CN115241026B - Rotating device and magnetic control coating equipment - Google Patents
Rotating device and magnetic control coating equipment Download PDFInfo
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- CN115241026B CN115241026B CN202211169361.XA CN202211169361A CN115241026B CN 115241026 B CN115241026 B CN 115241026B CN 202211169361 A CN202211169361 A CN 202211169361A CN 115241026 B CN115241026 B CN 115241026B
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- cover
- cooling chamber
- bearing
- rotating shaft
- shaft assembly
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/005—Cooling methods or arrangements
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
- H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
- H02K49/104—Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element
- H02K49/106—Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element with a radial air gap
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
- H02K7/1004—Structural association with clutches, brakes, gears, pulleys or mechanical starters with pulleys
Abstract
The present invention provides a rotating device, comprising: the magnetic coupling is provided with a leakage isolation cover, a main bracket, a fixed shaft assembly and a rotating shaft assembly; the leakage isolation cover is buckled above the cooling chamber and forms a built-in space, wherein the built-in space is communicated with the cooling chamber; the main bracket is arranged above the cooling chamber, and the fixed shaft assembly is hung outside the leakage isolation cover through the main bracket; the rotating shaft assembly is positioned in the built-in space, the top end of the rotating shaft is hung at the top of the leakage isolating cover, and the bottom end of the rotating shaft penetrates through the top of the cooling chamber and is connected with the magnetron; wherein the fixed shaft assembly and the rotating shaft assembly are adapted for rotational movement based on radial magnetic coupling. The rotating device provided by the invention solves the problems that the cooling liquid leaks to the outside of the cooling chamber due to the abrasion of the dynamic sealing element of the existing rotating mechanism, and the external facilities of the physical vapor deposition equipment are polluted and corroded.
Description
Technical Field
The invention relates to the field of semiconductor equipment manufacturing, in particular to a rotating device and magnetic control coating equipment.
Background
Magnetron sputtering above the physical vapor deposition equipment is controlled by a magnetron, the magnetron is driven by a rotating mechanism to rotate and form a magnetic field with certain strength, the magnetic field acts on particles sputtered from a target material and controls the particles to move towards the direction of a wafer, and then the particles are deposited on the wafer to form a film with specific performance.
Since the rotation of the rotating mechanism generates a large amount of heat to be concentrated on the magnetron, and an excessively high temperature affects the stability of the strength of the magnetic field formed by the magnetron, the temperature of the magnetron needs to be lowered.
In the existing scheme, a magnetron is arranged in a sealed cooling chamber with circulating cooling liquid, and generated heat can be taken away by the circulating cooling liquid while the magnetron rotates; the rotating mechanism is arranged outside the cooling chamber, a rotating shaft of the rotating mechanism penetrates through the cooling chamber from outside to inside, the rotating shaft is driven by a driving belt wheel matched with the motor belt wheel to drive the magnetron to rotate, and the sealed cooling chamber has certain sealing pressure, so that the joint position of the rotating shaft and the cooling chamber is dynamically sealed through a dynamic sealing piece to prevent cooling liquid from flowing out.
However, the dynamic sealing elements have a common disadvantage that the long-term rotation causes a certain wear of the dynamic sealing elements, which in turn causes a leakage of the cooling fluid to different extents, and if the cooling fluid leaking to the outside of the cooling chamber is not treated in time, the cooling fluid may contaminate and even corrode the outside facilities of the pvd equipment.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a rotating device and a magnetron coating apparatus, which are used to solve the problem of the existing rotating mechanism that the cooling liquid leaks to the outside of the cooling chamber due to the abrasion of the dynamic seal, and the external facilities of the physical vapor deposition apparatus are corroded.
To achieve the above and other related objects, the present invention provides a rotation apparatus for driving a magnetron in a cooling chamber, the rotation apparatus comprising:
a magnetically coupled coupling, comprising: the leakage isolating cover, the main bracket, the fixed shaft assembly and the rotating shaft assembly;
the leakage isolation cover is buckled above the cooling chamber and forms a built-in space, wherein the built-in space is communicated with the cooling chamber;
the main bracket is arranged above the cooling chamber, and the fixed shaft assembly is hung outside the leakage isolating cover through the main bracket;
the rotating shaft assembly is positioned in the built-in space, the top end of the rotating shaft is hung at the top of the leakage isolation cover, and the bottom end of the rotating shaft penetrates through the top of the cooling chamber and is connected with the magnetron;
wherein the fixed shaft assembly and the rotating shaft assembly act as a rotational motion based on radial magnetic coupling.
