CN115265936B

CN115265936B - Mass spectrum detection device and mass spectrum leak detector

Info

Publication number: CN115265936B
Application number: CN202210663362.3A
Authority: CN
Inventors: 郝猛; 李赏
Original assignee: Kyky Technology Co ltd
Current assignee: Kyky Technology Co ltd
Priority date: 2022-06-13
Filing date: 2022-06-13
Publication date: 2023-11-17
Anticipated expiration: 2042-06-13
Also published as: CN115265936A

Abstract

The embodiment of the specification provides a mass spectrum detection device and a mass spectrum leak detector, and relates to the field of detection equipment. The mass spectrum detection device comprises: a first housing having a detection chamber, the housing having a gas inlet for gas flow into the detection chamber and a gas outlet for connection to a molecular pump such that the molecular pump drives gas in the detection chamber out of the detection chamber from the gas outlet. The mass spectrum leak detector comprises the molecular pump which is matched with a gas outlet of the mass spectrum detection device. The gas entering the mass spectrum leak detector directly enters the mass spectrum detection device through the gas inlet, so that the loss of target gas when passing through other parts of the mass spectrum leak detector is reduced, and the accuracy of the mass spectrum leak detector is improved.

Description

Mass spectrum detection device and mass spectrum leak detector

Technical Field

The invention relates to the field of analytical instrument equipment, in particular to a mass spectrum detection device and a mass spectrum leak detector using the same.

Background

The mass spectrum leak detector is an analytical instrument for judging whether a detected device is sealed by detecting whether target gas enters a mass spectrum detection device or not. Specifically, the object gas is filled in the device to be detected, and the mass spectrum leak detector is used for pumping air at the external sealing part of the device to be detected. If the leak tightness of the detected device is poor, target gas can enter the leak detector through the leak. The target gas entering the leak detector passes through the molecular pump, a portion of which is expelled under the influence of the gas flow and molecular pump structure, and a portion of which eventually reaches the mass spectrometry detection device to be detected.

Currently, mass spectrum leak detectors are used not only to check the tightness of certain large sealed containers, such as missile bodies, warheads, gas tanks, oil tanks, etc., but also to check the tightness of small components, such as integrated circuits, sealed relays, various sensors, cardiac pacemakers, etc. Because of the small volume of the parts and the improvement of the welding technology, the target gas quantity reaching the mass spectrum detection device is very small under the condition of tiny leakage holes, and is difficult to accurately detect.

Disclosure of Invention

In view of the above, an object of the present specification is to provide a mass spectrum detection device capable of improving detection accuracy and a mass spectrum leak detector using the mass spectrum detection device.

In order to achieve the above object, the present specification provides a mass spectrometry detection apparatus comprising a first housing having a detection chamber, the housing having a gas inlet for gas to flow into the detection chamber and a gas outlet for connecting a molecular pump such that the molecular pump drives gas in the detection chamber out of the detection chamber from the gas outlet.

The specification also provides a mass spectrum leak detector comprising the mass spectrum detection device and a molecular pump, wherein the molecular pump is matched with a gas outlet of the mass spectrum detection device.

The present specification also provides a mass spectrometer leak detector comprising a housing having a hollow cavity; the hollow cavity is divided into a detection cavity and an equipment accommodating cavity along the gravity direction; the side wall of the shell forming the detection cavity is provided with a gas inlet; the side wall of the shell forming the equipment accommodating cavity is provided with an exhaust port; the ion source, the amplifier and the built-in magnetic field are arranged in the detection cavity; and the air pumping device is arranged in the device accommodating cavity and applies force to the gas in the detection cavity to flow towards the exhaust port.

Compared with the prior art, the mass spectrum leak detector has the beneficial effects that: the shell of the mass spectrum detection device is provided with the gas inlet, so that gas directly enters the mass spectrum detection device to reach the ion source, the loss of target gas when passing through other parts of the mass spectrum leak detector is reduced, and the requirement of improving the detection precision of the leak detector is met.

Drawings

Fig. 1 is a schematic diagram of a mass spectrum detection apparatus according to an embodiment of the present disclosure.

