CN115307751B - Mocvd heater temperature monitoring device and method - Google Patents
Mocvd heater temperature monitoring device and method Download PDFInfo
- Publication number
- CN115307751B CN115307751B CN202211068034.5A CN202211068034A CN115307751B CN 115307751 B CN115307751 B CN 115307751B CN 202211068034 A CN202211068034 A CN 202211068034A CN 115307751 B CN115307751 B CN 115307751B
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- fixedly connected
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- heater
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/02—Means for indicating or recording specially adapted for thermometers
- G01K1/028—Means for indicating or recording specially adapted for thermometers arrangements for numerical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Control Of Resistance Heating (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention discloses a temperature monitoring device and a temperature monitoring method for a mocvd heater, which relate to the technical field of heater monitoring and have the technical scheme that the device comprises the following main points: the bottom groove is formed in the bottom of the functional frame; the first movable plate is arranged at the bottom of the functional frame, and one side of the first movable plate is fixedly connected with a monitoring sleeve; the second movable plate is arranged at the bottom of the functional frame. The utility model provides a mocvd heater temperature monitoring device, the effect is, through the motor drive tooth wheel that sets up, make gear engagement's first driving tooth and second driving tooth simultaneously to opposite one side synchronous movement, thereby make the monitoring sleeve on the first movable plate, and the monitoring pole on the second movable plate, respectively to opposite one side synchronous movement, make the monitoring sleeve cover the heater on the monitoring pole, thereby monitor the temperature of heater through the monitor, thereby reduced the operator by the risk of the higher heater scald of temperature, and promoted the degree of accuracy of temperature monitoring.
Description
Technical Field
The invention relates to the technical field of heater monitoring, in particular to a device and a method for monitoring the temperature of a mocvd heater.
Background
The electric heater is an electric appliance which achieves a heating effect by utilizing electric energy. The intelligent temperature control device has the advantages of small volume, high heating power, wide application, intelligent control mode and high temperature control precision, and can be networked with a computer. The application range is wide, the service life is long, and the reliability is high. At the heart of the heater principle is energy conversion, most widely electrical energy to thermal energy.
In order to ensure that the heater can be used in life normally, the temperature of the heater is monitored to judge whether the performance of the heater is good or bad.
At present, in the related technical scheme in the prior art, when the temperature of the heater is monitored, because the temperature of the heater is too high when the heater is used, the risk that an operator is scalded by the high-temperature heater possibly occurs, and the heater is exposed outside when the temperature of the prior heater is monitored, so that the deviation of data possibly occurs during monitoring, and the accuracy of monitoring is affected.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide the mocvd heater temperature monitoring device, which reduces the risk of scalding operators by a heater with higher temperature and improves the accuracy of temperature monitoring.
In order to achieve the above object, the present invention provides the following technical solutions, including:
a functional rack;
the bottom groove is formed at the bottom of the functional frame;
the first movable plate is arranged at the bottom of the functional frame, and one side of the first movable plate is fixedly connected with a monitoring sleeve;
the second movable plate is arranged at the bottom of the functional frame, one side of the second movable plate is fixedly connected with a monitoring rod, and the monitoring rod is arranged on the opposite surface of the first movable plate;
the transverse plates are respectively and fixedly connected to the first movable plate and the second movable plate, the transverse plates are arranged at the bottom of the functional frame at intervals, connecting blocks are fixedly connected to the transverse plates, movable blocks are fixedly connected to the connecting blocks, the connecting blocks are used for connecting the movable blocks with the transverse plates, sliding strips are fixedly connected to the movable blocks, and the sliding strips are slidably connected to the inside of the bottom groove;
the first driving teeth are arranged in the functional frame and are arranged on the same horizontal plane with the functional frame;
the second driving teeth are arranged in the functional frame, the second driving teeth and the functional frame are arranged on the same horizontal plane, vertical plates used for connection are fixedly connected to the opposite sides of the first driving teeth and the second driving teeth respectively, and the vertical plates are fixedly connected with the transverse plates;
the gear is arranged in the functional frame and is meshed with the first driving teeth and the second driving teeth;
the motor is arranged on the functional frame, an output shaft of the motor is fixedly connected with the gear, and the motor is used for driving the gear to rotate positively and negatively;
the top plate is fixedly connected to the functional frame and used for supporting and fixing the motor;
and the monitor is fixedly connected to the left side of the first movable plate and is used for monitoring the temperature of the heater.
