CN115291468B - Projection curtain with multilayer regular micro-nano textures on surface and preparation method thereof - Google Patents

Projection curtain with multilayer regular micro-nano textures on surface and preparation method thereof Download PDF

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Publication number
CN115291468B
CN115291468B CN202210876475.1A CN202210876475A CN115291468B CN 115291468 B CN115291468 B CN 115291468B CN 202210876475 A CN202210876475 A CN 202210876475A CN 115291468 B CN115291468 B CN 115291468B
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layer
projection curtain
pet
photoresist
glue
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CN115291468A (en
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曹皓
栾世奕
万辉
桂成群
宋毅
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Wuhan University WHU
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Wuhan University WHU
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/54Accessories
    • G03B21/56Projection screens
    • G03B21/60Projection screens characterised by the nature of the surface

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  • General Physics & Mathematics (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The invention provides a projection curtain with a plurality of layers of regular micro-nano textures on the surface and a preparation method thereof, wherein the projection curtain comprises the following components: a PET flexible substrate; a UV glue structural layer; the gain layer is formed on the lower layer of the UV glue structure layer and comprises a micron-sized concave reflector array formed by a plurality of concave reflectors which are arranged at intervals; the hydrophobic layer is formed on the upper layer of the UV glue structure layer and comprises a plurality of nanoscale columnar superhydrophobic structures respectively positioned at the central positions of the four adjacent concave reflectors. The preparation method comprises the steps of adopting a submicron 3D gray level photoetching technology to prepare the micro-nano structural features of the projection curtain on the photoresist; preparing a large-breadth projection curtain without a plated reflecting layer based on a photoresist template through secondary reverse molding, automatic splicing and the like; and finally, plating a metal silver layer on the surface of the projection curtain without the reflecting layer through a thermal evaporation process to serve as the reflecting layer. The gain layer and the hydrophobic layer structure of the invention enable the projection curtain to have a water drop contact angle of 161.5 degrees, a water drop rolling angle of 2.6 degrees and gain multiple of 2.34.

Description

Projection curtain with multilayer regular micro-nano textures on surface and preparation method thereof
Technical Field
The invention belongs to the technical field of projection curtain preparation, and particularly relates to a projection curtain with a plurality of layers of regular micro-nano textures on the surface and a preparation method of the projection curtain with the plurality of layers of regular micro-nano textures on the surface.
Background
Projection screens are a commercial product with a wide range of applications and a wide range of uses, however, their use is still somewhat limited. For example, the traditional projection curtain has weak light resistance and low gain effect, so that the imaging effect is poor; the traditional projection curtain needs rigid support and cannot be bent and folded too much; in addition, many projection screens are used in environments that are easily contaminated, such as humid or outdoor air, where water droplets and dust, such as rain drops, dew, etc., accumulate on the surfaces of such optical devices, which severely impair their optical performance, and frequent cleaning of such contaminants may damage the surfaces and even lead to reduced life.
The micron-sized concave reflector array is an important optical element, and is widely applied to various micro-light systems due to small volume, high integration level and excellent optical performance; in addition, the hydrophobic micro-nano structure is inspired by the hydrophobic performance of the surfaces of natural animals and plants such as lotus leaves, nepenthes and the like, and the hydrophobic micro-nano structure attracts wide attention of people. Therefore, it is a great trend to apply the micro-scale concave mirror array and the bionic micro-nano hydrophobic structure to the projection curtain and to manufacture the projection curtain with excellent optical performance and remarkable waterproof performance.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the projection curtain with the surface provided with the multilayer regular micro-nano textures and the preparation method of the projection curtain with the surface provided with the multilayer regular micro-nano textures, and the flexible projection curtain is designed and prepared by utilizing the micro concave reflector array and the nanoscale upright post-shaped super-hydrophobic structure, so that the projection curtain has the advantages of flexible bending, difficult condensation of water drops, self-cleaning dust and the like, the gain effect and the brightness of the projection curtain are improved, and the use scene of the projection curtain is expanded.
