CN115219112A - Molecular pump and mass spectrometer leak detector - Google Patents
Molecular pump and mass spectrometer leak detector Download PDFInfo
- Publication number
- CN115219112A CN115219112A CN202210682479.6A CN202210682479A CN115219112A CN 115219112 A CN115219112 A CN 115219112A CN 202210682479 A CN202210682479 A CN 202210682479A CN 115219112 A CN115219112 A CN 115219112A
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- Prior art keywords
- molecular pump
- opening
- gas inlet
- cavity
- gas
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- 238000001514 detection method Methods 0.000 claims abstract description 48
- 230000005484 gravity Effects 0.000 claims abstract description 21
- 238000004949 mass spectrometry Methods 0.000 claims abstract description 20
- 230000000149 penetrating effect Effects 0.000 claims description 19
- 230000006835 compression Effects 0.000 claims description 17
- 238000007906 compression Methods 0.000 claims description 17
- 230000035515 penetration Effects 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 238000001819 mass spectrum Methods 0.000 abstract description 10
- 238000000605 extraction Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 89
- 239000001307 helium Substances 0.000 description 16
- 229910052734 helium Inorganic materials 0.000 description 16
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 16
- 150000002500 ions Chemical class 0.000 description 16
- 238000010586 diagram Methods 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The embodiment of the specification provides a molecular pump and a mass spectrometer leak detector, and relates to the field of detection equipment. The molecular pump includes: the mass spectrometry detection device comprises a shell with a cavity and an equipment accommodating cavity, wherein the cavity is positioned above the equipment accommodating cavity along the gravity direction, the equipment accommodating cavity is used for accommodating air extraction equipment, and a connecting port and a gas inlet which are used for connecting a mass spectrometry detection device are arranged on the side wall of the cavity. The mass spectrometer leak detector comprises: a mass spectrometric detection device having an ion source, a magnetic field and an amplifier, and the above molecular pump. The gas entering the molecular pump from the gas inlet cannot pass through the air extraction equipment, and most of the gas enters the mass spectrum detection device through the connecting port, so that the loss of target gas in the process of passing through the molecular pump is reduced, and the precision of the mass spectrum leak detector is improved.
Description
Technical Field
The invention relates to the field of detection equipment, in particular to a molecular pump and a mass spectrum leak detector using the molecular pump.
Background
The mass spectrometer leak detector is a special leak detection instrument. Whether the object to be detected has the leak can be judged by detecting whether the target gas exists in the environmental gas. Typically, helium may be used as the target gas and a corresponding mass spectrometer leak detector may be used to detect the presence of helium in the ambient gas.
Specifically, in use, helium is sprayed on one side of the device to be tested, and the leak detector is evacuated from the other side. If the tested device has a leak hole, helium enters the leak detector through the leak hole. When helium entering the leak detector passes through a molecular pump of the leak detector, because helium has small relative molecular mass, part of helium entering the leak detector can overcome the force of an impeller and enter a helium mass spectrum detection device under the action of a compression ratio, and part of helium can be discharged along with air flow. This results in a very small amount of helium entering the helium mass spectrometer detection device, which is difficult to detect accurately.
The mass spectrometer leak detector may include a mass spectrometer detection device and a molecular pump.
Disclosure of Invention
In view of the above, an object of the present disclosure is to provide a molecular pump capable of improving detection accuracy and a mass spectrometer leak detector using the same.
In order to achieve the above object, the present specification provides a molecular pump, including a housing having a cavity and an equipment accommodating cavity, wherein the cavity is located above the equipment accommodating cavity along a gravity direction, the equipment accommodating cavity is used for accommodating an air-extracting device, and a side wall of the cavity is provided with a connection port for connecting a mass spectrometry detection apparatus and a gas inlet.
The specification also provides a mass spectrum leak detector which comprises the molecular pump and a mass spectrum detection device, wherein the mass spectrum detection device is provided with a connecting port connected with the molecular pump.
