CN115307751A - Temperature monitoring device and method for mocvd heater - Google Patents

Temperature monitoring device and method for mocvd heater Download PDF

Info

Publication number
CN115307751A
CN115307751A CN202211068034.5A CN202211068034A CN115307751A CN 115307751 A CN115307751 A CN 115307751A CN 202211068034 A CN202211068034 A CN 202211068034A CN 115307751 A CN115307751 A CN 115307751A
Authority
CN
China
Prior art keywords
fixedly connected
frame
motor
functional
monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202211068034.5A
Other languages
Chinese (zh)
Other versions
CN115307751B (en
Inventor
黎静
田青林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Shiwei Semiconductor Technology Co ltd
Original Assignee
Jiangsu Shiwei Semiconductor Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Shiwei Semiconductor Technology Co ltd filed Critical Jiangsu Shiwei Semiconductor Technology Co ltd
Priority to CN202211068034.5A priority Critical patent/CN115307751B/en
Publication of CN115307751A publication Critical patent/CN115307751A/en
Application granted granted Critical
Publication of CN115307751B publication Critical patent/CN115307751B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08Protective devices, e.g. casings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02Means for indicating or recording specially adapted for thermometers
    • G01K1/028Means for indicating or recording specially adapted for thermometers arrangements for numerical indication
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/14Supports; Fastening devices; Arrangements for mounting thermometers in particular locations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Control Of Resistance Heating (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

The invention discloses a mocvd heater temperature monitoring device and a mocvd heater temperature monitoring method, which relate to the technical field of heater monitoring, and the technical scheme comprises the following key points: the functional rack comprises a functional rack and a bottom groove, wherein the bottom groove is formed in the bottom of the functional rack; the first moving plate is arranged at the bottom of the functional frame, and one side of the first moving plate is fixedly connected with a monitoring sleeve; and the second moving plate is arranged at the bottom of the functional frame. The utility model provides a mocvd heater temperature monitoring device, the effect is, the motor drive gear that passes through the setting rotates, make gear engagement's first drive tooth and second drive tooth simultaneously to relative one side synchronous motion, thereby make the monitoring sleeve on the first movable plate, and the monitoring pole on the second movable plate, respectively to relative one side synchronous motion, make the monitoring sleeve cover the heater on the monitoring pole, thereby monitor the temperature of heater through the monitor, so reduced the risk that the operator is scalded by the higher heater of temperature, and the degree of accuracy of temperature monitoring has been promoted.

