CN115256206A

CN115256206A - Polishing equipment

Info

Publication number: CN115256206A
Application number: CN202210556991.6A
Authority: CN
Inventors: 杨新春; 王焱; 陈平
Original assignee: Fuzhun Precision Mould Huaian Co Ltd
Current assignee: Fuzhun Precision Mould Huaian Co Ltd
Priority date: 2022-05-20
Filing date: 2022-05-20
Publication date: 2022-11-01

Abstract

The invention discloses polishing equipment which comprises a case, a fixing mechanism, a guide post rod, a driving device, an abrasive material and a power device, wherein the fixing mechanism is fixed on the case and used for fixing a workpiece, the guide post rod can move relative to the workpiece, the driving device is used for driving the guide post rod to move, the abrasive material is used for polishing the workpiece, and the power device is used for enabling the abrasive material to be in contact with the workpiece. The polishing equipment has high polishing efficiency, good product polishing effect and more uniform polishing surface.

Description

Polishing equipment

[ technical field ] A

The present invention relates to a polishing apparatus, and more particularly, to a polishing apparatus for automatically polishing a workpiece.

[ background ] A method for producing a semiconductor device

In the fields of mechanical manufacturing and the like, the produced workpiece needs to be polished, the traditional manual polishing completely depends on manual work, the instability is high, and the consistent brightness of the whole polished surface cannot be ensured. The polishing effect of the product is not uniform due to the instability of the manual polishing, and the manual polishing efficiency is low.

Therefore, it is necessary to provide a polishing apparatus having a polishing surface which can effectively improve polishing efficiency and is uniform.

[ summary of the invention ]

The invention mainly aims to provide polishing equipment which has high polishing efficiency and a more uniform product polishing surface.

In order to achieve the purpose, the invention can adopt the following technical scheme: a polishing device comprises a case, a fixing mechanism fixed on the case and used for fixing a workpiece, a guide post rod capable of moving relative to the workpiece, a driving device used for driving the guide post rod to move, an abrasive used for polishing the workpiece and a power device used for enabling the abrasive to be in contact with the workpiece, wherein the guide post rod can move relative to a surface to be polished of the workpiece, so that the abrasive is driven to move relatively to polish the workpiece.

Compared with the prior art, the invention has the following beneficial effects: the polishing equipment provided by the invention is provided with the case, the fixing mechanism which is fixed on the case and used for fixing the workpiece, the guide post rod which can move relative to the workpiece, the driving device which drives the guide post rod to move, the abrasive used for polishing the workpiece and the power device which enables the abrasive to be in contact with the workpiece, wherein the guide post rod moves relative to the surface to be polished of the workpiece, so that the abrasive is driven to move relatively to polish the workpiece, and the polishing equipment has the advantages of high polishing efficiency, good product polishing effect and uniform polished surface.

[ description of the drawings ]

Fig. 1 is a perspective view of a polishing apparatus according to the present invention.

Fig. 2 is a perspective view of another perspective view of the polishing apparatus shown in fig. 1.

Fig. 3 is an exploded view of the polishing apparatus shown in fig. 1.

Fig. 4 is an exploded view of another perspective view of the polishing apparatus shown in fig. 3.

Fig. 5 is an enlarged view within a broken line frame of the polishing apparatus shown in fig. 1.

Fig. 6 is a partially exploded view of the polishing apparatus shown in fig. 5.

Fig. 7 is an exploded view of another perspective view of the polishing apparatus shown in fig. 6.

Fig. 8 is an exploded view of a seal block and a workpiece to be processed of the polishing apparatus shown in fig. 7.

Fig. 9 is a perspective view of the guide post rod of the polishing apparatus shown in fig. 8 moving through the workpiece.

Fig. 10 is a perspective view of the guide post rod of the polishing apparatus shown in fig. 9 moved to another position of the workpiece.