Optionally, the fixed shaft assembly comprises: the device comprises a fixed shaft, a transmission belt wheel, a first bearing, a first magnet bracket and a first magnet;
the transmission belt wheel is arranged on the fixed shaft through the first bearing and is hung on the main bracket through the fixed shaft, wherein the transmission belt wheel does radial rotation movement based on the first bearing;
the first magnet support comprises a horizontal support arm and a vertical support arm, the horizontal support arm is installed at one end, away from the main support, of the transmission belt wheel, and the vertical support arm is connected with one side, away from the transmission belt wheel, of the horizontal support arm and extends vertically downwards;
the first magnet is mounted at one end of the vertical support arm, which is far away from the horizontal support arm.
Optionally, the rotating device further comprises:
a driver, comprising: a driving motor, a motor belt wheel and a driving belt;
the driving motor is arranged above the cooling chamber and is positioned on one side of the magnetic coupling;
the motor belt wheel is arranged on a motor shaft of the driving motor;
the driving belt is sleeved on the motor belt wheel and the transmission belt wheel.
Optionally, the rotating shaft assembly comprises: the rotating shaft, the positioning piece, the second magnet bracket and the second magnet;
the top end of the rotating shaft is hung on the top of the leakage isolating cover, and the bottom end of the rotating shaft penetrates through the top of the cooling chamber and is connected with the magnetron;
the second magnet support comprises a support casting and a support body, the support casting is mounted on the rotating shaft through the positioning piece, and the support body is mounted on the side edge of the support casting;
the second magnet is arranged on the side edge, far away from the bracket casting, of the bracket body.
Optionally, the weep cage comprises: the isolation cover body, the bearing cover plate, the second bearing and the shaft channel;
the isolation cover body comprises a top cover and a cover wall, the top cover and the cover wall enclose a structure with an opening at the bottom, and the structure with the opening at the bottom is buckled above the cooling chamber to form the built-in space;
the bearing cover plate comprises a cover plate main body and an installation clamping groove, the cover plate main body is positioned in the top cover, and the installation clamping groove is positioned at one end, close to the built-in space, of the cover plate main body;
the second bearing is positioned in the top cover, and a bearing inner hole of the second bearing is arranged corresponding to the mounting clamping groove;
the shaft channel penetrates through one end, close to the built-in space, of the top cover and extends to the installation clamping groove;
the rotating shaft is hung in the mounting clamping groove through a clamping piece and radially rotates on the basis of the second bearing and a third bearing, and the third bearing is mounted in an upper cover of the cooling chamber.
Optionally, the insulating enclosure further comprises: and the fixed sealing element is connected with one end, far away from the top cover, of the cover wall and extends along one side, far away from the built-in space, of the cover wall in the horizontal direction, and a sealing bulge is arranged on one side, in contact with the cooling chamber, of the fixed sealing element.
Optionally, the leakage shielding can further comprises: and the sealing cover plate is embedded in the top cover and is positioned above the bearing cover plate.
The invention also provides a magnetic control coating device, which comprises: a rotation device as claimed in any one of the preceding claims.
Optionally, the magnetron coating device further includes: the device comprises a coating cavity, a base, a target, a cooling chamber and a magnetron;
the base and the target are positioned in the coating cavity, wherein the base is arranged at the bottom of the coating cavity, and the target is arranged at the top of the coating cavity;
the cooling chamber is arranged above the film coating cavity and is provided with a liquid inlet end and a liquid outlet end;
the magnetron is installed in the cooling chamber through the rotating shaft.
Optionally, the upper cover of the cooling chamber includes: the cover body, the first through hole, the second through hole, the third bearing and the sealing groove;
the first through hole and the second through hole penetrate through the cover body, wherein the first through hole is arranged corresponding to the rotating shaft, and the second through hole is arranged on the periphery of the first through hole;
the third bearing is positioned at one end of the cover body close to the magnetic coupling coupler, and a bearing inner hole of the third bearing is coaxially arranged with the first through hole;
the sealing groove is positioned at one end of the cover body close to the magnetic coupling coupler and is arranged corresponding to the fixed sealing element of the leakage isolating cover.
