CN115219797A - Electrode device and method for measuring dielectric parameters of polymer insulation film under low vacuum - Google Patents
Electrode device and method for measuring dielectric parameters of polymer insulation film under low vacuum Download PDFInfo
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- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2617—Measuring dielectric properties, e.g. constants
- G01R27/2635—Sample holders, electrodes or excitation arrangements, e.g. sensors or measuring cells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2688—Measuring quality factor or dielectric loss, e.g. loss angle, or power factor
- G01R27/2694—Measuring dielectric loss, e.g. loss angle, loss factor or power factor
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Abstract
The invention relates to an electrode device and a method for measuring dielectric parameters of a polymer insulation film under low vacuum, wherein the device comprises a vacuum chamber structure, a vacuum pump, a metal lower electrode, an upper electrode structure and a supporting metal sleeve which are positioned in the vacuum chamber structure, and the output end of the vacuum pump is connected to the inside of the vacuum chamber structure through a pipeline; the vacuum chamber structure comprises a vacuum chamber glass outer cover, an insulating base and a sealing perforated metal upper cover plate, wherein the sealing perforated metal upper cover plate is provided with a through hole for the support metal sleeve to extend out, and the joint of the sealing perforated metal upper cover plate and the support metal sleeve is provided with an O ring and a fastening hand-screwed screw. Compared with the prior art, the invention breaks through the measurement limitation of the existing contact electrode measurement technology on the polymer film sample below 100 microns; the accuracy of the dielectric coefficient and dielectric loss measurement data of the polymer insulation film is improved by a low-vacuum electrode pressing method with flatness processing of the upper and lower electrodes and a certain degree of freedom.
Description
Technical Field
The invention relates to the technical field of polymer film measurement, in particular to an electrode device and a method for measuring dielectric parameters of a polymer insulating film under low vacuum.
Background
With the development of the electrical and electronic industry to high voltage and integration, the dielectric performance of the insulating polymer material is more and more required, and further, the dielectric performance testing technology of the insulating polymer material is more and more strictly required from various aspects such as testing precision, testing simplicity, testing safety and the like.
The dielectric coefficient measuring method of the polymer film includes a non-contact method and a contact method in the IEC-60250 standard. The contact method is also classified into a vapor deposition metal electrode method and a non-deposition metal electrode method. The measurement of the metal electrode method is more correct, but the thickness of a sample can be relatively reduced due to the penetration and the migration of metal ions in the evaporation process, the sample can even penetrate through a thin film, and the metal electrode plating is a high-cost matter and is not suitable for industrial measurement; the requirement of the experimental condition of the direct contact method is minimum, but the problems of air gap capacitance, contact resistance and the like exist between the sample and the measuring electrode (1) due to the influence of the roughness of the surface of the sample, the error is large,
the non-contact electrode measuring method is that the sample is put between the electrode devices without pasting or coating any conductive material on the surface of the sample, a gap is left between the sample and the electrodes, and the bridge balance is adjusted by changing the electrode distance (the capacitance value of the bridge is not changed) or the capacitance value of the electrode (the electrode distance is not changed) to measure the distance, and the method comprises the following steps: the contact measurement method of the oil-pasted aluminum foil electrode device, the contact measurement method of the evaporation metal electrode device and the air substitution method do not contact the electrode measurement, and errors are caused to the experimental results due to the limitation of the experimental conditions of the oil-pasted aluminum foil electrode device, the evaporation metal electrode device and the air substitution method. The operation is complicated, and the requirements on experimental conditions are severer.
When the thickness of the sample is less than 100 microns, especially less than 30 microns, the contact method and non-contact method adopted at present can reach an error of 10% -50%, which is unacceptable in engineering. At present, the thickness of the polypropylene film for the power capacitor with a film structure is less than 5 microns, so the measurement problem of the film dielectric constant is naturally a concern in the technical field of electrical standardization of various countries.