Fig. 2 is a schematic diagram of a mass spectrum detection apparatus and a mass spectrum leak detector using an embodiment of the present disclosure.

Fig. 3 is a schematic diagram of a mass spectrum detection apparatus and a mass spectrum leak detector using an embodiment of the present disclosure.

Fig. 4 is a schematic diagram of a mass spectrum detection apparatus and a mass spectrum leak detector using an embodiment of the present disclosure.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Please refer to fig. 1 and 2. A mass spectrometry detection apparatus 100 is provided herein. The mass spectrometry detection apparatus 100 can include a first housing 106 having a detection chamber 114, the housing having a gas inlet 108 for gas flow into the detection chamber 114 and a gas outlet 112, the gas outlet 112 for connection to a molecular pump 200 such that the molecular pump 200 drives gas in the detection chamber 114 out of the detection chamber 114 from the gas outlet 112.

The first housing 106 may be used to provide support for the overall structure of the mass spectrometry detection apparatus 100. The interior of the first housing 106 may be entirely hollow. The hollow may be a space structure that is physically unoccupied by a solid. It will also be appreciated that the detection chamber 114 provides a receiving space for components of the mass spectrometry detection apparatus 100, providing a structure for mounting the components of the mass spectrometry detection apparatus. The portion of the first housing 106 surrounding the detection chamber 114 constitutes a side wall of the first housing 106.

In some embodiments, the detection chamber 114 of the first housing 106 is provided with an ion source 110; the gas inlet 108 extends through the first housing 106 in a first direction of extension and provides a reference plane perpendicular to the first direction of extension, and a projection of the gas inlet 108 on the reference plane at least partially overlaps with a projection of the ion source 110 on the reference plane. The reference plane is not a plane of the mass spectrum detection apparatus 100 itself, but is an ideal plane constructed parallel to the gravity direction with the first penetration direction as a reference. The projection of the gas inlet 108 on the reference plane may refer to a contour edge of the gas inlet 108 closest to the reference plane, the projection of the ion source 110 on the reference plane may refer to a contour edge of the ion source 110 closest to the reference plane, and the at least partial overlapping of the projections may be that the projections of the gas inlet 108 and the ion source 110 are completely covered and completely coincide, and the partial projections occupy the same positional relationship. The ion source 110 may include a filament that emits electrons, and the electrons emitted from the filament collide with the incoming gas to ionize the gas into positive ions. The gas flowing in through gas inlet 108 may directly enter ion source 110 of mass spectrometry detection apparatus 100, reducing the loss of target gas through other components of the mass spectrometer leak detector.

In some embodiments, the first direction of penetration is oriented perpendicular to the direction of gravity. The gas circulation is convenient, and the detection rate is improved.

In some embodiments, the detection chamber 114 of the first housing 106 is provided with an amplifier 104, and the ion source 110 is located between the amplifier 104 and the gas inlet 108. The amplifier 104 may include a receiving means for receiving target ions, a converting means for converting the received target ions into an electrical signal, and an amplifying means for amplifying the electrical signal. The distance from the gas inlet 108 to the ion source 110 is relatively short compared to the distance from the gas inlet 108 to the amplifier 104, and the gas flowing in from the gas inlet 108 can directly enter the ion source 110 of the mass spectrum detection device 100, thereby reducing the loss of target gas.

In some embodiments, the detection chamber 114 of the first housing 106 is provided with a built-in magnetic field 102, the built-in magnetic field 102 being located above the ion source 110, the amplifier 104 and the gas inlet 108 along the direction of gravity. The built-in magnetic field may be generated by both the magnet and the magnet adjustment assembly, and by an electric field having a variable voltage. Under the action of the Lorentz force, ions deflect in the magnetic field to form a circular arc-shaped track. The built-in magnetic field 102 may be detected by changing the force to change the deflection trajectory of ions entering the built-in magnetic field 102 so that the target gas ions reach the amplifier 104.

In some embodiments, the gas inlet 108 has an area greater than 50 square millimeters.

