CN115157019A - Wheel ring type magnetorheological polishing head and magnetorheological polishing machine tool - Google Patents

Wheel ring type magnetorheological polishing head and magnetorheological polishing machine tool Download PDF

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Publication number
CN115157019A
CN115157019A CN202210993890.5A CN202210993890A CN115157019A CN 115157019 A CN115157019 A CN 115157019A CN 202210993890 A CN202210993890 A CN 202210993890A CN 115157019 A CN115157019 A CN 115157019A
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China
Prior art keywords
magnetic pole
wheel
transmission shaft
polishing
magnetorheological
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CN202210993890.5A
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CN115157019B (en
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宋辞
王博
石峰
田野
铁贵鹏
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National University of Defense Technology
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National University of Defense Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/112Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention discloses a wheel ring type magnetorheological polishing head and a magnetorheological polishing machine tool. The invention can realize the circulation of the magnetorheological fluid, has stable removal function, high material removal efficiency, stable material removal efficiency, high surface quality after polishing, simple structure and convenient control, and can realize the high-efficiency and high-surface-quality polishing of the surfaces of various processing workpieces such as optical elements and the like.

Description

Wheel ring type magnetorheological polishing head and magnetorheological polishing machine tool
Technical Field
The invention relates to a magnetorheological polishing technology, in particular to a wheel ring type magnetorheological polishing head and a magnetorheological polishing machine tool.
Background
With the rapid development of scientific technology, the requirements of high-tech fields such as space optics, astronomical optics, inertial confinement fusion, extreme ultraviolet lithography and the like on the performance of optical systems are higher and higher. This presents new challenges to optical fabrication techniques, and consequently various deterministic polishing techniques have emerged. The magnetorheological polishing technology has the characteristics of wide application range, small subsurface damage, high machining precision, high surface convergence efficiency and the like, and has a wide development prospect.
At present, wheel type magnetorheological polishing is widely applied, but polishing lines are obvious, polishing spots are small, efficiency is low, in order to better realize efficient, high-precision and high-surface-quality processing of an optical mirror surface, novel magnetorheological polishing technologies such as cluster type magnetorheological polishing, magnetic composite fluid magnetorheological polishing, chemical mechanical magnetorheological polishing and the like are continuously developed, and the further improvement of material removal efficiency is mostly realized by increasing the contact area of a polishing die and a workpiece. However, the new methods do not solve the problem of the cyclic renewal of the magnetorheological fluid, so that the stability of the material removal efficiency is difficult to ensure.
Disclosure of Invention
The technical problems to be solved by the invention are as follows: the invention provides a wheel ring type magnetorheological polishing head and a magnetorheological polishing machine tool, aiming at the problems in the prior art, and the wheel ring type magnetorheological polishing head and the magnetorheological polishing machine tool can realize the circulation of magnetorheological fluid, have stable removal function, high material removal efficiency, stable material removal efficiency, high surface quality after polishing, simple structure and convenient control, and can realize the high-efficiency and high-surface-quality polishing of the surfaces of various processing workpieces such as optical elements and the like.
In order to solve the technical problems, the invention adopts the technical scheme that:
a wheel-ring type magnetorheological polishing head comprises a fixed suspension plate and a rotatable transmission shaft penetrating through the fixed suspension plate, wherein an annular polishing wheel is arranged at the end part of the transmission shaft, a permanent magnet device used for enabling magnetorheological liquid to form a solid state through a magnetic field to form a magnetorheological fluid polishing area on the surface of the annular polishing wheel is mounted on one side, close to the annular polishing wheel, of the fixed suspension plate in a suspension mode, the permanent magnet device is of an annular structure with an opening, and the permanent magnet device and the annular polishing wheel are arranged coaxially.
Optionally, a groove is formed in one side, close to the fixed suspension plate, of the annular polishing wheel, and the end of the permanent magnet device is arranged in the groove.