Preferably, the outer surface of the motor is fixedly connected with a frame for improving the stability of the motor, and the bottom of the frame is fixedly connected with the top plate
Preferably, the bottom of the functional frame is provided with a telescopic piece for driving the first moving plate and the second moving plate to move, and both ends of the telescopic piece are fixedly connected with the moving block
Preferably, the opposite sides of the functional rack are provided with inner grooves, one side of the first movable tooth and one side of the second movable tooth are respectively and fixedly connected with a sliding block, and the sliding blocks are in sliding connection with the inner parts of the inner grooves
Preferably, a first support frame is arranged on the left side of the functional frame, a second support frame is arranged on the right side of the functional frame, and a rotating column is rotatably connected between the functional frame and the second support frame
Preferably, the left side of the first support frame is provided with a motor, a driving rod is fixedly connected to an output shaft of the motor, and sequentially penetrates through one side of the first support frame and one side of the functional frame and extends to the other side of the functional frame, the driving rod is rotationally connected with the first support frame, and the driving rod is fixedly connected with the functional frame
Preferably, a positioning piece for fixing the motor is fixedly connected to one side of the motor, and is fixedly connected with one side of the first support frame
Preferably, the first support frame and the second support frame are respectively provided with a first groove and a second groove, positioning columns are fixedly connected to two sides of the functional frame, and the positioning columns are in contact with the first grooves.
A method for monitoring the temperature of a mocvd heater, which is applied to a device for monitoring the temperature of the mocvd heater, wherein the method for monitoring the temperature of the mocvd heater comprises the following steps:
step one: after the heater is sleeved on the monitoring rod 6, the heater is started;
step two: the motor 15 is started, so that the motor 15 drives the gear 14 to rotate, and the first driving tooth 11 and the second driving tooth 12 meshed with the gear 14 synchronously move to opposite sides;
step three: the first moving plate 3 and the second moving plate 5 move synchronously to opposite sides, so that the monitoring sleeve 4 is sleeved outside the monitoring rod 6, the heater is wrapped by the monitoring sleeve 4, and the temperature of the heater is judged through data on the monitor 17.
Compared with the prior art, the invention has the following beneficial effects:
1. after the motor drive gear through setting up rotates, make gear engagement's first driving tooth and second driving tooth carry out synchronous motion to opposite one side simultaneously to make the monitoring sleeve on the first movable plate, and the monitoring pole on the second movable plate also carry out synchronous motion to opposite one side respectively, make the monitoring sleeve cover the heater on the monitoring pole, thereby monitor the temperature of heater through the monitor, so reduced the operator by the higher risk of heater scald of temperature, and promoted the degree of accuracy of temperature monitoring.
2. The motor that sets up drives the actuating lever and rotates to make the function frame pass through the assistance of pivoted post, wholly rotate 180 degrees, make monitoring sleeve and the monitoring pole of function frame bottom upset to the function frame on, thereby be convenient for the operator to the installation of heater in dismantling.
Drawings
FIG. 1 is a schematic diagram of a functional rack of the present invention;
FIG. 2 is a schematic diagram of the structure of the monitor of the present invention;
FIG. 3 is a schematic view of the gear of the present invention;
FIG. 4 is an enlarged schematic view of the portion A of FIG. 3 according to the present invention;
FIG. 5 is a schematic view of the structure of a first driving tooth according to the present invention;
FIG. 6 is a schematic view of the structure of the telescopic member of the present invention;
fig. 7 is a schematic structural view of a positioning column according to the present invention.