In some embodiments, the first housing 106 has a bottom wall on which the gas outlet 112 is disposed along the direction of gravity, and the portion of the first housing 106 at the bottom of the detection chamber 114 constitutes the bottom wall. The built-in magnetic field 102 is located above the molecular pump 200, and when the molecular pump 200 works, the gas in the detection cavity 114 is driven to flow out of the detection cavity 114 from the gas outlet 112, so that the influence on ions in the built-in magnetic field 102 is reduced.

In some embodiments, the gas outlet 112 has a dimensional area greater than 800 square millimeters.

Referring to fig. 3, in some embodiments, the first housing 106 has a sidewall extending parallel to the direction of gravity, and the gas outlet 112 is disposed on the sidewall of the first housing 106. In order to reduce the effect of the molecular pump 200 on the gas flow, in particular, the ion source 110 is located between the amplifier 104 and the gas inlet 108. The gas of the mass spectrum detection apparatus 100 flowing in through the gas inlet 108 flows out from the gas outlet 112 on the side wall of the first housing 106.

In some embodiments, the molecular pump 200 is coupled to the gas outlet 112 of the mass spectrometry detection apparatus 100. The mating may refer to a connection portion of the first housing 106 and the second housing 202, which are connected through the gas outlet 112, and the connection portion has similar material composition, density and manufacturing process, and similar shape and size, and good sealing property.

Please refer to fig. 4. In some embodiments, the mass spectrometer comprises a third housing 300 having a hollow cavity 203; wherein, along the gravity direction, the hollow cavity 203 is divided into a detection cavity 114 and a device accommodating cavity 214; the side wall of the third housing 300 forming the detection chamber 114 is formed with a gas inlet 108; the side wall of the third housing 300 forming the device accommodating chamber 214 is formed with an exhaust port 212; an ion source 110, an amplifier 104, and a built-in magnetic field 102 disposed within the detection chamber 114, and an extraction device disposed within the device receiving chamber 214 that applies a force to the gas in the detection chamber 114 that flows toward the exhaust port 212.

In some embodiments, the third housing 300 may include a first housing 106 and a second housing 202. The third housing 300 may include a switchable barrier device thereon. Specifically, the first switch 116 is disposed within the first housing 106, and the second switch 216 is disposed within the second housing 202. The first switch 116 and the second switch 216 may provide convenience in assembling and servicing the mass spectrometer leak detector.

The hollow cavity 203 may be a space structure that is physically unoccupied by solids. It will also be appreciated that the hollow cavity 203 provides a through passage for the passage of gas. The gas flowing in through the gas inlet 108 can be pumped out by the pumping device through the gas outlet 112 after detection is completed, and the internal gas of the mass spectrum detector can be maintained in a lean state.

The air extraction device can be a single driving device or a combined driving device. In particular, the combined drive device may be combined by the first drive device 204 and the second drive device 208. Preferably, the first drive device 204 is a turbo vacuum pump and the second drive device 208 is a drag vacuum pump.

The mixed gas entering from the gas inlet 108 flows into the detection chamber 114, and the ambient gas is located below the mixed gas and the target gas is located above the mixed gas in the direction of gravity because the ambient gas has a relatively large molecular mass and the target gas has a relatively small molecular mass. Under the action of the force applied by the air extraction equipment and flowing towards the air exhaust port, the ambient air is more easily extracted, the target air is more easily introduced into the ion source, and the detection precision is improved.

The mixed gas can be formed by mixing target gas and ambient gas. Specifically, for example, if it is necessary to detect the tightness of the device under test, the device under test is in an environment containing an ambient gas. When in detection, some target gas needs to be filled in the detected device, and a detection leakage port of the leak detector can be used for exhausting air at a welding seam or a joint suspected leakage point of the detected device. When the device to be inspected has a leak, the mass spectrometer leak detector can draw the ambient gas into the instrument together with the target gas leaked from the leak to form a mixed gas. The target gas is a gas with relatively small molecular mass and stable property, and can be detected by the corresponding mass spectrum detection device 100. In particular, for example, helium or hydrogen. The ambient gas is the gas in the environment where the object to be detected exists. Specifically, for example, air.

