CN115308842B - Flexible micro-nano optical fiber coupler, micro-strain sensing application system and preparation method - Google Patents

Flexible micro-nano optical fiber coupler, micro-strain sensing application system and preparation method Download PDF

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Publication number
CN115308842B
CN115308842B CN202210898553.8A CN202210898553A CN115308842B CN 115308842 B CN115308842 B CN 115308842B CN 202210898553 A CN202210898553 A CN 202210898553A CN 115308842 B CN115308842 B CN 115308842B
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optical fiber
micro
fiber coupler
nano
flexible
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CN115308842A (en
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甘久林
王鑫
周鸿猷
陈美华
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South China University of Technology SCUT
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South China University of Technology SCUT
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/262Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a flexible micro-nano optical fiber coupler, a micro-strain sensing application system and a preparation method, wherein the flexible micro-nano optical fiber coupler comprises the following components: the method comprises the steps of carrying out fusion tapering on the middle part of a first quartz optical fiber to obtain a first taper region; the middle part of the second quartz optical fiber is fused and tapered to obtain a second taper area; the optical fiber is used as a coupling region; and the packaging unit is a flexible transparent organic elastomer film and is used for packaging part of the first quartz optical fiber, the first cone region, the coupling region, the second cone region and part of the second quartz optical fiber. The invention monitors strain based on the spectral effect of the spectral ratio, has good external interference resistance, can monitor the change of period and loss, ensures sensitivity and expands the sensing range. The invention can be widely applied to the technical field of optical fiber sensors.