Optionally, the permanent magnet device includes a mounting plate, a fixing ring, an inner magnetic pole, and an outer magnetic pole, where the mounting plate, the fixing ring, the inner magnetic pole, and the outer magnetic pole are all of an annular structure with an opening, the mounting plate is mounted on the fixing suspension plate, the fixing ring is fixed on the mounting plate, the inner magnetic pole and the outer magnetic pole are respectively fixed on the fixing ring, and a slit is formed between the inner magnetic pole and the outer magnetic pole in a relative gap arrangement.
Optionally, the ends of the inner magnetic pole and the outer magnetic pole are both provided with bent magnetic pole ends bent towards the opposite side therebetween, the slit is formed between the two bent magnetic pole ends, and the two bent magnetic pole ends are arranged at the bottom of the groove.
Optionally, a magnetic pole suspension ring is arranged between the mounting plate and the fixed suspension plate, the mounting plate is made of a magnetic conductive material, and the fixed ring and the magnetic pole suspension ring are both made of a non-magnetic conductive material.
Optionally, the central angle of the opening area of the open ring-shaped structure is 90 °, so that the central angle of the body area of the permanent magnet device is 270 °.
Optionally, the end of the transmission shaft is provided with a mounting plate, and the annular polishing wheel is fixedly connected with the mounting plate through a connecting piece, so that the transmission shaft and the annular polishing wheel are fixedly connected with each other.
Optionally, the outer wall of the transmission shaft is sleeved with a shaft sleeve, two sides of the shaft sleeve on the outer wall of the transmission shaft are respectively sleeved with a deep groove ball bearing for bearing a radial load, the shaft sleeve and the inner wall of the through hole for installing the transmission shaft on the fixed suspension plate are attached to position the deep groove ball bearing, a rotatable bearing positioning plate is further arranged on the outer wall of the transmission shaft and below the deep groove ball bearing on the lowest side, and the bearing positioning plate is connected with the fixed suspension plate through a connecting piece.
Optionally, still the cover is equipped with the thrust ball bearing that is used for bearing axial load and provides the support on the outer wall of transmission shaft, the upside that lies in thrust ball bearing on the outer wall of transmission shaft still is equipped with a solid nut in top, the solid nut in top is contradicted at thrust ball bearing's upside, just the outside that lies in thrust ball bearing and a solid nut in top on the fixed board that hangs is equipped with the axle head cover.
In addition, the invention also provides a magnetorheological polishing machine tool, which comprises a magnetorheological polishing machine tool body with a magnetorheological polishing head, wherein the magnetorheological polishing head is the wheel ring type magnetorheological polishing head.
Compared with the prior art, the invention has the following advantages: the magnetorheological fluid polishing wheel disc comprises a fixed suspension plate and a rotatable transmission shaft penetrating through the fixed suspension plate, wherein an annular polishing wheel is arranged at the end part of the transmission shaft, a permanent magnet device used for enabling magnetorheological fluid to form a solid state through a magnetic field and forming a magnetorheological fluid polishing area on the surface of the annular polishing wheel is suspended and mounted on one side, close to the annular polishing wheel, of the fixed suspension plate, the permanent magnet device is of an annular structure with an opening, the permanent magnet device and the annular polishing wheel are coaxially arranged, the transmission shaft drives the annular polishing wheel to rotate, the magnetorheological fluid can form the magnetorheological fluid polishing area in the solid state when the magnetorheological fluid passes through a body area of the permanent magnet device and can rotate along with the annular polishing wheel, and the magnetorheological fluid can be recovered into the magnetorheological fluid when the annular polishing wheel passes through an opening area of the permanent magnet device due to loss of magnetism, so that the magnetorheological fluid in the polishing area is changed into the liquid magnetorheological fluid after passing through a strong magnetic field to a weak magnetic field, the magnetorheological fluid is recovered, the circulation of the magnetorheological fluid and the polishing removal of a processing workpiece are realized, and the novel magnetorheological fluid polishing wheel disc with high removal efficiency, stable removal efficiency, high surface quality after polishing and simple structure, convenient control and the like are integrated.
Drawings
Fig. 1 is a schematic perspective view of an embodiment of the present invention.
