CN115322685B - 一种用于化学机械抛光的碱性氧化铝分散液及其制备方法 - Google Patents
一种用于化学机械抛光的碱性氧化铝分散液及其制备方法 Download PDFInfo
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- CN115322685B CN115322685B CN202211082433.7A CN202211082433A CN115322685B CN 115322685 B CN115322685 B CN 115322685B CN 202211082433 A CN202211082433 A CN 202211082433A CN 115322685 B CN115322685 B CN 115322685B
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- Prior art keywords
- alumina
- chemical mechanical
- mechanical polishing
- aluminum oxide
- dispersion liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 238000005498 polishing Methods 0.000 title claims abstract description 22
- 239000000126 substance Substances 0.000 title claims abstract description 19
- 239000006185 dispersion Substances 0.000 title claims abstract description 15
- 239000007788 liquid Substances 0.000 title claims abstract description 9
- 238000002360 preparation method Methods 0.000 title claims abstract description 6
- 239000002270 dispersing agent Substances 0.000 claims abstract description 16
- 239000008139 complexing agent Substances 0.000 claims abstract description 13
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 9
- 238000004131 Bayer process Methods 0.000 claims description 5
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 5
- 238000001354 calcination Methods 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 239000002002 slurry Substances 0.000 claims description 4
- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical group OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 claims description 3
- 229960003330 pentetic acid Drugs 0.000 claims description 3
- 235000014653 Carica parviflora Nutrition 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 238000003756 stirring Methods 0.000 claims description 2
- 241000243321 Cnidaria Species 0.000 claims 1
- 238000013329 compounding Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 12
- 229910021645 metal ion Inorganic materials 0.000 abstract description 7
- 239000000725 suspension Substances 0.000 abstract description 6
- 239000003513 alkali Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000005245 sintering Methods 0.000 abstract description 4
- 238000004873 anchoring Methods 0.000 abstract description 2
- 229920001577 copolymer Polymers 0.000 abstract description 2
- 150000003983 crown ethers Chemical class 0.000 abstract description 2
- 229920001519 homopolymer Polymers 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 229910052700 potassium Inorganic materials 0.000 abstract description 2
- 229910052708 sodium Inorganic materials 0.000 abstract description 2
- 238000001179 sorption measurement Methods 0.000 abstract description 2
- 230000000536 complexating effect Effects 0.000 abstract 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 12
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 8
- 150000007529 inorganic bases Chemical group 0.000 description 7
- 150000007530 organic bases Chemical class 0.000 description 7
- 239000013049 sediment Substances 0.000 description 7
- XEZNGIUYQVAUSS-UHFFFAOYSA-N 18-crown-6 Chemical compound C1COCCOCCOCCOCCOCCO1 XEZNGIUYQVAUSS-UHFFFAOYSA-N 0.000 description 4
- CBTVGIZVANVGBH-UHFFFAOYSA-N aminomethyl propanol Chemical compound CC(C)(N)CO CBTVGIZVANVGBH-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 150000003985 15-crown-5 derivatives Chemical group 0.000 description 2
- WHUUTDBJXJRKMK-UHFFFAOYSA-N Glutamic acid Natural products OC(=O)C(N)CCC(O)=O WHUUTDBJXJRKMK-UHFFFAOYSA-N 0.000 description 2
- WHUUTDBJXJRKMK-VKHMYHEASA-N L-glutamic acid Chemical compound OC(=O)[C@@H](N)CCC(O)=O WHUUTDBJXJRKMK-VKHMYHEASA-N 0.000 description 2
- DDAQLPYLBPPPRV-UHFFFAOYSA-N [4-(hydroxymethyl)-2-oxo-1,3,2lambda5-dioxaphosphetan-2-yl] dihydrogen phosphate Chemical compound OCC1OP(=O)(OP(O)(O)=O)O1 DDAQLPYLBPPPRV-UHFFFAOYSA-N 0.000 description 2
- WDJHALXBUFZDSR-UHFFFAOYSA-N acetoacetic acid Chemical compound CC(=O)CC(O)=O WDJHALXBUFZDSR-UHFFFAOYSA-N 0.000 description 2
- LOGBRYZYTBQBTB-UHFFFAOYSA-N butane-1,2,4-tricarboxylic acid Chemical compound OC(=O)CCC(C(O)=O)CC(O)=O LOGBRYZYTBQBTB-UHFFFAOYSA-N 0.000 description 2
- 235000013339 cereals Nutrition 0.000 description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 235000013922 glutamic acid Nutrition 0.000 description 2
- 239000004220 glutamic acid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 description 2
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 description 2
- 235000019982 sodium hexametaphosphate Nutrition 0.000 description 2
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 description 2
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 2
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 2
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 2
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 2
- -1 1, 4-dicarboxyphenyl Chemical group 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 244000132059 Carica parviflora Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013022 formulation composition Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Abstract
Description
实施例 | 2H | 4H | 6H |
1 | 150 | 250 | 350 |
2 | 100 | 200 | 250 |
3 | 50 | 120 | 190 |
4 | 50 | 120 | 210 |
5 | 70 | 150 | 220 |
6 | 50 | 110 | 190 |
7 | 50 | 100 | 170 |
实施例 | 现象 |
1 | 底部沉淀层板结 |
2 | 底部沉淀层较松软 |
3 | 底部沉淀层较松软 |
4 | 底部沉淀层较松软 |
5 | 底部沉淀层较松软 |
6 | 底部沉淀层非常松软 |
7 | 底部沉淀层非常松软 |
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211082433.7A CN115322685B (zh) | 2022-09-06 | 2022-09-06 | 一种用于化学机械抛光的碱性氧化铝分散液及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211082433.7A CN115322685B (zh) | 2022-09-06 | 2022-09-06 | 一种用于化学机械抛光的碱性氧化铝分散液及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN115322685A CN115322685A (zh) | 2022-11-11 |
CN115322685B true CN115322685B (zh) | 2024-03-19 |
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CN202211082433.7A Active CN115322685B (zh) | 2022-09-06 | 2022-09-06 | 一种用于化学机械抛光的碱性氧化铝分散液及其制备方法 |
Country Status (1)
Country | Link |
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CN (1) | CN115322685B (zh) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108239484A (zh) * | 2016-12-23 | 2018-07-03 | 蓝思科技(长沙)有限公司 | 一种蓝宝石抛光用氧化铝抛光液及其制备方法 |
-
2022
- 2022-09-06 CN CN202211082433.7A patent/CN115322685B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108239484A (zh) * | 2016-12-23 | 2018-07-03 | 蓝思科技(长沙)有限公司 | 一种蓝宝石抛光用氧化铝抛光液及其制备方法 |
Also Published As
Publication number | Publication date |
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CN115322685A (zh) | 2022-11-11 |
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PB01 | Publication | ||
PB01 | Publication | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Peng Shiyue Inventor before: Peng Shiyue Inventor before: Zhang Zefang |
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SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Country or region after: China Address after: Room 205, No. 15 Chuncheng Road, Quzhou City, Zhejiang Province, 324000 Applicant after: Zhejiang Bolai Narun Electronic Materials Co.,Ltd. Applicant after: SHANGHAI YINGZHI ABRASIVE MATERIALS CO.,LTD. Applicant after: Huzhou Brinarun Electronic Materials Co.,Ltd. Address before: Room 307, building B, science and technology entrepreneurship Park, Zhangjiagang Free Trade Zone, Suzhou, Jiangsu 215600 Applicant before: Suzhou bonanrun Electronic Materials Co.,Ltd. Country or region before: China Applicant before: SHANGHAI YINGZHI ABRASIVE MATERIALS CO.,LTD. Applicant before: Huzhou Brinarun Electronic Materials Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20240205 Address after: Room 205, No. 15 Chuncheng Road, Quzhou City, Zhejiang Province, 324000 Applicant after: Zhejiang Bolai Narun Electronic Materials Co.,Ltd. Country or region after: China Applicant after: SHANGHAI YINGZHI ABRASIVE MATERIALS CO.,LTD. Address before: Room 205, No. 15 Chuncheng Road, Quzhou City, Zhejiang Province, 324000 Applicant before: Zhejiang Bolai Narun Electronic Materials Co.,Ltd. Country or region before: China Applicant before: SHANGHAI YINGZHI ABRASIVE MATERIALS CO.,LTD. Applicant before: Huzhou Brinarun Electronic Materials Co.,Ltd. |
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GR01 | Patent grant |