Description

Temperature monitoring device and method for mocvd heater
Technical Field
The invention relates to the technical field of heater monitoring, in particular to a mocvd heater temperature monitoring device and method.
Background
The electric heater is an electric appliance which utilizes electric energy to achieve a heating effect. The intelligent heating device has the advantages of small volume, high heating power, wide application, intelligent control mode, high temperature control precision and capability of being networked with a computer. Wide application range, long service life and high reliability. The core of the heater principle is energy conversion, most widely, the conversion of electrical energy into thermal energy.
In order to ensure that the heater can be normally used in life, the heater is usually subjected to temperature monitoring so as to judge the performance of the heater.
At present, in the current relevant technical scheme, when carrying out temperature monitoring to the heater, because the heater is too high temperature when using to the risk that operating personnel is scalded by the high temperature heater can appear, and current heater is when temperature monitoring, and the heater exposes outside, and the deviation of data can appear when monitoring from this, thereby influences the accuracy of monitoring.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a mocvd heater temperature monitoring device, which reduces the risk that an operator is scalded by a heater with higher temperature and improves the accuracy of temperature monitoring.
In order to achieve the above object, the present invention provides the following technical solutions, including:
a functional rack;
the bottom groove is formed at the bottom of the functional frame;
the first moving plate is arranged at the bottom of the functional frame, and one side of the first moving plate is fixedly connected with a monitoring sleeve;
the second movable plate is arranged at the bottom of the functional frame, one side of the second movable plate is fixedly connected with a monitoring rod, and the monitoring rod is arranged on the opposite surface of the first movable plate;
the transverse plates are fixedly connected to the first moving plate and the second moving plate respectively, the transverse plates are arranged at the bottom of the functional frame at intervals, connecting blocks are fixedly connected to the transverse plates, moving blocks are fixedly connected to the connecting blocks, the connecting blocks are used for connecting the moving blocks and the transverse plates, sliding strips are fixedly connected to the moving blocks, and the sliding strips are connected to the inner portions of the bottom grooves in a sliding mode;
the first driving gear is arranged inside the function frame, and the first driving gear and the function frame are arranged on the same horizontal plane;
the second driving teeth are arranged inside the function frame, the second driving teeth and the function frame are arranged on the same horizontal plane, one sides of the first driving teeth and the second driving teeth, which are opposite to each other, are fixedly connected with vertical plates for connection respectively, and the vertical plates are fixedly connected with the transverse plates;
the gear is arranged inside the functional frame and is meshed with the first driving teeth and the second driving teeth;
the motor is arranged on the functional frame, an output shaft of the motor is fixedly connected with the gear, and the motor is used for driving the gear to rotate positively and negatively;
the top plate is fixedly connected to the functional frame and used for supporting and fixing the motor;
and the monitor is fixedly connected to the left side of the first moving plate and is used for monitoring the temperature of the heater.
Preferably, the outer fixed surface of motor is connected with the frame that is used for promoting motor stability, the bottom and the roof fixed connection of frame
Preferably, the bottom of the functional frame is provided with a telescopic part for driving the first moving plate and the second moving plate to move, and two ends of the telescopic part are fixedly connected with the moving block
Preferably, the inside opposite side of the functional rack is provided with an inner groove, one side of the first moving tooth and one side of the second moving tooth are fixedly connected with a sliding block respectively, and the sliding blocks are connected inside the inner groove in a sliding manner
Preferably, the left side of function frame is provided with first support frame, the right side of function frame is provided with the second support frame, it rotates between function frame and the second support frame to be connected with and rotates the post
Preferably, the left side of first support frame is provided with the motor, fixedly connected with actuating lever on the motor output shaft, the actuating lever run through in proper order in one side of first support frame and function frame to extend to the opposite side of function frame, the actuating lever is connected for rotating with first support frame, and the actuating lever is fixed connection with the support frame
Preferably, a positioning member for fixing the motor is fixedly connected to one side of the motor, and the positioning member is fixedly connected to one side of the first support frame
Preferably, the first support frame and the second support frame are respectively provided with a first groove and a second groove, two sides of the functional frame are fixedly connected with positioning columns, and the positioning columns are in contact with the first grooves.
A method for monitoring the temperature of a mocvd heater is applied to a mocvd heater temperature monitoring device, and comprises the following steps:
the method comprises the following steps: after the heater is sleeved on the monitoring rod 6, the heater is started;
step two: starting the motor 15, and enabling the motor 15 to drive the gear 14 to rotate, so that the first driving tooth 11 and the second driving tooth 12 meshed with the gear 14 move towards the opposite side synchronously;