In order to solve the technical problems, the invention adopts the following technical scheme:
a projection curtain having a surface with a multi-layer regular micro-nano texture, comprising:
a PET flexible substrate;
the UV glue structure layer is formed on the surface of the PET flexible substrate;
the gain layer is formed on the lower layer of the UV glue structure layer and comprises a micron-sized concave reflector array formed by a plurality of concave reflectors which are arranged at intervals;
and the hydrophobic layer is formed on the upper layer of the UV glue structure layer and comprises a plurality of nanoscale columnar superhydrophobic structures respectively positioned at the central positions of the four adjacent concave reflectors.
Preferably, the interval between the concave reflecting mirror positioned inside and the adjacent concave reflecting mirror is 10um-20um; and/or, the dimensional parameters of the concave reflecting mirror satisfy: the caliber is 80-90 um and the depth is 8-12 um.
Preferably, each nanoscale upright post-shaped superhydrophobic structure comprises a large upright post and five small upright posts uniformly arranged in a central area and a peripheral area on the top surface of the large upright post.
Preferably, the diameter of the large upright post of the nanoscale upright post-shaped super-hydrophobic structure is 10-20um, and the height is 4-6um; the diameter of the five small upright posts is 2-4um, and the height is 4-6um.
Preferably, the dimensional parameters of the adjacent concave reflecting mirror and the nanoscale columnar super-hydrophobic structure meet the following conditions: the total width is not greater than 100um and the total height is not greater than 24um.
The preparation method of the projection curtain with the multilayer regular micro-nano textures on the surface is used for preparing the projection curtain with the multilayer regular micro-nano textures on the surface according to any scheme, and comprises the following steps of:
preparing a micron-sized concave reflecting mirror array and a nanometer-sized vertical column-shaped super-hydrophobic structure which are consistent with the structural characteristics of a projection curtain on a photoresist layer by adopting a submicron 3D gray level photoetching technology to obtain a photoresist replica;
preparing a PET-UV adhesive inverse structure mold based on the photoresist replica;
transferring the structural characteristics of the PET-UV adhesive reverse structure mold to PET-UV adhesive, and automatically splicing to obtain a large-breadth superhydrophobic self-cleaning flexible micron-sized concave lens array;
and plating a metal silver layer on the surface of the projection curtain without the reflecting layer to serve as the reflecting layer through a thermal evaporation process, so that the projection curtain with a plurality of layers of regular micro-nano textures on the surface is prepared.
Preferably, the step of preparing the micron-sized concave reflecting mirror array and the nanometer-sized upright column-shaped super-hydrophobic structure which are consistent with the structural characteristics of the projection curtain on the photoresist layer by adopting a submicron 3D gray scale photoetching technology to obtain the photoresist replica comprises the following steps:
1) Coating photoresist on glass basically, centrifuging at 450rpm for 20s, and standing for 40min;
2) Placing the photoresist on a hot plate at 90 ℃ and heating for 50min;
3) Placing the pre-baked photoresist in a submicron 3D gray scale photoetching machine, and performing patterning exposure on the photoresist;
4) Developing the exposed photoresist, and baking for 15s to obtain the photoresist replica.
Preferably, the step of preparing the PET-UV adhesive inverse structure mold based on the photoresist replica comprises the following steps:
1) Coating UV glue on the PET substrate to obtain PET-UV glue;
2) Placing the photoresist replica on the prepared PET-UV adhesive;
3) And (3) exposing the material to ultraviolet rays to obtain the PET-UV glue reverse structure mold.
Preferably, the step of transferring the structural features of the PET-UV adhesive reverse structure mold to PET-UV adhesive and automatically splicing to obtain the large-format super-hydrophobic self-cleaning flexible micron-sized concave lens array comprises the following steps:
1) Placing a PET-UV glue reverse structure mold at a designated position of an automatic splicing machine;
2) Coating UV glue on a PET substrate with the length of 1m and the width of 0.8 m;
3) Setting the thickness of the glue pressing layer as the total thickness of the structural layer;
4) Setting the splicing precision to be 1um, and starting the equipment;
5) Exposing to prepare the super-hydrophobic self-cleaning flexible micron-sized concave lens array.