Fig. 2 is a schematic side view of an embodiment of the present invention.
Fig. 3 isbase:Sub>A schematic sectional structure view ofbase:Sub>A-base:Sub>A in fig. 2.
Fig. 4 is a schematic perspective view of a permanent magnet device according to an embodiment of the present invention.
Fig. 5 is a schematic perspective view of a transmission shaft according to an embodiment of the present invention.
Fig. 6 is a schematic view of a bearing structure between a transmission shaft and a fixed suspension plate in the embodiment of the invention.
Illustration of the drawings: 1. fixing the suspension plate; 11. a shaft end cover; 12. a magnetic pole suspension ring; 2. a drive shaft; 21. mounting a plate; 22. a shaft sleeve; 3. an annular polishing wheel; 31. a groove; 4. a permanent magnet device; 41. mounting a plate; 42. a fixing ring; 43. an inner magnetic pole; 44. an outer magnetic pole; 45. a slit; 46. bending the end part of the magnetic pole; 5. a deep groove ball bearing; 6. a bearing positioning plate; 7. a thrust ball bearing; 8. and (6) fixing the nut.
Detailed Description
The invention is further described below with reference to the drawings and specific preferred embodiments of the description, without thereby limiting the scope of protection of the invention.
As shown in fig. 1 and fig. 2, the wheel-ring type magnetorheological polishing head of the embodiment includes a fixed suspension plate 1 and a rotatable transmission shaft 2 penetrating through the fixed suspension plate 1, an annular polishing wheel 3 is disposed at an end of the transmission shaft 2, a permanent magnet device 4 for forming a magnetorheological fluid into a solid state through a magnetic field and forming a magnetorheological fluid polishing region on the surface of the annular polishing wheel 3 is mounted on one side of the fixed suspension plate 1 close to the annular polishing wheel 3 in a suspension manner, the permanent magnet device 4 is of an annular structure with an opening, and the permanent magnet device 4 and the annular polishing wheel 3 are coaxially arranged. When the polishing wheel disc is used, the fixed suspension plate 1 and the permanent magnet device 4 are kept still, the transmission shaft 2 drives the annular polishing wheel 3 to rotate, so that magnetorheological fluid can form a magnetorheological fluid polishing area in a solid state when the annular polishing wheel 3 passes through the body area of the permanent magnet device 4 and rotate along with the annular polishing wheel 3, the magnetorheological fluid polishing area can be recovered into magnetorheological fluid due to the fact that magnetism is lost when the annular polishing wheel 3 passes through the opening area of the permanent magnet device 4, the magnetorheological fluid in the polishing area is recovered after being changed into the magnetorheological fluid from a strong magnetic field to a weak magnetic field, the circulation of the magnetorheological fluid and the polishing removal of a processed workpiece are achieved, the removal efficiency is high, the material removal efficiency is stable, the surface quality after polishing is high, the structure is simple, and the novel magnetorheological wheel disc polishing wheel disc with multiple advantages of being convenient to control and the like is integrated.
As shown in fig. 3, in the embodiment, a groove 31 is formed on one side of the annular polishing wheel 3 close to the fixed suspension plate 1, and the end of the permanent magnet device 4 is arranged in the groove 31, so that the magnetism of the permanent magnet device 4 can better act on the surface of the annular polishing wheel 3, and a magnetorheological fluid polishing area in a better solid state can be formed on the surface of the annular polishing wheel 3.
The permanent magnet device 4 is used for generating a strong magnetic field to enable the magnetorheological fluid to form a magnetorheological fluid polishing area in a solid state, and the polishing area is attached to the polishing wheel ring and rotates along with the wheel ring, so that the magnetorheological polishing of the workpiece is realized, and meanwhile, the circulation of the magnetorheological fluid is ensured. As shown in fig. 3 and 4, in the present embodiment, the permanent magnet device 4 includes a mounting plate 41, a fixing ring 42, an inner magnetic pole 43, and an outer magnetic pole 44, where the mounting plate 41, the fixing ring 42, the inner magnetic pole 43, and the outer magnetic pole 44 are all of an annular structure with an opening, the mounting plate 41 is mounted on the fixed suspension plate 1, the fixing ring 42 is fixed on the mounting plate 41, the inner magnetic pole 43 and the outer magnetic pole 44 are respectively fixed on the fixing ring 42, and a slit 45 is formed between the inner magnetic pole 43 and the outer magnetic pole 44 by arranging a relative gap.
