CN115367470B - Graphite boat transfer device - Google Patents
Graphite boat transfer device Download PDFInfo
- Publication number
- CN115367470B CN115367470B CN202211045436.3A CN202211045436A CN115367470B CN 115367470 B CN115367470 B CN 115367470B CN 202211045436 A CN202211045436 A CN 202211045436A CN 115367470 B CN115367470 B CN 115367470B
- Authority
- CN
- China
- Prior art keywords
- plate
- sliding
- horizontally
- graphite boat
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
Abstract
The invention discloses a graphite boat transferring device which comprises a supporting device for bearing a graphite boat, a clamping piece device for clamping silicon wafers and a feeding device for lifting the graphite boat to the supporting device, wherein the clamping piece device is arranged on one side of the top surface of the supporting device, the feeding device is arranged at the front part of the supporting device, and the clamping piece device comprises a moving plate, a rotating assembly, a lifting assembly and a clamping piece assembly. The invention solves the problems of complicated carrying process and high labor intensity of the existing graphite boat which is carried to the feeding machine by means of the cart and then is carried manually.
Description
Technical Field
The invention relates to the technical field of graphite boat transfer equipment, in particular to a graphite boat transfer device.
Background
The utility model provides a 202120806650.0, name are graphite boat transfer device for PECVD, include the box and set up in the box buffering frame and two transfer mechanism, buffering frame is used for keeping in graphite boat, buffering frame is located between two transfer mechanism, be provided with the loading board that is used for bearing the weight of graphite boat on the transfer mechanism, transfer mechanism is used for driving the loading board, transfers graphite boat to buffering frame on, through the design of transfer mechanism and buffering frame, realizes the change and the transportation of graphite boat, need not the operating personnel and waits, realizes the serialization of graphite boat production and processing, has improved the efficiency of production.
When the processed graphite boat is transported to the feeding machine by means of the cart, the graphite boat is needed to be manually transported for loading, the transportation process is complicated, the labor intensity is high, and the silicon wafers in the graphite boat cannot be well clamped and taken out for standby after transportation.
Disclosure of Invention
The present invention aims to provide a graphite boat transfer device, which aims to solve the above problems.
The invention is realized in the following way:
the utility model provides a graphite boat transfer device, including the strutting arrangement who is used for bearing the weight of the graphite boat, be used for the clamping piece device of centre gripping silicon chip and be used for lifting the loading attachment who removes the graphite boat to strutting arrangement, strutting arrangement's top surface one side is provided with the clamping piece device, and strutting arrangement's front portion is provided with loading attachment, the clamping piece device includes movable plate, rotating assembly, lifting unit and clamping piece subassembly, wherein be provided with the rotating assembly who is used for turning to directly over the movable plate, and the vertical upward lifting unit that installs in top of rotating assembly, and the level is provided with the clamping piece subassembly that is used for the centre gripping silicon chip on the lifting unit.
Further, strutting arrangement includes quick-witted case and roof, and wherein the level is fixed with the roof on the top surface of machine case, and the top surface one side of roof runs through the bottom surface level and has seted up a plurality of spouts, and equal horizontal sliding mounting has the carriage that bears that is used for bearing the graphite boat in a plurality of spouts, and the top surface opposite side of roof is fixed with a plurality of frames that place that are used for holding the silicon chip, and the inside level fixed mounting of machine case has a plurality of first cylinders, and the output of a plurality of first cylinders is connected on the bottom surface that bears the carriage.
Further, the movable plate is horizontally fixed on the rear end face of the top plate, two first sliding rods are horizontally fixed on the top face of the movable plate, the middle of the top face of the movable plate penetrates through the bottom face to form a through groove, bearing seats are vertically fixed at two ends of the bottom face of the movable plate, a translation screw is connected between the bearing seats through bearing rotation, and a fourth motor for driving the translation screw is horizontally installed on the bearing seat at one end of the movable plate.
Further, the rotating assembly comprises a moving seat, the moving seat is horizontally arranged right above the moving plate, a first sliding cylinder sleeved on the first sliding rod is horizontally fixed on the bottom surface of the moving seat, a translation screw cylinder is horizontally fixed on a through groove on the moving plate in a manner that the middle part of the bottom surface of the moving seat vertically penetrates downwards, the translation screw cylinder is connected with a translation screw rod in a threaded penetrating matching manner, a rotating shaft is vertically and upwards connected to the top surface of the moving seat through a bearing, a driven gear is horizontally arranged on the rotating shaft, a first motor is vertically and upwards arranged on the top surface of the moving seat, and a driving gear meshed with the driven gear is arranged at the output end of the first motor.
Further, the lifting assembly comprises a sliding frame plate, a sliding block and a flat pushing plate, wherein the sliding frame plate is vertically arranged right above the movable seat, the bottom surface of the sliding frame plate is fixedly connected with the top surface of the rotating shaft, the sliding block is vertically and slidably arranged in the sliding frame plate, one end of the sliding block is rotationally provided with the flat pushing plate for installing the clamping piece assembly, the top of the sliding frame plate is vertically and downwardly provided with a second air cylinder, the output end of the second air cylinder is connected to the sliding block, and the other end of the sliding block is horizontally provided with a second motor.