As described above, the rotation device and the magnetron coating equipment of the present invention convert the substantial connection between the motor shaft and the rotation shaft into the non-substantial connection by using the magnetic coupling, so as to realize the non-contact transmission of the torque and the rotation speed between the motor shaft and the rotation shaft, thereby converting the sealing state between the rotation shaft and the cooling chamber from the dynamic sealing into the static sealing, avoiding the leakage problem of the cooling liquid caused by the abrasion of the dynamic sealing member or the change of the pressure, etc., ensuring the stability and the durability of the magnetron coating equipment, and being beneficial to improving the production efficiency of the magnetron coating equipment.
Drawings
FIG. 1 is a schematic view showing a structure of a magnetron coating apparatus having a rotating device of the present invention.
Fig. 2 is a schematic view showing the construction of a main stand and a fixed shaft assembly in the rotating apparatus of the present invention.
FIG. 3 is a schematic view of a leakage shielding case of the rotary device of the present invention.
Fig. 4 is a schematic structural view of a rotating shaft assembly of the rotating device of the present invention.
FIG. 5 is a schematic structural diagram of an upper cover of a cooling chamber in a magnetron coating apparatus according to the present invention.
Description of the element reference numerals:
10 rotary device, 100 magnetic coupling, 110 main bracket, 111 bracket top, 112 bracket arm, 113 transmission port, 114 installation through hole, 115 installation part, 120 fixed shaft assembly, 121 fixed shaft, 122 transmission pulley, 123 first bearing, 124 first magnet bracket, 1241 horizontal bracket arm, 1242 vertical bracket arm, 125 first magnet, 126 fastening nut, 127 fixed bolt, 130 leakage isolation cover, 131 isolation cover body, 1311 top cover, 1312 cover wall, 1313 fixed sealing element, 1314 sealing protrusion, 132 bearing cover plate, 1321 cover plate main body, 1322 installation clamping groove, 133 second bearing, 134 shaft passage, 135 sealing cover plate, 140 built-in space, 150 rotating shaft assembly, 151 rotating shaft, 152 positioning element, 153 second magnet bracket, 1531 bracket casting, 1532 bracket body, 154 second magnet, 160 clamping element, 200 driver, 210 driving motor, 211 motor shaft, 220 motor pulley, 230 driving belt, 20 coating cavity, 30 base, 40, 50 cooling liquid outlet chamber, 51 end, 52 end, 500 upper cover, 510, 520 through hole, 530 second bearing groove, 60 sealing groove, 60 liquid inlet of magnetron target, 60 groove.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1 to 5. It should be noted that the drawings provided in the present embodiment are only for schematically illustrating the basic idea of the present invention, and although the drawings only show the components related to the present invention and are not drawn according to the number, shape and size of the components in actual implementation, the form, quantity and proportion of each component in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.
As shown in fig. 1, the present embodiment provides a rotating apparatus 10 for driving a magnetron 60 in a cooling chamber 50; the rotating apparatus 10 includes: a magnetic coupling 100; further, the rotating apparatus 10 further includes: a driver 200.
The magnetic coupling 100 includes: a main support 110, a fixed shaft assembly 120, a leakage shield 130, and a rotating shaft assembly 150.
The main support 110 is installed above the cooling chamber 50 for providing stable support to the fixed shaft assembly 120.
As an example, as shown in fig. 2, the main support 110 includes: a bracket top 111, a bracket arm 112, a transmission port 113 and a mounting through hole 114; the bracket top 111 and the bracket arms 112 enclose a cover structure with an opening at the bottom, and the cover structure is fastened above the cooling chamber 50 and forms a hollow space so as to accommodate the fixed shaft assembly 120, the leakage shielding cover 130 and the rotating shaft assembly 150; the transmission port 113 penetrates through the bracket arm 112 corresponding to the motor pulley 220 in the driver 200, so that the driving belt 230 in the driver 200 passes through the main bracket 110 and is sleeved on the transmission pulley 122 in the fixed shaft assembly 120; the mounting through-hole 114 penetrates the bracket top 111 to facilitate mounting of the fixed shaft assembly 120. Optionally, the mounting through-hole 114 is located in a central position of the bracket top 111 in order to provide more stable support.
In practical applications, the main support 110 is made of stainless steel without magnetic attraction; the main support 110 may be directly welded to the cooling chamber 50, or one end of the support arm 112 away from the support top 111 may be bent outward to form a mounting member 115, and the mounting member 115 is fixedly mounted on the cooling chamber 50 by using a fastener, such as a bolt, to fixedly mount the main support 110 on the cooling chamber 50, which is not limited in this example.