In conclusion, no electrode device for measuring the dielectric coefficient and the dielectric loss of the polymer insulation film under the low vacuum condition with both the experimental accuracy and the operation simplicity is suitable for the actual experimental scene.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide an electrode device and a method for measuring dielectric parameters of a polymer insulation film under low vacuum, which have both experimental accuracy and operation simplicity.
The purpose of the invention can be realized by the following technical scheme:
an electrode device for measuring dielectric parameters of a polymer insulation film under low vacuum comprises a vacuum chamber structure, a vacuum pump, a metal lower electrode, an upper electrode structure and a supporting metal sleeve, wherein the metal lower electrode, the upper electrode structure and the supporting metal sleeve are positioned in the vacuum chamber structure;
one end of the supporting metal sleeve is movably connected with the vacuum chamber structure in a penetrating way, the other end of the supporting metal sleeve is connected with the upper electrode structure, and the upper electrode structure is opposite to the metal lower electrode;
the vacuum chamber structure comprises a vacuum chamber glass outer cover, an insulating base and a sealing perforated metal upper cover plate, wherein the insulating base and the sealing perforated metal upper cover plate are respectively positioned at two ends of the vacuum chamber glass outer cover to form a sealing chamber; the sealing metal upper cover plate with the holes is provided with through holes for supporting the metal sleeve to extend out, the joint of the sealing metal upper cover plate with the holes and the supporting metal sleeve is provided with an O ring and a hand-screwed fastening screw, the O ring is used for improving the air tightness of the joint of the sealing metal upper cover plate with the holes and the supporting metal sleeve, and the hand-screwed fastening screw is used for fixing and supporting the metal sleeve.
Further, the upper electrode structure comprises a measuring electrode, a metal protection electrode and a supporting component thereof, wherein the metal protection electrode is positioned on the outer side of the measuring electrode.
Furthermore, the insulation base comprises an organic glass insulation board and a sealing rubber pad, the metal lower electrode, the sealing rubber pad and the organic glass insulation board are fixed in sequence, and the organic glass insulation board is grounded.
Furthermore, the device also comprises bridge test equipment, the metal lower electrode is connected into a high-voltage end of the bridge test equipment through a wiring harness, and the coaxial cable in the support metal sleeve connects the upper electrode structure into a signal end of the bridge test equipment through the wiring harness.
Further, the output voltage of the high-voltage end of the bridge test device is within the range of 100v-150 v.
Further, the device is located inside the clean bench.
Further, during the working process of the device, the air blowing device of the clean bench is kept on.
Furthermore, silicone grease is arranged at the joint of the upper metal cover plate with the hole for sealing and the supporting metal sleeve pipe with the O ring.
The invention also provides a measuring method of the electrode device for measuring the dielectric parameter of the polymer insulation film under the low vacuum, which comprises the following steps:
s1: confirming the cleanliness of the environment of the device, and placing a polymer film sample on the lower metal electrode; screwing a hand screw for fastening, and manually lifting the metal support sleeve to the highest position and fixing;
s2: coating silicone grease on the bottom of the vacuum chamber glass outer cover, attaching the silicone grease to the insulating base, and starting a vacuum pump to vacuumize;
s3: when the vacuum degree of the vacuum pump is pumped to meet the requirement of a preset vacuum degree, a hand-screw for fastening is screwed, so that the support metal sleeve drives the upper electrode structure to naturally descend under the internal and external air pressure difference of the vacuum chamber until the upper electrode structure is contacted with and stably covered on the polymer film sample;
s4: and the metal lower electrode and the supporting metal sleeve are respectively connected through external bridge test equipment, so that dielectric coefficient and dielectric loss factor data are obtained.
Further, the degree of vacuum is required to be 100Pa or less in the internal degree of vacuum of the vacuum chamber structure.