Further, be provided with the revolving rack between flat push pedal and the slider, and the dwang on the revolving rack runs through the bearing and rotates to be connected on the slider, and the dwang tip on the revolving rack is connected with the output of second motor, and the revolving rack is close to the one end level that the flat push pedal is fixed with the second cylinder, and the other end of second cylinder is fixed on the flat push pedal, has the telescopic link between flat push pedal and the slider, and the both ends of telescopic link are fixed respectively with flat push pedal and the adjacent terminal surface of slider on.
Further, the clamping piece assembly comprises a clamping plate and a clamping piece, wherein the clamping plate is horizontally arranged, one end of the clamping plate is fixed on the flat pushing plate, an assembling groove is formed in the clamping plate in a penetrating mode, a plurality of sliding seats are mounted on the top surface of the clamping plate along the horizontal direction, the sliding seats are slidably mounted in the assembling groove on the clamping plate, and the clamping piece is vertically fixed downwards on the bottom surface of the sliding seats.
Further, a plurality of positioning screw holes are vertically formed in the top surface of the clamping plate along the horizontal direction, fixing bolts are vertically and downwards threaded on the sliding seat to penetrate through, the fixing bolts are matched with the positioning screw holes to be used for installing the sliding seat on the clamping plate, sucking discs are all installed on the clamping plates in a penetrating mode, suction pipes are communicated with the sucking discs, a suction pump is horizontally fixed on the clamping plate, an air inlet of the suction pump is communicated with an air inlet pipe, and the suction pump is communicated with the suction pipes on the air inlet pipe.
Further, loading attachment is including being used for lifting the support work or material rest of graphite boat material loading and being used for transporting the transport board of graphite boat, wherein support the work or material rest and vertically fix on the preceding terminal surface of quick-witted case, and the front portion of holding the work or material rest is provided with the transport board, and hold in the palm the vertical terminal surface of both sides of work or material rest on vertically running through and offered the slide, and hold in the palm the middle part of work or material rest and be connected with the support material screw rod through the vertical rotation of bearing, and the vertical third motor that is fixed with on the bottom surface of holding in the palm the work or material rest, and the output of third motor is connected in the bottom pivot of holding in the support material screw rod, vertical slidable mounting has the support material slide in the slide of holding in the support, and hold in the middle part of holding in the palm the material slide is vertically to run through and be fixed with the support material screw cylinder of screw-thread fit support material screw rod, and hold in the front of holding in the material slide is fixed with the second slide bar on the terminal surface, and the horizontal sliding is provided with and holds in the palm the material frame directly over the vertical, hold in the bottom surface of material frame is fixed with the sliding sleeve on the second slide bar of second slide rod, and holds in the top surface both ends of material frame vertically and is fixed with the baffle, and holds in the top of the support and is used for compressing tightly the graphite cylinder.
Further, install the gyro wheel on the bottom surface of transporting the board, and evenly be fixed with a plurality of frame along the horizontal direction on transporting the top surface of board, and horizontal rotation is connected with a plurality of guide pulleys in a plurality of frame, the top surface front end of transporting the board is vertical upwards to be fixed with and pushes away the frame, and pushes away one side that the frame is close to transporting the board and be provided with the push pedal, and push away the frame and go up horizontal screw thread and run through install the pushing materials screw rod, and the one end of pushing materials screw rod is rotated through the bearing and is connected in the push pedal, and the terminal surface horizontal fixation of push pedal has the third slide bar to run through pushing away the frame and be used for guiding the push pedal translation.
Compared with the prior art, the invention has the beneficial effects that:
(1) When the device is used, the graphite boat is driven to ascend in the vertical direction by the feeding device and reaches the top plate of the chassis, then the graphite boat is placed on the bearing sliding frame, and then the silicon wafer is uniformly clamped and laid aside from the graphite boat by the clamping piece device, so that the clamping and use are convenient;
(2) The supporting device comprises a chassis and a top plate, wherein the top surface of the chassis is horizontally fixed with the top plate, one side of the top surface of the top plate penetrates through the bottom surface to horizontally provide a plurality of sliding grooves, a bearing sliding frame for bearing a graphite boat is horizontally and slidably arranged in the sliding grooves, the other side of the top surface of the top plate is fixedly provided with a plurality of placing frames for containing silicon wafers, a plurality of first air cylinders are horizontally and fixedly arranged in the chassis, and the output ends of the first air cylinders are connected to the bottom end surface of the bearing sliding frame, so that the graphite boat is conveniently driven to slide and transport by the first air cylinders, and later movement is convenient for heating and loading the silicon wafers;
(3) During use, the translation screw rod is driven by the fourth motor to rotate so as to drive the lifting assembly to horizontally slide on the movable plate, the position of the clamping silicon wafer is adjusted, then the second cylinder is used for vertically pushing the sliding block to vertically slide in the sliding frame plate, the height of the clamping pieces is adjusted, then the suction cups on the clamping pieces on the clamping piece assembly are utilized, the suction pump is started to communicate with the suction cups through the suction pipes, negative pressure is generated to adsorb the silicon wafer on the clamping pieces, and then the rotating assembly is utilized to drive the driving gear to rotate in cooperation with the driven gear on the rotating shaft through the first motor, so that the clamping direction is changed, multidirectional clamping adjustment is realized, and the clamping flexibility is improved.
(4) When the graphite boat is used, the transfer plate bears and carries the graphite boat to reach the stripping frame, then the pushing plate is pushed by manual rotation of the pushing screw rod to horizontally slide, the graphite boat is pushed to slide on the transfer plate, the graphite boat is pushed to be sent to the material supporting frame, then the third motor drives the material supporting screw rod to rotate, the material supporting frame is driven to rise in the vertical direction, the graphite boat reaches the top plate of the chassis, and then the graphite boat is placed on the bearing sliding frame.
(5) When the graphite boat is used, the graphite boat is placed on the top plate of the movable frame and moves to the feeding position of the supporting device, then the fifth cylinder is started to drive the sliding block seat to slide on the sliding strip, the sliding block seat is enabled to move to the position right above the graphite boat, then the fourth cylinder is started to drive the sliding strip to move downwards towards the graphite boat, then the clamping frame clamps two ends of the graphite boat under the driving of the sixth cylinder, and the sliding block moves to the top plate of the chassis.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some examples of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view showing the overall structure of a first embodiment of a graphite boat transfer apparatus;
FIG. 2 is a schematic view showing an overall exploded structure of a first embodiment of a graphite boat transfer device;
FIG. 3 is a schematic view of an exploded construction of a support device in an embodiment of a graphite boat transfer device;
FIG. 4 is a schematic diagram showing an exploded structure of a material supporting frame in a loading device of a first embodiment of a graphite boat transfer device;
FIG. 5 is a schematic view showing an exploded structure of a clip assembly in an embodiment of the graphite boat transporting apparatus;
FIG. 6 is a schematic view of an exploded view of a rotating assembly of an embodiment of a graphite boat transfer apparatus;
FIG. 7 is a schematic view of an exploded view of the lift assembly of the graphite boat transfer apparatus embodiment;
FIG. 8 is a schematic view of an exploded view of a clip assembly of an embodiment of a graphite boat transfer device;
FIG. 9 is a schematic view showing an exploded structure of a transfer plate in a loading apparatus of a first embodiment of a graphite boat transfer apparatus;
FIG. 10 is a schematic view showing the overall structure of a second embodiment of a graphite boat transfer apparatus;
FIG. 11 is a schematic exploded view of a loading apparatus in a second embodiment of a graphite boat transfer apparatus;
FIG. 12 is an exploded view of the clamping assembly of the graphite boat transfer apparatus embodiment.
In the figure: 1. a support device; 11. a chassis; 12. a top plate; 13. a chute; 14. a carrying carriage; 15. a first cylinder; 16. placing a frame; 2. a clip device; 21. a moving plate; 22. a first slide bar; 23. a bearing seat; 24. translating the screw; 25. a rotating assembly; 251. a movable seat; 252. a first slide cylinder; 253. translating the screw cylinder; 254. a rotating shaft; 255. a first motor; 256. a drive gear; 257. a driven gear; 26. a lifting assembly; 261. a sliding frame plate; 262. a slide block; 263. a second cylinder; 264. a second motor; 265. a rotating frame; 266. a horizontal pushing cylinder; 267. a telescopic rod; 268. a flat push plate; 27. a clip assembly; 271. a clamping plate; 272. an assembling groove; 273. a slide; 274. a clamping piece; 275. a fixing bolt; 276. positioning screw holes; 277. a suction cup; 278. a suction pipe; 279. a suction pump; 31. a material supporting frame; 32. a material supporting screw; 321. a third motor; 33. a material supporting slide plate; 331. a material supporting screw cylinder; 332. a second slide bar; 34. a material supporting frame; 341. a second slide cylinder; 342. a baffle; 343. a third cylinder; 35. a transfer plate; 351. a roller; 36. a frame is supported; 361. a guide wheel; 37. pushing a frame; 38. a push plate; 381. a third slide bar; 39. a pushing screw; 41. a moving rack; 42. a top plate; 43. a clamping assembly; 431. a slide bar; 432. a support plate; 433. a fourth cylinder; 434. a fourth slide bar; 435. a fifth cylinder; 436. a slider seat; 437. a clamping frame; 438. and a sixth cylinder.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.
Example 1:
referring to fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, fig. 6, fig. 7, fig. 8 and fig. 9, a graphite boat transfer device comprises a support device 1 for bearing a graphite boat, a clamping piece device 2 for clamping silicon wafers and a feeding device for lifting and moving the graphite boat to the support device 1, wherein the clamping piece device 2 is arranged on one side of the top surface of the support device 1, the front part of the support device 1 is provided with the feeding device, the clamping piece device 2 comprises a moving plate 21, a rotating component 25, a lifting component 26 and a clamping piece component 27, wherein the rotating component 25 for steering is arranged right above the moving plate 21, the lifting component 26 is vertically arranged on the top of the rotating component 25, the lifting component 26 is horizontally arranged on the lifting component 27 for clamping the silicon wafers, the graphite boat is driven to lift in the vertical direction by the feeding device to the top plate 12 of the support device 11, then the graphite boat is placed on a bearing carriage 14, and then the clamping piece is uniformly clamped by the clamping piece device 2 from the graphite, so that the subsequent clamping is convenient, and the silicon wafer can be used, and the position of the silicon wafer boat can be better clamped and the angle can be adjusted according to the position of the graphite boat.
