CN115220175A - Optical assembly with high surface precision and sealing method thereof - Google Patents

Optical assembly with high surface precision and sealing method thereof Download PDF

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Publication number
CN115220175A
CN115220175A CN202210857299.7A CN202210857299A CN115220175A CN 115220175 A CN115220175 A CN 115220175A CN 202210857299 A CN202210857299 A CN 202210857299A CN 115220175 A CN115220175 A CN 115220175A
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China
Prior art keywords
lens
optical
solder
optical lens
welding
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Pending
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CN202210857299.7A
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Chinese (zh)
Inventor
郭向朝
刘作娇
李海兵
张海波
时伟
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Priority to CN202210857299.7A priority Critical patent/CN115220175A/en
Publication of CN115220175A publication Critical patent/CN115220175A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • B23K1/206—Cleaning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Eyeglasses (AREA)

Abstract

A high surface shape precision optical component and its sealing method, the said high surface shape precision optical component includes the optical lens with high surface shape precision, according to the geometric dimension and material attribute of the optical lens, the metal mirror bracket with through hole in the middle of the different material of adaptation, the said welding method is to adopt the low-melting point metal solder to weld, form a layer of soft metal solder buffer layer between lens and mirror bracket after welding, relieve the thermal stress caused by temperature unevenness between lens and mirror bracket to a great extent, make the lens after welding still can keep higher surface shape precision, the optical component prepared has the lens surface shape precision high, the mirror bracket and the characteristic that the heat conductivity is good between the optical lens, the welding position has high reliability performance indexes such as good vacuum seal and radiation-resistant at the same time, suitable for the precision optical systems such as the space optical pickup, optical resonator, etc.

Description

Optical assembly with high surface precision and sealing method thereof
Technical Field
The invention relates to a connecting method of an optical component, in particular to an optical component with high surface shape precision and a sealing method thereof.
Background
Currently, the connection methods of the optical lens and the frame with higher surface shape precision are roughly divided into three types: firstly, a more traditional connection mode of fixing by mechanical force, such as a mode of thread pressing, is to adopt a pressing ring with internal threads, screw in a spectacle frame with external threads matched with the pressing ring, and fix the lens in the pressing ring and the lens cone; and secondly, an adhesive mode is adopted, namely, the edge area of the light passing surface of the lens or the circumferential surface of the side surface of the lens is adhered to the area corresponding to the spectacle frame by adopting optical assembly glue, so that the function of fixing the optical lens is achieved. Patent CN 114114607A describes a method for fixing a planar optical reflector by glue pouring, but the method is only applicable to a planar reflector, and has a certain limitation on fixing a transmission optical element or a dichroic mirror; and thirdly, adopting a plane welding mode.
The optical lens fixed by mechanical force is likely to generate certain stress strain under the action of the mechanical force, so that the surface shape of the optical lens changes, and the beam quality is influenced to a certain extent; in addition, mechanical vibration may occur in the use process, so that the thread is loosened when the optical component is in a mechanical vibration environment for a long time, and the long-term reliability of the optical component cannot be guaranteed. Adopt the optical assembly of sticky mode preparation, although flexible optical assembly glue also can effectively reduce the influence of temperature variation to the shape of face when temperature variation, the reliability is also higher, but the ageing resistance is not enough, can produce certain heat in optical assembly working process, the adhesive layer is difficult to be gone out the heat of accumulating in the lens fast effectively, the thermal conductivity is relatively poor, so in long-time use, the heat in the lens is a large amount of accumulations, the reliability to the shape of face and the optical assembly of optical lens provides the challenge, thereby influence the light beam quality. Patent 100364707C and CN 109116504A describe a method for connecting an optical window and a window frame by using a planar sealing method, in which the edge of one light-passing surface of the window is sealed with the window frame by using low-temperature solder, and the stress on the two light-passing surfaces of the window in the prepared sealing device is unbalanced, which will inevitably affect the surface shape accuracy of the two light-passing surfaces of the optical window.
Patent CN 109926748B discloses a vacuum observation window sealed by metal solder and a manufacturing method thereof, the vacuum observation window adopts an outer cover sealing mode to seal a non-metal lens and a metal thin-wall transition piece by medium temperature metal solder, so as to obtain an airtight and high-strength sealing window. The thin-wall structure is adopted to reduce the residual stress of the sealing between the non-metal lens and the metal transition piece, a metal solder layer is filled between the thin-wall structure and the lens to serve as a stress buffer area, and the prepared vacuum observation window is applied to vacuum equipment such as a vacuum brazing furnace, a film plating machine and the like and has extremely high requirements on the air tightness and the strength of a sealing device. However, the sealing temperature is generally above 300 ℃ and the strength of the metal solder is relatively high, which is very unfavorable for the lens with high surface shape precision or the lens with the surface coated with the optical film, so the method is not suitable for the welding of the optical component with the surface shape precision.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide an optical component with high surface shape precision and a sealing method thereof, which have the following technical advantages: firstly, the mirror bracket and the optical lens are directly and effectively connected by adopting low-temperature metal welding flux in a mode of metalizing the circumferential surface of the side surface of the optical lens, a flexible transition layer can be formed between the optical lens and the mirror bracket by the connection mode, a thin-wall transition structure in a patent CN 109926748B is not needed, the residual stress generated by the lens due to the external constraint of the mirror bracket in the process of connecting and fixing the optical lens and the mirror bracket can be effectively reduced, and the welded lens still has high surface shape precision; secondly, under the condition that the geometric dimension of the optical lens is certain, the effective clear aperture of the optical lens can be increased to the maximum extent by a side sealing mode, or under the condition that the required clear aperture is certain, the sizes of the lens and the lens frame are reduced to the maximum extent, so that the purpose of reducing weight is achieved, and the light weight of the whole optical-mechanical system is assisted; secondly, the side face sealing mode is adopted, so that the sealing area between the lens and the spectacle frame can be maximized under the condition that the geometric dimension of the lens is certain, the shearing strength of the sealing part can be improved, and the pressure resistance of the optical component is improved; and the sealing area is increased, which is beneficial to improving the vacuum airtight performance of the optical component.