As shown in fig. 3, the ends of the inner magnetic pole 43 and the outer magnetic pole 44 are respectively provided with a bent magnetic pole end 46 bent towards the other end, the slit 45 is formed between the two bent magnetic pole ends 46, and the two bent magnetic pole ends 46 are arranged at the bottom of the groove 31, so that a short distance is formed between the two bent magnetic pole ends 46 and the annular polishing wheel 3, and therefore, the non-contact rotation of the annular polishing wheel 3 can be realized, and a stronger strong magnetic field can be formed on the surface of the annular polishing wheel 3.
As shown in fig. 3, a magnetic pole suspension ring 12 is disposed between the mounting plate 41 and the fixed suspension plate 1, the mounting plate 41 is made of a magnetic conductive material and can perform a magnetic enhancement function, the fixing ring 42 and the magnetic pole suspension ring 12 are both made of a non-magnetic conductive material, the magnetic pole suspension ring 12 can be magnetically isolated from the fixed suspension plate 1, the fixing ring 42 can ensure the magnetic isolation between the inner magnetic pole 43 and the outer magnetic pole 44, and the magnetic pole separation and the firm fixation of the inner magnetic pole 43 and the outer magnetic pole 44 are realized. In this embodiment, the magnetic pole suspension ring 12 is connected to the mounting plate 41 of the permanent magnet device 2 at the lower end thereof by a screw thread, and the permanent magnet device 4 is fixedly connected to the fixed suspension plate 1 by the magnetic pole suspension ring 12 at the upper end thereof, so that the permanent magnet device 4 and the machine tool can be kept stationary.
As shown in fig. 4, in the present embodiment, the central angle of the opening region of the open ring structure is 90 °, so that the central angle of the body region of the permanent magnet device 4 is 270 °, and the mounting plate 41, the fixing ring 42, the inner magnetic pole 43, and the outer magnetic pole 44 are all open ring structures with open regions having central angles of 90 °. The permanent magnet device 2 generates a strong magnetic field to enable the magnetorheological fluid to form a magnetorheological fluid polishing area in a solid state, the magnetorheological fluid polishing area is attached to the annular polishing wheel 3 and rotates along with the annular polishing wheel 3, and the magnetorheological fluid is input and recovered in an annular area of the permanent magnet device 2, which is not more than 270 degrees, so that the circulation of the magnetorheological fluid is realized. And only 180 DEG of the magnetorheological fluid polishing area can be selected for polishing in the polishing process to ensure the stability of the removal function.
As shown in fig. 5, in this embodiment, an installation plate 21 is disposed at an end of the transmission shaft 2, and the annular polishing wheel 3 is fixedly connected to the installation plate 21 through a connecting member, so that the transmission shaft 2 and the annular polishing wheel 3 are connected and fixed to each other, thereby realizing synchronous rotation of the transmission shaft 2 and the annular polishing wheel 3, and realizing polishing of a workpiece to be processed and circulation of magnetorheological fluid. In this embodiment, the inner ring of the annular polishing wheel 3 is provided with a threaded hole connected with the transmission shaft 2 by screws, and the connection through hole arranged on the transmission shaft 2 is connected with the connection through hole on the annular polishing wheel 3 by screws. Referring to fig. 5, the transmission shaft 2 is further provided with a driven pulley connecting key groove, the transmission shaft 2 is connected to the motor through the driven pulley connecting key groove and the driven pulley and the belt to rotate, and the transmission shaft 2 is connected with the annular polishing wheel 3 so as to drive the annular polishing wheel 3 to rotate, so that the polishing of the processed workpiece and the circulation of the magnetorheological fluid are realized.