1. A functional rack; 2. a bottom groove; 3. a first moving plate; 4. monitoring the sleeve; 5. a second moving plate; 6. a monitoring rod; 7. a cross plate; 8. a connecting block; 9. a moving block; 10. a slide bar; 11. a first drive tooth; 12. a second drive tooth; 13. a vertical plate; 14. a gear; 15. a motor; 16. a top plate; 17. a monitor; 18. a frame; 19. a telescoping member; 20. an inner groove; 21. a slide block; 22. a first support frame; 23. a second support frame; 24. rotating the column; 25. a motor; 26. a driving rod; 27. a positioning piece; 28. a first groove; 29. a second groove; 30. and positioning columns.
Detailed Description
A mocvd heater temperature monitoring device according to the present invention will be further described with reference to fig. 1 to 7.
A mocvd heater temperature monitoring device comprising:
a functional rack 1;
the whole functional frame 1 is hollow rectangle.
A bottom groove 2 is formed at the bottom of the functional frame 1;
referring to fig. 2 and 7, the number of the bottom slots 2 is two, and the two bottom slots 2 play the same role, and the bottom slots 2 are matched with the sliding blocks 21.
The first movable plate 3 is arranged at the bottom of the functional frame 1, and one side of the first movable plate 3 is fixedly connected with a monitoring sleeve 4;
the first movable plate 3 is arranged on the opposite surface of the second movable plate 5, the monitoring sleeve 4 is arranged on the right side of the first movable plate, and the monitoring rod 6 is arranged on the left side of the second movable plate 5.
The second movable plate 5 is arranged at the bottom of the functional frame 1, one side of the second movable plate 5 is fixedly connected with a monitoring rod 6, and the monitoring rod 6 is arranged on the opposite surface of the first movable plate 3;
the monitoring rod 6 and the monitoring sleeve 4 are made of heat insulation materials such as silver, aluminum and the like in the prior art;
the length of the monitoring rod 6 and the length of the monitoring cylinder can be adjusted according to the length of the actual heater.
The transverse plates 7 are respectively and fixedly connected to the first movable plate 3 and the second movable plate 5, the transverse plates 7 are arranged at the bottom of the functional frame 1 at intervals, connecting blocks 8 are fixedly connected to the transverse plates 7, movable blocks 9 are fixedly connected to the connecting blocks 8, the connecting blocks 8 are used for connecting the movable blocks 9 with the transverse plates 7, sliding strips 10 are fixedly connected to the movable blocks 9, and the sliding strips 10 are slidably connected to the inside of the bottom groove 2;
slide 10 the bottom groove 2 is used to assist the movement of the moving block 9 and the slide 10 is adapted to the bottom groove 2.
The first driving teeth 11 are arranged in the functional frame 1, and the first driving teeth 11 and the functional frame 1 are arranged on the same horizontal plane;
the first driving teeth 11 and the second driving teeth 12 are rotated in the forward and reverse directions by the motor 15, so that the gears 14 are simultaneously moved in the same direction to the opposite side or in the same direction to the opposite side.
The second driving teeth 12 are arranged in the functional frame 1, the second driving teeth 12 and the functional frame 1 are arranged on the same horizontal plane, vertical plates 13 used for connection are fixedly connected to one sides of the first driving teeth 11 and the second driving teeth 12 respectively, and the vertical plates 13 are fixedly connected with the transverse plates 7;
a gear 14 disposed inside the functional rack 1, wherein the gear 14 is in meshed connection with the first driving teeth 11 and the second driving teeth 12;
the gear 14 is also rotatably connected to the top plate 16.
The motor 15 is arranged on the functional frame 1, an output shaft of the motor 15 is fixedly connected with the gear 14, and the motor 15 is used for driving the gear 14 to rotate positively and negatively;
the motor 15 is a forward and reverse rotation motor 15 in the prior art, and only the forward and reverse rotation of the driving gear 14 is needed;
and the motor 15 also comprises an external control switch, and forward and reverse rotation of the motor 15 is realized through the control switch.
