CN115236573A - Magnetic field sensor and device for testing two-dimensional piezoelectric vector magnetic characteristics - Google Patents

Magnetic field sensor and device for testing two-dimensional piezoelectric vector magnetic characteristics Download PDF

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CN115236573A
CN115236573A CN202211134261.3A CN202211134261A CN115236573A CN 115236573 A CN115236573 A CN 115236573A CN 202211134261 A CN202211134261 A CN 202211134261A CN 115236573 A CN115236573 A CN 115236573A
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magnetic field
conductive beam
field sensor
conductive
magnetic
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CN115236573B (en
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李永建
郭鹏
林志伟
张长庚
利雅婷
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Hebei University of Technology
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Tianjin Binhai High Tech Zone Hegong Electric Appliance Technology Co ltd
Hebei University of Technology
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    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/12Measuring magnetic properties of articles or specimens of solids or fluids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/0011Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor

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Abstract

The invention relates to the technical field of two-dimensional piezoelectric vector magnetic characteristic testing, in particular to a magnetic field sensor and a device for the two-dimensional piezoelectric vector magnetic characteristic testing. The magnetic field sensor for the two-dimensional piezoelectric vector magnetic property test comprises a substrate and a plurality of conductive beams, wherein two ends of each conductive beam are respectively installed on the substrate through a support, a piezoelectric element is arranged between each conductive beam and each support, and the magnetic field sensor is used for the two-dimensional piezoelectric vector magnetic property test. The beneficial effects of the invention are: a device for measuring Lorentz force using piezoelectric effect is provided for obtaining magnetic field information. And amplifying the obtained magnetic field information when the magnetic field intensity is small. And the interference in the sensor is reduced, and the measurement precision is improved. The magnetic field sensor is used for manufacturing a two-dimensional piezoelectric vector magnetic property testing device, and higher measurement accuracy is obtained by designing the arrangement mode of the magnetic field sensors.

Description

Magnetic field sensor and device for testing two-dimensional piezoelectric vector magnetic characteristics
Technical Field
The invention relates to the technical field of two-dimensional piezoelectric vector magnetic characteristic testing, in particular to a magnetic field sensor and a device for the two-dimensional piezoelectric vector magnetic characteristic testing.
Background
The magnetic material of the electrical equipment plays an important role in the related application of electromechanical energy conversion, and the problems of low material utilization rate and high energy consumption caused by the inaccuracy of the existing design method and material model of the electromechanical energy conversion equipment. Measurement of the magnetic properties of magnetic materials is a key technique for accurate modeling.
The two-dimensional magnetic characteristic measurement technology of the magnetic material is the basis of research on the magnetic material under the simulated service condition of electrical equipment. On one hand, the two-dimensional magnetic characteristics of the material are researched, a material model can be further established, the design method of electrical equipment is optimized, the operation efficiency of the equipment is improved, on the other hand, the constitutive relation between the material design and the material characteristics is revealed, and the material performance regulation and control are realized.
The purpose of the magnetic property measurement is to obtain a magnetic property curve of a magnetic material. The magnetic characteristic curve comprises a magnetic hysteresis loop, wherein the magnetic hysteresis loop is a B value change curve for gradually reducing the external excitation magnetic field intensity H of a sample magnetized to a certain magnetic induction intensity B and measuring the excitation magnetic field intensity from H to-H; then, a B value change curve from-H to H is measured, and the B value change curve forms a closed B-H curve, namely a hysteresis loop. Therefore, in order to perform magnetic property measurement, it is necessary to be able to obtain samples B and H.
At present, a plurality of methods such as stress loading, temperature loading and the like are available for testing different magnetization environments of a sheet sample. In the prior art, the precision of the magnetic flux density B tested by a probe method is influenced by the thickness, excitation frequency and conductivity of a sample, and a laminated or thicker sample cannot be accurately tested; the process of perforating the sample can in turn damage the sample.
