CN115289704B

CN115289704B - Temperature control device and temperature control method

Info

Publication number: CN115289704B
Application number: CN202210725903.0A
Authority: CN
Inventors: 刘紫阳
Original assignee: Beijing Jingyi Automation Equipment Co Ltd
Current assignee: Beijing Jingyi Automation Equipment Co Ltd
Priority date: 2022-06-23
Filing date: 2022-06-23
Publication date: 2023-10-13
Anticipated expiration: 2042-06-23
Also published as: CN115289704A

Abstract

The invention relates to the technical field of heat exchange, and provides a temperature control device and a temperature control method. The temperature control device comprises a first temperature control channel, a second temperature control channel, a switching device and a cold accumulator, wherein the first temperature control channel comprises a first circulating liquid loop and a first refrigerating system exchanging heat with the first circulating liquid loop; the second temperature control channel comprises a second circulating liquid loop and a second refrigerating system exchanging heat with the second circulating liquid loop; the switching device is connected with the first circulating liquid loop and the second circulating liquid loop and is suitable for switching on and off of the first circulating liquid loop and the load device and switching on and off of the second circulating liquid loop and the load device; the regenerator comprises a cold accumulation passage and a heat absorption passage which exchanges heat with the cold accumulation passage, the cold accumulation passage is communicated with the first refrigerating system, and the heat absorption passage is communicated with the second refrigerating system. According to the temperature control device provided by the invention, the cold accumulator is arranged to store the cold quantity in the empty load state, so that the power consumption of the temperature control device is reduced, and the energy utilization rate is improved.

Description

Temperature control device and temperature control method

Technical Field

The invention relates to the technical field of heat exchange, in particular to a temperature control device and a temperature control method.

Background

In the etching process in the field of semiconductor manufacturing, the radio frequency device can generate a large amount of heat, and the temperature change of a wafer can influence etching precision, so that the temperature of a processing cavity is required to be accurately controlled in the wafer processing process, a temperature control device using a refrigerating system is generally adopted to continuously introduce a heat exchange medium into a processing platform, so that the generated heat is taken away in time, and the temperature control of the wafer processing environment is realized. In the different processing steps of the etching process, the required processing environment temperature is greatly different, and the wafer needs to wait for the heat exchange medium to be adjusted to a new target temperature before the next processing step can be performed. In order to shorten the temperature rise and fall time of the heat exchange medium and improve the processing efficiency of the wafer, the latest temperature control devices are all designed in a double-channel way, one channel provides a low-temperature medium, the other channel provides a high-temperature medium, when the processing cavity needs high temperature or low temperature, the channel with the corresponding temperature is selected to be communicated with the processing cavity, and the other channel is short-circuited in an inlet and outlet pipeline. The channel communicated with the processing cavity needs to take away heat in the processing cavity in time, the refrigerating system is in a working condition that the heat load is continuously changed, the other channel is free of external heat load and in an empty load running state, and the refrigerating system only needs to output a small amount of cold energy to maintain the temperature of circulating liquid constant.

In the related art, the temperature control of a low-temperature channel of the double-channel temperature control device can reach-70 ℃ or lower, and a multi-stage cascade refrigeration system is generally used for achieving the refrigeration target temperature; the high Wen Tongdao temperature is controlled at about 10 ℃ and is generally realized by a single-stage refrigeration system. Because the cascade refrigeration system has low energy efficiency ratio, the low-temperature channel has high power consumption and low energy efficiency. Meanwhile, in order to maintain stable temperature control in the idle load state, the channels in the idle load state need to be operated in a partially unloaded state, and energy waste is caused.

Disclosure of Invention

The invention provides a temperature control device which is used for solving the defects of high power consumption and low energy efficiency of a refrigeration system in the prior art. According to the operation characteristics of the switching device, at any moment, one channel refrigerating system communicated with the processing cavity is in a working condition of heat load change, and the other channel is in an empty load state. By arranging the cold accumulator, only a small part of cold energy is needed for maintaining constant temperature control of the circulating system for the refrigerating system in an empty load state, and redundant cold energy is in a form of supercooling liquid in the cold accumulator, so that the cold energy is transferred into the low-temperature channel refrigerating system, and the cold energy stored in the supercooled liquid of the cold accumulator is gradually released in the running process of the refrigerating system, so that the energy efficiency ratio of a refrigerating system loop where a heat absorption channel of the cold accumulator is positioned is improved, namely the power consumption of the temperature control device is reduced. The high Wen Tongdao stores the surplus cold in the regenerator and transfers the surplus cold to the low-temperature channel, thereby improving the energy utilization rate.

An embodiment of a first aspect of the present invention provides a temperature control device, including:

the first temperature control channel comprises a first circulating liquid loop and a first refrigerating system exchanging heat with the first circulating liquid loop;

the second temperature control channel comprises a second circulating liquid loop and a second refrigerating system exchanging heat with the second circulating liquid loop;

the switching device is connected with the first circulating liquid loop and the second circulating liquid loop and is suitable for switching on and off of the first circulating liquid loop and the load device and switching on and off of the second circulating liquid loop and the load device;

the cold accumulator comprises a cold accumulation passage and a heat absorption passage which exchanges heat with the cold accumulation passage, the cold accumulation passage is communicated with the first refrigerating system, and the heat absorption passage is communicated with the second refrigerating system.

According to the temperature control device provided by the invention, the cold accumulator comprises a shell and a heat exchange tube arranged in the shell, the cold accumulation passage is formed between the shell and the heat exchange tube, and the heat absorption passage is formed by a space in the heat exchange tube.

According to the temperature control device provided by the invention, the first refrigeration system comprises a multi-stage refrigeration loop, and the cold accumulation passage is communicated with one stage of refrigeration loop.

According to the temperature control device provided by the invention, the second refrigeration system comprises a second compressor, a second condenser, a second throttling element and a second evaporator which form a circulation, and the outlet end of the second evaporator is provided with a pressure regulating valve.

According to the temperature control device provided by the invention, the cold accumulator is a tank type heat exchanger.

According to the temperature control device provided by the invention, the heat exchange tube is a spiral coil.