A top plate 16 fixedly connected to the functional rack 1, wherein the top plate 16 is used for supporting and fixing the motor 15;
a monitor 17 fixedly connected to the left side of the first moving plate 3, the monitor 17 being for monitoring the temperature of the heater;
the monitor 17 is a temperature monitor 17 in the prior art, and only needs to monitor the temperature of the heater.
The outer surface of the motor 15 is fixedly connected with a frame 18 for improving the stability of the motor 15, and the bottom of the frame 18 is fixedly connected with a top plate 16.
The bottom of the functional frame 1 is provided with a telescopic piece 19 for driving the first moving plate 3 and the second moving plate 5 to move, and two ends of the telescopic piece 19 are fixedly connected with the moving block 9;
the telescopic piece 19 is an electric telescopic rod in the prior art, and only needs to drive the two moving blocks 9 to synchronously move to the opposite sides;
the telescopic member 19 is provided for assisting the movement of the first moving plate 3 and the second moving plate 5.
The opposite sides of the inside of the functional rack 1 are respectively provided with an inner groove 20, one side of the first driving tooth 11 and one side of the second driving tooth 12 are respectively fixedly connected with a sliding block 21, and the sliding blocks 21 are in sliding connection with the inside of the inner grooves 20;
the internal groove 20 is adapted to the slider 21, the internal groove 20 and the slider 21 being arranged for the purpose of assisting the movement of the first and second drive teeth 11, 12.
The left side of function frame 1 is provided with first support frame 22, the right side of function frame 1 is provided with second support frame 23, rotate between function frame 1 and the second support frame 23 and be connected with rotation post 24.
The left side of first support frame 22 is provided with motor 25, fixedly connected with actuating lever 26 on the motor 25 output shaft, actuating lever 26 run through in proper order in one side of first support frame 22 and function frame 1, and extend to the opposite side of function frame 1, actuating lever 26 is the rotation with first support frame 22 and is connected, actuating lever 26 and function frame 1 fixed connection.
One side of the motor 25 is fixedly connected with a positioning piece 27 for fixing the motor 25, and the positioning piece 27 is fixedly connected with one side of the first support frame 22.
The first support frame 22 and the second support frame 23 are respectively provided with a first groove 28 and a second groove 29, positioning columns 30 are fixedly connected to two sides of the functional frame 1, and the positioning columns 30 are in contact with the first grooves 28.
A method for monitoring the temperature of a mocvd heater, which is applied to a device for monitoring the temperature of the mocvd heater, wherein the method for monitoring the temperature of the mocvd heater comprises the following steps:
step one: after the heater is sleeved on the monitoring rod 6, the heater is started;
step two: the motor 15 is started, so that the motor 15 drives the gear 14 to rotate, and the first driving tooth 11 and the second driving tooth 12 meshed with the gear 14 synchronously move to opposite sides;
step three: the first moving plate 3 and the second moving plate 5 move synchronously to opposite sides, so that the monitoring sleeve 4 is sleeved outside the monitoring rod 6, the heater is wrapped by the monitoring sleeve 4, and the temperature of the heater is judged through data on the monitor 17.
