned on, and the first signal is supplied to the (N + 1) th driving electrode P. Because the switch control line G corresponding to the (N + 1) th driving electrode P is connected to the nth driving electrode P through the second capacitor C1', when a high-level turn-on signal is provided to the first transistor T1 corresponding to the (N + 1) th driving electrode P through the switch control line G, due to the coupling effect of the second capacitor C1', the driving voltage originally applied to the nth driving electrode P will be raised, which is equivalent to increasing the value of the first driving voltage of the portion overlapped with the third stage in the first stage, so that the driving voltage of the region corresponding to the nth driving electrode P to the liquid droplet can be increased through a capacitive coupling mode without increasing the voltage value of the first signal provided to the nth driving electrode P through the data line S, and thus, while being beneficial to improving the driving efficiency of the liquid droplet, the overall driving power consumption is also beneficially reduced.
Fig. 18 is a schematic diagram of driving circuits corresponding to M driving electrodes P, please refer to fig. 3 and 18, in an alternative embodiment of the present invention, in the first channel 21, the driving circuits corresponding to the first to M-1 driving electrodes P each include a first transistor T1, a first capacitor C1 and a second capacitor C1', and the driving circuit corresponding to the M driving electrode P includes a first transistor T1 and a first capacitor C1.
Specifically, when the first channel 21 includes M driving electrodes P, the driving circuits corresponding to the M-1 th driving electrode P from the first driving electrode P are all provided with a second capacitor C1 'for electrically connecting the switch control line G corresponding to the current driving electrode P with the previous driving electrode P, so that when the first signal is provided to the current driving electrode P, due to the coupling effect of the second capacitor C1', the driving signal value corresponding to the previous driving electrode P will be raised, and the driving voltage applied to the droplet will also be raised, thereby being beneficial to improving the driving capability of the driving electrodes P except for the driving electrode P at the last stage to the droplet, and being beneficial to reducing the power consumption while improving the overall driving capability of the droplet because the voltage value of the first signal provided to the driving electrode P through the data line S does not need to be raised.
It should be noted that, since the droplet has reached the edge of the driving region when moving to the last driving electrode P in the first channel 21, and does not need to move further, it is not necessary to additionally provide an additional signal to the last driving electrode P in the first channel 21 to drive the droplet to move further, so that the driving circuit corresponding to the last driving electrode P in the first channel 21 does not need to add the second capacitor C1', which is beneficial to simplify the structure of the driving circuit corresponding to the last driving electrode P.
With continued reference to fig. 17, in an alternative embodiment of the present invention, the driving layer 10 includes a first metal layer M1, a second metal layer M2 and an electrode layer T0, the second metal layer M2 is located between the first metal layer M1 and the electrode layer T0, and the second metal layer M2 and the first metal layer M1, and the second metal layer M2 and the electrode layer T0 are isolated by insulating layers; the gate of the first transistor T1 is located in the first metal layer M1, the source and drain of the first transistor T1 and the common electrode 11 are located in the second metal layer M2, and the driving electrode P is located in the electrode layer T0.
Optionally, the driving layer 10 is disposed on the first substrate 00, and the electrode layer T0 is located on a side of the second metal layer M2 away from the first substrate 00. That is, the film layer where the driving electrode P is located is disposed close to the liquid drop, and the driving capability of the liquid drop by the driving voltage generated by the driving electrode P and the common electrode 11 is improved by reducing the distance between the driving electrode P and the liquid drop.
Alternatively, referring to fig. 17 and fig. 18, the switch control line G in the driving layer 10 is located in the first metal layer M1, the data line is located in the second metal layer M2, and the common electrode 11 is also located in the second metal layer M2. Therefore, when the switch control line G, the data line S and the first transistor T1 are introduced into the driving layer 10, the layout is realized by only arranging two metal layers on the driving layer 10, so that the number of masks required for manufacturing the film layers is effectively reduced, the procedures required for manufacturing the driving layer 10 are reduced, and the manufacturing process of the microfluidic device is facilitated to be simplified.
With continued reference to fig. 17, in an alternative embodiment of the present invention, the array layer further includes a first auxiliary conductive block K1 disposed on the first metal layer M1 and a second auxiliary conductive block K2 disposed on the second metal layer M2, in the thickness direction of the microfluidic device, the first auxiliary conductive block K1 overlaps the common electrode 11 to form a first capacitor C1, and the second auxiliary conductive block K2 overlaps the gate of the first transistor T1 in the driving circuit corresponding to the (N + 1) th driving electrode P to form a second capacitor C1'; the nth driving electrode P is electrically connected to the first auxiliary conductive block K1 and the second auxiliary conductive block K2 through the connection holes, respectively.