step three: and then the first movable plate 3 and the second movable plate 5 synchronously move towards the opposite sides, so that the monitoring sleeve 4 is sleeved outside the monitoring rod 6, the heater is wrapped by the monitoring sleeve 4, and the temperature of the heater is judged according to data on the monitor 17.
Compared with the prior art, the invention has the following beneficial effects:
1. after motor drive gear through setting up rotates, make gear engagement's first drive tooth and second drive tooth carry out synchronous motion to relative one side simultaneously, thereby make the monitoring sleeve on the first movable plate, and the monitoring pole on the second movable plate, also carry out synchronous motion to relative one side respectively, make the monitoring sleeve cover the heater on the monitoring pole, thereby monitor the temperature of heater through the monitor, so that reduced the risk that the operator was scalded by the higher heater of temperature, and promoted temperature monitoring's the degree of accuracy.
2. The motor through setting up drives the actuating lever and rotates to make the function frame through the supplementary of rotating the post, wholly rotate 180 degrees, make the monitoring sleeve and the monitoring pole upset of function frame bottom to on the function frame, thereby the operator of being convenient for is dismantled in installing of heater.
Drawings
FIG. 1 is a schematic structural view of a functional rack according to the present invention;
FIG. 2 is a schematic diagram of the present monitor;
FIG. 3 is a schematic view of the construction of the gear of the present invention;
FIG. 4 is an enlarged view of the portion A of FIG. 3 according to the present invention;
FIG. 5 is a schematic view of a first drive tooth according to the present invention;
FIG. 6 is a schematic view of the construction of the telescoping member of the present invention;
fig. 7 is a schematic structural view of the positioning post of the present invention.
1. A functional rack; 2. a bottom groove; 3. a first moving plate; 4. monitoring the sleeve; 5. a second moving plate; 6. a monitoring lever; 7. a transverse plate; 8. connecting blocks; 9. a moving block; 10. a slide bar; 11. a first drive tooth; 12. a second drive tooth; 13. a vertical plate; 14. a gear; 15. a motor; 16. a top plate; 17. a monitor; 18. a frame; 19. a telescoping member; 20. an inner groove; 21. a slider; 22. a first support frame; 23. a second support frame; 24. rotating the column; 25. a motor; 26. a drive rod; 27. a positioning member; 28. a first groove; 29. a second groove; 30. and a positioning column.
Detailed Description
A mocvd heater temperature monitoring apparatus of the present invention is further described with reference to fig. 1 to 7.
A mocvd heater temperature monitoring device, comprising:
a functional rack 1;
the functional rack 1 is a hollow rectangle as a whole.
The bottom groove 2 is formed in the bottom of the functional frame 1;
in detail, as shown in fig. 2 and 7, the number of the bottom grooves 2 is two, and the two bottom grooves 2 play the same role, and the bottom grooves 2 are matched with the sliding block 21.
The first moving plate 3 is arranged at the bottom of the functional frame 1, and one side of the first moving plate 3 is fixedly connected with a monitoring sleeve 4;
the first moving plate 3 is arranged on the opposite surface of the second moving plate 5, the monitoring sleeve 4 is arranged on the right side of the first month moving plate, and the monitoring rod 6 is arranged on the left side of the second moving plate 5.
The second moving plate 5 is arranged at the bottom of the functional frame 1, one side of the second moving plate 5 is fixedly connected with a monitoring rod 6, and the monitoring rod 6 is arranged on the opposite surface of the first moving plate 3;
the monitoring rod 6 and the monitoring sleeve 4 are both made of heat insulating materials such as silver, aluminum and the like in the prior art;
the length of the monitoring rod 6 and the length of the monitoring cylinder can be adjusted according to the length of the actual heater.
The transverse plate 7 is fixedly connected to the first moving plate 3 and the second moving plate 5 respectively, the transverse plates 7 are arranged at the bottom of the functional frame 1 at intervals, a connecting block 8 is fixedly connected to the transverse plate 7, a moving block 9 is fixedly connected to the connecting block 8, the connecting block 8 is used for connecting the moving block 9 and the transverse plate 7, a sliding strip 10 is fixedly connected to the moving block 9, and the sliding strip 10 is connected to the inside of the bottom groove 2 in a sliding manner;
the slide bar 10 is used for assisting the movement of the moving block 9 in the bottom groove 2, and the slide bar 10 is adapted to the bottom groove 2.
The first driving gear 11 is arranged inside the functional frame 1, and the first driving gear 11 and the functional frame 1 are arranged on the same horizontal plane;
the first drive tooth 11 and the second drive tooth 12 are synchronously moved to the opposite side or the opposite side simultaneously by forward and reverse rotation of the gear 14 by forward and reverse rotation of the motor 15.
The second driving gear 12 is arranged inside the functional frame 1, the second driving gear 12 and the functional frame 1 are arranged on the same horizontal plane, one sides of the first driving gear 11 opposite to one side of the second driving gear 12 are fixedly connected with a vertical plate 13 used for connection, and the vertical plate 13 is fixedly connected with the transverse plate 7;
the gear 14 is arranged inside the functional rack 1, and the gear 14 is meshed with the first driving teeth 11 and the second driving teeth 12;
gear 14 is also rotatably connected to top plate 16.
The motor 15 is arranged on the functional frame 1, an output shaft of the motor 15 is fixedly connected with the gear 14, and the motor 15 is used for driving the gear 14 to rotate positively and negatively;
