CN209086186U - A kind of material three-dimensional anisotropy thermal conductivity nondestructive test device - Google Patents
A kind of material three-dimensional anisotropy thermal conductivity nondestructive test device Download PDFInfo
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Abstract
The utility model provides a kind of material three-dimensional anisotropy thermal conductivity nondestructive test device, belongs to material thermal conductivity the field of test technology.The device includes triple-frequency harmonics method independent sensor and electrical signal collection and processing module; wherein triple-frequency harmonics method independent sensor includes abrasion-proof insulating protective film, line style heating detector module, current feed part, detecting voltage lead part; current feed part, voltage lead part are welded on four pads of line style heating detector end, and abrasion-proof insulating protective film, which is covered, heats detector two sides in miniature line style；Electrical signal collection and processing module include signal generator, microcomputer control and data collection system, bridge modules circuit, lock-in amplifier, high precision DC power supply, resistance, current feed end, voltage lead end, are handled after the electric signal amplification for generating to sensor.The device has the advantages that be able to achieve three dimensional anisotropic material thermal conductivity high-acruracy survey, high to the test of material non-destructive, recycling property.
Description
Technical field
The utility model relates to material thermal conductivity the field of test technology, particularly relate to a kind of material three-dimensional anisotropy thermal conductivity
Rate nondestructive test device.
Background technique
The thermotransport property and its differently- oriented directivity of anisotropic material are closely related.The reason is that in the different directions along lattice
On, atomic arrangement period and density degree differ greatly, and result in and there is different thermal conductivities, thermal diffusivity in different directions
Equal thermophysical properties.Anisotropic material is widely used in the high frontier of such as microelectron-mechanical, simultaneously because it is laterally, tangentially
Growth characteristics it is different, there is also anisotropy for tissue.Therefore to the accurate and lossless of anisotropic material thermal conductivity
The research for measuring frontier high for microelectron-mechanical field, life science etc. all plays important application value.In recent years
Come research shows that: carbon nano pipe array thin-film material be solve microelectron-mechanical product performance and heat dissipation on conflict, be used for
Meet the effective means that people want product high-performance in the case where stabilization.Carbon nanotube adds according to certain aligned growth
The means of upper structure control and physical modification, thermotransport effect will be greatly improved.However each orientation of array material
Hot physical property it is different, in addition the architectural characteristic of its micro/nano-scale, so it is very difficult that precise measurement, which obtains its thermal conductivity,.
The prior art (ZL 201010201486.7) measures anisotropic material thermal conductivity using Harmonic Detection technology, but
This method makes measurement process cumbersome because needing to carry out coating operation in sample surfaces, and big to the damageability of sample, up to not
To existing product to the non-destructive of measuring technique and the demand of convenience.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of material three-dimensional anisotropy thermal conductivity non-destructive testing dresses
It sets.
The device includes triple-frequency harmonics method independent sensor and electrical signal collection and processing module, wherein triple-frequency harmonics
Method independent sensor includes line style heating detector mould group and abrasion-proof insulating protective film；Electrical signal collection and processing module include
It is signal generator, microcomputer control and data collection system, bridge modules circuit lock-in amplifier, high precision DC power supply, adjustable
Resistance, current feed end and voltage lead end；The signal of triple-frequency harmonics method independent sensor passes through electrical signal collection and processing
Module amplifies processing.
Wherein, line style heating detector mould group includes that four line styles heat detector module, and each line style heats detector
Module include line style heating detector, the first current feed part, the first detecting voltage lead part, the second detecting voltage lead part and
Second current feed part, the first current feed part, the first detecting voltage lead part, the second detecting voltage lead part, the second electric current
Lead part is respectively welded on four pads of line style heating detector.
Abrasion-proof insulating protective film is located at line style heating detector mould group two sides, plays and slows down and rubbing when sample engaged test
It wears consumption, extends the effect of linear heater/detector service life.
First current feed part, the first detecting voltage lead part, the second detecting voltage lead part and the second current feed part
Material be enamel covered wire, shape be linear faciola, faciola length be 1~30mm, width be 5~800 μm；Line style heating detection
The material of device is that chromium/platinum is compound, chrome gold is compound, chromium/nickel is one of compound, composite bed thickness 10nm/200nm；It is wear-resisting exhausted
The material of edge protective film is polyimides.
