CN115356901A - Pressing device for photoetching machine - Google Patents
Pressing device for photoetching machine Download PDFInfo
- Publication number
- CN115356901A CN115356901A CN202211167127.3A CN202211167127A CN115356901A CN 115356901 A CN115356901 A CN 115356901A CN 202211167127 A CN202211167127 A CN 202211167127A CN 115356901 A CN115356901 A CN 115356901A
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- pressing
- support
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- plate
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a pressing device for a photoetching machine, which comprises a pressing mechanism; the pressing mechanism comprises two mounting seats, two mounting seats are symmetrically arranged along the center of the rotating shaft, a driving piece is arranged on each mounting seat, and the output end of each driving piece is connected with the corresponding pressing piece through a linkage piece; the pressing piece comprises a fixed seat, the fixed seat is installed on the end part of the supporting rod of the linkage piece, the fixed seat is rotatably connected with the middle part of the connecting beam, one end of the connecting beam is movably connected with the movable rod of the linkage piece, and the other end of the connecting beam is connected with the pressing plate; the linkage piece comprises support rods, the two support rods are respectively and symmetrically arranged along the central line of the mounting seat, a connecting rod is arranged between the two support rods, one end of the connecting rod is connected with the output end of the driving piece, the other end of the connecting rod is connected with the support plate, and a limit groove is formed in each support rod; the two ends of the supporting plate are respectively connected with the connecting beam through the movable rods, and the PCB pressing device has the advantages of being simple in operation and convenient to press.
Description
Technical Field
The invention relates to the technical field of photoetching machines, in particular to a pressing device for a photoetching machine.
Background
The common photoetching machine adopts mask alignment photoetching, and the general photoetching process comprises the steps of cleaning and drying the surface of a silicon wafer, coating a bottom, spin-coating a photoresist, soft drying, alignment exposure, post-drying, developing, hard drying, etching and the like;
in the prior art, when a PCB body is compressed, a compression block needs to be turned or moved to give way to place the PCB body, then the compression block is started to compress the PCB body, and the problem that the PCB body needs to give way during operation exists; the existing compressing device can only compress the PCB body, and can not realize the simultaneous work of circulating ordered work and compressing and releasing, thereby improving the compressing efficiency.
Disclosure of Invention
The present invention is directed to solve the above problems of the related art, and provides a pressing device for a lithography machine.
The purpose of the invention can be realized by the following technical scheme:
a hold-down device for a lithography machine comprises a hold-down mechanism;
the pressing mechanism comprises two mounting seats, two mounting seats are symmetrically arranged along the center of the rotating shaft, driving pieces are arranged on the mounting seats, and the output ends of the driving pieces are connected with the pressing pieces through linkage pieces;
the pressing piece comprises a fixed seat, the fixed seat is installed on the end part of the supporting rod of the linkage piece, the fixed seat is rotatably connected with the middle part of the connecting beam, one end of the connecting beam is movably connected with the movable rod of the linkage piece, and the other end of the connecting beam is connected with the pressing plate;
the linkage piece comprises supporting rods, the two supporting rods are symmetrically arranged along the center line of the mounting seat respectively, a connecting rod is arranged between the two supporting rods, one end of the connecting rod is connected with the output end of the driving piece, the other end of the connecting rod is connected with the supporting plate, a limiting groove is formed in each supporting rod, and the supporting plate is located in the limiting groove of the corresponding supporting rod;
the two ends of the supporting plate are respectively connected with the connecting beam through movable rods.
As a further scheme of the invention: two linkage pieces are symmetrically arranged along the horizontal center line of the mounting seat, and the linkage pieces are correspondingly connected with pressing pieces.
As a further scheme of the invention: the driving piece comprises a central plate, the central plate is rotatably installed at the central position of the installation seat, rectangular sliding grooves are respectively formed in the upper side and the lower side of the installation seat, sliding blocks are arranged in the sliding grooves, two connecting lugs are arranged on the side wall of each sliding block at intervals, installation rods are sleeved on the connecting lugs, air cylinders are respectively installed at two ends of each installation rod, and the sliding blocks are connected with connecting rods of the linkage pieces.
As a further scheme of the invention: the cylinder is located between two installation poles, and two sliders are movably connected with the central plate through movable plates.
As a further scheme of the invention: the automatic pressing device is characterized by further comprising a support, a rotating shaft is arranged above the support and is rotationally connected with the rotating shaft, a driving motor is arranged on one side of the support, the output end of the driving motor is connected with the rotating shaft, and a pressing mechanism is arranged on the rotating shaft.
As a further scheme of the invention: the support is provided with a conveying belt which is positioned below the pressing mechanism.
As a further scheme of the invention: a positioning mechanism is arranged in a limiting groove between the supporting rod and the supporting plate, the positioning mechanism comprises a positioning groove, a rectangular positioning groove is formed in the supporting plate, a positioning block of a convex structure is arranged in the positioning groove in a sliding mode, one side, away from the center of the supporting plate, of the positioning block is movably connected with one end of a movable shaft, and the other end of the movable shaft is arranged on the top of the supporting rod.
As a further scheme of the invention: the positioning mechanisms are symmetrically arranged along the vertical central line of the supporting plate.
As a further scheme of the invention: the positioning block is arranged in the positioning groove through a spring.
The invention has the beneficial effects that:
(1) According to the pressing mechanism, the linkage piece is arranged, so that the PCB body is pressed, the pressing mechanism has the advantages of being simple in operation and convenient to press, only the PCB body needs to be placed on the supporting plate when the pressing mechanism is used for pressing, the problem that in the prior art, when the PCB body is pressed, the pressing block needs to be turned over or moved to place the PCB body in a way of yielding, then the pressing block is started to work to press the PCB body, and the problem that yielding is needed during operation exists;
(2) The two pressing pieces and the linkage pieces are arranged in quantity and are matched with each other for rotation, so that the PCB can be circularly worked, and the driving pieces are matched for arrangement, so that the processed and pressed PCB can be correspondingly released onto the conveying belt, and the other pressing piece can be opened for pressing, and the pressing rhythm and efficiency of the PCB can be improved on the basis of simple operation and convenience in pressing;
(3) The positioning mechanism can position the PCB body at the middle position of the supporting plate in the process of compressing the PCB body, so that the accuracy of compressing the PCB body can be improved.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the hold-down mechanism of the present invention;
FIG. 3 is a schematic view of the driving member of the present invention;
FIG. 4 is a side view of the driving member of the present invention;
FIG. 5 is a schematic view of the construction of the hold down of the present invention;
FIG. 6 is a schematic view showing the connection relationship between the support bar and the support plate according to the present invention;
fig. 7 is a schematic structural view of the positioning mechanism of the present invention.
In the figure: 1. a support; 2. a rotating shaft; 3. a drive motor; 4. a pressing mechanism; 5. a mounting base; 6. a pressing member; 7. a linkage; 8. a movable rod; 9. a support bar; 10. a connecting rod; 11. a support plate; 12. connecting lugs; 13. a limiting groove; 14. mounting holes; 15. a chute; 16. a slider; 17. a movable plate; 18. a center plate; 19. mounting a rod; 20. a cylinder; 21. a fixed seat; 22. a connecting beam; 23. a fixing plate; 24. pressing a plate; 25. a movable shaft; 26. positioning a groove; 27. a spring; 28. and (5) positioning the blocks.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 2, 5 and 6, the present invention is a pressing device for a lithography machine, including a pressing mechanism 4;
the pressing mechanism 4 comprises two mounting seats 5, two pressing pieces 6 and two linkage pieces 7, the two mounting seats 5 are symmetrically arranged along the center of the rotating shaft 2, the mounting seats 5 are provided with driving pieces, and the output ends of the driving pieces are connected with the pressing pieces 6 through the linkage pieces 7;
the pressing piece 6 comprises a fixed seat 21, a connecting beam 22, a fixed plate 23 and a pressing plate 24, wherein the fixed seat 21 is symmetrically provided with two parts which are respectively arranged on the end part of the supporting rod 9 of the linkage piece 7, the fixed plate 23 is arranged on the fixed seat 21, the fixed plate 23 is rotatably connected with the middle part of the connecting beam 22, one end of the connecting beam 22 is movably connected with the movable rod 8 of the linkage piece 7, and the other end of the connecting beam 22 is provided with the pressing plate 24;
the linkage part 7 comprises a movable rod 8, two support rods 9, two connecting rods 10 and two support plates 11, the two support rods 9 are arranged side by side, the two support rods 9 are symmetrically arranged on the side wall of the installation seat 5 along the central line of the installation seat 5 respectively, the connecting rod 10 is arranged between the two support rods 9, one end of the connecting rod 10 is connected with the output end of the driving part, the other end of the connecting rod 10 is connected with the support plates 11, the support rods 9 are provided with limit grooves 13, the support plates 11 are located in the limit grooves 13 of the support rods 9, and the support plates 11 can be more stable in the moving process through the limit grooves 13;
two ends of the supporting plate 11 are respectively provided with a movable rod 8, and the end part of the movable rod 8 far away from the supporting plate 11 is connected with the pressing piece 6;
during operation, a PCB to be processed is placed on the supporting plates 11, namely, two ends of the PCB are respectively placed on the supporting plates 11 on two sides, then, the driving piece is started to operate, the connecting rod 10 is driven to move, the supporting plates 11 move along the supporting rods 9, the PCB is driven to move upwards, meanwhile, the supporting plates 11 drive the connecting beams 22 to rotate along the fixing plates 23 through the movable rods 8, the pressing plates 24 also rotate along with the connecting beams, and when the connecting beams 22 rotate to be in a horizontal state, the PCB is moved to the pressing plates 24 by the supporting plates 11, so that the PCB is pressed tightly by the supporting plates; therefore, the pressing mechanism 4 provided by the invention has the advantages of simple operation and convenience in pressing through the arrangement of the linkage member 7, only the PCB needs to be placed on the supporting plate 11 during pressing, and the problem that in the prior art, when the PCB is pressed, the pressing block needs to be turned over or moved to place the PCB and then is moved out of the way, and then the pressing block is started to press the PCB is solved, so that the pressing mechanism needs to be moved out of the way during operation;
example 2
Referring to fig. 1, 3 and 4, based on the above embodiment 1, the number of the pressing members 6 is one, so that after the PCB board is pressed, the pressing mechanism 4 needs to be started again to work correspondingly, and the PCB board is taken down; the PCB body can not be circularly and orderly worked;
therefore, two linkage pieces 7 are symmetrically arranged along the horizontal central line of the mounting seat 5, and the compression pieces 6 are correspondingly connected to the linkage pieces 7;
the driving piece comprises connecting lugs 12, sliding grooves 15, sliding blocks 16, movable plates 17, a central plate 18, mounting rods 19 and air cylinders 20, the central plate 18 is mounted at the central position of the mounting seat 5 and is rotatably connected with the mounting seat 5, the rectangular sliding grooves 15 are respectively arranged on the upper side and the lower side of the mounting seat 5, the sliding blocks 16 are arranged in the sliding grooves 15, two connecting lugs 12 are arranged on the side walls of the sliding blocks 16 at intervals, the mounting rods 19 are sleeved on the connecting lugs 12, the air cylinders 20 are respectively mounted at two ends of each mounting rod 19, the air cylinders 20 are located between the two mounting rods 19, the sliding blocks 16 are connected with the connecting rods 10 of the linkage piece 7, and the two sliding blocks 16 are movably connected with the central plate 18 through the movable plates 17;
the device is characterized by also comprising a support 1, wherein a rotating shaft 2 is arranged above the support 1 and is rotationally connected with the rotating shaft 2, a driving motor 3 is arranged on one side of the support 1, the output end of the driving motor 3 is connected with the rotating shaft 2, and a pressing mechanism 4 is arranged on the rotating shaft 2;
a conveying belt is arranged on the bracket 1 and is positioned below the pressing mechanism 4; the arrangement of the conveying belt can convey the PCB which is well pressed and processed to the next procedure;
the mounting seat 5 is of a diamond structure, the central plate 18 is of a square plate structure, and mounting holes 14 for matching the rotating shaft 2 are formed in the middle of the mounting seat 5 and the central plate 18;
when the PCB pressing machine works, when a PCB to be processed needs to be pressed, the air cylinder 20 is started to extend to drive the two sliding blocks 16 to move away from each other, so that the connecting rod 10 of the linkage part 7 is driven to move, and the pressing part 6 above the connecting rod finishes the pressing work of the PCB; after the pressing operation is finished, the driving motor 3 is controlled to operate to drive the mounting seat 5 to rotate to 180 degrees, so that the pressed PCB body is positioned at the bottom of the mounting seat 5, and the non-pressed PCB body is positioned at the top of the mounting seat 5; then, controlling the cylinder 20 to contract to reset the linkage 7 and the pressing piece 6, so as to open the pressing piece 6 at the bottom, and enabling the processed PCB body after being pressed to fall on the conveying belt of the bracket 1; meanwhile, the pressing piece 6 at the top is also opened to press the next PCB body; therefore, the two pressing pieces 6 and the linkage piece 7 are arranged in quantity and are matched with the rotating arrangement, so that the PCB can be circularly operated, and the driving piece is matched with the arrangement, so that the processed and pressed PCB can be correspondingly released onto the conveying belt, and the other pressing piece 6 can be opened to perform pressing operation, so that the pressing rhythm and efficiency of the PCB can be improved on the basis of simple operation and convenient pressing;
example 3
Referring to fig. 7, based on the embodiment 2, when a PCB to be processed is placed on the supporting plate 11, the PCB needs to be positioned at a position corresponding to the middle of the supporting plate 11, so that the PCB is fixed at a preset position, and the accuracy of processing the PCB is ensured;
therefore, a positioning mechanism is arranged in the limiting groove 13 between the support rod 9 and the support plate 11, the positioning mechanism is symmetrically arranged along the vertical center line of the support plate 11, the positioning mechanism comprises a movable shaft 25, a positioning groove 26, a spring 27 and a positioning block 28, the support plate 11 is provided with a rectangular positioning groove 26, the positioning groove 26 is internally provided with the positioning block 28 with a convex structure in a sliding manner, the positioning block 28 is arranged in the positioning groove 26 through the spring 27, one side of the positioning block 28, which is far away from the center of the support plate 11, is movably connected with one end of the movable shaft 25, and the other end of the movable shaft 25 is arranged on the top of the support rod 9;
when the PCB fixing device works, the PCB is placed between the two positioning blocks 28 of the supporting plate 11, when the supporting plate 11 moves upwards along the supporting rod 9, the two positioning blocks 28 are driven to move towards the middle of the supporting plate 11 through the arranged movable shaft 25, so that the PCB can horizontally move and be adjusted along the supporting plate 11, and the PCB is fixed at the middle position of the supporting plate 11; therefore, the positioning mechanism can position and position the PCB body at the middle position of the supporting plate 11 in the process of compressing the PCB body, so that the accuracy of compressing the PCB body can be improved.
Example 4
Based on the above embodiment 3, a working method of a pressing device for a lithography machine includes the following steps:
step 1: placing the PCB body between two positioning blocks 28 of the supporting plate 11, starting the cylinder 20 to extend to work, driving the two sliders 16 to move away from each other, thereby driving the connecting rod 10 of the linkage 7 to move, so that the supporting plate 11 moves along the supporting rod 9, and the PCB body is driven to move upwards, meanwhile, the supporting plate 11 drives the connecting beam 22 to rotate along the fixing plate 23 through the movable rod 8, so that the pressing plate 24 also rotates along with the connecting beam, and when the connecting beam 22 rotates to a horizontal state, the PCB body is moved to the pressing plate 24 by the supporting plate 11, and the PCB body is pressed by the supporting plate;
when the supporting plate 11 moves upwards along the supporting rod 9, the two positioning blocks 28 are driven to move towards the middle of the supporting plate 11 through the arranged movable shaft 25, so that the PCB body can be horizontally moved and adjusted along the supporting plate 11, and the PCB body is fixed at the middle position of the supporting plate 11;
step 2: after the pressing operation is finished, the driving motor 3 is controlled to operate to drive the mounting seat 5 to rotate to 180 degrees, so that the pressed PCB body is positioned at the bottom of the mounting seat 5, and the non-pressed PCB body is positioned at the top of the mounting seat 5; then, controlling the cylinder 20 to contract to reset the linkage 7 and the pressing piece 6, so as to open the pressing piece 6 at the bottom, and enabling the processed PCB body after being pressed to fall on the conveying belt of the bracket 1; meanwhile, the pressing piece 6 at the top is also opened to press the next PCB body.
The working principle of the invention is as follows: the pressing mechanism 4 has the advantages that the pressing mechanism has simple operation and is convenient to press the PCB body through the arrangement of the linkage piece 7, and the PCB body only needs to be placed on the supporting plate 11 during pressing;
the two pressing pieces 6 and the linkage piece 7 are arranged in quantity and are matched with each other to rotate, so that the PCB can be circularly worked, and the driving piece is matched with each other, so that the processed and pressed PCB can be correspondingly released onto the conveying belt, and the other pressing piece 6 can be opened to perform pressing work;
the positioning mechanism can position and position the PCB body in the middle position of the supporting plate 11 in the process of compressing the PCB body.
While one embodiment of the present invention has been described in detail, the description is only a preferred embodiment of the present invention and should not be taken as limiting the scope of the invention. All equivalent changes and modifications made within the scope of the present invention shall fall within the scope of the present invention.
Claims (9)
1. A hold-down device for a lithography machine, characterized by comprising a hold-down mechanism (4);
the pressing mechanism (4) comprises two installation seats (5), the two installation seats (5) are symmetrically arranged along the center of the rotating shaft (2), a driving piece is arranged on each installation seat (5), and the output end of each driving piece is connected with the pressing piece (6) through a linkage piece (7);
the pressing piece (6) comprises a fixed seat (21), the fixed seat (21) is installed on the end part of a supporting rod (9) of the linkage piece (7), the fixed seat (21) is rotatably connected with the middle part of a connecting beam (22), one end of the connecting beam (22) is movably connected with a movable rod (8) of the linkage piece (7), and the other end of the connecting beam is connected with a pressing plate (24);
the linkage piece (7) comprises support rods (9), the two support rods (9) are symmetrically arranged along the central line of the mounting seat (5) respectively, a connecting rod (10) is arranged between the two support rods (9), one end of the connecting rod (10) is connected with the output end of the driving piece, the other end of the connecting rod (10) is connected with the support plate (11), a limiting groove (13) is formed in each support rod (9), and the support plate (11) is located in the limiting groove (13) of each support rod (9);
two ends of the supporting plate (11) are respectively connected with the connecting beam (22) through the movable rod (8).
2. The clamping device for the lithography machine according to claim 1, characterized in that two linkage members (7) are symmetrically arranged along the horizontal center line of the mounting seat (5), and the clamping member (6) is correspondingly connected to the linkage members (7).
3. The pressing device for the lithography machine according to claim 2, wherein the driving member comprises a central plate (18), the central plate (18) is rotatably installed at the central position of the installation base (5), the upper side and the lower side of the installation base (5) are respectively provided with a rectangular sliding groove (15), a sliding block (16) is arranged in the sliding groove (15), two connecting lugs (12) are arranged on the side wall of the sliding block (16) at intervals, an installation rod (19) is sleeved on each connecting lug (12), two ends of each installation rod (19) are respectively provided with an air cylinder (20), and the sliding block (16) is connected with the connecting rod (10) of the linkage member (7).
4. A clamping device for a lithography machine according to claim 3, characterized in that the air cylinder (20) is located between two mounting rods (19), the two slides (16) being movably connected to the central plate (18) by means of the movable plate (17).
5. The pressing device for the lithography machine according to claim 4, further comprising a support (1), wherein a rotating shaft (2) is arranged above the support (1) and is rotatably connected with the rotating shaft (2), a driving motor (3) is arranged on one side of the support (1), an output end of the driving motor (3) is connected with the rotating shaft (2), and a pressing mechanism (4) is arranged on the rotating shaft (2).
6. A hold-down device for a lithography machine according to claim 5, characterized in that a conveyor belt is arranged on the support (1), the conveyor belt being located below the hold-down mechanism (4).
7. The pressing device for the lithography machine according to claim 6, wherein a positioning mechanism is arranged in the limiting groove (13) between the support rod (9) and the support plate (11), the positioning mechanism comprises a positioning groove (26), the support plate (11) is provided with a rectangular positioning groove (26), a positioning block (28) with a convex structure is arranged in the positioning groove (26) in a sliding manner, one side of the positioning block (28) far away from the center of the support plate (11) is movably connected with one end of the movable shaft (25), and the other end of the movable shaft (25) is connected with the top of the support rod (9).
8. A clamping device for a lithography machine according to claim 7, characterized in that the positioning mechanism is arranged symmetrically along the vertical centre line of the support plate (11).
9. A clamping device for a lithography machine according to claim 7, characterized in that the positioning block (28) is mounted in the positioning slot (26) by means of a spring (27).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211167127.3A CN115356901B (en) | 2022-09-23 | 2022-09-23 | Pressing device for photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211167127.3A CN115356901B (en) | 2022-09-23 | 2022-09-23 | Pressing device for photoetching machine |
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| Publication Number | Publication Date |
|---|---|
| CN115356901A true CN115356901A (en) | 2022-11-18 |
| CN115356901B CN115356901B (en) | 2023-04-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211167127.3A Active CN115356901B (en) | 2022-09-23 | 2022-09-23 | Pressing device for photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115356901B (en) |
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| CN115981116A (en) * | 2023-03-22 | 2023-04-18 | 广东科视光学技术股份有限公司 | Full-automatic exposure machine |
| CN116224720A (en) * | 2023-02-02 | 2023-06-06 | 广东科视光学技术股份有限公司 | Pressing device for photoetching machine |
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| CN116224720A (en) * | 2023-02-02 | 2023-06-06 | 广东科视光学技术股份有限公司 | Pressing device for photoetching machine |
| CN116224720B (en) * | 2023-02-02 | 2023-09-15 | 广东科视光学技术股份有限公司 | Pressing device for photoetching machine |
| CN115981116A (en) * | 2023-03-22 | 2023-04-18 | 广东科视光学技术股份有限公司 | Full-automatic exposure machine |
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| CN115356901B (en) | 2023-04-14 |
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