Description

Flexible micro-nano optical fiber coupler, micro-strain sensing application system and preparation method
Technical Field
The invention relates to the technical field of optical fiber sensors, in particular to a flexible micro-nano optical fiber coupler, a micro-strain sensing application system and a preparation method.
Background
The flexible device has excellent foldable and wearable performances and has important application in the fields of physiological monitoring, soft robots, bioelectronics, flexible displays, intelligent clothing and the like. The flexible strain sensor can measure environmental strain and mechanical deformation in the bending motion process in situ in real time, and becomes an indispensable flexible device in the fields of human health monitoring and the like. In order to track extremely weak strain signals in cardiovascular diseases, blood flow, skin tissue healing and acoustic vibrations, it has become urgent to improve the sensitivity and detection limit of flexible strain sensors. These advanced sensors will more easily capture details of changes in human physiological indicators and provide more effective data support for drug development, clinical diagnosis, and disease treatment.
Electronic flexible sensors achieve excellent performance in identifying extremely weak strain sensing signals by measuring changes in capacitance, resistance, piezoelectricity and triboelectricity. However, the problems of parasitic effects, insufficient insulation, electromagnetic interference, and the like limit the practical application of the electronic sensor to a certain extent.
The optical sensor, especially the optical fiber sensor, has the remarkable advantages of high sensitivity, high precision, high response speed, inherent electrical safety, strong electromagnetic interference resistance and the like, and provides a very promising substitute for the electronic sensor. Most optical fiber sensors monitor strain changes by monitoring power changes, wherein the strain monitoring is realized by using the principle of loss, and the sensitivity of the sensor is mainly bending loss caused by structural distortion caused by external stress or increased loss caused by doping light-absorbing substances in the optical fiber. Such a sensor has limited sensitivity and compactness compared to conventional electronic sensors. Another sensor based on interference effect, which measures strain by interferometry in conventional quartz fiber, has sensitivity detection limit of sub-p epsilon level (10 –11 In%) which provides great potential for improving the sensitivity and detection limit of optical fiber strain sensors. However, the unpackaged sensor is easy to pollute the external environment and influence the service life, is easy to be interfered by external micro vibration during sensing, leads to inaccurate detection results, and has high sensitivity and limits the detection range.
Disclosure of Invention
In order to solve at least one of the technical problems existing in the prior art to a certain extent, the invention aims to provide a flexible micro-nano optical fiber coupler, a micro-strain sensing application system and a preparation method.
The technical scheme adopted by the invention is as follows:
a flexible micro-nano fiber coupler comprising:
the method comprises the steps of carrying out fusion tapering on the middle part of a first quartz optical fiber to obtain a first taper region;
the middle part of the second quartz optical fiber is fused and tapered to obtain a second taper area;
the optical fiber is used as a coupling region;
the packaging unit is a flexible transparent organic elastomer film and is used for packaging part of the first quartz optical fiber, the first cone region, the coupling region, the second cone region and part of the second quartz optical fiber;
the first end of the first quartz optical fiber is used as an input end of the flexible micro-nano optical fiber coupler; and two ends of the second quartz optical fiber are used as output ends of the flexible micro-nano optical fiber coupler.
Further, the optical fiber on the coupling region has a diameter of 0.5-25 μm and a length of 0.1-20mm.
Further, the organic elastomer includes polydimethylsiloxane, hydrogel, polyurethane, optical potting adhesive, or a poly eutectic solvent.
Further, the thickness of the encapsulation unit is 20-1000 μm.
The invention adopts another technical scheme that:
a method for preparing a flexible micro-nano fiber coupler as described above, comprising the steps of:
the method comprises the following steps:
cleaning two quartz optical fibers with coating layers removed by dust-free paper, and fixing the quartz optical fibers on a drawing cone;
carrying out fusion drawing on the two quartz optical fibers by adopting a fusion tapering method so as to connect the two quartz optical fibers;
and packaging the connecting part of the two optical fibers by adopting a flexible transparent organic elastomer film.
Further, the curing temperature of the organic elastomer film at the time of sealing is 20-100 ℃.
The invention adopts another technical scheme that:
a microstrain sensing application system, comprising:
a flexible micro-nano fiber coupler as described above;
the narrow-band light source is connected with the input end of the flexible micro-nano optical fiber coupler;
the input ends of the two photoelectric detectors are correspondingly connected with the two output ends of the flexible micro-nano optical fiber coupler;
the output ends of the two photoelectric detectors are connected with the multichannel data acquisition card;
and the upper computer is connected with the multichannel data acquisition card and is used for demodulating the received signals.
Further, the micro-strain sensing application system comprises a single-point detection system and an array detection system;
wherein, the single-point detection system corresponds to a flexible micro-nano optical fiber coupler and uses 2 photoelectric detectors; the array detection system corresponds to a plurality of flexible micro-nano optical fiber couplers, and the optical switch time division multiplexing technology and the photoelectric detector are combined to realize the positioning and monitoring of different points.
Further, the upper computer performs signal demodulation by:
the method comprises the steps of obtaining the light splitting ratio under different strain conditions by utilizing the light splitting effect of a coupling region of the flexible micro-nano optical fiber coupler, and carrying out normalization processing on the light splitting ratio to obtain model data;
when the micro-strain sensing application system is applied, a strain detection result is output according to the model data and the obtained split ratio.
Further, the upper computer performs signal demodulation, including:
meanwhile, the change of strain and loss is detected, the change of optical power is caused when the flexible micro-nano optical fiber coupler is stretched, the ratio of the sum of the optical power of two output ports of the flexible micro-nano optical fiber coupler to the input optical power is the value of the loss, and the position of the period is searched according to the value of the loss.
The beneficial effects of the invention are as follows: the invention monitors strain based on the spectral effect of the spectral ratio, has good external interference resistance, can monitor the change of period and loss, ensures sensitivity and expands the sensing range.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following description is made with reference to the accompanying drawings of the embodiments of the present invention or the related technical solutions in the prior art, and it should be understood that the drawings in the following description are only for convenience and clarity of describing some embodiments in the technical solutions of the present invention, and other drawings may be obtained according to these drawings without the need of inventive labor for those skilled in the art.