The mixed gas entering the detection chamber 114 generates heat upon ionization and detection, and thus the target amount of gas entering the detection chamber 114 should be controlled in order to protect the equipment. Specifically, the third housing 300 may form the sidewall of the detection chamber 114 with the gas inlet 108, the second opening 210, the first opening 206, and the gas outlet 212 along the gravity direction.

When the target gas passes through the molecular pump 200, a loss occurs due to the obstruction of the impeller and the gas flow, and the shorter the path of the target gas passing through the molecular pump 200, the smaller the loss. The first opening 206 and the second opening 210 may be disposed at different positions on the sidewall of the device receiving chamber 214, respectively, to provide multiple precision detection options for the device under test.

The gas inlet 108, the first opening 206, the second opening 210, and the gas outlet 212 may be disposed in sequence on a sidewall of the third receiving chamber along a direction of gravity. Specifically, the gas inlet 108 is located on a sidewall of the detection chamber 114, the first opening 206 is located on a sidewall of the first driving device 204, the second opening 210 is located on a sidewall of the second detection device, and the gas outlet 212 is located on a sidewall below the second detection device.

The target gas has a small relative molecular mass, and when the gas extraction device is in operation, the target gas can enter the gas extraction device from the gas outlet 212 and then enter the mass spectrum detection device 100. Therefore, in order to protect the apparatus, when the sealing condition of the device under test is unknown, the exhaust port 212 may be used as an air inlet first, the second opening 210 may be switched to be an air inlet if the mass spectrum detecting apparatus 100 is not reactive, the first opening 206 may be switched to be an air inlet if the mass spectrum detecting apparatus 100 is not reactive, and the air inlet 108 may be switched to be an air inlet if the mass spectrum detecting apparatus 100 is still not reactive.

In some embodiments, the mass leak detector may be a helium mass spectrometer leak detector or a hydrogen mass spectrometer leak detector. Specifically, when the target gas is helium and the mass spectrum detection device is a helium mass spectrum detection device, the mass spectrum leak detector is a helium mass spectrum leak detector, and when the target gas is hydrogen and the mass spectrum detection device is a hydrogen mass spectrum detection device, the mass spectrum leak detector is a hydrogen mass spectrum leak detector.

The technical features of the above embodiments may be combined in any manner, and for brevity, all of the possible combinations of the technical features of the above embodiments are not described, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is to be construed as including any modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims

1. A mass spectrometer, the mass spectrometer comprising:

a third housing having a hollow cavity, the third housing comprising a first housing and a second housing; the hollow cavity is divided into a detection cavity and an equipment accommodating cavity along the gravity direction; the side wall of the third shell forming the detection cavity is provided with a gas inlet; the side wall of the third shell forming the equipment accommodating cavity is provided with an exhaust port;

the ion source, the amplifier and the built-in magnetic field are arranged in the detection cavity; wherein the detection cavity of the first housing is provided with an ion source and an amplifier; wherein the ion source is located between the amplifier and the gas inlet; the gas inlet penetrates through the first shell to form a first penetrating direction, a datum plane perpendicular to the first penetrating direction is provided, and the projection of the gas inlet on the datum plane is at least partially overlapped with the projection of the ion source on the datum plane;

and an air extracting device disposed in the device accommodating chamber of the second housing, the air extracting device applying a force to the gas in the detection chamber flowing toward the air outlet.

2. The mass spectrometer of claim 1, in which the built-in magnetic field is located above the ion source, the amplifier and the gas inlet in the direction of gravity.

3. The mass spectrometer of claim 1, wherein the first housing has a bottom wall in the direction of gravity, and the gas outlet is disposed on the bottom wall.

4. A mass spectrometry detection apparatus according to claim 3, wherein the area of the gas outlet is greater than 800 square mm.

5. The mass spectrometer of claim 1, wherein the gas inlet has an area greater than 50 square millimeters.

6. A mass spectrometer as claimed in claim 3, wherein the evacuation device is a molecular pump, the molecular pump being coupled to the gas outlet.