CN115193727A - Double-shaft motion platform - Google Patents

Double-shaft motion platform Download PDF

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Publication number
CN115193727A
CN115193727A CN202210839334.2A CN202210839334A CN115193727A CN 115193727 A CN115193727 A CN 115193727A CN 202210839334 A CN202210839334 A CN 202210839334A CN 115193727 A CN115193727 A CN 115193727A
Authority
CN
China
Prior art keywords
axis
moving unit
axis moving
double
shaft motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202210839334.2A
Other languages
Chinese (zh)
Inventor
郭冰
管仕兴
曹葵康
温延培
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tztek Technology Co Ltd
Original Assignee
Tztek Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tztek Technology Co Ltd filed Critical Tztek Technology Co Ltd
Priority to CN202210839334.2A priority Critical patent/CN115193727A/en
Publication of CN115193727A publication Critical patent/CN115193727A/en
Withdrawn legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02Measures preceding sorting, e.g. arranging articles in a stream orientating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/361Processing or control devices therefor, e.g. escort memory
    • B07C5/362Separating or distributor mechanisms

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention provides a double-shaft motion platform, which belongs to the field of transfer platforms and comprises a carrying platform, an X-axis moving unit and a Y-axis moving unit; the bottom of the X-axis moving unit is arranged on the moving part of the Y-axis moving unit; the bottom of the carrying platform is arranged on the X-axis moving unit moving part; the X-axis is integrated on the Y-axis of the double-shaft motion table, so that the product is transferred on the plane of a local environment, X-direction fine adjustment is realized on a Y-axis main transfer line for precision detection products such as IC carrier plates, the space is saved, the efficiency is improved, and the double-shaft motion table is convenient to popularize and apply in the fields of manufacturing, conveying and detecting products such as IC carrier plates and PCB plates.

Description

Double-shaft motion platform
Technical Field
The invention belongs to the field of transfer platforms, and particularly relates to a double-shaft motion platform which can be used for planar transfer of IC (integrated circuit) carrier plates, semiconductor carrier plates, PCB (printed circuit board) and the like.
Background
In modern industry, products are often conveyed before and after manufacturing, transporting or detecting, and the traditional product conveying adopts a single shaft or an additional shaft to realize plane and space movement and cannot adapt to plane double-axial movement in local small environments.
Disclosure of Invention
In order to overcome the disadvantages of the prior art, it is an object of the present invention to provide a biaxial movement table which can solve the above problems.
A biaxial motion table comprises a carrying platform, an X-axis moving unit and a Y-axis moving unit; the bottom of the X-axis moving unit is arranged on the moving part of the Y-axis moving unit, and the stroke of the X-axis moving unit is less than or equal to the width of the Y-axis moving unit; the bottom of the stage is provided on the X-axis moving unit moving portion.
Furthermore, the X-axis moving unit and the Y-axis moving unit are driven by linear motors; an X-axis organ assembly and an X-axis drag chain assembly are arranged on the X-axis moving unit; and a Y-axis organ assembly and a Y-axis drag chain assembly are arranged at the Y-axis moving unit.
Compared with the prior art, the invention has the beneficial effects that: the X-axis motion table integrates the X-axis motion table on the Y-axis, realizes the planar transfer of products in local environments, realizes X-direction fine adjustment on a Y-axis main transfer line for precision detection products such as IC carrier plates and the like, saves space, improves efficiency, and is convenient to popularize and apply in the fields of manufacturing, conveying and detecting products such as IC carrier plates, PCB plates and the like.
Drawings
FIG. 1 is a schematic diagram of a two-axis motion stage;
FIG. 2 is a schematic diagram of the movement of a two-axis motion stage;
fig. 3 and 4 are schematic diagrams of an online double-sided detection system.
In the figure, the position of the upper end of the main shaft,
10. carrying platform;
20. an X-axis moving unit;
30. a Y-axis moving unit;
40. an X-axis organ assembly;
50. a Y-axis organ assembly;
60. an X-axis tow chain assembly;
70. a Y-axis tow chain assembly;
80. a stopper buffer;
100. feeding a bin;
200. a front scanning platform;
300. a feeding and transferring arm;
400. a front dust sticking mechanism;
500. a front side detection module;
600. turning over the carrying arm;
700. a turning module;
800. a reverse side scanning platform;
900. a reverse side dust sticking mechanism;
1000. a reverse side detection module;
1100. a blanking transfer arm;
1200. NG a stock bin;
1300. an OK blanking module;
1400. a system gantry.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Double-shaft motion platform
A biaxial motion table, see FIG. 1, comprises a stage 10, an X-axis moving unit 20, a Y-axis moving unit 30, an X-axis organ assembly 40, a Y-axis organ assembly 50, an X-axis drag chain assembly 60 and a Y-axis drag chain assembly 70.
The bottom of the X-axis moving unit 20 is arranged on the moving part of the Y-axis moving unit 30, and the stroke of the X-axis moving unit 20 is less than or equal to the width of the Y-axis moving unit 30; the bottom of the stage 10 is provided on the moving part of the X-axis moving unit 20. Referring to fig. 2, the two-axis movement of the X-axis moving unit 20 and the Y-axis moving unit 30 realizes the planar movement of the product carried on the stage 10.
The X-axis moving unit 20 and the Y-axis moving unit 30 are driven by linear motors, and each of the X-axis moving unit and the Y-axis moving unit includes a stator and a mover.
An X-axis organ assembly 40 and an X-axis drag chain assembly 60 are arranged on the X-axis moving unit 20; a Y-axis organ assembly 50 and a Y-axis drag chain assembly 70 are provided at the Y-axis moving unit 30. So as to facilitate dust prevention and cable drag and protection.
In one example, the stage 10 is a vacuum suction stage. The vacuum adsorption carrier is provided with a vacuum generator or an external vacuum source, a vacuum tube and a valve group, and the adsorption force with controllable negative pressure value is provided for the vacuum adsorption carrier.
Further, stopper bumpers 80 are provided at the ends of the stroke of each of the X-axis moving unit 20 and the Y-axis moving unit 30.
Further, a grating scale assembly is disposed on each of the X-axis moving unit 20 and the Y-axis moving unit 30 for monitoring the position of the stage 10.
Further, an air cooling unit is provided at the moving part of the X-axis moving unit 20 and the Y-axis moving unit 30. If the porous air-cooling piece is connected through the external air source, the air-cooling piece can move synchronously along with the moving part, because the moving part is a heating concentration area, namely a thermal stress area.
Online double-sided detection system
An on-line double-side detection system, referring to fig. 3 and 4, includes an upper bin 100, a front scanning platform 200, an upper loading and transferring arm 300, a front detection module 500, a reverse transferring arm 600, a reverse module 700, a back scanning platform 800, a back detection module 1000, a discharging and transferring arm 1100, an NG bin 1200, an OK discharging module 1300, and a controller including an image processing unit, which are installed on a system rack 1400.
The front scanning platform 200 and the back scanning platform 800 both use the aforementioned two-axis motion stage.
The front side dust-sticking mechanism 400 is usually disposed on the front side scanning platform 200, and the back side dust-sticking mechanism 900 is disposed on the back side scanning platform 800, so as to remove dust from a product before detection, such as an IC carrier, and improve or ensure imaging accuracy.
The system principle is as follows: the front detection module 500 and the back detection module 1000 perform optical image acquisition on the front and the back of the product to be detected, the image processing unit of the controller processes the acquired optical images in real time to obtain detection results of the corresponding product, and the controller transfers the detected product to the NG storage bin 1200 or the OK blanking module 1300 for blanking through the blanking transfer arm 1100 according to the detection results.
Arrangement relation: the front scanning platform 200 and the back scanning platform 800 are arranged in parallel at intervals; the upper bin 100 and the NG bin 1200 are arranged at the front ends of the corresponding front scanning platform 200 and the back scanning platform 800; the loading transfer arm 300 and the unloading transfer arm 1100 are movably arranged on the same portal frame vertical to the scanning platform; the loading transfer arm 300 is used for picking and transferring the to-be-detected piece in the loading bin 100 to the front scanning platform 200; the blanking transfer arm 1100 is used for placing detected products into the NG storage bin 1200 or the OK blanking module 1300 in a classified manner according to real-time detection results; the front detection module 500 and the back detection module 1000 are correspondingly arranged at downstream detection positions of the front scanning platform 200 and the back scanning platform 800 and are used for carrying out optical image acquisition on the front or the back of a product to be detected; the turning and transferring arm 600 and the turning module 700 are disposed between the ends of the front scanning platform 200 and the back scanning platform 800, and are configured to turn and transfer the product, which has been detected on the front scanning platform 200, onto the back scanning platform 800.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (6)