In addition, in the prior art, temperature rise of a sample in a tested process is neglected, so that the testing accuracy of the magnetic property of the material is reduced, the material property is not easy to accurately test and establish a material model, and the material property is difficult to accurately reveal and the material is difficult to efficiently utilize.
As shown in fig. 10, the prior art discloses a method and a device (EP 1198719A1, 20020424) for sensing a magnetic field by using lorentz force and piezoelectric effect, which includes a first layer (current conductor) connected to a second layer (piezoelectric device), the first layer presses or stretches the second layer after receiving the action of the magnetic field, the second layer obtains the lorentz force F of the current conductor by calculating through a piezoelectric equation according to a voltage U caused by the piezoelectric effect, and obtains a magnetic induction strength value B according to a lorentz force calculation formula. Although the technical scheme can measure the magnetic induction intensity value through the piezoelectric device, the piezoelectric device is a whole sheet-shaped or plate-shaped or laminated piezoelectric device, when the electrified conductor is stressed and deformed, the electrified conductor is not uniformly pressed on the piezoelectric device, so that the relation between the voltage generated by the piezoelectric device and the magnetic induction intensity value is non-linear, and the measurement result is deviated. In addition, for the field of magnetic characteristic measurement, the measured magnetic field is small, and the influence of the deviation on the test result is larger.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a magnetic field sensor and a two-dimensional piezoelectric vector magnetic characteristic testing device.
The invention is realized by the following technical scheme:
a magnetic field sensor for testing two-dimensional piezoelectric vector magnetic characteristics comprises a substrate and a plurality of conductive beams, wherein two ends of each conductive beam are respectively installed on the substrate through a support, a piezoelectric element is arranged between each conductive beam and each support, and the resultant force of the Lorentz force applied to the substrate by the conductive beams in the same magnetic field is zero.
According to the above technical solution, preferably, the plurality of conductive beams include a first conductive beam and a second conductive beam having the same shape, the first conductive beam and the second conductive beam are arranged in parallel, and a current direction of the first conductive beam is opposite to a current direction of the second conductive beam.
According to the above technical solution, preferably, the plurality of conductive beams further include a third conductive beam and a fourth conductive beam having the same shape, the third conductive beam and the fourth conductive beam are both located on a first straight line, the first straight line is parallel to the first conductive beam and the second conductive beam, the first straight line is located between the first conductive beam and the second conductive beam, and a current direction of the third conductive beam is opposite to a current direction of the fourth conductive beam.
According to the above technical solution, preferably, the plurality of conductive beams further include a fifth conductive beam and a sixth conductive beam that have the same shape, the fifth conductive beam is parallel to the first straight line and is located between the first straight line and the first conductive beam, the sixth conductive beam is parallel to the first straight line and is located between the first straight line and the second conductive beam, and a current direction of the fifth conductive beam is opposite to a current direction of the sixth conductive beam.
A two-dimensional piezoelectric vector magnetic property testing device adopts the magnetic field sensor of any one of claims 1 to 3, the testing device comprises a square sheet-shaped tested object, five magnetic field sensors are respectively arranged on two surfaces of the tested object, the first magnetic field sensor is positioned in the center of the surface, the length direction of a conductive beam in the magnetic field sensor is taken as the direction of the magnetic field sensor, the direction of the first magnetic field sensor is parallel to any side line of the surface, the second magnetic field sensor is positioned in the midpoint of the first side line of the surface, the direction of the second magnetic field sensor is parallel to the first side line, the third magnetic field sensor is positioned in the midpoint of the second side line of the surface, the direction of the third magnetic field sensor is parallel to the second side line, the fourth magnetic field sensor is positioned in the midpoint of the third side line of the surface, the direction of the fourth magnetic field sensor is parallel to the third side line, the fifth magnetic field sensor is positioned in the midpoint of the fourth side line of the surface, and the direction of the fifth magnetic field sensor is parallel to the fourth side line.
According to the above technical solution, preferably, the directions of the first magnetic field sensors installed on the two surfaces are perpendicular to each other.