According to the temperature control device provided by the invention, the multi-stage refrigeration loop comprises a first-stage refrigeration loop and a second-stage refrigeration loop, the first-stage refrigeration loop and the second-stage refrigeration loop are suitable for heat exchange, the second-stage refrigeration loop and the first circulating liquid loop are suitable for heat exchange, and the cold accumulation channel is communicated with the first-stage refrigeration loop or the second-stage refrigeration loop.

According to the temperature control device provided by the invention, the cold accumulation passage is communicated with the first-stage refrigeration loop, and a first pressure sensor is arranged between the second compressor and the second evaporator of the second refrigeration system.

According to the temperature control device provided by the invention, the inlet end and/or the outlet end of the cold accumulation passage are/is provided with the first temperature sensor.

An embodiment of the second aspect of the present invention provides a temperature control method, for a temperature control device as described above, including:

acquiring a first temperature of an inlet end of the cold accumulation passage and a set temperature difference between the cold accumulation passage and the heat absorption passage;

determining a target value of the evaporation temperature at the outlet end of the heat absorption passage, wherein the target value is the difference between the first temperature and the set temperature difference;

acquiring the superheat degree of the inlet end of a second compressor, wherein the second compressor is positioned at the outlet end of the heat absorption passage;

and determining that the superheat exceeds a first set threshold value, and controlling the target value to rise or fall.

According to the temperature control method provided by the invention, the step of determining that the superheat exceeds a first set threshold value and controlling the target value to rise or fall comprises the following steps:

determining that the superheat degree is larger than a first threshold, wherein the first threshold is the upper limit of the first set threshold;

the target value is controlled to rise a first set value, and the superheat degree in a first preset duration is obtained;

the step of circularly executing the steps of controlling the target value to rise by a first set value and obtaining the superheat degree in a first preset time period if the superheat degrees are determined to be larger than the first threshold value;

And until the superheat degree in the first preset time period is smaller than or equal to the first threshold value.

determining that the superheat degree is smaller than a second threshold, wherein the second threshold is the lower limit of the first set threshold;

controlling the target value to reduce a second set value, and obtaining the superheat degree in a second preset time period;

determining that the superheat degrees are smaller than the second threshold value, and circularly executing the steps of controlling the target value to reduce a second set value and obtaining the superheat degrees in a second preset time period;

and until the superheat degree in the second preset time period is greater than or equal to the second threshold value.

The temperature control method provided by the invention further comprises the following steps:

determining an upper limit value of the target value based on an operating temperature of the second circulating liquid circuit;

and controlling the target value to be smaller than or equal to the upper limit value.

According to the temperature control method provided by the invention, in the step of determining the upper limit value of the target value based on the operation temperature of the second circulating liquid circuit,

Based on the temperature range of the second circulating liquid loop being at a second set threshold, dividing the second set threshold into a plurality of temperature sections according to set intervals;

and controlling the running temperature to be at the minimum value in the current temperature section, disconnecting the heat absorption passage, acquiring the pressure value of the inlet end of the second compressor and the evaporating temperature of the refrigerant corresponding to the pressure value, and determining the evaporating temperature as the upper limit value.

acquiring a pressure value of an inlet end of the second compressor;

determining an evaporation temperature of the refrigerant based on the pressure value and a refrigerant type of an inlet end of the second compressor;

and adjusting the flow of the refrigerant in the second heat exchange passage through a PID algorithm based on the difference value between the evaporation temperature and the target value.

According to the temperature control method provided by the invention, the second refrigeration system comprises a second compressor, a second condenser, a second throttling element and a second evaporator which form a circulation, and the outlet end of the second evaporator is provided with a pressure regulating valve.

The temperature control device comprises a first temperature control channel, a second temperature control channel, a switching device and a cold accumulator, wherein the switching device is connected with a first circulating liquid loop of the first temperature control channel, the switching device is also connected with a second circulating liquid loop of the second temperature control channel so as to regulate and control the temperature control device to output circulating liquid with different temperatures, the cold accumulation channel of the cold accumulator is communicated with a first refrigerating system, the heat absorption channel of the cold accumulator is communicated with a second refrigerating system, cold energy in the second refrigerating system is provided for the first refrigerating system through the cold accumulator, the first refrigerating system is cooled, the cold energy in the second refrigerating system is fully utilized, the structure is simple, the cold energy utilization rate is high, and the power consumption of the temperature control device is reduced.

Further, the temperature control method provided by the invention controls the target value of the outlet end of the heat absorption passage of the regenerator, controls the temperature difference between the cold accumulation passage and the heat absorption passage of the regenerator to be a set temperature difference, and regulates the target value through the superheat degree of the inlet end of the second compressor, so that the heat exchange efficiency and the cold accumulation amount can be ensured.

Drawings

In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a temperature control device according to the present invention;

FIG. 2 is a schematic diagram of another temperature control device according to the present invention.

Wherein, FIG. 1 illustrates that the first refrigeration system comprises a two-stage refrigeration loop, and the first heat exchanger is communicated with the first-stage refrigeration loop; FIG. 2 illustrates a first refrigeration system including a two-stage refrigeration circuit with a first heat exchanger in communication with a second stage refrigeration circuit;

FIG. 3 is a schematic flow chart of a temperature control method according to the present invention;

FIG. 4 is a second schematic flow chart of the temperature control method according to the present invention

FIG. 5 is a third flow chart of the temperature control method according to the present invention

FIG. 6 is a flow chart of a temperature control method according to the present invention;

FIG. 7 is a flow chart of a temperature control method according to the present invention;

FIG. 8 is a flow chart of a temperature control method according to the present invention.

Reference numerals:

1. a first compressor; 2. a first condenser; 3. a first throttle member; 4. a condensing evaporator; 5. a first temperature sensor; 6. a third compressor; 7. a third throttle member; 8. a first evaporator; 9. a first water tank; 10. a first circulation pump; 11. a second temperature sensor; 12. a switching device; 13. a first heat exchanger; 14. a second compressor; 15. a second condenser; 16. a second throttle member; 17. a second evaporator; 18. a second water tank; 19. a second circulation pump; 20. a third temperature sensor; 21. a fourth throttle member; 22. a pressure regulating valve; 23. a fourth temperature sensor; 24. a first pressure sensor; 25. and a second pressure sensor.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Furthermore, in the description of the present invention, unless otherwise indicated, the meaning of "a plurality", "a plurality of groups" is two or more.