Preferably, the step of plating a metal silver layer on the surface of the projection curtain without the reflecting layer through a thermal evaporation process as the reflecting layer includes:
1) Placing the super-hydrophobic self-cleaning flexible micron-sized concave lens array and target silver in a specified position of a hot-pressing chamber;
2) Vacuumizing to 5×10 -4 Pa;
3) Slowly heating up to evaporate silver wires after electrifying, wherein the duration time of the silver coating process is 50s;
4) And taking out the sample, and standing for 5 hours to obtain the projection curtain with the surface provided with the multilayer regular micro-nano textures.
Compared with the prior art, the invention has the beneficial effects that: the invention discloses a projection curtain with a multilayer regular micro-nano texture on the surface, which takes a PET flexible material and a UV glue structure layer as a substrate and successfully prepares a required micro-nano structure on the substrate, specifically, the UV glue structure layer is formed on the PET flexible substrate, a multilayer micro-nano structure is constructed in the UV glue structure layer, namely, a lower-layer micron concave reflector array and an upper-layer nanometer column-shaped super-hydrophobic structure are constructed in the UV glue structure layer, and the excellent optical performance of the micron concave reflector array and the super-hydrophobic performance of the nanometer column-shaped structure are utilized, so that the projection curtain has the advantages of flexible bending, difficult condensation of water drops, self-cleaning dust and the like, the defects of low gain multiple, difficult flexible bending, easy condensation of water drops, easy dust pollution and the like existing in the conventional general projection curtain are overcome, the gain effect and brightness of the projection curtain are improved, and the use scene of the projection curtain is expanded.
In addition, the preparation method of the projection curtain with the multilayer regular micro-nano textures on the surface comprises the steps of firstly adopting a submicron 3D gray scale photoetching technology to prepare the concave reflector array and the column-shaped super-hydrophobic structure on the surface of the projection curtain on photoresist through photoetching exposure only once without redundant steps, and controlling the error of the structural characteristics in a smaller range through calculating the exposure parameters obtained by the photoetching optical imaging inversion model in the photoetching process. Compared with the existing processing methods such as femtosecond laser and microetching, the method has the advantages of various structural designs, flexible material selection and high-efficiency low-cost large-scale production; then, coating UV glue on the PET material, placing a photoresist replica on the PET material, and exposing the PET material to ultraviolet light to prepare a PET-UV glue reverse structure mold; further, transferring the structural characteristics of the PET-UV adhesive reverse structure mold to PET-UV adhesive, and automatically splicing to obtain a large-breadth superhydrophobic self-cleaning flexible micron-sized concave lens array; finally, the surface of the projection curtain without the reflecting layer is plated with a metal silver layer through a thermal evaporation process to serve as the reflecting layer, so that the projection curtain with the surface provided with a plurality of layers of regular micro-nano textures is prepared.
Drawings
FIG. 1 is a schematic view of a projection curtain with multi-layer regular micro-nano textures in an embodiment of the present invention.
Fig. 2 is a side view of fig. 1.
FIG. 3 is a front view of a partial structure of a projection curtain with multi-layer regular micro-nano textures in an embodiment of the present invention.
Fig. 4 is a side view of fig. 3.
FIG. 5 is a flow chart of a method of preparing a projection screen having a multi-layer regular micro-nano texture thereon according to an embodiment of the present invention.
Wherein, 10-PET flexible substrate 20-UV glue structural layer 30-gain layer 31-nanoscale vertical column super-hydrophobic structure 41-concave reflecting mirror 411-large vertical column 412-small vertical column
Detailed Description
The invention will be further described with reference to examples of embodiments shown in the drawings.
As shown in fig. 1 to 4, the present embodiment discloses a projection curtain with a surface having a plurality of layers of regular micro-nano textures, including: a PET flexible substrate 10, a UV glue layer 20, a gain layer 30, and a hydrophobic layer 40.
20 and a plurality of nanoscale pillar-like superhydrophobic structures 30.
In this embodiment, since the UV glue structure layer 20 is harder, the PET flexible substrate 10 is used as a base of the UV glue structure layer 20, that is, the UV glue structure layer 20 is tightly attached to the PET flexible substrate 10, which can play a role in flexibility of the UV glue structure layer 20, so that the prepared projection curtain also has a flexibility advantage. Specifically, the size or dimensions of the PET flexible substrate and UV glue structural layer 20 may be designed according to actual requirements or experimental conditions.