1. A biaxial motion table is characterized in that: comprises a carrier (10), an X-axis moving unit (20) and a Y-axis moving unit (30);
the bottom of the X-axis moving unit (20) is arranged on the moving part of the Y-axis moving unit (30), and the stroke of the X-axis moving unit (20) is less than or equal to the width of the Y-axis moving unit (30); the bottom of the stage (10) is provided on the moving part of the X-axis moving unit (20).
2. The dual-axis motion stage of claim 1, wherein:
the X-axis moving unit (20) and the Y-axis moving unit (30) are driven by linear motors; arranging an X-axis organ assembly (40) and an X-axis drag chain assembly (60) on the X-axis moving unit (20); a Y-axis organ assembly (50) and a Y-axis drag chain assembly (70) are provided at the Y-axis moving unit (30).
3. The dual-axis motion stage of claim 1, wherein:
the carrying platform (10) adopts a vacuum adsorption carrying platform.
4. The dual-axis motion stage of claim 1, wherein: stop buffers are arranged at the stroke ends of the X-axis moving unit (20) and the Y-axis moving unit (30).
5. The dual-axis motion stage of claim 1, wherein: and grating ruler components are arranged on the X-axis moving unit (20) and the Y-axis moving unit (30) and are used for monitoring the position of the carrier (10).
6. The dual-axis motion stage of claim 1, wherein:
an air cooling unit is arranged at the moving part of the X-axis moving unit (20) and the Y-axis moving unit (30).
CN202210839334.2A 2022-07-18 2022-07-18 Double-shaft motion platform Withdrawn CN115193727A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210839334.2A CN115193727A (en) 2022-07-18 2022-07-18 Double-shaft motion platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210839334.2A CN115193727A (en) 2022-07-18 2022-07-18 Double-shaft motion platform

Publications (1)

Publication Number Publication Date
CN115193727A true CN115193727A (en) 2022-10-18

Family

ID=83582266

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210839334.2A Withdrawn CN115193727A (en) 2022-07-18 2022-07-18 Double-shaft motion platform

Country Status (1)

Country Link
CN (1) CN115193727A (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105197583A (en) * 2015-10-30 2015-12-30 江苏比微曼智能科技有限公司 PCB (printed circuit board) unloader
CN207426948U (en) * 2017-08-23 2018-05-29 深圳市马太智能科技有限公司 Linear motor
CN207757050U (en) * 2017-12-20 2018-08-24 苏州首镭激光科技有限公司 Intelligent positioning laser tin soldering machine
CN111146918A (en) * 2019-12-31 2020-05-12 深圳市杰普特光电股份有限公司 Double-shaft linear motor module platform
CN213521627U (en) * 2020-12-02 2021-06-22 阿尔伯特(苏州)科技有限责任公司 Dustproof linear motor and double-shaft motion platform
CN113400098A (en) * 2021-06-18 2021-09-17 江苏集萃精凯高端装备技术有限公司 Double-shaft air-floating platform and air static pressure multi-shaft machine tool
CN113740260A (en) * 2021-08-31 2021-12-03 苏州天准科技股份有限公司 Optical detection device, imaging method and intelligent double-sided detection system
CN114577721A (en) * 2022-03-03 2022-06-03 苏州天准科技股份有限公司 Product detection device and method based on machine vision

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105197583A (en) * 2015-10-30 2015-12-30 江苏比微曼智能科技有限公司 PCB (printed circuit board) unloader
CN207426948U (en) * 2017-08-23 2018-05-29 深圳市马太智能科技有限公司 Linear motor
CN207757050U (en) * 2017-12-20 2018-08-24 苏州首镭激光科技有限公司 Intelligent positioning laser tin soldering machine
CN111146918A (en) * 2019-12-31 2020-05-12 深圳市杰普特光电股份有限公司 Double-shaft linear motor module platform
CN213521627U (en) * 2020-12-02 2021-06-22 阿尔伯特(苏州)科技有限责任公司 Dustproof linear motor and double-shaft motion platform
CN113400098A (en) * 2021-06-18 2021-09-17 江苏集萃精凯高端装备技术有限公司 Double-shaft air-floating platform and air static pressure multi-shaft machine tool
CN113740260A (en) * 2021-08-31 2021-12-03 苏州天准科技股份有限公司 Optical detection device, imaging method and intelligent double-sided detection system
CN114577721A (en) * 2022-03-03 2022-06-03 苏州天准科技股份有限公司 Product detection device and method based on machine vision

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Application publication date: 20221018