CN115268256A - CSP lamp pearl vacuum film laminating machine vacuum system - Google Patents

CSP lamp pearl vacuum film laminating machine vacuum system Download PDF

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CN115268256A
CN115268256A CN202210851004.5A CN202210851004A CN115268256A CN 115268256 A CN115268256 A CN 115268256A CN 202210851004 A CN202210851004 A CN 202210851004A CN 115268256 A CN115268256 A CN 115268256A
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vacuum
pid
parameters
laminating machine
lamp bead
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胡君榕
蒋凡
徐金宏
崔光录
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Shenzhen Grandseed Technology Development Co ltd
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004—Component parts, details or accessories; Auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/02—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
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    • G06N3/126—Evolutionary algorithms, e.g. genetic algorithms or genetic programming
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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Abstract

The invention discloses a CSP lamp bead vacuum film laminating machine vacuum system, which belongs to the field of vacuum film laminating machines and comprises a vacuum pump, a vacuum filter, a first vacuum electromagnetic valve, a needle valve, a three-way pipe fitting, a hydraulic hose and a second vacuum electromagnetic valve, wherein the three-way pipe fitting is used for sequentially communicating the first vacuum electromagnetic valve, the needle valve, the second vacuum electromagnetic valve and the hydraulic hose together; the vacuum filter is fixedly connected to the air inlet end of the vacuum pump, the air inlet end of the vacuum filter is connected with the first vacuum electromagnetic valve through a pipe joint, the vacuum pump is driven by a hybrid stepping motor, and a PID controller is arranged in the vacuum pump and used for obtaining PID parameters through a genetic algorithm and substituting the PID parameters into the stepping motor incremental PID control. The invention leads the assembly to be centralized through integral unitization and modularization, and then obtains PID parameters through genetic algorithm and substitutes the PID parameters into the incremental PID control of the stepping motor, thereby achieving the accurate control of the vacuum pump.

Description

CSP lamp pearl vacuum film laminating machine vacuum system
Technical Field
The invention relates to a vacuum film laminating machine, in particular to a vacuum system of a CSP lamp bead vacuum film laminating machine.
Background
With the development of various downstream industries, the global competitiveness of the Chinese manufacturing industry is continuously enhanced, the Chinese power semiconductor industry has more obvious development opportunities, and at the moment that the domestic semiconductor chips are the best, the CSP lamp bead vacuum film laminating machine is used as front-stage equipment for packaging and has an important function.
Generally, a vacuum film laminating machine is composed of a machine frame, a lifting system, a heating system, a vacuum system, a control system and the like. The vacuum system is generally composed of a vacuum pump, a filter, a vacuum solenoid valve, a joint, a pipe, and the like. The problems of scattered assembly, inconvenient installation, easy leakage and the like exist.
The vacuum system of the existing vacuum film laminating machine has the following problems: the assembly is decentralized and not accurate enough to control the vacuum pump. Therefore, the technical personnel in the field provide a vacuum system of a CSP lamp bead vacuum film laminating machine to solve the problems provided in the background technology.
Disclosure of Invention
The invention aims to provide a vacuum system of a CSP lamp bead vacuum film laminating machine, which integrates assembly through integral unitization and modularization, obtains a PID parameter through a genetic algorithm and substitutes the PID parameter into incremental PID control of a stepping motor to achieve accurate control of a vacuum pump, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme:
a CSP lamp bead vacuum film laminating machine vacuum system comprises a vacuum pump, a vacuum filter, a first vacuum electromagnetic valve, a needle valve, a three-way pipe fitting, a hydraulic hose and a second vacuum electromagnetic valve, wherein the three-way pipe fitting sequentially connects the first vacuum electromagnetic valve, the needle valve, the second vacuum electromagnetic valve and the hydraulic hose together; the vacuum filter is fixedly connected to the air inlet end of the vacuum pump, the air inlet end of the vacuum filter is connected with the first vacuum electromagnetic valve through a pipe joint, the vacuum pump is driven by a hybrid stepping motor, and a PID controller is arranged in the vacuum pump and used for obtaining PID parameters through a genetic algorithm and substituting the PID parameters into the stepping motor incremental PID control.