Compared with the prior art, the mass spectrometer leak detector provided by the embodiment of the specification is characterized in that the cavity of the molecular pump is provided with the gas inlet and the connecting port for connecting the mass spectrometer detection device, and the gas inlet and the connecting port are close to each other in relative position, so that gas entering the cavity from the gas inlet enters the mass spectrometer detection device from the cavity by overcoming the action of gravity and air extraction equipment, the target gas entering the mass spectrometer detection device is increased, and the requirement for improving the detection precision of the leak detector is met.
Drawings
FIG. 1 is a schematic diagram illustrating the use of one embodiment of the present disclosure to provide a molecular pump.
Fig. 2 is a schematic diagram of a molecular pump and a mass spectrometric detection apparatus provided by an embodiment of the present specification.
Fig. 3 is a schematic diagram illustrating a gas inlet and a connection port of a molecular pump according to an embodiment of the present disclosure.
Fig. 4 is a schematic diagram illustrating a gas inlet and a connection port in a cross section of a molecular pump provided by an embodiment of the present disclosure.
Fig. 5 is a schematic diagram illustrating a gas inlet and a connection port in a cross section of a molecular pump provided by an embodiment of the present disclosure.
Fig. 6 is a schematic diagram illustrating a gas inlet and a connection port of a molecular pump according to an embodiment of the present disclosure.
Fig. 7 is a schematic diagram illustrating a gas inlet and a connection port in a cross section of a molecular pump provided by an embodiment of the present disclosure.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Please refer to fig. 1. Embodiments of the present description provide a molecular pump 100. The molecular pump 100 may include: the mass spectrometer comprises a housing 102 having a cavity 108 and a device accommodating cavity 104, wherein the cavity 108 is located above the device accommodating cavity 102 along a gravity direction, the device accommodating cavity 104 is used for accommodating a gas suction device, and a connection port 101 and a gas inlet 106 for connecting the mass spectrometer 200 are arranged on a side wall of the cavity 108.
In some embodiments, the housing 102 may be used to provide support for the overall structure of the molecular pump 100. The interior of the housing 122 may be hollow as a whole, with the cavity 108 and the device accommodating chamber 104 formed along the direction of gravity.
It is understood that the cavity 108 may be a spatial structure that is not physically occupied by a solid. It will also be appreciated that the cavity 108 provides a through passage for gas flow. The portion of the housing 102 surrounding the cavity 108 forms a sidewall of the cavity 108. The cavity 108 may be part of the interior space of the housing 102. The cavity 108 communicates with the equipment-receiving cavity 104.
The gas inlet 106 is provided on a side wall of the cavity 108. The gas inlet 106 may be used for the flow of the gas to be detected into the molecular pump 100. The connection port 101 is further disposed on the side wall of the cavity 108, and the connection port 101 can be used for connecting the molecular pump 100 to the mass spectrometry detection device 200.
Please refer to fig. 3, 4 and 5. In some embodiments, the housing 102 may have a rectangular parallelepiped shape or a cylindrical shape extending along the direction of gravity. Specifically, when the housing 102 may have a rectangular parallelepiped shape extending along the gravity direction, the gas inlet 106 and the connection port 101 may be located on a side wall of the opposite housing 102, on a side wall of an adjacent housing 102, or on a side wall of the same housing 102. Please refer to fig. 5 and 6. Preferably, the gas inlet 106 and the connection port 101 are disposed on the same side wall of the housing, and the connection port 101 is located above the gas inlet 106 along the gravity direction, and the target gas has a small relative molecular mass, and thus diffuses upward after entering the cavity 108 through the gas inlet 106, and more easily enters the connection port 101 located above the gas inlet 106.
Please refer to fig. 7. When the housing 102 may be cylindrical in shape, the gas inlet 106 may have a first penetrating direction penetrating through the housing 102, the connection port 101 has a second penetrating direction penetrating through the housing, the first penetrating direction and the second penetrating direction are approximately perpendicular to the gravity direction, and an included angle between the first penetrating direction and the second penetrating direction is 0 to 180 degrees.