Working principle:
step one: before monitoring, firstly, the motor 22 is started, so that the output shaft of the motor 22 drives the driving rod 26 to rotate, the function rack 1 starts to rotate through the connection of the rotating column 24, and when the positioning column 30 is separated from the first groove 28 and is contacted with the second groove 29, the function rack 1 at the moment rotates 180 degrees;
step two: then the heater to be monitored is sleeved on the monitoring rod 6, the heater is started through an external switch, the temperature of the heater rises, then the motor 22 is started again, the output shaft of the motor 22 drives the driving rod 26 to rotate, and the rotating frame rotates 180 degrees according to the same moving track, and the positioning column 30 is separated from the second groove 29 and is contacted with the first groove 28;
step three: during monitoring, the motor 15 and the telescopic piece 19 are started immediately, at the moment, the motor 15 drives the gear 14 to rotate, so that the first driving tooth 11 and the second driving tooth 12 meshed with the gear 14 synchronously move towards the opposite sides, at the moment, the first moving plate 3 and the second moving plate 5 which are connected with the first driving tooth 11 and the second driving tooth 12 through the vertical plate 13, the moving block 9 and the transverse plate 7 respectively drive the monitoring sleeve 4 and the monitoring rod 6 to synchronously move towards the opposite sides, at the same time, the sliding bar 10 on the moving block 9 also assists the movement of the first moving plate 3 and the second moving plate 5 through the bottom groove 2, at the moment, the telescopic piece 19 also starts to shrink, and when the telescopic piece 19 is completely shrunk, the monitoring sleeve 4 also completely covers the heater on the monitoring rod 6, the temperature data are displayed through the monitor 17, and then the monitoring of the temperature of the first heater is completed.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (9)
1. A mocvd heater temperature monitoring device, comprising:
a functional rack (1);
a bottom groove (2) is arranged at the bottom of the functional frame (1);
the first movable plate (3) is arranged at the bottom of the functional frame (1), and one side of the first movable plate (3) is fixedly connected with a monitoring sleeve (4);
the second movable plate (5) is arranged at the bottom of the functional frame (1), one side of the second movable plate (5) is fixedly connected with a monitoring rod (6), and the monitoring rod (6) is arranged on the opposite surface of the first movable plate (3);
the transverse plates (7) are respectively and fixedly connected to the first movable plate (3) and the second movable plate (5), the transverse plates (7) are arranged at the bottom of the functional frame (1) at intervals, connecting blocks (8) are fixedly connected to the transverse plates (7), movable blocks (9) are fixedly connected to the connecting blocks (8), the connecting blocks (8) are used for connecting the movable blocks (9) with the transverse plates (7), sliding strips (10) are fixedly connected to the movable blocks (9), and the sliding strips (10) are slidably connected to the inside of the bottom groove (2);
the first driving teeth (11) are arranged in the functional frame (1), and the first driving teeth (11) and the functional frame (1) are arranged on the same horizontal plane;
the second driving teeth (12) are arranged in the functional frame (1), the second driving teeth (12) and the functional frame (1) are arranged on the same horizontal plane, vertical plates (13) used for connection are fixedly connected to one sides of the first driving teeth (11) and the second driving teeth (12) opposite to each other respectively, and the vertical plates (13) are fixedly connected with the transverse plates (7);
the gear (14) is arranged in the functional rack (1), and the gear (14) is in meshed connection with the first driving teeth (11) and the second driving teeth (12);
the motor (15) is arranged on the functional frame (1), an output shaft of the motor (15) is fixedly connected with the gear (14), and the motor (15) is used for driving the gear (14) to rotate positively and negatively;
the top plate (16) is fixedly connected to the functional frame (1), and the top plate (16) is used for supporting and fixing the motor (15);
and a monitor (17) fixedly connected to the left side of the first movable plate (3), wherein the monitor (17) is used for monitoring the temperature of the heater.
2. The mocvd heater temperature monitoring device according to claim 1, wherein a frame (18) for improving the stability of the motor (15) is fixedly connected to the outer surface of the motor (15), and the bottom of the frame (18) is fixedly connected to the top plate (16).
3. The mocvd heater temperature monitoring device according to claim 1, wherein a telescopic member (19) for driving the first moving plate (3) and the second moving plate (5) to move is arranged at the bottom of the functional rack (1), and both ends of the telescopic member (19) are fixedly connected with the moving block (9).
4. The mocvd heater temperature monitoring device according to claim 1, wherein the functional rack (1) is provided with an inner groove (20) at one side opposite to the inner side, a sliding block (21) is fixedly connected to one side of the first driving tooth (11) and one side of the second driving tooth (12) respectively, and the sliding block (21) is slidably connected to the inner side of the inner groove (20).
5. The mocvd heater temperature monitoring device according to claim 1, characterized in that a first support frame (22) is provided on the left side of the functional frame (1), a second support frame (23) is provided on the right side of the functional frame (1), and a rotating column (24) is rotatably connected between the functional frame (1) and the second support frame (23).