Compared with the prior art, the invention has the following advantages:
(1) The invention firstly realizes the measurement of the dielectric coefficient and the dielectric loss of the polymer insulation film under the low vacuum condition, and the design is as follows: the vacuum chamber is a vacuum chamber structure formed by a sealed metal upper cover plate with holes, an organic glass insulating plate, an O ring and a sealing rubber pad, and is pumped by a small vacuum pump to reach the internal pressure of 100Pa standard, and the vacuum pump acts on a supporting metal sleeve to generate 120-200N pressure. The air gap between the sample and the electrode is reduced, and the electrode is more tightly attached to the film sample.
(2) The invention skillfully designs an electrode-supporting device which can carry out experimental operation under a certain vacuum degree: the flatness measuring electrode and the metal protective electrode form a complete measuring electrode part, dynamic fixing and supporting are carried out through the supporting metal sleeve, and descending and lifting are completed through the supporting metal sleeve. The supporting metal sleeve is clamped by a hand screw through a sealing perforated metal upper cover plate. The certain degree of freedom of the downward-pressing metal electrode and the vacuum sealing in the vacuum chamber ensure that the measuring electrode with high flatness keeps good fit when being pressed on a film sample, namely, the electrode and the sample are flat and tightly fit without air gaps.
(3) Compared with the existing polymer film sample insulation performance testing device, the invention has the advantages of fewer integral parts, lighter weight, simple and easy disassembly and assembly, and simple and convenient operation, and can independently complete all equipment assembly and experimental processes by a single person. Except for an ultra-clean workbench, a vacuum pump and external test equipment which can be matched on site, the main body electrode, the support framework thereof and the vacuum chamber component can be detached and carried, and certain portability is realized.
(4) The device is designed for adapting the contact method to measure the dielectric coefficient and the dielectric loss of the polymer film, has no requirements of a non-contact method on the distance and the bridge measurement precision, and greatly enhances the simplicity of operation because a sample does not need to be plated with a metal electrode during measurement.
Drawings
FIG. 1 is a schematic diagram of a circuit for measuring dielectric constant and dielectric loss by a bridge according to an embodiment of the present invention;
FIG. 2 is a schematic view of an electrode pair of the present invention;
FIG. 3 is a schematic diagram of an upper electrode structure according to the present invention;
FIG. 4 is a schematic diagram of an upper electrode freedom elevation structure according to the present invention;
FIG. 5 is an experimental schematic diagram of the device of the present invention connected to a bridge testing device;
in the figure, 1, a measuring electrode, 2, a metal lower electrode, 3, a vacuum chamber glass outer cover, 4, a film sample, 5, a supporting metal sleeve, 6, a hand screw for fastening, 7, an ultra-clean action table, 8, a small vacuum pump, 9, bridge testing equipment, 10, a metal protective electrode, 11, a metal upper cover plate with a hole for sealing, 12, an organic glass insulating plate, 13, an O ring, 14, a sealing rubber pad, 15, a coaxial cable, 16, a measuring electrode positioning ring, 17, an insulating ceramic ring, 18, a spring measuring pin, 19, a bolt fixing structure, 20, a protective electrode cover plate, 21, a socket, 22 and a plug.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships that the present product is conventionally placed in use, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Example 1
As shown in fig. 5, the present embodiment provides an electrode device for measuring dielectric parameters of a polymer insulating film under low vacuum, which is used for accurately measuring insulating performance parameters including dielectric coefficient and value loss factor of a polymer film sample with a thickness of less than 100 μm, and the device includes a vacuum chamber structure, a vacuum pump 8, and a metal lower electrode 2, an upper electrode structure and a supporting metal sleeve 5 which are located inside the vacuum chamber structure, wherein an output end of the vacuum pump 8 is connected to the inside of the vacuum chamber structure through a pipeline;
one end of the supporting metal sleeve 5 is movably connected with the vacuum chamber structure in a penetrating way, the other end of the supporting metal sleeve is connected with the upper electrode structure, and the upper electrode structure is opposite to the metal lower electrode 2;
the vacuum chamber structure comprises a vacuum chamber glass outer cover 3, an insulating base and a sealing perforated metal upper cover plate 11, wherein the insulating base and the sealing perforated metal upper cover plate 11 are respectively positioned at two ends of the vacuum chamber glass outer cover 3 to form a sealed chamber; the upper metal cover plate 11 with the holes for sealing is provided with through holes for supporting the metal sleeve 5 to extend out, the joint of the upper metal cover plate 11 with the holes for sealing and the supporting metal sleeve 5 is provided with an O ring 13 and a hand-screwed fastening screw 6, the O ring 13 is used for improving the air tightness of the joint of the upper metal cover plate 11 with the holes for sealing and the supporting metal sleeve 5, and the hand-screwed fastening screw 6 is used for fixing and supporting the metal sleeve 5.
Preferably, the insulating base comprises an organic glass insulating plate 12 and a sealing rubber pad 14, the metal lower electrode 2, the sealing rubber pad 14 and the organic glass insulating plate 12 are fixed in sequence, and the organic glass insulating plate 12 is grounded; the additional sealing rubber pad 14 can improve the sealing performance of the vacuum chamber structure.
Equivalently, the upper electrode structure is fixed and supported by the supporting metal sleeve 5, and the descending and ascending actions are completed by the supporting metal sleeve 5, and the coaxial cable 15 is arranged in the supporting metal sleeve 5 and connected with the measuring electrode 1.
The supporting metal sleeve 5 is clamped by a hand screw 6 through a perforated metal upper cover plate 11 for sealing, and the contact part of the perforated metal upper cover plate 11 and the supporting metal sleeve 5 is ensured to be airtight through an O ring 13 and a coating silicone grease mode. Meanwhile, the diameter of the supporting metal sleeve is slightly smaller than that of the circular through hole of the upper cover plate of the metal with the hole, the supporting metal sleeve and the upper cover plate of the metal with the hole are in close contact through an O ring 13, and meanwhile, the upper electrode is lowered with a certain degree of freedom under the action of vacuum, and the structural schematic diagram is shown in attached figure 4 in detail.
The structure is arranged in a glass outer cover 3 of the vacuum chamber, and a metal upper cover plate 11 with a hole for sealing, an organic glass insulating plate 12, an O ring 13 and a sealing rubber pad 14 form the vacuum chamber structure together. Wherein, the top of the vacuum chamber glass outer cover 3 is closely assembled with the sealed perforated metal upper cover plate 11 through a bolt structure, the bottom of the vacuum chamber glass outer cover 3 is coated with silicone grease and is provided with a sealing rubber pad 14, and the vacuum chamber glass outer cover is closely contacted and separated with an organic glass insulating plate according to the requirement of experimental steps.
The electrode device for measuring the dielectric coefficient and the dielectric loss of the polymer insulation film under the low vacuum condition realizes the sealing performance, the organic glass insulation plate is externally connected with the small vacuum pump, and the small vacuum pump is started to carry out the vacuum pumping operation in the glass outer cover of the vacuum chamber. Specifically, the vacuum pump was used to evacuate the air from the glass envelope of the chamber, and the gauge was observed, and the experiment was started when the degree of vacuum reached 100Pa or less.
After the required vacuum degree of 100Pa is reached, the supporting metal sleeve 5 with the upper electrode device cannot act due to the clamping effect of the hand-screwed fastening screw 6. After confirming that the state of the electrode and the sample in the vacuum chamber is stable, the hand-operated screw 6 for fastening is manually unscrewed, when the force action of the internal and external air pressure difference is greater than the friction force of the fastening screw, the automatic descending of the metal supporting sleeve 5 in the vacuum chamber can be realized outside the glass outer cover 3 of the vacuum chamber, and the lifting of the metal supporting sleeve 5 can be realized by 2.5-3 cm. Meanwhile, the freedom structure enables the upper electrode to be automatically finely adjusted in the descending process, so that the upper electrode is in contact with the polymer film sample smoothly and tightly. The small vacuum pump 8 can achieve a vacuum degree of up to 100Pa, and can generate a pressure of approximately 120N-200N when acting on a supporting metal sleeve with a diameter of 2-2.5 cm.
According to the certain degree of freedom when the upper electrode is pressed downwards and the vacuum sealing in the vacuum chamber, the measuring electrode with high flatness keeps good fit when being pressed on a film sample, namely, the electrode and the sample are flat and tightly fit without air gaps.
As a preferred embodiment, the upper electrode structure comprises a measuring electrode 1, a metal guard electrode 10 and a supporting component thereof, and the metal guard electrode 10 is located at the outer side of the measuring electrode 1, as shown in fig. 2.
By adopting the three-electrode device, the measuring electrode with high flatness and the metal protective electrode are assembled to form a complete upper electrode structure, and a gap of 0.5mm is formed between the measuring electrode and the protective electrode and is far greater than the thickness of a film sample. The specific structure of the upper electrode structure can be seen in fig. 3, which includes: the device comprises a metal protection electrode, a measuring electrode positioning ring 16, an insulating ceramic ring 17, a spring measuring pin 18, a bolt fixing structure 19, a protection electrode cover plate 20, a socket 21, a plug 22 and the like. The metal lower electrode with high flatness is directly fixed on the organic glass insulating plate through six screws to form a high-voltage end of the device.
It should be noted that, in the measurement of the polymer film sample, due to its own thickness and the roughness of the film surface, irregular air gaps are generated on the sample-electrode contact surface or the sample is unevenly pressed, thereby affecting the accuracy of the measurement data, so that a metal electrode with a high surface flatness and low roughness is required to improve the measurement accuracy. The measuring electrode with high flatness and the metal with high flatness are subjected to electrode self-processing, and the surface precision is required: high flatness, <0.5 micron; low roughness, <0.012 microns.
In the testing process of the polymer film sample, the flatness and roughness testing standard is introduced into the film sample and the test for the first time, and the flatness characterizes the overall fluctuation trend of the testing surface of a testing object; the roughness characterizes the local concave-convex characteristics of the test surface. The introduction of the two standards has breakthrough significance for the processing of the measuring electrode and the correction of the parameters of the sample film.
The invention carries out high-process-level processing on the surfaces of the upper electrode and the lower electrode for the test experiment, and requires the surface precision: high flatness, <0.5 micron; low roughness, <0.012 microns, provides important assurance for the measurement accuracy of polymer film samples.
In the using process, the device further comprises a bridge test device, the metal lower electrode 2 is connected into a high-voltage end of the bridge test device through a wiring harness, and the coaxial cable 15 supporting the inside of the metal sleeve 5 connects the upper electrode structure into a signal end of the bridge test device through the wiring harness.
The output voltage of the high-voltage end of the bridge test device is within the range of 100v-150 v.
The device is located inside the clean bench 7.
The clean grade of the clean bench is as follows: the maximum allowable number of dust per square meter is 3500.
The bridge test equipment provides an alternating voltage source, and can simultaneously measure two parameters of dielectric coefficient and dielectric loss.
The maximum vacuum degree of the small vacuum pump can reach 100Pa.
And the coaxial cable in the supporting metal sleeve part connects the metal upper electrode to a signal testing end of external bridge testing equipment, and transmits a signal at the measuring electrode with high flatness to the bridge testing equipment. The coaxial cable has certain hardness, and can restore deformation force when being bent, and the metal pipe is supported to avoid the influence of the force on the free fall of the electrode.
The experimental device part is completely arranged in the superclean bench, and when the experiment is carried out, the air blowing device in the superclean bench is ensured to be started, and air is continuously blown to avoid dust and dirt from entering the experimental process; when the experiment is suspended, the clean bench should be closed to prevent dust and dirt from entering the test equipment.
The metal discharge electrode with high flatness is fixed on the organic glass insulating plate, a coaxial cable is connected to the power end (high-voltage end) of an external electric bridge testing device, and the power end (high-voltage end) of the electric bridge testing device is required to be arranged within the range of 100v-150v, so that the electric field strength of a thin film sample is not more than 10kV/mm. The dielectric coefficient and the value loss factor of the polymer film sample can be measured by using the bridge test equipment, and other dielectric properties of the polymer film sample can be tested when the bridge test equipment is externally connected with other types of test equipment.
When a measurement experiment is carried out, the superclean bench blowing device is turned on, the superclean bench blowing device is connected to the small vacuum pump 8 through the organic glass insulating plate 12 by a rubber guide pipe, and the superclean bench blowing device is connected to the power supply end and the signal end of the bridge testing device through the organic glass insulating plate 12, the supporting metal sleeve 5 and the coaxial cable 15, as shown in fig. 4.
The specific experimental operation is as follows:
the electrode device for measuring the dielectric coefficient and the dielectric loss of the polymer insulation film under the low vacuum condition provided by the invention is used for testing OPP film samples with different thicknesses:
1. after accomplishing the basis cleaning work to experimental apparatus especially electrode, use the non-woven fabrics to dip in alcohol and clean the film sample, the sample includes: the samples of 21 μm OPP film, 31 μm OPP film and 45 μm OPP film were placed on the surface of the lower electrode, and it was confirmed that no dust such as dust and fiber was carried on the surface during the operation and that no breakage or crease was generated in the samples.
2. The assembled vacuum chamber glass outer cover 3, the metal upper cover plate 11 for sealing and the supporting metal sleeve 5 with the electrode part are hermetically matched with the organic glass insulating plate 12 through the vacuum chamber glass outer cover 3 and the sealing rubber gasket 14.
3. And loosening the hand-screwed screw 6 for fastening to confirm that the supporting metal sleeve 5 can normally slide up and down and is pulled to the topmost part, so as to ensure that the measuring electrode 1 is suspended. And (4) tightening the hand-tightening screw 6 to finish the sealing operation.
4. After confirming that the coaxial cable is connected without errors, the vacuum pump is started to carry out vacuum pumping operation, and when the vacuum degree reaches 100Pa required, the hand-screw 6 for fastening is manually unscrewed, so that the supporting metal tube 5 and the upper electrode device are naturally descended by the pressure difference between the inside and the outside of the vacuum chamber, and the measuring electrode 1 is enabled to flatly compress the film sample 4.
5. And (3) turning on a power supply of the bridge test equipment 9, applying 100v of alternating voltage, collecting signals by a signal end, carrying out data measurement by a bridge matching knob of the bridge test equipment, and finally recording a result.
6. After the group of film samples are tested, the power supply of the bridge testing equipment 9 is closed, the valve of the vacuum chamber is opened to return the system to normal pressure, and the operations 1 and 2 are repeated to put in a new experiment to continue the next group of experiments.
As shown in Table 1, the results of the dielectric coefficient epsilon and the dielectric loss angle of the OPP thin films with different thicknesses are shown in Table 1, which are graphs of the insulation performance test results of the OPP thin film samples with the same thickness under low vacuum degree by using the method.
TABLE 1 results of OPP film insulation performance test of different thickness in vacuum using the present invention
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions that can be obtained by a person skilled in the art through logical analysis, reasoning or limited experiments based on the prior art according to the concepts of the present invention should be within the scope of protection determined by the claims.
Claims (10)
1. An electrode device for measuring dielectric parameters of a polymer insulation film under low vacuum is characterized by comprising a vacuum chamber structure, a vacuum pump (8), a metal lower electrode (2), an upper electrode structure and a supporting metal sleeve (5), wherein the metal lower electrode, the upper electrode structure and the supporting metal sleeve are positioned in the vacuum chamber structure, and the output end of the vacuum pump (8) is connected to the inside of the vacuum chamber structure through a pipeline;
one end of the supporting metal sleeve (5) is movably connected with the vacuum chamber structure in a penetrating way, the other end of the supporting metal sleeve is connected with the upper electrode structure, and the upper electrode structure is opposite to the metal lower electrode (2);
the vacuum chamber structure comprises a vacuum chamber glass outer cover (3), an insulating base and a perforated metal upper cover plate (11) for sealing, wherein the insulating base and the perforated metal upper cover plate (11) for sealing are respectively positioned at two ends of the vacuum chamber glass outer cover (3) to form a sealed chamber; the sealing device is characterized in that a through hole for supporting the metal sleeve (5) to extend out is formed in the sealing perforated metal upper cover plate (11), an O ring (13) and a fastening hand-screwed screw (6) are arranged at the joint of the sealing perforated metal upper cover plate (11) and the supporting metal sleeve (5), the O ring (13) is used for improving the air tightness of the joint of the sealing perforated metal upper cover plate (11) and the supporting metal sleeve (5), and the fastening hand-screwed screw (6) is used for fixing the supporting metal sleeve (5).
2. The electrode device for measuring the dielectric parameter of the polymer insulation film under the low vacuum condition as claimed in claim 1, wherein the upper electrode structure comprises a measuring electrode (1), a metal guard electrode (10) and a supporting component thereof, and the metal guard electrode (10) is positioned at the outer side of the measuring electrode (1).
3. The electrode device for measuring the dielectric parameter of the polymer insulation film under the low vacuum condition as claimed in claim 1, wherein the insulation base comprises a plexiglass insulation plate (12) and a sealing rubber gasket (14), the metal bottom electrode (2), the sealing rubber gasket (14) and the plexiglass insulation plate (12) are fixed in sequence, and the plexiglass insulation plate (12) is grounded.
4. An electrode assembly for measuring dielectric parameters of polymer insulation film under low vacuum as claimed in claim 1, further comprising a bridge test device, wherein said metal bottom electrode (2) is connected to the high voltage end of the bridge test device through a wire harness, and said coaxial cable (15) inside said supporting metal sleeve (5) is connected to the signal end of the bridge test device through a wire harness.
5. The electrode device for measuring the dielectric parameters of the polymer insulation film under the low vacuum condition as claimed in claim 4, wherein the output voltage of the high-voltage end of the bridge test equipment is within the range of 100v-150 v.
6. The electrode device for measuring dielectric parameters of polymer insulation films under low vacuum as claimed in claim 1, characterized in that the device is located inside the clean bench (7).
7. The electrode device for measuring the dielectric parameter of the polymer insulation film under the low vacuum condition as claimed in claim 6, wherein the air blowing device of the clean bench (7) is kept on during the operation of the device.
8. The electrode assembly for measuring dielectric parameters of polymer insulation film under low vacuum as claimed in claim 1, wherein the joint of said metal upper cover plate (11) with holes for sealing and supporting metal sleeve (5) with O-ring (13) is further provided with silicone grease.
9. A method for measuring an electrode device for measuring dielectric parameters of a polymer insulating film under a low vacuum according to any one of claims 1 to 8, comprising the steps of:
s1: confirming the cleanliness of the environment of the device, and placing a polymer film sample (4) on the metal lower electrode (2); a hand-screwed screw (6) for fastening is screwed, and the metal supporting sleeve is lifted manually to the highest position and fixed;
s2: coating silicone grease on the bottom of the vacuum chamber glass outer cover (3), attaching the silicone grease to the insulating base, and starting a vacuum pump (8) to vacuumize;
s3: after the vacuum pump (8) vacuumizes and meets the preset vacuum degree requirement, a hand-screw (6) for fastening is screwed, so that the supporting metal sleeve (5) is driven by the pressure difference between the inside and the outside of the vacuum chamber to naturally descend the upper electrode structure until the upper electrode structure is contacted with and stably covers the polymer film sample (4);
s4: the metal lower electrode (2) and the supporting metal sleeve (5) are respectively connected through an external bridge test device (9), and then dielectric coefficient and dielectric loss factor data are obtained.
10. The method of claim 9, wherein the vacuum degree is required to be 100Pa or less of an internal vacuum degree of the vacuum chamber structure.
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