Referring to fig. 7, the angle α shown in fig. 7 may be the included angle. The third reference plane is provided to be perpendicular to the gravity direction, and is not a plane of the molecular pump 100 itself but an ideal plane constructed with the gravity direction as a reference. The 0 degree may be a projection of the first penetration direction on the third reference plane completely overlapping a projection of the second penetration direction on the third reference plane, and the 180 degree may be a projection of the first penetration direction on the third reference plane not overlapping and parallel to a projection of the second penetration direction on the third reference plane. Preferably, an included angle between the first penetrating direction and the second penetrating direction may range from 0 to 90 degrees. When the included angle between the first penetrating direction and the second penetrating direction is smaller than or equal to 90 degrees, the distance between the gas inlet 106 and the connecting port 101 is relatively short in the range of 90 to 180 degrees relative to the included angle between the first penetrating direction and the second penetrating direction, so that gas can conveniently enter the mass spectrometry detection device.
In some embodiments, a first reference plane perpendicular to the first through direction may be provided, the first reference plane is not a plane of the molecular pump 100 itself, but an ideal plane constructed with the first through direction as a reference, and the first reference plane may be parallel to the gravity direction. The projection of the gas inlet 106 on the first reference plane at least partially overlaps the projection of the connection port 124 on the first reference plane. The projection of the gas inlet 106 on the first reference plane may refer to a contour edge of the gas inlet 106 closest to the first reference plane, the projection of the connection port 101 on the first reference plane may refer to a contour edge of the connection port 101 closest to the first reference plane, and the at least partial overlapping of the projections may be a relationship in which the projections of the gas inlet 106 and the connection port 101 are completely overlapped and completely matched, and the partial projections occupy the same position.
In some embodiments, the gas flowing in from the gas inlet 106 may be a mixed gas of a target gas and an ambient gas. Specifically, for example, the device under test is in an environment containing an environmental gas, a target gas is sprayed on one side of the device under test, and a leak detection port of the leak detector may directly cover a weld, a joint, or other suspected leak points for air extraction. When the detected device has a leak hole, the mass spectrometer leak detector can pump the environmental gas and the target gas leaked from the leak hole into the detector together to form mixed gas. The target gas is a gas with relatively small molecular mass and stable property, and can be detected by a corresponding mass spectrum detection device. Specifically, for example, helium or hydrogen. The ambient gas is a gas in an environment in which the object to be detected exists. Specifically, for example, air.
When the mixed gas flowing from the gas inlet 106 moves toward the connection port 101 in the cavity 108, the target gas having a relatively small molecular mass may be located at a position upward in the direction of gravity, and the ambient gas having a relatively large molecular mass may be located at a position downward in the direction of gravity. The gas in the cavity can be extracted by the air extracting device in the device accommodating cavity 104, the target gas at the upper relative position is less influenced by the air extracting device and can enter the connecting port 101 more easily, and the environmental gas at the lower relative position is more influenced by the air extracting device and can be extracted from the molecular pump 100 by the air extracting device.
In some embodiments, the equipment-receiving cavity 104 is located below the cavity 108 along the direction of gravity, so as to facilitate the extraction of the gas in the cavity 108, and maintain the cavity 108 in a gas-lean state, thereby prolonging the service life of the equipment.
The equipment-receiving cavity 104 may be a spatial structure that is not physically occupied by a solid. It will also be appreciated that the equipment-receiving cavity 104 provides a receiving space for the air-extracting equipment, providing a structure for mounting the air-extracting equipment. The portion of the housing 102 surrounding the equipment-receiving cavity 104 forms a sidewall of the equipment-receiving cavity 104. The device receiving chamber 104 may be a part of the inner space of the molecular pump 100. The device receiving cavity 104 may be in communication with the cavity 108.
