CN115332138A - Multi-degree-of-freedom positioning mechanism for semiconductor element - Google Patents

Multi-degree-of-freedom positioning mechanism for semiconductor element Download PDF

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Publication number
CN115332138A
CN115332138A CN202211047236.1A CN202211047236A CN115332138A CN 115332138 A CN115332138 A CN 115332138A CN 202211047236 A CN202211047236 A CN 202211047236A CN 115332138 A CN115332138 A CN 115332138A
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China
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camera
axis
deviation
correcting
linear displacement
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Chinese (zh)
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狄建科
武晓波
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Suzhou Zhande Automation Equipment Co ltd
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Suzhou Zhande Automation Equipment Co ltd
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Priority to CN202211047236.1A priority Critical patent/CN115332138A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)

Abstract

The invention relates to a semiconductor element multi-degree-of-freedom positioning mechanism which comprises a fixed base plate, a deviation rectifying mechanism, an X-direction deviation rectifying camera module, a Z-direction deviation rectifying camera module and a Y-direction deviation rectifying camera module, wherein the deviation rectifying mechanism, the X-direction deviation rectifying camera module, the Z-direction deviation rectifying camera module and the Y-direction deviation rectifying camera module are all arranged on the fixed base plate, the X-direction deviation rectifying camera module is positioned on one side of the deviation rectifying mechanism along the Y-axis negative direction, the Z-direction deviation rectifying camera module is positioned right above the deviation rectifying mechanism, and the Y-direction deviation rectifying camera module is positioned on one side of the deviation rectifying mechanism along the X-axis negative direction. According to the invention, through the cooperative matching of the deviation rectifying mechanism, the X-direction deviation rectifying camera module, the Z-direction deviation rectifying camera module and the Y-direction deviation rectifying camera module, under the control of visual positioning in three directions, the six-degree-of-freedom deviation rectifying positioning of a tiny component in a tiny space can be accurately carried out.

Description

Multi-degree-of-freedom positioning mechanism for semiconductor element
Technical Field
The invention relates to the technical field related to semiconductor element processing, in particular to a semiconductor element multi-degree-of-freedom positioning mechanism.
Background
In the semiconductor industry, when micro elements are required to be carried, processed and the like frequently, the requirement of multi-degree-of-freedom accurate positioning and deviation correction is required on the elements, and the traditional multi-axis positioning platform has the problems of large size and high cost, and is not beneficial to miniaturization and cost optimization of processing equipment.
In view of the above-mentioned drawbacks, the present inventors have made active research and innovation to create a multi-degree-of-freedom positioning mechanism for semiconductor devices, which has industrial application value.
Disclosure of Invention
In order to solve the above technical problems, an object of the present invention is to provide a semiconductor device multi-degree-of-freedom positioning mechanism.
In order to achieve the purpose, the invention adopts the following technical scheme:
the semiconductor element multi-degree-of-freedom positioning mechanism comprises a fixed base plate, a deviation rectifying mechanism, an X-direction deviation rectifying camera module, a Z-direction deviation rectifying camera module and a Y-direction deviation rectifying camera module, wherein the deviation rectifying mechanism, the X-direction deviation rectifying camera module, the Z-direction deviation rectifying camera module and the Y-direction deviation rectifying camera module are all arranged on the fixed base plate, the X-direction deviation rectifying camera module is positioned on one side of the deviation rectifying mechanism along the Y-axis negative direction, the Z-direction deviation rectifying camera module is positioned right above the deviation rectifying mechanism, and the Y-direction deviation rectifying camera module is positioned on one side of the deviation rectifying mechanism along the X-axis negative direction;
the correcting mechanism sequentially comprises a correcting bottom plate, a six-axis correcting positioning mechanism and a correcting adsorption base from bottom to top, the bottom of the six-axis correcting positioning mechanism is installed on the fixed bottom plate through the lower correcting bottom plate, and the top of the six-axis correcting positioning mechanism is connected with the upper correcting adsorption base;
the X-direction rectification camera module comprises an X-direction camera base plate, an X-direction camera linear motor and an X-direction camera detection mechanism, wherein the bottom of the X-direction camera linear motor is installed on the fixed base plate along the X-axis direction through the X-direction camera base plate below the X-direction camera linear motor, the driving end of the top of the X-direction camera linear motor is in driving connection with the X-direction camera detection mechanism above the X-direction camera linear motor through an X-direction camera sliding table plate, the X-direction camera detection mechanism comprises an X-direction camera, an X-direction lens, an X-direction camera light source and a prism, the X-direction camera, the X-direction lens and the prism are sequentially arranged along the negative direction of the X-axis and are installed on the X-direction camera double-axis driving mechanism through an X-direction lens installation seat, the X-direction camera double-axis driving mechanism is installed on the X-direction camera sliding table plate, and the X-direction camera light source is located on one side of the prism along the positive direction of the Y-axis and is installed on the X-direction camera sliding table plate through an X-direction camera light source support;
the Z-direction rectification camera module comprises a Z-direction top mounting plate and a Z-direction camera detection mechanism, a Z-direction camera triaxial driving mechanism is arranged at the bottom of the Z-direction top mounting plate, a Z-direction lens mounting seat is arranged at the bottom of the Z-direction camera triaxial driving mechanism, the Z-direction camera detection mechanism comprises a Z-direction camera, a Z-direction lens and a Z-direction camera light source, the Z-direction camera, the Z-direction lens and the Z-direction camera light source are sequentially arranged along the negative direction of the Z-direction and are mounted on the Z-direction camera triaxial driving mechanism through the Z-direction lens mounting seat, and the Z-direction camera light source is mounted on the Z-direction camera triaxial driving mechanism through a Z-direction camera light source support;
y is including Y to camera bottom plate and Y to camera detection mechanism to rectifying camera module, Y is installed on PMKD to the camera bottom plate, Y is provided with Y on the camera bottom plate to camera three-axis drive mechanism, Y includes Y to the camera to camera detection mechanism, Y is to camera lens and Y to camera light source, Y is to the camera, Y sets up and installs on Y is to camera three-axis drive mechanism to camera lens and Y along the positive direction of X axle in proper order to camera light source, Y passes through Y to camera light source support mounting on Y is to camera three-axis drive mechanism to camera light source.
As a further improvement of the invention, the six-axis deviation-rectifying positioning mechanism sequentially comprises a deviation-rectifying electric Z-axis sliding table, a deviation-rectifying X-axis linear displacement table, a deviation-rectifying Y-axis linear displacement table, a deviation-rectifying angle rotating table, a first arc swinging table and a second arc swinging table from bottom to top, the deviation-rectifying electric Z-axis sliding table is arranged on a deviation-rectifying bottom plate and is connected with a deviation-rectifying X-axis linear displacement table above through a deviation-rectifying Z-axis table plate, the deviation-rectifying X-axis linear displacement table, the deviation-rectifying Y-axis linear displacement table, the deviation-rectifying angle rotating table, the first arc swinging table and the second arc swinging table are sequentially connected from bottom to top, and a deviation-rectifying adsorption base is arranged at the top of the second arc swinging table.
As a further improvement of the X-direction camera double-shaft driving mechanism, the X-direction camera X-shaft linear displacement table and the X-direction camera electric Z-shaft sliding table are sequentially arranged from bottom to top, the X-direction camera X-shaft linear displacement table is installed on the X-direction camera sliding table plate, and the X-direction camera X-shaft linear displacement table and the X-direction camera electric Z-shaft sliding table are sequentially connected with an X-direction lens installing seat above the X-direction camera X-shaft linear displacement table and the X-direction camera electric Z-shaft sliding table from bottom to top.
As a further improvement of the invention, the Z-direction camera three-axis driving mechanism sequentially comprises a Z-direction camera Y-axis linear displacement table, a Z-direction camera X-axis linear displacement table and a Z-direction camera electric Z-axis sliding table from top to bottom, wherein the Z-direction camera Y-axis linear displacement table is arranged at the bottom of the Z-direction top mounting plate, and the Z-direction camera Y-axis linear displacement table, the Z-direction camera X-axis linear displacement table and the Z-direction camera electric Z-axis sliding table are sequentially connected with a lower Z-direction lens mounting seat from top to bottom.
As a further improvement of the invention, the Y-direction camera three-axis driving mechanism sequentially comprises a Y-direction camera X-axis linear displacement table, a Y-direction camera Y-axis linear displacement table and a Y-direction camera electric Z-axis sliding table from bottom to top, wherein the Y-direction camera X-axis linear displacement table is arranged on a Y-direction camera bottom plate, and the Y-direction camera X-axis linear displacement table, the Y-direction camera Y-axis linear displacement table and the Y-direction camera electric Z-axis sliding table are sequentially connected with an upper Y-direction lens mounting seat from bottom to top.
By the scheme, the invention at least has the following advantages:
according to the invention, through the cooperative matching of the deviation rectifying mechanism, the X-direction deviation rectifying camera module, the Z-direction deviation rectifying camera module and the Y-direction deviation rectifying camera module, under the control of visual positioning in three directions, the six-degree-of-freedom deviation rectifying positioning of a tiny component in a tiny space can be accurately carried out. The system has better integration, optimizes the installation space occupied by the mechanism and occupies smaller area.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic structural diagram of a multi-degree-of-freedom positioning mechanism for semiconductor devices according to the present invention;
FIG. 2 is a schematic structural diagram of the deviation correcting mechanism of FIG. 1;
FIG. 3 is a schematic diagram of the X-direction correction camera module shown in FIG. 1;
FIG. 4 is a schematic view of the structure of the Z-direction correction camera module shown in FIG. 1;
fig. 5 is a schematic structural diagram of the Y-direction rectification camera module in fig. 1.
In the drawings, the meanings of the reference numerals are as follows.
1. Fixed baseplate 2 deviation rectifying mechanism
3X is to camera module 4Z of rectifying a deviation to rectifying a deviation
5Y-direction deviation rectifying camera module 6 deviation rectifying bottom plate
7. Electronic Z axle slip table 8 of rectifying Z axle platen of rectifying
9. Deviation-correcting X-axis linear displacement table 10 deviation-correcting Y-axis linear displacement table
11. First arc swing table of deviation-correcting angle rotating table 12
13. Second arc swing table 14 adsorption base of rectifying
15 X-direction camera base plate 16X-direction camera linear motor
17 X-direction camera slide table plate 18X-direction camera X-axis linear displacement table
19 X is to electronic Z axle slip table 20X of camera to camera
21 X-direction lens 22X-direction lens mounting base
23 X-direction camera light source 24 prism
25 X-direction camera light source support 26Z-direction top mounting plate
27 Z-direction camera Y-axis linear displacement table 28Z-direction camera X-axis linear displacement table
29 Electric Z-axis sliding table 30Z-direction lens mounting base of Z-direction camera
31 Z-direction camera 32Z-direction lens
33 Z-direction camera light source 34Z-direction camera light source support
35 Y-direction camera base plate 36Y-direction camera X-axis linear displacement table
37 Y-direction camera Y-axis linear displacement table 38Y-direction camera electric Z-axis sliding table
39 Y-direction lens mounting base 40Y-direction camera
41 Y-direction lens 42Y-direction camera light source
43 Y-direction camera light source support
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
In order to make those skilled in the art better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
Examples
As shown in figures 1 to 5 of the drawings,
the utility model provides a semiconductor component multi freedom positioning mechanism, including PMKD 1, the mechanism of rectifying 2, X is to rectifying camera module 3, Z is to rectifying camera module 4 and Y is to rectifying camera module 5, the mechanism of rectifying 2, X is to rectifying camera module 3, Z is to rectifying camera module 4 and Y all install on PMKD 1 to rectifying camera module 5, X is located rectifying mechanism 2 along one side of Y axle negative direction to rectifying camera module 3, Z is to rectifying camera module 4 and being located rectifying mechanism 2 directly over position, Y is to rectifying camera module 5 and being located rectifying mechanism 2 along one side of X axle negative direction.
The deviation rectifying mechanism 2 sequentially comprises a deviation rectifying bottom plate 6, a six-axis deviation rectifying positioning mechanism and a deviation rectifying adsorption base 14 from bottom to top, the bottom of the six-axis deviation rectifying positioning mechanism is installed on the fixed bottom plate 1 through the deviation rectifying bottom plate 6 below, and the top of the six-axis deviation rectifying positioning mechanism is connected with the deviation rectifying adsorption base 14 above. Six positioning mechanism that rectifies is from up including electronic Z axle slip table 7 of rectifying in proper order down, X axle linear displacement platform 9 rectifies, Y axle linear displacement platform 10 rectifies, angle revolving stage 11 rectifies, first arc pendulum platform 12 and second arc pendulum platform 13 rectify, electronic Z axle slip table 7 of rectifying installs on bottom plate 6 rectifies, electronic Z axle slip table 7 of rectifying is connected with the X axle linear displacement platform 9 of rectifying of top through Z axle platen 8 of rectifying, X axle linear displacement platform 9 rectifies, Y axle linear displacement platform 10 rectifies, angle revolving stage 11 rectifies, first arc pendulum platform 12 and second arc pendulum platform 13 are from up being connected in proper order down and are set up, the top of second arc pendulum platform 13 is provided with the absorption base 14 of rectifying.
The correction angle rotating platform 11 can rotate in the XY axis plane, the first arc swing platform 12 can swing in the XZ axis plane, and the second arc swing platform 13 can swing in the YZ axis plane.
The X-direction rectification camera module 3 comprises an X-direction camera bottom plate 15, an X-direction camera linear motor 16 and an X-direction camera detection mechanism, wherein the bottom of the X-direction camera linear motor 16 is installed on the fixed bottom plate 1 through the lower X-direction camera bottom plate 15 along the X-axis direction, the driving end of the top of the X-direction camera linear motor 16 is in driving connection with the upper X-direction camera detection mechanism through an X-direction camera slide plate 17, the X-direction camera detection mechanism comprises an X-direction camera 20, an X-direction lens 21, an X-direction camera light source 23 and a prism 24, the X-direction camera 20, the X-direction lens 21 and the prism 24 are sequentially arranged along the negative direction of the X-axis and are installed on the X-direction camera double-axis driving mechanism through an X-direction lens installation seat 22, the X-direction camera double-axis driving mechanism is installed on the X-direction camera slide plate 17, and the X-direction camera light source 23 is located on one side of the prism 24 along the Y-axis and is installed on the X-direction camera slide plate 17 through an X-direction camera light source support 25. The X-direction camera double-shaft driving mechanism sequentially comprises an X-direction camera X-axis linear displacement table 18 and an X-direction camera electric Z-axis sliding table 19 from bottom to top, the X-direction camera X-axis linear displacement table 18 is installed on the X-direction camera sliding table 17, and the X-direction camera X-axis linear displacement table 18 and the X-direction camera electric Z-axis sliding table 19 are sequentially connected with an X-direction lens installation seat 22 from bottom to top.
The Z-direction deviation rectifying camera module 4 comprises a Z-direction top mounting plate 26 and a Z-direction camera detection mechanism, a Z-direction camera three-axis driving mechanism is arranged at the bottom of the Z-direction top mounting plate 26, a Z-direction lens mounting seat 30 is arranged at the bottom of the Z-direction camera three-axis driving mechanism, the Z-direction camera detection mechanism comprises a Z-direction camera 31, a Z-direction lens 32 and a Z-direction camera light source 33, the Z-direction camera 31, the Z-direction lens 32 and the Z-direction camera light source 33 are sequentially arranged along the negative direction of the Z axis and are mounted on the Z-direction camera three-axis driving mechanism through the Z-direction lens mounting seat 30, and the Z-direction camera light source 33 is mounted on the Z-direction camera three-axis driving mechanism through a Z-direction camera light source support 34. The Z-direction camera three-axis driving mechanism sequentially comprises a Z-direction camera Y-axis linear displacement table 27, a Z-direction camera X-axis linear displacement table 28 and a Z-direction camera electric Z-axis sliding table 29 from top to bottom, wherein the Z-direction camera Y-axis linear displacement table 27 is arranged at the bottom of a Z-direction top mounting plate 26, and the Z-direction camera Y-axis linear displacement table 27, the Z-direction camera X-axis linear displacement table 28 and the Z-direction camera electric Z-axis sliding table 29 are sequentially connected with a Z-direction lens mounting seat 30 below from top to bottom.
The Y-direction rectification camera module 5 comprises a Y-direction camera bottom plate 35 and a Y-direction camera detection mechanism, the Y-direction camera bottom plate 35 is installed on the fixed bottom plate 1, a Y-direction camera three-axis driving mechanism is arranged on the Y-direction camera bottom plate 35, the Y-direction camera detection mechanism comprises a Y-direction camera 40, a Y-direction lens 41 and a Y-direction camera light source 42, the Y-direction camera 40, the Y-direction lens 41 and the Y-direction camera light source 42 are sequentially arranged along the positive direction of the X axis and are installed on the Y-direction camera three-axis driving mechanism through a Y-direction lens installation seat 39, and the Y-direction camera light source 42 is installed on the Y-direction camera three-axis driving mechanism through a Y-direction camera light source support 43. The Y-direction camera three-axis driving mechanism sequentially comprises a Y-direction camera X-axis linear displacement table 36, a Y-direction camera Y-axis linear displacement table 37 and a Y-direction camera electric Z-axis sliding table 38 from bottom to top, the Y-direction camera X-axis linear displacement table 36 is installed on the Y-direction camera bottom plate 35, and the Y-direction camera X-axis linear displacement table 36, the Y-direction camera Y-axis linear displacement table 37 and the Y-direction camera electric Z-axis sliding table 38 are sequentially connected with an upper Y-direction lens installation seat 39 from bottom to top.
Electronic Z axle slip table 7 of rectifying passes through the fix with screw on the bottom plate 6 of rectifying, has installed in proper order above the electronic Z axle slip table 7 of rectifying: the system comprises a rectification X-axis linear displacement table 9, a rectification Y-axis linear displacement table 10, a rectification angle rotating table 11, a first arc swinging table 12, a second arc swinging table 13 and a rectification adsorption base 14;
the X-direction camera detection mechanism arranged on the X-direction correction camera module 3 enables the X-direction camera 20 to cover the element to be detected in the X direction.
The Z-direction correction camera module 4 is mounted on the equipment frame (not shown) right above the correction mechanism 2 through the Z-direction top mounting plate 26, and the Z-direction camera 31 can cover the component to be measured in the Z direction.
The Y-direction deviation rectifying camera module 5 is provided with a camera three-axis driving mechanism and a Y-direction camera detection mechanism, so that the Y-direction camera 40 can cover the element to be detected in the Y direction.
The working process or working principle of the invention is briefly described as follows:
during operation, firstly, the material is fixed on the deviation-correcting adsorption base 14 of the positioning mechanism of the element to be measured in modes of clamping, adsorption and the like. Firstly, the X-direction camera detection mechanism carries out visual target-grabbing positioning on the element under the driving of the X-direction camera linear motor 16, and the positioning data of the X-direction camera 20 carries out three-axis linkage deviation-correcting positioning on the element under the movement of the first arc placing table 12, the deviation-correcting X-axis linear displacement table 9 and the deviation-correcting electric Z-axis sliding table 7, and ensures that the element is always in the visual field range of the camera.
Then, the Y-direction camera detection mechanism carries out visual target-grabbing positioning on the element, and under the movement of the deviation-correcting Y-axis linear displacement table 10, the second arc swinging table 13 and the deviation-correcting electric Z-axis sliding table 7, the element is subjected to three-axis linkage deviation-correcting positioning according to the positioning data of the Y-direction camera 40, and the element is ensured to be always in the visual field range of the camera.
And finally, the Z-direction camera detection mechanism carries out visual overlook target grabbing positioning on the element, and under the motion of the deviation correction X-axis linear displacement table 9, the deviation correction Y-axis linear displacement table 10 and the deviation correction angle rotating table 11, the element is subjected to three-axis linkage deviation correction positioning according to the positioning data of the Z-direction camera 31, and the element is ensured to be always in the visual field range of the camera.
Therefore, the element finishes the positioning and deviation rectifying work in six degrees of freedom, and is continuously processed or taken away according to the subsequent process requirements.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, a fixed connection, a detachable connection, or an integral connection: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, it should be noted that, for those skilled in the art, many modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (5)

1. The semiconductor element multi-degree-of-freedom positioning mechanism comprises a fixed base plate (1), a deviation rectifying mechanism (2), an X-direction deviation rectifying camera module (3), a Z-direction deviation rectifying camera module (4) and a Y-direction deviation rectifying camera module (5), wherein the deviation rectifying mechanism (2), the X-direction deviation rectifying camera module (3), the Z-direction deviation rectifying camera module (4) and the Y-direction deviation rectifying camera module (5) are all installed on the fixed base plate (1), and is characterized in that the X-direction deviation rectifying camera module (3) is located on one side of the deviation rectifying mechanism (2) along the Y-axis negative direction, the Z-direction deviation rectifying camera module (4) is located right above the deviation rectifying mechanism (2), and the Y-direction deviation rectifying camera module (5) is located on one side of the deviation rectifying mechanism (2) along the X-axis negative direction;
the correcting mechanism (2) sequentially comprises a correcting bottom plate (6), a six-axis correcting positioning mechanism and a correcting adsorption base (14) from bottom to top, the bottom of the six-axis correcting positioning mechanism is installed on the fixed bottom plate (1) through the lower correcting bottom plate (6), and the top of the six-axis correcting positioning mechanism is connected with the upper correcting adsorption base (14);
the X-direction correction camera module (3) comprises an X-direction camera base plate (15), an X-direction camera linear motor (16) and an X-direction camera detection mechanism, the bottom of the X-direction camera linear motor (16) is installed on the fixed base plate (1) through the X-direction camera base plate (15) on the lower portion in the X-direction, the driving end of the top of the X-direction camera linear motor (16) is in driving connection with the X-direction camera detection mechanism on the upper portion through an X-direction camera sliding plate (17), the X-direction camera detection mechanism comprises an X-direction camera (20), an X-direction lens (21), an X-direction camera light source (23) and a prism (24), the X-direction camera (20), the X-direction lens (21) and the prism (24) are sequentially arranged in the negative direction of the X-direction and installed on the X-direction camera double-axis driving mechanism through an X-direction lens installation seat (22), the X-direction camera double-direction driving mechanism is installed on the X-direction camera sliding plate (17), and the X-direction camera light source (23) is located on one side of the X-direction camera sliding plate (17) along the positive direction of the X-direction camera prism (24) and installed on the X-direction camera sliding plate support (25) through the X-direction camera sliding plate;
the Z-direction deviation rectifying camera module (4) comprises a Z-direction top mounting plate (26) and a Z-direction camera detection mechanism, a Z-direction camera triaxial driving mechanism is arranged at the bottom of the Z-direction top mounting plate (26), a Z-direction lens mounting seat (30) is arranged at the bottom of the Z-direction camera triaxial driving mechanism, the Z-direction camera detection mechanism comprises a Z-direction camera (31), a Z-direction lens (32) and a Z-direction camera light source (33), the Z-direction camera (31), the Z-direction lens (32) and the Z-direction camera light source (33) are sequentially arranged along the negative direction of the Z-direction and are mounted on the Z-direction camera triaxial driving mechanism through the Z-direction lens mounting seat (30), and the Z-direction camera light source (33) is mounted on the Z-direction camera triaxial driving mechanism through a Z-direction camera light source bracket (34);
y includes Y to camera bottom plate (35) and Y to camera detection mechanism to rectifying camera module (5), Y installs on PMKD (1) to camera bottom plate (35), Y is provided with Y to camera triaxial actuating mechanism on to camera bottom plate (35), Y includes Y to camera (40), Y to camera lens (41) and Y to camera light source (42) to camera detection mechanism, Y sets up and installs on Y to camera triaxial actuating mechanism along the positive direction of X axle through Y to camera (40), Y to camera lens (41) and Y to camera light source (42) in proper order and through Y to camera lens mount pad (39), Y is installed on Y to camera triaxial actuating mechanism through Y to camera light source support (43) to camera light source (42).
2. The semiconductor element multi-degree-of-freedom positioning mechanism as claimed in claim 1, wherein the six-axis deviation-correcting positioning mechanism sequentially comprises a deviation-correcting electric Z-axis sliding table (7), a deviation-correcting X-axis linear displacement table (9), a deviation-correcting Y-axis linear displacement table (10), a deviation-correcting angle rotating table (11), a first arc swinging table (12) and a second arc swinging table (13) from bottom to top, the deviation-correcting electric Z-axis sliding table (7) is installed on a deviation-correcting bottom plate (6), the deviation-correcting electric Z-axis sliding table (7) is connected with the deviation-correcting X-axis linear displacement table (9) above through a deviation-correcting Z-axis table plate (8), the deviation-correcting X-axis linear displacement table (9), the deviation-correcting Y-axis linear displacement table (10), the deviation-correcting angle rotating table (11), the first arc swinging table (12) and the second arc swinging table (13) are sequentially connected from bottom to top, and a deviation-correcting adsorption base (14) is arranged at the top of the second arc swinging table (13).
3. The multi-degree-of-freedom positioning mechanism for semiconductor elements according to claim 1, wherein the X-direction camera dual-axis driving mechanism comprises an X-direction camera X-axis linear displacement table (18) and an X-direction camera electric Z-axis sliding table (19) from bottom to top in sequence, the X-direction camera X-axis linear displacement table (18) is mounted on the X-direction camera sliding table plate (17), and the X-direction camera X-axis linear displacement table (18) and the X-direction camera electric Z-axis sliding table (19) are connected with an upper X-direction lens mounting seat (22) from bottom to top in sequence.
4. The semiconductor device multi-degree-of-freedom positioning mechanism of claim 1, wherein the Z-direction camera three-axis driving mechanism comprises a Z-direction camera Y-axis linear displacement table (27), a Z-direction camera X-axis linear displacement table (28) and a Z-direction camera electric Z-axis sliding table (29) from top to bottom in sequence, the Z-direction camera Y-axis linear displacement table (27) is installed at the bottom of the Z-direction top mounting plate (26), and the Z-direction camera Y-axis linear displacement table (27), the Z-direction camera X-axis linear displacement table (28) and the Z-direction camera electric Z-axis sliding table (29) are sequentially connected with a lower Z-direction lens mounting seat (30) from top to bottom.
5. The semiconductor device multiple degrees of freedom positioning mechanism of claim 1, wherein the Y-direction camera three-axis driving mechanism comprises a Y-direction camera X-axis linear displacement table (36), a Y-direction camera Y-axis linear displacement table (37) and a Y-direction camera electric Z-axis sliding table (38) from bottom to top in sequence, the Y-direction camera X-axis linear displacement table (36) is installed on the Y-direction camera bottom plate (35), and the Y-direction camera X-axis linear displacement table (36), the Y-direction camera Y-axis linear displacement table (37) and the Y-direction camera electric Z-axis sliding table (38) are sequentially connected with the Y-direction lens installation base (39) from bottom to top.
CN202211047236.1A 2022-08-29 2022-08-29 Multi-degree-of-freedom positioning mechanism for semiconductor element Pending CN115332138A (en)

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