According to the above technical scheme, preferably, the two surfaces are respectively provided with the first cover plate and the second cover plate, the first cover plate and the second cover plate are provided with the mounting holes at the corresponding positions of the magnetic field sensor, and the substrate of the magnetic field sensor is fixedly clamped with the mounting holes.
According to the above technical solution, preferably, the first cover plate is provided with a temperature sensor.
According to the above technical solution, preferably, the second cover plate is connected to the heat sink.
The invention has the beneficial effects that:
1. a device for measuring Lorentz force by using piezoelectric effect is provided for obtaining magnetic field information. And amplifying the obtained magnetic field information when the magnetic field intensity is small. And reduce the inside interference of sensor, improve measurement accuracy.
2. The piezoelectric element is connected with the end part of the conductive beam, so that the condition of uneven stress is reduced, and the test precision is improved.
3. The magnetic field sensor is used for manufacturing a two-dimensional piezoelectric vector magnetic property testing device, and higher measurement accuracy is obtained by designing the arrangement mode of a plurality of magnetic field sensors.
4. The influence of temperature change on a test result is reduced by utilizing structures such as a temperature sensor, a radiator and the like.
Drawings
Fig. 1 is a schematic perspective view of a magnetic field sensor according to a first embodiment of the present invention;
fig. 2 shows a schematic diagram of an exploded structure of a magnetic field sensor according to a first embodiment of the invention;
fig. 3 is a schematic top view of a magnetic field sensor according to a first embodiment of the present invention, in which a plurality of conductive beams are distributed along a virtual rectangle;
FIG. 4 shows a schematic current direction diagram of a magnetic field sensor according to a first embodiment of the invention;
fig. 5 is a schematic perspective view of a two-dimensional piezoelectric vector magnetic property testing apparatus according to a second embodiment of the present invention;
fig. 6 is an exploded view schematically showing a first view angle of a two-dimensional piezoelectric vector magnetic property testing apparatus according to a second embodiment of the present invention;
fig. 7 is an exploded view schematically illustrating a second view angle of the two-dimensional piezoelectric vector magnetic property testing apparatus according to the second embodiment of the present invention;
fig. 8 is a schematic structural diagram showing a first test plane of a two-dimensional piezoelectric vector magnetic property test apparatus according to a second embodiment of the present invention;
fig. 9 is a schematic structural diagram showing a second test plane of the two-dimensional piezoelectric vector magnetic property test apparatus according to the second embodiment of the present invention;
FIG. 10 is a diagram illustrating a method and apparatus for sensing a magnetic field using Lorentz force and piezoelectric effect of the background art.
In the figure: 1. a substrate; 2. a first long conductive beam; 3. a second long conductive beam; 4. a first short conductive beam; 5. a second short conductive beam; 6. a third short conductive beam; 7. a fourth short conductive beam; 8. a long side; 9. a first short side; 10. a second short side; 11. a first centerline; 12. a second centerline; 13. a third centerline; 14. a support; 15. a piezoelectric element; 16. a first magnetic field sensor; 17. a second magnetic field sensor; 18. a third magnetic field sensor; 19. a fourth magnetic field sensor; 20. a fifth magnetic field sensor; 21. a first edge line; 22. a second edge line; 23. a third edge line; 24. a fourth edge line; 25. a first cover plate; 26. a second cover plate; 27. mounting holes; 28. a temperature sensor; 29. a connecting plate; 30. and (4) heat dissipation teeth.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and preferred embodiments.
The first embodiment is as follows: as shown in fig. 1 to 4, the present invention provides a magnetic field sensor for two-dimensional piezoelectric vector magnetic property test.
The substrate 1 is used for mounting a plurality of conductive beams and connecting other components. The substrate 1 has at least one flat surface for mounting a conductive beam. In one embodiment, the substrate 1 is a square plate or a rectangular plate.