Specifically, the evacuation device applies a force to the gas in the molecular pump 100 to flow toward the first opening 118, so that the gas in the molecular pump 100 can be discharged from the first opening 118.
In some embodiments, the suction device can be a single drive device or a combination drive device. In particular, the combined drive device may be combined by the first drive device 112 and the second drive device 116. Preferably, the first drive apparatus 112 is a turbo vacuum pump and the second drive apparatus 116 is a drag vacuum pump.
The first opening 118 is disposed on a sidewall of the device accommodating chamber 104, and the first opening 118 can be used for gas exhaust in the molecular pump 100. Along the gravity direction, the first opening 118 is located below the gas inlet 106 and the pumping device, so that the molecular pump 10 can exhaust the ambient gas with relatively large molecular mass, and the cavity can be maintained in a gas-lean state, thereby prolonging the service life of the device.
The second opening 114 and the third opening 110 are disposed on a sidewall of the device accommodating chamber 104, and the second opening 114 and the third opening 110 can be used for the gas to be detected to flow into the molecular pump 100. The second opening 114 and the third opening 110 are located between the gas inlet 106 and the first opening 118 in the direction of gravity. Specifically, the second opening 114 may be disposed in the sidewall of the device accommodating cavity 104 and within the range of the second driving device 116; the third opening 110 may be disposed in a side wall of the device receiving cavity 104 within the confines of a first actuating device 112.
When the target gas passes through the molecular pump 100, a loss occurs due to the impeller and the obstruction of the gas flow, and the shorter the path of the target gas through the molecular pump 100, the smaller the loss. The third opening 110 and the second opening 114 can be respectively arranged at different positions on the side wall of the equipment accommodating cavity 104, so that various detection options with different accuracies can be provided for the detected device.
In the gravity direction, the gas inlet 106, the third opening 110, the second opening 114 and the first opening 118 may be sequentially disposed on the sidewall of the apparatus accommodating chamber 104, and a suitable gas inlet may be selected according to the presence or absence of a reaction in the mass spectrometry detection device 200. Specifically, the target gas entering the mass spectrometry detection apparatus 200 may cause the mass spectrometry detection apparatus 200 to generate heat, and in order to protect the mass spectrometry detection apparatus 200, the first opening 118 may be selected as the air flow inlet, if the mass spectrometry detection apparatus 200 does not react, the second opening 114 may be switched as the air flow inlet, if the mass spectrometry detection apparatus 200 does not react, the third opening 110 may be switched as the air flow inlet, and if the mass spectrometry detection apparatus 200 still does not react, the gas inlet 106 may be switched as the air flow inlet.
The dimensions and specific locations of the first opening 118, the second opening 114, the third opening 110, and the gas inlet 106 may be determined by compression ratio calculations. The compression ratio can refer to the ratio of the pressures of two openings of the molecular pump, and is used for describing the pumping capacity of the molecular pump between the two openings.
In some embodiments, the first opening 118 and the third opening 110 may have a first compression ratio therebetween. The first opening 118 and the second opening 114 may have a second compression ratio therebetween. The first opening 118 and the gas inlet 106 may have a third compression ratio therebetween.
In some embodiments, the ratio between the first compression ratio and the second compression ratio may range from 1000 to 1000000, and preferably, the ratio may range from 50000 to 220000. The ratio between the first compression ratio and the third compression ratio may range from 100 to 10000. Preferably, the ratio can range from 800 to 3600.
In some embodiments, the diameter of the gas inlet 106 may be greater than or equal to 25mm, and the diameter of the connection port 101 may approach the diameter of the gas inlet 106. Preferably, the ratio of the area of the connection port 101 to the area of the gas inlet 108 may be in the range of 0.9 to 1.3, so that the gas flowing from the gas inlet 106 enters the mass spectrometry detection apparatus 200 through the connection port 101.
In some embodiments, the gas inlet 106, the connection port 101, the first opening 118, the second opening 114, and the third opening 110 may be a through structure having a circular cross section, so as to facilitate gas circulation and increase the detection rate.
