CN115326045A - Frequency stabilizing mechanism of laser gyroscope - Google Patents

Frequency stabilizing mechanism of laser gyroscope Download PDF

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Publication number
CN115326045A
CN115326045A CN202211256285.6A CN202211256285A CN115326045A CN 115326045 A CN115326045 A CN 115326045A CN 202211256285 A CN202211256285 A CN 202211256285A CN 115326045 A CN115326045 A CN 115326045A
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bowl
chuck
piezoelectric ceramic
type
reflector
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王立斌
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Tianjin Jizhi Hangyu Technology Co ltd
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Tianjin Jizhi Hangyu Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses
    • G01C19/64Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/66Ring laser gyrometers
    • G01C19/661Ring laser gyrometers details

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  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

The invention provides a frequency stabilizing mechanism of a laser gyroscope, which belongs to the technical field of laser gyroscopes and comprises the following components: the bowl-type chuck, the piezoelectric ceramic piece and the bowl-type reflector are arranged on the upper surface of the bowl-type chuck; the bowl-type reflector is used as an optical cavity reflector of the laser gyro; one surface of the bowl-type chuck is fixedly connected with the bowl-type reflector; the other surface is bonded or welded on the piezoelectric ceramic piece, the extension and contraction of the piezoelectric ceramic piece are controlled through the voltage applied on the piezoelectric ceramic piece, and then the bowl-type chuck is driven to deform to drive the bowl-type reflector to deform, so that the cavity length change of the laser gyro resonant cavity is controlled, and the working mode frequency is ensured to be at the peak position of the gain curve. The frequency stabilizing mechanism is simple and reliable in structure, the deformation quantity of the frequency stabilizing mechanism can be greatly improved, the skew of a light path at high and low temperatures is reduced, and the performance of the laser gyroscope is more stable.

Description

Frequency stabilizing mechanism of laser gyroscope
Technical Field
The invention belongs to the technical field of laser gyros, and relates to a frequency stabilizing mechanism of a laser gyroscope.
Background
When the laser gyroscope works, the cavity length of a laser inside the laser gyroscope is integral multiple of the wavelength corresponding to the working mode, and the frequency of the working mode must be stabilized at the maximum position of a gain curve, so that the high stability of the gyroscope precision can be ensured. The peak position of a gain curve is usually judged by small jitter and frequency stabilization, and the length of a cavity is changed by controlling piezoelectric ceramics to ensure that the frequency of a working mode is at the maximum position of the gain curve.
The main part of the laser gyroscope is a resonant cavity made of zero-expansion glass ceramics, and a high-precision elongated hole is processed in the whole piece of glass ceramics. The linear expansion coefficient of a common zero-order microcrystalline glass material is-2 \1093 -8 ~2х10 -8 The optical path length is between 60 and 500mm is between. Usually, the laser gyro works in the temperature range of-50-90 ℃, the expansion coefficient can be obviously increased at low temperature, and the change of the optical path length in the temperature range of-50-90 ℃ can reach several microns for the laser gyro with larger size. The operating mode frequency can now be stabilized at the maximum of the gain curve by adjusting the laser cavity length by means of a piezoelectric mechanism on the mirror shown in fig. 1.
The existing frequency stabilization mechanism mainly comprises five parts. As shown in fig. 1. The piezoelectric ceramic piece 2 is made of PZT-5 with a large expansion coefficient, a conductive silver film is plated on the surface, the PZT-5 is pasted on the upper surface and the lower surface of the frequency stabilization adjustment chuck 3 through epoxy glue or welding agent, the frequency stabilization adjustment chuck 3 is made of a metal material, and an iron-nickel alloy with a low expansion coefficient, such as a super indium tile alloy, is generally adopted.
The pins of the chuck are bonded on the bowl-shaped reflector 5 through epoxy glue, the bowl-shaped reflector 5 is usually of an elastic structure, and the materials are generally microcrystalline glass (zerodur) or quartz glass with a very low expansion coefficient.
The upper surface of the outer ceramic is welded with a lead wire, usually connected with a voltage Va, the lower surface of the inner ceramic is welded with a lead wire, usually connected with a voltage-Vb, and the metal chuck is connected with the variable quantity from-Vb to Va. Va + Vb is usually 200 to 300V.
Such piezoelectric mechanisms can generally only provide a variation of 1.0 to 1.9um, and the following measures can only be taken to increase the variation:
(1) Piezoelectric ceramics with higher selective deformation efficiency
(2) Increasing the voltage on the piezoelectric ceramic
(3) Reducing rib thickness of elastic mirrors
Piezoelectric ceramics with higher efficiency are selected, and the improvement is very limited; the voltage on the piezoelectric ceramic is increased, so that the piezoelectric ceramic is easy to break down, the load of a circuit is increased, and the reliability of the laser gyro is reduced; the processing difficulty of the reflector is increased by reducing the thickness of the ribs of the bowl-shaped reflector 5, and meanwhile, the reflector is prone to being inclined, so that the precision of the laser gyroscope is not improved.
However, when the expansion coefficient of the microcrystalline glass material is too large or the change of the optical path length caused by the stress of the mounting base during working exceeds the adjustment amount of the piezoelectric frequency stabilizing mechanism, the mode hopping condition of the gyroscope is generated, and the output error is increased. Therefore, increasing the adjustment amount of the piezoelectric frequency stabilizing mechanism is an important method for avoiding mode hopping.
Disclosure of Invention
In order to solve the above technical problem, a first aspect of the present invention provides a frequency stabilization mechanism for a laser gyro, where the frequency stabilization mechanism includes: the bowl-type chuck, the piezoelectric ceramic piece and the bowl-type reflector;
using the bowl-type reflector as a light cavity reflector of the laser gyroscope;
bowl formula chuck one face with bowl formula speculum fixed connection, another face fixed connection of bowl formula chuck makes when bowl formula chuck produces bending deformation on piezoelectric ceramic piece one on the surface, through applying the voltage control on piezoelectric ceramic piece piezoelectric ceramic's flexible, piezoelectric ceramic piece's flexible drive bowl formula chuck also produces bending deformation, through the bending deformation of bowl formula speculum changes the chamber length of the resonant cavity of laser gyro, makes the mode frequency stability of laser gyro work is in the peak position of frequency gain curve.
According to the frequency stabilizing mechanism provided by the first aspect of the present invention, the center of the bowl-shaped reflecting mirror is a circular reflecting film region, an annular groove is arranged on a plane where the reflecting film region is located and surrounds the reflecting film region, an edge region outside the annular groove is an airtight surface, and the airtight surface of the bowl-shaped reflecting mirror is bonded with an end surface of the laser gyro resonant cavity to form a seal of the laser gyro resonant cavity.
In the frequency stabilizing mechanism provided by the first aspect of the present invention, a circular central region and an annular groove surrounding the circular central region are also disposed on a plane opposite to the reflection film region of the bowl-shaped reflector, an edge region outside the annular groove and the circular central region serve as fixing surfaces for bonding the bowl-shaped chuck, and the fixing surfaces are fixedly connected to the piezoelectric ceramic plate by bonding or welding.
According to the frequency stabilizing mechanism provided by the first aspect of the present invention, the bowl-shaped chuck is in a circular shape, the first circular surface of the bowl-shaped chuck is a plane, and the plane is used for being fixedly connected with the back surface of the bowl-shaped reflector; the middle of the second circular surface of the bowl-type chuck is a concave bowl-shaped curved surface, the periphery of the second circular surface of the bowl-type chuck is thick, the middle of the second circular surface of the bowl-type chuck is thin, the periphery of the second circular surface of the bowl-type chuck is provided with an adhesive surface which is an annular plane, and the adhesive surface of the annular plane is fixedly connected with the piezoelectric ceramic plate through adhesion or welding.
According to the frequency stabilizing mechanism provided by the first aspect of the invention, the piezoelectric ceramic piece is made of PZT-5, conductive silver films are plated on the upper surface and the lower surface of the piezoelectric ceramic piece to serve as electrodes, and electrode leads are led out; the deformation voltage applied to the piezoelectric ceramic sheet is as follows: 0 to 300V.
According to the frequency stabilization mechanism provided by the first aspect of the present invention, the piezoelectric ceramic sheet is formed by stacking two or more sheets.
According to the frequency stabilizing mechanism provided by the first aspect of the invention, a first bowl-shaped chuck is bonded or welded on the lower plane of the piezoelectric ceramic piece, and a second bowl-shaped chuck is bonded or welded on the upper plane of the piezoelectric ceramic piece;
the plane of the first bowl-type chuck is fixedly connected with the back surface of the bowl-type reflector; the bonding surface on the bowl-shaped curved surface side of the first bowl-type chuck is fixedly connected with the lower plane of the piezoelectric ceramic piece;
and the bonding surface on the bowl-shaped curved surface side of the second bowl-type chuck is fixedly connected with the upper plane of the piezoelectric ceramic plate.
According to the frequency stabilizing mechanism provided by the first aspect of the invention, the piezoelectric ceramic piece and the bowl-type chuck are bonded by epoxy glue, the piezoelectric ceramic piece and the bowl-type chuck are circular, and the static diameter of the piezoelectric ceramic piece is the same as that of the bowl-type chuck.
According to the frequency stabilization mechanism provided by the first aspect of the invention, the material of the bowl-type chuck is iron-nickel alloy.
According to the frequency stabilization mechanism provided by the first aspect of the invention, the bowl-type chuck is made of the super indium tile alloy.
The scheme of the invention is adopted.
(1) The bowl-type chuck structure can greatly improve the deformation of the frequency stabilizing mechanism.
(2) The bowl type chuck has simple and reliable structure;
(3) The bowl-type chuck structure has low processing and assembling cost.
(4) The invention can reduce the distortion of the optical path at high and low temperature, so that the performance of the gyroscope is more stable.
Drawings
FIG. 1 is a schematic diagram of a prior art frequency stabilization mechanism;
fig. 2 is a shape diagram of a disc type piezoelectric ceramic plate of the present invention, in which a is a front view and B is a side view;
FIG. 3 is a schematic diagram of the longitudinal deformation of the disk-type piezoelectric ceramic of the present invention;
FIG. 4 is a schematic diagram of the disc-type transverse deformation of the piezoelectric ceramic of the present invention;
FIG. 5 is a view showing the shape of a bowl chuck used in the present invention, wherein A is a front view and B is a sectional view;
FIG. 6 is a view showing the shape of a bowl-shaped reflector used in the present invention, wherein A is a sectional view and B is a bottom view;
FIG. 7 is a cross-sectional view of one embodiment of the bowl mirror with a frequency stabilization mechanism of the present invention;
FIG. 8 is a cross-sectional view of another embodiment of the bowl reflector with a frequency stabilization mechanism of the present invention.
The piezoelectric ceramic chip comprises a chuck adjusting screw 1, a piezoelectric ceramic chip 2, a frequency stabilization adjusting chuck 3, a chuck and lens bonding part 4, a bowl type reflector 5, a piezoelectric ceramic chip 6 in a shape before deformation, a piezoelectric ceramic chip 7 in a shape after deformation, an airtight surface region of the bowl type reflector 8, an annular groove region of the bowl type reflector 9, a mirror surface reflection film region in the center of the bowl type reflector 10, an annular groove region on the back of the bowl type reflector 11, a second bowl type chuck 12, a piezoelectric ceramic chip 13 and a first bowl type chuck 14. V + and GND are positive voltage leads of the piezoelectric ceramic piece and negative electrode leads of the piezoelectric ceramic piece.
Detailed Description
The invention provides a high-efficiency piezoelectric frequency stabilizing mechanism which can improve the adjustment quantity of the frequency stabilizing mechanism in multiples.
The technical problem to be solved by the invention is as follows: the frequency stabilizing mechanism overcomes the defect of small adjustment quantity of the reflector under the existing frequency stabilizing structure, and has the advantages of simple structure and large adjustment quantity.
When the laser gyro works, the wavelength of light must be integral multiple of the cavity length to ensure stable laser oscillation frequency. A series of discrete frequencies that satisfy this condition is called a longitudinal mode. When the laser gyroscope works, the main longitudinal mode is required to be at the central point of a laser gain curve, the laser power is maximum, and meanwhile, the die competition can be avoided, and various errors are reduced.