The conductive beam is made of conductive materials for facilitating the passing of current, and is in a slender beam type structure for facilitating the deformation. The current direction on the conductive beam is the length direction of the conductive beam. When the device works, the conductive beam communicated with direct current is subjected to Lorentz force under the action of a magnetic field, and the Lorentz force enables the conductive beam to deform, so that pressure is generated on the piezoelectric element 15. In one embodiment, the conductive beam is an elongated rectangular plate, and the shape facilitates attachment and fixation of the conductive beam to other structures.
Furthermore, the device adopts a plurality of conductive beams, and because the magnetic field intensity generated by the excitation magnetic field and the test object is very small and the Lorentz force generated by the excitation magnetic field and the test object is also very small for the magnetic property test device, the signals related to the magnetic field need to be acquired by the plurality of conductive beams and the information convenient to observe can be obtained after the signals are superposed.
In one embodiment, both the above-described need for multiple conductive beams and the waste associated with excessive conductive beams are considered. Therefore, as shown in fig. 2-3, in the present embodiment, a preferred conductive beam arrangement is proposed, which includes two long conductive beams having the same shape and four short conductive beams having the same shape, the two long conductive beams and the four short conductive beams are all parallel to each other and are arranged in a virtual rectangle, the two long conductive beams are respectively located on two long sides 8 of the virtual rectangle, the virtual rectangle is provided with a first central line 11 parallel to the long sides 8 and located between the two long conductive beams, the first short conductive beam 4 and the second short conductive beam 5 are located on the first central line 11, one end of the first short conductive beam 4 is located at a middle point of a first short side 9 of the virtual rectangle, one end of the second short conductive beam 5 is located at a middle point of a second short side 10 of the virtual rectangle, the virtual rectangle is further provided with a second central line 12 parallel to the long sides 8 and located between the first long conductive beam 2 and the first short conductive beam 4 and a third central line 13 located between the second long conductive beam 3 and the first short conductive beam 4, a third central line 12 of the third short conductive beam 6 is coincident with a middle point 7 of the fourth short conductive beam, and a middle point 13 are coincident with a fourth central point 7. The arrangement mode of the plurality of conductive beams of the embodiment forms a magnetic field receiving surface formed by the plurality of conductive beams in an approximate rectangle, and can better obtain magnetic field information. Wherein the length of the short conductive beam should be less than half of the length of the long conductive beam.
Further, on the basis of the arrangement structure of the conductive beams in the present embodiment, the current direction of each conductive beam may be defined, and the actions of the lorentz forces of the same magnetic field on the plurality of conductive beams on the substrate 1 may be mutually cancelled. That is to say, after the conductive beam is deformed by force, the substrate 1 is deformed to some extent by the support 14, and the deformations of the substrate 1 caused by the conductive beams are superposed with each other, even causing vibration of the substrate 1, which may affect the accuracy of obtaining the voltage signal of the piezoelectric element 15, that is, the deformation of the substrate 1 may also cause pressure to the piezoelectric element 15. In particular, in the magnetic characteristic test, the measured signal change is very small, and even a small change in deformation of the substrate 1 has a large influence on the test result. Therefore, as shown in fig. 4, the current direction of each conductive beam of the above-described embodiment is limited: the current directions of the two long conductive beams are opposite, the current direction of the first short conductive beam 4 is opposite to that of the second short conductive beam 5, the current direction of the third short conductive beam 6 is opposite to that of the first long conductive beam 2, and the current direction of the fourth short conductive beam 7 is opposite to that of the second long conductive beam 3. By the above arrangement structure of the conductive beams and the limitation of the current direction, the actions of the lorentz forces of the same magnetic field on the substrate 1 of the plurality of conductive beams can be mutually offset.
The two ends of the conductive beam are respectively arranged on the substrate 1 through the supports 14, the two ends of the conductive beam are connected with the supports 14, the middle of the conductive beam is suspended, or a gap is formed between the middle of the conductive beam and the substrate 1, and the conductive beam is easy to deform after being stressed by the structure. In one embodiment, the bracket 14 is a bump or a sheet metal part protruding from the surface of the substrate 1, and the bracket 14 is fixedly connected to the substrate 1, for example, welded or integrally formed. Each conductive beam is provided with a pair of brackets 14 corresponding thereto.
The piezoelectric element 15 is a component made of a piezoelectric material, and in one embodiment, the piezoelectric element 15 is a thin sheet or a thin plate made of a piezoelectric ceramic material. The piezoelectric element 15 is located between the conductive beam and the support 14, when the conductive beam deforms under stress, the conductive beam applies pressure to the piezoelectric element 15, the piezoelectric element 15 generates a changing voltage signal under stress, and the voltage signal is collected and sorted to calculate magnetic field information. Compared with the piezoelectric device adopting the integral sheet shape, the plate shape or the layer shape in the prior art, the piezoelectric element in the embodiment is only connected with the end part of the conductive beam, the connecting contact surface is smaller, the bending deformation of the conductive beam after being stressed is applied to the condition that the piezoelectric element is extruded unevenly, and the difference of the integral extrusion condition of the piezoelectric element is smaller, so that the piezoelectric element arrangement mode of the technical scheme can effectively improve the test precision.
In one embodiment, the conductive beam, the piezoelectric element 15 and the support 14 may be connected by an adhesive connection, which can keep the connection stable without affecting the measurement of the magnetic field information by the piezoelectric element 15 using the piezoelectric effect. In another embodiment, the bracket 14 has a supporting surface, the supporting surface has a guide pillar perpendicular to the supporting surface, the conductive beam and the piezoelectric element 15 have through holes, the through hole of the conductive beam and the through hole of the piezoelectric element 15 both pass through the guide pillar, and the end of the guide pillar has a stopper for preventing the conductive beam and the piezoelectric element 15 from separating from the guide pillar. In order to further solve the problem that the magnetic field of the magnetic property test object is small, a plurality of piezoelectric elements 15 are superposed between each conductive beam and the support 14, the piezoelectric elements 15 are polarized in the thickness direction, and voltage signals of the piezoelectric elements 15 are superposed with each other, so that the obtained voltage signals are amplified. By amplifying the signals in the superposition mode, the amplifying circuit of the testing device can be simplified, and the compactness of the device is improved.
The second embodiment: as shown in fig. 5 to 9, a two-dimensional piezoelectric vector magnetic characteristic testing apparatus according to the present embodiment employs the magnetic field sensor according to the first embodiment. The magnetic field sensor is arranged near a sample, an electrified conductive beam of the magnetic field sensor is deformed by Lorentz force under the influence of the magnetic field of the sample, and the deformed conductive beam extrudes the piezoelectric element 15 to enable the piezoelectric element 15 to generate a voltage change signal. By collecting voltage change signals and combining the known relation between the voltage signals and stress and the current in the conductive beam, the B and H of the magnetic field influencing the magnetic field sensor can be calculated. Taking the sheet material as the measured object, the magnetic field sensor and the magnetic field are all in the air environment, for example, the specific calculation process is as follows:
the concrete formula for obtaining the stress F to which the conductive beam is subjected according to the voltage U generated by the piezoelectric element 15 is as follows:
Figure 180935DEST_PATH_IMAGE001
wherein F is the stress of the electrified conductive beam caused by the magnetic field, U is the voltage caused by the measured piezoelectric effect, w is the width of the measured sheet, h is the thickness of the measured sheet, l is the length of the measured sheet, and g 33 Is the piezoelectric coefficient of the piezoelectric material.
The specific formula for obtaining the magnetic induction intensity value B of the magnetic field according to the stress F borne by the conductive beam is as follows:
Figure 770179DEST_PATH_IMAGE002
wherein B is the magnetic induction of the magnetic field, F is the stress calculated above, I is the current passing through the wire, and L is the length of the energized wire.
The specific formula for obtaining the magnetic field intensity H according to the ratio of the magnetic induction intensity value B to the air magnetic permeability mu is as follows:
Figure 284337DEST_PATH_IMAGE003
and determining the direction of the magnetic field, the current direction of the conductive beam and the stress direction of the conductive beam according to the left-hand rule.
In order to measure the magnetic induction B and the magnetic field strength H of the object to be measured, a plurality of magnetic field sensors in different directions need to be provided. As shown in fig. 8, in a specific embodiment, the testing apparatus includes a square testing plane, five magnetic field sensors are installed on the testing plane, the first magnetic field sensor 16 is located at the center, the length direction of the conductive beam inside the magnetic field sensor is taken as the direction of the magnetic field sensor, the direction of the first magnetic field sensor 16 is parallel to any side line of the testing plane, the second magnetic field sensor 17 is located at the midpoint of the first side line 21 of the testing plane and the direction of the second magnetic field sensor 17 is parallel to the first side line 21, the third magnetic field sensor 18 is located at the midpoint of the second side line 22 of the testing plane and the direction of the third magnetic field sensor 18 is parallel to the second side line 22, the fourth magnetic field sensor 19 is located at the midpoint of the third side line 23 of the testing plane and the direction of the fourth magnetic field sensor 19 is parallel to the third side line 23, the fifth magnetic field sensor 20 is located at the midpoint of the fourth side line 24 of the testing plane and the direction of the fifth magnetic field sensor 20 is parallel to the fourth side line 24. The measured object is set to be located in a plane rectangular coordinate system, in which a coordinate axis x and a coordinate axis y are set to be perpendicular to each other, then the first magnetic field sensor 16 in the above structure is used to obtain the magnetic field strength H, the second magnetic field sensor 17 and the fourth magnetic field sensor 19 which are relatively parallel are used to obtain the magnetic induction Bx in the x direction, and the third magnetic field sensor 18 and the fifth magnetic field sensor 20 which are relatively parallel are used to obtain the magnetic induction By in the y direction.
Further, as shown in fig. 9, the testing apparatus includes a square sheet-shaped object to be tested, two sides of the object to be tested are simultaneously provided with testing planes, directions of the second, third, fourth, and fifth magnetic field sensors of the two testing planes are the same, and directions of the first magnetic field sensors 16 of the two testing planes are perpendicular to each other. Theoretically, the information obtained by the corresponding magnetic field sensors of the two test planes should be the same, so that the measurement accuracy can be improved by using the corresponding magnetic field sensors. For example, the signals of the corresponding magnetic field sensors are superimposed and averaged. The first magnetic field sensors 16 of the two test planes can obtain the magnetic field strength H in the x-direction and the magnetic field strength H in the y-direction, respectively.
Further, in order to realize the above-mentioned simultaneous arrangement of the test planes on both sides of the square sheet-like object to be tested, a specific embodiment of the test apparatus is provided: as shown in fig. 5 to 7, two test planes of the object to be tested are respectively provided with a first cover plate 25 and a second cover plate 26, ten magnetic field sensors are respectively arranged on the two test planes of the object to be tested, the first cover plate 25 and the second cover plate 26 are provided with mounting holes 27 at corresponding positions of the magnetic field sensors, and the substrate 1 of the magnetic field sensors is fixed with the mounting holes 27 in a clamping manner.
Further, the first cover plate 25 is provided with a temperature sensor 28, and the temperature of the device is monitored through the temperature sensor 28, so that the influence of the temperature on the test result can be observed. In one embodiment, the first cover plate 25 is provided with a plurality of temperature sensors 28 arranged in a rectangular array. A plurality of temperature sensors 28 are used to provide temperature measurement accuracy.
Furthermore, the second cover plate 26 is connected to a heat sink, and the heat sink is used for improving the heat dissipation efficiency of the testing device and reducing the influence of temperature variation on the testing result. The radiator can be matched with the temperature sensor 28, and the radiating efficiency of the radiator is adjusted by utilizing the temperature information obtained by the temperature sensor 28, so that the temperature stability of the testing device is maintained as much as possible. In one embodiment, the heat sink includes a connection plate 29 and a plurality of heat dissipation teeth 30, one side of the connection plate 29 is connected to the second cap plate 26, and the other side of the connection plate 29 is connected to the plurality of heat dissipation teeth 30. The heat of the testing device is conducted to the plurality of heat dissipation teeth 30 through the connecting plate 29, the plurality of heat dissipation teeth 30 increase the contact area with air, and the heat dissipation efficiency can be improved. Furthermore, the radiator is matched with the fan, the air circulation speed near the radiator is increased by the aid of the fan, and radiating efficiency is further improved.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (9)

1. The magnetic field sensor for the two-dimensional piezoelectric vector magnetic property test is characterized by comprising a substrate and a plurality of conductive beams, wherein two ends of each conductive beam are respectively installed on the substrate through a support, a piezoelectric element is arranged between each conductive beam and each support, and the resultant force of Lorentz force applied to the substrate by the conductive beams in the same magnetic field is zero.
2. The magnetic field sensor for testing the magnetic properties of the two-dimensional piezoelectric vector according to claim 1, wherein the plurality of conductive beams includes a first conductive beam and a second conductive beam having the same shape, the first conductive beam and the second conductive beam are arranged in parallel, and a current direction of the first conductive beam is opposite to a current direction of the second conductive beam.
3. The magnetic field sensor for testing the magnetic properties of the two-dimensional piezoelectric vector of claim 2, wherein the plurality of conductive beams further comprises a third conductive beam and a fourth conductive beam which have the same shape, the third conductive beam and the fourth conductive beam are both located on a first straight line, the first straight line is parallel to the first conductive beam and the second conductive beam, the first straight line is located between the first conductive beam and the second conductive beam, and the current direction of the third conductive beam is opposite to the current direction of the fourth conductive beam.
4. The magnetic field sensor for two-dimensional piezoelectric vector magnetic property test according to claim 3, wherein the plurality of conductive beams further includes a fifth conductive beam and a sixth conductive beam having the same shape, the fifth conductive beam is parallel to the first straight line and is located between the first straight line and the first conductive beam, the sixth conductive beam is parallel to the first straight line and is located between the first straight line and the second conductive beam, and a current direction of the fifth conductive beam is opposite to a current direction of the sixth conductive beam.
5. A two-dimensional piezoelectric vector magnetic property testing device, wherein the testing device employs the magnetic field sensor according to any one of claims 1 to 3, the testing device includes a square sheet-shaped object to be tested, five magnetic field sensors are respectively mounted on two surfaces of the object to be tested, a first magnetic field sensor is located in the center of the surface, the length direction of the conductive beam inside the magnetic field sensor is taken as the direction of the magnetic field sensor, the direction of the first magnetic field sensor is parallel to any one side line of the surface, a second magnetic field sensor is located at the midpoint of the first side line of the surface and the direction of the second magnetic field sensor is parallel to the first side line, a third magnetic field sensor is located at the midpoint of the second side line of the surface and the direction of the third magnetic field sensor is parallel to the second side line, a fourth magnetic field sensor is located at the midpoint of the third side line of the surface and the direction of the fourth magnetic field sensor is parallel to the fourth side line, and a fifth magnetic field sensor is located at the midpoint of the fourth side line of the surface and the direction of the fifth magnetic field sensor is parallel to the fourth side line.
6. A two-dimensional piezoelectric vector magnetic property test device according to claim 5, wherein the directions of the first magnetic field sensors installed on the two surfaces are perpendicular to each other.
7. A two-dimensional piezoelectric vector magnetic property testing device according to claim 6, wherein a first cover plate and a second cover plate are respectively disposed on two said surfaces, a mounting hole is disposed on the corresponding position of the magnetic field sensor of the first cover plate and the second cover plate, and the substrate of the magnetic field sensor is fixed to the mounting hole in a clamping manner.
8. A two-dimensional piezoelectric vector magnetic property testing device according to claim 7, wherein said first cover plate is provided with a temperature sensor.
9. A two-dimensional piezoelectric vector magnetic property testing device according to claim 7, wherein said second cover plate is connected to a heat sink.
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