Please refer to fig. 2. The embodiment of the specification provides a mass spectrum detection device 200 and a mass spectrum leak detector of the molecular pump 100. The mass spectrometric detection apparatus 200 can detect the type of gas by mass spectrometry. The mass spectrometry detection device 200 can include: a mass spectrometer chamber having an ion source 206, a magnetic field 204, and an amplifier 202. The ion source 206 may include a filament that may emit electrons. The magnetic field 204 may have a controllable voltage. The amplifier 202 may include a receiving device that receives target ions, a converting device that converts the received target ions into an electrical signal, and an amplifying device that amplifies the electrical signal. Electrons emitted from a filament in the ion source 206 collide with the gas entering the source to ionize the gas into positive ions, and the positive ions enter the magnetic field 204 and are deflected by the action of lorentz force to form an arc-shaped orbit. By controlling the voltage across the magnetic field 204, the deflection trajectory of the target gas ions is controlled, and the target gas ions reach the amplifier 202 and are detected.
The connection port 101 may be provided in the mass spectrometer detection device housing 208, and the connection port 101 may be used for connecting the mass spectrometer detection device 200 to the molecular pump 100.
In order to facilitate the gas to enter the ion source 206 in the mass spectrometric detection apparatus 200, a second reference plane perpendicular to the second direction of penetration is provided, the projection of the ion source 206 on the second reference plane at least partially overlaps the projection of the connecting port 101 on the second reference plane, and the ion source 206 may be located between the connecting port 101 and the magnetic field 204, so that the path of the target gas from the connecting port 101 to the ion source 206 may be shortened, and the loss of the target gas may be reduced. The second reference plane is not a plane of the molecular pump 100 itself, but an ideal plane constructed parallel to the gravity direction with the second penetrating direction as a reference. The projection of the ion source 206 on the second reference plane may refer to a contour edge of the ion source 206 closest to the second reference plane, the projection of the connecting opening 124 on the second reference plane may refer to a contour edge of the connecting opening 124 closest to the second reference plane, and the at least partial overlapping of the projections may be a relationship that the projections of the ion source 206 and the connecting opening 124 are completely covered and completely coincident, and partial projections occupy the same position.
In some embodiments, the mass spectrometer leak detector may be a helium mass spectrometer leak detector or a hydrogen mass spectrometer leak detector. Specifically, when the target gas is helium and the mass spectrometer detection device is a helium mass spectrometer detection device, the mass spectrometer leak detector is a helium mass spectrometer leak detector, and when the target gas is hydrogen and the mass spectrometer detection device is a hydrogen mass spectrometer detection device, the mass spectrometer leak detector is a hydrogen mass spectrometer leak detector.
The features of the above embodiments may be arbitrarily combined, and for the sake of brevity, all possible combinations of the features in the above embodiments are not described, but should be construed as being within the scope of the present specification as long as there is no contradiction between the combinations of the features.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and the like that are within the spirit and principle of the present invention are included in the present invention.
Claims (10)
1. A molecular pump, characterized by comprising: the mass spectrometry detection device comprises a shell with a cavity and an equipment accommodating cavity, wherein the cavity is located above the equipment accommodating cavity along the gravity direction, the equipment accommodating cavity is used for accommodating air pumping equipment, and a connecting port and a gas inlet which are used for connecting the mass spectrometry detection device are arranged on the side wall of the cavity.
2. The molecular pump of claim 1, wherein the device receiving chamber side wall has a first opening, the pumping device applying a force to the gas entering from the gas inlet that flows toward the first opening.
3. The molecular pump of claim 1, wherein the device-receiving chamber sidewall is provided with a second opening and a third opening along a direction of gravity, the gas inlet is located above the second opening and the third opening, and the second opening is located between the first opening and the third opening; a first compression ratio is arranged between the first opening and the third opening, a second compression ratio is arranged between the first opening and the second opening, and the value range of the ratio of the first compression ratio to the second compression ratio is between 1000 and 1000000.
