CN115152089A - 移相器及其制备方法、天线 - Google Patents

移相器及其制备方法、天线 Download PDF

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Publication number
CN115152089A
CN115152089A CN202180000093.6A CN202180000093A CN115152089A CN 115152089 A CN115152089 A CN 115152089A CN 202180000093 A CN202180000093 A CN 202180000093A CN 115152089 A CN115152089 A CN 115152089A
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CN
China
Prior art keywords
substrate
signal line
line
phase shifter
insulating layer
Prior art date
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CN202180000093.6A
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English (en)
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CN115152089B (zh
Inventor
刘宗民
李春昕
李伟
范西超
郭俊伟
黄继景
侯孟军
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BOE Technology Group Co Ltd
Beijing BOE Technology Development Co Ltd
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BOE Technology Group Co Ltd
Beijing BOE Technology Development Co Ltd
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Publication of CN115152089A publication Critical patent/CN115152089A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/18—Phase-shifters
    • H01P1/184—Strip line phase-shifters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/001—Manufacturing waveguides or transmission lines of the waveguide type
    • H01P11/003—Manufacturing lines with conductors on a substrate, e.g. strip lines, slot lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
    • H01P3/08—Microstrips; Strip lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/30—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array
    • H01Q3/34—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means
    • H01Q3/36—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means with variable phase-shifters

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

本发明提供一种移相器及其制备方法、天线，属于通信技术领域。本发明提供的一种移相器，包括第一基板，设置在第一基板上的信号线和参考线，设置在信号线上的第一绝缘层，和设置在第一绝缘层背离信号线一侧的多个电极膜桥以及设置在绝缘层上的第一传输结构，其与信号线电连接，且第一传输结构在第一基板上的正投影，与多个电极膜桥在第一基板上的正投影无重叠。由于设置了第一传输结构，因此能够阻隔射频信号对直流偏置电压的影响，从而能够保证移相器的低插损性能，提高移相器的稳定性。

Description

PCT国内申请，说明书已公开。

Claims (15)

  1. PCT国内申请，权利要求书已公开。
CN202180000093.6A 2021-01-29 2021-01-29 移相器及其制备方法、天线 Active CN115152089B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2021/074425 WO2022160250A1 (zh) 2021-01-29 2021-01-29 移相器及其制备方法、天线

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CN115152089A true CN115152089A (zh) 2022-10-04
CN115152089B CN115152089B (zh) 2024-03-15

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US (1) US20230097839A1 (zh)
CN (1) CN115152089B (zh)
WO (1) WO2022160250A1 (zh)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106785250A (zh) * 2016-12-23 2017-05-31 西安电子科技大学 基于射频微机电开关的螺旋五位分布式微机电移相器
CN110661064A (zh) * 2019-09-29 2020-01-07 京东方科技集团股份有限公司 移相器及其制备和封装方法
EP3609017A1 (en) * 2018-08-06 2020-02-12 ALCAN Systems GmbH Radio frequency phase shifting device
CN110943299A (zh) * 2019-11-29 2020-03-31 北京京东方传感技术有限公司 移相器和相控阵天线
CN111864317A (zh) * 2020-06-23 2020-10-30 京东方科技集团股份有限公司 移相器及天线
US20210265713A1 (en) * 2019-05-23 2021-08-26 Boe Technology Group Co., Ltd. Phase shifter and liquid crystal antenna

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101202369B (zh) * 2007-12-11 2011-12-07 中国电子科技集团公司第五十五研究所 一种小型化mems开关线移相器
CN110824735A (zh) * 2018-08-10 2020-02-21 京东方科技集团股份有限公司 液晶移相器及液晶天线
GB201815797D0 (en) * 2018-09-27 2018-11-14 Sofant Tech Ltd Mems devices and circuits including same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106785250A (zh) * 2016-12-23 2017-05-31 西安电子科技大学 基于射频微机电开关的螺旋五位分布式微机电移相器
EP3609017A1 (en) * 2018-08-06 2020-02-12 ALCAN Systems GmbH Radio frequency phase shifting device
US20210265713A1 (en) * 2019-05-23 2021-08-26 Boe Technology Group Co., Ltd. Phase shifter and liquid crystal antenna
CN110661064A (zh) * 2019-09-29 2020-01-07 京东方科技集团股份有限公司 移相器及其制备和封装方法
CN110943299A (zh) * 2019-11-29 2020-03-31 北京京东方传感技术有限公司 移相器和相控阵天线
CN111864317A (zh) * 2020-06-23 2020-10-30 京东方科技集团股份有限公司 移相器及天线

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CN115152089B (zh) 2024-03-15
WO2022160250A1 (zh) 2022-08-04
US20230097839A1 (en) 2023-03-30

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