Prior to describing embodiments of the present invention, an energy efficiency ratio in a refrigeration system will be described. Definition of the energy efficiency ratio of a refrigeration system: the higher the energy efficiency ratio, the more energy-efficient. Assuming a single stage refrigeration cycle energy efficiency ratio of 2, that is, a high temperature path refrigeration system compressor power of 1kw, there is 2kw for the refrigeration capacity in the evaporator.

The same applies to the overlapping single refrigeration circuit, if the refrigeration capacity of the first evaporator 8 is 2kw, then the third compressor 6 power needs 1kw; the refrigerating capacity of the condensation evaporator 4 at this time needs to be the sum of the third compressor 6 plus the first evaporator 8, i.e. 3kw, so the power of the first compressor 1 needs to be 1.5kw. Then in the low temperature channel, the refrigerating capacity of the entering circulating liquid is 2kw, but the total compressor power is 1.5+1=2.5 kw, so the energy efficiency ratio of the cascade refrigerating system is 2/2.5=0.8, and the energy efficiency is much lower than that of the single-stage refrigerating system.

An embodiment of the present invention, as shown in fig. 1 and 2, provides a temperature control device, including: a first temperature control channel, a second temperature control channel, a switching device 12 and a first heat exchanger 13.

The first temperature control channel and the second temperature control channel can be understood as two temperature control systems with different heat exchange temperature ranges, the embodiment and the following embodiments take the first temperature control channel as a low temperature channel and the second temperature control channel as a high temperature channel as an example for explanation, and the difference between the low temperature channel and the high temperature channel is that the lowest temperature range reached by the low temperature channel is lower than the lowest temperature range reached by the high temperature channel, for example, the lowest temperature reached by the low temperature channel can be-70 ℃, the lowest temperature reached by the high temperature channel can be-10 ℃, and the highest temperature reached by the high temperature channel can be 90 ℃.

The first temperature control channel comprises a first circulating liquid loop and a first refrigerating system exchanging heat with the first circulating liquid loop, and the second temperature control channel comprises a second circulating liquid loop and a second refrigerating system exchanging heat with the second circulating liquid loop; the switching device 12 is connected with the first circulating liquid loop and the second circulating liquid loop, the switching device 12 is suitable for switching on and off of the first circulating liquid loop and the load device, and the switching device 12 is suitable for switching on and off of the second circulating liquid loop and the load device.

The first temperature control channel and the second temperature control channel are matched with the switching device 12, when the load equipment needs to be supplied with low-temperature circulating liquid, the switching device 12 controls the first circulating liquid loop to be communicated with the load device to form a circulating loop, and at the moment, the load device controls the second circulating liquid loop to be short-circuited (the second circulating liquid loop forms a circulating loop); similarly, when the load device needs to supply the high-temperature circulating liquid, the switching device 12 controls the second circulating liquid circuit to communicate with the load device to form a circulating circuit, and at this time, the load device controls the first circulating liquid circuit to be shorted (the first circulating liquid circuit forms a circulating circuit). That is, at any one time, only one circulating liquid loop is communicated with the load device, so that the thermal load change occurs, and the other channel is necessarily in an empty load state.

In some cases, the first temperature-controlled passage includes a first circulating liquid circuit and a first refrigeration system that exchanges heat with the first circulating liquid circuit, the first refrigeration system including a plurality of stages of refrigeration circuits that exchange heat in sequence. The first refrigerating system provides cold energy for the first circulating liquid loop so as to cool the circulating liquid, the first refrigerating system comprises a multi-stage refrigerating loop, the multi-stage refrigerating loops exchange heat sequentially, different refrigerants are combined, the evaporating temperature is lowered step by step, namely the lowest temperature which can be reached by the first refrigerating system is lowered step by step, and the evaporating temperature provided by the refrigerant of the last-stage refrigerating loop meets the heat exchange requirement of the circulating liquid in the first circulating liquid loop. The mode that satisfies the refrigeration demand through heat transfer step by step, the temperature that can reach is lower, has widened the refrigeration temperature district for the temperature that can reach of first temperature control passageway is lower.

The first refrigeration system uses an cascade system based on the gradual decrease of refrigeration capacity in the cascade system, the upper-stage refrigeration capacity=the lower-stage refrigeration capacity+the lower-stage compressor heating value. So as the number of cascade system stages increases, the system energy efficiency ratio decreases. The cascade system is mainly applied to realize lower temperature requirements by using different types of refrigerants under the condition that a single refrigerant cannot meet the requirements.

The first temperature control channel uses a cascade system, and the most main reason is that in practical application, the circulating fluid set temperature of the first circulating fluid loop is too low to be realized by using a single refrigerant, and only a multistage cascade system can be used. The basis for using several stages of overlapping systems is that the temperature is typically-40 ℃ to-80 ℃, two stages of overlapping are used, and if lower than-80 ℃, three stages of overlapping are used, and four stages of overlapping are also possible.

According to the temperature control device, the multistage refrigeration loop is arranged in the first refrigeration system, so that the capacity of the compressor in the first refrigeration system can be reduced, the overall power consumption of the temperature control device is reduced, and the cost of the temperature control device is further reduced. Of course, the first refrigeration system includes a multi-stage refrigeration circuit, the first heat exchanger 13 includes a first heat exchange passage and a second heat exchange passage that exchange heat, the first heat exchange passage is in communication with one of the refrigeration circuits of the first refrigeration system, and the second heat exchange passage is in communication with the second refrigeration system.

The first refrigeration system is communicated with the second refrigeration system through a first heat exchanger 13, and the first heat exchanger 13 can split a part of refrigerant in the second refrigeration system. When the system adopts a fixed-frequency compressor and the air transmission capacity of the compressor is fixed, and when the heat exchange capacity requirement of the second evaporator 17 is not high, namely the flow of the refrigerant in the second evaporator 17 is small, the redundant flow of the refrigerant absorbs heat in the second heat exchange passage of the first heat exchanger 13 through the refrigerant in the second refrigeration system, so that the suction pressure of the second compressor 14 can be improved, and the power consumption of the second compressor 14 can be reduced.

Of course, when the first refrigeration system is provided with a single-stage refrigeration circuit, the first heat exchanger 13 may still be provided, that is, the first heat exchange path of the first heat exchanger 13 is in communication with the refrigeration circuit of the first refrigeration system, and the second heat exchange path is in communication with the second refrigeration system.