The invention leads the assembly to be centralized through integral unitization and modularization, and then obtains PID parameters through genetic algorithm and substitutes the PID parameters into the incremental PID control of the stepping motor, thereby achieving the accurate control of the vacuum pump.
As a further scheme of the invention: the tee bend pipe fitting specifically includes: three level is abreast and the tee joint head that connects gradually, and is three the top interface of tee joint head is connected with first vacuum solenoid valve, needle valve, second vacuum solenoid valve respectively, hydraulic hose connects rightmost the right side on one side port of tee joint head.
The first vacuum solenoid valve and the second vacuum solenoid valve are respectively arranged in front of and behind the needle valve, so that a redundancy effect is achieved, the stability of a vacuum pressure value is guaranteed, the needle valve can change the vacuum degree through the adjusting knob, and different technological requirements are met.
As a still further scheme of the invention: and a port on one side of the leftmost tee joint is connected with a vacuum pressure gauge through a hose.
The vacuum pressure gauge detects the vacuum degree of the system through the hose.
As a still further scheme of the invention: the mathematical model of the hybrid stepping motor adopted by the vacuum pump is as follows:
Figure BDA0003754663280000021
wherein N isrThe number of teeth of the rotor of the two-phase hybrid stepping motor is set; kTIs a torque coefficient; b is the viscous friction coefficient; j is the moment of inertia; the rotor reaches the balance position, the current flowing through the A phase and the B phase is I0. The parameters of the vacuum pump hybrid stepping motor are substituted to obtain a transfer function as follows: g(s) = 400/(s)2+50s＝400)。
As a still further scheme of the invention: the PID controller carries out optimization design on parameters through a genetic algorithm, and the specific process is as follows:
the method comprises the following steps: generating a chromosome;
step two: sequential assignment of chromosomes to kP，ki，kd；
Step three: running a probe control system model;
step four: outputting a performance index;
step five: judging whether a termination condition is met, if so, terminating, and if not, entering the next step;
step six: and returning to the step one after the chromosomes are selected, crossed and mutated and updated.
As a still further scheme of the invention: the population size of the chromosome is 300, and the upper limit of the PID value is 500]The lower limit of the PID value is [ -10-10-10 [ ]]The number of chromosome elite is 10, the ratio of chromosome crossing offspring is 0.6, the iteration number is 100, and the deviation of fitness function value is 10-100Acquiring a PID parameter model by using a genetic algorithm, and obtaining optimized PID parameters after iterative computation, wherein the optimized PID parameters are respectively as follows: p parameter =496.8, i parameter =29.4, d parameter =480.2.
As a still further scheme of the invention: the incremental PID control of the stepping motor is based on the optimized PID parameters, and the function of the incremental PID control is as follows:
Figure BDA0003754663280000031
wherein Δ u (k) = u (k) -u (k-1);
Δu(k)＝kp(error(k)-error(k-1)+kierror(k)+kd(error(k)-2error(k-1)+error(k-2))
k is sampling serial number, k =1,2, \ 8230; error (k-1) and error (k) are respectively the deviation signals obtained at the (k-1) th and k-th time points, kP，ki，kdP, I and D parameters are respectively obtained by genetic algorithm iteration.
As a still further scheme of the invention: the sampling rate of the incremental PID control is 1/1000.
As a still further scheme of the invention: the bottom end face of the vacuum pump is fixedly connected with a bottom plate, and the corners of the bottom end face of the bottom plate are fixedly connected with supporting legs.
The arrangement of the bottom plate and the support legs can prevent the vacuum pump from directly contacting the ground.
Compared with the prior art, the invention has the beneficial effects that:
1. the vacuum system is integrally unitized and modularized, so that assembly is centralized, fixing and maintenance management are facilitated, and the vacuum system is directly connected by the three-way pipe, so that the vacuum system is centralized, reliable and high in stability.
2. According to the invention, the PID parameters are obtained through a genetic algorithm and substituted into the incremental PID control of the stepping motor, so that the hybrid stepping motor can be controlled more accurately, and the accurate control of the vacuum pump is achieved, thus the vacuum coating system can work accurately and efficiently.