FIG. 1 is a schematic diagram of a micro-strain sensing application system according to an embodiment of the present invention;
FIG. 2 is a graph of strain versus coupling ratio variation for a flexible micro-nano fiber coupler in an embodiment of the invention;
FIG. 3 is a schematic diagram of the micro-vibration of the micro-nano fiber coupler driven by sound generated by the acoustic vibration in an embodiment of the present invention;
FIG. 4 is a graph showing a wrist pulse test in an embodiment of the present invention;
FIG. 5 is a graph of a throat sound test plot and a frequency response plot in an embodiment of the invention;
reference numerals of fig. 1: 1. a narrow band light source; 2. quartz optical fiber; 3. a cone region; 4. a coupling region; 5. a photodetector; 6. a multichannel data acquisition card; 7. an upper computer; 8. and packaging the unit.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention. The step numbers in the following embodiments are set for convenience of illustration only, and the order between the steps is not limited in any way, and the execution order of the steps in the embodiments may be adaptively adjusted according to the understanding of those skilled in the art.
In the description of the present invention, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present invention and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, a number means one or more, a number means two or more, and greater than, less than, exceeding, etc. are understood to not include the present number, and above, below, within, etc. are understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present invention can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
As shown in fig. 1, the present embodiment provides a flexible micro-nano optical fiber coupler, and the preparation method of the flexible micro-nano optical fiber coupler includes preparation and packaging of the micro-nano optical fiber coupler. The preparation process of the micro-nano optical fiber coupler comprises the following steps: firstly, two quartz optical fibers with coating layers stripped are cleaned by dust-free paper, then are fixed on a cone pulling table, and are manufactured through fusion cone pulling, the micro-nano optical fiber coupler is composed of a coupling area 4, a cone area 3 and quartz optical fibers 2, the quartz optical fibers 2 are connected with the cone area 3, and the thinnest part between the cone areas 3 at two ends is the coupling area 4. And (3) packaging: the flexible transparent organic elastomer film encapsulates the micro-nano optical fiber coupler, and the flexible transparent organic elastomer film is prepared by heating a precursor thereof.
As shown in fig. 1, the present embodiment provides a micro-strain sensing application system, which includes a sensing device and a signal demodulation portion. The sensing device comprises a flexible micro-nano optical fiber coupler, a narrow-band light source 1, two photoelectric detectors 5 and a multi-channel data acquisition card 6; the signal demodulation section includes an upper computer 7. The flexible micro-nano optical fiber coupler comprises a coupling area 4, a cone area 3 and a quartz optical fiber 2. One of the input ports of the flexible micro-nano optical fiber coupler is connected with the narrow-band light source 1, the other two output ports are respectively connected with the two photoelectric detectors 5, the two photoelectric detectors 5 are connected with a multi-channel data acquisition card 6, the multi-channel data acquisition card 6 is connected with the upper computer 7 through a USB communication interface, and signals are demodulated by a signal processing unit in the upper computer 7.
The micro-strain sensing application system described above is explained in detail with reference to specific embodiments.
A flexible micro-nano optical fiber coupler with the radius of a coupling area of 1 mu m and the length of 18mm is fixed on a high-precision displacement table, one end of the flexible micro-nano optical fiber coupler is connected with a narrow-band light source 1, the other two output ports of the flexible micro-nano optical fiber coupler are connected with two photoelectric detectors 5, the photoelectric detectors 5 are connected with a multichannel data acquisition card 6, the multichannel data acquisition card 6 is connected with an upper computer 7 through a USB communication interface, and a signal processing unit 7 in the upper computer 7 is utilized to demodulate signals so as to achieve the effect of strain monitoring. The flexible micro-nano optical fiber coupler is stretched by a stepping motor, as shown in fig. 2, and fig. 2 is a graph of the relation between the strain of a sensing unit of the stretched flexible micro-nano optical fiber coupler and the change of the coupling ratio.
The connection mode is the same as that described above, the flexible micro-nano optical fiber coupler with the radius of the coupling area being 1 μm and the length being 18mm is placed on the high-precision displacement table and is fixed, one sound is placed near the sensing unit of the flexible micro-nano optical fiber coupler, the sound emitted by the sound vibration drives the micro-vibration of the micro-nano optical fiber coupler, so that the sound plays single-frequency signals from 20Hz to 20kHz, and the flexible micro-nano optical fiber coupler can detect the change of different frequencies, as shown in fig. 3.
The flexible micro-nano optical fiber coupler sensing unit with the radius of the coupling area being 1 mu m and the length being 18mm is attached to different parts of a human body or integrated in a wearable device, and the specific connection method is the same as that described above. The flexible micro-nano optical fiber coupler sensing unit is attached to the wrist part, the pulse beat of the wrist is tested, and the obtained relation graph is shown in fig. 4. The sensor has good vibration response to pulse, and can clearly measure the pulse of the wrist. Meanwhile, the flexible micro-nano optical fiber coupler sensing unit is attached to the throat, sound drives the vocal cords to vibrate, words of S, C, U and T are respectively spoken, and the change of the spectroscopic ratio can be clearly seen, as shown in fig. 5.
In summary, compared with the prior art, the embodiment has the following advantages and beneficial effects:
(1) The high sensitivity is realized by utilizing the change of the light splitting ratio to monitor the light power, the detection limit is very low, and the interference of the external environment is easily eliminated.
(2) Meanwhile, the change of the period and the loss is monitored, and the loss is used for positioning the site beam splitting ratio on the period, so that the high sensitivity is ensured, and the sensing range is enlarged.
(3) The micro-nano optical fiber coupler is packaged by the flexible transparent organic elastomer, so that the stability of the micro-nano optical fiber coupler is improved, and meanwhile, the micro-nano optical fiber coupler is prevented from being interfered by dust, impurities and the like.
(4) The sensor prepared by the invention has stable change of the spectroscopic ratio after 10000 times of repeated stretching experiments, which indicates that the sensor can be used for a long time.
In the foregoing description of the present specification, reference has been made to the terms "one embodiment/example", "another embodiment/example", "certain embodiments/examples", and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the invention, the scope of which is defined by the claims and their equivalents.
While the preferred embodiment of the present invention has been described in detail, the present invention is not limited to the above embodiments, and various equivalent modifications and substitutions can be made by those skilled in the art without departing from the spirit of the present invention, and these equivalent modifications and substitutions are intended to be included in the scope of the present invention as defined in the appended claims.

Claims (3)

1. A microstrain sensing application system, comprising:
a flexible micro-nano fiber coupler;
the narrow-band light source is connected with the input end of the flexible micro-nano optical fiber coupler;
the input ends of the two photoelectric detectors are correspondingly connected with the two output ends of the flexible micro-nano optical fiber coupler;
the output ends of the two photoelectric detectors are connected with the multichannel data acquisition card;
the upper computer is connected with the multichannel data acquisition card and is used for demodulating the received signals;
the upper computer demodulates signals in the following way:
the method comprises the steps of obtaining the light splitting ratio under different strain conditions by utilizing the light splitting effect of a coupling region of the flexible micro-nano optical fiber coupler, and carrying out normalization processing on the light splitting ratio to obtain model data;
when the micro-strain sensing application system is applied, a strain detection result is output according to the model data and the obtained split ratio;
wherein, the flexible micro-nano optical fiber coupler includes:
the method comprises the steps of carrying out fusion tapering on the middle part of a first quartz optical fiber to obtain a first taper region;
the middle part of the second quartz optical fiber is fused and tapered to obtain a second taper area;
the optical fiber is used as a coupling region;
the packaging unit is a flexible transparent organic elastomer film and is used for packaging part of the first quartz optical fiber, the first cone region, the coupling region, the second cone region and part of the second quartz optical fiber;
the first end of the first quartz optical fiber is used as an input end of the flexible micro-nano optical fiber coupler; and two ends of the second quartz optical fiber are used as output ends of the flexible micro-nano optical fiber coupler.
2. The micro-strain sensing application system of claim 1, wherein the micro-strain sensing application system comprises a single point detection system and an array detection system;
wherein, the single-point detection system corresponds to a flexible micro-nano optical fiber coupler and uses 2 photoelectric detectors; the array detection system corresponds to a plurality of flexible micro-nano optical fiber couplers, and the optical switch time division multiplexing technology and the photoelectric detector are combined to realize the positioning and monitoring of different points.
3. The micro-strain sensing application system of claim 1, wherein the host computer performs signal demodulation, comprising:
meanwhile, the change of strain and loss is detected, the change of optical power is caused when the flexible micro-nano optical fiber coupler is stretched, the ratio of the sum of the optical power of two output ports of the flexible micro-nano optical fiber coupler to the input optical power is the value of the loss, and the position of the period is searched according to the value of the loss.
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Publication number Priority date Publication date Assignee Title
CN116539198A (en) * 2023-04-07 2023-08-04 江苏香地化学有限公司 High-sensitivity pressure testing device based on optical fiber sensing transparent effect and applied to uridine production and control method thereof