In some embodiments, referring to fig. 1 and 2, the first heat exchanger 13 is a regenerator, the first heat exchange path is a regenerator path, and the second heat exchange path is an absorber path. The cold accumulator is used for supercooling the refrigerant in the refrigerating loop connected with the cold accumulator, and after supercooling, the refrigerating capacity of the refrigerating loop can be improved, so that the refrigerating capacity of the first refrigerating system is improved.

When the first refrigeration system is provided with multiple stages of refrigeration loops, each stage of refrigeration loop can exchange heat with the second refrigeration system (not shown in the figure) through the first heat exchangers, that is, the first heat exchangers are arranged in plurality, the second refrigeration system is communicated with the second heat exchange channels of the first heat exchangers, and each stage of refrigeration loop of the first refrigeration system is communicated with the first heat exchange channel of one first heat exchanger.

Referring to fig. 1 and 2, a first refrigeration system will be described as including a two-stage refrigeration circuit, which may be referred to as a first-stage refrigeration circuit and a second-stage refrigeration circuit. The first stage refrigeration circuit comprises a first condenser 2, a first throttling element 3, a condensation evaporator 4 and a first compressor 1 which are connected to form a circulation circuit, and the second stage refrigeration circuit comprises a third compressor 6, a condensation evaporator 4, a third throttling element 7 and a first evaporator 8 which are connected to form a circulation circuit. The first stage refrigeration circuit may be understood as a high temperature stage refrigeration circuit and the second stage refrigeration circuit may be understood as a low temperature stage refrigeration circuit.

The first-stage refrigeration loop and the second-stage refrigeration loop are suitable for heat exchange, the second-stage refrigeration loop and the first circulating liquid loop are suitable for heat exchange, the first heat exchange channel is communicated with the first-stage refrigeration loop or the second-stage refrigeration loop, and the first heat exchanger 13 can be flexibly arranged.

As shown in fig. 1, a first heat exchange path of the first heat exchanger 13 is connected between the first condenser 2 and the first throttling element 3, and the first heat exchange path supercools the refrigerant of the first-stage refrigeration circuit (which can be understood as a high-temperature-stage refrigeration circuit), so that the refrigerating capacity of the high-temperature-stage refrigeration circuit is improved after the refrigerant is supercooled, and the total refrigerating capacity of the first refrigeration system is further improved.

As shown in fig. 2, the first heat exchange path of the first heat exchanger 13 is connected between the condensation evaporator 4 and the third throttling element 7, and the first heat exchange path performs liquid supercooling on the refrigerant of the second-stage refrigeration circuit (which can be understood as a low-temperature-stage refrigeration circuit), so as to improve the refrigeration capacity of the low-temperature-stage refrigeration circuit, and further improve the total refrigeration capacity of the first refrigeration system.

As shown in fig. 1 and 2, the first heat exchanger 13 is a tank heat exchanger, the tank heat exchanger includes a housing and a heat exchange tube disposed in the housing, the first heat exchange passage is a space between the housing and the heat exchange tube, and the second heat exchange passage is a space in the heat exchange tube. The tank heat exchanger has simple structure and good cold accumulation effect.

And the redundant refrigerating capacity in the second refrigerating system is used for carrying out additional supercooling on the refrigerant liquid in the first refrigerating system in the tank body through the tank heat exchanger, and the refrigerating capacity of the refrigerating loop is improved after the liquid is supercooled, namely the total refrigerating capacity of the first refrigerating system is improved.

In some embodiments, the heat exchange tube is a spiral coil, the heat exchange area of the spiral coil is larger, and the heat exchange effect is better.

In some embodiments, referring to fig. 1 and 2, the second refrigeration system includes a second compressor 14, a second condenser 15, a second throttling element 16, and a second evaporator 17 in communication with a circulation circuit, with a fourth throttling element 21 disposed between an outlet end of the second condenser 15 and an inlet end of the second heat exchange path, the outlet end of the second heat exchange path being located at the inlet end of the second compressor 14. The second heat exchange passage plays a role in evaporating and absorbing heat in the second refrigerating system, and then supercools the refrigerant in the first refrigerating system.

In some embodiments, referring to fig. 2, the outlet end of the second evaporator 17 is provided with a pressure regulating valve 22. By providing the pressure regulating valve 22, the pressure at the outlet end of the second evaporator 17 is kept stable.

Referring to fig. 1, the outlet end of the second evaporator 17 is not provided with a pressure regulating valve 22, and during the operation of the temperature control device, the vapor pressure at the outlet end of the second evaporator 17 and the vapor pressure at the outlet end of the second heat exchange path are within a preset range, that is, the minimum temperatures reached by the condensation evaporator 4 and the second evaporator 17 are within a preset temperature range, so that the vapor pressure at the outlet end of the second evaporator 17 may not be regulated.

The outlet end of the second evaporator 17 shown in fig. 1 may be provided with a pressure regulating valve 22. After the operation condition of the first stage refrigeration circuit shown in fig. 1 is adjusted, the pressure regulating valve 22 can ensure the stable operation of the second compressor 14.

In some embodiments, referring to fig. 1, the first heat exchange path communicates with a first stage refrigeration circuit, and a second pressure sensor 25 is disposed between the second compressor 14 and the second evaporator 17 of the second refrigeration system. The second pressure sensor 25 is used to detect the pressure at the inlet end of the second compressor 14.

Based on the difference between the measured value and the target value of the second pressure sensor 25, a PID (proportional integral derivative) algorithm is called to adjust the opening degree of the fourth throttle member 21 to control the heat exchange amount in the first heat exchanger 13.

In some embodiments, referring to fig. 2, the first heat exchange path communicates with a second stage refrigeration circuit, the outlet end of which is provided with a first pressure sensor 24. The first pressure sensor 24 is used to detect the vapor pressure at the inlet end of the second compressor 14.

Based on the difference between the measured value and the target value of the first pressure sensor 24, a PID (proportional integral derivative) algorithm is called to adjust the opening degree of the fourth throttle member 21 to control the heat exchange amount in the first heat exchanger 13.

As shown in fig. 2, the first pressure sensor 24 cooperates with the pressure regulating valve 22 such that the vapor pressure at the inlet end of the second compressor 14 meets operating conditions.

