CN218039101U - Semiconductor element deflection degree detection mechanism - Google Patents
Semiconductor element deflection degree detection mechanism Download PDFInfo
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- CN218039101U CN218039101U CN202222273570.0U CN202222273570U CN218039101U CN 218039101 U CN218039101 U CN 218039101U CN 202222273570 U CN202222273570 U CN 202222273570U CN 218039101 U CN218039101 U CN 218039101U
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Abstract
The utility model relates to a semiconductor component deflection detection mechanism, including mechanism's bottom plate, the mechanism of rectifying and detect the module, the mechanism of rectifying and detecting the module and all installing on the mechanism's bottom plate, the mechanism of rectifying is located one side of detecting the module along Y axle positive direction, and the mechanism of rectifying is from last to down in proper order including rectifying and adsorbing base, five-axis positioning mechanism and the base of rectifying, detects the module and detects module and detect X axle linear electric motor including detecting base, camera detection module, sensor. The utility model discloses a joint detection mode of the great sensor of visual detection cooperation range at first waits to detect the component by the vision system and tentatively fixes a position, then the sensor carries out some, line or face measurement to the component that awaits measuring, and the deflection data that reachs the component via the data of sensor, the great range of sensor has ensured that the component can both be effectively detected, has effectively reduced because of the man-hour loss that the measurement failure caused.
Description
Technical Field
The utility model relates to a semiconductor trade correlation technique field especially relates to a semiconductor element deflection detection mechanism.
Background
In the semiconductor industry, when a tiny element is detected in straightness or flexibility, due to the fact that the size of the element to be detected is tiny and the requirement on detection accuracy is high, a traditional visual detection method is only used for detecting the element through a visual system composed of a camera, a lens and a light source, and due to the fact that the camera is generally small in visual field and small in depth of field, the element is prone to being detected to fail due to imaging problems during detection.
In view of the above-mentioned drawbacks, the present inventors have made active research and innovation to create a mechanism for detecting the degree of flexure of a semiconductor device, which is more industrially valuable.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problems, an object of the present invention is to provide a semiconductor device deflection detecting mechanism.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the semiconductor element deflection degree detection mechanism comprises a mechanism bottom plate, a deviation correction mechanism and a detection module, wherein the deviation correction mechanism and the detection module are both installed on the mechanism bottom plate, the deviation correction mechanism is located on one side of the detection module along the positive direction of a Y axis, the deviation correction mechanism sequentially comprises a deviation correction adsorption base, a five-axis deviation correction positioning mechanism and a deviation correction base from top to bottom, the bottom of the five-axis deviation correction positioning mechanism is installed on the mechanism bottom plate through the lower deviation correction base, and the top of the five-axis deviation correction positioning mechanism is connected with the upper deviation correction adsorption base; the detection module comprises a detection base, a camera detection module, a sensor detection module and a detection X-axis linear motor, the bottom of the detection X-axis linear motor is arranged on the mechanism bottom plate along the X-axis direction through the detection base below, the driving end of the top of the detection X-axis linear motor is in driving connection with the camera detection module and the sensor detection module above through the detection X-axis sliding table, and the camera detection module and the sensor detection module are sequentially arranged on the detection X-axis sliding table along the negative direction of the X-axis; the camera detection module comprises a camera, a lens, a double-shaft driving mechanism, a prism and an annular light source, wherein the camera, the lens and the prism are sequentially arranged along the negative direction of an X axis and are installed on the double-shaft driving mechanism through a lens installation seat; the sensor detection module comprises a sensor electric Z-axis sliding table and a detection sensor, the detection sensor is installed on the sensor seat along the Y-axis direction, and the sensor seat is installed on the detection X-axis sliding table through the sensor electric Z-axis sliding table.
As the utility model discloses a further improvement, five positioning mechanism that rectify a deviation from up in proper order including the electronic Z axle slip table of rectifying, the X axle linear displacement platform of rectifying, the Y axle linear displacement platform of rectifying, first arc is put platform and second arc and is put the platform, the electronic Z axle slip table of rectifying is installed on the base of rectifying, the electronic Z axle slip table of rectifying is connected with the X axle linear displacement platform of rectifying of top through the Z axle platen of rectifying, the X axle linear displacement platform of rectifying, the Y axle linear displacement platform of rectifying, first arc is put platform and second arc and is put the platform and up to be connected the setting in proper order down.
As a further improvement of the utility model, the first arc pendulum platform can swing in the XZ axle plane and set up, and the second arc pendulum platform can swing in the YZ axle plane and set up.
As the utility model discloses a further improvement, biax actuating mechanism is from up including the electronic Z axle slip table of Y axle linear displacement platform and camera from down in proper order, and the electronic Z axle slip table of Y axle linear displacement platform is installed on detecting X axle slip table, and the electronic Z axle slip table of Y axle linear displacement platform and camera is from up being connected with the camera lens mount pad of top from down in proper order.
As a further improvement, the detection sensor is provided with a protective cover along one side of the Y-axis negative direction.
As a further improvement, the detection sensor is a laser coaxial displacement meter.
Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:
the utility model discloses a joint detection mode of the great sensor of visual detection cooperation range at first waits to detect the component by visual system and tentatively fixes a position, then the sensor carries out some, line or face measurement to the component that awaits measuring, and the data via the sensor reachs the deflection data of component, and the great range of sensor has ensured that the component can both be effectively detected, has effectively reduced because of measuring the man-hour loss that the failure caused.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on these drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a semiconductor device flexibility detection mechanism according to the present invention;
FIG. 2 is a schematic structural diagram of the deviation correcting mechanism of FIG. 1;
fig. 3 is a schematic structural diagram of the detection module in fig. 1.
Wherein the meanings of each reference numeral in the figures are as follows.
1 mechanism bottom plate 2 mechanism of rectifying
3 detect module 4 base of rectifying
5 electronic Z axle slip table 6Z axle bedplate of rectifying
7-deviation-rectifying X-axis linear displacement table 8-deviation-rectifying Y-axis linear displacement table
9 first arc swing table 10 second arc swing table
11 adsorption base 12 that rectifies detects base
13 detect X axle linear electric motor 14 and detect X axle slip table
15Y-axis linear displacement table and 16 camera electric Z-axis sliding table
17 camera 18 lens
19 lens mount 20 ring light source
21 prism 22 light source support
24 sensor mount pads on electronic Z axle slip table of 23 sensor
25 protective cover 26 detection sensor
Detailed Description
The following detailed description of the embodiments of the present invention is made with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
As shown in figures 1 to 3 of the drawings,
the utility model provides a semiconductor element mechanism that scratches curvature, includes mechanism bottom plate 1, rectifies mechanism 2 and detects module 3 and all installs on mechanism bottom plate 1, rectifies mechanism 2 and is located and detect module 3 along one side in Y axle positive direction.
The deviation correcting mechanism 2 sequentially comprises a deviation correcting adsorption base 11, a five-axis deviation correcting positioning mechanism and a deviation correcting base 4 from top to bottom, the bottom of the five-axis deviation correcting positioning mechanism is installed on the mechanism bottom plate 1 through the deviation correcting base 4 below, and the top of the five-axis deviation correcting positioning mechanism is connected with the deviation correcting adsorption base 11 above.
Detect module 3 including detecting base 12, the camera detects the module, the sensor detects the module and detects X axle linear electric motor 13, the bottom that detects X axle linear electric motor 13 is installed on mechanism bottom plate 1 along the X axle direction through the detection base 12 of below, the drive end that detects X axle linear electric motor 13 top detects module and sensor through the camera that detects X axle slip table 14 and top and detects the module drive and be connected the setting, camera detection module and sensor detect the module and install on detecting X axle slip table 14 along the negative direction of X axle in proper order.
The camera detection module comprises a camera 17, a lens 18, a double-shaft driving mechanism, a prism 21 and an annular light source 20, wherein the camera 17, the lens 18 and the prism 21 are sequentially arranged along the negative direction of an X shaft and are arranged on the double-shaft driving mechanism through a lens mounting seat 19, the double-shaft driving mechanism is arranged on a detection X shaft sliding table 14, and the annular light source 20 is arranged on one side of the prism 21 along the positive direction of a Y shaft and is arranged on the detection X shaft sliding table 14 through a light source support 22.
The sensor detects the module and includes sensor electronic Z axle slip table 23 and detection sensor 26, detects sensor 26 and installs on sensor seat 24 along the Y axle direction, and sensor seat 24 passes through sensor electronic Z axle slip table 23 to be installed on detecting X axle slip table 14. The detection sensor 26 is a laser coaxial displacement meter, and a protective cover 25 is provided on one side of the detection sensor 26 along the Y-axis negative direction.
Wherein, five positioning mechanism that rectifies include electronic Z axle slip table 5 of rectifying from down up in proper order, the electronic Z axle linear displacement platform 7 of rectifying, Y axle linear displacement platform 8 of rectifying, first arc pendulum platform 9 and second arc pendulum platform 10, electronic Z axle slip table 5 of rectifying is installed on base 4 of rectifying, electronic Z axle slip table 5 of rectifying is connected with the X axle linear displacement platform 7 of rectifying of top through the Z axle platen 6 of rectifying, the X axle linear displacement platform 7 of rectifying, the Y axle linear displacement platform 8 of rectifying, first arc pendulum platform 9 and second arc pendulum platform 10 are from down up connecting gradually the setting. The first arc swing table 9 can swing in an XZ axis plane, and the second arc swing table 10 can swing in a YZ axis plane.
The double-shaft driving mechanism sequentially comprises a Y-shaft linear displacement table 15 and an electric camera Z-shaft sliding table 16 from bottom to top, the Y-shaft linear displacement table 15 is installed on the X-shaft sliding table 14, and the Y-shaft linear displacement table 15 and the electric camera Z-shaft sliding table 16 are sequentially connected with a lens installation seat 19 above from bottom to top.
The utility model discloses relation between each spare part is as follows: the deviation rectifying mechanism 2 is fixed on the mechanism bottom plate 1 through screws, and the deviation rectifying adsorption base 11 is fixed on the deviation rectifying mechanism 2 of the element to be detected through screws, so that the position can be finely adjusted in five-axis linkage under the action of a five-axis deviation rectifying positioning mechanism.
The detection module 3 is fixed on the mechanism bottom plate 1 through the detection base 12 by screws, under the action of the detection X-axis linear motor 13, and reciprocates to a specified position through the detection X-axis sliding table 14.
The camera 17, the lens 18, the prism 21 and the annular light source 20 form an optical camera assembly, and the optical camera assembly is fixed on the detection X-axis sliding table 14 through the lens mounting seat 19 and the double-axis driving mechanism and can realize optical position adjustment in the three-axis direction by matching with the operation of the detection module 3.
The detection sensor 26 for detecting the deflection degree is fixed on the X-axis sliding table 14 through the sensor seat 24 and the electric Z-axis sliding table 23 of the sensor, and the detection position adjustment in the two axis directions can be realized by matching the operation of the detection module 3.
The utility model discloses a working process or theory of operation brief:
during operation, firstly, an element to be detected is fixed on the deviation-correcting adsorption base 11 in a clamping, adsorption and other modes; then, the detection X-axis linear motor 13 drives the detection module 3 to enable the element to be detected to enter the visual field of the camera 17 and be grabbed by the camera 17 for positioning; then, according to the data of the visual positioning, the system drives the deviation rectifying adsorption base 11 to perform five-axis deviation rectifying positioning of the position of the element to be detected by the deviation rectifying mechanism 2, and after the positioning is completed, the camera 17 captures the position of the element to be detected again. Finally, according to the final target grabbing position data, the X-axis linear motor 13 is detected to drive the detection module 3, the detection sensor 26 for detecting the deflection degree reaches the detection position, and according to the set detection process route, point measurement, line measurement or surface measurement is carried out on the element to be detected, so that the measurement data of the element is obtained.
Thus, the flexibility measurement of the element to be measured is completed, and the element can be continuously processed or taken away according to the subsequent process requirements.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.
The above description is only a preferred embodiment of the present invention, and should not be used to limit the present invention, it should be noted that, for those skilled in the art, without departing from the technical principle of the present invention, a plurality of improvements and modifications can be made, and these improvements and modifications should also be regarded as the protection scope of the present invention.
Claims (6)
1. The semiconductor element flexibility detection mechanism comprises a mechanism bottom plate (1), a deviation rectification mechanism (2) and a detection module (3), wherein the deviation rectification mechanism (2) and the detection module (3) are installed on the mechanism bottom plate (1), and the deviation rectification mechanism (2) is located on one side of the detection module (3) along the positive direction of a Y axis; the detection module (3) comprises a detection base (12), a camera detection module, a sensor detection module and a detection X-axis linear motor (13), wherein the bottom of the detection X-axis linear motor (13) is installed on the mechanism bottom plate (1) along the X-axis direction through the detection base (12) below, the driving end of the top of the detection X-axis linear motor (13) is in driving connection with the camera detection module and the sensor detection module above through the detection X-axis sliding table (14), and the camera detection module and the sensor detection module are sequentially installed on the detection X-axis sliding table (14) along the negative direction of the X axis; the camera detection module comprises a camera (17), a lens (18), a double-shaft driving mechanism, a prism (21) and an annular light source (20), wherein the camera (17), the lens (18) and the prism (21) are sequentially arranged along the negative direction of an X axis and are installed on the double-shaft driving mechanism through a lens installation seat (19), the double-shaft driving mechanism is installed on a detection X-axis sliding table (14), and the annular light source (20) is located on one side of the prism (21) along the positive direction of the Y axis and is installed on the detection X-axis sliding table (14) through a light source support (22); the sensor detects the module and includes electronic Z axle slip table of sensor (23) and detection sensor (26), detect sensor (26) and install on sensor seat (24) along the Y axle direction, sensor seat (24) are installed on detecting X axle slip table (14) through electronic Z axle slip table of sensor (23).
2. The semiconductor device flexibility degree detection mechanism of claim 1, wherein the five-axis deviation-correcting positioning mechanism sequentially comprises a deviation-correcting electric Z-axis sliding table (5), a deviation-correcting X-axis linear displacement table (7), a deviation-correcting Y-axis linear displacement table (8), a first arc swing table (9) and a second arc swing table (10) from bottom to top, the deviation-correcting electric Z-axis sliding table (5) is installed on the deviation-correcting base (4), the deviation-correcting electric Z-axis sliding table (5) is connected with the deviation-correcting X-axis linear displacement table (7) above through a deviation-correcting Z-axis table plate (6), and the deviation-correcting X-axis linear displacement table (7), the deviation-correcting Y-axis linear displacement table (8), the first arc swing table (9) and the second arc swing table (10) are sequentially connected and arranged from bottom to top.
3. The semiconductor device flexure detecting mechanism according to claim 2, wherein the first arcuate pendulum platform (9) is swingably provided in an XZ-axis plane, and the second arcuate pendulum platform (10) is swingably provided in a YZ-axis plane.
4. The mechanism for detecting the degree of deflection of a semiconductor element as claimed in claim 1, wherein said biaxial drive mechanism comprises a Y-axis linear displacement stage (15) and a camera electric Z-axis sliding stage (16) in sequence from bottom to top, said Y-axis linear displacement stage (15) is mounted on the detection X-axis sliding stage (14), and said Y-axis linear displacement stage (15) and said camera electric Z-axis sliding stage (16) are connected with the lens mounting base (19) above in sequence from bottom to top.
5. The semiconductor device flexing degree detecting mechanism according to claim 1, wherein said detecting sensor (26) is provided with a protective cover (25) on one side in the negative direction of the Y-axis.
6. The semiconductor device deflection sensing mechanism of claim 1, wherein said sensing sensor (26) is a laser coaxial displacement meter.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222273570.0U CN218039101U (en) | 2022-08-29 | 2022-08-29 | Semiconductor element deflection degree detection mechanism |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222273570.0U CN218039101U (en) | 2022-08-29 | 2022-08-29 | Semiconductor element deflection degree detection mechanism |
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| CN218039101U true CN218039101U (en) | 2022-12-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117589091A (en) * | 2024-01-19 | 2024-02-23 | 钛玛科（北京）工业科技有限公司 | Angle detection system |
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- 2022-08-29 CN CN202222273570.0U patent/CN218039101U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117589091A (en) * | 2024-01-19 | 2024-02-23 | 钛玛科（北京）工业科技有限公司 | Angle detection system |
| CN117589091B (en) * | 2024-01-19 | 2024-03-26 | 钛玛科（北京）工业科技有限公司 | Angle detection system |
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