As another example, the main support 110 includes: the transverse support arm, the longitudinal support arm and the mounting through hole are arranged on the base; one side of the transverse support arm is arranged above the cooling chamber 50 through the longitudinal support arm frame, and the other side of the transverse support arm is a free end; the mounting through holes are located in the transverse support arms and are as close as possible to the longitudinal support arms. Due to the non-cover structure of the main support 110 in this example, the longitudinal support arm can be mounted at a position away from the motor pulley 220 of the driver 200, so that a transmission port (not shown) is not required to be formed on the longitudinal support arm.
In order to enable the main support 110 to provide more stable support, the main support 110 includes two longitudinal support arms connected to both sides of the lateral support arms, respectively, to more stably mount the lateral support arms above the cooling chamber 50; at this time, the installation through hole should be located at the center position of the transverse bracket arm. Of course, the main support 110 may further include a plurality of transverse support arms extending outward from the central overlapping portion and longitudinal support arms connected to both sides of the transverse support arms, respectively; at this time, the mounting through-hole is located at the center overlapping of the plurality of lateral bracket arms.
The fixed shaft assembly 120 is hung outside the leakage shielding case 130 through the main support 110, and serves as a rotational movement in cooperation with the rotational shaft assembly 150 inside the leakage shielding case 130 based on a radial magnetic coupling, thereby transmitting a driving force generated by the driver 200 to the rotational shaft 151 of the rotational shaft assembly 150.
As an example, as shown in fig. 2, the fixed shaft assembly 120 includes: a fixed shaft 121, a driving pulley 122, a first bearing 123, a first magnet holder 124, and a first magnet 125; the driving pulley 122 is mounted on the fixed shaft 121 through a first bearing 123, and is hung on the main bracket 110 through the fixed shaft 121, wherein the driving pulley 122 performs radial rotation movement based on the first bearing 123; the first magnet frame 124 comprises a horizontal frame arm 1241 and a vertical frame arm 1242, the horizontal frame arm 1241 is mounted at one end of the driving pulley 122 far away from the main frame 110, and the vertical frame arm 1242 is connected with one side of the horizontal frame arm 1241 far away from the driving pulley 122 and vertically extends downwards; the first magnet 125 is mounted to an end of the vertical support arm 1242 remote from the horizontal support arm 1241.
Specifically, the fixing shaft 121 is mounted to the main bracket 110 by means of upper and lower fastening nuts 126, the horizontal bracket arm 1241 is mounted to the driving pulley 122 by means of at least one fixing bolt 127, the length of the vertical bracket arm 1242 is determined by the position of the first magnet 125, and the position of the first magnet 125 corresponds to the position of the second magnet 154. In practical applications, the driving pulley 122 may be hung on the main bracket 110 only by one fixing shaft 121, or hung on the main bracket 110 by at least two fixing shafts 121, and at this time, the number of the first bearings 123 and the fastening nuts 126 is only increased correspondingly (for example, one fixing shaft 121 is provided with two first bearings 123 and two fastening nuts 126).
Specifically, the first magnet holders 124 and the first magnets 125 are arranged in a one-to-one correspondence, and the number of the first magnets is greater than or equal to 1; in order to stabilize and accelerate the rotational movement between the fixed shaft assembly 120 and the rotating shaft assembly 150 based on the radial magnetic coupling, the number of the first magnets 125 and the second magnets 154 is generally equal to 2, and in this case, 2 first magnets 125 are symmetrically disposed and correspondingly, 2 second magnets 154 are symmetrically disposed.
The leakage isolating cover 130 is fastened above the cooling chamber 50 and forms an internal space 140, and the internal space 140 is communicated with the cooling chamber 50, so as to isolate the fixed shaft assembly 120 from the rotating shaft assembly 150, thereby realizing gas-liquid separation of the fixed shaft assembly 120 and the rotating shaft assembly 150 and ensuring the stability and safety of the magnetic control coating equipment.