[ description of main reference symbols ]

Servo motor 410 of polishing apparatus 100

Workpiece 200 screw rod 420

Connecting block 440 of inner chamber 201

Chassis 10 cylinder 610

Securing mechanism 20 piston 620

Guide post rod 30 piston rod 630

Hydraulic cylinder 650 of drive device 40

Power unit 60 opening 611

Mounting base 210 insert 70

Stationary platen 220 seal 80

Fixed block 230 human machine interface 110

Communicating port 231 sealing block 810

Seal spacer 820 port 801

Sealing washer 811

[ detailed description ] embodiments

Referring to FIGS. 1-10, a polishing apparatus 100 according to the present invention is shown for polishing a surface of an interior cavity 201 of a workpiece 200. The polishing apparatus 100 includes a housing 10, a fixing mechanism 20 fixed to the housing 10 for fixing the workpiece, a guide rod 30 reciprocally movable with respect to the workpiece 200, a driving device 40 for driving the guide rod 30 to move, an abrasive (not shown) for polishing the workpiece, and a power device 60 for bringing the abrasive into contact with the workpiece. The guide post rod 30 is movable relative to the inner cavity of the workpiece 200 to bring about relative movement of the abrasive to polish the workpiece 200.

The driving device 40 is located on one side of the workpiece 200, and the power device 60 is located on the other side of the workpiece 200. The workpiece 200 may be a single part or a combination of several parts. For the convenience of understanding, the direction of the reciprocating motion of the plunger 30 is the front-rear direction in the present invention. Wherein the direction in which the guide post 30 is moved to the workpiece 200 is defined as forward. The power unit 60 is located in front of the workpiece. Such that the drive means 40 is located behind the workpiece 200.

The inner chamber 201 is penetrated in the front-rear direction. The fixing mechanism 20 includes a mounting base 210 on the housing 10, a fixing table 220 mounted on the mounting base 210, and a pair of fixing blocks 230 provided on the fixing table 220 and located at front and rear sides of the workpiece 200. The two fixing blocks 230 clamp and fix the workpiece 200 in the front-rear direction. The pair of fixing blocks 230 are provided with communication ports 231 communicating with the inner chamber 201 in the front-rear direction. The abrasive can flow into the inner cavity 201 through the communication port 231.

The driving device 40 includes a servo motor 410, a screw rod 420 connected to the servo motor 410, and a connecting block 440 mounted on the screw rod 420. The screw 420 is coupled to the servo motor 410. The lead screw 420 drives the connecting block 440 to reciprocate along the front and rear direction as the servo motor 410 rotates. The guide post 30 extends in the front-rear direction. One end of the guide post rod 30 is fixed on the connecting block 440, and the other end extends toward the workpiece 200. The other end is movable into the cavity 201 of the workpiece 200. And the cross-sectional shape of the other end of the guide post rod 30 substantially matches the inner cavity 201 of the workpiece 200 to be polished.

Specifically, in the present invention, the abrasive is a polishing sand flow. The polishing sand flow is substantially in the form of an oily liquid. Of course the abrasive material may be other suitable materials.

The power unit 60 presses the polishing sand toward the inner cavity 201 of the workpiece 200 by pressure. Specifically, in the present invention, the power device 60 includes a cylinder 610 filled with the polishing sand flow and disposed at the other side of the workpiece 200, a piston 620 extending into the cylinder 610 and capable of pushing the polishing sand flow, a piston rod 630 connected to the piston 620, and a hydraulic cylinder 650 for driving the piston rod 630 to reciprocate back and forth. The cylinder body 610 is provided with an opening 611 communicated with the inner cavity. When the piston 620 pushes the flow of polishing sand to the inner chamber 201 with pressure. The direction in which the polishing sand flows into the workpiece 200 coincides with the direction in which the piston 620 moves, and both move in a direction close to the workpiece 200.

The other end of the guide post rod 30 further includes an insert 70 fixed thereto to be movable back and forth together with the guide post rod 30. When the piston 620 pushes the sand flow toward the workpiece 200, the polishing sand flow enters between the inlet 70 and the workpiece 200. The driving device 40 can drive the guide post rod 30 to reciprocate back and forth, so as to drive the insert 70 and the sand flow to move relative to the surface to be polished of the workpiece 200, so as to grind the inner cavity and polish the workpiece.

The rotation speed of the servo motor 410 is uniform, so that the guide post rod 30 is driven to move at a uniform speed, and the workpieces 200 are polished uniformly and have consistent brightness. The servo motor 410 is used for driving the connecting block 440 to change up and down and controlling the roughness of the polished surface of the workpiece by the moving speed of the guide post rod 30, so that the surface can be controlled independently.