Drawings
FIG. 1 is a schematic structural diagram of a vacuum system of a CSP lamp bead vacuum film laminating machine;
FIG. 2 is a flow chart of parameter optimization in a vacuum system of a CSP lamp bead vacuum laminating machine;
FIG. 3 is a model diagram of PID parameters obtained from a vacuum system of a CSP lamp bead vacuum film laminating machine;
FIG. 4 is a diagram of a result of tracking a track in a vacuum system of a CSP lamp bead vacuum film laminating machine.
In the figure: 1. a vacuum pressure gauge; 2. a hose; 3. a vacuum pump; 4. a vacuum filter; 5. a first vacuum solenoid valve; 6. a needle valve; 7. a tee pipe fitting; 8. a hydraulic hose; 9. a base plate; 10. a leg; 11. a second vacuum solenoid valve.
Detailed Description
In order to better understand the technical scheme, the technical scheme is described in detail in the following with reference to the attached drawings of the specification and specific embodiments.
Referring to fig. 1 to 4, in the embodiment of the present invention, a vacuum system of a CSP lamp bead vacuum film laminating machine includes a vacuum pump 3, a vacuum filter 4, a first vacuum solenoid valve 5, a needle valve 6, a tee pipe fitting 7, a hydraulic hose 8, and a second vacuum solenoid valve 11, wherein the tee pipe fitting 7 sequentially connects the first vacuum solenoid valve 5, the needle valve 6, the second vacuum solenoid valve 11, and the hydraulic hose 8 together; the vacuum filter 4 is fixedly connected at the air inlet end of the vacuum pump 3, the air inlet end of the vacuum filter 4 is connected with the first vacuum electromagnetic valve 5 through a pipe joint, the vacuum pump 3 is driven by a hybrid stepping motor, and a PID controller is arranged inside the vacuum pump 3 and used for obtaining PID parameters through a genetic algorithm and substituting the PID parameters into the stepping motor incremental PID control. The invention leads the assembly to be centralized through integral unitization and modularization, and then obtains PID parameters through genetic algorithm and substitutes the PID parameters into the incremental PID control of the stepping motor, thereby achieving the accurate control of the vacuum pump 3.
In this embodiment: tee bend pipe fitting 7 specifically includes: the three-way heads are horizontally arranged in parallel and connected in sequence, top end interfaces of the three-way heads are respectively connected with the first vacuum solenoid valve 5, the needle valve 6 and the second vacuum solenoid valve 11, and the hydraulic hose 8 is connected to one side port of the rightmost three-way head. The first vacuum solenoid valve 5 and the second vacuum solenoid valve 11 are respectively arranged in front of and behind the needle valve 6, so that redundancy is achieved, the stability of the vacuum pressure value is guaranteed, the needle valve 6 can change the vacuum degree through an adjusting knob, and different technological requirements are met.
In this embodiment: one side port of the leftmost tee joint is connected with a vacuum pressure gauge 1 through a hose 2. The vacuum pressure gauge 1 detects the vacuum degree of the system through the hose 2.
In this embodiment: the bottom end face of the vacuum pump 3 is fixedly connected with a bottom plate 9, and the corner position of the bottom end face of the bottom plate 9 is fixedly connected with a support leg 10. The arrangement of the base plate 9 and the foot 10 prevents the vacuum pump 3 from directly contacting the ground.
In this embodiment: one end of the hydraulic hose 8 is connected with an external vacuum cover, and the vacuum cover covers the working area to form a closed space.
In this embodiment: the mathematical model of the hybrid stepper motor used by the vacuum pump 3 is:
Figure BDA0003754663280000051
wherein N isrThe number of teeth of the rotor of the two-phase hybrid stepping motor is; k isTIs a torque coefficient; b is the viscous friction coefficient; j is the moment of inertia; the rotor reaches the balance position, the current flowing through the A phase and the B phase is I0. The parameters of the hybrid stepping motor of the vacuum pump 3 are substituted to obtain a transfer function as follows: g(s) = 400/(s)2+50s＝400)。
Further, the PID controller performs optimization design on the parameters through a genetic algorithm, as shown in fig. 2, the specific process is as follows:
the method comprises the following steps: generating a chromosome;
step two: sequential assignment of chromosomes to kP，ki，kd；
Step three: running a probe control system model;
step four: outputting a performance index;
step five: judging whether a termination condition is met, if so, terminating, and if not, entering the next step;
step six: and returning to the step one after the chromosomes are selected, crossed and mutated and updated.
Further, the population size of the chromosome is 300, and the upper limit of the PID value is [500 500 500 ]]The lower limit of the PID value is [ -10-10-10 [ ]]The number of chromosome elites is 10, the ratio of chromosome cross offspring is 0.6, the iteration number is 100, and the deviation of fitness function value is 10-100(ii) a Further, a PID parameter model is obtained by using a genetic algorithm, and as shown in fig. 3, the optimized PID parameters obtained by iterative computation are respectively: p parameter =496.8, i parameter =29.4, d parameter =480.2.
Further, because the stepping motor needs to accurately regulate and control the increment of the control quantity, based on the parameters, the application continuously adopts the incremental PID control to realize the accurate control of the work of the vacuum pump 3.
The function of the incremental PID control is:
Figure BDA0003754663280000061
wherein Δ u (k) = u (k) -u (k-1);
Δu(k)＝kp(error(k)-error(k-1)+kierror(k)+kd(error(k)-2error(k-1)+error(k-2))
k is sampling serial number, k =1,2, \8230; error (k-1) and error (k) are respectively the deviation signals obtained at the (k-1) th and k-th time points, kP，ki，kdP, I and D parameters are respectively obtained by genetic algorithm iteration.
Furthermore, the sampling rate of the incremental PID control is 1/1000, and for a target control signal: cos (5 × pi k × ts) + sin (3 × pi k × ts) +2 × sin (3/4 × pi k × ts) are subjected to trajectory tracking, and as a result, as shown in fig. 4, the technical scheme of the application can realize more accurate control over the hybrid stepping motor, so that the vacuum film coating system can work accurately and efficiently.
The working principle of the invention is as follows: need build vacuum state earlier when carrying out the tectorial membrane during operation, at this moment, vacuum pump 3 operation carries out evacuation work, and the air that covers the interior with external vacuum passes through hydraulic hose 8 and constantly sucks, and the in-process, first vacuum solenoid valve 5 and second vacuum solenoid valve 11 set up respectively in the tandem of needle valve 6, have played redundant effect, guarantee that the vacuum pressure value is stable, and needle valve 6 accessible adjust knob changes the vacuum size, is suitable for different technological requirements. In addition, 1 accessible hose 2 detecting system's of vacuum pressure table vacuum degree size, and vacuum filter 4 filters inspiratory air, avoids debris to get into inside 3 vacuum pumps, and this application makes whole vacuum system assembly concentrate, convenient fixed and maintenance management with each component unitization, modularization of vacuum system, rethread tee bend pipe fitting 7. It should be noted that, in the present application, the PID parameter is obtained through a genetic algorithm, and then the PID parameter is substituted into the incremental PID control of the stepping motor, so as to achieve the effect of accurately controlling the vacuum pump 3.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention are equivalent to or changed within the technical scope of the present invention.

Claims (9)

1. A CSP lamp bead vacuum laminating machine vacuum system is characterized by comprising a vacuum pump, a vacuum filter, a first vacuum electromagnetic valve, a needle valve, a three-way pipe fitting, a hydraulic hose and a second vacuum electromagnetic valve, wherein the three-way pipe fitting sequentially connects the first vacuum electromagnetic valve, the needle valve, the second vacuum electromagnetic valve and the hydraulic hose together;
the vacuum filter is fixedly connected to the air inlet end of the vacuum pump, the air inlet end of the vacuum filter is connected with the first vacuum electromagnetic valve through a pipe joint, the vacuum pump is driven by a hybrid stepping motor, and a PID controller is arranged in the vacuum pump and used for obtaining PID parameters through a genetic algorithm and substituting the PID parameters into the stepping motor incremental PID control.