6. The mocvd heater temperature monitoring device according to claim 5, wherein a motor (25) is arranged on the left side of the first supporting frame (22), a driving rod (26) is fixedly connected to an output shaft of the motor (25), the driving rod (26) sequentially penetrates through one side of the first supporting frame (22) and one side of the functional frame (1) and extends to the other side of the functional frame (1), the driving rod (26) is rotatably connected with the first supporting frame (22), and the driving rod (26) is fixedly connected with the functional frame (1).
7. The mocvd heater temperature monitoring device according to claim 6, wherein a positioning member (27) for fixing the motor (25) is fixedly connected to one side of the motor (25), and the positioning member (27) is fixedly connected to one side of the first supporting frame (22).
8. The mocvd heater temperature monitoring device according to claim 5, wherein the first support frame (22) and the second support frame (23) are respectively provided with a first groove (28) and a second groove (29), positioning columns (30) are fixedly connected to two sides of the functional frame (1), and the positioning columns (30) are in contact with the first grooves (28).
9. A mocvd heater temperature monitoring device applied to claim 1, wherein the mocvd heater temperature monitoring method comprises the steps of:
step one: after the heater is sleeved on the monitoring rod (6), the heater is started;
step two: starting the motor (15), and enabling the motor (15) to drive the gear (14) to rotate, so that the first driving teeth (11) and the second driving teeth (12) meshed with the gear (14) synchronously move to opposite sides;
step three: the first moving plate (3) and the second moving plate (5) synchronously move to opposite sides, so that the monitoring sleeve (4) is sleeved outside the monitoring rod (6), the heater is wrapped by the monitoring sleeve (4), and the temperature of the heater is judged through data on the monitor (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211068034.5A CN115307751B (en) | 2022-09-01 | 2022-09-01 | Mocvd heater temperature monitoring device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211068034.5A CN115307751B (en) | 2022-09-01 | 2022-09-01 | Mocvd heater temperature monitoring device and method |
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| Publication Number | Publication Date |
|---|---|
| CN115307751A CN115307751A (en) | 2022-11-08 |
| CN115307751B true CN115307751B (en) | 2023-08-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202211068034.5A Active CN115307751B (en) | 2022-09-01 | 2022-09-01 | Mocvd heater temperature monitoring device and method |
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| CN (1) | CN115307751B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001358083A (en) * | 2001-04-26 | 2001-12-26 | Mitsubishi Electric Corp | Chemical vapor growth device and method |
| WO2015018201A1 (en) * | 2013-08-06 | 2015-02-12 | 中国电子科技集团公司第四十八研究所 | Support shaft for mocvd reactor and mocvd reactor |
| CN209784809U (en) * | 2019-07-12 | 2019-12-13 | 陕西能源职业技术学院 | Intelligent monitoring equipment based on singlechip |
| CN113932852A (en) * | 2021-10-18 | 2022-01-14 | 深圳耀德数据服务有限公司 | Device and method for monitoring abnormity of data center machine room |
| CN217240291U (en) * | 2022-01-19 | 2022-08-19 | 浙江祥意电气有限公司 | Power cable intermediate head on-line temperature monitoring device |
-
2022
- 2022-09-01 CN CN202211068034.5A patent/CN115307751B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001358083A (en) * | 2001-04-26 | 2001-12-26 | Mitsubishi Electric Corp | Chemical vapor growth device and method |
| WO2015018201A1 (en) * | 2013-08-06 | 2015-02-12 | 中国电子科技集团公司第四十八研究所 | Support shaft for mocvd reactor and mocvd reactor |
| CN209784809U (en) * | 2019-07-12 | 2019-12-13 | 陕西能源职业技术学院 | Intelligent monitoring equipment based on singlechip |
| CN113932852A (en) * | 2021-10-18 | 2022-01-14 | 深圳耀德数据服务有限公司 | Device and method for monitoring abnormity of data center machine room |
| CN217240291U (en) * | 2022-01-19 | 2022-08-19 | 浙江祥意电气有限公司 | Power cable intermediate head on-line temperature monitoring device |
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| CN115307751A (en) | 2022-11-08 |
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