As shown in fig. 6, in this embodiment, a shaft sleeve 22 is sleeved on the outer wall of the transmission shaft 2, and two sides of the outer wall of the transmission shaft 2, which are located on the shaft sleeve 22, are also respectively sleeved with a deep groove ball bearing 5 for bearing a radial load, the shaft sleeve 22 is attached to the inner wall of the through hole for installing the transmission shaft 2 on the fixed suspension plate 1 to position the deep groove ball bearing 5, a rotatable bearing positioning plate 6 is further disposed on the outer wall of the transmission shaft 2, which is located at the lowest side of the deep groove ball bearing 5, and the bearing positioning plate 6 is connected to the fixed suspension plate 1 through a connecting member. In the embodiment, the bearing positioning plate 6 is provided with a through hole, the upper end of the bearing positioning plate is connected with the fixed suspension plate 1 through a screw, and the bearing positioning plate mainly functions to provide support and axial positioning for the deep groove ball bearing 5. The deep groove ball bearing 5 is used for bearing radial load for the device, and the shaft sleeve 22 is attached to the inner wall of the hole in the fixed suspension plate 1 so as to position the deep groove ball bearing 7.
As shown in fig. 6, in this embodiment, the outer wall of the transmission shaft 2 is further sleeved with a thrust ball bearing 7 for bearing an axial load and providing support, a top fixing nut 8 is further disposed on the outer wall of the transmission shaft 2 and located on the upper side of the thrust ball bearing 7, the top fixing nut 8 abuts against the upper side of the thrust ball bearing 7, and a shaft end cover 11 is disposed on the fixed suspension plate 1 and located outside the thrust ball bearing 7 and the top fixing nut 8, so that the inner thrust ball bearing 7 and the top fixing nut 8 can be protected, and this embodiment is safer and more reliable. The thrust ball bearing 7 is used to carry axial loads to the device and provide support for the device.
In summary, the wheel ring type magnetorheological polishing head of the embodiment is based on the idea of increasing the contact area between the magnetorheological polishing magnetorheological ribbon and the workpiece, the wheel ring type magnetorheological fluid can be circulated by designing the permanent magnet device 4, and the area with stable removal function can be reasonably selected according to needs to be polished, so that the wheel ring type magnetorheological polishing head has multiple advantages of high material removal efficiency, stable material removal efficiency, high surface quality after polishing, simple structure, convenience in control and the like, and can realize high-efficiency and high-surface-quality polishing on the surface of an optical element.
In addition, the embodiment also provides a magnetorheological polishing machine tool, which comprises a magnetorheological polishing machine tool body with a magnetorheological polishing head, wherein the magnetorheological polishing head is the wheel ring type magnetorheological polishing head, the fixed suspension plate 1 of the wheel ring type magnetorheological polishing head is fixedly suspended on the machine tool and is kept fixed, and the transmission shaft 2 is connected with a motor on the machine tool to drive the annular polishing wheel 3 to rotate, so that the magnetorheological polishing machine tool can be used for magnetorheological polishing of various workpieces such as optical workpieces.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.

Claims (10)

1. The wheel-ring type magnetorheological polishing head is characterized by comprising a fixed suspension plate (1) and a rotatable transmission shaft (2) penetrating through the fixed suspension plate (1), wherein an annular polishing wheel (3) is arranged at the end part of the transmission shaft (2), a permanent magnet device (4) used for enabling magnetorheological liquid to form a solid state through a magnetic field to form a magnetorheological fluid polishing area on the surface of the annular polishing wheel (3) is mounted on one side, close to the annular polishing wheel (3), of the fixed suspension plate (1) in a suspended mode, the permanent magnet device (4) is of an annular structure with an opening, and the permanent magnet device (4) and the annular polishing wheel (3) are coaxially arranged.
2. The wheel ring type magnetorheological polishing head according to claim 1, wherein a groove (31) is formed in one side of the annular polishing wheel (3) close to the fixed suspension plate (1), and the end part of the permanent magnet device (4) is arranged in the groove (31).
3. The wheel ring type magnetorheological polishing head according to claim 2, wherein the permanent magnet device (4) comprises a mounting plate (41), a fixing ring (42), an inner magnetic pole (43) and an outer magnetic pole (44), the mounting plate (41), the fixing ring (42), the inner magnetic pole (43) and the outer magnetic pole (44) are all of an annular structure with an opening, the mounting plate (41) is mounted on the fixed suspension plate (1), the fixing ring (42) is fixed on the mounting plate (41), the inner magnetic pole (43) and the outer magnetic pole (44) are respectively fixed on the fixing ring (42), and relative gaps between the inner magnetic pole (43) and the outer magnetic pole (44) are arranged to form a slit (45).
4. A wheel ring type magnetorheological polishing head according to claim 3, wherein the ends of the inner magnetic pole (43) and the outer magnetic pole (44) are provided with bent magnetic pole ends (46) bent towards each other therebetween, the slit (45) is formed between the two bent magnetic pole ends (46), and the two bent magnetic pole ends (46) are arranged at the bottom of the groove (31).
5. The wheel ring type magnetorheological polishing head according to claim 4, wherein the magnetic pole suspension ring (12) is arranged between the mounting plate (41) and the fixed suspension plate (1), the mounting plate (41) is made of a magnetic conductive material, and the fixed ring (42) and the magnetic pole suspension ring (12) are both made of a non-magnetic conductive material.
6. A wheel-ring magnetorheological polishing head according to claim 5, wherein the open area of the annular structure with openings has a central angle of 90 ° such that the central angle of the body area of the permanent magnet device (4) is 270 °.
7. The wheel-ring type magnetorheological polishing head according to claim 6, wherein a mounting plate (21) is arranged at the end of the transmission shaft (2), and the annular polishing wheel (3) is fixedly connected with the mounting plate (21) through a connecting piece, so that the transmission shaft (2) and the annular polishing wheel (3) are fixedly connected with each other.
8. The wheel ring type magnetorheological polishing head according to claim 7, wherein a shaft sleeve (22) is sleeved on the outer wall of the transmission shaft (2), two deep groove ball bearings (5) for bearing radial load are respectively sleeved on the outer wall of the transmission shaft (2) and positioned on two sides of the shaft sleeve (22), the shaft sleeve (22) is attached to the inner wall of a through hole for installing the transmission shaft (2) on the fixed suspension plate (1) to position the deep groove ball bearings (5), a rotatable bearing positioning plate (6) is further arranged on the outer wall of the transmission shaft (2) and positioned on the lower side of the deep groove ball bearing (5) on the lowest side, and the bearing positioning plate (6) is connected with the fixed suspension plate (1) through a connecting piece.
9. The wheel ring type magnetorheological polishing head according to claim 8, wherein a thrust ball bearing (7) for bearing an axial load and supporting is further sleeved on the outer wall of the transmission shaft (2), a top fixing nut (8) is further arranged on the outer wall of the transmission shaft (2) and located on the upper side of the thrust ball bearing (7), the top fixing nut (8) abuts against the upper side of the thrust ball bearing (7), and a shaft end cover (11) is arranged on the fixed suspension plate (1) and located outside the thrust ball bearing (7) and the top fixing nut (8).
10. A magnetorheological polishing machine tool comprises a magnetorheological polishing machine tool body with a magnetorheological polishing head, and is characterized in that the magnetorheological polishing head is the wheel-ring type magnetorheological polishing head according to any one of claims 1 to 9.
CN202210993890.5A 2022-08-18 Wheel ring type magnetorheological polishing head and magnetorheological polishing machine tool Active CN115157019B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210993890.5A CN115157019B (en) 2022-08-18 Wheel ring type magnetorheological polishing head and magnetorheological polishing machine tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210993890.5A CN115157019B (en) 2022-08-18 Wheel ring type magnetorheological polishing head and magnetorheological polishing machine tool

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CN115157019A true CN115157019A (en) 2022-10-11
CN115157019B CN115157019B (en) 2024-07-16

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