The laser gyroscope usually works in a temperature environment of-50 to 85 ℃, and the length of an optical cavity of the laser gyroscope changes in a micrometer scale along with the change of temperature, so that the longitudinal mode frequency drifts. The piezoelectric ceramic precision adjusting chuck can be bonded on the back of one or more elastic reflectors, and the length of an optical cavity of the laser gyroscope is kept constant by adjusting the deformation of the piezoelectric ceramic pieces and further adjusting the deformation of the elastic reflectors by utilizing the driving voltage applied to the piezoelectric ceramic pieces, so that the working longitudinal mode frequency of the laser gyroscope is stable and unchanged, and the laser power of the laser gyroscope is stabilized at the peak position of a frequency gain curve.
The following detailed description of the embodiments of the invention refers to the accompanying drawings.
As shown in fig. 7, a first aspect of the present invention provides a frequency stabilization mechanism for a laser gyro, where the frequency stabilization mechanism includes: a first bowl-type chuck 14, a piezoelectric ceramic piece 13 and a bowl-type reflector 5;
the bowl-shaped reflector 5 is used as an optical cavity reflector of the laser gyroscope;
one surface of the first bowl-type chuck 14 is fixedly connected with the bowl-type reflector 5; another face fixed connection of first bowl formula chuck 14 is in on the piezoceramics piece 13, through applying the voltage V + control on the piezoceramics piece 13 flexible, piezoceramics piece 13's flexible drive make when first bowl formula chuck 14 produces bending deformation bowl formula speculum 5 also produces bending deformation, through the bending deformation of bowl formula speculum 5 changes the chamber length of the resonant cavity of laser gyro, makes the mode frequency stability of laser gyro work is in the peak position of frequency gain curve.
It should be noted that, in order to achieve the object of the present invention, only one first bowl chuck 14 or a plurality of bowl chucks may be provided, and specifically, 2 bowl chucks, namely, the first bowl chuck 14 and the second bowl chuck 12, are provided in the embodiment of fig. 8 as required.
The detailed structure of the bowl-shaped reflector 5 is shown in fig. 6.
The first bowl-shaped chuck 14 is bonded on the back surface of one bowl-shaped reflector 5, and the length of an optical cavity of the laser gyroscope is kept constant by adjusting the deformation of the piezoelectric ceramic piece and further adjusting the deformation of the bowl-shaped reflector 5 by utilizing the driving voltage applied to the piezoelectric ceramic piece, so that the frequency of a longitudinal mode of the laser gyroscope is stable and unchanged, and the laser power of the laser gyroscope is stable at the peak position of a frequency gain curve.
According to the frequency stabilizing mechanism provided by the first aspect of the present invention, the center of the bowl-shaped reflector 5 is a mirror surface reflection film region 10 at the center of the circular bowl-shaped reflector, an annular groove region 9 of the bowl-shaped reflector is arranged on the plane where the reflection film region is located and surrounds the reflection film region, the edge region outside the annular groove region 9 of the bowl-shaped reflector is an airtight region 8 of the bowl-shaped reflector, and the airtight region 8 of the bowl-shaped reflector 5 is bonded with the end surface of the laser gyro resonant cavity and forms the seal of the laser gyro resonant cavity.
In the frequency stabilizing mechanism provided in the first aspect of the present invention, a circular central region and an annular groove region 11 surrounding the circular central region on the back surface of the bowl-shaped reflector are also disposed on the opposite plane of the reflection film region of the bowl-shaped reflector 5, an edge region outside the annular groove region 11 on the back surface of the bowl-shaped reflector and the circular central region are used as a fixing surface for adhering the bowl-shaped chuck, and the fixing surface is fixedly connected to the piezoelectric ceramic plate 13 by an adhesion or welding method.
In the frequency stabilizing mechanism provided by the first aspect of the present invention, the second bowl-type chuck 12 and the first bowl-type chuck 14 are in a shape of a circular slice, as shown in fig. 5, a first circular surface of the first bowl-type chuck 14 is a plane, and the plane is used for being fixedly connected with the back surface of the bowl-type reflector 5; the middle of the second circular surface of the first bowl-type chuck 14 is a concave bowl-shaped curved surface, the periphery is thick, the middle is thin, the periphery of the second circular surface of the first bowl-type chuck 14 is provided with an annular plane bonding surface, and the annular plane bonding surface is fixedly connected with the piezoelectric ceramic plate 13 in a bonding or welding mode.
According to the frequency stabilization mechanism provided by the first aspect of the present invention, the piezoelectric ceramic plate 13 is made of PZT-5, the shape of the piezoelectric ceramic plate 13 is as shown in fig. 2, conductive silver films are plated on the upper surface and the lower surface of the piezoelectric ceramic plate 13 to serve as electrodes, and electrode leads are led out; the deformation voltage applied to the piezoelectric ceramic sheet 13 is as follows: 0 to 300V.
As shown in fig. 3 and 4, when a deformation voltage is applied to the piezoelectric ceramic plate 13, a longitudinal (thickness direction) change and a transverse (diameter direction) change can be generated, and when the piezoelectric ceramic plate 13 deforms, the longitudinal (thickness direction) change and the transverse (diameter direction) change are superimposed, so that the deformation is amplified by the structure, and can be increased by at least 3 times, and the deformation of the bowl-shaped reflector 5 can easily reach more than 3 micrometers under the control of the piezoelectric ceramic plate 13. Usually bowl formula speculum 5 and piezoceramics piece 13 are not lug connection, but set up a first bowl formula chuck 14 between bowl formula speculum 5 and piezoceramics piece 13, the back bonding of bowl formula speculum 5 or a first bowl formula chuck 14 of welding, the bonding face of the curved surface side of bowl shape of first bowl formula chuck 14 with circular piezoceramics piece 13's lower plane bonds, works as piezoceramics piece 13 takes place to extend or when the deformation that shortens under the voltage effect, drives first bowl formula chuck 14 downwards or kickup, and then drives bowl formula speculum 5 and produce downwards or ascending crooked deformation, changes the chamber length of laser instrument.
According to the frequency stabilization mechanism provided by the first aspect of the present invention, the piezoelectric ceramic sheet 13 is formed by stacking two or more sheets.
In fact, not only the piezoelectric ceramic plate 13 may be formed by directly stacking two or more piezoelectric ceramic plates, but also a structure in which the piezoelectric ceramic plates and the bowl-type chucks are alternately stacked and bonded to form n piezoelectric ceramic plates 13 and n +1 bowl-type chucks, which are alternately stacked, may be used to provide a larger deformation amount, where n is greater than or equal to 1.
Fig. 8 shows a typical configuration in which two second bowl chucks 12, a first bowl chuck 14 hold one piezoelectric ceramic plate 13. In the structure shown in fig. 7, the two second bowl chucks 12 and the first bowl chuck 14 made of the super-indium-tile alloy material simultaneously serve as lead terminals of electrodes on both sides of the piezoelectric ceramic plate 13.
According to the frequency stabilization mechanism provided by the first aspect of the present invention, a first bowl-type chuck 14 is bonded or welded on the lower plane of the piezoelectric ceramic plate 13, and a second bowl-type chuck 12 is bonded or welded on the upper plane of the piezoelectric ceramic plate;
wherein, the plane of the first bowl-type chuck 14 is fixedly connected with the back of the bowl-type reflector 5; the bonding surface on the bowl-shaped curved surface side of the first bowl-shaped chuck 14 is fixedly connected with the lower plane of the piezoelectric ceramic plate 13;
the bonding surface of the bowl-shaped curved surface side of the second bowl-shaped chuck 12 is fixedly connected with the upper plane of the piezoelectric ceramic plate 13.
According to the frequency stabilization mechanism provided by the first aspect of the present invention, the piezoelectric ceramic plate 13, the second bowl-type chuck 12, and the first bowl-type chuck 14 are bonded by using epoxy glue, the piezoelectric ceramic plate 13, the second bowl-type chuck 12, and the first bowl-type chuck 14 are all circular, and the static diameter of the piezoelectric ceramic plate 13 is the same as the diameter of the second bowl-type chuck 12 and the diameter of the first bowl-type chuck 14.
In the frequency stabilization mechanism according to the first aspect of the present invention, the material of the second bowl-type chuck 12 and the first bowl-type chuck 14 is iron-nickel alloy.
In the frequency stabilization mechanism according to the first aspect of the present invention, the materials of the second bowl-type chuck 12 and the first bowl-type chuck 14 are super indium-tile alloys.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the embodiments of the present invention and not for limiting, and although the embodiments of the present invention are described in detail with reference to the above preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the embodiments of the present invention without departing from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A frequency stabilization mechanism of a laser gyro is characterized in that the frequency stabilization mechanism comprises: the bowl-type chuck, the piezoelectric ceramic piece and the bowl-type reflector are arranged on the upper surface of the bowl-type chuck;
the bowl-type reflector is used as an optical cavity reflector of the laser gyro;
one face of bowl formula chuck with bowl formula speculum fixed connection, another face fixed connection of bowl formula chuck makes when bowl formula chuck produces crooked deformation on the piezoceramics piece is on the surface, through applying the voltage control on the piezoceramics piece piezoceramics's flexible, the flexible drive of piezoceramics piece the bowl formula chuck also produces crooked deformation, through the crooked deformation of bowl formula speculum changes the chamber length of the resonant cavity of laser gyro, makes the mode frequency stability of laser gyro work is in the peak position of frequency gain curve.
2. The frequency stabilization mechanism of claim 1, wherein the center of the bowl-shaped reflector is a circular reflection film region, an annular groove is disposed around the reflection film region on a plane where the reflection film region is located, an edge region outside the annular groove is an airtight surface, and the airtight surface of the bowl-shaped reflector is bonded with an end surface of the laser gyro resonant cavity to form a seal of the laser gyro resonant cavity.
3. The frequency stabilization mechanism of claim 2, wherein a circular central region and an annular groove surrounding the circular central region are also disposed on the opposite plane of the reflection film region of the bowl-shaped reflector, the edge region outside the annular groove and the circular central region are used as fixing surfaces for bonding the bowl-shaped chuck, and the fixing surfaces are fixedly connected with the piezoelectric ceramic plate by bonding or welding.
4. The frequency stabilization mechanism of claim 1, wherein the bowl chuck is in the shape of a circular disk, the first circular surface of the bowl chuck being a flat surface for fixedly coupling with the back surface of the bowl reflector; the middle of the second circular surface of the bowl-type chuck is a concave bowl-shaped curved surface, the periphery is thick, the middle of the second circular surface of the bowl-type chuck is thin, the periphery of the second circular surface of the bowl-type chuck is provided with a bonding surface which is an annular plane, and the bonding surface of the annular plane is fixedly connected with the piezoelectric ceramic plate through bonding or welding.
5. The frequency stabilization mechanism of claim 4, wherein the piezoelectric ceramic sheet is made of PZT-5, the upper surface and the lower surface of the piezoelectric ceramic sheet are both plated with conductive silver films as electrodes, and electrode leads are led out; the deformation voltage applied to the piezoelectric ceramic sheet is as follows: 0 to 300V.
6. The frequency stabilization mechanism of claim 5, wherein the piezoceramic sheet is formed by stacking more than two PZT-5 piezoceramics.
7. The frequency stabilization mechanism according to claim 4, wherein a first bowl chuck is bonded or welded on the lower plane of the piezoelectric ceramic plate, and a second bowl chuck is bonded or welded on the upper plane of the piezoelectric ceramic plate;
the plane of the first bowl-type chuck is fixedly connected with the back surface of the bowl-type reflector; the bonding surface on the bowl-shaped curved surface side of the first bowl-type chuck is fixedly connected with the lower plane of the piezoelectric ceramic piece;
and the bonding surface on the bowl-shaped curved surface side of the second bowl-type chuck is fixedly connected with the upper plane of the piezoelectric ceramic plate.
8. The frequency stabilization mechanism of claim 7, wherein the piezoelectric ceramic plate and the bowl-type chuck are bonded by epoxy glue, the piezoelectric ceramic plate and the bowl-type chuck are circular, and the static diameter of the piezoelectric ceramic plate is the same as the diameter of the bowl-type chuck.
9. The frequency stabilization mechanism of claim 1, wherein the bowl chuck is made of an iron-nickel alloy.
10. The frequency stabilization mechanism of claim 9, wherein the bowl chuck is made of a super indium tile alloy.
CN202211256285.6A 2022-10-14 2022-10-14 Frequency stabilizing mechanism of laser gyroscope Pending CN115326045A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117685944A (en) * 2024-01-23 2024-03-12 江西驰宇光电科技发展有限公司 Mode-jump control method and mode-jump control device of laser gyro
CN117685944B (en) * 2024-01-23 2024-04-16 江西驰宇光电科技发展有限公司 Mode-jump control method and mode-jump control device of laser gyro

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