CN115161612A

CN115161612A - Film coating objective table

Info

Publication number: CN115161612A
Application number: CN202210691129.6A
Authority: CN
Inventors: 张心凤; 夏正卫; 刘洋
Original assignee: Anhui Chunyuan Plated Film Science & Technology Co ltd
Current assignee: Anhui Chunyuan Plated Film Science & Technology Co ltd
Priority date: 2022-06-18
Filing date: 2022-06-18
Publication date: 2022-10-11
Anticipated expiration: 2042-06-18
Also published as: CN115161612B

Abstract

The invention relates to a coating objective table, which comprises a rotating shaft which is rotatably installed, wherein the end part of the rotating shaft, which extends into a coating cavity, is provided with an objective table for supporting a workpiece to be coated, and the objective table is provided with a heating assembly for heating the workpiece to be coated. The scheme provided by the invention can directly heat the coated workpiece and can realize accurate control of the temperature of the coated workpiece.

Description

Film coating objective table

Technical Field

The invention relates to the field of vacuum coating equipment, in particular to a coating objective table.

Background

The magnetron sputtering equipment can be used as vacuum coating equipment for preparing high-performance metal coatings, non-metal layers and other appearance decorative film layers, the prepared film layers have the advantages of good uniformity, good compactness, corrosion resistance and the like, and can be widely applied to a plurality of fields of military industry and civil use, and specific industries comprise aerospace, semiconductor industry, textile industry, transportation industry, manufacturing industry and the like. The magnetron sputtering equipment bombards the surface of a target material through argon ions, and the target material is sputtered out and attached to the surface of a coated workpiece; meanwhile, negative bias is applied to the workpiece to increase the energy of ions, so that the ions are better attached to the surface of the workpiece, and the bonding force of the film layer is increased. In the process of coating, the control of temperature is also crucial to the performance of the film. In the traditional sputtering coating equipment, biasing, heating, rotating and lifting of an objective table are realized through a plurality of modules respectively. The heating only heats the internal space environment of the cavity, the heating time is too long, and the real temperature of the coated workpiece cannot be accurately controlled, so that the whole coating process is caused, the real temperature of the workpiece cannot be accurately controlled, the performance of the whole film is affected, and the product is seriously scrapped.

Disclosure of Invention

It is an object of the present invention to provide a vacuum coating stage which can be used to solve the above-mentioned technical problems.

The technical scheme adopted by the invention is as follows:

a film coating objective table is characterized in that: including the pivot of rotation installation, the tip setting that the pivot extends to in the coating cavity is used for the bracketing to treat the objective table of coating film work piece, is provided with the heating element who is used for heating to treat the coating film work piece on the objective table.

The further scheme is as follows: the rotating shaft is assembled in a lifting mode along the length direction of the rotating shaft, and the rotating shaft is connected with a lifting adjusting assembly for adjusting the rotating shaft to lift.

The rotating shaft is connected with the biasing assembly.

The end part of the rotating shaft extending out of the coating cavity is connected with the lifting adjusting assembly and/or the biasing assembly.

The heating assembly comprises a heating plate arranged on the lower side of the objective table, an inner conducting ring and an outer conducting ring are arranged on the lower surface of the heating plate, the lower end of the inner conducting ring extends to the lower end lower side of the outer conducting ring, the inner conducting ring, the outer conducting ring and the rotating shaft are arranged concentrically, and the inner conducting ring and the outer conducting ring are respectively electrically connected with the positive end and the negative end of the heating power supply.

Still include A, B and connect the electric piece, A, B connects the electric piece and passes through A, B insulating part fixed mounting on the coating film cavity, A connects the electric piece and is located B and connects the upside that connects the electric piece, the objective table is rotatory, the in-process A connects the electric piece and connects through A brush subassembly electricity between the outer wall of outer conducting ring to be connected, the objective table is rotatory, the in-process B connects the electric piece and connects through B brush subassembly electricity between the outer wall of inner conducting ring to be connected, A, B connect the electric piece respectively with heating power supply just, negative terminal electricity is connected.