In some embodiments, the first heat exchange passage is located before an inlet of a throttle of the refrigeration circuit. Referring to fig. 1 and 2, a first heat exchange path is connected in series with a first condenser 2, and a refrigerant is supercooled by two-stage heat exchange.

In some embodiments, as shown in fig. 2, the inlet end of the first heat exchange path is provided with a first temperature sensor 5 to detect the temperature of the refrigerant flowing into the first heat exchange path, that is, the temperature before supercooling of the refrigerant, so as to adjust the cooling capacity supplied by the second heat exchange path according to the temperature, thereby guaranteeing the supercooling effect.

The first temperature sensor 5 in fig. 1 may also be disposed at the inlet end of the first heat exchange path.

Referring to fig. 1 and 2, the inlet end of the second compressor 14 is provided with a fourth temperature sensor 23.

Referring to fig. 1 and 2, the first circulating liquid circuit includes a first water tank 9, a first circulating pump 10, and a second temperature sensor 11, the circulating liquid in the first water tank 9 flows to a switching device 12 under the action of the first circulating pump 10, the circulating liquid in the first water tank 9 is adapted to flow into the first evaporator 8 and exchange heat with the refrigerant in the first evaporator 8, the first circulating pump 10 may be disposed upstream or downstream of the first evaporator 8, and the second temperature sensor 11 may be disposed at an inlet end of the switching device 12, as needed.

Of course, the first circulating liquid circuit may also be provided with a first heater provided between the outlet end of the first evaporator 8 and the inlet end of the switching device 12 to make accurate adjustments to the temperature of the circulating liquid in the first circulating liquid circuit.

The second circulation liquid circuit includes a second water tank 18, a second circulation pump 19, and a third temperature sensor 20, the circulation liquid in the second water tank 18 flows to the switching device 12 under the action of the second circulation pump 19, the circulation liquid in the second water tank 18 is suitable for flowing into the second evaporator 17 and exchanging heat with the refrigerant in the second evaporator 17, the second circulation pump 19 may be disposed upstream or downstream of the second evaporator 17, and the third temperature sensor 20 may be disposed at the inlet end of the switching device 12 as needed.

Of course, the second circulating liquid circuit may also be provided with a second heater provided between the outlet end of the second evaporator 17 and the inlet end of the switching device 12 to make accurate adjustments to the temperature of the circulating liquid in the second circulating liquid circuit.

The first throttling element 3, the second throttling element 16 and the third throttling element 7 can be selected from thermal expansion valves or electronic expansion valves.

Based on the above temperature control device, as shown in fig. 1 to 4, a temperature control method is provided, which includes:

Step 110, obtaining a first temperature of an inlet end of a first heat exchange passage and a set temperature difference between the first heat exchange passage and a second heat exchange passage;

referring to fig. 2, the first temperature may be a measured value T1 of the first temperature sensor 5, and a set temperature difference between the first heat exchange path and the second heat exchange path may be a set value in the system, such as 10 ℃, 15 ℃, 20 ℃. The first heat exchange passage and the second heat exchange passage have a temperature difference so that heat exchange is performed between the first heat exchange passage and the second heat exchange passage.

Step 120, determining a target value Tesv of the evaporation temperature at the outlet end of the second heat exchange passage, wherein the target value Tesv is the difference between the first temperature and the set temperature difference;

the target value Tesv is determined according to the first temperature T1 so as to ensure the heat exchange temperature difference of the first heat exchange passage and the second heat exchange passage, and ensure the heat exchange efficiency of the first heat exchange passage and the second heat exchange passage so as to improve the cold accumulation amount of the first heat exchanger.

Step 130, obtaining the superheat SH of the inlet end of the second compressor, wherein the second compressor is positioned at the outlet end of the second heat exchange passage;

the refrigerant in the second heat exchange path flows to the second compressor, and the refrigerant in the second heat exchange path affects the superheat at the inlet end of the second compressor.

The superheat SH is the superheated steam temperature minus the saturation temperature at the corresponding pressure.

The measured value of the first pressure sensor 24 or the second pressure sensor 25 is collected, the measured value is the corresponding pressure, and then the evaporating temperature corresponding to the pressure is calculated according to the characteristic of the refrigerant type of the second refrigerating system. A measurement value of the fourth temperature sensor 23, which is the superheated steam temperature, is acquired. Based on the two measurements, the degree of superheat SH can be calculated.

In step 140, it is determined that the degree of superheat SH exceeds the first set threshold, and the control target value Tesv is raised or lowered.

The first set threshold is a range of values, such as 8-15 ℃, and the degree of superheat SH exceeding the first set threshold is divided into an upper limit (15 ℃) where the degree of superheat is greater than the first set threshold, and a lower limit (8 ℃) where the degree of superheat SH is less than the first set threshold. When the superheat degree SH is larger than the upper limit of the first set threshold value, the control target value Tesv is increased, so that the temperature difference between the first heat exchange passage and the second heat exchange passage is increased, and the heat exchange efficiency between the first heat exchange passage and the second heat exchange passage is improved; when the degree of superheat SH is smaller than the lower limit of the first set threshold value, the control target value Tesv decreases.

Taking the structure shown in fig. 1 and 2 as an example, when the heat exchange amount of the second heat exchange passage and the first heat exchange passage is constant, the superheat SH of the inlet end of the second compressor is large when the refrigerant flow rate in the second heat exchange passage is small, and the superheat SH of the inlet end of the second compressor is small when the refrigerant flow rate in the second heat exchange passage is large.

Based on the degree of superheat SH can be used to characterize whether the heat exchange of the refrigerant is sufficient. The evaporation temperature target value Tesv of the inlet end of the second compressor is adjusted through the superheat degree SH, so that the heat exchange efficiency and the cold accumulation amount can be ensured.

The above procedure illustrates: assuming that the target evaporating temperature Tesv of the second heat exchange channel is-20 ℃ at the moment, when the load of the first refrigerating system is high, the liquid in the first heat exchange channel can be cooled to-10 ℃. When the load of the first refrigerating system is reduced, the liquid in the first heat exchange channel is cooled to-15 ℃, and the heat exchange cannot be continued due to the fact that the temperature difference of the two sides of the first heat exchanger is too small, and the redundant cold in the second refrigerating system cannot be stored in the first heat exchange channel continuously. At the moment, the evaporation temperature target value Tesv needs to be reduced, and the heat exchange temperature difference between the first heat exchange channel and the second heat exchange channel is increased if the target value Tesv is reduced to-25 ℃, so that the liquid in the first heat exchange channel can be continuously reduced to-20 ℃, namely the cold accumulation amount is increased.

However, as the evaporation temperature target value Tesv decreases, the efficiency of the second refrigeration system decreases, which results in a decrease in the cold storage rate, so that when the load demand of the first refrigeration system increases, it is necessary to increase the evaporation temperature target value Tesv, thereby increasing the cold storage rate.

On the basis of the above-mentioned temperature control method, that is, in step 140, that is, the step of determining that the degree of superheat SH exceeds the first set threshold, the step of controlling the increase or decrease of the target value Tesv includes:

step 141, determining that the superheat degree SH is greater than a first threshold, wherein the first threshold is the upper limit of a first set threshold;

if the first threshold is 15 ℃, but not limited to 15 ℃, the first threshold can be specifically set according to actual needs.

Step 142, controlling the target value Tesv to rise a first set value to obtain the superheat SH in a first preset duration;

the first set value may be 1 ℃, 2 ℃, or the like, and may be specifically set as needed.

The first preset duration may be 10 seconds, 20 seconds, 30 seconds, etc., and may be specifically set as needed.

The purpose of the control target value Tesv to raise the first set value is to reduce the degree of superheat SH.

Step 143, determining that the superheat degree SH is greater than a first threshold, and circularly executing the step of raising the control target value Tesv by a first set value to obtain the superheat degree SH within a first preset duration;

The control target value Tesv is raised once, the superheat degree SH obtained in the first preset time period is all larger than a first threshold value, the control target value Tesv is raised again by the first set value, the fact that the superheat degree SH obtained in the first preset time period is all larger than the first threshold value is confirmed again, the control target value Tesv is raised by the first set value, and the superheat degree in the first preset time period is obtained, so that the superheat degree SH is reduced to be in the range of the first set threshold value.

And 144, until the superheat degree SH in the first preset duration is smaller than or equal to a first threshold value.

In the step of raising the control target value Tesv by the first set value and obtaining the degree of superheat in the first preset time period, if at least one degree of superheat SH in the first preset time period is less than or equal to the first threshold value, the cycle is stopped, that is, the target value Tesv does not need to be raised any more, and the adjustment of the target value Tesv is completed once.

It should be noted that, if at least one superheat degree SH within the first preset duration is less than or equal to the first threshold, it may be indicated that the superheat degree SH floats above or below the first threshold, that is, the superheat degree SH approaches the first set threshold, and a specific numerical value of the superheat degree SH is not strictly limited.

In the step 140, that is, in the step of determining that the degree of superheat SH exceeds the first set threshold, the step of controlling the increase or decrease of the target value Tesv further includes:

step 145, determining that the superheat degree SH is smaller than a second threshold, where the second threshold is a lower limit of the first set threshold;

if the first threshold is 8 ℃, but not limited to 8 ℃, the first threshold can be specifically set according to actual needs.

Step 146, the control target value Tesv is reduced by a second set value, and the superheat degree SH in a second preset duration is obtained;

the second set point may be the same as or different from the first set point, for example, the second set point is 1 ℃ and 2 ℃, and may be specifically selected according to the needs.

The second preset time period may be the same as or different from the first preset time period, for example, 10 seconds, 20 seconds or 30 seconds, and may be specifically selected according to needs.

Step 147, determining that the superheat degree SH is smaller than the second threshold value, circularly executing the steps of reducing the control target value Tesv by the second set value, obtaining the superheat degree SH in the second preset time period,

the control target value Tesv is lowered once, the superheat degree SH obtained in the second preset time period is all smaller than the second threshold value, the control target value Tesv is lowered again by the second set value, the fact that the superheat degree SH obtained in the second preset time period is all smaller than the second threshold value is confirmed again, the control target value Tesv is cycled to lower the second set value, and the superheat degree in the second preset time period is obtained, so that the superheat degree SH is raised to be in the range of the first set threshold value.

Step 148, until the superheat SH in the second preset duration is greater than or equal to the second threshold.

In the step of "controlling the target value Tesv to decrease the second set value and obtaining the degree of superheat in the second preset duration", if at least one degree of superheat SH in the second preset duration is greater than or equal to the second threshold, the above-mentioned cycle is stopped, that is, the target value Tesv does not need to decrease any more, and the adjustment of the target value Tesv is completed once.

It should be noted that, if at least one superheat degree SH within the second preset duration is greater than or equal to the second threshold, it may be indicated that the superheat degree SH floats about the second threshold, that is, the superheat degree SH approaches the first preset threshold, and a specific numerical value of the superheat degree SH is not strictly limited.

Steps 141 to 144 and steps 145 to 148 are parallel schemes, and one of them is executed as needed, and is not executed in the order of step numbers. An embodiment of a temperature control method, as shown in fig. 4, includes: according to the temperature value T1 of the inlet end of the first heat exchange passage, the target value Tesv of the evaporation temperature of the outlet end of the second heat exchange passage is calculated, and the target value Tesv is adjusted according to the superheat degree SH of the inlet end of the second compressor 14.

The measured value of the first temperature sensor 5 is collected to be T1, the set temperature difference between the first heat exchange passage and the second heat exchange passage is 15 ℃, and the target evaporating temperature Tesv=T1-15 of the outlet end of the second heat exchange passage is obtained through calculation.

Setting a proper range of the superheat degree SH, such as setting a first set threshold value to be 8-15 ℃, when the superheat degree SH is more than 15 ℃, setting a first preset time length to be 30 seconds, increasing the target value Tesv value by 1 ℃ every 30 seconds until at least one superheat degree SH is not higher than 15 ℃ within 30 seconds, and stopping adjustment; when the superheat SH is less than 8 ℃, the second preset time is 30 seconds, the target value Tesv value is reduced by 1 ℃ every 30 seconds, and the adjustment is stopped when at least one superheat SH is not lower than 8 ℃ within 30 seconds.

As shown in conjunction with fig. 5, the temperature control method further includes:

step 210, determining an upper limit value of the target value Tesv based on the operating temperature of the second circulating liquid circuit;

step 220, the control target value Tesv is equal to or smaller than the upper limit value.

An upper limit value of the target value is determined based on the operating temperature of the second circulation liquid circuit, and the target value is controlled to be less than or equal to the upper limit value.

The operating temperature of the second circulation loop may be in a temperature range, for example, the operating temperature of the second circulation loop is 10 ℃ to 90 ℃ and the current temperature range is 20 ℃ to 30 ℃.

During the operation of the second circulation loop in the current temperature range, the evaporating temperature Teh of the refrigerant corresponding to the pressure value of the inlet end of the second compressor can be used as the upper limit value of the target value Tesv, and the target value Tesv is controlled to be smaller than or equal to the upper limit value.

In other temperature control methods for adjusting the target value Tesv, it is required to ensure that the target value Tesv is less than or equal to the upper limit value, that is, the target value Tesv is adjusted by other methods on the premise that the target value Tesv is less than or equal to the upper limit value, so as to optimize the efficiency, the cold accumulation amount and the operation stability of the circulation system.

The temperature control method can be applied to a temperature control device without a pressure regulating valve.

On the basis of the above embodiment, in step 210, that is, in the step of determining the upper limit value of the target value based on the operating temperature of the second circulation liquid circuit,

step 211, dividing the second set threshold into a plurality of temperature sections according to the set interval based on the temperature range of the second circulating liquid loop being at the second set threshold;

for example, the second set threshold is 10 ℃ to 90 ℃, the set interval is 10 ℃, the second set threshold is divided into 8 sections every 10 ℃ and the current temperature section is 20 ℃ to 30 ℃.

And 212, controlling the running temperature to be at the minimum value in the current temperature section, disconnecting the second heat exchange passage, acquiring the pressure value of the inlet end of the second compressor and the evaporating temperature Teh of the refrigerant corresponding to the pressure value, and determining the evaporating temperature Teh as an upper limit value.

And controlling the operation temperature of the second circulating liquid loop to be at the minimum value of 20-30 ℃, namely, controlling the operation temperature to be at 20 ℃, controlling the second heat exchange passage to be disconnected, stopping cold accumulation, acquiring the pressure value of the inlet end of the second compressor at the moment, acquiring the evaporation temperature Teh of the refrigerant corresponding to the pressure value according to the pressure value, and taking the evaporation temperature Teh as the upper limit value of the target value Tesv.

As shown in fig. 6, a system suitable for the system shown in fig. 1, i.e., a system in which the pressure regulating valve 22 is not provided, includes: and setting the upper limit value of the target evaporation temperature Tesv at the outlet end of the second heat exchange passage according to the operating temperature of the second circulating liquid loop.

The operation range of the outlet temperature of the second circulation liquid loop is divided into a plurality of sections, the operation is performed at the lowest temperature in each section, the fourth throttling element 21 is closed, so that the second circulation liquid loop stably operates at the rated load, the measured value of the second pressure sensor 25 at the moment is recorded, and the evaporation temperature Teh of the obtained refrigerant is converted according to the measured value of the second pressure sensor 25 and the type of the refrigerant, namely the upper limit value of the evaporation temperature target value Tesv of the outlet end of the corresponding second heat exchange channel in the temperature section. In the adjustment of the target value Tesv by other temperature control methods, it is necessary to secure the evaporation temperature Teh of the target value Tesv < = refrigerant.

The above method is exemplified: the temperature range of the second circulation liquid loop is set to be 10-90 ℃, and the second circulation liquid loop is divided into 16 sections every 5 ℃. For a temperature section of 20-25 ℃, the minimum temperature of the temperature section is 20 ℃, the fourth throttling element 21 is closed, so that after the second circulating liquid loop is stably operated with rated load, the pressure value measured by the second pressure sensor 25 is measured to be 0.5MPa, and assuming that the refrigerant of the second refrigeration system is R404A, the evaporating temperature of R404A is-6 ℃ under the pressure of 0.5 MPa. Then the upper limit value of the target value Tesv of the evaporating temperature at the outlet end of the second heat exchange passage is-6 ℃, and when the calculated Tesv is higher than-6 ℃ according to the first temperature T1 measured by the first temperature sensor 5 and the superheat degree SH, the Tesv is constant to-6 ℃.

In step 212, in order to perform the process of machine production and debugging, the second circulation loop may be controlled to operate under a set load, where the second circulation loop is not connected to the switching device, but is connected to a heater, and the heater is used to output a certain thermal load, where the thermal load may be adjusted as required, i.e. the set load, and in some cases, the set load may be a rated load designed for the second circulation loop.

As shown in conjunction with fig. 7 and 8, the temperature control method further includes:

step 310, obtaining a pressure value of an inlet end of the second compressor;

the pressure value may be measured by the second pressure sensor 25 shown in fig. 1, or the second pressure sensor 24 shown in fig. 2.

Step 320, determining the evaporation temperature Tepv of the refrigerant based on the pressure value and the type of the refrigerant at the inlet end of the second compressor;

for example, when the pressure value measured by the second pressure sensor 25 is 0.5MPa, the evaporation temperature Tepv of the refrigerant R404A is-6 ℃, and the evaporation temperature Tepv is-6 ℃.

And step 330, adjusting the flow rate of the refrigerant in the second heat exchange passage through a PID algorithm based on the difference between the evaporating temperature Tepv and the target value Tesv.

The flow rate of the refrigerant in the second heat exchange passage, that is, the opening degree of the fourth throttle member 21 is controlled by the PID algorithm so that the target value Tesv approaches the evaporation temperature Tepv.

In this embodiment, the evaporating temperature Tepv is The same as The evaporating temperature The in The above embodiment, except that in this embodiment, specific operation conditions are not limited.

An embodiment of a temperature control method, as shown in fig. 8, includes: according to the difference between the target evaporation temperature Tesv at the outlet end of the second heat exchange passage and the evaporation temperature Tepv at the inlet end of the second compressor 14, wherein the evaporation temperature Tepv at the inlet end of the second compressor 14 is the evaporation temperature corresponding to the pressure value measured by the second pressure sensor 25, the PID algorithm is invoked to control the opening degree of the second heat exchange passage (the fourth throttling element 21), so as to control the heat exchange amount in the first heat exchanger 13.

The evaporation temperature target value Tesv may be obtained by the temperature control method described above.

Taking the temperature control device for regulating and controlling the temperature of the heating cavity as an example, the circulating pump is used for pumping the circulating liquid into the switching device 12, one path of circulating liquid enters the processing cavity of the etching equipment to absorb heat in the etching process, so that the temperature in the processing cavity is constant, and the circulating liquid returns to the original circulating channel through the switching device 12; the other circulating liquid is directly returned to the original circulating system in the switching device 12.

When the circulating fluid in the first circulating fluid loop (low temperature) enters the processing cavity to control the temperature, the second circulating fluid loop (high temperature) runs without heat load or with low heat load. On the premise that the heat exchange capacity in the evaporator 17 of the second circulating liquid loop (high temperature) meets the requirement, the fourth throttling element 21 in the second refrigerating system can be opened to enable the second heat exchange channel of the first heat exchanger 13 to exchange heat with the first heat exchange channel, so that supercooling of liquid refrigerant in a certain refrigerating loop in the first refrigerating system is realized, on the one hand, redundant cold capacity of the second refrigerating system is transferred into the first refrigerating system, and the liquid refrigerant with the first heat exchange channel in the first heat exchanger 13 is used as a cold accumulation medium to store the redundant cold capacity of the second refrigerating system; on the other hand, the supercooled refrigerant liquid improves the refrigerating output of the first refrigerating system so as to meet the high-load requirement.

Since the load of the first refrigeration system fluctuates according to the working conditions, the amount of cold accumulation consumption in the first heat exchanger 13 decreases at the time when the load of the first refrigeration system is also low. In order to ensure that the second refrigeration system can continuously store the redundant cold energy in the first heat exchanger 13, the evaporating temperature in the second heat exchange channel needs to be reduced, i.e. the liquid temperature in the first heat exchange channel can be cooled to a lower temperature, and the cold accumulation process can be continuously performed.

Based on the temperature control device, another temperature control method is also provided, which comprises the following steps:

according to the first outlet temperature measured value PV1 of the first circulating liquid loop and the first outlet temperature set value SV1 of the first circulating liquid loop, a first temperature difference DeltaT 1 is obtained, the opening degree of a throttling element (such as a first throttling element 3 and a third throttling element 7 in fig. 1 and 2) in each stage of refrigeration loop in the first refrigeration system is regulated according to the first temperature difference DeltaT 1, and the heat exchange amount of evaporators (such as a condensation evaporator 4 and a first evaporator 8 in fig. 1 and 2) in each stage of refrigeration loop is regulated, so that the outlet temperature of the first temperature control channel is accurately controlled.

Wherein ΔT1=Sv1-PV 1. The opening degree of each throttling element is regulated according to a PID algorithm.

Another temperature control method includes: according to the second outlet temperature measured value PV2 of the second circulating liquid loop and the second outlet temperature set value SV2 of the second circulating liquid loop, a second temperature difference DeltaT 2 is obtained, the opening degree of the second throttling element 16 in the second refrigerating system is regulated according to the second temperature difference DeltaT 2, and the heat exchange amount of the second evaporator 17 is regulated, so that the accurate control of the outlet temperature of the second temperature control channel is realized.

Wherein Δt2=sv 2-PV2. The opening degree of the second throttle 16 is adjusted according to the PID algorithm.

Another temperature control method includes: and acquiring the preset temperature of the superheat degree and the actual superheat degree, wherein the actual superheat degree is the superheat degree of the refrigerant between the outlet end of the evaporator and the inlet end of the compressor in each refrigeration loop, and adjusting the opening of the throttling piece according to the deviation of the actual superheat degree and the preset temperature.

The preset temperature may be a point value or a range of values.

As shown in fig. 1 and 2, in the first-stage refrigeration circuit, the opening degree of the first throttle member 3 is adjusted between the outlet end of the condensation evaporator 4 and the inlet end of the first compressor 1 according to the deviation of the first actual superheat degree from the first preset temperature.

In the second stage refrigeration circuit, the opening degree of the third throttling element 7 is adjusted between the outlet end of the first evaporator 8 and the inlet end of the third compressor 6 according to the deviation between the second actual superheat degree and the second preset temperature.

In the second refrigeration system, the opening degree of the second throttling element 16 is adjusted according to the deviation of the third actual superheat degree from the third preset temperature between the outlet end of the second evaporator 17 and the inlet end of the second compressor 14.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A temperature control method of a temperature control device, characterized in that the temperature control device comprises:

The cold accumulator comprises a cold accumulation passage and a heat absorption passage which exchanges heat with the cold accumulation passage, the cold accumulation passage is communicated with the first refrigerating system, and the heat absorption passage is communicated with the second refrigerating system;

the temperature control method comprises the following steps:

2. The temperature control method of a temperature control device according to claim 1, wherein the regenerator includes a housing and a heat exchange tube provided in the housing, the regenerator passage is formed between the housing and the heat exchange tube, and a space in the heat exchange tube forms the heat absorption passage.

3. The temperature control method of a temperature control device of claim 2, wherein the first refrigeration system comprises a multi-stage refrigeration circuit, and the cold storage path is in communication with one of the multi-stage refrigeration circuits.

4. A temperature control method of a temperature control device according to any one of claims 1 to 3, wherein the step of determining that the degree of superheat exceeds a first set threshold value and controlling the target value to rise or fall includes:

5. A temperature control method of a temperature control device according to any one of claims 1 to 3, wherein the step of determining that the degree of superheat exceeds a first set threshold value and controlling the target value to rise or fall includes:

6. A temperature control method of a temperature control device according to any one of claims 1 to 3, further comprising:

7. The temperature control method of a temperature control device according to claim 6, wherein in the step of determining an upper limit value of the target value based on an operating temperature of the second circulation liquid circuit,

8. A temperature control method of a temperature control device according to any one of claims 1 to 3, further comprising:

acquiring a pressure value of an inlet end of the second compressor;

and adjusting the flow rate of the refrigerant in the heat absorption passage through a PID algorithm based on the difference value between the evaporation temperature and the target value.

9. A temperature control method of a temperature control device according to any one of claims 1 to 3, characterized in that the second refrigeration system comprises a second compressor, a second condenser, a second throttling element and a second evaporator forming a cycle, the outlet end of the second evaporator being provided with a pressure regulating valve.