CN115365834A - Ultra-high purity stainless steel pipe production line for semiconductor preparation device - Google Patents
Ultra-high purity stainless steel pipe production line for semiconductor preparation device Download PDFInfo
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- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
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Abstract
The invention discloses an ultra-high-purity stainless steel pipe production line for a semiconductor preparation device, which comprises a first production area, a second production area, a third production area, a first transverse moving area and a second transverse moving area, wherein the first production area comprises a finish rolling pipe device, an internal and external degreasing device, a bright heat treatment device, a straightening device and a head aligning device, the second production area comprises a precision polishing device, a surface inspection table and an ultrasonic vortex combined nondestructive inspection device, and the third production area comprises an electrolytic polishing and cleaning device, a purifying and cleaning device, a blowing and drying device and a packaging device. Through the mode, the automatic equipment is combined with the intelligent conveying device among the processes to form a basic intelligent production line, so that the processes are smooth, the pipeline connecting line is short, the crossing and circuitous back and forth of the production processes are avoided, the semiconductor preparation device is manufactured by the ultra-high pure stainless steel tube and continuously produces in the whole process, and the efficient operation of the whole production process is ensured.
Description
Technical Field
The invention relates to the field of stainless steel pipe production equipment, in particular to an ultra-high purity stainless steel pipe production line for a semiconductor preparation device.
Background
The advanced process improves the purity of the wafer production environment again, so as to ensure that the semiconductor chips are not polluted and improve the production yield. Going from 28 nm to 7 nm, the metal impurities required for the gas transport pipeline must be reduced by a factor of 100 or even less. The thin film layer of the wafer manufactured by the advanced process of 14 nanometers and below is very thin, is very sensitive to oxygen and is very easy to oxidize, so that the requirement on the cleanliness of a 316L stainless steel seamless tube manufactured by the wafer and used for conveying special gas is higher. Meanwhile, the ultra-high-purity 316L stainless steel seamless tube has a complex production process flow. The whole production process of the stainless steel pipe at present mainly adopts single machine operation as discrete production, and the material transfer difficulty between discrete production procedures is higher. Meanwhile, a large amount of various ultra-clean high-purity special gases are required to be used in the production process of semiconductor precision devices, the purity degree of the gases has great influence on the quality and the performance of semiconductor products, and the extremely high smoothness and the excellent wear-resisting and corrosion-resisting characteristics of the inner surface of the stainless steel tube need to be ensured in order to ensure the cleanness degree of the conveying gases. Therefore, starting from the design of the production line, the process flow of the production line is reasonably arranged, the stainless steel pipe is efficiently and stably produced, the loss in the production and circulation process is reduced, and the method is particularly important for the industrialized production of the ultra-high-purity stainless steel pipe for the semiconductor preparation device.
The ultra-pure stainless steel seamless tube production line for the semiconductor preparation device meets the requirements that the content of ferrite of an AISI 316L stainless steel seamless tube is controlled to be less than or equal to 1%, the purity of non-metallic inclusions is ultra-pure, the grain size is controlled to be 5-grade or even finer, a complete austenite structure is uniform and consistent, the roughness of the inner surface of the tube is Ra0.13-0.20 mu m, the Cr/Fe ratio is more than 1.5, the CrOX/FeOx ratio is more than 2:1, and the mechanical property, the intergranular corrosion property, the fatigue property and the like are taken into consideration simultaneously through the high-quality production of the production line. The outer diameter of the steel pipe is 9.53mm 0.89mm-76.2mm 2.54mm, the tolerance of the outer diameter is +/-0.02 mm-0.05 mm, the tolerance of the wall thickness is +/-10%, the straight line is less than 0.2mm/m, the length is less than or equal to 12m and other technical index requirements. Therefore, the whole finish-rolled pipe processing needs to be based on the existing pipe blank preparation of enterprises, and advanced automatic process equipment and automatic process online devices for finish-rolled pipe, degreasing, solution heat treatment, precision straightening, ultrasonic eddy-current combined flaw detection, electrolytic polishing, purification and the like are arranged. Basic industrial production process technology and flow are established, so that the process production line is reasonable in layout. The continuous and stable production is realized, the crossing and the roundabout of the production process are reduced, and the automation level and the production efficiency of the production line are improved.
Disclosure of Invention
The invention mainly solves the technical problem of providing an ultra-high purity stainless steel tube production line for a semiconductor preparation device, which combines automatic equipment with an intelligent conveying device between processes to form a basic intelligent production line, so that the processes are smooth, the pipeline connecting line is short, the crossing and circuitous reciprocating of the production processes are avoided, the ultra-high purity stainless steel tube for the semiconductor preparation device is manufactured in a whole continuous production process, and the efficient operation of the whole production process is ensured.
In order to solve the technical problems, the invention adopts a technical scheme that: the production line comprises a first production area, a second production area and a third production area which are arranged in parallel, wherein the left sides of the first production area and the second production area are communicated through a first transverse moving area, the right sides of the second production area and the third production area are communicated through a second transverse moving area, the right end of the first production area is a pipe blank inlet, and the left end of the third production area is an outlet of a finished product ultra-high purity stainless steel pipe;
the first production area comprises a finish rolling pipe device, an inner and outer degreasing device, a bright heat treatment device and a straightening device which are sequentially arranged from right to left, a pipe blank fed into the first production area is fed into the first transverse moving area after passing through a rough rolling pipe and a precision rolling pipe, outer wall degreasing and inner wall degreasing, a bright solution heat treatment furnace and straightening treatment, and then enters the second production area through the first transverse moving area;
the second production area comprises a saw cutting device, a precision polishing device, a surface inspection table and an ultrasonic eddy current combined nondestructive inspection device which are sequentially arranged from left to right, the pipe blank sent into the second production area is sent into the second transverse moving area after being subjected to saw cutting, trimming, polishing, surface inspection and nondestructive inspection, and the stainless steel pipe is sent into the third production area through the second transverse moving area;
the third production area comprises an electrolytic polishing cleaning device, a purifying cleaning device, a blowing and drying device and a packaging device, and the stainless steel pipe fed into the second production area is conveyed into a warehouse after being subjected to electrolytic polishing cleaning, purifying cleaning, blowing, drying and packaging.
In a preferred embodiment of the invention, the inner and outer degreasing devices perform degreasing on the outer wall of the tube blank by oil feeding, oil scraping, annular spraying, degreasing liquid scraping, secondary rinsing and water scraping treatment, and then perform inner wall degreasing through inner wall secondary degreasing, secondary rinsing and tube outer wall secondary rinsing.
In a preferred embodiment of the invention, the straightening device is a high-precision straightening machine, the yield strength of a pipe to be straightened after the pipe blank is straightened reaches 200MPa or more, the straightness of the pipe after being straightened is less than 0.10-0.20mm/m, the straightening blind area is controlled to be less than 160mm-300mm, and the straightening speed is 0-30m/min.
In a preferred embodiment of the invention, the ultrasonic eddy current combined nondestructive inspection device performs nondestructive inspection on the steel pipe through an eddy current detection system and a PRP wireless transmission ultrasonic probe rotating body inspection system.
In a preferred embodiment of the invention, the electrolytic polishing cleaning device comprises an electrolytic polishing groove setting area, a material loading and unloading area, a groove type soaking ultrasonic cleaning area, an inner hole washing area, a rinsing area and a blow-drying area, wherein the temperature of an acid liquid is controlled to be 45-60 ℃, the direct current multi-pulse voltage is less than or equal to 30V, and the current density is 5-50A/dm 2 And the electrolytic polishing time is 5 to 15 min.
In a preferred embodiment of the invention, the purification cleaning device comprises a material loading and unloading area, a purification tank area, a tank type soaking ultrasonic cleaning area, an inner hole cleaning area, a rinsing area and a blow-drying area.
In a preferred embodiment of the invention, the blowing and drying device firstly performs blowing on the surface of the pipe in a blowing room, then performs blowing on the inner holes one by high-purity nitrogen, and the nitrogen is filtered by a 0.001-micron filter, so that the content reaches 99.999% and the temperature is 60 +/-5 ℃.
In a preferred embodiment of the invention, the first and second traverse areas include distance block conveyors and belt conveyors.
In a preferred embodiment of the invention, the interiors of the first production area, the second production area and the third production area are communicated with each other through automatic line connecting equipment, and the automatic line connecting equipment comprises a horizontal and lifting conveying plate chain, a conveying roller way, a material shifting mechanism, a conveying V-shaped roller way, a material turning mechanism, a jacking adjusting device, a conveying synchronous belt, a material storage rack and a three-dimensional warehouse.
In a preferred embodiment of the invention, the ultra-high purity stainless steel pipe has an outer diameter of 9.53-76.2mm, a wall thickness of 0.89-2.54mm and a length of 6-12m.
The invention has the beneficial effects that: according to the ultra-high purity stainless steel pipe production line for the semiconductor preparation device, the roller bed device is adopted for parallel transmission in the main process of the manufacturing process, and the bridge type overweight machine is adopted for hoisting and conveying the parts of the ultra-high purity stainless steel pipe, so that the ultra-high purity stainless steel pipe for the semiconductor preparation device is automatically transmitted in the whole process, the full-process intelligent production is basically realized, and the continuous and stable operation of the whole manufacturing process is ensured.
The ultra-high purity stainless steel tube production line for the semiconductor preparation device has the advantages that the process flow is arranged in an S shape, the whole manufacturing process is very smooth, and the crossing and roundabout of the material flows of the products in the manufacturing process are avoided.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:
FIG. 1 is a schematic structural view of a preferred embodiment of an ultra-high-purity stainless steel tube production line for a semiconductor manufacturing apparatus according to the present invention;
FIG. 2 is a schematic view showing the operation of an ultra-high-purity stainless steel pipe production line for a semiconductor manufacturing apparatus;
the parts in the drawings are numbered as follows: 1. the device comprises a fine rolling device, 2 an internal and external degreasing device, 3 a bright heat treatment device, 4 a straightening device, 5 a head aligning device, 6 a precision polishing device, 7 a surface inspection table, 8 an ultrasonic eddy current combined nondestructive inspection device, 9 an electrolytic polishing cleaning device, 10 a purification cleaning device, 11 a blowing and drying device, 12 a packaging device, 13 a first transverse moving area, 14 a second transverse moving area.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below. The structure, proportion, size and the like shown in the drawings are only used for matching with the content disclosed in the specification, so that the person skilled in the art can understand and read the description, and the description is not used for limiting the limit condition of the implementation of the invention, so the method has no technical essence, and any structural modification, proportion relation change or size adjustment still falls within the scope of the technical content disclosed by the invention without affecting the effect and the achievable purpose of the invention. In addition, the terms "upper", "lower", "left", "right" and "middle" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the relative positions may be changed or adjusted without substantial technical changes.
Referring to fig. 1, an ultra-high-purity stainless steel tube production line for a semiconductor manufacturing apparatus includes three adjacent longitudinal bays, and the whole workshop process is arranged in an "S" shape in the iii longitudinal bay. One end of the first longitudinal span area is an inlet of a rough rolling pipe, the other end of the third longitudinal span area, which is opposite to the inlet of the pipe blank, is an outlet of a finished product, and the finished product is blown inside and outside the pipe and is carried out in a clean plant area, so that the product is prevented from being polluted; the upper parts of the longitudinal first span area and the second span area side from the other end of the inlet and the other end of the second longitudinal span area and the third longitudinal span area side are 18m wide steel truss supporting structures, so that the stainless steel pipes are automatically conveyed between the three spans and the inter-span logistics conveying is realized through a transverse conveying plate chain; and the three longitudinal spans are arranged in parallel for transverse transportation, and the transverse hoisting of the local pipes is realized through a gantry type transverse hoisting device arranged above the corresponding station.
The first longitudinal bay comprises: the device comprises a semi-finished pipe blank inlet and storage area, a precision cold pilger mill, an external degreasing device, an internal degreasing device, a roller-bottom type bright solid smelting furnace and a straightening unit. And the pipe is conveyed into a second longitudinal span area by a transverse conveying plate chain from the inlet and storage area of the semi-finished pipe blank, the precision cold pilger mill, the outer degreasing device, the inner degreasing device, the roller-bottom type bright solid smelting furnace and the pipe of the straightening unit.
Sectional conveying roller ways are arranged between the degreasing device outside the first longitudinal span area and the straightening device, so that the pipes in the first longitudinal span area are conveyed among working procedures. And a transverse gantry type pipe hoisting device is arranged above the blanking storage material frame at the rear part of the outer degreasing parts which are arranged in parallel in the first longitudinal span area, the longitudinal length is 13.5m, the transverse length is 22.5m, the pipes rolled by each cold reducing mill are automatically hoisted and transported to a roller way type conveying device, and the pipes are conveyed to an inner degreasing process through the roller way type conveying device. And in the first longitudinal cross-area degreasing process, a transverse gantry type pipe hoisting device is arranged to hoist the pipe on the conveying roller to be soaked in the groove type soaking process to the conveying roller which is arranged to the downward process after the material rack to be washed is overturned to the inner wall cleaning station, the outer wall rinsing and drying station and the material rack to be discharged to the inspection platform, and then the hot air drying to the inner wall is overturned by the transverse chain row machine. The first longitudinal trans-regional full hydrogen bright solution heat treatment process is characterized in that a translation roller way is connected with a feeding table, so that the tubes which are horizontally arranged on the feeding table are conveyed into a furnace through furnace feeding conveying, and the tubes after solution heat treatment are conveyed to a straightening machine feeding table through a furnace roller way type conveying device. In the first longitudinal cross-region straightening process, the pipes are overturned into a straightening protection cylinder one by one from a feeding table, the pipes are fed into a high-precision straightening machine (40 type and 80 type oppositely arranged) by V-shaped rollers at the lower part in the protection cylinder, the pipes are straightened at high precision one by one, and the pipes are conveyed downwards through a conveying plate chain arranged between blanking tables. The output end of the first longitudinal span area is provided with a transverse plate chain type transverse moving device with the length of 13.5m, so that the pipe is transversely conveyed to the second longitudinal span area.
The second bay comprises the working procedures of cutting and aligning, precision polishing equipment, inspection and ultrasonic vortex combined nondestructive inspection, and the pipe processed by the cutting machine, the precision polishing equipment, the inspection and the ultrasonic vortex combined nondestructive inspection equipment is conveyed into the third longitudinal bay by the transverse conveying plate chain.
And a second longitudinal cross-region precision polishing process, which consists of 12-head steel tube automatic external polishing equipment and inner hole polishing equipment, wherein a transverse gantry type tube hoisting device is arranged above the equipment, so that the tubes are transferred to a feeding table of the polishing equipment which is arranged in parallel from a translation roller way on one side, the tubes are turned to a V-shaped feeding roller row one by one, and the polished tubes are turned into a discharging frame. And in the second longitudinal cross-region alignment procedure, the roller type conveying device conveys the pipe to a feeding table in the alignment procedure, turns the pipe to a cutting table one by one, manually finishes two-end cutting and alignment, and then conveys the pipe by a deflection type translation roller arranged on a discharging table. And in the second longitudinal cross-region inspection process, the tubes are arranged on an inspection table through forward and reverse transverse transfer plate chains to carry out macroscopic inspection, component verification and inner hole surface endoscopy on the tubes one by one. And a transverse plate chain conveying device is arranged in a blanking table of the second longitudinal cross-area ultrasonic eddy current combined nondestructive inspection equipment, so that the third longitudinal cross-area of the pipe Ping Yidao is processed.
The third bay comprises the working procedures of electrolytic polishing, cleaning, purification, cleaning, purging and drying inside and outside the pipe and packaging, and the pipe which is subjected to electrolytic polishing, cleaning, purification, cleaning, purging and drying inside and outside the pipe and packaged is sent out from the third longitudinal bay.
And the third longitudinal trans-regional electrolytic polishing process comprises an electrolytic polishing tank region, a material loading and unloading region, an external matched acid and water supply system and the like which are transversely arranged. Cleaning process, transversely arranged tank type soaking ultrasonic cleaning area, inner hole cleaning area, rinsing area, blow-drying station and the like. And a third longitudinal cross-region purification process, which is composed of a purification tank region, a loading and unloading region, an external matched acid and water supply system and the like which are transversely arranged. Purification cleaning process, transversely arranged tank type soaking ultrasonic cleaning area, inner hole cleaning area, rinsing area, blow-drying station and the like. The ultra-high cleanliness test of the pipe conforms to the standard requirement of ASTM912-2002 (2013) for stainless steel passivation determination by an electro-polishing method, and the pipe can be qualified when the numerical values of both ends of the pipe are more than or equal to 18 multiplied by 106 omega cm. The third longitudinal cross-region cleaning process is matched with centralized purified water treatment equipment, and the purified water treatment capacity of the equipment is 18t/h. And logistics in a longitudinal process of the third longitudinal cross-region are conveyed by adopting a sectional type conveying translation roller way, and a nylon roller way on the surface needs to be cleaned regularly. A third longitudinal cross-region inside and outside pipe blowing, drying and packaging process, wherein the air cleanliness meets the grade V and above, finished pipe blowing is completed in a wind spraying room, an inner hole is blown by nitrogen, the nitrogen with the content of 99.999 percent (filtered by a 0.001 mu m filter) is required to be blown in the pipe at the temperature of 60 +/-5 ℃, and the requirement of ultrahigh cleanliness is met; a packaging procedure: the finished product is protected in a double-layer bag, the inner layer is made of a polyethylene dust-free plastic bag, the vacuum degree is controlled to be about 0.02Mpa, the outer layer is made of a polyethylene plastic bag, clean and dry nitrogen is filled in the polyethylene plastic bag, the polyethylene plastic bag is sealed, and the nitrogen pressure is controlled to be 0.1 to 0.3Mpa. The bagged finished product is protected in a special packaging box. The third longitudinal bay is provided with a storage system, a multilayer storage structure and a rail-mounted loading and unloading trolley above the storage rack. The rail flat car is transferred from the clean workshop to a loading and unloading station at one side of the storage warehouse, so that three-dimensional storage is realized. And automatic storage, loading, unloading and delivery are realized.
The width of the first longitudinal span, the width of the second longitudinal span and the width of the third longitudinal span are 24m, and the longitudinal length is 198m.
The production line of the ultra-high clean stainless steel tube for the semiconductor preparation device comprises a precise cold pilger mill, an internal and external degreasing system, a full-hydrogen solution heat treatment furnace, a straightener, a polishing device, equipment such as ultrasonic eddy current combined nondestructive inspection, cleaning and the like, an auxiliary sewage treatment system, an acid supply system, a compressed air supply system, a nitrogen supply system, waste gas treatment system, pure water treatment system, an air spraying system, a purification system and the like, is automatic and digital equipment, is provided with a PLC (programmable logic controller) or CNC (computer numerical control) servo control system, a cutting machine, electrolytic polishing, purification, in-tube blowing and packaging stations are provided with inter-process transmission buttons, and a code-scanning gun arranged at each station tracks materials and is automatically controlled according to the rhythm. The equipment is provided with a jacking adjusting device, a material platform inclined automatic rolling mechanism, a material shifting device and a conveying device, so that the steel pipes are automatically conveyed in the production line through electric control. Remote centralized control can be achieved through the MES system.
The stainless steel tube production line for semiconductor preparation equipment is characterized by that in order to raise the conveying efficiency of tube production process and prevent the tube surface from being polluted by collision and manual operation in the course of tube conveying, the stainless steel tube adopts automatic line-connecting equipment, and is mainly equipped with a horizontal and lifting conveying plate chain, conveying roller table, material-pulling mechanism, V-type conveying roller table, material-turning mechanism, lifting regulating device, conveying synchronous belt, material-storing frame and stereo library, etc. and a full-flow conveying system formed from upper computer, touch screen, PLC, servo system, frequency converter group, photoelectric switch and various signal sensing devices of proximity switch, etc. can ensure that the tube is high in conveying cleanliness. A basic automatic manufacturing system consisting of a production line and automatic line connecting equipment, which are composed of full-automatic cold machining, electrolytic polishing and the like, is integrated with ERP, CRM, MES and PDM systems, the technical process of production process control and product performance online monitoring is continuously perfected, and digital manufacturing and flexible manufacturing in a remote operation and maintenance mode are realized.
The ultra-high-cleanness stainless steel tube production line for the semiconductor preparation device is characterized in that after rough rolling is finished on the conventional rough rolling tube production line of a company, finish rolling tube and electrolytic polishing manufacturing are finished on the production line, so that the tube meets the requirement of ultra-high cleanliness, the production line is arranged as shown in figure 2 and comprises three adjacent vertical spans I, II and III which are in a parallel structure, and the production process layout of the whole workshop is in an S shape. One end of the first longitudinal span area is an inlet of a rough rolling pipe, the other end of the third longitudinal span area opposite to the rough rolling inlet is an outlet of finished product packaging, and the area is a clean workshop area to ensure that products are not polluted; the upper parts of the longitudinal first bay and the second bay from the other end of the inlet and the other end of the second longitudinal bay and the third longitudinal bay from the other end of the inlet are 18m wide steel truss supporting structures, so that the stainless steel pipes are automatically conveyed between three bays and the inter-bay logistics conveying is realized through a transverse conveying plate chain.
The first longitudinal span area is provided with a finish rolling pipe area, an outer degreasing area, an inner degreasing area, a bright solid solution heat treatment area and a straightening area which are sequentially connected. The finish rolling pipe area and the outer degreasing area are 8 outer degreasing areas of 8 cold rolling mills respectively, the outer diameter specification of the selected type of the precision rolling mill covers 9.53mm to 76mm, frame type gantry multipoint hoisting devices are arranged above the outer degreasing blanking table and the inner degreasing area, and the 8 tubes which are dispersed in parallel on the outer degreasing blanking table are hoisted to a process roller way device; 2 soaking degreasing grooves, a pipe inner wall cleaning machine, a pipe outer wall rinsing device, a pipe outer wall blowing device, an inspection platform, a drying box and a roller conveying device which are sequentially arranged in parallel for internal degreasing, and are conveyed among conveying processes by a transverse moving chain row machine and a material turning mechanism. Wherein the materials are transferred from the conveying roller way, the soaking degreasing tank and the material-to-be-washed platform by adopting a multi-hanging-point gantry hoisting device; the blanking platform of the straightening area is directly connected with the automatic plate chain conveying, so that the pipe transversely Ping Yidao and the II longitudinal span area are stably conveyed to the feeding platform of the cutting machine through the lifting conveying plate chain. The second longitudinal span zone is provided with a cutting Ji Touou, an inside and outside pipe precision polishing zone, an inspection zone and an ultrasonic vortex combined nondestructive inspection zone in sequence. The precise polishing areas inside and outside the pipe are respectively provided with a 40-type external polishing machine, a 100-type external polishing machine and 5 three-head internal polishing machines in parallel, and the polishing pipe is sequentially transferred among the external polishing machine, the internal polishing machine and the longitudinal conveying roller way row through a transverse frame multi-hanging-point hoisting device arranged at the upper part of the equipment. The third longitudinal span area is sequentially provided with an electrolytic polishing and cleaning area, a purification and cleaning area, a pipe air showering area, an in-pipe purging area, a packaging area and three-dimensional storage. Wherein the air flows into a clean workshop and sequentially flows into an air showering area, an in-pipe blowing area and a packaging area. The electrolytic polishing and cleaning area is sequentially provided with an electrolytic polishing area, ultrasonic cleaning in a soaking tank, inner hole circulating flushing, rinsing and blow-drying stations; the purification and cleaning area is sequentially provided with a purification area, an ultrasonic cleaning in the soaking tank, an inner hole circulating washing, rinsing, cleanliness inspection and blow-drying stations; wherein the outer sides of factory buildings in the pickling area and the purification area are provided with auxiliary systems for water supply, acid mist treatment and the like, and the cleaning station is underground provided with an acid wastewater treatment system, a rinsing water regeneration treatment system, a pure water system and the like.
The flow direction of the materials in the S-shaped production line is as follows: the method comprises the steps of entering from a cross area I of an inlet of a finish rolling pipe, sequentially entering a precision cold rolling pipe area, an outer degreasing area, an inner degreasing area, a bright solid solution heat treatment area, a straightening area, conveying to a cross area II through a transverse conveying plate chain and a lifting conveying plate chain, sequentially entering a cutting and aligning area, a polishing treatment area, an inspection area, an ultrasonic vortex combined nondestructive inspection area, conveying to a cross area III through the transverse conveying plate chain and the lifting conveying plate chain, sequentially entering an electrolytic polishing and cleaning area, a purification and cleaning area, a wind showering area in a clean workshop, an in-pipe purging area, a packaging area and a three-dimensional storage area, and then sending from a three-dimensional storage library. The inter-process material conveying adopts an automatic online device consisting of a conveying roller way, a conveying plate chain, a lifting conveying plate chain, a V-shaped roller, a material turning mechanism, a transverse station hoisting device, a manual detection material platform and the like, and is integrated with production execution systems such as MES (manufacturing execution system), ERP (enterprise resource planning) and the like to realize the intelligent control of the whole production line through the combination of a PLC (programmable logic controller), a servo system, a frequency converter group, a photoelectric switch, a proximity switch, a code scanning gun, a button, an industrial personal computer, a touch screen and other various signal sensing devices.
The production line is communicated with all devices of the production line through cables, the production quality information flow of the whole preparation process is opened, the abnormal tracing of the production quality of products and the optimization of key production quality parameters in the whole preparation process are realized, and the equipment automation and the automatic on-line devices among the processes are matched and lifted by a small amount of bridge cranes, so that the digital production of the stainless steel tube with ultrahigh cleanliness and precision can be realized, the smoothness of the information in the whole production process is ensured, and the production efficiency of the tube is improved.
A preparation process of an ultra-high clean stainless steel tube production line for a semiconductor preparation device comprises the following steps:
1. on-line rough rolling of the tube: and conveying the rolled intermediate product pipes to a temporary storage area through an electric rail car communicated among the working procedures according to the requirements of an MES production plan and the batch number, the specification and the brand number of the production process card, measuring and checking the rolled intermediate product pipes, and respectively lifting the rolled intermediate product pipes to a finish rolled pipe feeding table.
2. An online precise high-speed cold pilger mill: the tube on the feeding table is fed to the V-shaped conveying roller way through the pneumatic material shifting mechanism to complete automatic feeding, the tube is clamped and fed by the pinch rollers, a servo control system is adopted for feeding and turning angles, the planetary gear drives the rack to move to complete rolling, and the pneumatic pull-out roller pneumatic device quickly pulls out the rolled tube. MLC realizes unit order and technology interlocking control, HMI interface adjustment parameter display, state monitoring and fault alarm function.
3. Degreasing the outer wall on line: the online outer wall degreasing of the rolled tube is finished by winding and scraping oil, secondary degreasing (annular spraying, scraping degreasing liquid, secondary rinsing and scraping water to finish outer degreasing), an automatic control system is formed by a grating sensor, a pressure transmitter, a temperature sensor, a frequency converter, a PLC and a touch screen in the whole process, and the matched degreasing liquid treatment and rinsing water regeneration treatment system realizes the online automatic control of outer wall degreasing.
4. Online inner wall degreasing: the inlet and outlet of the inner wall and the outer wall of the rolled pipe soaked in the degreasing groove need to be lifted by a bridge crane, secondary degreasing and secondary rinsing of the inner wall and the outer wall of the rolled pipe, secondary rinsing of the outer wall of the rolled pipe, drying and inspection of the outer wall of the rolled pipe and hot air drying of the inner wall of the rolled pipe are all automatically completed, the whole process is controlled by a PLC, and the cleaning beat and speed are adjustable. The degreasing tank liquor automatic treatment system and the rinsing tank liquor automatic treatment system which are synchronously matched realize the online automatic control of the inner wall degreasing.
5, an online roller hearth type all-hydrogen bright solid solution heat treatment furnace: by adopting a comprehensive technology combining a high-temperature oxidation-resistant combustion heating technology and heat treatment, the heat transfer efficiency and the circulation quantity are improved, the reduction effect is stronger, the smoothness of the pipe is improved, and the crystallization is more uniform. The automatic transverse conveying system of the process piles the pipes to an automatic roller train, and the pipes flow to the next process through an inlet sealing chamber, an inlet preheating section, a heat treatment furnace, a high-strength jet flow cooling section, a slow cooling chamber, an outlet sealing chamber, an outlet roller train and a conveying roller train. The German IBS sleeve type self-preheating radiant tube combustion technology has furnace temperature uniformity of +/-5 ℃, temperature control precision of less than or equal to +/-1 ℃, computer control, heat accumulating type technology, frequency conversion technology, full-hydrogen high-strength N2 jet flow rapid cooling, radiant water cooling and strong convection air cooling which meet the rapid cooling requirement.
6. And (3) straightening on line: the high-precision straightening machine is arranged between 40-type straightening machine units and 80-type straightening machine units in parallel in a conveying roller way row in order to meet the series requirements of the external diameter specification, and is composed of a transverse translation plate chain (capable of moving forwards and backwards), a material turning mechanism, an inclined feeding table, a straightening protection cylinder, a straightening host, a background roller way row and a discharging table. The full-automatic program control is realized, and the conveying of each mechanism, the opening and closing of the protective barrel, the vertical adjustment of the straightening roller and the adjustment of the deflection angle are all composed of a PLC, a human-computer interface, a frequency converter and various sensors, and the operation is controlled by the automatic program. The yield strength of the pipe to be straightened is 200MPa or more, the straightness of the pipe after being straightened is less than 0.10-0.20mm/m, the straightening blind area is controlled to be less than 160mm-300mm, and the straightening speed is steplessly adjustable at 0-30m/min.
7. Online processing of pipe end faces: the pipe end cutting processing is provided with a laser circular sawing machine and a grinding wheel cutting machine which are arranged between the conveying roller way rows in parallel, and an automatic program control system is formed by a transverse translation plate chain (capable of moving forward and backward), a material poking mechanism, a feeding table, the laser circular sawing machine, a sizing mechanism, a length measuring mechanism and a discharging table which are arranged in the middle of the roller way rows, so that the end surface of the steel pipe is cut and processed, and burrs on the end surface of the steel pipe are removed.
8. Polishing the inner surface and the outer surface of the line pipe: the span automatic conveying plate chain sequentially lifts the pipes to 40-type and 100-type parallel outer polishing machines and then to 5 three-head inner polishing machines through a transverse frame multi-lifting-point lifting device. And sequentially transferring the outer throwing machine, the inner throwing machine and the lower process conveying rod channel row. The inner and outer polishing machines are PLC and touch screen control automation equipment and can be connected with an MES system through optical cables. The roughness Ra inside and outside the tube is less than or equal to 0.4 mu m.
9. Checking the surface on line: the tubes are arranged on an inspection table through a forward and reverse transverse transfer plate chain and a material shifting mechanism arranged between roller rows, and the tubes are subjected to macroscopic inspection, composition verification and inner hole surface endoscopy one by one manually.
10. Online ultrasonic eddy current combined nondestructive online flaw detection: the pipes are horizontally placed on the feeding table and conveyed to the V-shaped conveying roller way one by one through the material shifting device, the conveying rollers penetrate through the eddy current detection system and the PRP wireless transmission ultrasonic probe rotating body flaw detection system to carry out nondestructive flaw detection on the steel pipes, and the discharging table is provided with qualified and unqualified product frames to realize automatic sorting.
11. Electropolishing and cleaning apparatus: electrolytic polishing tank setting area, material loading and unloading area, tank type soaking ultrasonic cleaning area, inner hole washing area, rinsing area, blow-drying and other stations. The matched phosphoric acid, sulfuric acid and water supply system, the acid mist treatment system, the acid wastewater treatment system, the rinsing wastewater treatment system and the purified water treatment system are all provided with independent PLC control systems. The parameters of the direct-current multi-pulse power supply, the electric heating rod and the circulating system of the polishing solution, such as voltage, current density, temperature and the like of the plurality of electrolytic polishing tanks are digitally controlled. Controlling the temperature of the acid liquor to be 45 to 60 ℃, controlling the direct-current multi-pulse voltage to be less than or equal to 30V and controlling the current density to be 5 to 50A/dm 2 Electrolytic polishing for 5 to 15 min; the pipe flow among stations such as a groove type soaking ultrasonic cleaning area, an inner hole cleaning area, a rinsing area and blow-drying area is controlled automatically.