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5410626A (en) * 1992-06-25 1995-04-25 Kyocera Corporation Optical coupler having a tapered fused region
JP2002156544A (en) * 2000-11-21 2002-05-31 Moritex Corp Polarization coupling/branching coupler
JP2003262756A (en) * 2002-03-07 2003-09-19 Ykk Corp Method for manufacturing welding type optical fiber coupler
JP2004347797A (en) * 2003-05-21 2004-12-09 Fujikura Ltd Method for removing optical fiber intermediate coating, and method and apparatus for manufacturing optical fiber coupler
CN103913802A (en) * 2014-02-27 2014-07-09 北京航天时代光电科技有限公司 Manufacturing method of multimode optical fiber coupler based on single mode light source
CN106019478A (en) * 2016-05-12 2016-10-12 西安交通大学 High-sensitivity pyrometric cone coupling micro-nano optical fiber ultrasonic detection system and coupler manufacturing method thereof
CN106483603A (en) * 2016-11-23 2017-03-08 华南理工大学 A kind of tunable orbital angular momentum fiber coupler and preparation method thereof
CN107014411A (en) * 2017-04-05 2017-08-04 浙江大学 A kind of flexible micro-nano fiber angle sensor chip and sensor and preparation method
CN109029805A (en) * 2018-07-02 2018-12-18 上海交通大学 Pressure sensor based on flexible polymer waveguides
CN110207736A (en) * 2019-07-08 2019-09-06 南京邮电大学 Torsion sensor and preparation method based on asymmetric micro-nano fiber coupler
CN110411490A (en) * 2019-07-31 2019-11-05 华中科技大学 A kind of wearable human action sensor of optical-fiber type
CN110501091A (en) * 2019-08-12 2019-11-26 北京航空航天大学 A kind of temperature sensor based on graphene film modification biconial micro-nano fiber coupler
CN111044088A (en) * 2019-12-12 2020-04-21 天津理工大学 Humidity and stress double-parameter micro optical fiber sensor based on carbon nano tube compound
CN210893405U (en) * 2019-08-19 2020-06-30 南京邮电大学 Vibration sensor and testing device based on asymmetric micro-nano optical fiber coupler
CN111537471A (en) * 2020-05-13 2020-08-14 苏州凯文堡尼光电科技有限公司 Ammonia gas sensor and preparation method and use method thereof
CN113137927A (en) * 2021-05-11 2021-07-20 浙江师范大学 Displacement sensor based on optical fiber coupling and manufacturing method thereof
CN113503917A (en) * 2021-07-05 2021-10-15 之江实验室 Flexible temperature and pressure sensor based on micro-nano optical fiber
CN217932165U (en) * 2022-07-28 2022-11-29 华南理工大学 Flexible micro-nano optical fiber coupler and micro-strain sensing application system

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5410626A (en) * 1992-06-25 1995-04-25 Kyocera Corporation Optical coupler having a tapered fused region
JP2002156544A (en) * 2000-11-21 2002-05-31 Moritex Corp Polarization coupling/branching coupler
JP2003262756A (en) * 2002-03-07 2003-09-19 Ykk Corp Method for manufacturing welding type optical fiber coupler
JP2004347797A (en) * 2003-05-21 2004-12-09 Fujikura Ltd Method for removing optical fiber intermediate coating, and method and apparatus for manufacturing optical fiber coupler
CN103913802A (en) * 2014-02-27 2014-07-09 北京航天时代光电科技有限公司 Manufacturing method of multimode optical fiber coupler based on single mode light source
CN106019478A (en) * 2016-05-12 2016-10-12 西安交通大学 High-sensitivity pyrometric cone coupling micro-nano optical fiber ultrasonic detection system and coupler manufacturing method thereof
CN106483603A (en) * 2016-11-23 2017-03-08 华南理工大学 A kind of tunable orbital angular momentum fiber coupler and preparation method thereof
CN107014411A (en) * 2017-04-05 2017-08-04 浙江大学 A kind of flexible micro-nano fiber angle sensor chip and sensor and preparation method
CN109029805A (en) * 2018-07-02 2018-12-18 上海交通大学 Pressure sensor based on flexible polymer waveguides
CN110207736A (en) * 2019-07-08 2019-09-06 南京邮电大学 Torsion sensor and preparation method based on asymmetric micro-nano fiber coupler
CN110411490A (en) * 2019-07-31 2019-11-05 华中科技大学 A kind of wearable human action sensor of optical-fiber type
CN110501091A (en) * 2019-08-12 2019-11-26 北京航空航天大学 A kind of temperature sensor based on graphene film modification biconial micro-nano fiber coupler
CN210893405U (en) * 2019-08-19 2020-06-30 南京邮电大学 Vibration sensor and testing device based on asymmetric micro-nano optical fiber coupler
CN111044088A (en) * 2019-12-12 2020-04-21 天津理工大学 Humidity and stress double-parameter micro optical fiber sensor based on carbon nano tube compound
CN111537471A (en) * 2020-05-13 2020-08-14 苏州凯文堡尼光电科技有限公司 Ammonia gas sensor and preparation method and use method thereof
CN113137927A (en) * 2021-05-11 2021-07-20 浙江师范大学 Displacement sensor based on optical fiber coupling and manufacturing method thereof
CN113503917A (en) * 2021-07-05 2021-10-15 之江实验室 Flexible temperature and pressure sensor based on micro-nano optical fiber
CN217932165U (en) * 2022-07-28 2022-11-29 华南理工大学 Flexible micro-nano optical fiber coupler and micro-strain sensing application system

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