Bridge modules circuit includes the first high-precision differential amplifier, the second high-precision differential amplifier, converter, first
It is Low Drift Temperature resistance, the second Low Drift Temperature resistance, third Low Drift Temperature resistance, the 4th Low Drift Temperature resistance, the 5th Low Drift Temperature resistance, the 6th low
Temperature drift resistance, the 7th Low Drift Temperature resistance, the 8th Low Drift Temperature resistance, the first electrolytic capacitor, the second electrolytic capacitor, third electrolysis
Capacitor, the 4th electrolytic capacitor, the 5th electrolytic capacitor, the 6th electrolytic capacitor, the 7th electrolytic capacitor, the 8th electrolysis electricity
Container, the 9th electrolytic capacitor, the tenth electrolytic capacitor, the 11st electrolytic capacitor, the 12nd electrolytic capacitor；Current feed
End includes the first current feed end, the second current feed end；Voltage lead end includes first voltage lead end, second voltage lead
End.
First high-precision differential amplifier includes eight pins, respectively the first high-precision differential amplifier RG port A, the
One high-precision differential amplifier-IN port A, the first high-precision differential amplifier+IN port A, the first high-precision differential amplifier-
It is the port Vs A, the first high-precision differential amplifier REF port A, the first high-precision differential amplifier OUTPUT port A, first high-precision
Spend differential amplifier+Vs port A and the first high-precision differential amplifier RG port A；Second high-precision differential amplifier includes eight
It is a pin, respectively the second high-precision differential amplifier RG port B, the second high-precision differential amplifier-IN port B, second high
Precision differential amplifier+IN port B, the second high-precision differential amplifier-Vs port B, the second end high-precision differential amplifier REF
Mouth B, the second high-precision differential amplifier OUTPUT port B, the second high-precision differential amplifier+Vs port B, the second high-precision are poor
Dynamic amplifier RG port B.
First current feed part is connect with signal generator by the first current feed end, the second current feed part with it is adjustable
Resistance is connected to the ground by the second current feed end, and the first detecting voltage lead part is electrically connected with first voltage lead end, and second
Detecting voltage lead part is electrically connected with second voltage lead end；The high-precision of first high-precision differential amplifier-IN port A and first
Differential amplifier+IN port A is respectively connected to first voltage lead end and second voltage lead end, the first differential amplification of high-precision
Device-Vs port A, the first high-precision differential amplifier+Vs port A are respectively connected to the cathode port, just of high precision DC power supply
Extreme mouth, the first of the first high-precision differential amplifier OUTPUT port A the first differential wave of output to lock-in amplifier are differential
Signal input part A；Second high-precision differential amplifier-IN port B and the second high-precision differential amplifier+IN port B connect respectively
It is connected to the both ends of adjustable resistance, the second high-precision differential amplifier-Vs port B, the second high-precision differential amplifier+Vs port B
It is respectively connected to cathode port, the positive port of high precision DC power supply, the second high-precision differential amplifier OUTPUT port B is defeated
To the second differential wave input terminal B of lock-in amplifier, the third input terminal of lock-in amplifier is connected to the second differential wave out
First output end of signal generator；The input terminal of converter is connected to the second output terminal of signal generator, microcomputer control with
Three ends of data collection system one end phase with one end of adjustable resistance, one end of signal generator and lock-in amplifier respectively
Even.
Line-voltage regulation≤0.5% of high precision DC power supply, ripple peak value are less than≤10mV.
The application method of the material three-dimensional anisotropy thermal conductivity nondestructive test device, comprises the following steps that
S1. triple-frequency harmonics method independent sensor is placed at the top of three dimensional anisotropic material sample, and is fixed,
It is subsequently placed in that constant-temperature vacuum is intracavitary, triple-frequency harmonics method independent sensor and electrical signal collection and processing module pass through vacuum chamber
Lead part is attached；
S2. start vacuum chamber system, evacuate intracavitary air, while keeping constant temperature；
S3. the simple sinusoidal alternating current under different frequency is passed through to triple-frequency harmonics method independent sensor, obtained in different frequencies
Rate, at a temperature of triple-frequency harmonics and fundamental current measured by triple-frequency harmonics method independent sensor；
S4. it is fitted to obtain the heat in some direction of the three dimensional anisotropic material of sensor measurement according to Harmonic Method test philosophy
Conductance；
S5. change sensor repeats step S1~S4, measures the thermal conductivity under the other directions of sample in the placement location of sample
Rate；
S6. according to the measurement result of S4, S5, anisotropic material three-dimensional is obtained in conjunction with three dimensional anisotropic Material texture
Thermal conductivity.