The objective table includes the tray that sets up on objective table body and the objective table body, sets up the ring channel that is used for installing the heating plate on the lower surface of objective table, and the heating plate is ceramic heating plate.

The coating film cavity includes the bottom plate, the downside of bottom plate is provided with the lift seat, the lift seat over-and-under type is installed on the bottom plate, be provided with the through-hole on the bottom plate, the pivot is passed through bearing assembly and insulating part and is rotated and install on the lift seat, the upper end of pivot is passed in the through-hole and is extended to in the coating film cavity, the axle body of pivot and the pore wall of through-hole are the disjunctor form, the cover is equipped with the sealed tube that can stretch out and draw back on the pivot axle body between lift seat and the bottom plate, the both ends of sealed tube respectively with the bottom plate, lift seat fixed connection, the pivot extends to the tip of lift seat downside and is connected with bias voltage subassembly and/or rotation regulating part.

The bias voltage assembly comprises a C-connection part, the C-connection part is fixedly installed on the lifting seat through a C insulation part, the C-connection part is electrically connected with the outer surface of the rotating shaft through a C brush assembly, and the C-connection part is connected with a bias voltage power supply.

The lower extreme tip of pivot is provided with the drive wheel, and the drive wheel is connected with the driving motor who sets up on the lift seat through the drive belt, and the lift adjustment subassembly includes each lift adjustment cylinder, lift adjustment cylinder's the solid fixed assembly of jar body portion and lift seat, lift adjustment cylinder's piston rod and bottom plate fixed connection, and the sealed tube is the bellows.

The scheme provided by the invention can directly heat the coated workpiece and can realize accurate control of the temperature of the coated workpiece.

Drawings

Fig. 1 is a schematic cross-sectional structure of the present invention.

Fig. 2 is a schematic view of an assembly structure of the stage and the heating assembly.

Fig. 3 is a schematic structural view of the rotating shaft.

Fig. 4 is a schematic structural view of the elevation adjustment assembly.

The reference numerals and component correspondences are as follows.

00-workpiece, 10-rotating shaft, 11-driving wheel, 12-insulating part, 13-C conductive part, 14-sealing pipe, 20-lifting seat, 21-lifting adjusting cylinder, 30-bottom plate, 41-object stage body, 42-tray, 50-heating plate, 51-outer conductive ring, 52-inner conductive ring, 53-A conductive part, 54-B conductive part, 55-A insulating part and 56-B insulating part.

Detailed Description

In order that the objects and advantages of the invention will be more clearly understood, the following description is given in conjunction with the accompanying examples. It is to be understood that the following text is merely illustrative of one or more specific embodiments of the invention and does not strictly limit the scope of the invention as specifically claimed. As used herein, the terms "parallel" and "perpendicular" are not limited to their strict geometric definitions, but include tolerances for machining or human error, reasonable and inconsistent.

As shown in fig. 1 to 4, a coating stage includes a rotating shaft 10 rotatably mounted, an objective table for supporting a workpiece 00 to be coated is disposed at an end of the rotating shaft 10 extending into a coating chamber, and a heating assembly for heating the workpiece 00 to be coated is disposed on the objective table. The rotating shaft 10 is assembled in a lifting manner along the length direction of the rotating shaft, and the rotating shaft 10 is connected with a lifting adjusting component for adjusting the rotating shaft to lift. The shaft 10 is connected to a biasing assembly. According to the scheme provided by the invention, the coated workpiece 00 can be directly heated, and the accurate control of the temperature of the coated workpiece 00 can be realized. And bias voltage, heating, rotation, the integrated integral type structure of going up and down with the objective table, the structure is compacter, and the function is also more diversified.

In detail, as shown in fig. 2, the heating assembly includes a heating plate 50 disposed on the lower side of the stage, an inner conductive ring 52 and an outer conductive ring 51 are disposed on the lower surface of the heating plate 50, the lower end of the inner conductive ring 52 extends to the lower side of the lower end of the outer conductive ring 51, the inner and outer

conductive rings

52, 51 are concentrically disposed with the rotating shaft 10, and the inner and outer

conductive rings

52, 51 are electrically connected to the positive and negative terminals of the heating power supply, respectively. The

electric connection parts

53 and 54 are fixedly arranged on the film coating chamber through insulation parts 55 and 56A and B, the electric connection part 53A is positioned at the upper side of the electric connection part 54B, the electric connection part 53A is electrically connected with the outer wall surface of the outer conducting ring 51 through an electric brush component A in the rotation and lifting process of the object stage, the electric connection part 54B is electrically connected with the outer wall surface of the inner conducting ring 52 through an electric brush component B in the rotation and lifting process of the object stage, and the electric connection parts 53 and 54A are respectively electrically connected with the positive end and the negative end of a heating power supply. The inner conducting ring 52 and the outer conducting ring 51 can be copper conducting rings specifically, the A brush assembly and the B brush assembly can be carbon brush conducting assemblies specifically, and the inner diameter of the B electric connection part 54 is smaller than that of the A electric connection part 53, so that the electric conduction requirements during rotation and lifting are met, and the reliability of power supply is guaranteed. A. The distance between the B-type

electric parts

53 and 54 is selected according to the range of the lifting height of the rotating shaft 10. A. The B and C electric connection parts can be formed by copper rings, and the heating power supply is a 220V power supply.

The objective table comprises an objective table body 41 and a tray 42 arranged on the objective table body 41, and during specific operation, the objective table body 41 and the tray 42 are made of red copper materials, and the objective table body 41 and the tray 42 are in direct surface contact, so that electric conduction is realized. An annular groove for mounting the heating plate 50 is formed in the lower surface of the stage, and the heating plate 50 is a ceramic heating plate 50. The shaft 10 may be embodied as a magnetic fluid rotating shaft 10. The end of the rotating shaft 10 extending out of the coating cavity is connected with a lifting adjusting assembly and/or a biasing assembly. The coating film cavity includes bottom plate 30, the downside of bottom plate 30 is provided with lift seat 20, lift seat 20 over-and-under type is installed on bottom plate 30, be provided with the through-hole on the bottom plate 30, pivot 10 passes through bearing assembly and insulating part 12 and rotates and install on lift seat 20, the upper end of pivot 10 is passed the through-hole and is extended to in the coating film cavity, the axle body of pivot 10 and the pore wall of through-hole are the disjuncture form, the cover is equipped with on the pivot 10 axle body between lift seat 20 and the bottom plate 30 and can be carried out flexible sealed tube 14, the both ends of sealed tube 14 respectively with bottom plate 30, lift seat 20 is fixed (sealed) and is connected, the tip that pivot 10 extends to lift seat 20 downside is connected with bias voltage subassembly and/or rotation regulating part. The lower extreme tip of pivot 10 is provided with drive wheel 11, and drive wheel 11 is connected with the driving motor who sets up on the seat 20 that goes up and down through the drive belt, and the lift adjustment subassembly includes each lift adjustment cylinder 21, and the solid fixed mounting of the jar body portion and the seat 20 that goes up and down of lift adjustment cylinder 21, lift adjustment cylinder 21's piston rod and bottom plate 30 fixed connection, and sealed tube 14 is the bellows. The bias assembly comprises a C-connection piece 13, the C-connection piece 13 is fixedly arranged on the lifting seat 20 through a C-insulation piece 12, the C-connection piece 13 is electrically connected with the outer surface of the rotating shaft 10 through a C-brush assembly, and the C-connection piece 13 is connected with a bias power supply. As shown in fig. 3 and 4. Each lifting adjusting cylinder 21 synchronously adjusts the lifting base 20 to lift.

The scheme provided by the invention can realize multiple functions of biasing, heating, rotating, lifting and the like of the coated workpiece 00, meet different requirements of vacuum coating and ensure the quality of the vacuum coating.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and amendments can be made without departing from the principle of the present invention, and these modifications and amendments should also be considered as the protection scope of the present invention. Structures, mechanisms, and methods of operation not specifically described or illustrated herein are not specifically illustrated or described, but are instead contemplated to be practiced in accordance with conventional techniques of the art, unless otherwise specified and limited.

Claims

1. A film coating objective table is characterized in that: including the pivot of rotation installation, the tip setting that the pivot extends to in the coating cavity is used for the bracketing to treat the objective table of coating film work piece, is provided with the heating element who is used for heating to treat the coating film work piece on the objective table.

2. The coating stage of claim 1, wherein: the rotating shaft is assembled in a lifting mode along the length direction of the rotating shaft, and the rotating shaft is connected with a lifting adjusting assembly for adjusting the rotating shaft to lift.

3. The plating stage according to claim 1 or 2, characterized in that: the shaft is connected to the biasing assembly.

4. The plating stage according to claim 3, wherein: the end part of the rotating shaft extending out of the coating cavity is connected with the lifting adjusting assembly and/or the biasing assembly.

5. The coating stage of claim 1, wherein: the heating assembly comprises a heating plate arranged on the lower side of the objective table, an inner conducting ring and an outer conducting ring are arranged on the lower surface of the heating plate, the lower end of the inner conducting ring extends to the lower end lower side of the outer conducting ring, the inner conducting ring, the outer conducting ring and the rotating shaft are arranged concentrically, and the inner conducting ring and the outer conducting ring are respectively electrically connected with the positive end and the negative end of the heating power supply.

6. The plating stage of claim 2, wherein: the electric connection part A and the electric connection part B are fixedly arranged on the film coating cavity through the insulation parts A and B, the electric connection part A is positioned on the upper side of the electric connection part B, the electric connection part A is electrically connected with the outer wall surface of the outer conducting ring through the brush component A, the electric connection part B is electrically connected with the outer wall surface of the inner conducting ring through the brush component B, and the electric connection parts A and B are respectively electrically connected with the positive end and the negative end of a heating power supply.

7. The plating stage according to claim 2, wherein: the objective table includes the tray that sets up on objective table body and the objective table body, sets up the ring channel that is used for installing the heating plate on the lower surface of objective table, and the heating plate is ceramic heating plate.

8. The plating stage according to claim 7, wherein: the coating film cavity includes the bottom plate, the downside of bottom plate is provided with the lift seat, the lift seat over-and-under type is installed on the bottom plate, be provided with the through-hole on the bottom plate, the pivot is passed through bearing assembly and insulating part and is rotated and install on the lift seat, the upper end of pivot is passed in the through-hole and is extended to in the coating film cavity, the axle body of pivot and the pore wall of through-hole are the disjunctor form, the cover is equipped with the sealed tube that can stretch out and draw back on the pivot axle body between lift seat and the bottom plate, the both ends of sealed tube respectively with the bottom plate, lift seat fixed connection, the pivot extends to the tip of lift seat downside and is connected with bias voltage subassembly and/or rotation regulating part.

9. The plating stage according to claim 8, wherein: the bias voltage assembly comprises a C-connection part, the C-connection part is fixedly installed on the lifting seat through a C insulation part, the C-connection part is electrically connected with the outer surface of the rotating shaft through a C brush assembly, and the C-connection part is connected with a bias voltage power supply.

10. The plating stage according to claim 8, wherein: the lower extreme tip of pivot is provided with the drive wheel, and the drive wheel is connected with the driving motor who sets up on the lift seat through the drive belt, and the lift adjustment subassembly includes each lift adjustment cylinder, lift adjustment cylinder's the solid fixed assembly of jar body portion and lift seat, lift adjustment cylinder's piston rod and bottom plate fixed connection, and the sealed tube is the bellows.