Specifically, fig. 17 shows a relative positional relationship and a connection relationship between the nth driving electrode Pn and the first transistor T1 corresponding to the nth driving electrode P and the first transistor T1 corresponding to the (N + 1) th driving electrode P. Referring to fig. 17 and 18, a driving circuit corresponding to the driving electrode P, a switch control line G and a data line S are distributed in a film layer between the electrode layer T0 and the first substrate 00, in this embodiment, a first auxiliary conductive block K1 is introduced into the first metal layer M1, and the first auxiliary conductive block K1 is overlapped with the common electrode 11 on the second metal layer M2 to form a first capacitor C1; and a second auxiliary conductive block K2 is introduced into the second metal layer M2, where the second auxiliary conductive block K2 is used to overlap with the gate of the first transistor T1 corresponding to the (N + 1) th driving electrode P to form a second capacitor C1', that is, the second capacitor C1' is disposed between the switch control line G corresponding to the (N + 1) th driving electrode P and the nth driving electrode P, and when a high-level signal is provided to the switch control line G corresponding to the (N + 1) th driving electrode P to control the conduction of the corresponding first transistor T1, due to the coupling effect of the second capacitor C1', the potential on the nth driving electrode P will be increased accordingly, thereby facilitating to enhance the driving capability of the region corresponding to the nth driving electrode P for liquid droplets. In this embodiment, the first capacitor C1 and the second capacitor C1' are formed by using the existing film layer structure in the driving layer 10, and a new film layer structure is not required to be introduced into the driving layer 10, so that the driving capability of the droplet is improved, the manufacturing process of the driving layer 10 is simplified, and the production efficiency of the microfluidic device is improved.
Fig. 19 is a schematic structural diagram of a driving electrode P according to an embodiment of the present invention, and the embodiment takes the driving electrode P with a wavy edge as an example for description. Referring to fig. 4 and 19, in an alternative embodiment of the present invention, the driving electrodes P have the same shape, and in the first channel 21, the first side B1 of the nth driving electrode P and the second side B2 of the (N + 1) th driving electrode P are adjacent to each other, and the width of the first gap between the first side B1 and the second side B2 is equal everywhere.
Fig. 4 to 9 and 19 respectively show two shapes of the driving electrode P, the driving electrode P in the embodiment shown in fig. 4 to 9 is square, and in the embodiment shown in fig. 19, four sides of the driving electrode P are all wavy, but the actual structure of the driving electrode P is not limited, and in some other embodiments of the invention, the driving electrode P may also be embodied in other shapes, for example, the edge is zigzag, and the like.
In the embodiment, in two adjacent driving electrodes P, the first edge B1 of the nth driving electrode P is adjacent to the second edge B2 of the (N + 1) th driving electrode P, and the width of the interval between the first edge B1 and the second edge B2 is equal everywhere, so that when a droplet reaches the interval between two adjacent driving electrodes P, it is beneficial to avoid the phenomenon that the droplet is stressed unevenly obviously due to the difference in width of the first gap.
Referring to fig. 15 and fig. 16, in an alternative embodiment of the present invention, the first transistor T1 in the driving circuit is an amorphous silicon thin film transistor or an oxide transistor. When adopting amorphous silicon thin film transistor or oxide transistor, its grid switches on when receiving the high level signal, when introducing second electric capacity C1 'between the switch control line G that nth drive electrode P and N +1 drive electrode P correspond, because the coupling effect of second electric capacity C1', when providing the high level signal to the switch control line G of N +1 drive electrode P, the voltage signal on the nth drive electrode P will also be improved by the coupling, thereby be favorable to promoting the driving ability of nth drive electrode P to the liquid droplet, and also be favorable to reducing the drive power consumption.
