CN115389081B - Decoupling-free micro-space force accurate measurement device and method based on double-degree-of-freedom air floatation guide rail and air floatation bearing - Google Patents
Decoupling-free micro-space force accurate measurement device and method based on double-degree-of-freedom air floatation guide rail and air floatation bearing Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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Abstract
The invention belongs to the field of force value measurement, and particularly relates to a decoupling-free micro-space force accurate measurement device and a decoupling-free micro-space force accurate measurement method based on a double-degree-of-freedom air floatation guide rail and an air floatation bearing. The device uses two degrees of freedom air supporting guide rail and air supporting bearing to measure little space force, the air supporting guide rail comprises guide rail and slider, and the air supporting bearing comprises the rotor in center and the stator of outer lane. The air-float guide rail is filled with high-pressure gas into gaps between four surfaces of the guide rail and the sliding block by the quick connector, so that a uniform gas film with extremely high bearing capacity can be formed in the gaps, and the guide rail and the sliding block can be regarded as non-contact assembly under gas lubrication, and the air-float bearing is the same. Therefore, the force measuring method of air floatation can lead the internal resistance to be extremely low and approximately zero, and the provided measuring environment is very favorable for realizing high-resolution measurement of force. In the measuring process, the air film in the air floatation guide rail and the air film in the air floatation bearing can isolate vibration to a certain extent, and the accuracy of the measuring device is improved.
Description
Technical Field
The invention belongs to the field of force value measurement, and particularly relates to a decoupling-free micro-space force accurate measurement device based on a double-degree-of-freedom air floatation guide rail and an air floatation bearing.
Background
Spatial forces refer to forces directed in any direction in three dimensions and can be resolved into three orthogonal directions. The accurate measurement of the size and the direction of the space force has important requirements in the fields of aviation, aerodynamics, bionics, biology and the like, and has important significance for guiding basic research and design optimization in the related fields. One of the difficulties is that accurate measurement of the magnitude and direction of the force values of the space force is achieved at the same time. In the past, in order to realize the measurement of space force, researchers select a specially designed and processed mechanical structure, paste strain gauges on certain positions of the surface of the mechanical structure, calibrate the force in a plurality of orthogonal directions, analyze and decouple the strain gauge data when the space force is applied to obtain the force in the orthogonal directions, and finally synthesize the space force, thereby determining the magnitude and the direction of the resultant force; researchers have also used indirect methods such as air pressure, hydraulic pressure, etc. to calculate and obtain force values in several orthogonal directions. In summary, the approach of synthesizing spatial forces through multiple orthogonal forces is popular and reasonable. The method for converting the force value through the strain signal can realize better measurement accuracy in the calibration direction of the strain gauge, particularly when the force is applied along the calibration direction, but accurate measurement is difficult to realize in other larger-range directions outside the calibration direction, and meanwhile, the measurement results in the orthogonal directions have the condition of mutual interference, so that systematic errors are easy to introduce; the method for calculating the resultant force indirectly by signals such as air pressure, hydraulic pressure and the like can realize better orthogonal independence, namely the interference of measurement results between orthogonal directions is smaller, and even the method can avoid a decoupling process, but is limited by a principle, the measurement accuracy is difficult to improve, and the fluctuation of the air pressure and the hydraulic pressure can increase the measurement uncertainty.
Disclosure of Invention
The invention aims to provide a novel decoupling-free micro-space force accurate measurement device based on a double-degree-of-freedom air floatation guide rail and an air floatation bearing, which has a simple structure and is convenient to operate, and the space force is finally synthesized by independently measuring the stress of a test object in three orthogonal directions. The invention can realize accurate measurement of the micro-space force value and direction, and the force values in the orthogonal directions are not mutually interfered, so that the measurement result does not need decoupling, and the data processing is greatly simplified.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the decoupling-free micro-space force accurate measurement device based on the double-degree-of-freedom air floating guide rail and the air floating bearing comprises a double-degree-of-freedom air floating guide rail (1), a bracket (2), a working flat plate (3), a bearing (4), a bearing clamping block (5), a rotating shaft (6), a cross beam (7), a probe (8), a micro head (9), a micro head bracket (10), a cross beam stud (20), a mounting arm (21), an air floating bearing (22), a force sensor (23), an air floating bearing bracket (24), an air floating bearing clamping block (25), a sensor bracket (26), a cantilever beam (27), an inter-beam bracket (28), an air floating guide rail base (29) and an optical flat plate (30);
the double-degree-of-freedom air-float guide rail (1) is mounted on the optical flat plate (30) through an air-float guide rail base (29), a support (2) and a working flat plate (3) are sequentially mounted at the top of the air-float guide rail (1), a pair of bearings (4) are mounted on the working flat plate (3) in a clamping mode, the two bearings are fixed through bearing clamping blocks (5), a rotating shaft (6) penetrates between the bearings, a cross beam (7) is mounted on the rotating shaft in a clamping mode, and the cross beam (7) can rotate freely under an unconstrained state.
The double-freedom-degree air-float guide rail (1) comprises a lower-layer air-float guide rail (11), an upper-layer air-float guide rail (12) and a quick joint (13) for a pipe;
the lower-layer air-float guide rail (11) comprises a guide rail (111), a slide block (112), a slide block (113), a slide block (114) and a slide block (115), a rectangular opening cavity is formed in the inner side after the slide blocks (112) - (115) are installed, the guide rail (111) is inserted into the cavity, the upper-layer air-float guide rail (12) comprises a guide rail (121), a slide block (122), a slide block (123), a slide block (124) and a slide block (125), a rectangular opening cavity is formed in the inner side after the slide blocks (122) - (125) are installed, the guide rail (121) is inserted into the cavity, and the distance between the guide rail (111) and the guide rail (121) and the slide blocks installed around the guide rail is about 50-100 mu m.
A vertically penetrating air hole with the diameter of d=2-4 mm is processed at the center (116) of the upper surface of the sliding block (112), two sealing grooves are processed at the upper surface (117) by taking the air hole as the center, and are used for being filled with rubber gaskets when the lower air-float guide rail (11) and the upper air-float guide rail (12) are installed, the inside of the sliding blocks (113) - (115) is of a solid structure, a plurality of air holes with the diameter of d=2-4 mm are processed in the guide rail (111), the air holes are divergently led to the upper surface, the lower surface, the front surface and the rear surface (the surface through which the z axis and the y axis pass) are processed by taking the inlet position as the starting point, the number of the air holes on each surface is not less than two, the inlet position is tapped and is provided with a quick joint (13) for use, besides, the outlet position is provided with a throttle hole with the diameter of a=0.1-0.2 mm, and the air hole with the diameter of d=2-4 mm is processed at the center of the upper surface of the guide rail (111).
The method comprises the steps that air holes with the diameter d are processed in sliding blocks (122) - (125), the shape of each air hole in the sliding block is in a ' groined ' shape, the ' groined ' air holes can be mutually communicated after the sliding blocks (122) - (125) are installed, each ' groined ' air hole is provided with four air hole intersection points, a through hole with the diameter d=2-4 mm is formed on one side of an air guide rail (121) at the position of the intersection point (126 and the like), a throttling small hole with the diameter a=0.1-0.2 mm is installed at the tail end of the through hole, besides, an independent air hole with the diameter d=2-4 mm communicated with the ' groined ' air hole in the sliding block is processed at the center (127) of the lower surface of the sliding block (125), the air holes do not penetrate through the sliding block, and other air holes which are used for installing the throttling small hole and the independent air hole processed at the center of the sliding block (125) are tapped and installed on the tail end (128 and the like) of the air guide rail (121) which is not processed but exposed in the atmosphere environment due to processing convenience and design convenience and the like, and the inside of the air guide rail (121) is taken as an air hole to be reduced weight, the air hole is reasonably spread in the invention, the air hole is dispersed in the air hole is in the area of the invention and the air hole (111) ': .
The main function of the throttle orifice is to generate air flow with stable pressure and flow, and an air film is formed between the guide rail and the sliding block.
After the upper layer air-float guide rail (12) is connected with the lower layer air-float guide rail (11), the air-float guide hole at the center of the guide rail (111) and the air-float guide hole at the center of the slide block (112) are basically positioned at the same axis, the air compressor is connected by the quick connector (13), high-pressure air enters the air-float guide rail (12) immediately after entering the air-float guide rail (11), air pressure can be quickly transmitted between the air-float guide holes, namely, the double-freedom-degree air-float guide rail (1) can realize a fixed air inlet and simultaneously realize air lubrication by supplying air to an upper air-float guide rail system and a lower air-float guide rail system, at the moment, the slide blocks (112) to (115) and parts assembled on the slide blocks can do linear motion (x direction) relative to the guide rail (111), the upper layer guide rail (121) and parts assembled on the slide blocks (122) do linear motion (y direction) relative to the slide blocks (125), and the upper layer guide rail (121) and parts assembled on the upper guide rail and the upper part can do relative motion between the parts in the horizontal plane (x-y direction relative to the optical flat plate (30) and the free motion parts which do relative motion in the horizontal plane (x-y direction) can not ignore the action.
The two air bearing (22) are arranged, the first air bearing is clamped by an air bearing frame (24) and an air bearing clamping block (25) and then is arranged between a pair of cantilever beams (27), the second air bearing is arranged on an optical flat plate (30) in the same clamping mode, a pair of mounting arms (21) clamp the rotor of the air bearing (22) from the upper position and the lower position and are mutually fixed, a differential head bracket (10) is connected with the combined mounting arms (21), two differential heads (9) are arranged at the end parts of the differential head bracket (10) in a butt mode, the lengths of the differential heads are adjusted to enable the differential heads to just butt against a clamping probe (8), and the shortest distance between the axis of the rotor of the previous air bearing and the axis of the differential head is D y The shortest distance between the axis of the rotor of the latter air bearing and the axis of the differential head is D x When high-pressure gas is introduced into the air bearing (22), gas lubrication is formed inside the air bearing, the inner rotor can rotate around the shell with extremely low friction, and correspondingly, the mounting arm (21) connected with the rotor and the micro-head bracket (10) can also rotate around the shell.
The two probes (8) are arranged on the sliding block (114) or other structures fixedly connected with the sliding block (114), one of the probes is arranged on the cantilever beams (27) in the drawing, the other probe is arranged on the upper guide rail (121) or other structures fixedly connected with the upper guide rail (121), the other probe is arranged on the side surface of the working flat plate (3), and a plurality of inter-beam brackets (28) are arranged between the cantilever beams (27) to increase the rigidity of the cantilever beams;
the number of the force sensors (23) is 3, the installation modes of the first two force sensors are the same, one end of each force sensor is installed on a sensor bracket (26), the other end of each force sensor is installed on the outer side of an installation arm (21) through a stud, and the shortest distances between the axes of the two studs and the axis of the rotor of the air bearing are d respectively x ，d y One end of a third force sensor is arranged on the upper surface of the working flat plate (3), the other end of the sensor is provided with a beam stud (20), the beam stud (20) is propped against the outer lower part of the beam rotating shaft (6), and the shortest distance between the axis of the beam stud (20) and the axis of the beam rotating shaft (6) is d z The said transmissionThe sensor bracket (26) is clamped on the outer shaft surface of the air bearing;
the front end and the tail end of the cross beam (7) are respectively provided with a through hole, the through holes at the front end are used for installing test objects or installing auxiliary tools convenient for clamping the test objects, the tail end through holes are provided with counterweights for balancing moment on the cross beam and avoiding overlarge stress on a force sensor below the cross beam (7) from exceeding a measuring range, the test objects arranged at the front end of the cross beam (7) apply a space force f to the cross beam, and the shortest distance between the action point of the space force f and the rotating shaft of the cross beam (7) is D z 。
The method for accurately measuring the space force based on the device comprises the following steps:
the spatial force f can be decomposed into three opposite directions xyz when applied to the front end of the beam (7), wherein the force component f in the x direction x The upper guide rail (121) has the trend of moving in the x direction and generates tiny displacement, the tiny displacement can lead the micro-head bracket (10) connected with the micro-head (9) and the mounting arm (21) to generate tiny deflection by taking the air bearing rotor as the axis, and the force sensor (23) at the other side of the mounting arm (21) feeds back the force F thereon due to the stretching or compression of the deflection x According to the lever principle, the stress f in the x direction is truly applied in the equilibrium state x Calculated by the following method:
the change of the magnitude of the true force in the x direction before and after the application of f is as follows:
wherein f x1 And f x0 The true stress magnitude in the x direction before and after the application of F is respectively calculated by the force sensor reading F before and after the application of F x1 And F x0 Calculating;
similarly, the magnitude of the change in force values in the y and z directions is Δf y And Δf z ，
The resultant force magnitude f is:
the included angle between the resultant force and the x direction is as follows:
the resultant force and the included angle of the rest directions are calculated in the same way;
the resolution of the force sensor (23) is delta, and the resolution of the force value of the measuring device in the x direction after lever amplification is as follows:
the resolution in the y and z directions is converted similarly, and the leverage enables the resolution of the measuring device to be further improved compared with the resolution of the sensor.
The beneficial effects of the invention are as follows: 1. accurate measurement of the magnitude and direction of the micro-space force can be achieved. Meanwhile, the measurement of the components of the space force in the orthogonal directions is an important problem, and when the measurement is performed by using a traditional means, the components in the orthogonal directions are often influenced mutually to introduce errors into the measurement result.
2. The micro-space force is measured by using a double-freedom-degree air floating guide rail and an air floating bearing, wherein the air floating guide rail consists of a guide rail and a sliding block, and the air floating bearing consists of a rotor at the center and a stator at the outer ring. The air-float guide rail is used for injecting high-pressure gas into gaps between four surfaces of the guide rail and the sliding block, so that uniform air films with extremely high bearing capacity can be formed in the gaps, the guide rail and the sliding block can be regarded as non-contact assembly under gas lubrication, the direct contact resistance of the guide rail and the sliding block can be ignored, only pneumatic damping force formed by the air films exists, the damping force can be ignored in the low-speed movement process, and the air-float bearing is the same. Therefore, the force measuring method of air floatation can lead the internal resistance to be extremely low and approximately zero, and the provided measuring environment is very favorable for realizing high-resolution measurement of force.
3. In the measuring process, the air film in the air floatation guide rail and the air film in the air floatation bearing can isolate vibration to a certain extent, and the accuracy of the measuring device is improved.
Drawings
FIG. 1 is an isometric view of the apparatus of the present invention;
FIG. 2 is a front view of the device of the present invention;
FIG. 3 is a left side view of the device of the present invention;
FIG. 4 is a top view of the device of the present invention;
in the figure, 1, a double-freedom air floating guide rail, 2, a bracket, 3, a working flat plate, 4, a bearing, 5, a bearing clamping block, 6, a rotating shaft, 7, a cross beam, 8, a probe, 9, a micro head, 10, a micro head bracket, 20, a cross beam stud, 21, a mounting arm, 22, an air floating bearing, 23, a force sensor, 24, an air floating bearing bracket, 25, an air floating bearing clamping block, 26, a sensor bracket, 27, a cantilever beam, 28, an inter-beam bracket, 29, an air floating guide rail base 30 and an optical flat plate.
Fig. 5 is an isometric view of the dual degree of freedom air rail 1;
fig. 6 is a partial cross-sectional isometric view of the dual degree of freedom air rail 1;
FIG. 7 is a 1/4 section isometric view of the upper rail 12;
fig. 8 is an isometric view of the lower rail 11 from a bottom view;
in the figure, 11. Lower layer air bearing guide rail, 12. Upper layer air bearing guide rail, 13. Quick joint for pipe, 111. Lower layer guide rail, 112. Slide block, 113. Slide block, 114. Slide block, 115. Slide block, 121. Upper layer guide rail, 122. Slide block, 123. Slide block, 124. Slide block, 125. Slide block.
Specific embodiments:
the decoupling-free micro-space force accurate measurement device based on the double-degree-of-freedom air floating guide rail and the air floating bearing in the embodiment has the overall dimension of 35cm multiplied by 35cm and comprises the double-degree-of-freedom air floating guide rail, the dimension of 35cm multiplied by 35cm, a bracket, a working flat plate, a bearing clamping block, a rotating shaft, a cross beam, a probe, a differential head bracket, a cross beam stud, a mounting arm, an air floating bearing, a force sensor, an air floating bearing bracket, an air floating bearing clamping block, a sensor bracket, a cantilever beam, an inter-beam bracket, an air floating guide rail base and an optical flat plate;
the air supporting guide rail is installed on the optical flat plate through the air supporting guide rail base, the top of the air supporting guide rail is sequentially provided with a support and a working flat plate, a pair of bearings can be clamped on the working flat plate and fixed through bearing clamping blocks, a rotating shaft penetrates between the bearings, a cross beam is clamped on the rotating shaft, and the cross beam can rotate freely under the unconstrained state.
The double-freedom-degree air-float guide rail comprises a lower-layer air-float guide rail, an upper-layer air-float guide rail and a quick connector for a pipe;
the lower layer air supporting guide rail includes lower floor's guide rail and four sliders rather than the assembly, and the inboard forms rectangular opening's cavity after the slider is installed, and lower floor's guide rail can the cartridge in the cavity, upper strata air supporting guide rail includes upper guide rail and four other sliders rather than the assembly, and the inboard forms rectangular opening's cavity after the slider is installed equally, and upper guide rail can the cartridge in the cavity, the distance between two guide rails and the slider of its installation all around is about 100 mu m.
The central position of the upper surface of the upper sliding block of the lower layer guide rail is provided with a vertically penetrating air hole with the diameter of 3mm, the upper surface is provided with two sealing grooves by taking the air hole as the center of a circle, the sealing grooves are used for being filled with rubber gaskets when the lower layer air-float guide rail and the upper layer air-float guide rail are installed, the inside of the rest sliding blocks of the lower layer guide rail is of a solid structure, the inside of the lower layer guide rail is provided with a plurality of air holes with the diameter of 3mm, the air holes are divergently communicated to the upper surface, the lower surface, the front surface and the rear surface (the surface through which the z axis and the y axis pass) by taking the inlet position as the starting point, the number of the outlet of the air holes on each surface is not less than two, the inlet position is tapped and is provided with a quick joint for installation, the outlet position is provided with a throttling small hole with the diameter of a, and besides, the central position of the upper surface of the lower layer guide rail is provided with a vertically penetrating air hole with the diameter of 3 mm.
The air guide holes with the diameter of 3mm are processed in the sliding block of the upper air floating guide rail, the shape of each air guide hole in the sliding block is in a 'groined' shape, the 'groined' air guide holes can be mutually communicated after the sliding block is installed, four air guide hole intersection points are arranged at the tail end of each air guide hole, a through hole is formed in one side of the air guide rail at the intersection point, a throttling small hole with the diameter of 0.16mm is installed at the tail end of each through hole, besides, an independent air guide hole with the diameter of 3mm, which is communicated with the 'groined' air guide hole in the lower sliding block of the upper air floating guide rail, is further processed at the central position of the lower surface of the sliding block of the upper air floating guide rail, the air guide hole does not penetrate through the sliding block, and other air guide holes which are used for installing the throttling small hole and the central processing of the sliding block of the lower sliding block are required to be processed due to processing convenience, design convenience and the tail ends of the air guide holes exposed in the atmosphere are all tapped and are blocked by installing studs, and the inside the guide rail is hollowed out for weight reduction.
The main function of the throttle orifice is to generate air flow with stable pressure and flow, and an air film is formed between the guide rail and the sliding block.
After the upper layer air-float guide rail is connected with the lower layer air-float guide rail, the air-guide hole in the center of the lower layer guide rail, the air-guide hole in the center of the upper sliding block of the lower layer air-float guide rail and the air-guide hole in the center of the lower sliding block of the upper layer air-float guide rail are basically positioned on the same axis, the air compressor is connected by a quick connector, high-pressure air enters the air-float guide rail immediately after entering the air-float guide rail, the air pressure can be quickly transferred between the air-guide holes, namely, the double-freedom-degree air-float guide rail can realize a fixed air inlet and simultaneously supply air to an upper air-float guide rail system and a lower air-float guide rail system to realize air lubrication, at the moment, the lower layer guide rail is static on an optical flat plate, the sliding block of the lower layer guide rail and parts assembled on the lower layer guide rail can do linear motion (x direction) relative to the lower layer guide rail, the upper layer guide rail and the parts assembled on the upper layer guide rail can do free motion (y direction) relative to the upper sliding block of the upper sliding block, and the resistance between the parts which do horizontal plane (x-y) relative to the parts can do negligible free motion under the action of the air lubrication effect.
The two air bearing are arranged, the first air bearing is clamped by the air bearing frame and the air bearing clamping block and then is arranged between the pair of cantilever beams, and the second air bearing is arranged in the same wayThe sample clamping mode is installed on the optical flat plate, a pair of installation arms clamp the rotor of the air bearing from the upper position and the lower position and are mutually fixed, the micro-head support is connected with the combined installation arms, the end part of the micro-head support is oppositely provided with two micro-heads, the length of the micro-head is adjusted to enable the micro-head to just oppositely clamp the probe, and the shortest distance between the axis of the rotor of the former air bearing and the axis of the micro-head is D y 203mm, the shortest distance between the axis of the rotor of the latter air bearing and the axis of the micro-head is D x When the air bearing is filled with high-pressure gas, air lubrication is formed inside the air bearing, the inner rotor can rotate around the shell with extremely low friction, and correspondingly, the mounting arm and the micro-head bracket connected with the rotor can also rotate around the shell.
The probe has two parts, one of which is arranged on a side sliding block of a lower guide rail or other structures fixedly connected with the side sliding block, the other part of which is arranged on an upper guide rail or other structures fixedly connected with the upper guide rail, the other part of which is arranged on the side surface of a working flat plate, and a plurality of inter-beam brackets are arranged between the cantilever beams to increase the rigidity of the cantilever beams.
The number of the force sensors is 3, the installation modes of the first two force sensors are the same, one end of each force sensor is installed on the sensor support, the other end of each force sensor is installed on the outer side of the installation arm through a stud, and the shortest distance between the axes of the two studs and the axis of the air bearing rotor is d respectively x ＝9mm，d y One end of a third force sensor is arranged on the upper surface of the working plate, the other end of the third force sensor is provided with a beam stud, the beam stud is propped against the outer lower part of the beam rotating shaft, and the shortest distance between the axis of the beam stud and the axis of the beam rotating shaft is d z The sensor bracket is clamped on the outer shaft surface of the air bearing;
the front end and the tail end of the cross beam are respectively provided with a through hole, the through holes at the front end are used for installing test objects or installing auxiliary tools convenient for clamping the test objects, the tail end through holes are provided with counterweights, the counterweights are used for balancing the moment on the cross beam, and the overlarge and excessive stress on the force sensor below the cross beam is avoided. The test object mounted at the front end of the beam applies a space force f to the beam, and the action point of the space force f is the shortest distance from the rotating shaft of the beamLeave as D z ＝300mm。
When the space force f is applied to the front end of the beam, the three opposite directions of xyz can be decomposed, wherein the component force f in the x direction x The upper guide rail has the trend of moving in the x direction and generates tiny displacement, the tiny displacement can lead the micro head bracket and the mounting arm connected with the micro head to generate tiny deflection by taking the air bearing rotor as the axis, and the force sensor at the other side of the mounting arm can feedback the force F on the force sensor due to the tension or compression of the deflection x Is of a size of (a) and (b),
according to the lever principle, the force f in the x direction is truly stressed in the balanced state x The method can be used for calculation by the following method:
the change of the magnitude of the true force in the x direction before and after the application of f is as follows:
wherein f x1 And f x0 The true stress magnitude in the x direction before and after the application of F is respectively calculated by the force sensor reading F before and after the application of F x1 And F x0 Calculating, and similarly, the magnitude of the change in the y and z force values is Δf y And Δf z ，
The resultant force magnitude f is:
the included angle between the resultant force and the x direction is as follows:
the resultant force and the included angle of the rest directions are calculated in the same way;
the resolution of the force sensor (23) is delta, and the resolution of the force value of the measuring device in the x direction after lever amplification is as follows:
the commercial sensor used in the present invention has a resolution of δ=0.002N, and the resolution of the present invention in the x-direction is δ by lever amplification mx ＝0.000088N。
The resolution in the y and z directions is converted similarly, and the leverage enables the resolution of the measuring device to be further improved compared with the resolution of the sensor.
Claims (2)
1. The decoupling-free micro-space force accurate measurement device based on the double-degree-of-freedom air floating guide rail and the air floating bearing is characterized by comprising the double-degree-of-freedom air floating guide rail (1), a support (2), a working flat plate (3), a bearing (4), a bearing clamping block (5), a rotating shaft (6), a cross beam (7), a probe (8), a differential head (9), a differential head support (10), a cross beam stud (20), an installation arm (21), an air floating bearing (22), a force sensor (23), an air floating bearing support (24), an air floating bearing clamping block (25), a sensor support (26), a cantilever beam (27), an inter-beam support (28), an air floating guide rail base (29) and an optical flat plate (30);
the double-degree-of-freedom air-float guide rail (1) is arranged on the optical flat plate (30) through an air-float guide rail base (29), a support (2) and a working flat plate (3) are sequentially arranged at the top of the air-float guide rail (1), a pair of bearings (4) are clamped on the working flat plate (3), the two bearings are fixed through bearing clamping blocks (5), a rotating shaft (6) penetrates between the bearings, a cross beam (7) is clamped on the rotating shaft, and the cross beam (7) can rotate freely under an unconstrained state;
the double-freedom-degree air-float guide rail (1) comprises a lower-layer air-float guide rail (11), an upper-layer air-float guide rail (12) and a quick joint (13) for a pipe;
the lower-layer air-float guide rail (11) comprises a guide rail (111), a slide block (112), a slide block (113), a slide block (114) and a slide block (115), a rectangular opening cavity is formed in the inner side of the slide blocks (112) - (115) after the slide blocks (112) - (115) are installed, the guide rail (111) is inserted into the cavity, the upper-layer air-float guide rail (12) comprises a guide rail (121), a slide block (122), a slide block (123), a slide block (124) and a slide block (125), a rectangular opening cavity is formed in the inner side of the slide blocks (122) - (125) after the slide blocks (122) - (125) are installed, the guide rail (121) is inserted into the cavity, and the distance between the guide rail (111) and the slide blocks installed around the guide rail (121) is about 50-100 mu m;
a vertically penetrating air hole with the diameter of d=2-4 mm is processed at the center (116) of the upper surface of the sliding block (112), two sealing grooves are processed at the upper surface (117) by taking the air hole as the center, and used for filling rubber gaskets when the lower air-float guide rail (11) and the upper air-float guide rail (12) are installed, the inside of the sliding blocks (113) - (115) is of a solid structure, a plurality of air holes with the diameter of d=2-4 mm are processed in the guide rail (111), the air holes are divergently led to the upper surface, the lower surface, the front surface and the rear surface (the surface through which the z axis and the y axis pass) are respectively processed by taking the inlet position as the starting point, the number of the air hole outlets on each surface is not less than two, the inlet position is tapped and is provided with a quick joint (13), the outlet position is provided with a throttling small hole with the diameter of a=0.1-0.2 mm, and besides, the air hole with the diameter of d=2-4 mm is processed at the center of the upper surface of the guide rail (111);
the method comprises the steps that air holes with the diameter d are processed in sliding blocks (122) - (125), the shape of each air hole in the sliding blocks is in a ' groined ' shape, the ' groined ' air holes can be mutually communicated after the sliding blocks (122) - (125) are installed, each ' groined ' air hole is provided with four air hole intersection points, a through hole with the diameter d=2-4 mm is formed on one side of an air guide rail (121) at the position of the intersection point (126 and the like), a throttling small hole with the diameter a=0.1-0.2 mm is installed at the tail end of the through hole, besides, an independent air hole with the diameter d=2-4 mm communicated with the ' groined ' air hole in the sliding blocks (125) is processed at the center (127) of the lower surface of the sliding blocks (125), the air holes do not penetrate through the sliding blocks, and other air holes (128 and the like) which are exposed in the atmosphere are all tapped and installed on the tail ends of the sliding rail (121) due to processing convenience, design convenience and the like are not processed, and the inside the sliding rail (121) is taken as an air guide rail for reducing weight, the's air holes are reasonably spread into the's (111) ' the ' air holes are distributed in the ' or ' in the ' holes (125) ' in the ' and the ' is reasonably spread to the ' areas;
the main function of the throttle small hole is to generate air flow with stable pressure and flow, and an air film is formed between the guide rail and the sliding block;
after the upper layer air-float guide rail (12) is connected with the lower layer air-float guide rail (11), the air-float guide hole at the center of the guide rail (111) and the air-float guide hole at the center of the slide block (112) are basically positioned at the same axis, the air compressor is connected by the quick connector (13), high-pressure air enters the air-float guide rail (12) immediately after entering the air-float guide rail (11), the air pressure can be quickly transmitted between the air-float guide rails, namely, the double-freedom-degree air-float guide rail (1) can realize a fixed air inlet and simultaneously realize air lubrication by supplying air to an upper air-float guide rail system and a lower air-float guide rail system, at the moment, the slide blocks (112) to (115) and parts assembled on the slide blocks (112) can do linear motion (x direction) relative to the guide rail (111), the upper layer guide rail (121) and the parts assembled on the slide blocks (122) do linear motion (y direction) relative to the slide blocks (125), so that the upper layer guide rail (121) and the parts assembled on the upper guide rail and the upper part can do free motion relative motion in the horizontal plane (x-y direction) relative to the optical plane (30) can do not ignore the effect of the air lubrication;
the two air bearing (22) are arranged, the first air bearing is clamped by an air bearing frame (24) and an air bearing clamping block (25) and then is arranged between a pair of cantilever beams (27), the second air bearing is arranged on an optical flat plate (30) in the same clamping mode, a pair of mounting arms (21) clamp the rotor of the air bearing (22) from the upper position and the lower position and are mutually fixed, a micro-head support (10) is connected with the combined mounting arms (21), two micro-heads (9) are arranged at the end parts of the micro-head support (10) in a butt mode, the lengths of the micro-heads are adjusted to enable the micro-heads to just butt against a clamping probe (8), and the front air bearing is provided with a plurality of micro-headsThe shortest distance between the axes of the air bearing rotors and the axes of the differential heads is D y The shortest distance between the axis of the rotor of the latter air bearing and the axis of the differential head is D x When high-pressure gas is introduced into the air bearing (22), gas lubrication is formed inside the air bearing, the inner rotor can rotate around the shell with extremely low friction, and correspondingly, the mounting arm (21) connected with the rotor and the micro-head bracket (10) can also rotate around the shell;
the two probes (8) are arranged on the sliding block (114) or other structures fixedly connected with the sliding block (114), one of the probes is arranged on the cantilever beams (27) in the drawing, the other probe is arranged on the upper guide rail (121) or other structures fixedly connected with the upper guide rail (121), the other probe is arranged on the side surface of the working flat plate (3), and a plurality of inter-beam brackets (28) are arranged between the cantilever beams (27) to increase the rigidity of the cantilever beams;
the number of the force sensors (23) is 3, the installation modes of the first two force sensors are the same, one end of each force sensor is installed on a sensor bracket (26), the other end of each force sensor is installed on the outer side of an installation arm (21) through a stud, and the shortest distances between the axes of the two studs and the axis of the rotor of the air bearing are d respectively x ，d y One end of a third force sensor is arranged on the upper surface of the working flat plate (3), the other end of the sensor is provided with a beam stud (20), the beam stud (20) is propped against the outer lower part of the beam rotating shaft (6), and the shortest distance between the axis of the beam stud (20) and the axis of the beam rotating shaft (6) is d z The sensor bracket (26) is clamped on the outer shaft surface of the air bearing;
the front end and the tail end of the cross beam (7) are respectively provided with a through hole, the through holes at the front end are used for installing test objects or installing auxiliary tools convenient for clamping the test objects, the tail end through holes are provided with counterweights for balancing moment on the cross beam and avoiding overlarge stress on a force sensor below the cross beam (7) from exceeding a measuring range, the test objects arranged at the front end of the cross beam (7) apply a space force f to the cross beam, and the shortest distance between the action point of the space force f and the rotating shaft of the cross beam (7) is D z 。
2. A method for accurate measurement of spatial forces based on the device of claim 1, characterized by the following procedure:
the spatial force f can be decomposed into three opposite directions xyz when applied to the front end of the beam (7), wherein the force component f in the x direction x The upper guide rail (121) has the trend of moving in the x direction and generates tiny displacement, the tiny displacement can lead the micro-head bracket (10) connected with the micro-head (9) and the mounting arm (21) to generate tiny deflection by taking the air bearing rotor as the axis, and the force sensor (23) at the other side of the mounting arm (21) feeds back the force F thereon due to the stretching or compression of the deflection x According to the lever principle, the stress f in the x direction is truly applied in the equilibrium state x Calculated by the following method:
the change of the magnitude of the true force in the x direction before and after the application of f is as follows:
wherein f x1 And f x0 The true stress magnitude in the x direction before and after the application of F is respectively calculated by the force sensor reading F before and after the application of F x1 And F x0 Calculating;
similarly, the magnitude of the change in force values in the y and z directions is Δf y And Δf z ，
The resultant force magnitude f is:
the included angle between the resultant force and the x direction is as follows:
and calculating the resultant force and the included angle of the rest directions in the same way.
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