The gain layer 30 is formed in the lower layer of the UV gel structure layer 20 and includes a micro-scale concave mirror array formed of a plurality of concave mirrors 31 disposed at intervals. Here, the concave reflecting mirror 31 is also of a micrometer-sized structure, and all the concave reflecting mirrors 31 are arranged identically in structure and size.
The hydrophobic layer 40 is formed in the upper layer of the UV gel structure layer 20 and includes a plurality of nano-scale pillar-shaped superhydrophobic structures 41 respectively located at the central positions of the adjacent four concave mirrors 31. Specifically, each nanoscale pillar-shaped superhydrophobic structure 41 includes one large pillar 411 and five small pillars 412 uniformly disposed on the top surface of the large pillar 411 in the central and peripheral regions, respectively. Here, the dimensions of the five small columns 412 may be set according to actual needs, and may or may not be identical. In a specific embodiment, five small posts 412 may be provided having the same width and height dimensions.
Based on the above structure, the projection curtain with the surface provided with the multilayer regular micro-nano textures is formed by taking the PET flexible material and the UV adhesive structural layer as the substrate and successfully preparing the required micro-nano structure on the substrate, specifically, the UV adhesive structural layer is formed on the PET flexible substrate, the multilayer micro-nano structure is built in the UV adhesive structural layer, namely, the micro-concave mirror array of the lower layer and the nano-pillar-shaped super-hydrophobic structure of the upper layer are utilized, and the excellent optical performance of the micro-concave mirror array and the super-hydrophobic performance of the nano-pillar-shaped structure are utilized, so that the projection curtain has the advantages of flexible bending, difficult condensation water drop, self-cleaning dust and the like, the defects of low gain multiple, difficult flexible bending, easy condensation water drop, easy dust pollution and the like existing in the conventional general projection curtain are overcome, the gain effect and the brightness of the projection curtain are improved, and the use scene of the projection curtain is expanded.
In another example, as a specific embodiment, among the plurality of concave mirrors 31 constituting the micrometer-sized concave mirror array, the interval between the concave mirror 31 positioned inside and the concave mirror 31 adjacent thereto may be set to 10um to 20um, that is, the interval between each concave mirror 31 and the concave mirror 31 in the four directions up and down and left and right thereof may be set to 10um to 20um. In addition, the dimensional parameters of the individual concave mirrors 31 may be set to values in the range of 80um to 90um in caliber of the concave mirror 31 and 8um to 12um in depth.
In another embodiment, as a specific implementation manner, in the single nanoscale upright post-shaped super-hydrophobic structure 41, the diameter of the large upright post is 10-20um, and the height is 4-6um; the diameter of the five small upright posts is 2-4um, and the height is 4-6um.
In another embodiment, as a specific implementation, the overall dimension parameters of the adjacent concave reflecting mirror 31 and the nanoscale pillar-shaped superhydrophobic structure 41 may also be set so that the total width of the two is not greater than 100um and the total height is not greater than 24um.
Based on the above-described setting ranges of the dimensional parameters of the concave mirrors 31 and the nanoscale pillar-shaped superhydrophobic structure 41, the interval between adjacent two concave mirrors 31 can be optimally set to 15um, the caliber of a single concave mirror 31 is 85um, and the depth is 10um. In addition, the width (i.e., the width of the whole) of the large pillar 411 of the nanoscale pillar-shaped superhydrophobic structure 41 is 15um and the height is 1um, and the width of the small pillar 412 is 3um and the height is 5um. By the size setting, the hydrophobic performance, the self-cleaning performance, the gain performance and the like of the flexible projection curtain with the structure can all reach the optimal design.
In another embodiment, as shown in fig. 2, a method for preparing a projection curtain with a surface having a plurality of layers of regular micro-nano textures is also provided, which is used for preparing the projection curtain with a surface having a plurality of layers of regular micro-nano textures. The specific preparation method comprises the following steps:
step S1: and preparing a micron-sized concave reflecting mirror array and a nanometer-sized vertical column-shaped super-hydrophobic structure which are consistent with the structural characteristics of the projection curtain on the photoresist layer by adopting a submicron 3D gray level photoetching technology to obtain a photoresist replica. The specific preparation process of the steps comprises:
1) Coating photoresist on glass basically, centrifuging at 500rpm for 30s, and standing for 20min;
2) Placing the photoresist on a hot plate at 90 ℃ for 50min;
3) Placing the pre-baked photoresist in a submicron 3D gray scale photoetching machine, and performing patterning exposure on the photoresist;
4) Developing the exposed photoresist, and baking for 15s to obtain the photoresist replica.
In the preparation process of the photoresist replica, the submicron 3D gray scale lithography technology can form a multilayer micro-nano structure consisting of a micron-scale concave reflecting mirror array and a nanometer-scale upright column super-hydrophobic structure through one lithography exposure. And the exposure parameters obtained by calculating the photoetching optical imaging inversion model can control the structural feature error within 0.56nm, the exposure dose corresponding to the structural features one by one can be obtained by calculating the photoetching optical imaging inversion model through limited experiments, and the frequency of the photoetching machine is controlled according to the specific structures of the micron-level concave reflecting mirror array and the nanometer-level columnar superhydrophobic structure in real time in a matching way, so that the structural features are accurately controlled. And the multi-layer micro-nano structure is realized without adding other micro-nano processing methods, so that the preparation efficiency is greatly improved, and the processing cost is reduced.
Then, step S2 is performed: and preparing the PET-UV photoresist inverse structure mold based on the photoresist replica. The specific preparation process of the steps comprises:
1) Coating UV glue on the PET substrate to obtain PET-UV glue;
2) Placing the photoresist replica on the prepared PET-UV adhesive;
3) And (3) exposing the material to ultraviolet rays to obtain the PET-UV glue reverse structure mold.
Then, step S3 is performed: and transferring the structural characteristics of the PET-UV adhesive reverse structure mold to PET-UV adhesive, and automatically splicing to obtain the large-breadth super-hydrophobic self-cleaning flexible micron-sized concave lens array. The specific preparation process of the steps comprises:
1) Placing a PET-UV glue reverse structure mold at a designated position of an automatic splicing machine;
2) Coating UV glue on a PET substrate with the length of 1m and the width of 0.8 m;
3) Setting the thickness of the glue pressing layer as the total thickness of the structural layer;
4) Setting the splicing precision to be 1um, and starting the equipment;
5) Exposing to prepare the super-hydrophobic self-cleaning flexible micron-sized concave lens array.
Then, step S4 is performed: and plating a metal silver layer on the surface of the projection curtain without the reflecting layer to serve as the reflecting layer through a thermal evaporation process, so that the projection curtain with a plurality of layers of regular micro-nano textures on the surface is prepared. The specific preparation process of the steps comprises:
1) Placing the super-hydrophobic self-cleaning flexible micron-sized concave lens array and target silver in a specified position of a hot-pressing chamber;
2) Vacuumizing to 5×10 -4 Pa;
3) Slowly heating up to evaporate silver wires after electrifying, wherein the duration time of the silver coating process is 50s;
4) And taking out the sample, and standing for 5 hours to obtain the projection curtain with the surface provided with the multilayer regular micro-nano textures.
According to the method for preparing the projection curtain with the surface provided with the multilayer regular micro-nano texture, the submicron 3D gray scale lithography technology is adopted, the gain layer and the hydrophobic layer structure characteristics of the projection curtain with the surface provided with the multilayer regular micro-nano texture can be prepared on the photoresist through one lithography exposure, and in the lithography process, the error of the structure characteristics can be controlled in a smaller range through the exposure parameters obtained by calculating the optical imaging inversion model of lithography; then, coating UV glue on the PET material, placing a photoresist replica on the PET material, and exposing the PET material to ultraviolet light to prepare a PET-UV glue reverse structure mold; further, transferring the structural characteristics of the PET-UV adhesive reverse structure mold to PET-UV adhesive, and automatically splicing to obtain a large-breadth superhydrophobic self-cleaning flexible micron-sized concave lens array; finally, the surface of the projection curtain without the reflecting layer is plated with a metal silver layer through a thermal evaporation process to serve as the reflecting layer, so that the projection curtain with the surface provided with a plurality of layers of regular micro-nano textures is prepared.