Referring to fig. 3, the supporting device 1 includes a chassis 11 and a top plate 12, wherein the top surface of the chassis 11 is horizontally fixed with the top plate 12, one side of the top surface of the top plate 12 is horizontally provided with a plurality of sliding grooves 13 penetrating through the bottom surface, the sliding grooves 13 are horizontally slidably provided with a carrying carriage 14 for carrying a graphite boat, the other side of the top surface of the top plate 12 is fixed with a plurality of placing frames 16 for carrying silicon wafers, the inside of the chassis 11 is horizontally and fixedly provided with a plurality of first cylinders 15, and the output ends of the first cylinders 15 are connected to the bottom end surface of the carrying carriage 14, so that the graphite boat is conveniently driven to slide and transport by the first cylinders 15, and later movement is convenient for heating and loading the silicon wafers.
Referring to fig. 5, 6, 7 and 8, a moving plate 21 is horizontally fixed on the rear end face of a top plate 12, two first sliding rods 22 are horizontally fixed on the top face of the moving plate 21, through grooves are formed in the middle of the top face of the moving plate 21 in a penetrating manner, bearing seats 23 are vertically fixed on two ends of the bottom face of the moving plate 21, a translation screw 24 is rotatably connected between the bearing seats 23 through bearings, a fourth motor for driving the translation screw 24 is horizontally installed on the bearing seat 23 at one end of the moving plate 21, the translation screw 24 is driven to rotate by the fourth motor, a rotating assembly 25 comprises a moving seat 251, the moving seat 251 is horizontally arranged right above the moving plate 21, a first sliding cylinder 252 sleeved on the first sliding rod 22 is horizontally fixed on the bottom face of the moving seat 251, a translation screw 253 is horizontally fixed in the through groove vertically penetrating downwards on the moving plate 21 in the middle of the bottom face of the moving seat 251, the translation screw 253 and the translation screw 24 are in threaded through fit connection, a rotating shaft 254 is vertically and upwards connected to the top surface of the moving seat 251 through a bearing, a driven gear 257 is horizontally arranged on the rotating shaft 254, a first motor 255 is vertically and upwards arranged on the top surface of the moving seat 251, a driving gear 256 meshed with the driven gear 257 is arranged at the output end of the first motor 255, the lifting assembly 26 comprises a sliding frame plate 261, a sliding block 262 and a flat pushing plate 268, the sliding frame plate 261 is vertically arranged right above the moving seat 251, the bottom surface of the sliding frame plate 261 is fixedly connected with the top surface of the rotating shaft 254, a sliding block 262 is vertically and slidingly arranged in the sliding frame plate 261, one end of the sliding block 262 is rotationally provided with a flat pushing plate 268 for installing the clamping piece assembly 27, a second cylinder 263 is vertically and downwards arranged at the top of the sliding frame plate 261, and the output end of the second cylinder 263 is connected to the sliding block 262, the other end of the slide block 262 is horizontally provided with a second motor 264, a rotating frame 265 is arranged between the flat push plate 268 and the slide block 262, a rotating rod on the rotating frame 265 is connected on the slide block 262 in a penetrating and rotating way through a bearing, the end part of the rotating rod on the rotating frame 265 is connected with the output end of the second motor 264, one end of the rotating frame 265 close to the flat push plate 268 is horizontally fixed with a flat push cylinder 266, the other end of the flat push cylinder 266 is fixed on the flat push plate 268, a telescopic rod 267 is arranged between the flat push plate 268 and the slide block 262, two ends of the telescopic rod 267 are respectively fixed on the end surfaces of the flat push plate 268 adjacent to the slide block 262, the telescopic rod 267 is equivalent to a sliding guide rod, a clamping piece assembly 27 comprises a clamping plate 271 and a clamping piece 274, wherein the clamping plate 271 is horizontally arranged, one end of the clamping plate 271 is fixed on the flat push plate 268, a splicing groove 272 is penetrated and a plurality of sliding seats 273 are arranged on the top surface of the clamping plate 271 along the horizontal direction, the plurality of sliding seats 273 are slidably arranged in the assembling grooves 272 on the clamping plates 271, clamping pieces 274 are vertically and downwards fixed on the bottom surfaces of the plurality of sliding seats 273, a plurality of positioning screw holes 276 are vertically formed in the top surfaces of the clamping plates 271 along the horizontal direction, fixing bolts 275 are vertically and downwards threaded on the sliding seats 273 to penetrate through, the fixing bolts 275 are matched with the positioning screw holes 276 for installing the sliding seats 273 on the clamping plates 271, sucking discs 277 are respectively installed on the clamping pieces 274 in a penetrating manner, suction pipes 278 are communicated on the sucking discs 277, suction pumps 279 are horizontally fixed on the clamping plates 271, air inlets of the suction pumps 279 are communicated with air inlet pipes, the air inlet pipes of the suction pumps 279 are communicated with the suction pipes 278, when the sliding frame plates 261 are used, the sliding frame plates 261 are vertically pushed by using second cylinders 263 to vertically push sliding blocks 262 to horizontally slide on the sliding frame plates 21 through fourth motor driving translation screw rods 24 to horizontally slide silicon wafer clamping plates 276, the height of clamping piece is adjusted, then utilize sucking disc 277 on a plurality of clamping pieces 274 on the clamping piece subassembly 27, start suction pump 279 and communicate sucking disc 277 through straw 278, produce negative pressure absorption silicon chip on clamping piece 274, then utilize rotating assembly 25 to drive driving gear 256 cooperation pivot epaxial driven gear 257 through first motor 255 and rotate, thereby change the direction of centre gripping, and then realize multi-direction centre gripping regulation, improve the flexibility of centre gripping, can prevent through setting up second motor 264 that straw 278 from getting into touching when placing the silicon chip and place frame 16 by adjustment angle. In this embodiment, two placement frames 16 are provided, corresponding to two graphite boats, and the clamping object of the clamping piece assembly 27 can be selected by providing a horizontal pushing cylinder 266 and a telescopic rod 267.
Referring to fig. 2, 4 and 9, the loading device comprises a material supporting frame 31 for lifting the graphite boat for loading and a transferring plate 35 for transferring the graphite boat, wherein the material supporting frame 31 is vertically fixed on the front end surface of the chassis 11, the front part of the material supporting frame 31 is provided with the transferring plate 35, two sides of the material supporting frame 31 vertically penetrate through the vertical end surfaces to form a slideway, the middle part of the material supporting frame 31 is vertically and rotatably connected with a material supporting screw rod 32 through a bearing, the bottom surface of the material supporting frame 31 is vertically fixed with a third motor 321, the output end of the third motor 321 is connected on the bottom end rotating shaft of the material supporting screw rod 32, a material supporting sliding plate 33 is vertically and slidably arranged in the slideway of the material supporting frame 31, the middle part of the material supporting sliding plate 33 vertically penetrates through a material supporting screw cylinder 331 fixed with a screw matched material supporting screw rod 32, the front end surface of the material supporting sliding plate 33 is horizontally fixed with a second sliding rod 332, and a material supporting frame 34 is horizontally arranged right above the second slide bar 332 in a sliding way, a second sliding cylinder 341 sleeved on the second slide bar 332 is horizontally fixed on the bottom surface of the material supporting frame 34, two ends of the top surface of the material supporting frame 34 are vertically fixed with a baffle plate 342, a third air cylinder 343 used for compressing a graphite boat is horizontally fixed on the baffle plate 342, a roller 351 is arranged on the bottom surface of the transfer plate 35, a plurality of support frames 36 are uniformly fixed on the top surface of the transfer plate 35 along the horizontal direction, a plurality of guide wheels 361 are horizontally and rotatably connected in the plurality of support frames 36, a pushing frame 37 is vertically and upwardly fixed on the front end of the top surface of the transfer plate 35, a push plate 38 is arranged on one side of the pushing frame 37 close to the transfer plate 35, a pushing screw 39 is horizontally and rotatably arranged on the pushing frame 37 in a penetrating way, one end of the pushing screw 39 is rotatably connected on the push plate 38 through a bearing, a third slide bar 381 is horizontally fixed on one end surface of the push plate 38 in a penetrating way, and is used for guiding the pushing plate 38 to translate, when the graphite boat carrying machine is used, the transfer plate 35 carries and carries the graphite boat to reach the stripping frame 31, then the pushing plate 38 is horizontally pushed by manual rotation of the pushing screw 39 to horizontally slide, the graphite boat is pushed to slide on the transfer plate 35, the graphite boat is pushed to be sent into the material supporting frame 34, then the third motor 321 drives the material supporting screw 32 to rotate, the material supporting frame 34 is driven to ascend in the vertical direction, the graphite boat reaches the top plate 12 of the machine case 11, and then the graphite boat is placed on the carrying carriage 14.
Working principle: when the device is used, the transfer plate 35 on the feeding device is used for bearing and carrying the graphite boat to reach the stripping frame 31, then the pushing plate 38 is pushed by manually rotating the pushing screw 39 horizontally to slide horizontally, the graphite boat is pushed to slide on the transfer plate 35, the graphite boat is pushed to be sent into the material supporting frame 34, then the third motor 321 drives the material supporting screw 32 to rotate, the material supporting frame 34 is driven to ascend in the vertical direction, the graphite boat reaches the top plate 12 of the chassis 11, then the graphite boat is placed on the bearing sliding frame 14, and then the silicon wafer is uniformly clamped and paved in the placing frame 16 by using the clamping piece device 2, so that the silicon wafer is convenient to clamp and use.
Example 2:
the device provided in the embodiment of the present invention has the same implementation principle and technical effects as those of embodiment 1, and for brevity, reference may be made to the corresponding contents of embodiment 1.
Referring to fig. 10, 11 and 12, the feeding device comprises a moving frame 41 and a clamping assembly 43, the moving frame 41 comprises a bottom plate and a top plate 42, the top plate 42 is fixed right above the bottom plate through a plurality of vertical rods, rollers are mounted on the bottom surface of the bottom plate, the clamping assembly 43 comprises a horizontally arranged slide bar 431, the slide bar 431 is arranged right above the top plate 42, a supporting plate 432 is vertically fixed at the front end of the top plate 42, a fourth air cylinder 433 is vertically fixed on the top surface of the supporting plate 432, the output end of the fourth air cylinder 433 is connected to the bottom surface of the slide bar 431, a fourth sliding rod 434 is vertically fixed downwards at the bottom surface of the end part of the slide bar 431, the fourth sliding rod 434 vertically penetrates through the supporting plate 432, a slide seat 436 is connected to the slide bar 431 in a sliding mode, one end of the slide bar 431 is horizontally fixed with a fifth air cylinder 435, the output end of the fifth air cylinder 435 is connected to the slide seat 436, two ends of the slide seat 436 are both sides of the slide frame 437 are horizontally fixed with a clamping frame 437, the output end of the sixth air cylinder 438 is connected to the top surface of the slide frame, the fourth air cylinder 433 is vertically fixed on the top surface of the slide frame, the fourth air cylinder 433 is vertically upwards fixed on the top surface of the top plate, the top surface of the slide frame is vertically fixed on the top surface of the slide frame, the fourth sliding frame is vertically arranged on the bottom surface of the slide bar 431, the bottom surface is vertically fixed on the top surface of the top plate by the top plate, and the slide frame 437 is vertically and is vertically fixed on the top of the slide frame, and is vertically above the slide frame and is vertically moved to the top by the slide frame and is vertically and moved to the top by the slide frame and is moving to the top and to the graphite frame and to the top and the graphite frame.
Working principle: when the device is used, a graphite boat is placed on the top plate 42 of the movable frame 41 and moves to the feeding position of the supporting device 1, then the fifth air cylinder 435 is started to drive the slide block seat 436 to slide on the slide bar 431, the slide block seat 436 is enabled to move right above the graphite boat, then the fourth air cylinder 433 is started to drive the slide bar 431 to move downwards towards the graphite boat, then the clamping frame 437 clamps two ends of the graphite boat under the driving of the sixth air cylinder 438, slides to the top plate 12 of the case 11, then the graphite boat is placed on the bearing sliding frame 14, and then the silicon wafer is uniformly clamped and paved in the placing frame 16 by using the clamping piece device 2, so that the clamping and the use are convenient.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, and various modifications and variations may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A graphite boat transfer device, characterized in that: comprises a supporting device (1) for bearing a graphite boat, a clamping piece device (2) for clamping a silicon wafer and a feeding device for lifting the moving graphite boat to the supporting device (1), wherein the clamping piece device (2) is arranged on one side of the top surface of the supporting device (1), the feeding device is arranged at the front part of the supporting device (1), the clamping piece device (2) comprises a moving plate (21), a rotating assembly (25), a lifting assembly (26) and a clamping piece assembly (27), the rotating assembly (25) for steering is arranged right above the moving plate (21),
the top of the rotating assembly (25) is vertically upwards provided with a lifting assembly (26), and the lifting assembly (26) is horizontally provided with a clamping piece assembly (27) for clamping the silicon wafer; the movable plate (21) is horizontally fixed on the rear end face of the top plate (12), two first sliding rods (22) are horizontally fixed on the top face of the movable plate (21), through grooves are formed in the middle of the top face of the movable plate (21) in a penetrating mode, bearing seats (23) are vertically fixed at two ends of the bottom face of the movable plate (21), translation screws (24) are rotatably connected between the bearing seats (23) through bearings, and a fourth motor for driving the translation screws (24) is horizontally installed on the bearing seats (23) at one end of the movable plate (21); the rotating assembly (25) comprises a moving seat (251), the moving seat (251) is horizontally arranged right above the moving plate (21), a first sliding cylinder (252) which is sleeved on the first sliding rod (22) in a sliding manner is horizontally fixed on the bottom surface of the moving seat (251), a translation screw cylinder (253) is horizontally fixed in a through groove which vertically penetrates through the moving plate (21) downwards in the middle of the bottom surface of the moving seat (251), the translation screw cylinder (253) is in threaded through fit connection with the translation screw (24), a rotating shaft (254) is vertically and upwards connected to the top surface of the moving seat (251) through a bearing in a rotating manner, a driven gear (257) is horizontally arranged on the rotating shaft (254), a first motor (255) is vertically and upwards arranged on the top surface of the moving seat (251), and a driving gear (256) meshed with the driven gear (257) is arranged at the output end of the first motor (255). The lifting assembly (26) comprises a sliding frame plate (261), a sliding block (262) and a flat pushing plate (268), wherein the sliding frame plate (261) is vertically arranged right above the movable seat (251), the bottom surface of the sliding frame plate (261) is fixedly connected with the top surface of the rotating shaft (254), the sliding block (262) is vertically and slidably arranged in the sliding frame plate (261), one end of the sliding block (262) is rotatably provided with the flat pushing plate (268) for installing the clamping piece assembly (27), the top of the sliding frame plate (261) is vertically and downwardly provided with a second air cylinder (263), the output end of the second air cylinder (263) is connected to the sliding block (262), and the other end of the sliding block (262) is horizontally provided with a second motor (264); the clamping piece assembly (27) comprises a clamping plate (271) and a clamping piece (274), wherein the clamping plate (271) is horizontally arranged, one end of the clamping plate (271) is fixed on the flat push plate (268), an assembling groove (272) is formed in the clamping plate (271) in a penetrating mode, a plurality of sliding seats (273) are arranged on the top surface of the clamping plate (271) along the horizontal direction, the sliding seats (273) are slidably arranged in the assembling groove (272) on the clamping plate (271), and the clamping piece (274) is vertically downwards fixed on the bottom surface of the sliding seats (273); be provided with revolving rack (265) between Ping Tuiban (268) and slider (262), and the dwang on revolving rack (265) runs through the rotation through bearing and connects on slider (262), and the dwang tip on revolving rack (265) is connected with the output of second motor (264), and the one end level that revolving rack (265) is close to flat push pedal (268) is fixed with second cylinder (263), and the other end of second cylinder (263) is fixed on flat push pedal (268), there is telescopic link (267) between Ping Tuiban (268) and slider (262), and on the terminal surface that both ends of telescopic link (267) are fixed respectively adjacent with flat push pedal (268) and slider (262).
2. The graphite boat transfer apparatus as claimed in claim 1, wherein the supporting apparatus (1) comprises a case (11) and a top plate (12), wherein the top surface of the case (11) is horizontally fixed with the top plate (12), a plurality of sliding grooves (13) are horizontally provided through the bottom surface on one side of the top surface of the top plate (12), a carrying carriage (14) for carrying a graphite boat is horizontally slidably mounted in each of the plurality of sliding grooves (13), a plurality of placing frames (16) for holding silicon wafers are fixed on the other side of the top surface of the top plate (12), a plurality of first cylinders (15) are horizontally and fixedly mounted in the case (11), and the output ends of the plurality of first cylinders (15) are connected to the bottom end surface of the carrying carriage (14).
3. The graphite boat transfer apparatus as set forth in claim 1, wherein a plurality of positioning screw holes (276) are vertically provided on the top surface of the clamping plate (271) in the horizontal direction, fixing bolts (275) are provided on the sliding seat (273) by penetrating through the vertical downward screw threads, and the fixing bolts (275) are used for installing the sliding seat (273) on the clamping plate (271) in cooperation with the positioning screw holes (276), suction cups (277) are provided on the clamping plate (274) by penetrating through, suction pipes (278) are communicated with the suction cups (277), suction pumps (279) are horizontally fixed on the clamping plate (271), air inlets of the suction pumps (279) are communicated with air inlet pipes, and the air inlet pipes of the suction pumps (279) are communicated with the suction pipes (278).
4. The graphite boat transfer apparatus as claimed in claim 1, wherein the loading apparatus comprises a material supporting frame (31) for lifting the graphite boat for loading and a transfer plate (35) for transferring the graphite boat, wherein the material supporting frame (31) is vertically fixed on the front end face of the chassis (11), the transfer plate (35) is arranged at the front part of the material supporting frame (31), slides are vertically and penetratingly arranged on the vertical end faces of the two sides of the material supporting frame (31), the middle part of the material supporting frame (31) is vertically and rotatably connected with a material supporting screw (32) through bearings, a third motor (321) is vertically fixed on the bottom surface of the material supporting frame (31), the output end of the third motor (321) is connected to the bottom end rotating shaft of the material supporting screw (32), a material supporting slide plate (33) is vertically and slidably arranged in the slides of the material supporting frame (31), a material supporting screw cylinder (331) is vertically and penetratingly fixed with the material supporting screw (32), a second slide rod (332) is horizontally and fixedly arranged on the front end face of the material supporting frame (33), a second slide rod (332) is horizontally fixed on the front end face of the material supporting frame (33), a second slide rod (34) is fixedly arranged on the top face of the second slide rod (34), and a third cylinder (343) for pressing the graphite boat is horizontally fixed on the baffle plate (342).
5. The graphite boat transferring apparatus as set forth in claim 4, wherein rollers (351) are installed on the bottom surface of the transfer plate (35), a plurality of supporting frames (36) are uniformly fixed on the top surface of the transfer plate (35) along the horizontal direction, a plurality of guide wheels (361) are horizontally rotatably connected in the plurality of supporting frames (36), a pushing frame (37) is vertically and upwardly fixed at the front end of the top surface of the transfer plate (35), a pushing plate (38) is arranged on one side of the pushing frame (37) close to the transfer plate (35), a pushing screw (39) is horizontally threaded on the pushing frame (37) and penetrates through the pushing screw (39), one end of the pushing screw (39) is rotatably connected to the pushing plate (38) through a bearing, and a third sliding rod (381) is horizontally fixed on one end surface of the pushing plate (38) and penetrates through the pushing frame (37) for guiding the pushing plate (38) to translate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211045436.3A CN115367470B (en) | 2022-08-30 | 2022-08-30 | Graphite boat transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211045436.3A CN115367470B (en) | 2022-08-30 | 2022-08-30 | Graphite boat transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115367470A CN115367470A (en) | 2022-11-22 |
| CN115367470B true CN115367470B (en) | 2023-10-13 |
Family
ID=84070585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211045436.3A Active CN115367470B (en) | 2022-08-30 | 2022-08-30 | Graphite boat transfer device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115367470B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117302959A (en) * | 2023-11-28 | 2023-12-29 | 浙江晶盛机电股份有限公司 | Conveying equipment, cleaning device, cleaning system and graphite boat cleaning method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006005198A (en) * | 2004-06-18 | 2006-01-05 | Hitachi Kokusai Electric Inc | Apparatus for manufacturing semiconductor |
| CN103681420A (en) * | 2013-11-22 | 2014-03-26 | 中国电子科技集团公司第四十八研究所 | Automatic mounting and detaching system for silicon wafers of graphite boat for tube plasma enhanced chemical vapor deposition (PECVD) |
| CN104377154A (en) * | 2014-11-03 | 2015-02-25 | 江阴方艾机器人有限公司 | Pipe-type PECVD graphite boat assembling and disassembling piece system and process |
| CN106282971A (en) * | 2016-08-19 | 2017-01-04 | 湖南红太阳光电科技有限公司 | Automatic loading and unloading system and method thereof for multitube PECVD device |
| CN213816101U (en) * | 2021-01-18 | 2021-07-27 | 苏州映真智能科技有限公司 | Double-graphite-boat taking and placing sheet positioning mechanism |
| CN215799879U (en) * | 2021-06-20 | 2022-02-11 | 无锡鼎桥新能源科技有限公司 | Graphite boat for solar cell coating |
| CN216803441U (en) * | 2022-01-20 | 2022-06-24 | 广州正东机械有限公司 | Rotatable manipulator with double chucks |
-
2022
- 2022-08-30 CN CN202211045436.3A patent/CN115367470B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006005198A (en) * | 2004-06-18 | 2006-01-05 | Hitachi Kokusai Electric Inc | Apparatus for manufacturing semiconductor |
| CN103681420A (en) * | 2013-11-22 | 2014-03-26 | 中国电子科技集团公司第四十八研究所 | Automatic mounting and detaching system for silicon wafers of graphite boat for tube plasma enhanced chemical vapor deposition (PECVD) |
| CN104377154A (en) * | 2014-11-03 | 2015-02-25 | 江阴方艾机器人有限公司 | Pipe-type PECVD graphite boat assembling and disassembling piece system and process |
| CN106282971A (en) * | 2016-08-19 | 2017-01-04 | 湖南红太阳光电科技有限公司 | Automatic loading and unloading system and method thereof for multitube PECVD device |
| CN213816101U (en) * | 2021-01-18 | 2021-07-27 | 苏州映真智能科技有限公司 | Double-graphite-boat taking and placing sheet positioning mechanism |
| CN215799879U (en) * | 2021-06-20 | 2022-02-11 | 无锡鼎桥新能源科技有限公司 | Graphite boat for solar cell coating |
| CN216803441U (en) * | 2022-01-20 | 2022-06-24 | 广州正东机械有限公司 | Rotatable manipulator with double chucks |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115367470A (en) | 2022-11-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN115367470B (en) | Graphite boat transfer device | |
| CN219620303U (en) | Motor shaft polishing and transferring device | |
| CN215318016U (en) | Multi-station positioning and clamping device for machining heat preservation pipe | |
| CN218087856U (en) | Glass-cutting transfer device | |
| CN208117315U (en) | A kind of fixed device of door of elevator processing | |
| CN116214636A (en) | Intelligent sawing machine | |
| CN114013490B (en) | Solar cell panel long-distance transportation device | |
| CN213293798U (en) | Keyboard backlight board carries detection device | |
| CN213383085U (en) | Automotive interior device of borduring | |
| CN113352096A (en) | Equipment for assembling accessories of carrying equipment | |
| CN108247332B (en) | Plastic fuel tank oil pump assembly production line | |
| CN210281196U (en) | Carriage weldment work platform | |
| CN216998179U (en) | Double-station glass cutting device | |
| CN214816942U (en) | Auxiliary carrying equipment for pipe fitting cutting equipment | |
| CN219771157U (en) | Full-automatic glass loading table | |
| CN219189913U (en) | Positioning tool for equipment maintenance | |
| CN220145718U (en) | A quick clamping device for glass processing | |
| CN219620335U (en) | Automatic plate supply device of printing machine | |
| CN221293667U (en) | Adjustable mechanical equipment carrying device | |
| CN112499548B (en) | Virus sampling pipe closing cap device | |
| CN218747339U (en) | Quick reverse side positioning fixture | |
| CN219168843U (en) | Lifting assembly of UV light curing machine | |
| CN219837415U (en) | Component assembling tool | |
| CN219802684U (en) | 5G circuit board processing positioning mechanism | |
| CN218657989U (en) | Last unloading workstation of engraver |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |