CN115341823B - Automatic door opening and closing system for vacuum coating equipment - Google Patents

Automatic door opening and closing system for vacuum coating equipment Download PDF

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Publication number
CN115341823B
CN115341823B CN202211114135.1A CN202211114135A CN115341823B CN 115341823 B CN115341823 B CN 115341823B CN 202211114135 A CN202211114135 A CN 202211114135A CN 115341823 B CN115341823 B CN 115341823B
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CN
China
Prior art keywords
door
tensioning
closing
opening
plate
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Active
Application number
CN202211114135.1A
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Chinese (zh)
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CN115341823A (en
Inventor
魏国军
高福利
李景薇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Buhler Leybold Optics Equipment Beijing Co ltd
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Buhler Leybold Optics Equipment Beijing Co ltd
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Application filed by Buhler Leybold Optics Equipment Beijing Co ltd filed Critical Buhler Leybold Optics Equipment Beijing Co ltd
Priority to CN202211114135.1A priority Critical patent/CN115341823B/en
Publication of CN115341823A publication Critical patent/CN115341823A/en
Application granted granted Critical
Publication of CN115341823B publication Critical patent/CN115341823B/en
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Classifications

    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05FDEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F15/00Power-operated mechanisms for wings
    • E05F15/60Power-operated mechanisms for wings using electrical actuators
    • E05F15/603Power-operated mechanisms for wings using electrical actuators using rotary electromotors
    • E05F15/611Power-operated mechanisms for wings using electrical actuators using rotary electromotors for swinging wings
    • E05F15/616Power-operated mechanisms for wings using electrical actuators using rotary electromotors for swinging wings operated by push-pull mechanisms
    • E05F15/624Power-operated mechanisms for wings using electrical actuators using rotary electromotors for swinging wings operated by push-pull mechanisms using friction wheels
    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05CBOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C17/00Devices for holding wings open; Devices for limiting opening of wings or for holding wings open by a movable member extending between frame and wing; Braking devices, stops or buffers, combined therewith
    • E05C17/02Devices for holding wings open; Devices for limiting opening of wings or for holding wings open by a movable member extending between frame and wing; Braking devices, stops or buffers, combined therewith by mechanical means
    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05DHINGES OR SUSPENSION DEVICES FOR DOORS, WINDOWS OR WINGS
    • E05D13/00Accessories for sliding or lifting wings, e.g. pulleys, safety catches
    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05DHINGES OR SUSPENSION DEVICES FOR DOORS, WINDOWS OR WINGS
    • E05D15/00Suspension arrangements for wings
    • E05D15/02Suspension arrangements for wings for revolving wings
    • EFIXED CONSTRUCTIONS
    • E05LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05FDEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F3/00Closers or openers with braking devices, e.g. checks; Construction of pneumatic or liquid braking devices
    • E05F3/02Closers or openers with braking devices, e.g. checks; Construction of pneumatic or liquid braking devices with pneumatic piston brakes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Power-Operated Mechanisms For Wings (AREA)

Abstract

The invention provides an automatic door opening and closing system for vacuum coating equipment, which comprises the following components: a door limiting device, a door opening and closing device, a door automatic opening and closing device, a door closing guide device and a door tensioning device. The door limiting device and the door opening and positioning device are matched with each other to ensure that the door is opened and positioned. The door automatic opening and closing device can automatically open and close the door. The door closing guide is capable of guiding the door during the opening and closing of the door. The door tensioning device is used to tension the door after the door is closed. The invention can automatically realize the opening and closing of the door of the vacuum coating equipment.

Description

Automatic door opening and closing system for vacuum coating equipment
Technical Field
The invention relates to the field of vacuum coating, in particular to an automatic door opening and closing system for vacuum coating equipment.
Background
The existing door opening mode of the single vacuum coating equipment is to manually open the door, manually pull the handle and drive the hinge on the side face to rotate. This approach does not allow for automated production first; secondly, manual operation is unsafe, certain force is needed in the process of opening and closing the door by hands, small equipment is not problematic to operate, large equipment is laborious to operate manually, personnel injury easily occurs in the pushing process, and the door is knocked down. When the door is opened to a certain position, the equipment lacks positioning on the premise of no leveling, and the door can be closed automatically possibly, and people are feeding at the moment and are likely to be injured by the door; the difference of manual door opening and closing time is large again, the time period between the furnaces cannot be guaranteed to be consistent, the door opening time is inconsistent, the content of water vapor entering the cavity is inconsistent, the door closing and vacuumizing time and the vacuum atmosphere are also inconsistent, so that the stability of a process and a product are also different, and particularly for mass production equipment, the flow stability is an important factor affecting the productivity.
Disclosure of Invention
Aiming at the technical problems, the invention adopts the following technical scheme:
the embodiment of the invention provides an automatic door opening and closing system for vacuum coating equipment, which comprises a vacuum chamber and a door rotationally connected with the vacuum chamber, and comprises the following components: the device comprises a door limiting device, a door opening and closing device, a door automatic opening and closing device, a door closing guide device and a door tensioning device, wherein the door limiting device is arranged at a set position on the ground and comprises a limiting base, a limiting cylinder, a limiting clamping groove, a limiting guide rail and a supporting baffle plate; the door opening device is fixed at the bottom of the door and comprises a connecting plate, a first rolling bearing fixing plate, a first rolling bearing and a first connecting shaft, one end of the connecting plate is fixedly connected with the door, the other end of the connecting plate is fixedly connected with one end of the first rolling bearing fixing plate, the first connecting shaft is connected with the other end of the first rolling bearing fixing plate, and the first rolling bearing is rotatably arranged on the first connecting shaft; the first rolling bearing rolls along the limit guide rail in the opening and closing process of the door, is in contact with the limit clamping groove when the door is in an opening state, and is in a separation state from the limit clamping groove when the door is in a closing state; the automatic door opening and closing device is fixed at the bottom of the door and comprises a first supporting plate, a second supporting plate, a driving motor mounting plate and a roller, wherein the first supporting plate and the second supporting plate are arranged at intervals; the door closing guide device comprises a guide rail, a mounting bracket, a second rolling bearing and a second connecting shaft, wherein the guide rail is fixed at the top of the vacuum chamber, the mounting bracket is fixed at the top of the door, the second connecting shaft is arranged on the mounting bracket, and the second rolling bearing is rotatably arranged on the second connecting shaft; the guide rail is used for enabling the second rolling bearing to roll during the closing and opening processes of the door; the door tensioning device comprises a tensioning mechanism arranged at the top of the vacuum chamber and a tensioning guide groove arranged at the top of the door, the tensioning mechanism comprises a tensioning cylinder, a tensioning fixing seat and a tensioning assembly, the tensioning cylinder is fixed at the top of the vacuum chamber, the tensioning fixing seat is connected with a piston rod of the tensioning cylinder, the tensioning assembly comprises a tensioning contact piece and a tensioning fastener, the tensioning contact piece is fixed on the tensioning fixing seat through the tensioning fastener, and under the action of the tensioning cylinder, the tensioning contact piece stretches into the tensioning guide groove to tension the door.
The invention has at least the following beneficial effects:
the automatic door opening and closing system for the vacuum coating equipment provided by the embodiment of the invention can improve the safety of the equipment, reduce the working procedures, avoid manual operation, ensure personal safety and meet the field production mode of large batches and large workpieces. In addition, the stable door opening and closing interval time can stabilize the production process and improve the product yield.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a perspective view illustrating an automatic door opening and closing system for a vacuum coating apparatus according to an embodiment of the present invention.
Fig. 2 is a top view of an automatic door opening and closing system for a vacuum coating apparatus according to an embodiment of the present invention.
Fig. 3 is a schematic structural view of the door opening device.
Fig. 4 is a top view of fig. 3.
Fig. 5 is a front view of the door opening device.
Fig. 6 is a side view of the door opening device.
Fig. 7 is a side view of the door automatic opening and closing apparatus.
Fig. 8 is a rear view of the door automatic opening and closing apparatus.
Fig. 9 to 11 are schematic views of the door closing guide.
Fig. 12 is a schematic view of a door tensioning mechanism.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
Fig. 1 is a perspective view illustrating an automatic door opening and closing system for a vacuum coating apparatus according to an embodiment of the present invention. Fig. 2 is a top view of an automatic door opening and closing system for a vacuum coating apparatus according to an embodiment of the present invention. Fig. 3 is a schematic structural view of the door opening device. Fig. 4 is a top view of fig. 3. Fig. 5 is a front view of the door opening device. Fig. 6 is a side view of the door opening device. Fig. 7 is a side view of the door automatic opening and closing apparatus. Fig. 8 is a rear view of the door automatic opening and closing apparatus. Fig. 9 to 11 are schematic views of the door closing guide. Fig. 12 is a schematic view of a door tensioning mechanism.
An embodiment of the present invention provides an automatic door opening and closing system for a vacuum coating apparatus, which may include a vacuum chamber 10 and a door 11 rotatably connected to the vacuum chamber 10, as shown in fig. 1 and 2. The door 11 can be connected to the vacuum chamber 10 by a conventional hinge mechanism (not shown) and can be easily rotated.
As shown in fig. 1, the system for automatically opening and closing a door for a vacuum coating apparatus according to an embodiment of the present invention may include: a door limiting device 1, a door opening and closing device 2, a door automatic opening and closing device 3, a door closing guide device 4 and a door tensioning device 5.
Further, the door opening device 1 is disposed at a set position on the ground, as shown in fig. 3 and 4, and may include a limit base 101, a limit cylinder 102, a limit clamping groove 103, a limit rail 104, and a support baffle 105. The limiting base 101 is fixed on the ground, the limiting cylinder 102 is arranged in the limiting base 101, the limiting clamping groove 103 is connected with a piston rod of the limiting cylinder 102, the limiting guide rail 104 is arranged at a first end of the upper side of the limiting base 101, an opening 106 for exposing the limiting clamping groove is formed, and the supporting baffle 105 is arranged at a second end of the upper side of the limiting base 101. Specifically, the limiting base 101 may be fixed at a set position on the ground by using anchor bolts, the limiting guide rail 104 may be fixed on a guide rail mounting plate 107, a support adapter plate 108 is disposed at a lower portion of the guide rail mounting plate 107, the support adapter plate 108 may be fixedly connected with the guide rail mounting plate 107 by using screws, and after the guide rail mounting plate 107 is placed at a proper position, the guide rail mounting plate 107 may be fixed on the support adapter plate 108 by using adjusting plates 109 on front and rear sides. The guide rail mounting plate 107 is also provided with an opening exposing the limit clamping groove 103. The support baffle 105 may be fixed to the rail mounting plate 107 by screws. One end of the limiting cylinder 102 is fixed at the bottom of the limiting base 101, and the other end of the limiting cylinder can be fixedly connected with the guide rail mounting plate 107 through a connecting flange (not shown). The limit clamping groove 103 can be connected with a piston rod of a limit cylinder through a cylinder connecting piece 110. The limiting cylinder 102 has intake valves 111 provided on the upper and lower sides of the cylinder.
In the embodiment of the invention, the setting position can be set according to actual needs, so long as the door is opened and the feeding operation is not blocked.
Further, a position switch (not shown) is provided on the limit base 101. The position switch may be a magnetically sensitive switch. The supporting baffle 105 is provided with a damper plate 112. The damper plate 112 may be fixedly connected to the support damper 105 by screws, and the damper plate 112 is provided with an opening for accommodating the first rolling bearing. The damping plate 112 is used to cushion the door and reduce the inertial force generated during movement of the door so that the door has sufficient time to contact a position switch (not shown) on the limit base.
Further, as shown in fig. 5 and 6, the door opening device 2 is fixed to the bottom of the door 11, and may include a connection plate 201, a first rolling bearing fixing plate 202, a first rolling bearing 203, and a first connection shaft 204. Wherein, one end of the connecting plate 201 may be fixedly connected to the door 11 by a screw, and the other end is fixedly connected to one end of the first rolling bearing fixing plate. The first connecting shaft 204 is connected to the other end of the first rolling bearing fixing plate 202, and the first rolling bearing 203 is rotatably disposed on the first connecting shaft 204 via a first bearing retainer 205. Wherein the height of the first rolling bearing fixing plate 202 is adjustable by a height adjusting screw 206. The first rolling bearing 203 rolls along the limit guide rail 104 during the opening and closing of the door, and is in contact with the limit clamping groove 103 when the door is in an open state, and is in a separated state from the limit clamping groove 103 when the door is in a closed state.
Further, as shown in fig. 7 and 8, the door opening and closing device 3 is fixed to the bottom of the door 11, and may include a first support plate 301 and a second support plate 302, a driving motor 303, and a roller 304, which are disposed at intervals. Wherein the first support plate 301 and the second support plate 302 are connected to the door, in particular, may be connected to the bottom of the door 11 through an adapter flange 305. In addition, to increase the stability, the outer sides of the first support plate 301 and the second support plate 302 may be connected through a support plate connection plate 306 and a support plate connection rod 307, and the middle may be connected through a support plate connection shaft 308.
The roller 304 is disposed between the first support plate 301 and the second support plate 302. Specifically, the roller 304 may be disposed between the first support plate 301 and the second support plate 302 by a connection structure. The connecting structure may include an axle 309, two axle supports 310, and two axle side plates 311, where the roller 304 may be rotatably disposed on the axle 309 through a bearing, and two ends of the axle 309 are respectively connected with the corresponding axle side plates through corresponding support plates, and the axle supports 310 are fixed on the corresponding support plates and connected with the corresponding axle side plates.
The driving motor 303 fixing plate is disposed between the first support plate 301 and the second support plate 302, and may be fixed between the first support plate 301 and the second support plate 302 by a driving motor mounting plate 312. The driving motor 302 is connected with the roller 304 through a power transmission mechanism to drive the roller 304 to roll along the ground. In one exemplary embodiment, the power transmission mechanism may include a first sprocket (not shown) coupled with the driving shaft of the driving motor 303, a second sprocket 313 provided on the wheel shaft 309, and a chain 314 coupled with the first sprocket and the second sprocket. When installed, the chain 314 is required to tightly press the wheel axle side plate 311 through a screw on the wheel axle support, so as to play a tensioning role.
Further, as shown in fig. 2, 9 to 11, the door closing guide 4 may include a guide rail 401, a mounting bracket 402, a second rolling bearing 403, and a second connecting shaft 404. As shown in fig. 2, the guide rail 401 may be fixed to the top of the vacuum chamber 10 by a rail screw 409, particularly at a position outside the top of the vacuum chamber. The mounting bracket 402 is fixed to the top of the door 11, specifically, at a position corresponding to the guide rail mounting position on the outside of the top of the door. The lower part of the mounting bracket 402 can be fixed on the door through a bracket fixing screw 405, and after the gap between the mounting bracket and the guide rail 401 is adjusted, the relative position of the mounting bracket and the door frame can be locked through a jacking screw 406. The second connecting shaft 404 is disposed on the mounting bracket 402, and the second rolling bearing 403 is rotatably disposed on the second connecting shaft 404 by a second bearing retainer 407. The guide rail 401 is used for enabling the second rolling bearings 403 to roll in the closing and opening processes of the door, so that the door and the vacuum chamber are ensured to be opened and closed in place repeatedly, and meanwhile accurate positioning is achieved. In order to achieve the slow movement of the second rolling bearing, the guide rail 401 is formed with an inclined surface inclined from the inside to the outside of the vacuum chamber, and the inclined angle of the inclined surface may be set according to actual needs as long as the slow movement of the second rolling bearing can be ensured. In an exemplary embodiment, the inclination angle may be set to 3 to 5 °, preferably 3 °.
Further, as shown in fig. 1, the door closing guide further includes: a door in-place detection switch 408 provided at the top of the door for detecting whether the door is closed in place. The door in-place detection switch 408 may be a magnetically sensitive switch.
Further, as shown in fig. 1 and 12, the door tightening device 5 may include a tightening mechanism provided at the top of the vacuum chamber and a tightening guide 501 provided at the top of the door. As shown in fig. 12, the tightening mechanism may include a tightening cylinder 502, a tightening seat 514, and a tightening assembly. The tensioning cylinder 502 is fixed on the top of the vacuum chamber 10, and may be specifically fixedly connected with the vacuum chamber 10 through a fixing bolt 503 and a cylinder fixing spacer 504. The take-up cylinder may be a rotary cylinder.
The tensioning fixing seat 514 is connected with a piston rod of the tensioning cylinder, the specific tensioning fixing seat 514 can be connected with the piston rod of the tensioning cylinder 502 through the cylinder connecting piece 505, the cylinder connecting piece 505 is fixedly connected with the piston rod of the tensioning cylinder 502 through threads, and the T-shaped surface is guaranteed to be consistent with the direction of 0 degrees of the piston rod. The tightening fixing seat 514 and the cylinder connecting piece 505 can be fixedly connected through the tightening fixing nut 506 and the tightening fixing bolt 507.
The tightening assembly may include a tightening contact 508 and a tightening fastener by which the tightening contact 508 may be secured to the tightening fixed mount 514. The tightening fastener may include a set screw 509 and a set nut 510. In addition, a tightening fixing washer 513 is provided between the fixing nut 510 and the tightening fixing base 514 to increase the tightening force. In an embodiment of the present invention, the tightening contact may be made of rubber material. Wherein, under the effect of taut cylinder, taut contact spare stretches into in the taut guide way to taut the door. Specifically, when the tensioning cylinder is ventilated, the piston rod is contracted and simultaneously rotates from 0 degree to 90 degrees, and the tensioning guide groove and the tensioning contact piece act on the door frame under the driving of the piston rod to tension the door.
Further, as shown in fig. 1, the door tensioning device further includes: a cylinder tension detecting switch 511 and a tension detecting switch 512, the cylinder tension detecting switch 511 is provided on the tension guiding groove 501, and the tension detecting switch 512 is provided on the tension mechanism.
The automatic door opening and closing system provided by the embodiment of the invention can also comprise a control box (not shown) arranged on the door, wherein a signal trigger device is arranged in the control box and is used for being in communication connection with the door limiting device 1, the door automatic opening and closing device 3, the door closing guide device 4, the door tensioning device 5 and the remote control end. The signal triggering device may be an existing structure, for example, may be a PLC or a wireless device.
Further, the automatic door opening and closing system provided by the embodiment of the invention may further include: a door operating handle 6 provided on the door. In an exemplary embodiment, a trigger button (not shown) is disposed on the operating handle, and the trigger button is communicatively coupled to the remote control terminal for generating a trigger signal to trigger a door closing operation and a door opening operation.
The working principle of the automatic door opening and closing system provided by the embodiment of the invention is as follows:
the closing process comprises the following steps: when the door is in an open state, a remote control end transmits a door closing signal to a control board positioned on the door through a PLC or a wireless device, or a trigger button is manually operated, after the door receives the signal, a positioning switch on a door positioning base is retracted, a positioning signal is disconnected, a cylinder in the door positioning base is released, a door opening and positioning device is separated from the door positioning base, the door automatic switching device receives the signal, the door is shaped on the ground through friction between a roller and the ground under the driving of a motor, when the door moves to a certain position, a rolling bearing on a door closing guide device starts to slowly pass through a guide rail, under the driving condition of the motor, the door and a vacuum chamber are gradually closed in a set size (high direction), a door in-position detection switch receives the signal, when the tensioning detection switch receives the signal of the cylinder tensioning detection switch, a tensioning cylinder on the door stretches and stretches to a tensioning guide groove to tension the door, at the moment, a magnetic switch on the door and a switch on the vacuum chamber acquire the signal, and the two switches simultaneously have the signal, and feed back to the system, so that the door closing is accurately in place.
The door opening process comprises the following steps: when the door needs to be opened, the remote control end transmits a door opening signal to a control board positioned on the door through a PLC or a wireless device or a manual operation trigger button, after the door receives the signal, a tensioning cylinder is loosened, a magnetic switch and a tensioning detection switch on the door lose signals, a door driving motor starts to be started, when the door moves to a positioning position, a signal is obtained by a in-place position switch, the motor stops, a limiting cylinder locks the door through a guide rail, and whether the door is jacked in place or not is determined through a position switch on the limiting cylinder.
The automatic door opening and closing system provided by the embodiment of the invention can realize automatic production of the coating film when being applied specifically.
While certain specific embodiments of the invention have been described in detail by way of example, it will be appreciated by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the invention. Those skilled in the art will also appreciate that many modifications may be made to the embodiments without departing from the scope and spirit of the invention. The scope of the present disclosure is defined by the appended claims.

Claims (10)

1. An automatic door opening and closing system for a vacuum coating apparatus comprising a vacuum chamber and a door rotatably connected to the vacuum chamber, the system comprising: a door limiting device, a door opening and closing device, a door automatic opening and closing device, a door closing guide device and a door tensioning device;
the limiting device is arranged at a set position on the ground and comprises a limiting base, a limiting cylinder, a limiting clamping groove, a limiting guide rail and a supporting baffle, wherein the limiting base is fixed on the ground;
the door opening device is fixed at the bottom of the door and comprises a connecting plate, a first rolling bearing fixing plate, a first rolling bearing and a first connecting shaft, one end of the connecting plate is fixedly connected with the door, the other end of the connecting plate is fixedly connected with one end of the first rolling bearing fixing plate, the first connecting shaft is connected with the other end of the first rolling bearing fixing plate, and the first rolling bearing is rotatably arranged on the first connecting shaft; the first rolling bearing rolls along the limit guide rail in the opening and closing process of the door, is in contact with the limit clamping groove when the door is in an opening state, and is in a separation state from the limit clamping groove when the door is in a closing state;
the automatic door opening and closing device is fixed at the bottom of the door and comprises a first supporting plate, a second supporting plate, a driving motor mounting plate and a roller, wherein the first supporting plate and the second supporting plate are arranged at intervals;
the door closing guide device comprises a guide rail, a mounting bracket, a second rolling bearing and a second connecting shaft, wherein the guide rail is fixed at the top of the vacuum chamber, the mounting bracket is fixed at the top of the door, the second connecting shaft is arranged on the mounting bracket, and the second rolling bearing is rotatably arranged on the second connecting shaft; the guide rail is used for enabling the second rolling bearing to roll during the closing and opening processes of the door;
the door tensioning device comprises a tensioning mechanism arranged at the top of the vacuum chamber and a tensioning guide groove arranged at the top of the door, the tensioning mechanism comprises a tensioning cylinder, a tensioning fixing seat and a tensioning assembly, the tensioning cylinder is fixed at the top of the vacuum chamber, the tensioning fixing seat is connected with a piston rod of the tensioning cylinder, the tensioning assembly comprises a tensioning contact piece and a tensioning fastener, the tensioning contact piece is fixed on the tensioning fixing seat through the tensioning fastener, and under the action of the tensioning cylinder, the tensioning contact piece stretches into the tensioning guide groove to tension the door.
2. The system of claim 1, wherein the support baffle is provided with a shock absorbing plate.
3. The system of claim 1, wherein the door closing guide further comprises: a door in-place detection switch disposed at the top of the door.
4. The system of claim 1, wherein the door tensioning device further comprises: the tensioning detection switch of the air cylinder is arranged on the tensioning guide groove, and the tensioning detection switch is arranged on the tensioning mechanism.
5. The system of claim 1, wherein the guide rail is formed with an inclined surface inclined from the inside to the outside of the vacuum chamber.
6. The system of claim 1, wherein the roller is disposed between the first support plate and the second support plate by a connection structure, the connection structure comprising an axle, two axle supports, two axle side plates, the roller rotatably disposed on the axle, two ends of the axle respectively connected with the corresponding axle side plates through the corresponding support plates, and the axle supports fixed on the corresponding support plates and connected with the corresponding axle side plates.
7. The system of claim 6, wherein the power transfer mechanism comprises a first sprocket coupled to the drive motor, a second sprocket disposed on the axle, and a chain coupled to the first sprocket and the second sprocket.
8. The system of claim 1, wherein the first support plate and the second support plate are coupled to the bottom of the door by a flange.
9. The system of claim 1, wherein the tension contact is made of a rubber material.
10. The system of claim 1, further comprising: a door operating handle provided on the door.
CN202211114135.1A 2022-09-14 2022-09-14 Automatic door opening and closing system for vacuum coating equipment Active CN115341823B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211114135.1A CN115341823B (en) 2022-09-14 2022-09-14 Automatic door opening and closing system for vacuum coating equipment

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Application Number Priority Date Filing Date Title
CN202211114135.1A CN115341823B (en) 2022-09-14 2022-09-14 Automatic door opening and closing system for vacuum coating equipment

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CN115341823A CN115341823A (en) 2022-11-15
CN115341823B true CN115341823B (en) 2023-08-11

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CN207436791U (en) * 2017-10-20 2018-06-01 北京北方华创真空技术有限公司 The door opening/closing apparatus of air door in a kind of vacuum chamber
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CN112832608A (en) * 2021-02-17 2021-05-25 老肯医疗科技股份有限公司 Safety interlocking device for air pressure chamber
CN215978859U (en) * 2021-08-23 2022-03-08 无锡东庆染整设备有限公司 Automatic switch lock cabinet door structure

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WO2017195197A1 (en) * 2016-05-09 2017-11-16 Milbat - Giving Quality To Life Motorized door opening device
US11377895B2 (en) * 2019-07-19 2022-07-05 Jason Cohen Door operator having an automated roller

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2085960A (en) * 1980-09-26 1982-05-06 Desmond Peter Alfred Opening and closing gates by a motor-driven ground-engaging wheel
CN202544612U (en) * 2012-04-09 2012-11-21 惟思得交通设备有限公司 Door transmission mechanism in passenger room
CN207436791U (en) * 2017-10-20 2018-06-01 北京北方华创真空技术有限公司 The door opening/closing apparatus of air door in a kind of vacuum chamber
CN108639659A (en) * 2018-06-19 2018-10-12 江苏港星方能超声洗净科技有限公司 Straight-through type vacuum device
CN112832608A (en) * 2021-02-17 2021-05-25 老肯医疗科技股份有限公司 Safety interlocking device for air pressure chamber
CN215978859U (en) * 2021-08-23 2022-03-08 无锡东庆染整设备有限公司 Automatic switch lock cabinet door structure

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