This method is applicable in pressure limit: normal pressure~10MPa, Applicable temperature range: 73K~573K.
The above-mentioned technical proposal of the utility model has the beneficial effect that:
(1) testing scheme of three dimensional anisotropic material is contacted using triple-frequency harmonics method independent sensor non-deposited formula,
The problem of detector of previous thermal characteristics test device is unable to satisfy non-destructive testing is overcome, guarantees that three dimensional anisotropic material exists
Recycling property after test also improves the reusable number of triple-frequency harmonics method sensor；
(2) by select high precision DC power supply (line-voltage regulation≤0.5%, ripple be less than peak value≤10mV),
Increase by six pairs of capacitors to carry out high frequency and the filtering processing of low frequency spur signal, select high-precision differential amplifier, to adjustable resistance end
It is changed to four-wire method measurement.The stability for overcoming former experimental system signal is not high, measurement resistance accuracy is not high, differential signal not
The defects of good, ensure that the high-acruracy survey of three dimensional anisotropic material thermal conductivity.
Detailed description of the invention
Fig. 1 is triple-frequency harmonics method self in the material three-dimensional anisotropy thermal conductivity nondestructive test device of the utility model
Sensor structure schematic diagram；
Fig. 2 is triple-frequency harmonics method self in the material three-dimensional anisotropy thermal conductivity nondestructive test device of the utility model
The structural schematic diagram of sensor contacts three dimensional anisotropic material progress signal detection；
Fig. 3 is the measuring device schematic diagram of the material three-dimensional anisotropy thermal conductivity nondestructive test device of the utility model.
Wherein:
1- line style heats detector mould group, 2- abrasion-proof insulating protective film, 3- three dimensional anisotropic material sample, 12- line style
Detector module A is heated, 13- line style heats detector module B, and 14- line style heats detector module C, the heating detection of 15- line style
Device module D, 121- line style heats detector A, and 131- line style heats detector B, and 141- line style heats detector C, 151- line style
Heat detector D, 122- the first current feed part A, 132- first current feed part B, 142- first current feed part C, 152-
First current feed part D, 123- first detecting voltage lead part A, 133- first detecting voltage lead part B, 143- first detect
The first second second detecting voltage of detecting voltage lead part A, 134- of detecting voltage lead part D, 124- of voltage lead part C, 153-
The second second second current feed part A of detecting voltage lead part D, 125- of detecting voltage lead part C, 154- of lead part B, 144-,
The second second current feed part D, 41- signal generator of current feed part C, 155- of 135- the second current feed part B, 145-, 42-
Microcomputer control and data collection system, 43- bridge modules circuit, 44- lock-in amplifier, 45- high precision DC power supply, R9- can
Adjust resistance, the first current feed of 4d- end, 4c- first voltage lead end, 4b- second voltage lead end, the second current feed of 4a-
End, 431- the first high-precision differential amplifier, 432- the second high-precision differential amplifier, 433- converter, the first Low Drift Temperature of R1-
Resistance, R2- the second Low Drift Temperature resistance, R3- third Low Drift Temperature resistance, the 4th Low Drift Temperature resistance of R4-, the 5th Low Drift Temperature resistance of R5-,
The 6th Low Drift Temperature resistance of R6-, the 7th Low Drift Temperature resistance of R7-, the 8th Low Drift Temperature resistance of R8-, the first electrolytic capacitor of C1-, C2-
Two electrolytic capacitors, C3- third electrolytic capacitor, the 4th electrolytic capacitor of C4-, the 5th electrolytic capacitor of C5-, the 6th electricity of C6-
Electrolysis condenser, the 7th electrolytic capacitor of C7-, the 8th electrolytic capacitor of C8-, the 9th electrolytic capacitor of C9-, the electrolysis electricity of C10- the tenth
Container, the 11st electrolytic capacitor of C11-, the 12nd electrolytic capacitor of C12-, the end 4311- the first high-precision differential amplifier RG
Mouth A, 4312- the first high-precision differential amplifier-IN port A, 4313- the first high-precision differential amplifier+IN port A, 4314-
First high-precision differential amplifier-Vs port A, 4315- the first high-precision differential amplifier REF port A, 4316- first is high-precision
Differential amplifier OUTPUT port A is spent, the first high-precision of 4317- the first high-precision differential amplifier+Vs port A, 4318- is differential
The end amplifier RG port A, 4321- the second high-precision differential amplifier RG port B, 4322- the second high-precision differential amplifier-IN
Mouth B, 4323- the second high-precision differential amplifier+IN port B, 4324- the second high-precision differential amplifier-Vs port B, 4325-
Second high-precision differential amplifier REF port B, 4326- the second high-precision differential amplifier OUTPUT port B, 4327- second is high
Precision differential amplifier+Vs port B, 4328- the second high-precision differential amplifier RG port B.
