CN115341823A

CN115341823A - Automatic door opening and closing system for vacuum coating equipment

Info

Publication number: CN115341823A
Application number: CN202211114135.1A
Authority: CN
Inventors: 魏国军; 高福利; 李景薇
Original assignee: Buhler Leybold Optics Equipment Beijing Co ltd
Current assignee: Buhler Leybold Optics Equipment Beijing Co ltd
Priority date: 2022-09-14
Filing date: 2022-09-14
Publication date: 2022-11-15
Anticipated expiration: 2042-09-14
Also published as: CN115341823B

Abstract

The invention provides an automatic door opening and closing system for vacuum coating equipment, which comprises: the door locking device comprises a door limiting device, a door opening-in-place device, a door automatic opening and closing device, a door closing guide device and a door tightening device. The door limiting device and the door opening-in-place device are matched with each other to ensure that the door is opened in place. The door automatic opening and closing device can automatically open and close the door. The door closing guide device can guide the door during the opening and closing process of the door. The door tensioning device is used for tensioning the door after the door is closed. The invention can automatically realize the opening and closing of the door of the vacuum coating equipment.

Description

Automatic door opening and closing system for vacuum coating equipment

Technical Field

The invention relates to the field of vacuum coating, in particular to an automatic door opening and closing system for vacuum coating equipment.

Background

The existing door opening mode of the single vacuum coating equipment is manual door opening, and the handle is manually pulled to drive the hinge on the side face to rotate. This approach does not allow for automated production in the first place; secondly, manual operation is unsafe, and staff's switch door in-process needs certain dynamics, and it is not problematic that the small equipment operation gets up, and big equipment manual operation gets up just with more arduous, promotes the in-process even and appears personnel's injury easily, is knocked down by the door. When the door is opened to a certain position, the door is not positioned on the premise that the equipment is not leveled, and the door can be automatically closed, so that people can be injured by the door when loading materials; the difference of the manual door opening and closing time is large again, so that the consistency of the time period between the furnace and the furnace cannot be ensured, the door opening time is inconsistent, the content of water vapor entering the cavity is inconsistent, the door closing and vacuumizing time and the vacuum atmosphere are also inconsistent, the stability of the process and the product is also different, and particularly for mass production equipment, the flow stability is an important factor influencing the productivity.

Disclosure of Invention

Aiming at the technical problems, the technical scheme adopted by the invention is as follows:

the embodiment of the invention provides an automatic door opening and closing system for vacuum coating equipment, wherein the vacuum coating equipment comprises a vacuum chamber and a door rotationally connected with the vacuum chamber, and the system comprises: the door limiting device is arranged at a set position on the ground and comprises a limiting base, a limiting cylinder, a limiting clamping groove, a limiting guide rail and a supporting baffle plate, the limiting base is fixed on the ground, the limiting cylinder is arranged inside the limiting base, the limiting clamping groove is connected with a piston rod of the limiting cylinder, the limiting guide rail is arranged on a first end of the upper side of the limiting base and is provided with an opening for exposing the limiting clamping groove, and the supporting baffle plate is arranged on a second end of the upper side of the limiting base; the door opening-in-place device is fixed at the bottom of the door and comprises a connecting plate, a first rolling bearing fixing plate, a first rolling bearing and a first connecting shaft, wherein one end of the connecting plate is fixedly connected with the door, the other end of the connecting plate is fixedly connected with one end of the first rolling bearing fixing plate, the first connecting shaft is connected with the other end of the first rolling bearing fixing plate, and the first rolling bearing is rotatably arranged on the first connecting shaft; the first rolling bearing rolls along the limiting guide rail in the opening and closing processes of the door, is in a contact state with the limiting clamping groove when the door is in an opening state, and is in a separation state with the limiting clamping groove when the door is in a closing state; the automatic door opening and closing device is fixed at the bottom of the door and comprises a first supporting plate, a second supporting plate, a driving motor mounting plate and rollers, wherein the first supporting plate and the second supporting plate are arranged at intervals; the door closing guide device comprises a guide rail, an installation support, a second rolling bearing and a second connecting shaft, the guide rail is fixed at the top of the vacuum chamber, the installation support is fixed at the top of the door, the second connecting shaft is arranged on the installation support, and the second rolling bearing is rotatably arranged on the second connecting shaft; the guide rail is used for the second rolling bearing to roll in the closing and opening processes of the door; the door tensioning device comprises a tensioning mechanism arranged at the top of the vacuum chamber and a tensioning guide groove arranged at the top of the door, wherein the tensioning mechanism comprises a tensioning cylinder, a tensioning fixed seat and a tensioning assembly, the tensioning cylinder is fixed at the top of the vacuum chamber, the tensioning fixed seat is connected with a piston rod of the tensioning cylinder, the tensioning assembly comprises a tensioning contact piece and a tensioning fastener, the tensioning contact piece is fixed on the tensioning fixed seat through the tensioning fastener, and under the action of the tensioning cylinder, the tensioning contact piece extends into the tensioning guide groove so as to tension the door.

The invention has at least the following beneficial effects:

the automatic door opening and closing system for the vacuum coating equipment, provided by the embodiment of the invention, can improve the safety of the equipment, reduce the processes, avoid manual operation, ensure personal safety and meet the field production mode of large batches and large workpieces. In addition, stable door opening and closing interval time can stabilize the production process and improve the product yield.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic perspective view of an automatic door opening and closing system for a vacuum deposition apparatus, which is provided in an embodiment of the present invention.

Fig. 2 is a plan view of an automatic opening and closing door system for a vacuum deposition apparatus, to which an embodiment of the present invention is applied.

Fig. 3 is a schematic structural diagram of a door limiting device.

Fig. 4 is a top view of fig. 3.

FIG. 5 is a front view of the door opening and positioning device.

Figure 6 is a side view of the door opening to the position device.

Fig. 7 is a side view of the automatic door opening and closing apparatus.

Fig. 8 is a rear view of the door opening and closing apparatus.

Fig. 9 to 11 are schematic views of the door closing guide.

Fig. 12 is a schematic view of a door tightening mechanism.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Fig. 1 is a schematic perspective view of an automatic opening and closing door system for a vacuum coating apparatus, provided by an embodiment of the present invention. Fig. 2 is a plan view of an automatic opening and closing door system for a vacuum deposition apparatus, to which an embodiment of the present invention is applied. Fig. 3 is a schematic structural diagram of a door limiting device. Fig. 4 is a top view of fig. 3. FIG. 5 is a front view of the door opening and positioning device. Figure 6 is a side view of the door in place apparatus. Fig. 7 is a side view of the automatic door opening and closing apparatus. Fig. 8 is a rear view of the automatic door opening and closing apparatus. Fig. 9 to 11 are schematic views of the door closing guide. Fig. 12 is a schematic view of a door tightening mechanism.

An embodiment of the present invention provides an automatic door opening and closing system for a vacuum coating apparatus, which may include a vacuum chamber 10 and a door 11 rotatably connected to the vacuum chamber 10, as shown in fig. 1 and 2. The door 11 is connected to the vacuum chamber 10 by an existing hinge mechanism (not shown) and can be easily rotated.

As shown in fig. 1, an automatic door opening and closing system for a vacuum deposition apparatus according to an embodiment of the present invention may include: the device comprises a door limiting device 1, a door opening-in-place device 2, a door automatic opening and closing device 3, a door closing guide device 4 and a door tightening device 5.

Further, the door stopper device 1 is disposed at a set position on the ground, and as shown in fig. 3 and 4, may include a stopper base 101, a stopper cylinder 102, a stopper slot 103, a stopper rail 104, and a support baffle 105. The limiting base 101 is fixed on the ground, the limiting cylinder 102 is arranged inside the limiting base 101, the limiting clamping groove 103 is connected with a piston rod of the limiting cylinder 102, the limiting guide rail 104 is arranged on a first end of the upper side of the limiting base 101 and is provided with an opening 106 for exposing the limiting clamping groove, and the supporting baffle 105 is arranged on a second end of the upper side of the limiting base 101. Specifically, the limiting base 101 can be fixed at a set position on the ground through anchor bolts, the limiting guide rail 104 can be fixed on a guide rail mounting plate 107, a supporting adapter plate 108 is arranged at the lower part of the guide rail mounting plate 107, the supporting adapter plate 108 can be fixedly connected with the limiting base 107 through screws, and after the guide rail mounting plate 107 is placed at a proper position, the guide rail mounting plate can be fixed on the supporting adapter plate 108 through adjusting plates 109 at the front side and the rear side. The guide rail mounting plate 107 is also provided with an opening through which the limiting clamping groove 103 is exposed. The support shield 105 may be secured to the rail mounting plate 107 by screws. One end of the limit cylinder 102 is fixed to the bottom of the limit base 101, and the other end thereof is fixedly connected to the rail mounting plate 107 via a connecting flange (not shown). The limiting clamping groove 103 can be connected with a piston rod of the limiting air cylinder through an air cylinder connecting piece 110. The limit cylinder 102 intake valves 111 are provided on both upper and lower sides of the cylinder.

In the embodiment of the present invention, the setting position may be set according to actual needs as long as it is ensured that the feeding operation is not hindered when the door is opened.

Further, a position switch (not shown) is provided on the limit base 101. The position switch may be a magnetic force sensing switch. The support baffle 105 is provided with a damper plate 112. The damping plate 112 may be fixedly connected to the support baffle 105 by screws, and the damping plate 112 is provided with an opening for receiving the first rolling bearing. The damping plate 112 is used to provide a buffer function, and reduce the inertia force generated by the door when moving, so that the door has a sufficient time to contact a position switch (not shown) on the limit base.

Further, as shown in fig. 5 and 6, the door opening-positioning device 2 is fixed to the bottom of the door 11, and may include a connection plate 201, a first rolling bearing fixing plate 202, a first rolling bearing 203, and a first connection shaft 204. One end of the connecting plate 201 may be fixedly connected to the door 11 through a screw, and the other end of the connecting plate is fixedly connected to one end of the first rolling bearing fixing plate. The first connecting shaft 202 is connected to the other end of the first rolling bearing fixing plate 202, and the first rolling bearing 203 is rotatably disposed on the first connecting shaft 204 through a first retainer ring 205. The height of the first rolling bearing fixing plate 202 can be adjusted by the height adjusting screw 206. In the process of opening and closing the door, the first rolling bearing 203 rolls along the limit guide rail 104, and is in a contact state with the limit slot 103 when the door is in an open state, and is in a separation state from the limit slot 103 when the door is in a closed state.

Further, as shown in fig. 7 and 8, the door automatic opening and closing apparatus 3 is fixed to the bottom of the door 11, and may include first and

second support plates

301 and 302 spaced apart from each other, a driving motor 303, and a roller 304. The first support plate 301 and the second support plate 302 are connected to the door, and in particular, may be connected to the bottom of the door 11 through an adapter flange 305. Further, to increase the stability, the outer sides of the first and

second support plates

301 and 302 may be connected by a support plate connection plate 306 and a support plate connection rod 307, and the middle may be connected by a support plate connection shaft 308.

The roller 304 is disposed between the first support plate 301 and the second support plate 302. Specifically, the roller 304 may be disposed between the first support plate 301 and the second support plate 302 through a connection structure. The connecting structure may include an axle 309, two axle supports 310, and two axle side plates 311, wherein the roller 304 may be rotatably disposed on the axle 309 through a bearing, two ends of the axle 309 respectively pass through the corresponding support plates to be connected with the corresponding axle side plates, and the axle supports 310 are fixed on the corresponding support plates and connected with the corresponding axle side plates.

The fixing plate of the driving motor 302 is disposed between the first support plate 301 and the second support plate 302, and particularly may be fixed between the first support plate 301 and the second support plate 302 by a driving motor mounting plate 312. The driving click 302 is connected with the roller 304 through a power transmission mechanism to drive the roller 304 to roll along the ground. In an exemplary embodiment, the power transmission mechanism may include a first sprocket (not shown) connected to the driving shaft of the driving motor 302, a second sprocket 313 provided on the wheel shaft 309, and a chain 314 connected to the first sprocket and the second sprocket. During installation, the chain 314 needs to be tightly pressed against the axle side plate 311 through the screw 315 on the axle support to play a tensioning role.

Further, as shown in fig. 2, 9 to 11, the door closing guide 4 may include a guide rail 401, a mounting bracket 402, a second rolling bearing 403, and a second connecting shaft 404. As shown in fig. 2, the guide rail 401 may be fixed to the top of the vacuum chamber 10, specifically, at a position outside the top of the vacuum chamber, by a rail screw 409. The mounting bracket 402 is fixed to the top of the door 11, specifically, at a position corresponding to the mounting position of the guide rail on the outer side of the top of the door. The lower portion of the mounting bracket 402 can be fixed to the door by a bracket fixing screw 405, and after adjusting the gap with the guide rail 401, the relative position of the mounting bracket and the door frame can be locked by a tightening screw 406. The second connecting shaft 404 is arranged on the mounting bracket 402, and the second rolling bearing 403 is rotatably arranged on the second connecting shaft 404 via a second bearing retainer 407. The guide rail 401 is used for allowing the second rolling shaft 403 to roll in the process of closing and opening the door, so that the door and the vacuum chamber can be opened and closed repeatedly, and meanwhile, accurate positioning is realized. In order to realize the slow movement of the second rolling bearing, the guide rail 401 is formed with an inclined surface inclined from the inside of the vacuum chamber to the outside, and the inclination angle of the inclined surface may be set as required as long as the slow movement of the second rolling bearing can be ensured. In an exemplary embodiment, the inclination angle may be set to 3 to 5 °, preferably 3 °.

Further, as shown in fig. 1, the door closing guide apparatus further includes: a door-in-place detection switch 408 is provided at the top of the door for detecting whether the door is closed in place. The door-in-place detection switch 408 may be a magnetic sensing switch.

Further, as shown in fig. 1 and 12, the door tensioning device 5 may include a tensioning mechanism provided at the top of the vacuum chamber and a tensioning guide groove 501 provided at the top of the door. As shown in fig. 12, the tensioning mechanism may include a tensioning cylinder 502, a tensioning mount 503, and a tensioning assembly. The tightening cylinder 502 is fixed to the top of the vacuum chamber 10, and may be fixedly connected to the vacuum chamber 10 by a fixing bolt 503 and a cylinder fixing gasket 504. The tensioning cylinder may be a rotary cylinder.

The tensioning fixing seat 503 is connected with a piston rod of the tensioning cylinder, specifically, the tensioning fixing seat 503 can be connected with the piston rod of the tensioning cylinder 502 through a cylinder connecting piece 505, the cylinder connecting piece 505 is fixedly connected with the piston rod of the tensioning cylinder 501 through a thread, and the T-shaped surface is ensured to be consistent with the 0-degree direction of the piston rod. The tightening fixing base 503 and the cylinder connecting piece 505 can be fixedly connected through a tightening fixing nut 506 and a tightening fixing bolt 507.

The tensioning assembly may include a tensioning contact 508 and a tensioning fastener by which the tensioning contact 508 may be secured to the tensioning anchor 503. The tightening fastener may include a set screw 509 and a set nut 510. In addition, a tightening fixing washer 513 is further provided between the fixing nut 510 and the tightening fixing base 503 to increase the tightening force. In an embodiment of the present invention, the tension contact member may be made of a rubber material. Wherein the tightening contact piece is inserted into the tightening guide groove by the tightening cylinder to tighten the door. Specifically, when the tensioning cylinder is ventilated, the piston rod rotates from 0 degrees to 90 degrees while contracting, and the door is tensioned by acting on a door frame under the driving of the piston rod through the tensioning guide groove and the tensioning contact piece.

Further, as shown in fig. 1, the door tensioner further includes: an air cylinder tensioning detection switch 511 and a tensioning detection switch 512, wherein the air cylinder tensioning detection switch 511 is arranged on the tensioning guide groove 501, and the tensioning detection switch 512 is arranged on the tensioning mechanism.

The automatic door opening and closing system provided by the embodiment of the invention can further comprise a control box (not shown) arranged on the door, wherein a signal trigger device is arranged in the control box and is used for being in communication connection with the door limiting device 1, the door automatic opening and closing device 3, the door closing guide device 4, the door tensioning device 5 and the remote control end. The signal triggering device may be of existing construction, for example, a PLC or a wireless device.

Further, the automatic door opening and closing system provided by the embodiment of the invention can further comprise: a door operating handle 6 provided on the door. In an exemplary embodiment, the operating handle is provided with a trigger button (not shown), and the trigger button can be connected with a remote control terminal in a communication way and used for generating a trigger signal to trigger the door closing operation and the door opening operation.

The working principle of the automatic door opening and closing system provided by the embodiment of the invention is as follows:

a door closing process: when the door is in an open state, a remote control end transmits a door closing signal to a control panel on the door through a PLC or a wireless device or a manual operation trigger button, after the door receives the signal, a positioning switch on a door limiting base is retracted, the in-place signal is disconnected, an air cylinder in the door limiting base is loosened, the door in-place device is separated from the door limiting base, the door automatic switch device receives the signal, the door is driven by a motor to run on the ground through the friction between rollers and the ground, when the door runs to a certain position, a rolling bearing on the door closing guide device starts to slowly pass through a guide rail, the door in-place device and the guide rail gradually close the door and a vacuum chamber in a set size (in the high direction) under the condition of motor driving, the door in-place detection switch receives the signal, the door automatic switch device stops working, when the tensioning detection switch receives the signal of the tensioning detection switch of the air cylinder, the tensioning device stretches to a tensioning guide groove on the door to tension the door, at the moment, a magnetic switch on the door and a vacuum chamber obtain the signal, the two switches simultaneously have the signals and feed back to the system to realize accurate in-place closing of the door.

A door opening process: when the door needs to be opened, the remote control end transmits a door opening signal to a control panel on the door through a PLC or a wireless device or a manual operation trigger button, the door receives the signal, a tensioning cylinder loosens, a magnetic switch and a tensioning detection switch on the door lose the signal, a door driving motor starts, when the door moves to a positioning position, a position switch in place obtains the signal, the motor stops, a limiting cylinder locks the door through a guide rail, and whether the door is pushed to the place or not is determined through the position switch on the limiting cylinder.

The automatic door opening and closing system provided by the embodiment of the invention can realize automatic coating production in specific application.

Although some specific embodiments of the present invention have been described in detail by way of illustration, it should be understood by those skilled in the art that the above illustration is only for the purpose of illustration and is not intended to limit the scope of the invention. It will also be appreciated by those skilled in the art that various modifications may be made to the embodiments without departing from the scope and spirit of the invention. The scope of the present disclosure is defined by the appended claims.

Claims

1. An automatic door opening and closing system for a vacuum coating apparatus comprising a vacuum chamber and a door rotatably connected to the vacuum chamber, the system comprising: the device comprises a door limiting device, a door in-place opening device, a door automatic opening and closing device, a door closing guide device and a door tensioning device;

the door limiting device is arranged at a set position on the ground and comprises a limiting base, a limiting cylinder, a limiting clamping groove, a limiting guide rail and a supporting baffle plate, wherein the limiting base is fixed on the ground, the limiting cylinder is arranged inside the limiting base, the limiting clamping groove is connected with a piston rod of the limiting cylinder, the limiting guide rail is arranged on a first end of the upper side of the limiting base and is provided with an opening for exposing the limiting clamping groove, and the supporting baffle plate is arranged on a second end of the upper side of the limiting base;

the door in-place opening device is fixed at the bottom of the door and comprises a connecting plate, a first rolling bearing fixing plate, a first rolling bearing and a first connecting shaft, one end of the connecting plate is fixedly connected with the door, the other end of the connecting plate is fixedly connected with one end of the first rolling bearing fixing plate, the first connecting shaft is connected with the other end of the first rolling bearing fixing plate, and the first rolling bearing is rotatably arranged on the first connecting shaft; the first rolling bearing rolls along the limiting guide rail in the opening and closing processes of the door, is in a contact state with the limiting clamping groove when the door is in an opening state, and is in a separation state with the limiting clamping groove when the door is in a closing state;

the automatic door opening and closing device is fixed at the bottom of the door and comprises a first supporting plate, a second supporting plate, a driving motor mounting plate and rollers which are arranged at intervals, the first supporting plate and the second supporting plate are connected with the door, the rollers are arranged between the first supporting plate and the second supporting plate, and a driving motor fixing plate is arranged between the first supporting plate and the second supporting plate and is connected with the rollers through a power transmission mechanism so as to drive the rollers to roll along the ground;

the door closing guide device comprises a guide rail, an installation support, a second rolling bearing and a second connecting shaft, the guide rail is fixed at the top of the vacuum chamber, the installation support is fixed at the top of the door, the second connecting shaft is arranged on the installation support, and the second rolling bearing is rotatably arranged on the second connecting shaft; the guide rail is used for the second rolling bearing to roll in the closing and opening processes of the door;

the door tensioning device comprises a tensioning mechanism arranged at the top of the vacuum chamber and a tensioning guide groove arranged at the top of the door, wherein the tensioning mechanism comprises a tensioning cylinder, a tensioning fixed seat and a tensioning assembly, the tensioning cylinder is fixed at the top of the vacuum chamber, the tensioning fixed seat is connected with a piston rod of the tensioning cylinder, the tensioning assembly comprises a tensioning contact piece and a tensioning fastener, the tensioning contact piece is fixed on the tensioning fixed seat through the tensioning fastener, and under the action of the tensioning cylinder, the tensioning contact piece extends into the tensioning guide groove so as to tension the door.

2. The system of claim 1, wherein a damper plate is disposed on the support baffle.

3. The system of claim 1, wherein the door closing guide further comprises: a door-in-place detection switch disposed at the top of the door.

4. The system of claim 1, wherein the door tensioning device further comprises: the tensioning detection switch of cylinder and taut detection switch, the taut detection switch setting of cylinder is in on the taut guide way, taut detection switch sets up on the straining mechanism.

5. The system according to claim 1, wherein the guide rail is formed with an inclined surface inclined from the inside to the outside of the vacuum chamber.

6. The system of claim 1, wherein the roller is disposed between the first support plate and the second support plate through a connection structure, the connection structure comprises a wheel shaft, two wheel shaft supports, and two wheel shaft side plates, the roller is rotatably disposed on the wheel shaft, two ends of the wheel shaft respectively penetrate through the corresponding support plates to be connected with the corresponding wheel shaft side plates, and the wheel shaft supports are fixed on the corresponding support plates and connected with the corresponding wheel shaft side plates.

7. The system of claim 6, wherein the power transmission mechanism includes a first sprocket coupled to the drive motor, a second sprocket disposed on the axle, and a chain coupled to the first sprocket and the second sprocket.

8. The system of claim 1, wherein the first support plate and the second support plate are connected to the bottom of the door by flanges.

9. The system of claim 1, wherein the tension contactor is made of a rubber material.

10. The system of claim 1, further comprising: a door operating handle provided on the door.