As an example, as shown in fig. 3, the leakage shielding case 130 includes: an insulating cover 131, a bearing cover plate 132, a second bearing 133 and a shaft passage 134; the insulating enclosure 131 includes a top cover 1311 and an enclosure wall 1312, the top cover 1311 and the enclosure wall 1312 enclosing a structure with an opening at the bottom, which is fastened above the cooling chamber 50 and forms the built-in space 140; the bearing cover plate 132 comprises a cover plate main body 1321 and mounting slots 1322, the cover plate main body 1321 is positioned in the top cover 1311, and the mounting slots 1322 are positioned at one end of the cover plate main body 1321 close to the built-in space 140; the second bearing 133 is positioned in the top cover 1311, and a bearing inner hole of the second bearing is arranged corresponding to the mounting clamping groove 1322; the shaft passage 134 penetrates the top cover 1311 at an end near the built-in space 140 and extends to the mounting slot 1322; the rotating shaft 151 is hung in the mounting slot 1322 through the locking member 160, and performs radial rotation movement based on the second bearing 133 and the third bearing 540, wherein the third bearing 540 is mounted in the upper cover 500 of the cooling chamber 50.
In practical applications, in order to make the rotating shaft 151 rotate radially, a third bearing 540 is further included in addition to a second bearing 133 disposed in the top cover 1311, and the third bearing 540 is installed in the upper cover 500 of the cooling chamber 50. Since the built-in space 140 formed by the weep cage 130 communicates with the cooling chamber 50, the built-in space 140 is also filled with the cooling liquid; in order to avoid the contamination of the cooling liquid caused by the seepage of the inner material of the second bearing 133 and the third bearing 540 during the use process, waterproof bearings are generally selected as the second bearing 133 and the third bearing 540.
Specifically, the isolation cover 131 further includes: a stationary seal 1313; the fixing seal 1313 is connected to an end of the cover wall 1312 remote from the top cover 1311 and extends in a horizontal direction along a side remote from the built-in space 140, wherein a sealing protrusion 1314 is provided on a side of the fixing seal 1313 in contact with the cooling chamber 50 to enhance sealability of the leakage shield 130.
Further, the leakage shielding can 130 further includes: and a sealing cover plate 135 embedded in the top cover 1311 and positioned above the bearing cover plate 132 to enhance the sealing performance of the leakage shielding case 130.
As another example, the weep cage 130 includes: the device comprises an isolation cover body, a fixing piece, a bearing connecting piece and a second bearing; the isolation hood body comprises a top cover and a hood wall, the top cover and the hood wall enclose a structure with an opening at the bottom, and the structure with the opening at the bottom is buckled above the cooling chamber 50 to form a built-in space; the fixing piece is positioned in the built-in space and hung on the top cover; the second bearing is arranged on the fixed piece through a bearing connecting piece; the rotating shaft 151 is hung on the bearing connector and radially rotates based on the second bearing and a third bearing 540, and the third bearing 540 is installed in the upper cover 500 (not shown) of the cooling chamber 50.
In practical applications, in order to make the rotating shaft 151 rotate radially, a third bearing 540 is further included in addition to a second bearing disposed on the top cover, and the third bearing 540 is installed in the top cover 500 of the cooling chamber 50. Since the built-in space formed by the weep blocking boot 130 communicates with the cooling chamber 50, the built-in space is also filled with the cooling liquid; in order to avoid the contamination of the cooling liquid caused by the seepage of the inner material of the second bearing and the third bearing 540 during the use process, a waterproof bearing is generally selected as the second bearing and the third bearing 540.
Specifically, the isolation cover body further comprises: fixing the sealing element; the stationary seal member is connected to an end of the cover wall remote from the top cover and extends in a horizontal direction along a side remote from the built-in space, wherein a side of the stationary seal member contacting the cooling chamber 50 is provided with a sealing protrusion to enhance sealability of the leakage shield 130.
The rotating shaft assembly 150 is positioned in the built-in space 140, the top end of the rotating shaft 151 is hung on the top of the leakage isolating cover 130, and the bottom end penetrates through the top of the cooling chamber 50 and is connected with the magnetron 60; the rotating shaft assembly 150 and the fixed shaft assembly 120 are rotated by the radial magnetic coupling, thereby driving the magnetron 60 to rotate at a constant speed in the cooling chamber 50.
As an example, as shown in fig. 4, the rotation shaft assembly 150 includes: a rotating shaft 151, a positioning member 152, a second magnet holder 153, and a second magnet 154; the top end of the rotating shaft 151 is hung on the top of the leakage isolating cover 130, and the bottom end of the rotating shaft penetrates through the top of the cooling chamber 50 and is connected with the magnetron 60; the second magnet holder 153 includes a holder casting 1531 and a holder body 1532, the holder casting 1531 is mounted on the rotating shaft 151 through a positioning member 152 (e.g., a positioning pin), and the holder body 1532 is mounted on a side of the holder casting 1531; the second magnet 154 is mounted to the side of the holder body 1532 remote from the holder casting 1531.
In practical applications, the gap (e.g., 2mm-6 mm) between the first magnet 125 and the second magnet 154 is set by setting the length of the horizontal support arm 1241 in the first magnet support 124 and the length of the support body 1532 in the second magnet support 153, so that a sufficient space is left for placing the leakage shielding cover 130 while ensuring the magnetic coupling capability between the first magnet 125 and the second magnet 154.
Specifically, the number of the holder 1532 is 2, and the holder 1532 is symmetrically disposed on two side edges of the holder casting 1531, and correspondingly, the number of the second magnets 154 is 2.
The driver 200 includes: a driving motor 210, a motor pulley 220, and a driving belt 230; the driving motor 210 is installed above the cooling chamber 50 and is located at one side of the magnetic coupling 100; the motor pulley 220 is mounted on the motor shaft 211 of the driving motor 210; a drive belt 230 is sleeved over the motor pulley 220 and the drive pulley 122 to transmit the driving force generated by the driver 200 to the fixed shaft assembly 120 of the magnetic coupling 100.
In practice, the ratio of the diameter of the driving pulley 122 to the motor pulley 220 is 5-10 times proportional, thereby increasing the torque. The drive belt 230 is a timing belt, a wedge belt, or the like, as this example is not limiting.
Correspondingly, as shown in fig. 1, this embodiment further provides a magnetron coating device, including: the rotating apparatus 10 described above. Further, the magnetron coating equipment also comprises: a coating cavity 20, a base 30, a target 40, a cooling chamber 50 and a magnetron 60. Wherein the magnetic control coating equipment is PVD (physical vapor deposition) equipment.
The base 30 and the target 40 are positioned in the coating cavity 20, the base 30 is installed at the bottom of the coating cavity 20, and the target 40 is installed at the top of the coating cavity 20; the coating chamber 20 is a PVD chamber for depositing a sputtering film on a wafer, the susceptor 30 is for supporting the wafer, and the target 40 is for sputtering particles.
The cooling chamber 50 is arranged above the film coating cavity 20 and is provided with a liquid inlet end 51 and a liquid outlet end 52; which is filled with a cooling liquid for cooling the rotary shaft 151 and the magnetron 60. The cooling chamber 50 has a sealing pressure in the range of 0.4MPa to 0.7MPa (inclusive).
As an example, as shown in fig. 5, in order to be installed and fitted with the magnetic coupling 100, the upper cover 500 of the cooling chamber 50 includes: the cover 510, the first through hole 520, the second through hole 530, the third bearing 540 and the sealing groove 550; the first through hole 520 and the second through hole 530 penetrate through the cover 510, wherein the first through hole 520 corresponds to the rotation shaft 151, and the second through hole 530 is located at the periphery of the first through hole 520; the third bearing 540 is located at one end of the cover 510 close to the magnetic coupling 100, and its bearing inner hole is coaxially arranged with the first through hole 520; the sealing groove 550 is located at one end of the cover 510 close to the magnetic coupling 100, and is disposed corresponding to the fixing sealing member 1313 of the leakage blocking cover 130. In this example, the number of the second through holes 530 is 4, and 4 second through holes 530 are uniformly arranged around the periphery of the first through hole 520.
The liquid inlet end 51 and the liquid outlet end 52 are arranged on the same side wall of the cooling chamber 50, the liquid inlet end 51 is arranged above, and the liquid outlet end 52 is arranged below, so that cooling liquid in the cooling chamber flows circularly. In practice, the coolant is typically pure or deionized water, and has an impedance of 200K Ω -4M Ω (inclusive).
The magnetron 60 is installed in the cooling chamber 50 by a rotating shaft 151 for generating a stable and uniform magnetic field to make the film deposited on the wafer more uniform.
Referring to fig. 1-5, a process of the magnetron 60 being driven by the rotating device 10 to rotate in the magnetron coating apparatus of the present embodiment will be described.
The driving motor 210 drives the motor pulley 220 to rotate at a fixed speed, and drives the driving pulley 122 to rotate at a fixed speed (for example, 80r/min-150 r/min) through the driving belt 230; the first magnet holder 124 and the first magnet 125 thereon are fixed on the driving pulley 122, and therefore, the driving pulley 122 rotates around the leakage shielding cover 130 at a constant speed.
The second magnet 154 in the leakage shielding cage 130 performs a constant-speed rotation movement based on the radial magnetic coupling effect; since the second magnet 154 is fixed on the rotating shaft 151 through the second magnet holder 153, the second magnet holder 153 and the rotating shaft 151 rotate at a constant speed with the second magnet 154, and further drive the magnetron 60 in the cooling chamber 50 to rotate at a constant speed (e.g. 80 r/min-100 r/min).
In summary, in the rotating device and the magnetron coating equipment of the present invention, the magnetic coupling is used to change the substantial connection between the motor shaft and the rotating shaft into the non-substantial connection, so as to realize the non-contact transmission of the torque and the rotating speed between the motor shaft and the rotating shaft, so as to change the sealing state between the rotating shaft and the cooling chamber from the dynamic sealing into the static sealing, avoid the leakage problem of the cooling liquid caused by the abrasion or the pressure change of the dynamic sealing element, ensure the stability and the durability of the magnetron coating equipment, and facilitate the improvement of the production efficiency of the magnetron coating equipment. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A rotary apparatus for driving a magnetron in a cooling chamber, the rotary apparatus comprising:
a magnetically coupled coupling, comprising: the leakage isolating cover, the main bracket, the fixed shaft assembly and the rotating shaft assembly;
the leakage isolation cover is buckled above the cooling chamber and forms a built-in space, wherein the built-in space is communicated with the cooling chamber;
the main bracket is arranged above the cooling chamber, and the fixed shaft assembly is hung outside the leakage isolating cover through the main bracket;
the rotating shaft assembly is positioned in the built-in space, the top end of the rotating shaft is hung at the top of the leakage isolating cover, and the bottom end of the rotating shaft penetrates through the top of the cooling chamber and is connected with the magnetron;
wherein the fixed shaft assembly and the rotating shaft assembly are adapted for rotational movement based on radial magnetic coupling.
2. The rotary device of claim 1, wherein the stationary shaft assembly comprises: the device comprises a fixed shaft, a driving belt wheel, a first bearing, a first magnet bracket and a first magnet;
the transmission belt wheel is arranged on the fixed shaft through the first bearing and is hung on the main bracket through the fixed shaft, wherein the transmission belt wheel does radial rotation movement based on the first bearing;
the first magnet support comprises a horizontal support arm and a vertical support arm, the horizontal support arm is installed at one end, away from the main support, of the transmission belt wheel, and the vertical support arm is connected with one side, away from the transmission belt wheel, of the horizontal support arm and extends vertically downwards;
the first magnet is mounted at one end of the vertical support arm, which is far away from the horizontal support arm.
3. The rotary device of claim 2, further comprising:
a driver, comprising: a driving motor, a motor belt wheel and a driving belt;
the driving motor is arranged above the cooling chamber and is positioned on one side of the magnetic coupling;
the motor belt wheel is arranged on a motor shaft of the driving motor;
the driving belt is sleeved on the motor belt wheel and the transmission belt wheel.
4. A rotary device according to any one of claims 1 to 3 wherein the rotary shaft assembly comprises: the rotating shaft, the positioning piece, the second magnet bracket and the second magnet;
the top end of the rotating shaft is hung on the top of the leakage isolating cover, and the bottom end of the rotating shaft penetrates through the top of the cooling chamber and is connected with the magnetron;
the second magnet support comprises a support casting and a support body, the support casting is mounted on the rotating shaft through the positioning piece, and the support body is mounted on the side edge of the support casting;
the second magnet is arranged on the side edge, far away from the bracket casting, of the bracket body.
5. The rotary device of claim 4, wherein the weep cage comprises: the isolation cover body, the bearing cover plate, the second bearing and the shaft channel;
the isolation cover body comprises a top cover and a cover wall, the top cover and the cover wall enclose a structure with an opening at the bottom, and the structure with the opening at the bottom is buckled above the cooling chamber to form the built-in space;
the bearing cover plate comprises a cover plate main body and an installation clamping groove, the cover plate main body is positioned in the top cover, and the installation clamping groove is positioned at one end, close to the built-in space, of the cover plate main body;
the second bearing is positioned in the top cover, and a bearing inner hole of the second bearing is arranged corresponding to the mounting clamping groove;
the shaft channel penetrates through one end, close to the built-in space, of the top cover and extends to the installation clamping groove;
the rotating shaft is hung in the mounting clamping groove through a clamping piece and radially rotates on the basis of the second bearing and a third bearing, and the third bearing is mounted in an upper cover of the cooling chamber.
6. The rotary device of claim 5, wherein the isolation enclosure further comprises:
and the fixed sealing piece is connected with one end, far away from the top cover, of the cover wall and extends along one side, far away from the built-in space, of the cover wall in the horizontal direction, and a sealing bulge is arranged on one side, in contact with the cooling chamber, of the fixed sealing piece.
7. The rotary device as claimed in claim 5 or 6, wherein said leakage barrier further comprises: and the sealing cover plate is embedded in the top cover and is positioned above the bearing cover plate.
8. A magnetic control coating equipment is characterized by comprising: the rotating apparatus according to any one of claims 1 to 7.
9. The magnetron coating apparatus of claim 8, further comprising: the device comprises a coating cavity, a base, a target, a cooling chamber and a magnetron;
the base and the target are positioned in the coating cavity, wherein the base is arranged at the bottom of the coating cavity, and the target is arranged at the top of the coating cavity;
the cooling chamber is arranged above the film coating cavity and is provided with a liquid inlet end and a liquid outlet end;
the magnetron is installed in the cooling chamber through the rotating shaft.
10. The magnetron coating apparatus of claim 9 wherein the upper cover of the cooling chamber comprises: the cover body, the first through hole, the second through hole, the third bearing and the sealing groove;
the first through hole and the second through hole penetrate through the cover body, wherein the first through hole is arranged corresponding to the rotating shaft, and the second through hole is arranged on the periphery of the first through hole;
the third bearing is positioned at one end of the cover body close to the magnetic coupling coupler, and a bearing inner hole of the third bearing is coaxially arranged with the first through hole;
the sealing groove is positioned at one end of the cover body close to the magnetic coupling coupler and is arranged corresponding to the fixed sealing element of the leakage isolation cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211169361.XA CN115241026B (en) | 2022-09-26 | 2022-09-26 | Rotating device and magnetic control coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211169361.XA CN115241026B (en) | 2022-09-26 | 2022-09-26 | Rotating device and magnetic control coating equipment |
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| Publication Number | Publication Date |
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| CN115241026A CN115241026A (en) | 2022-10-25 |
| CN115241026B true CN115241026B (en) | 2022-11-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202211169361.XA Active CN115241026B (en) | 2022-09-26 | 2022-09-26 | Rotating device and magnetic control coating equipment |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11217669A (en) * | 1998-01-29 | 1999-08-10 | Applied Materials Inc | Magnetron device and sputtering device |
| US6641701B1 (en) * | 2000-06-14 | 2003-11-04 | Applied Materials, Inc. | Cooling system for magnetron sputtering apparatus |
| CN1896298A (en) * | 2005-07-13 | 2007-01-17 | 应用材料公司 | Improved magnetron sputtering system for large-area substrates |
| CN104120390A (en) * | 2013-04-24 | 2014-10-29 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Driving mechanism used for driving magnetron, and magnetron sputtering processing apparatus |
| CN109554672A (en) * | 2014-12-14 | 2019-04-02 | 应用材料公司 | The equipment of dielectric deposition for physical vapour deposition (PVD) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120097526A1 (en) * | 2009-04-03 | 2012-04-26 | Madocks John E | Rotary magnetron |
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2022
- 2022-09-26 CN CN202211169361.XA patent/CN115241026B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11217669A (en) * | 1998-01-29 | 1999-08-10 | Applied Materials Inc | Magnetron device and sputtering device |
| US6641701B1 (en) * | 2000-06-14 | 2003-11-04 | Applied Materials, Inc. | Cooling system for magnetron sputtering apparatus |
| CN1896298A (en) * | 2005-07-13 | 2007-01-17 | 应用材料公司 | Improved magnetron sputtering system for large-area substrates |
| CN104120390A (en) * | 2013-04-24 | 2014-10-29 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Driving mechanism used for driving magnetron, and magnetron sputtering processing apparatus |
| CN109554672A (en) * | 2014-12-14 | 2019-04-02 | 应用材料公司 | The equipment of dielectric deposition for physical vapour deposition (PVD) |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115241026A (en) | 2022-10-25 |
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