The polishing apparatus 100 further includes a sealing member 80 between the driving device 40 and the fixed block 230 at the rear side of the workpiece to prevent the abrasive from overflowing. The seal includes a seal block 810, and seal blocks 820 on both sides of the seal block 810. The sealing block 810 and the sealing cushion block 820 are respectively provided with a through hole 801 which is through from front to back, and the shape of the through hole 801 is matched with that of the guide post rod 30. The stem 30 may pass through the opening 801 in the forward and rearward directions. The seal further includes a sealing gasket 811 disposed within the port 801 of the seal block 810. The polishing apparatus 100 further comprises a human-machine interface 110 mounted on the cabinet 10, and the cabinet 10 comprises a PLC control module.

In actual operation, the fixing mechanism 20 fixes the workpiece 200 on the machine table. The inner cavity 201 extends in the front-back direction, one end of the guide post rod 30 is fixed on the connecting block 440, then the screw rod 420 rotates through the servo motor 410 to drive the connecting block 440 to move forward, further to drive the guide post rod 30 which is fixed on the connecting block 440 and is sleeved with the insert 70 to move forward, so that the other end of the guide post rod 30, sleeved with the insert 70, moves forward to enter the inner cavity 201 of the workpiece 200, then the hydraulic cylinder 650 pushes the piston 620 to move in the direction of the workpiece 200, so that the polishing sand flows into the space between the inner cavity 201 of the workpiece 200 and the insert 70, and finally the guide post rod 30 is driven to be far away from the workpiece 200 through the reverse rotation of the servo motor 410, so that the relative motion is formed between the inner cavity 201 of the workpiece 200 and the polishing sand flow, and the inner cavity 201 is polished.

The polishing device 100 provided by the invention is provided with a case 10, a fixing mechanism 20 fixed on the case 10 and used for fixing the workpiece 200, a guide post rod 30 capable of moving relative to the workpiece 200, a driving device 40 used for driving the guide post rod 30 to move, an abrasive used for polishing the workpiece 200 and a power device 60 used for enabling the abrasive to be in contact with the workpiece 200, wherein the guide post rod 30 moves relative to a surface to be polished of the workpiece 200, so that the relative movement between the abrasive and the polished surface is driven to polish the workpiece.

Claims

1. A polishing apparatus characterized by: the polishing equipment comprises a case, a fixing mechanism fixed on the case and used for fixing the workpiece, a guide post rod capable of moving relative to the workpiece, a driving device used for driving the guide post rod to move, abrasive materials used for polishing the workpiece and a power device used for enabling the abrasive materials to be in contact with the workpiece, wherein the guide post rod can move relative to a surface to be polished of the workpiece, so that the abrasive materials are driven to move relatively to polish the workpiece.

2. The polishing apparatus according to claim 1, wherein the fixing mechanism includes a fixing table and a pair of fixing blocks disposed on the fixing table and located on front and rear sides of the workpiece, the fixing blocks holding the workpiece in a front-rear direction.

3. A polishing apparatus according to claim 2, wherein said driving means comprises a servomotor on one side of said workpiece, a lead screw journalled to said servomotor, and a connecting block mounted on said lead screw, one end of said pilot rod being fixed to the connecting block, and the other end being movable forward to said workpiece.

4. The polishing apparatus according to claim 1, wherein the power unit presses the abrasive against the surface to be polished of the workpiece with pressure.

5. The polishing apparatus of claim 1, wherein the abrasive is polishing quicksand.

6. A polishing apparatus according to claim 5, wherein said power means comprises a cylinder filled with polishing quicksand provided on the other side of said workpiece, a piston extending into said cylinder and moving said quicksand, a piston rod connected to said piston, and a hydraulic cylinder driving said piston rod to move back and forth.

7. The polishing apparatus as recited in claim 6, wherein the direction of the polishing quicksand flowing toward the workpiece coincides with the direction of the piston movement.

8. The polishing apparatus as claimed in claim 5, further comprising an insert fixed to the other end of the guide post rod to be movable together with the guide post rod, wherein the polishing quicksand enters between the insert and the workpiece, and the driving means drives the guide post rod to move the insert and the polishing quicksand relative to a surface to be polished of the workpiece to grind the workpiece.

9. The polishing apparatus as recited in claim 2, further comprising a seal between the drive device and the fixed block to prevent egress of the abrasive.

10. The polishing apparatus of claim 1, further comprising a human machine interface mounted on the cabinet, the cabinet including a PLC control module.