CN115323306A - Thermal spraying method and thermal spraying object unit - Google Patents

Thermal spraying method and thermal spraying object unit Download PDF

Info

Publication number
CN115323306A
CN115323306A CN202210396509.7A CN202210396509A CN115323306A CN 115323306 A CN115323306 A CN 115323306A CN 202210396509 A CN202210396509 A CN 202210396509A CN 115323306 A CN115323306 A CN 115323306A
Authority
CN
China
Prior art keywords
mask
sprayed
tool
thermal spraying
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202210396509.7A
Other languages
Chinese (zh)
Other versions
CN115323306B (en
Inventor
植松聪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Publication of CN115323306A publication Critical patent/CN115323306A/en
Application granted granted Critical
Publication of CN115323306B publication Critical patent/CN115323306B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134Plasma spraying
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/01Selective coating, e.g. pattern coating, without pre-treatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06Metallic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/129Flame spraying
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/131Wire arc spraying

Abstract

The present invention relates to a thermal spraying method and a thermal spraying object unit. A thermal spraying method for thermal spraying on a thermal spraying target member includes: preparing a mask member having a mask through-hole, a member to be sprayed, and a mask tool having a tool through-hole; disposing a mask member on a surface of the masking tool so that the mask through-hole and the tool through-hole overlap each other; disposing a member to be sprayed on a back surface of the masking tool; and a step of spraying the spray material from the mask through-hole toward the spray-coated member.

Description

Thermal spraying method and thermal spraying object unit
Technical Field
The present disclosure relates to a sputtering method and a sputtering target unit.
Background
There is known a technique of using a masking tool provided with a through portion for thermal spraying a thermal spraying material when the thermal spraying material is thermally sprayed and a member to be thermally sprayed is fixed to a fixed object (for example, japanese patent application laid-open No. 2015-112534). The masking tool is configured for use on a component to be sprayed.
Disclosure of Invention
When thermal spraying is performed using a masking tool, there is a problem that a thermal spraying material adheres to and deposits on the masking tool. When the thermal spray material is deposited on the masking tool, for example, a dimensional error of a through portion of the masking tool may occur. Further, the masking tool may need to be cleaned and replaced.
The present disclosure can be implemented as follows.
(1) According to one aspect of the present disclosure, a deposition method for depositing a material onto a deposition target member is provided. The thermal spraying method comprises: preparing a mask member having mask through-holes, a member to be sprayed, and a masking tool having tool through-holes; disposing the mask member on the surface of the masking tool so that the mask through-hole and the tool through-hole overlap each other; disposing the member to be sprayed on the back surface of the masking tool; and a step of spraying a spray material from the mask through-hole toward the member to be sprayed.
According to the thermal spraying method of this aspect, since thermal spraying is performed in a state where the mask member covers the surface of the masking tool, deposition of the thermal spraying material on the surface of the masking tool can be reduced or prevented.
(2) In the thermal spraying method according to the above aspect, the mask member and the thermal spraying target member may be coupled by a coupling member, and in the step of disposing the thermal spraying target member on the rear surface of the mask tool, the coupling member may be bent to dispose the thermal spraying target member on the rear surface of the mask tool.
According to the thermal spraying method of this aspect, after the mask member is placed on the mask tool, the member to be thermally sprayed can be easily placed on the back surface of the mask tool.
(3) The thermal spraying method according to the above aspect may further include: cutting the connecting member and dividing the mask member and the member to be sprayed after the step of spraying the spray material; and detaching the divided mask member.
According to the thermal spraying method of this aspect, the mask member can be easily detached from the thermal sprayed member.
(4) In the thermal spraying method according to the above aspect, the member to be thermally sprayed may be an electrode electrically connected to a front surface electrode of an electrically heated catalyst, and the method may further include a step of disposing the masking tool on which the masking member and the member to be thermally sprayed are disposed on a front surface of the front surface electrode after the step of disposing the member to be thermally sprayed on a rear surface of the masking tool.
According to the thermal spraying method of this aspect, deposition of the thermal spraying material on the surface of the masking tool can be reduced or prevented during production of the electrically heated catalyst.
(5) According to another aspect of the present disclosure, there is provided a deposition target unit for use in a masking tool. The subject unit to be sprayed includes: a member to be sprayed, a spray material being sprayed at a position to be sprayed including a part of the member to be sprayed; a mask member having a mask through-hole; and a connecting member that connects the mask member and the member to be thermally sprayed so that the unit to be thermally sprayed can be bent into a state in which the surface of the mask member and the surface of the member to be thermally sprayed face each other. In the relative state, the mask through-hole and the sprayed position are arranged at positions overlapping each other.
According to the thermal spray object unit of this aspect, thermal spray can be performed with the mask member covering the surface of the masking tool by incorporating the masking tool into the thermal spray object unit in the opposed state. Therefore, deposition of the thermal spray material on the surface of the masking tool can be reduced or prevented.
(6) In the above-described mode of the subject unit to be sprayed, a distance from a rotation axis of the mask member to the mask through-hole when the subject unit to be sprayed is bent to the opposing state may be equal to a distance from the rotation axis to the position to be sprayed.
According to the subject unit to be sprayed of this aspect, when the subject unit to be sprayed is brought into a facing state, the mask through-hole and the position to be sprayed are easily overlapped with each other.
(7) In the thermal spray object unit according to the above aspect, the mask member may include a position alignment mechanism for aligning a tool through hole provided in a masking tool with a position of the mask through hole.
According to the thermal spraying object unit of this aspect, the tool through-holes of the masking tool and the mask through-holes can be easily aligned.
The present disclosure can also be implemented in various ways other than the thermal spraying method and the thermal spraying target unit. For example, the present invention can be realized as a spray-coated body masking unit, an electrically heated catalyst, a vehicle component, a method for manufacturing a vehicle component, a method for processing a vehicle component, a surface treatment method, a building method, a method for forming a spray coating film, a method for manufacturing a spray-coated body unit, a method for manufacturing a spray-coated body masking unit, a method for manufacturing an electrically heated catalyst, a method for manufacturing a vehicle component, and the like.
Drawings
Features, advantages, technical and industrial significance of embodiments of the present invention will be described below with reference to the accompanying drawings, in which like numerals represent like elements, and wherein:
fig. 1 is a perspective view showing a structure of a spray object masking unit.
Fig. 2 is a perspective view showing a thermal spray object unit according to a first embodiment.
Fig. 3 is an explanatory diagram showing a structure of a surface of the masking tool.
Fig. 4 is an explanatory diagram illustrating a structure of a rear surface of the masking tool.
FIG. 5 is a process diagram showing a thermal spraying method using a mask unit for a thermal spraying object.
Fig. 6 is a process diagram showing a method of assembling the spray object masking unit.
Fig. 7 is an explanatory diagram schematically showing a case where the spray object masking unit is assembled.
FIG. 8 is an explanatory diagram showing a thermal spraying method using a mask unit for a thermal spraying object.
Detailed Description
A. The first embodiment:
fig. 1 is a perspective view showing a structure of a thermal spray object masking unit 300 including a thermal spray object unit 100 according to a first embodiment of the present disclosure. The mask unit 300 for a sprayed object is used when spraying a spray material onto a sprayed object that is an object to be sprayed with the spray material. In the present embodiment, the member to be sprayed is an electrode wire disposed on a surface electrode of an Electrically Heated Catalyst (EHC). The electrically heated catalyst is used, for example, to forcibly activate the catalyst by electrical heating, thereby improving the efficiency of purifying exhaust gas. As the electrically heated catalyst, for example, a cylindrical carrier having a honeycomb structure on which a catalyst such as platinum or palladium is supported is used. A surface electrode for energizing is formed on the outer peripheral surface of the carrier. In the present embodiment, the spray object masking unit 300 is used to fix the electrode wiring for energization to the surface electrode of the electrically heated catalyst.
The thermal spray object masking unit 300 includes the thermal spray object unit 100 of the present embodiment and a masking tool 200. In fig. 1, hatching is added only to the object unit 100 for easy understanding of the technique. The sprayed object masking unit 300 is formed by assembling the sprayed object unit 100 to the masking tool 200.