The technical solution of the invention is as follows:
a high surface precision optical component comprises an optical lens and a frame, and is characterized in that the optical lens is a circular or elliptical optical element with a certain thickness and high surface precision, and the reflection surface precision (or transmission wavefront error precision) PV of a light passing surface S1 or S2 of the optical lens 0 Better than 1/10 lambda @632.8nm RMS 0 Better than 1/20 lambda; the outer circumferential surface or the elliptical circumferential surface S3 of the optical lens is an optical lens welding area;
the middle part of the spectacle frame is provided with a through hole, and the aperture of the through hole is matched with the outer diameter of the optical lens and is used for the optical lens to be embedded; one end of the through hole is a solder drainage chamfer, and the other end of the through hole is provided with a solder diversion groove and a lens limiting step; the large circumferential surface of the through hole is a welding area of the spectacle frame;
the spectacle frame is nested on the outer circumference of the optical lens, so that a certain welding gap is formed between the welding area of the optical lens and the welding area of the spectacle frame and is welded and fixed through low-temperature metal solder.
The optical lens is made of microcrystalline glass, quartz glass, K9 glass, sapphire, calcium fluoride or zinc selenide.
The spectacle frame is made of titanium alloy, low-expansion precision alloy such as 4J32 and 4J36, aluminum alloy, aluminum-based composite material or other metal materials which are matched with the expansion coefficient of the lens.
Preferably, the structure of the spectacle frame comprises a through hole, the middle part of the through hole is matched with the geometric shape and the size of the lens, one end of the through hole is a solder drainage chamfer, the solder is ensured to be fully contacted with the spectacle frame and wet the spectacle frame, and a welding line flows in along the chamfer surface; the other end of the through hole is provided with a solder diversion groove which can be used for storing redundant solder and avoiding stress generated by excessive accumulation of the solder in the welding seam area; the edge of the solder flow guide groove at the other end of the through hole is a lens positioning step which is used as a bearing edge when the lens is welded with the spectacle frame and is used for ensuring the parallelism of the lens and the spectacle frame.
On the other hand, the invention also provides a sealing method of the optical component with high surface shape precision, which is characterized by comprising the following steps:
(1) preparing an optical lens and a frame:
the middle part of the spectacle frame is provided with a through hole, and the aperture of the through hole is matched with the outer diameter of the optical lens and is used for the optical lens to be embedded;
one end of the through hole is provided with a solder drainage chamfer which is used for enabling solder to flow into a welding seam along the chamfer surface, ensuring that the solder is fully contacted with the mirror bracket and wets the mirror bracket;
the other end of the through hole is provided with a solder diversion groove and a lens limiting step, the solder diversion groove is used for storing redundant solder and is used as a welding end when the lens is welded with the spectacle frame, and stress generated by excessive accumulation of the solder is avoided; the step is used for limiting the optical lens and is used as a bearing edge when the optical lens is welded with the spectacle frame, so that the parallelism between the optical lens and the spectacle frame is ensured;
(2) optimizing the optical lens and frame:
shielding and protecting the light passing surface of the optical lens, and carrying out metallization treatment on the outer circumferential surface of the optical lens to form a metallization layer serving as an optical lens welding area;
carrying out surface modification treatment on the circumferential surface of the welding end of the through hole of the mirror bracket, the solder drainage chamfer surface and the solder drainage groove surface;
(3) preparing low-melting-point metal solder, and cleaning before welding;
(4) and embedding the metallized optical lens into the mirror frame with the modified surface, placing a welding flux at the chamfer of the mirror frame, and performing welding treatment to ensure that the welding area of the mirror frame is welded and combined with the metallized film layer at the welding area of the optical lens through the metal welding flux, thereby completing the manufacture of the optical assembly with high surface shape precision.
Preferably, the soldering process is eutectic reflow soldering.
Preferably, the welding process is gas shielded welding, and the shielding gas used may be a reducing gas such as formic acid or hydrogen gas.
Preferably, the surface modification treatment is plating of a Ni/Au film layer on the surface of the lens frame by an electroplating method.
Preferably, the metallization is performed by one or two or more of vacuum evaporation plating, sputtering plating and ion plating, and the film system is generally Ti/Ni/Au.
Preferably, the low melting point metallic solder is indium solder.
Coefficient of thermal expansion α of the optical lens 1 The coefficient of thermal expansion of the metal spectacle frame is alpha 2 According to the different materials of the optical lens (1), the metal spectacle frame with different materials is matched according to the principle that the matching is alpha 1 ＜α 2 On the basis of the principle, a metal material with the expansion coefficient as close as possible to that of the optical lens is selected as the spectacle frame, so that the residual stress of the optical assembly after welding is effectively reduced.
Compared with the prior art, the invention has the beneficial effects that:
1. the optical lens and the spectacle frame are in clearance fit by adopting the welding mode, so that the lens is prevented from being acted by mechanical force;
2. after welding, filling a low-temperature metal solder-indium solder in a gap between the optical lens and the metal mirror frame to form a flexible transition layer, so that the optical lens can freely expand and contract in different temperature fields without being constrained, the problem of residual stress caused by the difference of thermal expansion coefficients of the lens and the mirror frame in the welding process and the using process can be effectively relieved, and the surface shape of the lens is prevented from being greatly changed; finally, the melting point of the indium solder is only 157 ℃, the required welding temperature is low, the surface shape of the lens cannot be affected due to high temperature, and the low welding temperature is friendly to the optical film plated on the surface of the optical lens.
3. The optical assembly prepared by sealing the indium solder has good air tightness and excellent ageing resistance of a welding area, and has higher welding strength compared with an adhesive optical assembly.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of a high surface precision optical assembly and a metal frame according to the present invention.
FIG. 2 is a schematic diagram of the high profile precision optical assembly of the present invention, wherein (a) is a high profile precision optical lens; (b) Is a metal mirror bracket with a circular or oval through hole in the middle.
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the scope of the present invention should not be limited thereto.
Referring to fig. 1 and fig. 2 respectively, fig. 1 is a schematic structural diagram of an embodiment of a high surface precision optical device and a metal frame according to the present invention, and fig. 2 is a schematic structural diagram of the high surface precision optical device according to the present invention. It can be seen from the figure that the structure of the high surface shape precision optical assembly comprises a lens 1 and a lens frame 2, the circumferential surface of S3 of the lens 1, namely a welding area a, is metalized, the surface of a welding area b, a solder drainage chamfer surface and a solder diversion groove surface of the lens frame 2 is modified, low-temperature metal solder is adopted to seal the welding area a of the lens 1 and the welding area b of the lens frame 2, the lens frame 2 and the lens 1 are in clearance fit, namely the inner diameter of a through hole of the lens frame 2 is larger than the outer diameter of the lens 1, the solder is liquefied in the process of reflow soldering and then filled in the clearance between the lens frame 2 and the lens 1 along the solder drainage chamfer of the lens frame 2, a soft metal solder layer is formed in an annular clearance between the lens frame 2 and the lens 1, so that residual stress generated by mutual restriction after the lens 1 and the lens are heated, expanded and deformed in the soldering process can be relieved, the deformation amount of the lens 1 after soldering can be maintained at an extremely small value, namely, and the lens 1 still has high surface shape precision after being assembled and soldered.
The method comprises the following specific operation steps:
firstly, processing a lens and a lens frame according to a design drawing, wherein the surface of the lens can be plated with a certain optical film or not plated with the optical film;
cleaning the lens and the spectacle frame before plating respectively;
the clear surface of the lens is shielded by polyimide adhesive tape or a special tool fixture, only the circumferential surface S3, namely a welding area a (see the attached figure 2 of the specification and the welding area a), is exposed, and then the lens is put into a magnetron sputtering coating machine for magnetron sputtering coating metallization. The metallized film layer plated by magnetron sputtering has 3 layers, firstly, an active material Ti which can be tightly combined with the surface of the lens is used as a priming layer and is used as a tie for connecting the non-metallic lens and a metal film layer plated subsequently, and the thickness is about 30-50 nm; then as a barrier layer for the interaction of the solder with the film, in this embodiment Ni or Cr, with a thickness of about 500nm, and finally plated with an Au layer which is well wettable with the low temperature metallic solder indium and has a thickness of about 1 μm. The total thickness of the metallized film layer plated by magnetron sputtering is 1-2 μm;
cleaning and electroplating the spectacle frame, wherein the film system is Ni/Au, and the total thickness of the film layer is not less than 2 mu m;
cleaning the indium solder before welding, generally adopting an acid cleaning mode, and preparing the solder into a circular ring shape matched with the circumference size of the spectacle frame;
the method comprises the steps of nesting a mirror bracket on the outer side of the circumferential surface of a lens S3, covering the lens with an aluminum sheet with the size matched with the outer diameter of the lens to be used as a protective device of the lens, then placing an indium solder ring at a chamfer angle of the mirror bracket, finally placing an assembled article to be welded into a reflow furnace, and performing reflow welding under the protection of reducing atmosphere.
Examples
The ZYGO interferometer is adopted to test the original surface shape of the sapphire lens, and the RMS values of the 0-degree reflection surface shapes of the A surface and the B surface are 0.078 lambda and 0.010 lambda respectively (lambda =632.8 nm); then shielding the light passing surfaces S1 and S2 of the sapphire lens, putting the sapphire lens into a magnetron sputtering film plating machine to carry out magnetron sputtering metallization on the circumferential surface of S3, namely a welding area a, firstly plating a Ti layer for 0.5h, then plating a Ni layer for 1h, and finally plating an Au layer for 2h; then, a ZYGO interferometer is adopted to test the reflection surface shape of the metallized sapphire lens, and the RMS values of the reflection surface shapes of 0 degrees of the A surface and the B surface are 0.075 lambda and 0.011 lambda (lambda =632.8 nm) respectively;
cleaning a TC4 spectacle frame, and then carrying out surface modification treatment on a welding area b, a solder drainage chamfer surface and a solder drainage groove surface of the spectacle frame, namely removing an oxide layer on the surface of the TC4 spectacle frame, and plating a Ni/Au layer on the surface of the spectacle frame in an electroplating mode, wherein the total thickness of a film layer is not less than 3 mu m; then cleaning indium solder by using dilute hydrochloric acid, calculating the volume of a welding line according to the sizes of the spectacle frame and the lenses, taking a proper amount of solder according to the volume of the welding line, preparing the solder into a circular solder ring, assembling the metalized sapphire lenses in the metalized modified TC4 titanium alloy spectacle frame, placing the solder ring at a chamfer angle of the spectacle frame, and finally placing the assembled sample to be welded in a reflow soldering furnace for welding under the protection of formic acid gas.
And after welding, connecting the welding area a of the sapphire lens with the welding area b of the TC4 frame through indium solder, and manufacturing the sapphire-TC 4 titanium alloy optical assembly. The optical component formed by sealing the sapphire lens and the TC4 lens frame by the indium solder is tested again by adopting a ZYGO interferometer, and the RMS values of the 0-degree reflection surface shapes of the A surface and the B surface of the optical component are respectively 0.070 lambda and 0.012 lambda, namely the RMS values of the 0-degree reflection surface shapes of the A surface and the B surface of the sapphire lens caused by the whole process of the optical component prepared by adopting the welding method of the invention are respectively 0.008 lambda and 0.002 lambda and are far less than 1/50 lambda. That is to say, the optical component sealed by the indium solder has extremely small surface shape variation of the optical lens, and can keep high surface precision which is extremely close to the original surface shape before welding.
According to the optical component with high surface shape precision and the sealing method thereof, the surface shape precision of the prepared optical component has extremely small variation compared with the original surface shape, and the optical component can still keep extremely high surface shape precision after the change of welding temperature and the change of a welded structure, so that the optical component prepared by the sealing method of the optical component with high surface shape precision can be applied to precision optical systems such as an optical remote sensor, an optical resonant cavity and the like.

Claims (11)

1. A high surface shape precision optical component comprises an optical lens (1) and a spectacle frame (2), which is characterized in that,
the optical lens (1) is a circular or elliptical optical element with a certain thickness and high surface shape precision, and the light passing surface S1 or S2 of the optical lens reflectsSurface shape precision PV 0 Better than 1/10 lambda @632.8nm RMS 0 Better than 1/20 lambda; the outer circumferential surface or elliptical circumferential surface S3 of the optical lens (1) is an optical lens welding area (a);
the middle part of the spectacle frame (2) is provided with a through hole, and the aperture of the through hole is matched with the outer diameter of the optical lens (1) for the optical lens to be embedded; one end of the through hole is provided with a solder drainage chamfer, the other end of the through hole comprises a solder diversion groove and a lens limiting step, and the large circumferential surface of the through hole is a welding area (b) of the spectacle frame;
the spectacle frame (2) is nested on the outer circumference of the optical lens (1), so that a certain welding gap is formed between the welding area (a) of the optical lens and the welding area (b) of the spectacle frame, and the spectacle frame is welded and fixed through low-temperature metal solder.
2. The optical assembly with high surface shape precision as claimed in claim 1, wherein the material of the optical lens (1) is microcrystalline glass, quartz glass, K9 glass, sapphire, calcium fluoride or zinc selenide.
3. The optical assembly of claim 1, wherein the frame (2) is made of titanium alloy, low expansion precision alloy such as 4J32, 4J36, aluminum alloy and aluminum matrix composite material or other metal material with expansion coefficient matched with that of the lens (1).
4. A high surface profile precision optical assembly as claimed in claim 1, wherein the structure of the frame (2) comprises a through hole with a middle part adapted to the geometry and size of the lens, and one end of the through hole is provided with a solder drainage chamfer to ensure that the solder is fully contacted with the frame and wets the frame, and flows into the welding seam along the chamfer; the other end of the through hole is provided with a solder diversion groove which can be used for storing redundant solder and avoiding stress generated by excessive accumulation of the solder in the welding seam area; the edge of the solder flow guide groove at the other end of the through hole is a lens positioning step which is used as a bearing edge when the lens is welded with the spectacle frame and is used for ensuring the parallelism of the lens and the spectacle frame.
5. A sealing method of a high surface shape precision optical component is characterized by comprising the following steps:
(1) preparation of optical lenses and frames:
the middle part of the spectacle frame is provided with a through hole, and the aperture of the through hole is matched with the outer diameter of the optical lens and is used for the optical lens to be embedded;
one end of the through hole is provided with a solder drainage chamfer angle for enabling solder to flow into a welding seam along the chamfer angle surface, so that the solder is ensured to be fully contacted with the mirror bracket and wet the mirror bracket;
the other end of the through hole is provided with a lens limiting step and a solder diversion groove: the step is used for limiting the optical lens and is used as a bearing edge when the lens is welded with the spectacle frame, so that the parallelism between the lens and the spectacle frame is ensured; the solder diversion groove is used for storing redundant solder to avoid stress caused by excessive accumulation of the solder;
(2) optimizing the optical lens and frame:
shielding and protecting the light passing surface of the optical lens, and carrying out metallization treatment on the outer circumferential surface of the optical lens to form a metallization layer serving as an optical lens welding area;
carrying out surface modification treatment on the circumferential surface of the through hole of the mirror bracket, the solder drainage chamfer surface and the solder diversion groove surface;
(3) preparing low-melting-point metal solder, and cleaning before welding;
(4) and embedding the metallized optical lens into the mirror frame with the modified surface, placing a welding flux at the chamfer of the mirror frame, and performing welding treatment to ensure that the welding area (b) of the mirror frame is welded and combined with the metallized film layer in the welding area (a) of the optical lens through the metal welding flux, thereby completing the manufacture of the optical assembly with high surface shape precision.
6. A method of sealing a highly surface-shaped precision optical module as recited in claim 5, wherein the soldering process is eutectic reflow soldering.
7. A method of sealing an optical assembly with a high surface accuracy as claimed in claim 5 or 6, wherein the soldering process is gas-shielded soldering, and the shielding gas used can be a reducing gas such as formic acid or hydrogen.
8. A method of sealing a high surface precision optical module as claimed in claim 5, wherein the surface modification treatment is plating of Ni/Au film on the surface of the frame by electroplating.
9. A method of sealing a high surface accuracy optical package as claimed in claim 5, wherein the metallization is performed by one or a combination of vacuum evaporation, sputtering, and ion plating, and the film is Ti/Ni/Au.
10. A method of sealing a highly surface-shaped accurate optical package as recited in claim 5, wherein said low melting point metal solder is indium solder.
11. A method of sealing a high surface profile precision optical package as claimed in claim 5, wherein the optical lens has a thermal expansion coefficient α 1 The frame has a coefficient of thermal expansion of alpha 2 And α is 1 ≤α 2 。
CN202210857299.7A 2022-07-20 2022-07-20 Optical assembly with high surface precision and sealing method thereof Pending CN115220175A (en)

Priority Applications (1)

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CN202210857299.7A CN115220175A (en) 2022-07-20 2022-07-20 Optical assembly with high surface precision and sealing method thereof

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991101A (en) * 1997-12-12 1999-11-23 Carl-Zeiss-Stiftung UV-resistant jointing technique for lenses and mounts
US20080237814A1 (en) * 2007-03-26 2008-10-02 National Semiconductor Corporation Isolated solder pads
JP2011175008A (en) * 2010-02-23 2011-09-08 Kyocera Corp Optical device component and optical device
CN203051132U (en) * 2012-12-28 2013-07-10 大金工业株式会社 Compressor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5991101A (en) * 1997-12-12 1999-11-23 Carl-Zeiss-Stiftung UV-resistant jointing technique for lenses and mounts
US20080237814A1 (en) * 2007-03-26 2008-10-02 National Semiconductor Corporation Isolated solder pads
JP2011175008A (en) * 2010-02-23 2011-09-08 Kyocera Corp Optical device component and optical device
CN203051132U (en) * 2012-12-28 2013-07-10 大金工业株式会社 Compressor

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