4. The molecular pump of claim 3, wherein a third compression ratio is provided between the first opening and the gas inlet, and a ratio between the first compression ratio and the third compression ratio ranges from 100 to 10000.
5. The molecular pump of claim 1, wherein the gas inlet has a diameter greater than or equal to 25mm, and the connection port has a diameter approaching the diameter of the gas inlet.
6. The molecular pump of claim 1, wherein a ratio of an area of the connection port to an area of the gas inlet is in a range of 0.9 to 1.3.
7. The molecular pump of claim 1, wherein the gas inlet has a first penetrating direction that penetrates the housing, the connection port has a second penetrating direction that penetrates the housing, and an included angle between the first penetrating direction and the second penetrating direction ranges from 0 to 90 degrees.
8. The molecular pump of claim 7, wherein a first reference plane is provided perpendicular to the first direction of penetration, and a projection of the gas inlet port on the first reference plane at least partially overlaps a projection of the connection port on the first reference plane.
9. A mass spectrometer leak detector, comprising: a mass spectrometry detection apparatus having an ion source, a magnetic field and an amplifier, and a molecular pump according to any one of claims 1 to 8.
10. The mass spectrometry detection device of claim 9, wherein the mass spectrometry detection device is in communication with the molecular pump via the connection port to provide a second reference plane perpendicular to the second direction of penetration, wherein a projection of the ion source onto the second reference plane at least partially overlaps a projection of the connection port onto the second reference plane, and wherein the ion source is positioned between the connection port and the magnetic field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210682479.6A CN115219112A (en) | 2022-06-16 | 2022-06-16 | Molecular pump and mass spectrometer leak detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210682479.6A CN115219112A (en) | 2022-06-16 | 2022-06-16 | Molecular pump and mass spectrometer leak detector |
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| Publication Number | Publication Date |
|---|---|
| CN115219112A true CN115219112A (en) | 2022-10-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210682479.6A Pending CN115219112A (en) | 2022-06-16 | 2022-06-16 | Molecular pump and mass spectrometer leak detector |
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| CN (1) | CN115219112A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5585548A (en) * | 1992-08-26 | 1996-12-17 | Leybold Aktiengesellschaft | Counterflow leak-detector unit with a high-vacuum pump |
| CN2687669Y (en) * | 2004-02-16 | 2005-03-23 | 臧牧 | Fully-automatic high-sensitivity helium mass spectra leak detecting in strument |
| US20060169028A1 (en) * | 2003-02-27 | 2006-08-03 | Christian Beyer | Test-gas leak detector |
| CN201368790Y (en) * | 2008-09-29 | 2009-12-23 | 合肥皖仪科技有限公司 | Hypersensitized helium mass spectrometer leak detector |
| CN106246564A (en) * | 2015-06-09 | 2016-12-21 | 株式会社岛津制作所 | Vacuum pump and quality analysis apparatus |
-
2022
- 2022-06-16 CN CN202210682479.6A patent/CN115219112A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5585548A (en) * | 1992-08-26 | 1996-12-17 | Leybold Aktiengesellschaft | Counterflow leak-detector unit with a high-vacuum pump |
| US20060169028A1 (en) * | 2003-02-27 | 2006-08-03 | Christian Beyer | Test-gas leak detector |
| CN2687669Y (en) * | 2004-02-16 | 2005-03-23 | 臧牧 | Fully-automatic high-sensitivity helium mass spectra leak detecting in strument |
| CN201368790Y (en) * | 2008-09-29 | 2009-12-23 | 合肥皖仪科技有限公司 | Hypersensitized helium mass spectrometer leak detector |
| CN106246564A (en) * | 2015-06-09 | 2016-12-21 | 株式会社岛津制作所 | Vacuum pump and quality analysis apparatus |
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Application publication date: 20221021 |
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