Specific embodiment
In order to make the technical problems, technical solutions and advantages to be solved by the utility model clearer, below in conjunction with attached drawing
And specific embodiment is described in detail.
The utility model provides a kind of material three-dimensional anisotropy thermal conductivity nondestructive test device.
As shown in figure 3, the device includes triple-frequency harmonics method independent sensor and electrical signal collection and processing module,
In, triple-frequency harmonics method independent sensor includes line style heating detector mould group 1 and abrasion-proof insulating protective film 2；Electrical signal collection
And processing module includes signal generator 41, microcomputer control and data collection system 42, bridge modules circuit 43, lock-in amplifier
44, high precision DC power supply 45, adjustable resistance R9, current feed end and voltage lead end；Triple-frequency harmonics method independent sensor
Signal processing is amplified by electrical signal collection and processing module.
As shown in Figure 1, line style heating detector mould group 1, which includes four, is heated increase principle as temperature-sensitive according to metallic resistance
Line style heating detector module A12, line style heating detector module B13, line style heating detector module C14, line style heating
Detector module D15, wherein line style heating detector module A12 includes line style heating detector A121, the first current feed part
A122, the first detecting voltage lead part A123, the second detecting voltage lead part A124, the second current feed part A125, the first electricity
Flow lead part A122, the first detecting voltage lead part A123, the second detecting voltage lead part A124, the second current feed part A125
It is respectively welded on four pads of line style heating detector A121；Line style heating detector module B13 includes that line style heating is visited
Survey device B131, the first current feed part B132, the first detecting voltage lead part B133, the second detecting voltage lead part B134, the
Two current feed part B135, the first current feed part B132, the first detecting voltage lead part B133, the second detecting voltage lead part
B134, the second current feed part B135 are respectively welded on four pads of line style heating detector B131；Line style heating detection
Device module C14 includes line style heating detector C 141, the first current feed part C142, the first detecting voltage lead part C143, the
Two detecting voltage lead part C144, the second current feed part C145, the first current feed part C142, the first detecting voltage lead part
C143, the second detecting voltage lead part C144, the second current feed part C145 are respectively welded at line style heating detector C 141
On four pads；Line style heating detector module D15 includes line style heating detector D151, the first current feed part D152, the
One detecting voltage lead part D153, the second detecting voltage lead part D154, the second current feed part D155, the first current feed part
D152, the first detecting voltage lead part D153, the second detecting voltage lead part D154, the second current feed part D155 are respectively welded
On four pads of line style heating detector D151.
As shown in Fig. 2, abrasion-proof insulating protective film 2 is located at line style heating 1 two sides of detector mould group.So that triple-frequency harmonics method is only
Vertical type sensor can repeatedly measure three dimensional anisotropic sample 3, and sensor is bonded with sample and works well.
In specific design, the first current feed part A122, the first detecting voltage lead part A123, the second detecting voltage draw
Line piece A124, the second current feed part A125, the first current feed part B132, the first detecting voltage lead part B133, second are visited
Survey voltage lead part B134, the second current feed part B135, the first current feed part C142, the first detecting voltage lead part
C143, the second detecting voltage lead part C144, the second current feed part C145, the first current feed part D152, the first detection electricity
Voltage lead wires part D153, the second detecting voltage lead part D154, the second current feed part D155 material be enamel covered wire, shape is
Linear faciola, faciola length are 1~30mm, and width is 5~800 μm；Line style heats detector A121, line style heats detector
B131, line style heating detector C 141, the material of line style heating detector D151 are that chromium/platinum, chrome gold or chromium/nickel are compound, compound
Layer is with a thickness of 10nm/200nm.It is 5~30mm that line style, which heats detector A121 interlude (between detecting voltage lead) length, whole
Width is 400~800 μm；It is 1~5mm that line style, which heats segment length among detector B131, and overall width is 5~50 μm；Line style
The heating intermediate segment length of detector C 141 is 1~5mm, and overall width is 5~50 μm；Line style heats segment length among detector D151
Degree is 5~10mm, and overall width is 100~400 μm.Play to three dimensional anisotropic material sample 3 (the right angle on three-dimensional
Coordinate x, y, z direction) heat the effect that the effective information of sample feedback is received with high-precision.Abrasion-proof insulating protective film 2 is polyamides
Imines material has thermally conductive, insulation and antiwear characteristic well.
Bridge modules circuit 43 includes the first high-precision differential amplifier 431, the second high-precision differential amplifier 432, turns
Parallel operation 433, the first Low Drift Temperature resistance R1, the second Low Drift Temperature resistance R2, third Low Drift Temperature resistance R3, the 4th Low Drift Temperature resistance R4,
5th Low Drift Temperature resistance R5, the 6th Low Drift Temperature resistance R6, the 7th Low Drift Temperature resistance R7, the 8th Low Drift Temperature resistance R8, the first electrolysis
Capacitor C1, the second electrolytic capacitor C2, third electrolytic capacitor C3, the 4th electrolytic capacitor C4, the 5th electrolytic capacitor C5,
6th electrolytic capacitor C6, the 7th electrolytic capacitor C7, the 8th electrolytic capacitor C8, the 9th electrolytic capacitor C9, the tenth electrolysis
Capacitor C10, the 11st electrolytic capacitor C11, the 12nd electrolytic capacitor C12；Current feed end includes the first current feed
Hold 4d, the second current feed end 4a；Voltage lead end includes first voltage lead end 4c, second voltage lead end 4b.It is measuring
When the first current feed part, the first detecting voltage lead part, the second detecting voltage lead part and the second current feed part respectively with
First current feed end 4d, first voltage lead end 4c, second voltage lead end 4b and the second current feed end 4a pass through peeling
It is attached afterwards using scolding tin.
The main measuring principle of triple-frequency harmonics method independent sensor is the first current feed part A122, the first current feed part
B132, the first current feed part C142, the first current feed part D152 and the second current feed part A125, the second current feed part
B135, the second current feed part C145, the second current feed part D155 are visited to miniature line style heating detector A121, line style heating
After survey device B131, line style heating detector C 141, line style heating detector D151 are passed through simple sinusoidal alternating current, miniature line style heating
Detector A121, line style heating detector B131, line style heating detector C 141, line style heating detector D151 are acted in joule
Under to three dimensional anisotropic sample 3 heat.The relationship of heat wave frequency and material, three dimensional anisotropic sample are generated according to sample
3 generate unique frequency domain heat wave.Line style heats detector A121, line style heats detector B131, line style heats detector C 141,
Line style heating detector D151 receives the heat wave in the direction z, linear heater detector A121 and linear heater detector jointly
C141 receives the heat wave in the direction y, and line style heats the heat wave that detector B131 and linear heater detector D151 receives the direction x.
These heat waves are converted to corresponding electric signal, by the first detecting voltage lead part A123, the first detecting voltage lead part B133,
First detecting voltage lead part C143, the first detecting voltage lead part D153 and the second detecting voltage lead part A124, the second spy
It surveys voltage lead part B134, the second detecting voltage lead part C144, the second detecting voltage lead part D154 and is output to telecommunications
Number acquisition and processing module.It should be pointed out that these line styles heating detector module A12, line style heat detector module
B13, line style heating detector module C14, line style heating detector module D15 are to be respectively started to measure in the measurements.
As above, electrical signal collection and processing module are between high-precision differential amplifier and high precision DC power supply output end
12 electrolytic capacitors are set altogether, plays the role of filtering clutter, improve measuring accuracy.Wherein, four capacitor C1, C4,
C7, C10 are the electrolytic capacitor of capacitance 10pF type.Four capacitors C2, C5, C8, C11 are 1 μ F type of capacitance
Electrolytic capacitor.Four capacitors C3, C6, C9, C12 are the electrolytic capacitor of 100 μ F type of capacitance.Play high frequency, low frequency
Noise signal filtering improves measurement accuracy and measures the effect of the linearity.
Electrical signal collection and processing module receive the electrical signal information detected from triple-frequency harmonics method independent sensor,
The third harmonic voltage U under different frequency f is recorded under host control3ω, fundamental current I1ω, sample resistance R etc..