the motor 15 is a forward and reverse rotation motor 15 in the prior art, and only forward and reverse rotation of the driving gear 14 is needed;
and the motor 15 further comprises an external control switch, and the motor 15 is rotated forward and backward by the control switch.
The top plate 16 is fixedly connected to the functional rack 1, and the top plate 16 is used for supporting and fixing the motor 15;
a monitor 17 fixedly connected to the left side of the first moving plate 3, the monitor 17 being used for monitoring the temperature of the heater;
the monitor 17 is a temperature monitor 17 in the prior art, and only needs to monitor the temperature of the heater.
The outer surface of the motor 15 is fixedly connected with a frame 18 for improving the stability of the motor 15, and the bottom of the frame 18 is fixedly connected with a top plate 16.
The bottom of the functional frame 1 is provided with an expansion piece 19 for driving the first moving plate 3 and the second moving plate 5 to move, and two ends of the expansion piece 19 are fixedly connected with the moving block 9;
the telescopic part 19 is an electric telescopic rod in the prior art, and only needs to drive the two moving blocks 9 to synchronously move towards the opposite sides;
the telescopic member 19 is provided to assist the movement of the first moving plate 3 and the second moving plate 5.
Inner grooves 20 are formed in opposite sides of the inner part of the functional frame 1, sliding blocks 21 are fixedly connected to one side of the first driving tooth 11 and one side of the second driving tooth 12 respectively, and the sliding blocks 21 are connected to the inner parts of the inner grooves 20 in a sliding mode;
the internal slot 20 is adapted to the slider 21, and the internal slot 20 and the slider 21 are provided to assist the movement of the first drive tooth 11 and the second drive tooth 12.
The left side of function frame 1 is provided with first support frame 22, the right side of function frame 1 is provided with second support frame 23, it is connected with rotation post 24 to rotate between function frame 1 and the second support frame 23.
The left side of first support frame 22 is provided with motor 25, fixedly connected with actuating lever 26 on the motor 25 output shaft, actuating lever 26 run through in proper order in one side of first support frame 22 and function frame 1 to extend to the opposite side of function frame 1, actuating lever 26 is connected for rotating with first support frame 22, actuating lever 26 and first support frame 22 fixed connection.
A positioning part 27 for fixing the motor 25 is fixedly connected to one side of the motor 25, and the positioning part 27 is fixedly connected to one side of the first support frame 22.
A first groove 28 and a second groove 29 are respectively formed in the first support frame 22 and the second support frame 23, positioning columns 30 are fixedly connected to two sides of the functional frame 1, and the positioning columns 30 are in contact with the first groove 28.
A mocvd heater temperature monitoring method is applied to a mocvd heater temperature monitoring device, and comprises the following steps:
the method comprises the following steps: after the heater is sleeved on the monitoring rod 6, the heater is started;
step two: starting the motor 15, and enabling the motor 15 to drive the gear 14 to rotate, so that the first driving tooth 11 and the second driving tooth 12 meshed with the gear 14 move towards the opposite side synchronously;
step three: and then the first movable plate 3 and the second movable plate 5 synchronously move towards the opposite sides, so that the monitoring sleeve 4 is sleeved outside the monitoring rod 6, the heater is wrapped by the monitoring sleeve 4, and the temperature of the heater is judged according to data on the monitor 17.
The working principle is as follows:
the method comprises the following steps: before monitoring, the motor 22 is started, the output shaft of the motor 22 drives the driving rod 26 to rotate, so that the function frame 1 starts to rotate through the connection of the rotating column 24, and when the positioning column 30 is separated from the first groove 28 and contacts with the second groove 29, the function frame 1 rotates 180 degrees;
step two: then, the heater to be monitored is sleeved on the monitoring rod 6, the heater is started through an external switch, the temperature of the heater rises, the motor 22 is started again immediately, the output shaft of the motor 22 drives the driving rod 26 to rotate, the rotating frame rotates 180 degrees according to the same moving track, and the positioning column 30 is separated from the second groove 29 and is in contact with the first groove 28;
step three: during monitoring, the motor 15 and the telescopic piece 19 are started immediately, the output shaft of the motor 15 drives the gear 14 to rotate, so that the first driving tooth 11 and the second driving tooth 12 meshed with the gear 14 move synchronously to the opposite sides, at the same time, the first moving plate 3 and the second moving plate 5 connected with the first driving tooth 11 and the second driving tooth 12 through the vertical plate 13, the moving block 9 and the transverse plate 7 respectively drive the monitoring sleeve 4 and the monitoring rod 6 to move synchronously to the opposite sides, meanwhile, the sliding strip 10 on the moving block 9 also assists the movement of the first moving plate 3 and the second moving plate 5 through the bottom groove 2, the telescopic piece 19 also starts to shrink, when the telescopic piece 19 shrinks completely, the monitoring sleeve 4 also completely covers the heater on the monitoring rod 6, the temperature of the heater is transmitted to the monitor 17, so that the monitor 17 displays temperature data, and immediately completes monitoring of the temperature of the first heater.
The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiments, and all technical solutions that belong to the idea of the present invention belong to the scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.

Claims (9)

1. A mocvd heater temperature monitoring apparatus, comprising:
a functional rack (1);
the bottom groove (2) is formed in the bottom of the functional frame (1);
the first moving plate (3) is arranged at the bottom of the functional frame (1), and one side of the first moving plate (3) is fixedly connected with a monitoring sleeve (4);
the second movable plate (5) is arranged at the bottom of the functional frame (1), one side of the second movable plate (5) is fixedly connected with a monitoring rod (6), and the monitoring rod (6) is arranged on the opposite surface of the first movable plate (3);
the transverse plates (7) are fixedly connected to the first moving plate (3) and the second moving plate (5) respectively, the transverse plates (7) are arranged at the bottom of the functional frame (1) at intervals, connecting blocks (8) are fixedly connected to the transverse plates (7), moving blocks (9) are fixedly connected to the connecting blocks (8), the connecting blocks (8) are used for connecting the moving blocks (9) with the transverse plates (7), sliding strips (10) are fixedly connected to the moving blocks (9), and the sliding strips (10) are connected to the inner portions of the bottom grooves (2) in a sliding mode;
the first driving teeth (11) are arranged inside the functional frame (1), and the first driving teeth (11) and the functional frame (1) are arranged on the same horizontal plane;
the second driving gear (12) is arranged inside the functional frame (1), the second driving gear (12) and the functional frame (1) are arranged on the same horizontal plane, one sides of the first driving gear (11) and the second driving gear (12) opposite to each other are fixedly connected with a vertical plate (13) used for connection, and the vertical plate (13) is fixedly connected with the transverse plate (7);
the gear (14) is arranged inside the functional frame (1), and the gear (14) is meshed with the first driving tooth (11) and the second driving tooth (12);
the motor (15) is arranged on the functional frame (1), an output shaft of the motor (15) is fixedly connected with the gear (14), and the motor (15) is used for driving the gear (14) to rotate positively and negatively;
the top plate (16) is fixedly connected to the functional frame (1), and the top plate (16) is used for supporting and fixing the motor (15);
and the monitor (17) is fixedly connected to the left side of the first moving plate (3), and the monitor (17) is used for monitoring the temperature of the heater.
2. A mocvd heater temperature monitoring device according to claim 1, characterized in that a frame (18) for improving the stability of the motor (15) is fixedly connected to the outer surface of the motor (15), and the bottom of the frame (18) is fixedly connected to the top plate (16).
3. The mocvd heater temperature monitoring device according to claim 1, wherein a telescopic member (19) for driving the first moving plate (3) and the second moving plate (5) to move is provided at the bottom of the functional rack (1), and both ends of the telescopic member (19) are fixedly connected with the moving block (9).
4. A mocvd heater temperature monitoring apparatus according to claim 1, wherein the function frame (1) is provided with an inner groove (20) on one side opposite to the inner side, the first driving tooth (11) and the second driving tooth (12) are fixedly connected with a sliding block (21) on one side, and the sliding block (21) is slidably connected inside the inner groove (20).
5. A mocvd heater temperature monitoring device according to claim 1, characterized in that a first support frame (22) is provided on the left side of the functional frame (1), a second support frame (23) is provided on the right side of the functional frame (1), and a rotation column (24) is rotatably connected between the functional frame (1) and the second support frame (23).
6. A mocvd heater temperature monitoring device according to claim 5, characterized in that a motor (25) is provided on the left side of the first support frame (22), a driving rod (26) is fixedly connected to the output shaft of the motor (25), the driving rod (26) penetrates one side of the first support frame (22) and the function frame (1) in sequence and extends to the other side of the function frame (1), the driving rod (26) is rotatably connected to the first support frame (22), and the driving rod (26) is fixedly connected to the first support frame (22).
7. A mocvd heater temperature monitoring device according to claim 6, characterized in that a positioning member (27) for fixing the motor (25) is fixedly connected to one side of the motor (25), the positioning member (27) being fixedly connected to one side of the first support frame (22).
8. A mocvd heater temperature monitoring device according to claim 5, characterized in that the first support frame (22) and the second support frame (23) are respectively provided with a first groove (28) and a second groove (29), both sides of the functional frame (1) are fixedly connected with positioning posts (30), and the positioning posts (30) are in contact with the first grooves (28).
9. A mocvd heater temperature monitoring device applied to claim 1, characterized in that the mocvd heater temperature monitoring method comprises the steps of:
the method comprises the following steps: after the heater is sleeved on the monitoring rod (6), the heater is started;
step two: starting a motor (15), and enabling the motor (15) to drive a gear (14) to rotate, so that a first driving tooth (11) and a second driving tooth (12) meshed with the gear (14) synchronously move to opposite sides;
step three: and the first movable plate (3) and the second movable plate (5) synchronously move towards the opposite side to enable the monitoring sleeve (4) to be sleeved outside the monitoring rod (6), so that the heater is wrapped by the monitoring sleeve (4), and the temperature of the heater is judged through data on the monitor (17).
CN202211068034.5A 2022-09-01 2022-09-01 Mocvd heater temperature monitoring device and method Active CN115307751B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211068034.5A CN115307751B (en) 2022-09-01 2022-09-01 Mocvd heater temperature monitoring device and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211068034.5A CN115307751B (en) 2022-09-01 2022-09-01 Mocvd heater temperature monitoring device and method

