CN220769671U - Heat radiation shielding device for vacuum environment and cold pump system - Google Patents

Abstract

The application relates to a heat radiation shielding device and cold pump system for vacuum environment, including: the box body is provided with a first channel, one end of the first channel is communicated with the vacuum cavity, and the other end of the first channel is communicated with the cold pump; the heat insulation plate is positioned in the first channel and is connected with the inner wall of the box body; the heat shield is configured to be rotatable between a first position and a second position; under the condition that the heat insulation plate is at the first position, the first surface of the heat insulation plate is vertical or tends to be vertical to the trend of the first channel so as to block heat of the vacuum cavity from radiating to the cold pump; the first surface of the heat shield is parallel or tends to be parallel with the orientation of the first channel with the heat shield in the second position to maximize the throughput of the first channel; the first surface is the surface of the largest area of the heat insulation plate; the first coupling piece is connected with the heat insulation plate and is configured to drive the heat insulation plate to rotate in response to the driving of the second coupling piece outside the box body; the first coupling member is contactlessly coupled with the second coupling member.

Description

Heat radiation shielding device for vacuum environment and cold pump system

Technical Field

The application relates to the technical field of semiconductor epitaxy, in particular to a heat radiation shielding device and a cold pump system for a vacuum environment.

Background

In modern society, vacuum environment has very wide application, in industrial and agricultural production and scientific research, vacuum environment is needed in many cases. Also, in some high-definition tip products, such as semiconductor epitaxy techniques, an ultra-high vacuum environment is required.

In an ultra-high vacuum apparatus, the following process may be performed: the equipment containing water vapor therein was baked at about 200 c, and the water vapor was pumped away by a vacuum pump. Thus, the vacuum degree of the equipment can reach the ultra-high vacuum level, and the content of the internal water molecule impurities is almost zero.

The cold pump is widely used as a powerful vacuum pump in ultra-high vacuum equipment. Helium is used as a medium in the working process, and the temperature of an adhesion layer in the self-body is reduced so as to adsorb various free gas molecules in vacuum. The lower the temperature of the cold pump, the stronger the adsorption capacity for gas molecules, and the easier it is to reach a higher degree of vacuum.

However, the cold pump in the prior art may be affected by internal heat radiation during baking in ultra-high vacuum, thereby having a problem of reduced working capacity.

Disclosure of Invention

In view of the foregoing, embodiments of the present application provide a heat radiation shielding apparatus and a cold pump system for a vacuum environment to solve at least one of the problems in the background art.

In order to achieve the above purpose, the technical scheme of the application is realized as follows:

in a first aspect, embodiments of the present application provide a thermal radiation shielding device for a vacuum environment, which is applied to a cold pump system, where the cold pump system includes a vacuum chamber, a cold pump, and the thermal radiation shielding device; the heat radiation shielding apparatus includes:

the box body is provided with a first channel, one end of the first channel is communicated with the vacuum cavity, and the other end of the first channel is communicated with the cold pump;

a heat shield positioned within the first channel and configured to be rotatable between a first position and a second position; under the condition that the heat insulation plate is at the first position, the first surface of the heat insulation plate is vertical or tends to be vertical to the trend of the first channel so as to block heat of the vacuum cavity from radiating to the cold pump; the first surface of the heat shield being parallel or tending to be parallel to the orientation of the first channel with the heat shield in the second position to maximize the throughput of the first channel; the first surface is the surface of the largest area of the heat insulation plate;

the first coupling piece is connected with the heat insulation plate and is configured to respond to the driving of the second coupling piece outside the box body to drive the heat insulation plate to rotate; the first coupling piece is coupled with the second coupling piece in a non-contact way; the first coupling member 40 is rotatably mounted to the inner wall of the case 20.

Optionally, the first coupling member includes at least one magnetically attractive element that is magnetic or can be magnetized.

Optionally, the magnetic attraction piece is a permanent magnet, and magnetic pole properties of the opposite surfaces of the magnetic attraction piece and the second coupling piece are opposite.

Optionally, the first coupling further comprises:

and the magnetic attraction piece is arranged on the outer peripheral wall of the coupling piece support, and the coupling piece support is connected with the heat insulation plate.

Optionally, the thermal radiation shielding device further comprises:

a connector configured to connect the coupler bracket with the heat shield; one end of the connecting piece is connected with the coupling piece support, the other end of the connecting piece is connected with the heat insulation plate, and a mounting hole for mounting the connecting piece is formed in the center of the coupling piece support.

Optionally, the heat radiation shielding device comprises two parallel heat insulation boards which are arranged at intervals, and the two heat insulation boards are connected with the first coupling piece.

Optionally, the thermal radiation shielding device further comprises:

and the rotation auxiliary structure is configured to reduce the resistance of the heat insulation plate in rotation and is connected to the inner wall of the box body.

Optionally, the rotation assisting structure includes:

the planar bearing comprises a first end face and a second end face, the first end face is connected with the heat insulation plate, and the second end face is fixedly connected with the inner wall of the box body; and under the condition that the heat insulation plate rotates, the first end face rotates relative to the second end face.

Optionally, the rotation assisting structure includes:

the radial bearing comprises an inner ring and an outer ring, wherein the inner ring is connected with the heat insulation plate, and the outer ring is fixedly connected with the inner wall of the box body.

In a second aspect, embodiments of the present application further provide a cold pump system, including:

a vacuum chamber;

a cold pump;

any of the above heat radiation shielding apparatuses for a vacuum environment, wherein the heat radiation shielding apparatus is located between the vacuum chamber and the cold pump, and the first passage of the heat radiation shielding apparatus communicates the vacuum chamber and the cold pump.

The heat radiation shielding apparatus and the cold pump system for a vacuum environment described above include: the box body is provided with a first channel, one end of the first channel is communicated with the vacuum cavity, and the other end of the first channel is communicated with the cold pump; the heat insulation plate is positioned in the first channel and is connected with the inner wall of the box body; the heat shield is configured to be rotatable between a first position and a second position; under the condition that the heat insulation plate is at the first position, the first surface of the heat insulation plate is vertical or tends to be vertical to the trend of the first channel so as to block heat of the vacuum cavity from radiating to the cold pump; the first surface of the heat shield being parallel or tending to be parallel to the orientation of the first channel with the heat shield in the second position to maximize the throughput of the first channel; the first surface is the surface of the largest area of the heat insulation plate; the first coupling piece is connected with the heat insulation plate and is configured to respond to the driving of the second coupling piece outside the box body to drive the heat insulation plate to rotate; the first coupling member is contactlessly coupled with the second coupling member. Therefore, the heat radiation shielding device and the cold pump system for the vacuum environment are provided with the heat insulation plate in the first channel, so that the influence of internal heat radiation on the cold pump in the baking process is reduced, and the heat radiation shielding device and the cold pump system have good working capacity. And the heat insulating plate can rotate between the first position and the second position, and the pumping force of the cold pump can not be influenced due to the blocking of the heat insulating plate under the condition that the equipment is not baked. Therefore, the heat radiation shielding device and the cold pump system for the vacuum environment can reduce the influence of internal heat radiation on the cold pump in the baking process, and the suction force cannot be influenced due to the blocking of the heat insulation plate.

Additional aspects and advantages of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the application.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute an undue limitation to the application. In the drawings:

FIG. 1 is a schematic view of a thermal radiation shield apparatus for a vacuum environment provided in an embodiment of the present application;

FIG. 2 is a schematic view of a first coupling member and a heat shield in a thermal radiation shield for a vacuum environment provided in an embodiment of the present application;

FIG. 3 is a schematic diagram of the top view of FIG. 1 (with the heat shield in a first position);

FIG. 4 is a schematic diagram II of the top view of FIG. 1 (with the heat shield in a second position);

FIG. 5 is a schematic view of coupling positions of a first coupling member and a second coupling member in a thermal radiation shield apparatus for a vacuum environment according to an embodiment of the present application;

fig. 6 is a schematic structural view of a first coupling member in a heat radiation shielding apparatus for a vacuum environment according to an embodiment of the present application.

Reference numerals illustrate:

10. a vacuum chamber; 20. a case; 21. a first channel; 22. a heat insulating chamber; 23. a coupling cavity; 231. a step; 24. a neck; 30. a heat insulating plate; 31. a first surface; 40. a first coupling; 41. a magnetic attraction piece; 42. a coupling bracket; 421. a rotating shaft; 422. spokes; 423. a rim; 50. a second coupling; 60. a connecting piece; 71. a planar bearing; 711. a first end face; 712. a second end face; 80. and a cold pump.

Detailed Description

In order to make the technical solution and the beneficial effects of the present application more obvious and understandable, the following detailed description is given by way of example only. Wherein the drawings are not necessarily to scale, and wherein local features may be exaggerated or reduced to more clearly show details of the local features; unless defined otherwise, technical and scientific terms used herein have the same meaning as technical and scientific terms in the technical field to which this application belongs.

In the description of the present application, the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in simplifying the description of the present application, and do not indicate that the device or element in question must have a specific orientation, be configured and operated in a specific orientation, i.e., should not be construed as limiting the present application.

In this application, the terms "first", "second" and "second" are used for clarity only and are not to be construed as relative importance of the features indicated or the number of technical features indicated. Thus, a feature defining "first", "second" may explicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc.; "plurality" means at least one, such as one, two, three, etc.; unless otherwise specifically defined.

In this application, the terms "mounted," "connected," "secured," "disposed," and the like are to be construed broadly, unless otherwise specifically limited. For example, "connected" may be either fixedly connected or detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, or can be communicated between two elements or the interaction relationship between the two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly defined otherwise, a first feature "on", "above", "over" and "above", "below", "under" or "beneath" a second feature may be a direct contact between the first feature and the second feature, or an indirect contact between the first feature and the second feature via an intervening medium. Moreover, a first feature "above," "over" and "on" a second feature may be that the first feature is directly above or obliquely above the second feature, or simply indicates that the level of the first feature is higher than the level of the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the level of the first feature is less than the level of the second feature.

For a thorough understanding of the present application, detailed steps and detailed structures will be presented in the following description in order to explain the technical aspects of the present application. Preferred embodiments of the present application are described in detail below, however, the present application may have other implementations in addition to these detailed descriptions.

Example 1

The embodiment of the application provides a heat radiation shielding device for a vacuum environment, which is applied to a cold pump system, wherein the cold pump system comprises a vacuum cavity 10, a cold pump 80 and the heat radiation shielding device;

wherein, referring to fig. 1 and 2, the heat radiation shielding apparatus includes:

a case 20 having a first passage 21 (see fig. 3 and 4), one end of the first passage 21 communicating with the vacuum chamber 10, and the other end communicating with the cold pump 80;

a heat shield 30 positioned within the first channel 21 and configured to be rotatable between a first position and a second position; with the heat shield 30 in the first position, the first surface 31 of the heat shield 30 is perpendicular or tends to be perpendicular to the direction of the first channel 21 to block heat from the vacuum chamber 10 from radiating to the cold pump 80; with the heat shield 30 in the second position, the first surface 31 of the heat shield 30 is parallel or tends to be parallel with the orientation of the first channel 21 to maximize the throughput of the first channel 21; the first surface 31 is the surface of the heat insulation board 30 with the largest area;

a first coupling member 40 connected to the heat shield 30 and configured to rotate the heat shield 30 in response to the driving of the second coupling member 50 outside the case 20; the first coupling member 40 is non-contact coupled with the second coupling member 50; the first coupling member 40 is rotatably mounted to the inner wall of the case 20.

The vacuum chamber 10 is a cavity that needs to form a vacuum environment, and may be a working chamber of an apparatus, such as a growth chamber of a semiconductor epitaxial apparatus. The cold pump 80 is a vacuum pump for forming and maintaining a vacuum state of the vacuum chamber 10. The heat radiation shielding means is located between the vacuum chamber 10 and the cold pump 80 to shield heat radiation of the vacuum chamber 10 from being applied to the cold pump 80. Specifically, the case 20 of the heat radiation shielding apparatus has a first passage 21, and one end of the first passage 21 communicates with the vacuum chamber 10, and the other end communicates with the cold pump 80. The first channel 21 extends from one end of the vacuum chamber 10 to the other end of the cold pump 80.

The material of the heat shield 30 is not particularly limited. In the case where the heat shield 30 is in the first position, the first channel 21 is substantially blocked, so that a large portion of heat in the first channel 21 can be effectively blocked even if the heat shield 30 is made of a material having a low reflectivity. Also, the heat shield 30 can function as a heat convection barrier in the baking stage, in which the degree of vacuum in the vacuum chamber 10 is not yet high.

The first surface 31 may be a surface defined by the length and width of the heat shield 30. It will be appreciated that, in addition to leaving the necessary clearance for rotation, the area of the first surface 31 may approximate the cross-sectional area of the first channel 21, i.e. the area of the first surface 31 may be set to: the cross-sectional area of the first channel 21 minus the necessary clearance.

The first surface 31 is not limited to one of the surfaces of the heat shield 30. If the heat shield 30 has a symmetrical structure in the thickness direction, the surface of the largest area of the heat shield 30 may include two surfaces perpendicular to the thickness direction, and the heat shield 30 includes two first surfaces 31.

Without limitation, if a material with a higher reflectance is selected, the effect of blocking heat radiation can be further improved. In this embodiment, the heat shield 30 may be made of a material having a high reflectivity, such as a metal plate. Further, the surface roughness of the metal plate may be processed to be smaller, for example, smaller than ra1.6 or the like, to improve the reflection effect and thus the isolation effect.

Further, a highly reflective film, such as a total dielectric reflective film, may be attached to the surface of the insulating board 30 to enhance the reflection.

Reference is made to fig. 3 and 4 for the case where the heat shield 30 is in the first position and the second position, respectively. The arrow direction in the figure is the direction of heat radiation, also the direction of fluid flow in the channels, or the trend of the first channels 21.

The non-contact coupling may be a coupling mode that establishes coupling by acoustic, optical, electrical, magnetic, etc. energy, and that can be coupled and controlled without direct contact. In this embodiment, besides the non-contact coupling control, the non-contact coupling control movement, for example, the second coupling member 50 may drive the first coupling member 40 to move, etc.

It should be noted that, since the vacuum chamber 10 and the communicating portion (for example, the first channel 21) between the vacuum chamber 10 and the cold pump 80 are all vacuum environments, common driving components, such as a motor, cannot work well, and thus it is a better option to dispose the driving components outside the vacuum environments, i.e., outside the case 20. And the power of the driving part outside the case 20 is introduced into the case 20, which may be coupled through non-contact. The present embodiment can realize the arrangement of the driving part outside the case 20 and the introduction of power into the case 20 by the non-contact coupling between the first coupling member 40 and the second coupling member 50. The positional relationship of the first coupling member 40 and the second coupling member 50 can be as shown with reference to fig. 1.

It will be appreciated that in order to enable stable rotation of the first coupling member, the present embodiment is configured to: the first coupling member 40 is rotatably mounted to the inner wall of the case 20. And it will be appreciated that both the heat shield and the first coupling member are rotated by the mounting structure of the first coupling member 40 to the inner wall of the housing 20. The normal operating condition of the cold pump system is thus the situation shown in fig. 1 and 2, so that the first coupling member does not have to withstand too much bending moment. If the normal operation is in other directions, the stress condition of the first coupling member needs to be considered, and the mounting structures of the first coupling member and the inner wall of the case 20 are correspondingly modified.

According to the heat radiation shielding device for the vacuum environment, the heat insulation plate 30 is arranged in the first channel 21, so that the influence of internal heat radiation on the cold pump 80 in the baking process is reduced, and the heat radiation shielding device has good working capacity. And, the heat shield 30 can rotate between the first position and the second position, and the pumping force of the cold pump 80 is not influenced by the blocking of the heat shield 30 under the condition that the equipment is not baked.

The suction force may be referred to as a suction force, an adsorption force, etc., and means the magnitude of the generated negative pressure, and the unit may be Mpa.

In some embodiments, the first coupling member 40 includes at least one magnetically attractable member 41 that is magnetic or can be magnetized.

Without limitation, the non-contact coupling of the first coupling member 40 and the second coupling member 50 of the present embodiment is magnetic coupling. It will be appreciated that either one of the first coupling member 40 and the second coupling member 50 may be magnetic and the other may be magnetic or may be magnetized to establish magnetic coupling. The following situations are specific:

A. the first coupling member 40 and the second coupling member 50 each have magnetism;

B. the first coupling member 40 has magnetism, and the second coupling member 50 can be magnetized;

C. the first coupling member 40 can be magnetized and the second coupling member 50 can be magnetic.

Wherein the first coupling member 40 has magnetic properties, optionally a permanent magnet; the second coupling member 50 has magnetic properties, optionally a permanent magnet, and optionally an electromagnet.

In some embodiments, referring to fig. 5, the magnetic attraction member 41 is a permanent magnet, and the magnetic attraction member 41 has a magnetic pole property opposite to that of the opposite surface of the second coupling member 50.

It will be appreciated that the above arrangement is based on the principle of "like-pole repel, opposite-pole attract". For example, in fig. 5, the outer wall of the magnetic element of the first coupling element 40 is N-pole, the second coupling element 50 is at the periphery of the first coupling element 40, and the inner wall of the second coupling element 50 is S-pole.

In some embodiments, referring to fig. 6, the first coupling 40 further includes:

and a coupling bracket 42, wherein the magnetic attraction member 41 is mounted on the outer circumferential wall of the coupling bracket 42, and the coupling bracket 42 is connected with the heat insulation plate 30.

In this way, the structure of the first coupling member 40 can be more firm, and the two or more magnetic attraction members 41 of the first coupling member 40 can be arranged at intervals in the circumferential direction. Specifically, the coupler bracket 42 may include:

a rotation shaft 421;

at least two spokes 422 symmetrically connected to the rotation shaft 421;

the rim 423 is disposed around the rotation shaft 421 in one turn, and is fixed to the spokes 422, and the magnetic attraction member 41 may be fixed to the outer circumference of the rim 423.

In some embodiments, the thermal radiation shield further comprises:

a connector 60 configured to connect the coupler bracket 42 with the heat shield 30; one end of the connecting piece 60 is connected with the coupling piece support 42, the other end is connected with the heat insulation board 30, and a mounting hole for mounting the connecting piece 60 is formed in the center of the coupling piece support 42.

In this way, the coupling bracket 42 is conveniently connected to the heat shield 30. In particular, the connection member 60 may be an elongated connection rod, which may save space, reduce rotational inertia of the heat shield 30, etc.

Specifically, a mounting hole for mounting the connector 60 is formed in the center of the rotating shaft 421 in the coupler bracket 42.

In some embodiments, the heat radiation shielding device includes two parallel heat insulation plates 30 disposed at a distance, and both heat insulation plates 30 are connected to the first coupling member 40.

It will be appreciated that the two heat shields 30 provide better heat shielding than a single heat shield, and that the two heat shields 30 are spaced apart to avoid the heat shield 30 of the preceding one from transferring heat by conduction to the following one and then radiating heat through the following one. Therefore, the heat insulating effect is further improved.

In some embodiments, the thermal radiation shield further comprises:

and a rotation assisting structure configured to reduce resistance of the heat shield 30 in rotation, the rotation assisting structure being coupled to an inner wall of the case 20.

Because the heat shield 30 is rotated by non-contact coupling, the power is relatively limited. Therefore, it is necessary to reduce the resistance of the heat shield 30 in rotation.

In some embodiments, the rotation assist structure includes:

the planar bearing 71 includes a first end face 711 and a second end face 712, the first end face 711 is connected to the heat insulation board 30, and the second end face 712 is fixedly connected to the inner wall of the box 20; in the case of rotation of the heat shield 30, the first end face 711 rotates relative to the second end face 712.

Specifically, referring to fig. 2, the first end face 711 is an upper end face of the planar bearing 71, and the second end face 712 is a lower end face of the planar bearing 71. The first end surface 711 is fixedly connected to the connecting member 60 through a bearing hole, and is further connected to the heat insulation board 30. The second end surface 712 is fixedly connected to the inner wall of the case 20. Specifically, the box 20 includes a heat insulation cavity 22 for accommodating the heat insulation board 30 and a coupling cavity 23 for accommodating the first coupling member 40, a space between the coupling cavity 23 and the heat insulation cavity 22 is a neck 24, a step 231 parallel to an end surface of the planar bearing 71 is formed between the neck 24 and the coupling cavity 23, and the second end surface 712 is fixedly connected with the step 231.

It will be appreciated that since the heat shield 30 is connected to the first coupling member 40, the first end face 711 is also connected to the first coupling member 40.

The insulating chamber 22 and the coupling chamber 23 are not completely contained in the first passage 21. The majority of the space of the insulating chamber 22 and the coupling chamber 23 may be considered to constitute the first passage 21, and a small portion of the space, such as the space occupied by the first coupling member 40, may not be considered to be the first passage 21.

In some embodiments, the rotation assist structure includes:

the radial bearing comprises an inner ring and an outer ring, wherein the inner ring is connected with the heat insulation plate 30, and the outer ring is fixedly connected with the inner wall of the box body 20.

In contrast to the planar bearing 71 described above, the radial bearing does not need to have the neck 24, and the step 231 is formed, and the outer ring is fixed to the inner wall of the coupling chamber 23.

Example two

An embodiment of the present application provides a cold pump system, referring to fig. 3 and 4, including:

a vacuum chamber 10;

a cold pump 80;

and the heat radiation shielding apparatus for vacuum environment according to the first embodiment, the heat radiation shielding apparatus is located between the vacuum chamber 10 and the cold pump 80, and the first passage 21 of the heat radiation shielding apparatus communicates the vacuum chamber 10 and the cold pump 80.

In the cold pump system of the embodiment of the application, the heat insulation board 30 is arranged in the first channel 21, so that the influence of internal heat radiation on the cold pump 80 in the baking process is reduced, and the cold pump system has good working capacity. And, the heat shield 30 can rotate between the first position and the second position, and the pumping force of the cold pump 80 is not influenced by the blocking of the heat shield 30 under the condition that the equipment is not baked.

It should be noted that the embodiments of the cold pump system provided in the present application are the same concept as the embodiments of the heat radiation shielding device for a vacuum environment; the features of the embodiments described in the present utility model may be combined arbitrarily without any conflict.

It should be understood that the above examples are illustrative and are not intended to encompass all possible implementations encompassed by the claims. Various modifications and changes may be made in the above embodiments without departing from the scope of the disclosure. Likewise, the various features of the above embodiments may be combined arbitrarily to form further embodiments of the application that may not be explicitly described. Thus, the above examples merely represent several embodiments of the present application and do not limit the scope of protection of the patent of the present application.

Claims (10)

1. A heat radiation shielding device for a vacuum environment, which is applied to a cold pump system, wherein the cold pump system comprises a vacuum cavity, a cold pump and the heat radiation shielding device; characterized in that the heat radiation shielding device comprises:

the box body is provided with a first channel, one end of the first channel is communicated with the vacuum cavity, and the other end of the first channel is communicated with the cold pump;

a heat shield positioned within the first channel and configured to be rotatable between a first position and a second position; under the condition that the heat insulation plate is at the first position, the first surface of the heat insulation plate is vertical or tends to be vertical to the trend of the first channel so as to block heat of the vacuum cavity from radiating to the cold pump; the first surface of the heat shield being parallel or tending to be parallel to the orientation of the first channel with the heat shield in the second position to maximize the throughput of the first channel; the first surface is the surface of the largest area of the heat insulation plate;

the first coupling piece is connected with the heat insulation plate and is configured to respond to the driving of the second coupling piece outside the box body to drive the heat insulation plate to rotate; the first coupling piece is coupled with the second coupling piece in a non-contact way; the first coupling member (40) is rotatably mounted to an inner wall of the case (20).

2. A heat radiation shielding apparatus for a vacuum environment according to claim 1, wherein,

the first coupling member includes at least one magnetically attractable member that is magnetic or capable of being magnetized.

3. A heat radiation shielding apparatus for a vacuum environment according to claim 2, wherein,

the magnetic attraction piece is a permanent magnet, and the magnetic pole properties of the opposite surfaces of the magnetic attraction piece and the second coupling piece are opposite.

4. The thermal radiation shield for a vacuum environment of claim 2, wherein said first coupling further comprises:

and the magnetic attraction piece is arranged on the outer peripheral wall of the coupling piece support, and the coupling piece support is connected with the heat insulation plate.

5. The thermal radiation shield for a vacuum environment of claim 4, further comprising:

a connector configured to connect the coupler bracket with the heat shield; one end of the connecting piece is connected with the coupling piece support, the other end of the connecting piece is connected with the heat insulation plate, and a mounting hole for mounting the connecting piece is formed in the center of the coupling piece support.

6. A heat radiation shield for a vacuum environment according to claim 1 or 2, wherein the heat radiation shield comprises two parallel and spaced apart heat shields, both of which are connected to the first coupling member.

7. The heat radiation shielding apparatus for a vacuum environment according to claim 1 or 2, further comprising:

and the rotation auxiliary structure is configured to reduce the resistance of the heat insulation plate in rotation and is connected to the inner wall of the box body.

8. The heat radiation shielding apparatus for a vacuum environment according to claim 7, wherein the rotation assisting structure comprises:

the planar bearing comprises a first end face and a second end face, the first end face is connected with the heat insulation plate, and the second end face is fixedly connected with the inner wall of the box body; and under the condition that the heat insulation plate rotates, the first end face rotates relative to the second end face.

9. The heat radiation shielding apparatus for a vacuum environment according to claim 7, wherein the rotation assisting structure comprises:

the radial bearing comprises an inner ring and an outer ring, wherein the inner ring is connected with the heat insulation plate, and the outer ring is fixedly connected with the inner wall of the box body.

10. A cold pump system, comprising:

a vacuum chamber;

a cold pump;

the thermal radiation shield for a vacuum environment of any one of claims 1-9, said thermal radiation shield being located between said vacuum chamber and said cold pump, said first passage of said thermal radiation shield communicating said vacuum chamber with said cold pump.