In summary, the driving method of the microfluidic device and the microfluidic device provided by the invention at least achieve the following beneficial effects:
the micro-fluidic device provided by the embodiment of the invention comprises a driving layer and a micro-fluidic structure layer, wherein the micro-fluidic structure layer comprises at least one first channel, and the first channel is used for accommodating liquid drops. The driving layer comprises a driving electrode and a common electrode which are oppositely arranged, and when electric signals are supplied to the driving electrode and the common electrode, a driving voltage for driving liquid drops to move is formed between the driving electrode and the common electrode. In the control method of the microfluidic device provided by the embodiment of the invention, after the liquid drop is introduced into the first channel, the liquid drop is driven through three stages, in the first stage, a first signal is provided for an Nth driving electrode overlapped with the liquid drop, a constant signal is provided for a common electrode to form a first driving voltage, and the liquid drop is fixed right above the Nth driving electrode; in the second stage t2, the signal provided to the Nth driving electrode is cancelled, and the voltage between the Nth driving electrode and the common electrode does not disappear suddenly but is gradually reduced to form a second driving voltage; in the third phase, a first signal is provided to the (N + 1) th driving electrode, a first driving voltage is formed between the (N + 1) th driving electrode and the common electrode, and the third phase and the second phase t2 overlap, that is, a second driving voltage provided by the (N) th driving electrode to the droplet and a first driving voltage provided by the (N + 1) th driving electrode to the droplet exist simultaneously, at this time, the front portion (the portion adjacent to the (N + 1) th driving electrode) of the droplet starts to move, and the tail portion does not start, at this time, the moving speed of the gravity center of the droplet is faster. And as the liquid drop moves for a distance towards the direction of the (N + 1) th driving electrode, the tail of the liquid drop starts to move, a dragging force is formed on the front of the liquid drop, and the overall speed of the liquid drop is reduced. When the tail of the liquid drop catches up with the front of the liquid drop, namely the speed of the liquid drop is consistent with that of the front of the liquid drop, the speed of the liquid drop is accelerated under the driving voltage and moves towards the direction of the (N + 1) th electrode, and the contact area between the liquid drop and the (N + 1) th driving electrode is larger and larger. The first driving voltage fixes the droplet above the (N + 1) th driving electrode when the center of gravity of the droplet coincides with the center of the (N + 1) th driving electrode. In the second phase t2, even if the electrical signal provided to the nth driving electrode is removed, the second driving voltage between the nth driving electrode and the common electrode is maintained for a period of time to maintain the droplet shape. When the first signal is applied to the (N + 1) th driving electrode in the third stage, the droplet is still partially located on the (N) th driving electrode, and the small second driving voltage at the corresponding position of the (N) th driving electrode can still drive the droplet to continuously move towards the (N + 1) th driving electrode, so that the first signal with the large voltage value is not required to be continuously provided for the (N) th driving electrode in the driving process of the droplet, and the driving power consumption is favorably reduced while the normal movement of the droplet is ensured.
Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.
Claims (14)
1. The driving method of the microfluidic device is characterized in that the microfluidic device comprises a first substrate, a driving layer and a microfluidic structure layer, wherein the driving layer is positioned between the first substrate and the microfluidic structure layer, the driving layer comprises a plurality of driving electrodes and a common electrode arranged opposite to the driving electrodes, the microfluidic structure layer comprises at least one first channel, and the first channel comprises M driving electrodes arranged in sequence;
the driving method includes:
introducing liquid drops into the first channel;
in the first stage, a first signal is provided for an Nth driving electrode overlapped with the liquid drop, a constant signal is provided for the common electrode, a first driving voltage is formed between the driving electrode and the common electrode, the liquid drop is fixed right above the Nth driving electrode, and N is more than or equal to 1 and less than or equal to M;
in a second stage, a first signal provided for the Nth driving electrode is cancelled, a second driving voltage is formed between the Nth driving electrode and the common electrode, and the absolute value of the second driving voltage is greater than 0 and smaller than that of the first driving voltage;
in a third phase, providing the first signal to an (N + 1) th driving electrode, and forming the first driving voltage between the (N + 1) th driving electrode and the common electrode;
wherein the second stage overlaps with the third stage.
2. The method for driving a microfluidic device according to claim 1, wherein a start time of the second stage coincides with a start time of the third stage.
3. The method of driving the microfluidic device according to claim 1, wherein the second driving voltage is gradually decreased in the second stage.
4. The driving method of a microfluidic device according to claim 1, wherein a first gap is included between the nth driving electrode and the (N + 1) th driving electrode, and in the second phase, the droplet overlaps with the nth driving electrode and the (N + 1) th driving electrode, respectively, and a center of gravity of the droplet overlaps with the first gap, or the center of gravity of the droplet overlaps with the (N + 1) th driving electrode.
5. The driving method of a microfluidic device according to claim 1, wherein the driving layer includes a plurality of switching control lines, a plurality of data lines, and a plurality of driving circuits corresponding to the driving electrodes, the driving circuits including a first transistor and a first capacitor; in the driving circuit corresponding to the nth driving electrode and the (N + 1) th driving electrode, the gate of the first transistor is connected to different switch control lines, the first electrode of the first transistor is connected to the same data line, the second electrode of the first transistor is connected to different driving electrodes, the driving electrodes are connected to the first electrode of the first capacitor, and the second electrode of the first capacitor receives a fixed voltage signal;
in the first phase, the switch control line corresponding to the Nth driving electrode provides a turn-on signal to the first transistor corresponding to the Nth driving electrode;
in the third phase, the switch control line corresponding to the (N + 1) th driving electrode provides a turn-on signal to the first transistor corresponding to the (N + 1) th driving electrode;
the first and third stages do not overlap.
6. The driving method of a microfluidic device according to claim 1, wherein the driving layer includes a plurality of switching control lines, a plurality of data lines, and a plurality of driving circuits corresponding to the driving electrodes, the driving circuits including a first transistor, a first capacitor, and a second capacitor; in the driving circuit corresponding to the nth driving electrode and the (N + 1) th driving electrode, the gate of the first transistor is connected to different switch control lines, the first electrode of the first transistor is connected to the same data line, and the second electrodes of different first transistors are connected to different driving electrodes; the driving electrode is connected with a first pole of the first capacitor, and a second pole of the first capacitor receives a fixed voltage signal; the Nth driving electrode is electrically connected with the switch control line corresponding to the (N + 1) th driving electrode through a second capacitor;
in the third stage, a switch control line is used for providing a starting signal to a first transistor corresponding to the (N + 1) th driving electrode, and the starting signal is coupled to the Nth driving electrode through the second capacitor.
7. The driving method of a micro-fluidic device according to claim 6, wherein, in the first stage, the switch control line corresponding to the nth driving electrode provides an on signal to the first transistor corresponding to the nth driving electrode;
the third stage overlaps the first stage, and a start time of the third stage is subsequent to a start time of the first stage.
8. A microfluidic device, comprising: the micro-fluidic structure layer comprises at least one first channel, wherein the first channel comprises M driving electrodes which are sequentially arranged;
the driving layer also comprises a plurality of switch control lines, a plurality of data lines and a plurality of driving circuits corresponding to the driving electrodes; at least part of the driving circuit comprises a first transistor, a first capacitor and a second capacitor; in a driving circuit corresponding to an nth driving electrode and an (N + 1) th driving electrode in the same first channel, a gate of the first transistor is connected to different switch control lines, a first pole of the first transistor is connected to the same data line, and second poles of different first transistors are connected to different driving electrodes; the driving electrode is connected with a first pole of the first capacitor, and a second pole of the first capacitor receives a fixed voltage signal; the Nth driving electrode is electrically connected with the switch control line corresponding to the (N + 1) th driving electrode through a second capacitor, and N is more than or equal to 1 and is less than M.
9. The microfluidic device according to claim 8, wherein the time for the switch control signal line corresponding to the N +1 th driving electrode to transmit the effective pulse overlaps with the time for the switch control signal line corresponding to the nth driving electrode to transmit the effective pulse.
10. The microfluidic device according to claim 8, wherein the driving circuits corresponding to the first to M-1 th driving electrodes in the first channel each include the first transistor, the first capacitor and the second capacitor, and the driving circuits corresponding to the Mth driving electrode include the first transistor and the first capacitor.
11. The microfluidic device according to claim 8, wherein the driving layer comprises a first metal layer, a second metal layer and an electrode layer, the second metal layer is located between the first metal layer and the electrode layer, and the second metal layer and the first metal layer and the second metal layer and the electrode layer are isolated by insulating layers; the grid electrode of the first transistor is located on the first metal layer, the source electrode, the drain electrode and the common electrode of the first transistor are located on the second metal layer, and the driving electrode is located on the electrode layer.
12. The microfluidic device according to claim 11, further comprising a first auxiliary conductive block disposed on the first metal layer and a second auxiliary conductive block disposed on the second metal layer, wherein the first auxiliary conductive block overlaps the common electrode to form the first capacitor, and the second auxiliary conductive block overlaps the gate of the first transistor in the driving circuit corresponding to the (N + 1) th driving electrode to form the second capacitor; the Nth driving electrode is electrically connected with the first auxiliary conductive block and the second auxiliary conductive block through the connecting hole respectively.
13. The microfluidic device according to claim 8, wherein the driving electrodes are identical in shape, and a first side of an nth driving electrode and a second side of an N +1 th driving electrode are adjacent in the first channel, and a width of a first gap between the first side and the second side is equal everywhere.
14. The microfluidic device according to claim 8, wherein the first transistor is an amorphous silicon thin film transistor or an oxide transistor.
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