2. The CSP lamp bead vacuum film laminating machine vacuum system of claim 1, wherein the tee pipe specifically comprises: three level is abreast and the tee joint head that connects gradually, and is three the top interface of tee joint head is connected with first vacuum solenoid valve, needle valve, second vacuum solenoid valve respectively, hydraulic hose connects rightmost the right side on one side port of tee joint head.
3. The CSP lamp bead vacuum laminating machine vacuum system of claim 2, wherein a vacuum pressure gauge is connected to a port on one side of the left-most three-way head through a hose.
4. The CSP lamp bead vacuum film laminating machine vacuum system of claim 1, wherein a mathematical model of a hybrid stepper motor adopted by the vacuum pump is as follows:
Figure FDA0003754663270000011
wherein N isrThe number of teeth of the rotor of the two-phase hybrid stepping motor is; kTIs the torque coefficient; b is the viscous friction coefficient; j is the moment of inertia; the rotor reaches the balance position, the current flowing through the A phase and the B phase is I0. The parameters of the vacuum pump hybrid stepping motor are substituted to obtain a transfer function as follows: g(s) = 400/(s)2+50s＝400)。
5. The CSP lamp bead vacuum film laminating machine vacuum system according to claim 1, wherein the PID controller optimizes parameters through a genetic algorithm, and the specific process is as follows:
the method comprises the following steps: generating a chromosome;
step two: chromosome assignment to kP，ki，kd；
Step three: running a probe control system model;
step four: outputting a performance index;
step five: judging whether a termination condition is met, if so, terminating, and if not, entering the next step;
step six: and returning to the step one after the chromosomes are selected, crossed and mutated and updated.
6. The CSP lamp bead vacuum film laminating machine vacuum system of claim 5, wherein the population size of the chromosome is 300, and the upper limit of the PID value is [500 500 500 [ ]]The lower limit of the PID value is [ -10-10-10 [ ]]The number of chromosome elite is 10, the ratio of chromosome crossing offspring is 0.6, the iteration number is 100, and the deviation of fitness function value is 10-100Acquiring a PID parameter model by using a genetic algorithm, and obtaining optimized PID parameters after iterative computation, wherein the optimized PID parameters are respectively as follows: p parameter =496.8, i parameter =29.4, d parameter =480.2.
7. The CSP lamp bead vacuum film laminator vacuum system of claim 6, wherein the incremental PID control of the stepper motor is based on the optimized PID parameters, and the function of the incremental PID control is:
Figure FDA0003754663270000021
wherein Δ u (k) = u (k) -u (k-1);
Δu(k)＝kp(error(k)-error(k-1)+kierror(k)+kd(error(k)-2error(k-1)+error(k-2))
k is sampling serial number, k =1,2, \ 8230; error (k-1) and error (k) are respectively the deviation signals obtained at the (k-1) th and k-th time points, kP，ki，kdP, I and D parameters are respectively obtained by genetic algorithm iteration.
8. The CSP lamp bead vacuum film laminator vacuum system of claim 7, wherein the sampling rate of the incremental PID control is 1/1000.
9. The CSP lamp bead vacuum film laminating machine vacuum system as claimed in claim 1, wherein the bottom end face of the vacuum pump is fixedly connected with a bottom plate, and the corners of the bottom end face of the bottom plate are fixedly connected with supporting legs.
CN202210851004.5A 2022-07-20 2022-07-20 CSP lamp pearl vacuum film laminating machine vacuum system Pending CN115268256A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116621194A (en) * 2023-07-20 2023-08-22 山东鲁泰化学有限公司 Method and device for recycling salt mud NaCl in chlor-alkali production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116621194A (en) * 2023-07-20 2023-08-22 山东鲁泰化学有限公司 Method and device for recycling salt mud NaCl in chlor-alkali production
CN116621194B (en) * 2023-07-20 2023-10-10 山东鲁泰化学有限公司 Method and device for recycling salt mud NaCl in chlor-alkali production

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