The flexible projection curtain based on the structure carries out a hydrophobic performance test and an optical performance test to verify the effect respectively, and the flexible projection curtain is specifically as follows:
1. hydrophobic Property experiment
2ul of water drops are dropped on the surface of the prepared flexible projection curtain, the water drops are rapidly placed on a freezing electron microscope sample table to start shooting, image analysis is carried out on the contact condition of the shot water drops and the surface of the super-hydrophobic projection curtain, and the ratio of air to water drops on the surface of the micro-nano structure is 9.63:0.37, indicating that the air well supports the water droplets.
In addition, 2ul of water drops are dropped on the surface of the prepared flexible projection curtain, and the water drops are rapidly placed on a sample stage of a KRUSS-DSA100L liquid drop shape analyzer to start shooting, and a sitting drop method is selected in instrument software to analyze, so that the contact angle of the water drops is 161.5 degrees (the average value is obtained three times), and compared with the surface without a hydrophobic micro-nano structure (the contact angle is 105 degrees), the contact angle is improved by 48.7 degrees; and (3) slowly tilting the sample table at a constant speed, photographing at a high speed by a camera in real time, obtaining pictures of the moment before and after the liquid drops slide down, and analyzing to obtain the surface of which the water drop rolling angle is 2.6 degrees (the average value is obtained in three times) and has no hydrophobic micro-nano structure, wherein the water drop cannot roll.
2. Optical performance experiment:
the prepared flexible projection curtain is vertically placed on a flat white wall, a collimating light source of LabshpereKI-120 is placed at 45 degrees on the left side and the right side, a Photo-Research company PR-705 radiation spectrophotometer is placed right in front of the flexible projection curtain for measurement, the light reflectivity is 121%, the CIE standard is adopted to calculate the gain multiple of 2.34, the curtain without the gain micro-nano structure has the reflectivity of 63%, and the gain multiple of 0.57.
According to the experimental data, the flexible projection curtain disclosed by the invention is based on the PET flexible substrate and the UV adhesive structural layer, so that the projection curtain has the advantage of flexible bending. And the micro-scale concave reflector array is formed on the lower layer of the UV glue layer, and the size and the interval of the reflectors are set as necessary, so that the gain effect and the brightness are improved, and the use scene of the UV glue is expanded. In addition, through forming nano-scale stand hydrophobic structure respectively in the upper strata of UV glued structure layer and corresponding to the central point of region between four adjacent speculums to nano-scale stand hydrophobic structure comprises a big stand and five little stands of setting on big stand, through the hydrophobic structure that stacks big stand and little stand that set gradually formed, when the water droplet was attached to projection curtain surface, can make the air with friendly support of water droplet, thereby make the projection curtain have the advantage of difficult condensation water droplet, self-cleaning dust.
The scope of the present invention is not limited to the above-described embodiments, and it is apparent that various modifications and variations can be made to the present invention by those skilled in the art without departing from the scope and spirit of the invention. It is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims (6)

1. A projection curtain having a surface with a plurality of layers of regular micro-nano textures, comprising:
a PET flexible substrate;
the UV glue structure layer is formed on the surface of the PET flexible substrate;
the gain layer is formed on the lower layer of the UV glue structure layer and comprises a micron-sized concave reflector array formed by a plurality of concave reflectors which are arranged at intervals;
the hydrophobic layer is formed on the upper layer of the UV glue structure layer and comprises a plurality of nanoscale columnar superhydrophobic structures respectively positioned at the central positions of the four adjacent concave reflectors; each nanoscale upright post-shaped superhydrophobic structure comprises a large upright post and five small upright posts uniformly arranged in the center and surrounding areas on the top surface of the large upright post;
the interval between the concave reflecting mirror positioned inside and the adjacent concave reflecting mirror is 10um-20um; the dimensional parameters of the concave reflecting mirror satisfy: the caliber is 80-90 um, and the depth is 8-12 um;
the diameter of the large upright post of the nanoscale upright post-shaped super-hydrophobic structure is 10-20um, and the height is 4-6um; the diameter of the five small upright posts is 2-4um, and the height is 4-6um;
the dimension parameters of the adjacent concave reflecting mirror and the nanoscale columnar super-hydrophobic structure are as follows: the total width is not greater than 100um and the total height is not greater than 24um.
2. A method for preparing a projection curtain with a multi-layer regular micro-nano texture on the surface, which is used for preparing the projection curtain with the multi-layer regular micro-nano texture on the surface according to claim 1, and is characterized by comprising the following steps:
preparing a micron-sized concave reflecting mirror array and a nanometer-sized vertical column-shaped super-hydrophobic structure which are consistent with the structural characteristics of a projection curtain on a photoresist layer by adopting a submicron 3D gray level photoetching technology to obtain a photoresist replica;
preparing a PET-UV adhesive inverse structure mold based on the photoresist replica;
transferring the structural characteristics of the PET-UV adhesive reverse structure mold to PET-UV adhesive, and automatically splicing to obtain a large-breadth superhydrophobic self-cleaning flexible micron-sized concave lens array;
and plating a metal silver layer on the surface of the projection curtain without the reflecting layer to serve as the reflecting layer through a thermal evaporation process, so that the projection curtain with a plurality of layers of regular micro-nano textures on the surface is prepared.
3. The method for preparing a projection curtain with a multi-layer regular micro-nano texture on the surface according to claim 2, wherein the step of preparing a micron-sized concave mirror array and a nanometer-sized upright post-shaped super-hydrophobic structure which are consistent with the structural characteristics of the projection curtain on a photoresist layer by adopting a submicron 3D gray scale lithography technology to obtain a photoresist replica comprises the following steps:
1) Coating photoresist on glass basically, centrifuging at 450rpm for 20s, and standing for 40min;
2) Placing the photoresist on a hot plate at 90 ℃ and heating for 50min;
3) Placing the pre-baked photoresist in a submicron 3D gray scale photoetching machine, and performing patterning exposure on the photoresist;
4) Developing the exposed photoresist, and baking for 15s to obtain the photoresist replica.
4. The method for preparing a projection curtain with a multi-layer regular micro-nano texture on the surface according to claim 2, wherein the step of preparing a PET-UV adhesive inverse structure mold based on the photoresist replica comprises the following steps:
1) Coating UV glue on the PET substrate to obtain PET-UV glue;
2) Placing the photoresist replica on the prepared PET-UV adhesive;
3) And (3) exposing the material to ultraviolet rays to obtain the PET-UV glue reverse structure mold.
5. The method for preparing the projection curtain with the multilayer regular micro-nano textures on the surface according to claim 2, wherein the step of transferring the structural characteristics of the PET-UV adhesive reverse structure mold onto PET-UV adhesive and automatically splicing to obtain the large-format super-hydrophobic self-cleaning flexible micro-scale concave lens array comprises the following steps:
1) Placing a PET-UV glue reverse structure mold at a designated position of an automatic splicing machine;
2) Coating UV glue on a PET substrate with the length of 1m and the width of 0.8 m;
3) Setting the thickness of the glue pressing layer as the total thickness of the structural layer;
4) Setting the splicing precision to be 1um, and starting the equipment;
5) Exposing to prepare the super-hydrophobic self-cleaning flexible micron-sized concave lens array.
6. The method for preparing the projection curtain with the multilayer regular micro-nano textures on the surface according to claim 2, wherein the step of plating the metal silver layer on the surface of the projection curtain without the reflecting layer through a thermal evaporation process to serve as the reflecting layer comprises the following steps:
1) Placing the super-hydrophobic self-cleaning flexible micron-sized concave lens array and target silver in a specified position of a hot-pressing chamber;
2) Vacuumizing to 5×10 -4 Pa;
3) Slowly heating up to evaporate silver wires after electrifying, wherein the duration time of the silver coating process is 50s;
4) And taking out the sample, and standing for 5 hours to obtain the projection curtain with the surface provided with the multilayer regular micro-nano textures.
CN202210876475.1A 2022-07-25 2022-07-25 Projection curtain with multilayer regular micro-nano textures on surface and preparation method thereof Active CN115291468B (en)

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