Publications (2)

Publication Number Publication Date
CN115307751A true CN115307751A (en) 2022-11-08
CN115307751B CN115307751B (en) 2023-08-29

Family

ID=83865160

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211068034.5A Active CN115307751B (en) 2022-09-01 2022-09-01 Mocvd heater temperature monitoring device and method

Country Status (1)

Country Link
CN (1) CN115307751B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001358083A (en) * 2001-04-26 2001-12-26 Mitsubishi Electric Corp Chemical vapor growth device and method
WO2015018201A1 (en) * 2013-08-06 2015-02-12 中国电子科技集团公司第四十八研究所 Support shaft for mocvd reactor and mocvd reactor
CN209784809U (en) * 2019-07-12 2019-12-13 陕西能源职业技术学院 Intelligent monitoring equipment based on singlechip
CN113932852A (en) * 2021-10-18 2022-01-14 深圳耀德数据服务有限公司 Device and method for monitoring abnormity of data center machine room
CN217240291U (en) * 2022-01-19 2022-08-19 浙江祥意电气有限公司 Power cable intermediate head on-line temperature monitoring device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001358083A (en) * 2001-04-26 2001-12-26 Mitsubishi Electric Corp Chemical vapor growth device and method
WO2015018201A1 (en) * 2013-08-06 2015-02-12 中国电子科技集团公司第四十八研究所 Support shaft for mocvd reactor and mocvd reactor
CN209784809U (en) * 2019-07-12 2019-12-13 陕西能源职业技术学院 Intelligent monitoring equipment based on singlechip
CN113932852A (en) * 2021-10-18 2022-01-14 深圳耀德数据服务有限公司 Device and method for monitoring abnormity of data center machine room
CN217240291U (en) * 2022-01-19 2022-08-19 浙江祥意电气有限公司 Power cable intermediate head on-line temperature monitoring device

Also Published As

Publication number Publication date
CN115307751B (en) 2023-08-29

Similar Documents

Publication Publication Date Title
CN115027988B (en) Equipment for high-temperature-resistant cold stamping gold foil and production process thereof
CN115307751A (en) Temperature monitoring device and method for mocvd heater
CN213134576U (en) Super capacitor's shell plastic equipment
CN203665573U (en) Rubber cutting machine
CN111102915A (en) Bridge deformation monitoring radar sensor
CN219075487U (en) Device easy to assemble spindle bearing
CN217991419U (en) Be used for accurate welding set of al-alloy door & window
CN109079884A (en) A kind of assembly insulating board for building cutter device convenient to use
CN212312398U (en) Slotting device for construction
CN214849711U (en) Building electrical intelligent power distribution cabinet
CN113953667A (en) Multi-angle welded pipeline laser spot welding robot and welding method thereof
CN107946874B (en) Electric wire device of skinning fast for electric power construction
CN218518881U (en) Shield constructs section of jurisdiction concrete electrical heating curing means
CN212918061U (en) Automatic welding equipment of laser
CN220330515U (en) Assembling device for rolling sun curtain rod of automobile skylight
CN219316354U (en) Photovoltaic field construction operation platform
CN218255316U (en) Sugarcane fixed length shutdown mechanism
CN108068055A (en) A kind of automatic lock attaching jig of mobile phone camera LENS, locking apparatus and method
CN220482610U (en) PPR pipe hot melting device
CN217692134U (en) Data center switch board
CN219919187U (en) Multi-station workpiece induction heating complete equipment
CN211104542U (en) Bamboo wood crimping device
CN212806915U (en) Mechanical part size detection device
CN219018654U (en) Motor shell capable of improving assembly precision
CN221781447U (en) Hub bearing axial play detection device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant