CN115217893B8 - 精密设备主动气磁隔振与主动阻尼转运装置 - Google Patents
精密设备主动气磁隔振与主动阻尼转运装置 Download PDFInfo
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- CN115217893B8 CN115217893B8 CN202210835009.9A CN202210835009A CN115217893B8 CN 115217893 B8 CN115217893 B8 CN 115217893B8 CN 202210835009 A CN202210835009 A CN 202210835009A CN 115217893 B8 CN115217893 B8 CN 115217893B8
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- vibration isolation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/022—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60P—VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
- B60P7/00—Securing or covering of load on vehicles
- B60P7/06—Securing of load
- B60P7/16—Protecting against shocks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/063—Negative stiffness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/066—Variable stiffness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/0047—Measuring, indicating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/06—Fluid filling or discharging
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Transportation (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Vibration Prevention Devices (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202210835009.9A CN115217893B8 (zh) | 2022-07-15 | 2022-07-15 | 精密设备主动气磁隔振与主动阻尼转运装置 |
Applications Claiming Priority (1)
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CN202210835009.9A CN115217893B8 (zh) | 2022-07-15 | 2022-07-15 | 精密设备主动气磁隔振与主动阻尼转运装置 |
Publications (3)
Publication Number | Publication Date |
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CN115217893A CN115217893A (zh) | 2022-10-21 |
CN115217893B CN115217893B (zh) | 2023-09-08 |
CN115217893B8 true CN115217893B8 (zh) | 2023-10-10 |
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CN202210835009.9A Active CN115217893B8 (zh) | 2022-07-15 | 2022-07-15 | 精密设备主动气磁隔振与主动阻尼转运装置 |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN115217889B (zh) * | 2022-07-15 | 2023-11-24 | 哈尔滨工业大学 | 大型精密设备气磁隔振与主被动阻尼转运装置 |
Citations (14)
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---|---|---|---|---|
JPS61165043A (ja) * | 1985-01-17 | 1986-07-25 | Ee S Hashimoto:Kk | 磁力防振装置 |
DE10326625A1 (de) * | 2003-06-13 | 2005-01-05 | Contitech Vibration Control Gmbh | Aktuatorbestückter Feder-Dämpfungsmechanismus |
JP2006162026A (ja) * | 2004-12-10 | 2006-06-22 | Oiles Ind Co Ltd | 動吸振器及びこれを用いた動吸振装置 |
CN101067433A (zh) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | 基于差动电磁作动器的空气弹簧超低频隔振方法与装置 |
CN101067432A (zh) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | 带有磁悬浮单元的空气弹簧隔振基础 |
CN101701616A (zh) * | 2009-11-20 | 2010-05-05 | 中国科学院上海光学精密机械研究所 | 主动隔振平台 |
JP2011016475A (ja) * | 2009-07-10 | 2011-01-27 | Kyb Co Ltd | サスペンション装置 |
CN103048892A (zh) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | 基于高度/水平姿态六维位置检测与控制的隔振平台 |
CN106321708A (zh) * | 2016-10-20 | 2017-01-11 | 华中科技大学 | 一种两自由度隔振与精密定位的复合主动隔振器 |
CN110446978A (zh) * | 2017-03-16 | 2019-11-12 | Asml荷兰有限公司 | 承载装置、磁性重力补偿器、振动隔离系统、光刻设备、控制具有负刚度的重力补偿器的方法、以及弹簧 |
CN111022567A (zh) * | 2019-12-23 | 2020-04-17 | 哈尔滨恒信精密气浮科技有限公司 | 一种高精度自水平空气弹簧隔振台 |
CN111336210A (zh) * | 2018-12-19 | 2020-06-26 | 中国石油大学(华东) | 一种基于负刚度和可变阻尼的混合振动控制装置、方法及应用 |
CN112963499A (zh) * | 2021-02-22 | 2021-06-15 | 江苏大学 | 一种基于磁引力构件正负刚度并联的隔振器及其控制方法 |
CN215096867U (zh) * | 2021-04-27 | 2021-12-10 | 索尔(天津)智能科技有限公司 | 一种智能四向车车轮的提升机构 |
-
2022
- 2022-07-15 CN CN202210835009.9A patent/CN115217893B8/zh active Active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61165043A (ja) * | 1985-01-17 | 1986-07-25 | Ee S Hashimoto:Kk | 磁力防振装置 |
DE10326625A1 (de) * | 2003-06-13 | 2005-01-05 | Contitech Vibration Control Gmbh | Aktuatorbestückter Feder-Dämpfungsmechanismus |
JP2006162026A (ja) * | 2004-12-10 | 2006-06-22 | Oiles Ind Co Ltd | 動吸振器及びこれを用いた動吸振装置 |
CN101067433A (zh) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | 基于差动电磁作动器的空气弹簧超低频隔振方法与装置 |
CN101067432A (zh) * | 2006-09-26 | 2007-11-07 | 哈尔滨工业大学 | 带有磁悬浮单元的空气弹簧隔振基础 |
JP2011016475A (ja) * | 2009-07-10 | 2011-01-27 | Kyb Co Ltd | サスペンション装置 |
CN101701616A (zh) * | 2009-11-20 | 2010-05-05 | 中国科学院上海光学精密机械研究所 | 主动隔振平台 |
CN103048892A (zh) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | 基于高度/水平姿态六维位置检测与控制的隔振平台 |
CN106321708A (zh) * | 2016-10-20 | 2017-01-11 | 华中科技大学 | 一种两自由度隔振与精密定位的复合主动隔振器 |
CN110446978A (zh) * | 2017-03-16 | 2019-11-12 | Asml荷兰有限公司 | 承载装置、磁性重力补偿器、振动隔离系统、光刻设备、控制具有负刚度的重力补偿器的方法、以及弹簧 |
CN111336210A (zh) * | 2018-12-19 | 2020-06-26 | 中国石油大学(华东) | 一种基于负刚度和可变阻尼的混合振动控制装置、方法及应用 |
CN111022567A (zh) * | 2019-12-23 | 2020-04-17 | 哈尔滨恒信精密气浮科技有限公司 | 一种高精度自水平空气弹簧隔振台 |
CN112963499A (zh) * | 2021-02-22 | 2021-06-15 | 江苏大学 | 一种基于磁引力构件正负刚度并联的隔振器及其控制方法 |
CN215096867U (zh) * | 2021-04-27 | 2021-12-10 | 索尔(天津)智能科技有限公司 | 一种智能四向车车轮的提升机构 |
Non-Patent Citations (1)
Title |
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光学仪器隔微振系统的负刚度特性分析与验证;闻荣伟等;《光电子.激光》;第第24卷卷(第第12期期);2355-2359页 * |
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CN115217893A (zh) | 2022-10-21 |
CN115217893B (zh) | 2023-09-08 |
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Inventor after: Cheng Zhongyi Inventor after: Cui Junning Inventor after: Wang Zhisheng Inventor after: Jin Mingrui Inventor after: Tang Ran Inventor after: Tan Jiubin Inventor before: Cheng Zhongyi Inventor before: Cui Junning Inventor before: Wang Zhisheng Inventor before: Jin Mingrui Inventor before: Tang Ran Inventor before: Tan Jiubin |
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CI03 | Correction of invention patent | ||
CI03 | Correction of invention patent |
Correction item: Inventor Correct: Cheng Zhongyi|Cui Junning|Wang Zhisheng|Jin Mingrui|Tang Ran|Tan Jiubin False: Cheng Zhongyi|Cui Junning|Wang Zhisheng|Jin Mingrui|Tang Ran|Tan Jiubin Number: 36-02 Page: The title page Volume: 39 Correction item: Inventor Correct: Cheng Zhongyi|Cui Junning|Wang Zhisheng|Jin Mingrui|Tang Ran|Tan Jiubin False: Cheng Zhongyi|Cui Junning|Wang Zhisheng|Jin Mingrui|Tang Ran|Tan Jiubin Number: 36-02 Volume: 39 |
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