12. Purification and cleaning equipment: the device is provided with a material loading and unloading area, a purification tank area, a tank type soaking ultrasonic cleaning area, an inner hole cleaning area, a rinsing area and a blow-drying station. The matched nitric acid and water supply system, the acid mist treatment system, the acid wastewater treatment system, the rinsing wastewater treatment system, the purified water regeneration system and the electrolytic polishing process shared treatment system are all provided with independent PLC program control systems. The parameters of pressure, temperature, processing time and the like of a plurality of purifying tanks are digitally controlled. Pipe flow among stations such as a groove type soaking ultrasonic cleaning area, an inner hole cleaning area, a rinsing area and blow-drying is controlled automatically.
13. And (3) purging drying facilities inside and outside the pipe, wherein the air cleanliness in a clean workshop meets the grade V and above, an electric rail car is arranged between the air showers and in the pipe purging and purifying and cleaning processes in a linking mode, and the purging on the surface of the pipe is completed in the air showers. Arranging pipes on a platform in a clean workshop, purging the inner holes one by high-purity nitrogen, and requiring that the nitrogen is filtered by a 0.001-micron filter, the content reaches 99.999 percent, the temperature is 60 +/-5 ℃, and the requirement of ultrahigh cleanliness is met;
14. a packaging procedure: finished product double-layer bagging protection is completed in a clean workshop, the inner layer is vacuumized and sealed by adopting a dust-free plastic bag made of polyethylene, the vacuum degree is controlled to be about 0.02Mpa, the outer layer is sealed by adopting a polyethylene plastic bag filled with clean and dry nitrogen, and the nitrogen pressure is controlled to be 0.1-0.3Mpa. The bagged finished product is protected in a special packaging box.
15. A warehousing system: the clean pipe is transferred to the three-dimensional storage system from a clean factory through the electric rail car in the process room, and the transverse frame type automatic loading and unloading system is arranged above the storage shelf to finish the automatic storage, loading and unloading and delivery of the clean pipe.
Except the circulation between the work in process steps of the above description, the transfer equipment is a continuous stepless frequency conversion speed regulation type comprising a conveying roller way, a V-shaped conveying roller way, a plate chain conveying device and a conveying synchronous belt, and the steel pipe is stably longitudinally and transversely conveyed by sweeping codes, various sensors and the like with the PLC program control and the card number of the production line equipment, so that the whole production line is automatically controlled according to the rhythm. In the production process, a small amount of travelling cranes are used for hoisting, the production of the stainless steel seamless coil pipe can be truly 'non-landing', the whole production process is ensured to be continuously and stably carried out, and the possibility of pipe pollution is reduced.
The ultra-high clean pipe has an outer diameter of 9.53-76.2mm, a wall thickness of 0.89-2.54mm and a length of 6-12m.
Different from the prior art, the production line factory building is III longitudinal span, the length is 24m span, the length direction is 198m, and the process flow is S-shaped. The tube blank enters from one end of a longitudinal span of a left side I, is gradually pushed according to a process flow, laterally moves to a longitudinal span area II from a position between I and II adjacent to the other end of the longitudinal span area I, is arranged between II and III from the other end of the longitudinal span area II, moves to the longitudinal span area III from the side surface of the transverse conveying plate chain, and is sent out from a clean workshop at the other end of the longitudinal span area III. The whole manufacturing process is very smooth, and the crossing and roundabout of the material flow in the product in the manufacturing process are avoided.
After the tube blank is hoisted to a feeding table of the cold tube rolling mill by the storage area, all process flows are conveyed by various conveying devices. The three-point gantry crane conveying devices are arranged above the internal and external degreasing blanking tables and the internal degreasing device in the I longitudinal bay area, so that the length of pipes subjected to transverse dispersion and multi-set processing is 12m, the pipes are conveyed to the working roller conveying device through lifting, then are subjected to bright solid solution heat treatment, straightening and cutting and end aligning working procedures, and are conveyed to the II longitudinal bay area through the transverse conveying plate chain, the transverse conveying is realized due to the fact that the column spacing of the factory building is 6m, and the 18 m-wide longitudinal steel truss supporting structure is arranged on the upper portion of the factory building, so that the pipes are guaranteed not to turn in the conveying process. And arranging a three-point gantry crane device above the polishing treatment of the inner and outer hole surfaces in the II longitudinal bay, transversely finishing the hoisting of the polishing of the inner and outer holes of the pipe, carrying out inspection and ultrasonic eddy current combined nondestructive inspection, conveying the pipe to the III longitudinal bay through a transverse conveying plate chain, carrying out electrolytic polishing, cleaning, purifying and cleaning to ensure that the pipe reaching the standard enters a clean workshop, passing through an air showering system, then using nitrogen with the content of 99.999 percent (filtered by a 0.001 mu m filter) for the inner hole, and carrying out purging in the pipe at the temperature of 60 +/-5 ℃ to meet the requirement of ultrahigh cleanliness. And then packaging and warehousing. Due to acid corrosion, the electrolytic polishing, cleaning, purifying, cleaning and packaging are lifted by a bridge crane.
The main processes of the manufacturing process all adopt roller bed devices for parallel transmission, and the local parts adopt a bridge type overweight machine for hoisting, so that the semiconductor manufacturing device uses ultra-high clean stainless steel tubes for full-flow automatic transmission, full-flow intelligent production is basically realized, and the continuous and stable operation of the whole manufacturing process is ensured. Because the pipes adopt the translation, the up-down and single V-shaped rollers, the pitch of the plate chain is 50mm, the width is 13.5mm, the pulling force is 3000N, and the nylon stop block of each pipe is 40mm high and is conveyed one by one, the possibility of pollution in pipe conveying is solved.
According to the invention, the workshop plane layout can meet the production process requirements of different varieties through the code scanning gun configured in the process according to the characteristics of multiple varieties, multiple specifications and less batch, and the flexibility of organizing production is increased.
The present invention and its embodiments have been described above schematically, without limitation, and what is shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. Therefore, if the person skilled in the art receives the teaching, without departing from the spirit of the invention, the person skilled in the art shall not inventively design the similar structural modes and embodiments to the technical solution, but shall fall within the scope of the invention.
Claims (10)
1. The production line of the ultra-high purity stainless steel tube for the semiconductor preparation device is characterized by comprising a first production area, a second production area and a third production area which are arranged in parallel, wherein the left sides of the first production area and the second production area are communicated through a first transverse moving area, the right sides of the second production area and the third production area are communicated through a second transverse moving area, the right end of the first production area is a tube blank inlet, and the left end of the third production area is an outlet of a finished ultra-high purity stainless steel tube;
the first production area comprises a finish rolling pipe device, an inner and outer degreasing device, a bright heat treatment device and a straightening device which are sequentially arranged from right to left, a pipe blank fed into the first production area is fed into the first transverse moving area after passing through a rough rolling pipe and a precision rolling pipe, outer wall degreasing and inner wall degreasing, a bright solution heat treatment furnace and straightening treatment, and then enters the second production area through the first transverse moving area;
the second production area comprises a saw cutting device, a precision polishing device, a surface inspection table and an ultrasonic eddy current combined nondestructive inspection device which are sequentially arranged from left to right, the pipe blank sent into the second production area is sent into the second transverse moving area after being subjected to saw cutting, trimming, polishing, surface inspection and nondestructive inspection, and the stainless steel pipe is sent into the third production area through the second transverse moving area;
the third production area comprises an electrolytic polishing cleaning device, a purification cleaning device, a blowing and drying device and a packaging device which are sequentially arranged from right to left, and the stainless steel pipe which is sent into the second production area is sent into a warehouse after being cleaned by electrolytic polishing, purified, cleaned, blown, dried and packaged.
2. The ultra-high purity stainless steel tube production line for the semiconductor manufacturing device according to claim 1, wherein the inner and outer degreasing devices perform degreasing on the outer wall of the tube blank by oil feeding, winding, oil scraping, annular spraying, degreasing liquid scraping, secondary rinsing and water scraping treatment, and then perform inner wall degreasing through inner wall secondary degreasing, secondary rinsing and tube outer wall secondary rinsing.
3. The production line of the ultra-high purity stainless steel tube for the semiconductor manufacturing device according to claim 1, wherein the straightening device is a high-precision straightening machine, the yield strength of the tube blank after straightening treatment reaches 200MPa or more, the straightness of the tube blank after straightening is less than 0.10-0.20mm/m, the straightening blind area is controlled to be less than 160mm-300mm, and the straightening speed is 0-30m/min.
4. The ultra-high purity stainless steel pipe production line for semiconductor manufacturing equipment according to claim 1, wherein the ultrasonic eddy current combined nondestructive inspection apparatus performs nondestructive inspection on the steel pipe by using an eddy current inspection system and a PRP wireless transmission ultrasonic probe rotating body inspection system.
5. According to claimThe production line of the ultra-high-purity stainless steel tube for the semiconductor manufacturing device is characterized in that the electrolytic polishing cleaning device comprises an electrolytic polishing groove setting area, a material loading and unloading area, a groove type soaking ultrasonic cleaning area, an inner hole washing area, a rinsing area and a blow-drying area, the temperature of an acid liquid is controlled to be 45-60 ℃, the direct-current multi-pulse voltage is less than or equal to 30V, and the current density is 5-50A/dm 2 And the electrolytic polishing time is 5 to 15 min.
6. The ultra-high purity stainless steel tube production line for semiconductor manufacturing devices as claimed in claim 1, wherein the purification cleaning device comprises a loading and unloading area, a purification tank area, a tank-type soaking ultrasonic cleaning area, an inner hole cleaning area, a rinsing area and a blow-drying area.
7. The production line of ultra-high purity stainless steel tube for semiconductor manufacturing apparatus according to claim 1, wherein the blowing and drying apparatus firstly performs blowing on the surface of the tube in the air shower room, and then blows the inner hole by inner hole with high purity nitrogen, the nitrogen is filtered by 0.001 μm filter, the content reaches 99.999%, and the temperature is 60 ℃ ± 5 ℃.
8. The production line of ultra-high purity stainless steel pipe for semiconductor manufacturing apparatus as claimed in claim 1, wherein the first and second traverse areas comprise distance block conveyors and belt conveyors.
9. The production line of the ultra-high purity stainless steel tube for the semiconductor manufacturing device according to claim 1, wherein the first, second and third production areas are communicated with each other through an automatic connecting device, and the automatic connecting device comprises a horizontal and lifting conveying plate chain, a conveying roller way, a material shifting mechanism, a conveying V-shaped roller way, a material turning mechanism, a jacking adjusting device, a conveying synchronous belt, a material storage rack and a three-dimensional warehouse.
10. The production line of ultra-high purity stainless steel tube for semiconductor manufacturing apparatus according to claim 1, wherein the ultra-high purity stainless steel tube has an outer diameter of 9.53-76.2mm, a wall thickness of 0.89-2.54mm, and a length of 6-12m.
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Application publication date: 20221122 |