The mask unit 300 for a sprayed object includes a spraying through-hole 342 for passing a spraying material. The thermal spray material is thermally sprayed to the thermal spray through-hole 342 of the thermal spray-target mask unit 300, and the thermal spray target member (electrode member 60 described later in this embodiment) included in the thermal spray target unit 100 is fixed to the surface electrode of the electrically heated catalyst. When the member to be sprayed is fixed using the spray material, an object to which the member to be sprayed is fixed using the spray material is also referred to as a "fixed object". In the present embodiment, the object to be fixed is a surface electrode of an electrically heated catalyst. The sprayed object masking unit 300 prevents the sprayed material from adhering to an unintended position in the sprayed member by covering the surface of the sprayed member when the sprayed material is sprayed. As the thermal spray material, various materials such as metal, ceramic, plastic, and cermet can be used. In the present embodiment, a composite material in the form of a powder in which a metal and a ceramic are mixed is used as the thermal spray material. The material of the spray material is not limited to the powder form, and may be a wire or a rod.
Fig. 2 is a perspective view showing the object unit 100 to be sprayed according to the present embodiment. The sputtering target unit 100 is a flat plate-shaped member formed using a stainless alloy. The thermal spray object unit 100 includes a mask member 40, a connecting member 50, and an electrode member 60. In the present embodiment, in the target object unit 100, the mask member 40, the connecting member 50, and the electrode member 60 are arranged in this order substantially on the same straight line. The object unit 100 shown in fig. 2 is shown after manufacturing and before assembly into the masking tool 200. In the present embodiment, the thermal spray object unit 100 is manufactured by die forming using a metal material, and the mask member 40, the coupling member 50, and the electrode member 60 are integrally formed by die forming. The unit 100 to be sprayed is not limited to a stainless alloy, and may be formed using various metals, for example, various alloys such as a Ni alloy and a Co alloy.
As shown in fig. 2, the sputtering target unit 100 after production is formed such that the plane direction of the surface MT of the mask member 40 and the plane direction of the surface ET of the electrode member 60 as a sputtering target member are on the same plane. As shown in fig. 2, a state in which the plane direction of the surface MT of the mask member 40 and the plane direction of the surface ET of the electrode member 60 are on the same plane as each other is also referred to as a "parallel state". The back surface MB of the mask member 40 and the back surface EB of the electrode member 60 are configured similarly to the front surface MT of the mask member 40 and the front surface ET of the electrode member 60, and therefore, the description thereof is omitted.
The electrode member 60 is a flat plate-like member having a thickness of about 0.1 mm. The electrode member 60 is a member to be sprayed to which a spray material is sprayed, and is fixed to a surface electrode of an electrically heated catalyst as an object to be fixed. The electrode member 60 fixed to the surface electrode functions as an electrode for energizing the electrically heated catalyst. In the present embodiment, the electrode member 60 functions as an anode provided in a pair of electrodes of the electrically heated catalyst. The electrode member 60 is not limited to the anode, and may be used as the cathode, or may be used for both the anode and the cathode.
As shown in fig. 2, the electrode member 60 includes a first wiring 61 and a second wiring 62. The electrode member 60 has a shape elongated in one direction, and the first wiring 61 and the second wiring 62 are arranged in order along the extending direction. The first wiring 61 is a portion of the electrode member 60 that is directly or indirectly connected to a power source such as a battery. The second wiring 62 is a portion that is in contact with and electrically connected to the surface electrode of the electrically heated catalyst. The second wiring 62 is formed continuously with the first wiring 61, and supplies electric power supplied from a power source through the first wiring 61 to the surface electrode of the electrically heated catalyst. In the present embodiment, the second wiring 62 has 15 linear wirings and has an external shape called Comb (Comb) shape. The width of each of the second wires 62 is, for example, about 0.5 to 1.0 mm.
Each of the second wires 62 is fixed to the surface electrode by disposing a thermal spraying material in a part of each of the second wires 62 disposed on the surface electrode to which the catalyst is electrically heated and in the surface electrode area around each of the wires. In the present disclosure, a predetermined position at which a thermal spray material is thermally sprayed on a thermal spray target member is also referred to as a "thermal spray target position". The position to be sprayed is set in advance. When the member to be sprayed is fixed to the fixed object using the spray material, the position to be sprayed includes a part of the fixed object. In fig. 2, the deposition site PT is conceptually shown for ease of understanding the technique. The position PT to be sprayed includes a part of the surface electrode as the object to be fixed and a part of the second wiring 62 as the member to be sprayed disposed on the surface electrode. The number of the positions PT to be sprayed and the arrangement position thereof can be set arbitrarily. In the present embodiment, the number of the positions PT to be sprayed is 15, which is the same as the number of the second wires 62. The positions PT to be sprayed are arranged on the straight lines of the first line PL1 and the second line PL 2. The first row PL1 has 8 deposition positions PT, and the second row PL2 has 7 deposition positions PT. The positions PT to be sprayed are arranged in a so-called staggered arrangement (staggered array) in which the positions are alternately arranged in the first row PL1 and the second row PL 2.
The mask member 40 is a flat plate-like member having a thickness of about 0.1 mm. When the mask member 40 thermally sprays the thermal spray material, the mask member 200 is covered on the surface thereof as described later, thereby reducing or preventing the thermal spray material from adhering to the mask member 200. The mask member 40 includes a mask through hole 42 and a fixing hole 44.
The fixing hole 44 is fitted to a mask fixing protrusion 244 of the masking tool 200 as described later. The fixing holes 44 function as a position alignment mechanism for aligning the mask member 40 with the masking tool 200 when the mask member 40 is placed in the masking tool 200, together with the mask fixing protrusions 244.
The mask through-hole 42 is a portion through which the thermal spray material passes during thermal spraying. The mask through-hole 42 penetrates the mask member 40 in the thickness direction from the front surface MT to the back surface MB of the mask member 40. The mask through holes 42 are provided in the number corresponding to the number of the positions PT to be sprayed. In the present embodiment, 15 mask through holes 42 are provided. The mask through holes 42 are arranged on a straight line of each of the first row ML1 corresponding to the first row PL1 and the second row ML2 corresponding to the second row PL2 at the sputtering target position PT. The first column ML1 has 8 mask through holes 42, and the second column ML2 has 7 mask through holes 42. The mask through holes 42 are alternately arranged in the first and second rows ML1 and ML2, respectively, and are arranged in a so-called staggered arrangement.
The connecting member 50 connects the electrode member 60 and the mask member 40. In the present embodiment, the coupling member 50 is a shaft-like member having a thickness of 0.1mm and a width of about 0.5 to 1.0 mm. In the example of fig. 2, the connection member 50 is provided at an end portion of the second wiring 62 in the extending direction of the electrode member 60. The length W1 of the coupling member 50 is longer than the thickness T1 of the masking tool 200 described later. The coupling member 50 can be bent by plastic deformation of metal, and the phase position alignment of the mask member 40 and the electrode member 60 can be arbitrarily changed. The connecting member 50 can be cut, for example, by cutting after the thermal spraying is completed, to divide the thermal spraying object unit 100 into the mask member 40 and the electrode member 60.
In the present embodiment, two coupling members 50 are provided. The arrangement direction of the two coupling members 50 is a direction orthogonal to the arrangement direction of the mask member 40 and the electrode member 60. Thus, the rotation axis of the mask member 40 at the time of bending is configured as the rotation axis BD along the arrangement direction of the coupling members 50. That is, the object unit 100 according to the present embodiment can rotate the mask member 40 around the rotation axis BD with respect to the electrode member 60. As a result, the connecting member 50 can bend the target object unit 100 into an opposing state in which the surface MT of the mask member 40 and the surface ET of the electrode member 60 face each other. The number of the coupling members 50 is not limited to two, and may be one, or may be three or more. The coupling member 50 is not limited to the shaft shape, and may have any shape, for example, a flat plate shape, or a columnar shape such as a column or a polygonal column.
Fig. 2 shows the rotation axis BD of the mask member 40 when one mask through-hole 421 included in the plurality of mask through-holes 42, one sputtering target position PT1 included in the plurality of sputtering target positions PT, and the sputtering target unit 100 are bent to face each other. The mask through hole 421 is disposed at a position corresponding to the sprayed position PT 1. Specifically, the mask through-holes 421 are disposed at positions overlapping with the thermal spraying position PT1 in a plan view when the thermal spraying object unit 100 is in a facing state. Fig. 2 shows a linear distance L1 from the rotation axis BD to the mask through holes 421 and a linear distance L2 from the rotation axis BD to the sprayed position PT 1. The linear distance L1 is equal to the linear distance L2. In this way, each mask through-hole 42 and each sputtering target position PT corresponding thereto are arranged so that the linear distance from the rotation axis BD to each mask through-hole 42 is equal to the linear distance from the rotation axis BD to each sputtering target position PT. For example, in the parallel-state object unit 100 shown in fig. 2, the mask through-holes 42 are arranged at positions that are line-symmetrical about the rotation axis BD with respect to the positions at which the objects to be sprayed PT are arranged. In this way, in the target object unit 100 in the opposed state, the mask through holes 42 of the mask member 40 can be arranged so as to overlap the target positions PT of the second wires 62.
Fig. 3 is an explanatory diagram illustrating a structure of the surface TP of the masking tool 200. The masking tool 200 is a flat plate-shaped member formed using aluminum or an aluminum alloy. When the mask tool 200 thermally sprays the thermal spray material, the mask tool covers the surface of the electrode member 60 and the surface electrode as the thermal spray material to prevent the thermal spray material from adhering to the thermal spray position PT, that is, an unintended position between the surface electrode and the electrode member 60. When the mask unit 300 for a thermal spray object is formed, the mask member 40 is disposed on the surface TP of the mask tool 200 in a state where the surface MT of the mask member 40 is in contact with the surface TP of the mask tool 200. The masking tool 200 is not limited to aluminum, and may be formed using various metal materials such as iron-based materials. The mask member 40 may be configured not to abut on the surface TP of the masking tool 200 but to be opposed to the surface TP of the masking tool 200 and to be separated from the surface TP of the masking tool 200.
The mask tool 200 has a tool through hole 242 and a mask fixing protrusion 244 on a surface TP thereof. The tool through-hole 242 is a part of the thermal spraying through-hole 342, and is a through-hole through which the thermal spraying material passes. The tool through-hole 242 penetrates the masking tool 200 in the thickness direction from the front surface TP to the back surface BP of the masking tool 200. The number of the tool through-holes 242 is set to the number corresponding to the number of the sprayed positions PT, that is, the number corresponding to the mask through-holes 42 of the mask member 40. In the present embodiment, the tool through-holes 242 are 15 in number and arranged in a straight line in each of the first row JL1 corresponding to the first row PL1 of the spraying position PT and the second row JL2 corresponding to the second row PL2 of the spraying position PT. The first row JL1 has 8 tool through holes 242, and the second row JL2 has 7 tool through holes 242. The tool through holes 242 are alternately arranged in the first row JL1 and the second row JL2, respectively, and are arranged in a so-called staggered arrangement. When the thermal spray object unit 100 is assembled to the mask tool 200, the tool through-holes 242 and the mask through-holes 42 overlap each other, and the thermal spray through-holes 342 shown in fig. 1 are formed in the thermal spray object mask unit 300.
The mask fixing protrusion 244 is fitted into the fixing hole 44 provided in the mask member 40 shown in fig. 2. The mask fixing protrusions 244 function as a position alignment mechanism for aligning the tool through holes 242 and the mask through holes 42 when the mask member 40 is disposed on the surface TP of the masking tool 200, together with the fixing holes 44. When the tool through-holes 242 and the mask through-holes 42 are aligned with sufficient accuracy, the mask fixing protrusions 244 and the fixing holes 44 may not be provided.
The masking tool 200 has a first side S1 and a second side S2 opposite the first side S1. When the connecting member 50 is bent to form the opposed state of the thermal spraying object unit 100, the first side surface S1 abuts against the connecting member 50 and functions as a guide portion defining the rotation axis BD. A recess 261 is formed on the second side surface S2. The concave portion 261 has a shape having a concave shape toward the center of the masking tool 200. The width of the concave portion 261 is substantially the same as the width of the first wiring 61 of the electrode member 60. Thus, for example, the lead portion functions as a lead portion when the first wire 61 is bent in a direction away from the object to be fixed in order to connect the first wire 61 to the power supply after the electrode member 60 is fixed to the surface electrode by thermal spraying the thermal spraying material to the object mask unit 300 shown in fig. 1.
Fig. 4 is an explanatory diagram illustrating a structure of the back surface BP of the masking tool 200. The electrode member 60 is disposed on the back side BP of the masking tool 200. From the viewpoint of avoiding the thermal spray material deposited by thermal spraying from contacting the inner wall of the tool through-hole 242 of the masking tool 200, the electrode member 60 is preferably in a state of being separated from the rear surface BP of the masking tool 200 in a state where the thermal spray object masking unit 300 is formed. However, the electrode member 60 is not limited to this, and may be disposed in a state of being in contact with the back surface BP of the masking tool 200.
As shown in fig. 4, four wiring fixing projections 260 are provided on the back surface BP of the masking tool 200. The four wiring fixing projections 260 are disposed at positions corresponding to the outer shape of the second wiring 62. When the second wiring 62 is disposed on the back surface BP of the masking tool 200, each wiring fixing protrusion 260 abuts against the outer peripheral ends of the four corners of the second wiring 62. Thus, when the second wire 62 is disposed on the rear surface BP of the mask tool 200, it functions as a positioning mechanism for the position PT of the sprayed material with respect to the tool through-hole 242. According to the mask unit 300 for a subject to be sprayed having the above-described configuration, when the mask member 40 is disposed on the front surface TP of the mask tool 200 and then the coupling member 50 is bent to be in the facing state, the electrode member 60 can be easily aligned with the rear surface BP of the mask tool 200. As a result, the position of the sprayed position PT of the electrode member 60 can be easily aligned with respect to the tool through-hole 242 of the masking tool 200.
The procedure of the thermal spraying method using the thermal spraying object mask unit 300 including the thermal spraying object unit 100 according to the present embodiment will be described with reference to fig. 5 to 8. FIG. 5 is a process diagram showing a thermal spraying method using the spray object masking unit 300. In step S10, the object-to-be-sprayed unit 100 and the masking tool 200 are prepared. The spray object unit 100 can be prepared in a parallel state after the mold forming shown in fig. 2.
In step S20, the sprayed object masking unit 300 is assembled. Specifically, the spray-coated object masking unit 300 is formed by assembling the spray-coated object unit 100 in a facing state in the masking tool 200. In step S30, the assembled spray object masking unit 300 is disposed on the surface electrode of the electrically heated catalyst. In step S40, the thermal spraying material is thermally sprayed to the thermal spraying through-hole 342 of the thermal spraying object mask unit 300. Thereby, the spray material is deposited at the spray position PT including the electrode member 60. As a result, the electrode member 60 is fixed to the surface electrode as the object to be fixed, and the second wiring 62 is electrically connected to the surface electrode.
In step S50, the connecting member 50 is cut. The connecting member 50 can be cut by an operator using forceps, for example. As a result, the sprayed object unit 100 is divided into the mask member 40 and the electrode member 60. The cutting position of the connecting member 50 is preferably a position close to the second wiring 62 from the viewpoint of suppressing the current from flowing to the portion corresponding to the connecting member 50 after cutting when the electrode member 60 is energized. The connection member 50 may be cut using a dedicated device, or may be cut using stress applied to the connection member 50 when the connection member 50 is bent without using a forceps. In step S60, the mask member 40 and the masking tool 200 of the sputtering target unit 100 are detached from the surface electrode. Through the above steps, the thermal spraying is completed. In the present embodiment, the mask member 40 removed is discarded, and the masking tool 200 is reused.
The details of the method of assembling the spray object masking unit 300 in step S20 will be described using fig. 7 together with fig. 6. Fig. 6 is a process diagram showing an assembly method of the spray object masking unit 300. The respective steps shown in fig. 6 may be performed manually by an operator or may be performed using a dedicated device.
In step S22, the mask member 40 of the thermal spray object unit 100 is disposed on the surface TP of the masking tool 200. In step S24, the connection member 50 of the object unit 100 in a state where the mask member 40 is disposed on the front surface TP of the masking tool 200 is bent around the rotation axis BD to form the facing state of the object unit 100. In step S26, the electrode member 60 is disposed on the back side BP of the masking tool 200. Through the above steps, the assembly of the sprayed object mask unit 300 is completed.
Fig. 7 is an explanatory diagram schematically showing a case where the spray object masking unit 300 is assembled. In fig. 7, a surface TP of the masking tool 200 and the back surfaces of the sputtered body unit 100, i.e., the back surface MB of the mask member 40 and the back surface EB of the electrode member 60 are shown.
As shown in fig. 7, when the parallel-state object unit 100 is mounted on the masking tool 200, the mask member 40 is moved in the direction D1 shown in fig. 7 and is disposed on the surface TP of the masking tool 200. At this time, the fixing holes 44 provided in the mask member 40 are fitted to the mask fixing protrusions 244 of the masking tool 200, whereby the mask through-holes 42 can be easily aligned with respect to the tool through-holes 242. As a result, the surface MT of the mask member 40 abuts the surface TP of the mask tool 200, and the mask member 40 is disposed on the mask tool 200 in a state where the tool through-holes 242 and the mask through-holes 42 overlap each other.
After the mask member 40 is disposed on the masking tool 200, the object-to-be-sprayed unit 100 is bent around the rotation axis BD in a state where the mask member 40 is disposed on the masking tool 200. Specifically, as indicated by an arrow D2 in fig. 7, the electrode member 60 is rotated about the rotation axis BD toward the back side BP of the masking tool 200. At this time, the rotating shaft BD can be easily formed by bending the coupling member 50 along the surface of the first side surface S1 of the masking tool 200. As a result, when the electrode member 60 is disposed on the back surface BP of the masking tool 200, the electrode member 60 can be easily aligned with respect to the back surface BP of the masking tool 200. The second wiring 62 in the electrode member 60 is disposed using the wiring fixing projection 260 shown in fig. 4. By using the wire fixing projection 260, the position alignment of the sprayed position PT of the second wire 62 with respect to the tool through-hole 242 becomes easy in the back surface BP of the masking tool 200. At this time, the electrode member 60 is disposed away from the back side BP of the masking tool 200. Through the above steps, the assembly of the sprayed object masking unit 300 is completed.
A thermal spraying method of a thermal spraying material using the mask unit 300 for a thermal spraying object will be described with reference to fig. 8. Fig. 8 is an explanatory diagram schematically showing a thermal spraying method using the spray object masking unit 300. In fig. 8, the spray object masking unit 300 is schematically illustrated in an exploded perspective view for ease of understanding of the technique, and the length of the connecting member 50 is illustrated to be longer than the length of the actual connecting member 50.
In FIG. 8, a surface electrode 460 and a spray nozzle 80 for spraying a spray material are schematically illustrated. The surface electrode 460 is an object to be fixed, and is an electrode provided on the outer peripheral surface of the electrically heated catalyst. The surface electrode 460 has a planar shape of, for example, a substantially rectangular shape. In fig. 8, one surface electrode 460 is shown, but two surface electrodes 460 corresponding to the anode and the cathode are arranged on the outer surface of the electrically heated catalyst so as to face each other. The shape of the surface electrode 460 is not limited to a rectangular shape, and various shapes are possible.
The spray nozzle 80 is connected to a spray device not shown. In the present embodiment, the thermal spraying apparatus is a plasma-spraying type thermal spraying apparatus. The thermal spraying device, for example, applies thermal energy to the thermal spraying material to bring the thermal spraying material into a semi-molten state, and sprays the thermal spraying material in the semi-molten state, to which kinetic energy is applied, from the thermal spraying nozzle 80. The thermal spraying apparatus is not limited to plasma thermal spraying, and may be any of various types of thermal spraying apparatuses such as flame thermal spraying, arc thermal spraying, high-speed flame thermal spraying, and laser thermal spraying.
In fig. 8, the path of movement NR of the deposition nozzle 80 is schematically illustrated by the dashed arrow. The movement path NR can be arbitrarily set. In the present embodiment, the movement path NR is a path that reciprocates along the arrangement of the mask through holes 42, i.e., the arrangement of the spraying through holes 342, i.e., the arrangement of the first and second rows ML1 and ML 2. The thermal spraying nozzle 80 moves along the movement path NR to thermally spray the thermal spraying material into the thermal spraying through-hole 342.
A spray 82 of spray material ejected from a spray nozzle 80 is schematically illustrated in FIG. 8. The spray 82 of the thermal spraying material passes through the thermal spraying through hole 342 formed by overlapping the mask through hole 42 and the tool through hole 242, and impinges on the thermal spraying position PT including the second wire 62 and the surface electrode 460. The thermal spray material is deposited and solidified at the thermal spray site PT to form a thermal spray film 70, also called a flat sheet (splat). The thermal spray film 70 is solidified in a state where the second wiring 62 is in contact with the surface electrode 460, and fixes the second wiring 62 to the surface electrode 460 by the adhesive force with the surface electrode 460, and electrically connects the second wiring 62 and the surface electrode 460.
After the thermal spraying of the thermal spraying material is completed, the connecting member 50 is cut at a cutting position CT shown in fig. 8, and the thermal spraying object unit 100 is divided into the mask member 40 and the electrode member 60. The divided mask member 40 and the masking tool 200 are detached from the surface electrode 460. The removed mask member 40 is discarded and the masking tool 200 is reused.
As described above, in the thermal spraying method using the thermal spraying object unit 100 according to the present embodiment, the mask member 40 is disposed on the front surface TP of the masking tool 200 so that the mask through-holes 42 of the mask member 40 and the tool through-holes 242 of the masking tool 200 overlap each other, and the electrode member 60, which is a thermal spraying object, is disposed on the rear surface BP of the masking tool 200. The thermal spray material is thermally sprayed from the mask through-hole 42, i.e., the thermal spray through-hole 342 of the masking tool 200 in this state toward the electrode member 60, i.e., the member to be thermally sprayed. According to the thermal spraying method using the thermal spraying object unit 100 of the present embodiment, since thermal spraying is performed in a state where the mask member 40 covers the surface TP of the masking tool 200, deposition of thermal spraying material on the surface TP of the masking tool 200 can be reduced or prevented.
According to the thermal spraying method of the present embodiment, when the electrode member 60 is disposed on the back surface BP of the masking tool 200, the connecting member 50 is bent, and the electrode member 60 as the member to be thermally sprayed is disposed on the back surface MB of the masking tool 200. Therefore, when the thermal spray object unit 100 is bent after the mask member 40 is disposed on the front surface TP of the mask tool 200, the electrode member 60 is easily disposed on the rear surface BP of the mask tool 200, and the mask member 40 and the electrode member 60 are easily aligned with respect to the mask tool 200. Further, the mask member 40 and the electrode member 60 can be integrally formed, and the productivity of the thermal spray object unit 100 can be improved.
According to the thermal spraying method of the present embodiment, after the thermal spraying material is thermally sprayed, the connecting member 50 is cut, the mask member 40 and the member to be thermally sprayed are divided, and the divided mask member 40 is removed. Therefore, the mask member 40 can be easily detached from the electrode member 60 fixed to the front surface electrode 460 by thermal spraying.
According to the thermal spraying method of the present embodiment, the member to be thermally sprayed is the electrode member 60 electrically connected to the surface electrode 460 of the electrically heated catalyst. After the step of disposing the electrode member 60 on the rear surface MB of the mask tool 200, the mask tool 200 is disposed on the front surface MT of the front surface electrode 460, and the thermal spray material is thermally sprayed from the mask through-holes 42 toward the electrode member 60. Therefore, the electrode member 60 can be fixed to the surface electrode 460 of the electrically heated catalyst by using the thermal spraying material, and the deposition of the thermal spraying material on the surface TP of the masking tool 200 can be reduced or prevented at the time of manufacturing the electrically heated catalyst.
The thermal spray object unit 100 of the present embodiment includes: an electrode member 60 in which a thermal spraying material is thermally sprayed at a thermal spraying position PT; a mask member 40 having a mask through-hole 42; and a connecting member 50 that connects the mask member 40 and the electrode member 60 to each other and allows the thermal spray target unit 100 to be bent into a state in which the surface MT of the mask member 40 and the surface ET of the electrode member 60 face each other. According to the thermal spray target unit 100 of the present embodiment, the surface MT of the mask member 40 and the surface ET of the electrode member 60 face each other by the bending of the coupling member 50. Therefore, since the thermal spraying can be performed in a state where the surface TP of the masking tool 200 is covered with the masking member 40, the deposition of the thermal spraying material on the surface TP of the masking tool 200 can be reduced or prevented.
In the subject unit 100 according to the present embodiment, the mask through-holes 42 and the target position PT are arranged such that the linear distance L1 from the rotation axis BD to the mask through-holes 42 is equal to the linear distance L2 from the rotation axis BD to the target position PT. Therefore, when the target object unit 100 is brought into a facing state, the mask through-hole 42 and the target spraying position PT can be easily overlapped with each other.
In the thermal spray object unit 100 of the present embodiment, the mask member 40 further includes the fixing holes 44 that are fitted into the mask fixing protrusions 244 provided in the masking tool 200. The fixing holes 44 function as a position alignment mechanism for aligning the mask through-holes 42 and the tool through-holes 242. Therefore, when the surface MT of the mask member 40 is disposed on the surface TP of the mask tool 200, the tool through-holes 242 and the mask through-holes 42 are easily aligned.
B. Other embodiments:
(B1) In the above embodiment, the surface electrode 460 in which the object to be fixed is the electrically heated catalyst is shown, and the member to be sprayed is the electrode member 60 fixed to the surface electrode 460. On the other hand, the object to be fixed is not limited to the electrically heated catalyst, and may be various vehicle components such as a cylinder head, a cylinder, and a piston, or various components such as a machine component and a structure such as a building. In this case, the member to be sprayed is not limited to the electrode member 60, and may be a member for various purposes such as a protective film or a heat insulating film for various members described above, a coating film for corrosion prevention or rust prevention of a structure, and a coating film for improving wear resistance or heat resistance. Further, the member to be sprayed may not be fixed to the object to be sprayed without having the object to be fixed. In this case, the position to be sprayed includes only the member to be sprayed, and the spray material is sprayed only onto the member to be sprayed.
(B2) In the above embodiment, the example in which the connection member 50 is disposed at the end of the second wiring 62 in the extending direction of the electrode member 60 is shown. On the other hand, the connection member 50 is not limited to the end portion of the second wire 62 disposed in the extending direction of the electrode member 60, and may be set at any position on the assumption that the mask through-holes 42 of the mask member 40 are disposed at the desired sprayed position PT in a facing state. For example, the connecting member 50 may be formed at either end of the second wire 62 in a direction intersecting the extending direction of the electrode member 60 in the second wire 62. In this case, the mask member 40 is coupled to the coupling member 50 so that the arrangement position of the mask through holes 42 and the arrangement position of the thermal spraying target position PT in the state where the mask member 40 is opposed to each other are aligned.
(B3) In the above embodiment, the mask member 40 and the electrode member 60 are coupled by the coupling member 50. On the other hand, the connection member 50 may not be provided, and the mask member 40 and the electrode member 60 may be used separately. Even in the thermal spraying method of this embodiment, thermal spraying can be performed in the same manner as in the above embodiment by disposing the front surface MT of the mask member 40 on the front surface TP of the masking tool 200 and disposing the front surface ET of the electrode member 60 on the back surface BP of the masking tool 200, and deposition of thermal spraying material on the front surface of the masking tool 200 can be reduced or prevented.
(B4) In the above embodiment, the mask member 40 of the thermal spray object unit 100 is disposed on the front surface TP of the masking tool 200, the connecting member 50 of the thermal spray object unit 100 in the state where the mask member 40 is disposed on the front surface TP of the masking tool 200 is bent around the rotation axis BD to form the facing state of the thermal spray object unit 100, and the electrode member 60 is disposed on the rear surface BP of the masking tool 200. In contrast, after the electrode member 60 is disposed on the rear surface BP of the masking tool 200, the connecting member 50 of the object unit 100 in the state where the electrode member 60 is disposed on the rear surface BP of the masking tool 200 may be bent around the rotation axis BD to be in the state where the object unit 100 is opposed to the electrode member, and the mask member 40 of the object unit 100 may be disposed on the front surface TP of the masking tool 200.
(B5) In the above embodiment, the sputtering target unit 100 is formed such that the plane direction of the surface MT of the mask member 40 and the plane direction of the surface ET of the electrode member 60 as a sputtering target member are on the same plane. In contrast, the thermal spray target cell 100 does not need to be formed so that the plane direction of the surface MT of the mask member 40 and the surface ET of the electrode member 60 are always on the same plane, and may be configured so that the mask member 40 and the electrode member 60 can be brought into a state of facing each other by bending the coupling member 50. The mask member 40 and the electrode member 60 need not be manufactured in a parallel state, and may be manufactured in a state other than the parallel state, such as a facing state.
The present disclosure is not limited to the above-described embodiments, and can be implemented in various configurations without departing from the scope of the present disclosure. For example, the technical features of the embodiments corresponding to the technical features of the respective aspects described in the section of the summary of the invention may be appropriately replaced or combined in order to solve a part or all of the above-described problems or achieve a part or all of the above-described effects. In addition, if the technical features are not described as essential in the present specification, they can be deleted as appropriate.

Claims (7)

1. A thermal spraying method for performing thermal spraying on a member to be sprayed, the thermal spraying method comprising:
preparing a mask member having a mask through-hole, a member to be sprayed, and a mask tool having a tool through-hole;
disposing the mask member on the surface of the masking tool so that the mask through-hole and the tool through-hole overlap each other;
disposing the member to be sprayed on the back surface of the masking tool; and
and a step of spraying a spray material from the mask through-hole toward the member to be sprayed.
2. The sputtering method according to claim 1, wherein,
the mask member and the member to be sprayed are joined by a joining member,
in the step of disposing the member to be thermally sprayed on the rear surface of the masking tool, the member to be thermally sprayed is disposed on the rear surface of the masking tool by bending the connecting member.
3. The sputtering method according to claim 2, wherein,
the thermal spraying method further includes:
cutting the connecting member and separating the mask member from the member to be sprayed after the step of spraying the spray material; and
and detaching the divided mask member.
4. A sputtering method according to any one of claims 1 to 3,
the member to be sprayed is an electrode electrically connected to a surface electrode of the electrically heated catalyst,
the thermal spraying method further includes, after the step of disposing the member to be thermally sprayed on the rear surface of the mask, a step of disposing the mask on which the mask member and the member to be thermally sprayed are disposed on the front surface of the front electrode.
5. A sprayed object unit used for a masking tool, the sprayed object unit comprising:
a member to be sprayed, a spray material being sprayed at a position to be sprayed including a part of the member to be sprayed;
a mask member having a mask through-hole; and
a connecting member that connects the mask member and the member to be sprayed so that the unit to be sprayed can be bent into a state in which a surface of the mask member and a surface of the member to be sprayed are opposed to each other,
in the relative state, the mask through-hole and the sprayed position are arranged at positions overlapping each other.
6. The sprayed body unit of claim 5, wherein,
the distance from the rotation axis of the mask member to the mask through-hole when the thermal spraying object unit is bent to the opposing state is equal to the distance from the rotation axis to the thermal spraying position.
7. The coated body unit according to claim 5 or 6,
the mask member includes a position alignment mechanism for aligning a tool through hole provided in a masking tool with a position of the mask through hole.
CN202210396509.7A 2021-04-23 2022-04-15 Sputtering method and sputtering target unit Active CN115323306B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-073107 2021-04-23
JP2021073107A JP2022167356A (en) 2021-04-23 2021-04-23 Thermal spraying method, and thermal spraying target unit

Publications (2)

Publication Number Publication Date
CN115323306A true CN115323306A (en) 2022-11-11
CN115323306B CN115323306B (en) 2024-03-22

Family

ID=83852365

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210396509.7A Active CN115323306B (en) 2021-04-23 2022-04-15 Sputtering method and sputtering target unit

Country Status (2)

Country Link
JP (1) JP2022167356A (en)
CN (1) CN115323306B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015112534A (en) * 2013-12-11 2015-06-22 トヨタ自動車株式会社 Manufacturing method of electric heating type catalyst device
US20190017173A1 (en) * 2017-07-14 2019-01-17 Mimaki Engineering Co., Ltd. Plating method
CN111500979A (en) * 2019-01-31 2020-08-07 大日本印刷株式会社 Vapor deposition mask set, method for manufacturing electronic device, and electronic device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015112534A (en) * 2013-12-11 2015-06-22 トヨタ自動車株式会社 Manufacturing method of electric heating type catalyst device
US20190017173A1 (en) * 2017-07-14 2019-01-17 Mimaki Engineering Co., Ltd. Plating method
CN111500979A (en) * 2019-01-31 2020-08-07 大日本印刷株式会社 Vapor deposition mask set, method for manufacturing electronic device, and electronic device

Also Published As

Publication number Publication date
JP2022167356A (en) 2022-11-04
CN115323306B (en) 2024-03-22

Similar Documents

Publication Publication Date Title
US20060054664A1 (en) Bipolar plate and method for the production thereof
CN107635733B (en) Method for manufacturing fixed blade and fixed blade
EP2176026B1 (en) Welding torch mountable on a robot and comprising a neck
JP3294629B2 (en) Exhaust gas contact purification device and method of manufacturing the same
US20060049149A1 (en) Plasma spray apparatus
CN115323306A (en) Thermal spraying method and thermal spraying object unit
US8330071B2 (en) Discharging surface preparation method and repairing method
JP2010272712A (en) Method of manufacturing shunt resistor
JP2004311643A (en) Piezoelectric element forming member, its manufacturing method, and piezoelectric element unit and liquid injection head using the same
US9377711B2 (en) Developing device, blade unit, and developing device manufacturing method
WO2004113587A1 (en) Metal component, turbine component, gas turbine engine, surface processing method, and steam turbine engine
JP2023022397A (en) Masking jig, masking jig unit and thermal spray method
EP4084576A1 (en) Heating assembly and electronic atomization device
JP6670873B2 (en) Electrodes for welding galvanized steel sheets and seam welding equipment for galvanized steel sheets
CN113557642B (en) Method for manufacturing semiconductor laser device
CN113492262A (en) Clamping platen for die casting machine and method of manufacture
US20240114294A1 (en) Converter for an ultrasonic welding device having increased arc resistance
WO1992008571A1 (en) Method of multispot-welding and carrier obtained by said method
WO2003010356A1 (en) Method for manufacturing pipe formed product and pipe formed product
CN110225805B (en) Electrode tip
JP4559585B2 (en) Die head
JPS6316881A (en) Electrode for welding
JP7130858B2 (en) Electrode support device for supporting the electrode unit
JP2010105006A (en) Resistance welding machine
CN1981981A (en) Modified welding torch cathode for use in roughening a surface and related method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant