CN115309002A - Parallel exposure machine - Google Patents

Parallel exposure machine Download PDF

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Publication number
CN115309002A
CN115309002A CN202210777762.7A CN202210777762A CN115309002A CN 115309002 A CN115309002 A CN 115309002A CN 202210777762 A CN202210777762 A CN 202210777762A CN 115309002 A CN115309002 A CN 115309002A
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CN
China
Prior art keywords
bottom plate
light source
plate
threaded rod
exposure machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210777762.7A
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Chinese (zh)
Inventor
刘澎波
李铁骑
傅强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hubei Yuanheda Technology Co ltd
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Hubei Yuanheda Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hubei Yuanheda Technology Co ltd filed Critical Hubei Yuanheda Technology Co ltd
Priority to CN202210777762.7A priority Critical patent/CN115309002A/en
Publication of CN115309002A publication Critical patent/CN115309002A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825Mounting of individual elements, e.g. mounts, holders or supports
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

The invention discloses a parallel exposure machine, which comprises a rack, wherein a first bottom plate is detachably arranged at the bottom end of the rack, a power supply is arranged at the top end of the first bottom plate, a second bottom plate is fixed at the left end of the first bottom plate through a fixing assembly, a third bottom plate is detachably arranged in the middle of the vertical part of the rack, a reflector is arranged on the third bottom plate, an angle adjusting device and a fourth bottom plate are sequentially and detachably arranged on the transverse part of the rack from left to right, a fixing support for fixing a light source module is arranged at the top end of the fourth bottom plate, and a fly eye lens module positioned above the reflector is arranged at the bottom end of the light source module. The invention relates to a parallel exposure machine, wherein a UVLED light source module is arranged in a frame and corresponds to a fly-eye lens module, and in the exposure process, the UVLED light source module replaces the traditional mercury lamp light source, so that the power is greatly reduced, and the energy consumption is greatly saved.

Description

Parallel exposure machine
Technical Field
The invention relates to the field of power electronics, in particular to a parallel exposure machine.
Background
The parallel exposure machine light source on the present market mainly has two kinds of short arc xenon mercury lamps and UVLED integrated lamp holder, in order to reach the parallel light purpose, the optical system of parallel exposure machine is mainly by light source (high-pressure spherical mercury lamp), ellipsoid light collector, plane reflecting mirror (9), fly eye lens module (14) and speculum (9) are constituteed, the light that the light source sent is focused by ellipsoid light collector after, arrive speculum (9) position from the light that fly eye lens module (14) jetted out, reflect on bent mirror (4) by speculum (9) collimation at last, carry out parallel whole light through bent mirror (4), set up light and expose the film board on the workstation mesa. The existing light source of the exposure machine also has the problems of infrared rays and film expansion and contraction, and the light source cannot be flatly irradiated on a film plate on a workbench, the inclination angle of a curved mirror (4) cannot be flexibly adjusted, and the irradiation angle of the light source cannot be adjusted according to the field environment, so that subsequent exposure is influenced. Therefore, a parallel exposure machine is proposed to solve the above problems.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a parallel exposure machine.
In order to solve the technical problems, the invention provides the following technical scheme:
the invention relates to a parallel exposure machine, which comprises a rack, a plurality of door plates, a second bottom plate, a curved mirror, a power supply and a light source module, wherein the rack is of an L-shaped structure, the door plates are detachably mounted on the rack, the bottom end of the rack is detachably provided with the first bottom plate, the power supply is arranged at the top end of the first bottom plate, the second bottom plate is fixed at the left end of the first bottom plate through a fixing component, the middle part of the vertical part of the rack is detachably provided with a third bottom plate, one door plate positioned at the left side of the third bottom plate is provided with a light reflecting window, the third bottom plate is provided with a reflecting mirror, an angle adjusting device and a fourth bottom plate for adjusting the inclination angle of the curved mirror are detachably mounted on the horizontal part of the rack from left to right in sequence, the fourth bottom plate is fixedly connected with the third bottom plate through a plurality of support columns, the top end of the fourth bottom plate is provided with a fixing support for fixing the light source module, the curved mirror is arranged between the angle adjusting devices and is in transmission connection with the angle adjusting devices, the curved mirror is arranged below the light source guiding cover detachably mounted on the horizontal part of the rack, the bottom end of the light source module penetrates through the fixing support and is provided with a compound lens module positioned above the light source module.
As a preferred technical scheme of the invention, a plurality of heat dissipation holes are formed in the first bottom plate.
As a preferred technical scheme of the invention, a plurality of notches which are convenient to disassemble are formed in the door plates.
As a preferred technical solution of the present invention, the bottom ends of the first bottom plate and the second bottom plate are respectively provided with a plurality of universal wheels and a supporting device, and the supporting device includes a plurality of groups of supporting assemblies, and the number of the supporting assemblies is the same as that of the universal wheels and corresponds to that of the universal wheels one by one.
As a preferable technical solution of the present invention, the support assembly includes a first threaded rod, a foot pad, a first limit nut, and a first lock nut, the second base plate is provided with a first threaded through hole, an upper end of the first threaded rod passes through the first threaded through hole and is in threaded connection with the first threaded through hole, the first limit nut and the first lock nut are both sleeved on the first threaded rod and are in threaded connection with the first threaded rod, the first lock nut and the first limit nut are respectively located on upper and lower sides of the second base plate, and the foot pad is located at a lower end of the first threaded rod.
As a preferred technical solution of the present invention, the angle adjusting device includes two bearing seats, two bosses, a second threaded rod, a second limit nut, a second lock nut, and an installation plate, the two bearing seats and the bosses are all installed at the upper end of the transverse portion of the frame, the front end and the rear end of the curved mirror are respectively rotatably connected to the corresponding bearing seats, the second threaded rod is hinged to the boss, the installation plate is fixed at the left end of the curved mirror, a second through hole is opened on the installation plate, the upper end of the second threaded rod passes through the second through hole and extends above the second through hole, the second limit nut and the second lock nut are both sleeved on the second threaded rod and are in threaded connection therewith, and the second lock nut and the second limit nut are respectively located at the upper side and the lower side of the installation plate.
As a preferred technical solution of the present invention, the fixing bracket includes two supporting frames and a transverse plate, the two supporting frames are detachably mounted at the upper end of the fourth bottom plate, the transverse plate is disposed between the two supporting frames and detachably connected thereto, and the lower end of the transverse plate is fixedly connected to the light source module.
As a preferred technical scheme of the present invention, the fixing assembly includes a plurality of connecting blocks and a plurality of bolts, the plurality of connecting blocks are equidistantly disposed at an upper end between the first bottom plate and the second bottom plate, the plurality of connecting blocks are each provided with a plurality of third through holes, the first bottom plate and the second bottom plate are provided with thread grooves, the number of which is the same as that of the plurality of third through holes, and the thread grooves are in one-to-one correspondence, and the bolts penetrate through the corresponding third through holes and extend into the thread grooves to be in threaded connection therewith.
Compared with the prior art, the invention has the following beneficial effects:
1. in the invention, the UVLED light source module is arranged in the frame and corresponds to the fly-eye lens module, and the UVLED light source module replaces the traditional mercury lamp light source in the exposure process, thereby being beneficial to greatly reducing the power and saving the energy consumption to a great extent; meanwhile, the UVLED light source module has longer service life and is more environment-friendly, and compared with the traditional mercury lamp light source, the UVLED light source module does not have infrared rays, so that the film expansion and shrinkage are avoided; compared with the traditional mercury lamp, the UVLED light source has no risk of explosion of the mercury lamp and is safer.
2. According to the invention, the parallel exposure machine is conveniently moved through the universal wheel, after the parallel exposure machine is moved to a specified position, the first limit nut and the first locking nut are loosened, the first threaded rod is rotated to move downwards, when the parallel exposure machine is moved to a state that the foot pad is contacted with the ground, the universal wheel is separated from the ground, the first limit nut is rotated to be abutted against the bottom ends of the first bottom plate and the second bottom plate, and then the first locking nut is rotated to be abutted against the top ends of the first bottom plate and the second bottom plate, so that the first threaded rod can be fixed.
3. Loosen second stop nut and second lock nut, because the second threaded rod articulates on the boss, the mounting panel is fixed in the left end of bent mirror, the second through-hole has been seted up on the mounting panel, the upper end of second threaded rod passes the second through-hole and stretches into its top, make the mounting panel can slide from top to bottom on the second threaded rod, reach the purpose of adjusting bent mirror inclination, when debugging suitable angle, rotatory second stop nut makes its conflict in the bottom of mounting panel, rotatory second lock nut makes its conflict in the top of mounting panel, be fixed in the mounting panel on the second threaded rod.
4. The third through holes in the connecting blocks are aligned to the thread grooves in the first bottom plate and the second bottom plate, the bolts penetrate through the corresponding third through holes respectively and stretch into the corresponding thread grooves to rotate, the first bottom plate and the second bottom plate can be fixed together through the connecting blocks, and the second bottom plate is convenient to be butted with an external workbench.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is one of the schematic internal structural views of the present invention;
FIG. 3 is an enlarged view of area A of FIG. 2;
FIG. 4 is a second schematic diagram of the internal structure of the present invention;
FIG. 5 is an enlarged view of the area B of FIG. 4;
FIG. 6 is an enlarged view of area C of FIG. 4;
FIG. 7 is a third schematic view of the internal structure of the present invention;
FIG. 8 is an enlarged view of area D of FIG. 7;
FIG. 9 is a fourth schematic view of the internal structure of the present invention;
in the figure: 1. a frame; 2. a door panel; 3. a second base plate; 4. a curved mirror; 5. a light source module; 6. a first base plate; 7. a power source; 8. a third base plate; 9. a mirror; 10. an angle adjusting device; 101. a bearing seat; 102. a boss; 103. a second threaded rod; 104. a second limit nut; 105. a second lock nut; 106. mounting a plate; 11. a fourth base plate; 12. a fixed bracket; 121. a support frame; 122. a transverse plate; 13. a light source guide cover; 14. a fly-eye lens module; 15. heat dissipation holes; 16. a notch; 17. a universal wheel; 18. a support device; 181. a first threaded rod; 182. a foot pad; 183. a first limit nut; 184. a first lock nut; 19. connecting blocks; 20. and (4) bolts.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it should be understood that they are presented herein only to illustrate and explain the present invention and not to limit the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Fig. 1 and 2 show a parallel exposure machine according to the present invention, which includes a frame 1 and a plurality of door panels 2, a second bottom plate 3, a curved mirror 4, a power supply 7 and a light source module 5, wherein the frame 1 is an L-shaped structure, the door panels 2 are detachably mounted on the frame 1, a first bottom plate 6 is detachably mounted at the bottom end of the frame 1, the power supply 7 is disposed at the top end of the first bottom plate 6, the second bottom plate 3 is fixed at the left end of the first bottom plate 6 through a fixing component, a third bottom plate 8 is detachably mounted at the middle portion of the vertical portion of the frame 1, one door panel 2 located at the left side of the third bottom plate 8 is provided with a reflective window, a reflective mirror 9 is disposed on the third bottom plate 8, an angle adjusting device 10 and a fourth bottom plate 11 for adjusting the inclination angle of the curved mirror 4 are detachably mounted on the horizontal portion of the frame 1 from left to right in sequence, the fourth bottom plate 11 is fixedly connected with the third bottom plate 8 through a plurality of supporting columns, a fixing bracket 12 for fixing the light source module 5 is disposed at the top end of the horizontal portion of the fourth bottom plate 11, the curved mirror 4 is disposed between the angle adjusting device 10 and is connected with a guiding lens module 13 disposed below the light source module, which is disposed below the light source module 5, and extends to the bottom end of the light source module 14.
In the embodiment, a workbench on which a film board is placed is butted with a second bottom plate 3, the area of the film board is just located under a light source guide cover 13, a power supply 7 is started, the power supply 7 supplies power to a light source module 5 (the light source module 5 passes through a UVLED light source module), an ellipsoidal condenser is arranged in the light source module 5, light emitted by the light source reaches the position of a reflector 9 after being focused by the ellipsoidal condenser, finally the light source is collimated and reflected by the reflector 9 and irradiates on a curved mirror 4 through a reflecting window, the inclination angle of the curved mirror 4 is adjusted through an angle adjusting device 10, so that the light source can be parallel to the light source guide cover 13, parallel light is collimated and rectified through the curved mirror 4, and the light irradiates on the workbench surface to expose the film board.
Preferably, the first base plate 6 is provided with a plurality of heat dissipation holes 15, and the heat dissipation holes 15 can better dissipate heat of the power supply 7 in the operating state.
Preferably, a plurality of notches 16 convenient for dismounting are formed in the plurality of door panels 2, and when the door panels 2 are dismounted from the rack 1, the door panels 2 can be more conveniently moved by holding the notches 16 by a worker.
Preferably, as another embodiment of the present invention, on the basis of the embodiment shown in fig. 1 and fig. 2, as shown in fig. 7 and fig. 8, a plurality of universal wheels 17 and supporting devices 18 are respectively disposed at the bottom ends of the first bottom plate 6 and the second bottom plate 3, each supporting device 18 includes a plurality of groups of supporting components, the number of the supporting components is the same as that of the universal wheels 17, and the supporting components correspond to the universal wheels 17 one by one, specifically, each supporting component includes a first threaded rod 181, a foot pad 182, a first limit nut 183 and a first locking nut 184, a first threaded through hole is disposed on the second bottom plate 3, the upper end of the first threaded rod 181 penetrates through the first threaded through hole and is in threaded connection with the first threaded rod 181, the first limit nut 183 and the first locking nut 184 are respectively sleeved on the first threaded rod 181 and are in threaded connection with the first threaded rod, the first locking nut 184 and the first limit nut 183 are respectively located at the upper side and the lower side of the second bottom plate 3, and the foot pad 182 is located at the lower end of the first threaded rod 181.
In this embodiment, as one of the embodiments, the first limit nut 183 and the first lock nut 184 are loosened after the moving of the parallel exposure machine to a predetermined position is facilitated by the universal wheel 17, the first threaded rod 183 is rotated to move downward, when the foot pad 182 contacts the ground, the universal wheel 17 is separated from the ground, the first limit nut 183 is rotated to abut against the bottom ends of the first bottom plate 6 and the second bottom plate 3, and the first lock nut 184 is rotated to abut against the top ends of the first bottom plate 6 and the second bottom plate 3, thereby fixing the first threaded rod 181.
Preferably, as another embodiment of the present invention, on the basis of the embodiment shown in fig. 1 and fig. 2, as shown in fig. 4, fig. 5 and fig. 6, the angle adjusting device 10 includes two bearing seats 101, bosses 102, a second threaded rod 103, a second limit nut 104, a second lock nut 105 and a mounting plate 106, the two bearing seats 101 and the bosses 102 are both mounted at the upper end of the transverse portion of the rack 1, the front end and the rear end of the curved mirror 4 are respectively rotatably connected with the corresponding bearing seats 101, the second threaded rod 103 is hinged on the bosses 102, the mounting plate 106 is fixed at the left end of the curved mirror 4, a second through hole is opened on the mounting plate 106, the upper end of the second threaded rod 103 passes through the second through hole and extends above the second through hole, the second limit nut 104 and the second lock nut 105 are both sleeved on the second threaded rod 103 and are in threaded connection with the second threaded rod 103, and the second lock nut 105 and the second limit nut 104 are respectively located at the upper side and the lower side of the mounting plate 106.
In this embodiment, as one of the implementation manners, the second limit nut 104 and the second lock nut 105 are loosened, because the second threaded rod 103 is hinged on the boss 102, the mounting plate 106 is fixed at the left end of the curved mirror 4, the mounting plate 106 is provided with a second through hole, the upper end of the second threaded rod 103 passes through the second through hole and extends into the upper side of the second through hole, so that the mounting plate 106 can slide up and down on the second threaded rod 103, thereby achieving the purpose of adjusting the inclination angle of the curved mirror 4, when a proper angle is debugged, the second limit nut 104 is rotated to abut against the bottom end of the mounting plate 106, the second lock nut 105 is rotated to abut against the top end of the mounting plate 106, and the mounting plate 106 is fixed on the second threaded rod 103.
Preferably, as another embodiment of the present invention, on the basis of the embodiment shown in fig. 1 and fig. 2, as shown in fig. 9, the fixing bracket 12 includes two supporting frames 121 and a horizontal plate 122, the two supporting frames 121 are detachably mounted at the upper end of the fourth bottom plate 11, the horizontal plate 122 is disposed between the two supporting frames 121 and detachably connected thereto, and the lower end of the horizontal plate 122 is fixedly connected to the light source module 5.
In this embodiment, as one of the embodiments, the two supporting frames 12 serve to support the horizontal plate 122, and the horizontal plate 122 serves to fix the light source module 5.
Preferably, as another embodiment of the present invention, on the basis of the embodiment shown in fig. 1 and fig. 2, as shown in fig. 3, the fixing assembly includes a plurality of connecting blocks 19 and a plurality of bolts 20, the plurality of connecting blocks 19 are equidistantly arranged at the upper end between the first bottom plate 6 and the second bottom plate 3, the plurality of connecting blocks 19 are respectively provided with a plurality of third through holes, the first bottom plate 6 and the second bottom plate 3 are provided with thread grooves which are the same in number and are in one-to-one correspondence with the plurality of third through holes, and the bolts 20 penetrate through the corresponding third through holes and extend into the thread grooves to be in threaded connection with the thread grooves.
In this embodiment, as one of the implementation manners, the third through holes on the connecting block 19 are aligned with the respective thread grooves on the first bottom plate 6 and the second bottom plate 3, the bolts 20 respectively pass through the corresponding third through holes and extend into the corresponding thread grooves for rotation, and the first bottom plate 6 and the second bottom plate 3 can be fixed together through the connecting block 19, so that the second bottom plate 3 can be conveniently butted with an external workbench.
The working principle of the invention is as follows:
the workbench with the film plate is in butt joint with the second bottom plate 3, the area of the film plate is just located under the light source guide cover 13, the power supply 7 is started, the power supply 7 supplies power to the light source module 5, an ellipsoidal condenser is arranged in the light source module 5, light emitted by the light source reaches the position of the reflecting mirror 9 after being focused by the ellipsoidal condenser, the light emitted by the compound eye lens module 14 reaches the position of the reflecting mirror 9, finally the light source is reflected in a collimating manner by the reflecting mirror 9 and irradiates the curved mirror 4 through a reflecting window, the second limiting nut 104 and the second locking nut 105 are loosened, as the second threaded rod 103 is hinged on the boss 102, the mounting plate 106 is fixed at the left end of the curved mirror 4, a second through hole is formed in the mounting plate 106, the upper end of the second threaded rod 103 penetrates through the second through hole and extends into the upper side of the second through hole, the mounting plate 106 can slide up and down on the second threaded rod 103, the purpose of adjusting the inclination angle of the curved mirror 4 is achieved, when the proper angle is adjusted, the second limiting nut 104 is abutted on the bottom end of the mounting plate 106 to enable the light source to be parallel to irradiate the light source guide cover 13 in parallel with the light source guide cover.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described above, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. A parallel exposure machine is characterized by comprising a rack (1), a plurality of door plates (2), a second bottom plate (3), a curved mirror (4), a power supply (7) and a light source module (5), wherein the rack (1) is of an L-shaped structure, the door plates (2) are detachably mounted on the rack (1), a first bottom plate (6) is detachably mounted at the bottom end of the rack (1), the power supply (7) is arranged at the top end of the first bottom plate (6), the second bottom plate (3) is fixed at the left end of the first bottom plate (6) through a fixing component, a third bottom plate (8) is detachably mounted in the middle of the vertical part of the rack (1), one of the third bottom plate and the third bottom plate is positioned on the door plate (2) on the left side of the third bottom plate (8) and is provided with a light reflecting window, a reflecting mirror (9) is arranged on the third bottom plate (8), an angle adjusting device (10) and a fourth bottom plate (11) for adjusting the inclination angle of the curved mirror (4) are sequentially detachably mounted on the horizontal part of the rack (1) from left to the right, a fixed support column (11) is connected with a fixed support (12) through a fixed support, and a plurality of fixed support columns (5) are arranged between the fourth bottom plate (11), the below of curved mirror (4) is equipped with demountable installation in light source guide cover (13) on frame (1) horizontal part, light source module (5) are located the bottom of fixed bolster (12) is run through fourth bottom plate (11) extend its below, the bottom of light source module (5) is equipped with and is located compound eye lens module (14) of speculum (9) top.
2. The parallel exposure machine according to claim 1, wherein the first base plate (6) has a plurality of heat dissipation holes (15).
3. A parallelizer exposure machine according to claim 1, characterized in that a plurality of the door panels (2) are provided with a plurality of notches (16) for easy removal thereof.
4. A parallelizer exposure machine according to claim 1, characterized in that the bottom ends of the first base plate (6) and the second base plate (3) are each provided with a plurality of universal wheels (17) and support means (18), and the support means (18) comprise a plurality of sets of support assemblies, which are equal in number and correspond one-to-one to the universal wheels (17).
5. The parallel exposure machine according to claim 4, wherein the support assembly comprises a first threaded rod (181), a foot pad (182), a first limit nut (183) and a first lock nut (184), the second base plate (3) is provided with a first threaded through hole, the upper end of the first threaded rod (181) penetrates through the first threaded through hole and is in threaded connection with the first threaded through hole, the first limit nut (183) and the first lock nut (184) are sleeved on the first threaded rod (181) and are in threaded connection with the first threaded rod, the first lock nut (184) and the first limit nut (183) are respectively located on the upper side and the lower side of the second base plate (3), and the foot pad (182) is located at the lower end of the first threaded rod (181).
6. The parallel exposure machine according to claim 1, wherein the angle adjusting device (10) comprises two bearing seats (101), a boss (102), a second threaded rod (103), a second limit nut (104), a second lock nut (105) and a mounting plate (106), the two bearing seats (101) and the boss (102) are mounted at the upper end of the transverse portion of the frame (1), the front end and the rear end of the curved mirror (4) are rotatably connected with the corresponding bearing seats (101), the second threaded rod (103) is hinged on the boss (102), the mounting plate (106) is fixed at the left end of the curved mirror (4), a second through hole is formed in the mounting plate (106), the upper end of the second threaded rod (103) passes through the second through hole and extends above the second through hole, the second limit nut (104) and the second lock nut (105) are sleeved on and threadedly connected with the second threaded rod (103), and the second lock nut (105) and the second lock nut (104) are located at the upper side and the lower side of the mounting plate (106) respectively.
7. The parallel exposure machine according to claim 1, wherein the fixing bracket (12) comprises two support frames (121) and a transverse plate (122), the two support frames (121) are detachably mounted on the upper end of the fourth bottom plate (11), the transverse plate (122) is arranged between the two support frames (121) and detachably connected with the two support frames, and the lower end of the transverse plate (122) is fixedly connected with the light source module (5).
8. The parallel exposure machine according to claim 1, wherein the fixing assembly comprises a plurality of connecting blocks (19) and a plurality of bolts (20), the plurality of connecting blocks (19) are equidistantly arranged at the upper end between the first bottom plate (6) and the second bottom plate (3), a plurality of third through holes are formed in the plurality of connecting blocks (19), thread grooves which are the same in number as the plurality of third through holes and correspond to one another are formed in the first bottom plate (6) and the second bottom plate (3), and the bolts (20) penetrate through the corresponding third through holes and extend into the thread grooves to be in threaded connection with the thread grooves.
CN202210777762.7A 2022-07-04 2022-07-04 Parallel exposure machine Pending CN115309002A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210777762.7A CN115309002A (en) 2022-07-04 2022-07-04 Parallel exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210777762.7A CN115309002A (en) 2022-07-04 2022-07-04 Parallel exposure machine

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117666298A (en) * 2024-02-01 2024-03-08 河南百合特种光学研究院有限公司 Exposure machine light source with multiple LED spherical surface spliced

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117666298A (en) * 2024-02-01 2024-03-08 河南百合特种光学研究院有限公司 Exposure machine light source with multiple LED spherical surface spliced
CN117666298B (en) * 2024-02-01 2024-05-17 河南百合特种光学研究院有限公司 Exposure machine light source with multiple LED spherical surface spliced

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