First high-precision differential amplifier 431, the second high-precision differential amplifier 432 separately include 8 pins, i.e., and first
High-precision differential amplifier RG port A4311, the first high-precision differential amplifier-IN port A4312, the first high-precision differential are put
Big device+IN port A4313, the first high-precision differential amplifier-Vs port A4314, the first port high-precision differential amplifier REF
A4315, the first high-precision differential amplifier OUTPUT port A4316, the first high-precision differential amplifier+Vs port A4317,
One high-precision differential amplifier RG port A4318, the second high-precision differential amplifier RG port B4321, the second high-precision are differential
Amplifier-IN port B4322, the second high-precision differential amplifier+IN port B4323, the second end high-precision differential amplifier-Vs
Mouthful B4324, the second high-precision differential amplifier REF port B4325, the second high-precision differential amplifier OUTPUT port B4326,
Second high-precision differential amplifier+Vs port B4327, the second high-precision differential amplifier RG port B4328.
First current feed part is connect with signal generator 41 by the first current feed end 4d, the second current feed part with
Adjustable resistance R9 is connected to the ground by the second current feed end 4a, the first detecting voltage lead part and first voltage lead end 4c electricity
Connection, the second detecting voltage lead part are electrically connected with second voltage lead end 4b；First port high-precision differential amplifier-IN
A4312 and the first high-precision differential amplifier+IN port A4313 is respectively connected to first voltage lead end 4c and second voltage is drawn
Line end 4b, the first high-precision differential amplifier-Vs port A4314, the first high-precision differential amplifier+Vs port A4317 difference
It is connected to cathode port, the positive port of high precision DC power supply 45, the first high-precision differential amplifier OUTPUT port A4316
Export the first differential wave input terminal A of the first differential wave to lock-in amplifier 44；Second end high-precision differential amplifier-IN
Mouth B4322 and the second high-precision differential amplifier+IN port B4323 is respectively connected to the both ends of adjustable resistance R9, and second is high-precision
Degree differential amplifier-Vs port B4324, the second high-precision differential amplifier+Vs port B4327 are respectively connected to High-accuracy direct current
The cathode port of power supply 45, positive port, the second high-precision differential amplifier OUTPUT port B4326 export the second differential wave
To the second differential wave input terminal B of lock-in amplifier 44, the third input terminal of lock-in amplifier 44 is connected to signal generator
41 the first output end；The input terminal of converter 433 is connected to the second output terminal of signal generator 41, microcomputer control and data
Three ends of acquisition system 42 one end with one end of adjustable resistance R9, one end of signal generator 41 and lock-in amplifier 44 respectively
It is connected.
Line-voltage regulation≤0.5% of high precision DC power supply 45, ripple peak value are less than≤10mV.
The application method of the device, the steps include:
S1. triple-frequency harmonics method independent sensor is placed in the top of three dimensional anisotropic material sample 3, and using can be
It applies stressed device and is fixed in top, it should be noted that in fixed sensor and sample, sensor cannot be made to generate
Larger deformation angle (> 15 °), in order to avoid destroy sensor.It is intracavitary to be subsequently placed in constant-temperature vacuum, sensor and electrical signal collection and place
Reason module is attached by the lead part of vacuum chamber；It should be pointed out that the lead part material of inside of vacuum chamber, structure with
Sensor it is identical, measurement error will not be brought into.
S2. start vacuum chamber system, evacuate intracavitary air, when vacuumizing completion, intracavitary pressure is up to 1 × 10-5Torr,
Temperature is kept constant simultaneously；
S3. the simple sinusoidal alternating current that is passed through to sensor under different frequency is obtained in different frequency, temperature lower sensor
Triple-frequency harmonics and fundamental current；Specifically:
Open signal generator 41, microcomputer control and data collection system 42, lock-in amplifier 44, high precision DC power supply
45, the simple sinusoidal alternating current of weak periodical is passed through to sensor.Sensor is measured by adjustable resistance R9, obtains three-dimensional
The initial resistivity value R of anisotropic material sample 30.Using lock-in amplifier 44 control input frequency f, signal generator 41,
First high-precision differential amplifier 431, the second high-precision differential amplifier 432 and lock-in amplifier 44 put ultra-weak electronic signal
Under big effect, by microcomputer control and data collection system 42 different frequency, at a temperature of the third harmonic voltage that measures
U3ωWith fundamental voltage U1ω；
S4. it is fitted to obtain the heat in some direction of the three dimensional anisotropic material of sensor measurement according to Harmonic Method test philosophy
Conductance；It should be noted that the size of metal detector faciola length l, half-breadth b, abrasion-proof insulating protective film in calculation formula,
With the thermal contact resistance R of sensorC1It has been measured in sensor preparation process with thermal conductivity, angular velocity omega can pass through frequency f
It is converted to；
S5. change sensor repeats step S1~S4, measures the thermal conductivity under the other directions of sample in the placement location of sample
Rate；
S6. according to the measurement result of S4, S5, anisotropic material three-dimensional is obtained in conjunction with three dimensional anisotropic Material texture
The thermal conductivity in (three directions of x, y, z)；
This method is applicable in pressure limit: normal pressure~10MPa, temperature range: 73K~573K.
The main formulas for calculating of Harmonic Method test philosophy is as follows in the above method:
Firstly, calculating anisotropic material normal direction thermal conductivity (κz2):
In order to obtain the direction x and y thermal conductivity (κ in facex2, κy2), it need to first calculate sensor and anisotropic material sample
Thermal contact resistance (RC2):
RC2As parameter item, the multilayered structure anisotropic thermal Transport Model (formula (3)) that Borca et al. is proposed is substituted into, knot
The parameters such as temperature rise (Δ T), the panel detector structure size that experiment measures are closed, are obtained on the direction x and y using multi-parameter fitting program
Thermal conductivity (κx2, κy2):
Wherein,
nszj=κsj/κzj (7)
In above formula:
L-metal detector faciola length (m)；B-metal detector faciola half-breadth (m)；
D-thickness (m)； αCR- sample resistance temperature coefficient (K-1)；
U1ω- fundamental voltage (V)； R0- sample levels initial resistance (Ω)；
γ-third harmonic voltage (U3ω) inverse with the slope of angular speed natural logrithm (ln ω)；
κ-thermal conductivity (Wm-1·K-1)； RC- interface contact heat resistance (Ω)；
In subscript:
The direction z-z；S-represents the direction x or y；
J-sequence number: 1 indicates abrasion-proof insulating protective film, and 2 represent anisotropic material sample, for thin-film material,
3 represent its support substrate.
The above is preferred embodiments of the present invention, it is noted that for the ordinary skill of the art
For personnel, under the premise of not departing from principle described in the utility model, several improvements and modifications can also be made, these improvement
It also should be regarded as the protection scope of the utility model with retouching.
Claims (8)
1. a kind of material three-dimensional anisotropy thermal conductivity nondestructive test device, it is characterised in that: including triple-frequency harmonics method self
Sensor and electrical signal collection and processing module, wherein triple-frequency harmonics method independent sensor includes line style heating detector mould
Group (1) and abrasion-proof insulating protective film (2)；Electrical signal collection and processing module include signal generator (41), microcomputer control and number
According to acquisition system (42), bridge modules circuit (43), lock-in amplifier (44), high precision DC power supply (45), adjustable resistance
(R9), current feed end and voltage lead end；The signal of triple-frequency harmonics method independent sensor passes through electrical signal collection and processing
Module amplifies processing.
2. material three-dimensional anisotropy thermal conductivity nondestructive test device according to claim 1, it is characterised in that: the line
It includes that four line styles heat detector module that type, which heats detector mould group (1), and each line style heating detector module includes line style
Heat detector, the first current feed part, the first detecting voltage lead part, the second detecting voltage lead part and the second current feed
Part, the first current feed part, the first detecting voltage lead part, the second detecting voltage lead part, the second current feed part weld respectively
It connects on four pads of line style heating detector.
3. material three-dimensional anisotropy thermal conductivity nondestructive test device according to claim 1, it is characterised in that: described resistance to
Mill insulating protective film (2) is located at line style heating detector mould group (1) two sides, achievees the effect that non-destructive testing.
4. material three-dimensional anisotropy thermal conductivity nondestructive test device according to claim 2, it is characterised in that: described
One current feed part, the first detecting voltage lead part, the second detecting voltage lead part and the second current feed part material be paint
Copper-clad line, shape are linear faciola, and faciola length is 1~30mm, and width is 5~800 μm；Line style heating detector material be
Chromium/platinum is compound, chrome gold is compound, chromium/nickel is one of compound, composite bed thickness 10nm/200nm；Abrasion-proof insulating protective film
(2) material is polyimides.
5. material three-dimensional anisotropy thermal conductivity nondestructive test device according to claim 1, it is characterised in that: the electricity
Bridge module circuit (43) includes the first high-precision differential amplifier (431), the second high-precision differential amplifier (432), converter
(433), the first Low Drift Temperature resistance (R1), the second Low Drift Temperature resistance (R2), third Low Drift Temperature resistance (R3), the 4th Low Drift Temperature resistance
(R4), the 5th Low Drift Temperature resistance (R5), the 6th Low Drift Temperature resistance (R6), the 7th Low Drift Temperature resistance (R7), the 8th Low Drift Temperature resistance
(R8), the first electrolytic capacitor (C1), the second electrolytic capacitor (C2), third electrolytic capacitor (C3), the 4th electrolytic capacitor
(C4), the 5th electrolytic capacitor (C5), the 6th electrolytic capacitor (C6), the 7th electrolytic capacitor (C7), the 8th electrolytic capacitor
(C8), the 9th electrolytic capacitor (C9), the tenth electrolytic capacitor (C10), the 11st electrolytic capacitor (C11), the 12nd electrolysis
Capacitor (C12)；Current feed end includes the first current feed end (4d), the second current feed end (4a)；Voltage lead end packet
Include first voltage lead end (4c), second voltage lead end (4b).
6. material three-dimensional anisotropy thermal conductivity nondestructive test device according to claim 5, it is characterised in that: described
One high-precision differential amplifier (431) includes eight pins, respectively two the first high-precision differential amplifier RG port A, the
It is one high-precision differential amplifier-IN port A (4312), the first high-precision differential amplifier+IN port A (4313), first high-precision
Degree differential amplifier-Vs port A (4314), the first high-precision differential amplifier REF port A (4315), the first high-precision are differential
Amplifier OUTPUT port A (4316), the first high-precision differential amplifier+Vs port A (4317)；The second differential amplification of high-precision
Device (432) includes eight pins, respectively two the second high-precision differential amplifier RG port B, the second differential amplification of high-precision
Device-IN port B (4322), the second high-precision differential amplifier+IN port B (4323), the second end high-precision differential amplifier-Vs
Mouth B (4324), the second high-precision differential amplifier REF port B (4325), the second high-precision differential amplifier OUTPUT port B
(4326), the second high-precision differential amplifier+Vs port B (4327).
7. material three-dimensional anisotropy thermal conductivity nondestructive test device according to claim 6, it is characterised in that: described
One current feed part is connect with signal generator (41) by the first current feed end (4d), the second current feed part and adjustable electric
Resistance (R9) is connected to the ground by the second current feed end (4a), the first detecting voltage lead part and first voltage lead end (4c) electricity
Connection, the second detecting voltage lead part are electrically connected with second voltage lead end (4b)；First port high-precision differential amplifier-IN
A (4312) and the first high-precision differential amplifier+IN port A (4313) are respectively connected to first voltage lead end (4c) and second
Voltage lead end (4b), the first high-precision differential amplifier-Vs port A (4314), the first port high-precision differential amplifier+Vs
A (4317) is respectively connected to the cathode port of high precision DC power supply (45), positive port, the first high-precision differential amplifier
The port OUTPUT A (4316) exports the first differential wave input terminal A of the first differential wave to lock-in amplifier (44)；Second is high
Precision differential amplifier-IN port B (4322) and the second high-precision differential amplifier+IN port B (4323) is respectively connected to can
Adjust the both ends of resistance (R9), the second high-precision differential amplifier-Vs port B (4324), the second end high-precision differential amplifier+Vs
Mouth B (4327) is respectively connected to the cathode port of high precision DC power supply (45), positive port, the second high-precision differential amplifier
The port OUTPUT B (4326) exports the second differential wave input terminal B of the second differential wave to lock-in amplifier (44), and locking phase is put
The third input terminal of big device (44) is connected to the first output end of signal generator (41)；The input terminal of converter (433) connects
To the second output terminal of signal generator (41), three ends of microcomputer control and data collection system (42) respectively with adjustable resistance
(R9) one end of one end, signal generator (41) is connected with one end of lock-in amplifier (44).
8. material three-dimensional anisotropy thermal conductivity nondestructive test device according to claim 1, it is characterised in that: the height
Line-voltage regulation≤0.5% of precision DC power supply (45), ripple peak value are less than≤10mV.
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| CN109115830A (en) * | 2018-10-18 | 2019-01-01 | 北京科技大学 | A kind of material three-dimensional anisotropy thermal conductivity nondestructive test device and method |
| CN109115830B (en) * | 2018-10-18 | 2024-04-19 | 北京科技大学 | Nondestructive testing device and method for three-dimensional anisotropic thermal conductivity of material |
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