CN115144960B - Mode conversion device of multimode output waveguide and high-speed detection system - Google Patents
Mode conversion device of multimode output waveguide and high-speed detection system Download PDFInfo
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/1209—Multimode
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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Abstract
The application relates to the technical field of integrated optical chips, in particular to a mode conversion device of a multimode output waveguide and a high-speed detection system, wherein the mode conversion device comprises a substrate and a waveguide layer; the waveguide layer is arranged on the substrate; the waveguide layer is provided with an array waveguide; the arrayed waveguide comprises a plurality of first waveguides side by side; the input end of the arrayed waveguide is used for aligning with the output end of the multimode output waveguide so as to receive the output light of the multimode output waveguide; the width of the etching groove between the first waveguides in the plurality of first waveguides is within a preset width range. The compatibility of the mode conversion device to high-order mode light can be improved; reducing high order mode optical losses.
Description
Technical Field
The present application relates to the field of integrated optical chip technologies, and in particular, to a mode conversion device and a high-speed detection system for a multimode output waveguide.
Background
With the increase of information transmission demand, the multimode output waveguide has the characteristic of large bandwidth and is widely applied to optical devices. For example, wavelength division multiplexing devices are increasingly used in communications due to their advantages of high information carrying capacity and low cost. The wavelength division multiplexing device realized on the optical integration platform mainly comprises a grating and a grating Mach-Zehnder Interferometer (MZI) method. The wavelength division multiplexing device based on the grating principle has the advantages of strong channel expandability and high integration level, and is widely used in a wavelength division multiplexing optical integrated system. The grating of the wavelength division multiplexer adopts multimode output waveguide to realize large bandwidth so as to cover wavelength shift of the wavelength division multiplexer caused by device process errors and environmental temperature changes.
The multimode output waveguide is a high-order mode waveguide (i.e., the large bandwidth), and the multimode output waveguide has a wide output end surface. And because the output end face of the multimode output waveguide is wide, the multimode output waveguide is difficult to be compatible with the low-order mode waveguide with a narrow end face. For example, in the application of the multimode output waveguide in the high-speed wavelength division multiplexing receiver, in order to ensure the transmission speed of light, the input end surface of the high-speed detector waveguide is narrow (i.e. only light of a lower order mode can be constrained), and when the output end surface of the multimode waveguide is coupled with the input end surface of the high-speed detector waveguide, there is a problem that the size of the multimode output waveguide and the high-speed detector waveguide is difficult to be compatible.
The existing multimode output waveguide (i.e. high-order mode waveguide) and low-order mode waveguide convert the optical energy from the multimode output waveguide to the low-order mode waveguide through a wedge-shaped mode conversion device, i.e. the mode conversion function is realized. However, since the small end of the tapered mode conversion device does not support the desired high-order mode, there is a problem that the optical loss of the high-order mode is large when the multimode output waveguide and the low-order mode waveguide are connected directly by using the tapered mode conversion device.
Therefore, it is desirable to provide a speckle conversion device and a high-speed detection system for a multimode output waveguide, which can improve the compatibility of the mode conversion device with high-order mode light; reducing high order mode optical losses.
Disclosure of Invention
The embodiment of the application provides a spot size conversion device of a multimode output waveguide and a high-speed detection system, which can improve the compatibility of the mode conversion device to high-order mode light; reducing high order mode optical losses.
In one aspect, embodiments of the present application provide a mode conversion device of a multimode output waveguide, the mode conversion device comprising:
a substrate, a waveguide layer;
the waveguide layer is arranged on the substrate;
the waveguide layer is provided with an array waveguide; the arrayed waveguide comprises a plurality of first waveguides side by side; the input end of the arrayed waveguide is used for aligning with the output end of the multimode output waveguide so as to receive the output light of the multimode output waveguide; the width of the etching groove between the first waveguides in the plurality of first waveguides is within a preset width range.
In some optional embodiments, the depth of the etched trench between the first waveguides of the plurality of first waveguides gradually increases in a direction away from the multimode output waveguide.
In some optional embodiments, the depth of the etching groove between the first waveguides in the plurality of first waveguides gradually increases in a step shape.
In some optional embodiments, the mode conversion apparatus further comprises:
a transducer structure disposed between the multimode output waveguide and the arrayed waveguide; a first end face of the transformer structure proximate the multimode output waveguide for aligning with an end face of the output end of the multimode output waveguide; a second end face of the transformer structure remote from the multimode output waveguides for aligning with an end face of the input end of the array waveguide; the width of the second end surface is greater than the width of the first end surface.
In some optional embodiments, the mode conversion apparatus further comprises:
an optical field transducer disposed between the multimode output waveguide and the array waveguide; the optical field converter comprises a conical waveguide, a flat waveguide and a conical array waveguide;
the tapered waveguide is arranged on the flat waveguide and close to the first end of the multimode output waveguide; a first planar end of the tapered waveguide and the first end of the slab waveguide are co-aligned with the output end of the multimode output waveguide;
the tapered array waveguide is arranged on the second end of the flat waveguide far away from the multimode output waveguide; the tapered waveguide and the tapered array waveguide are arranged on the same side of the flat waveguide; the tapered array waveguide comprises a plurality of inverted tapered waveguides, and the second planar end of each inverted tapered waveguide in the plurality of inverted tapered waveguides is aligned with the input end of each first waveguide in the array waveguide.
In some alternative embodiments, the first tip width of the tapered waveguide and the second tip width of the plurality of inversely tapered waveguides satisfy a preset tip width range.
In some alternative embodiments, the number of first waveguides in the plurality of first waveguides is in a range of 2-6.
In some optional embodiments, the depth of the etched trench between the first waveguides in the plurality of first waveguides is in a range of 0.1 μm to 5.0 μm.
In some optional embodiments, the widths of the etched trenches between each of the plurality of first waveguides are uniformly distributed.
In another aspect, the present application provides a high-speed detection system for a multimode output waveguide, the high-speed detection system comprising a plurality of high-speed detectors and the above-described mode conversion device; an input end of each of the plurality of high-speed detectors is connected to an output end of each of the plurality of first waveguides; each of the high-speed detectors is for detecting an electro-optic characteristic of each of the first waveguides.
The application provides a mode conversion device of a multimode output waveguide and a high-speed detection system, wherein the mode conversion device comprises a substrate and a waveguide layer; the waveguide layer is arranged on the substrate; the waveguide layer is provided with an array waveguide; the arrayed waveguide comprises a plurality of first waveguides side by side; the input end of the arrayed waveguide is used for aligning with the output end of the multimode output waveguide so as to receive the output light of the multimode output waveguide; the width of the etching groove between the first waveguides in the plurality of first waveguides is within a preset width range. The compatibility of the mode conversion device to high-order mode light can be improved; and the high-order mode optical loss is reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a view of an application scenario of a mode conversion apparatus for a multimode output waveguide according to an embodiment of the present application;
fig. 2a is a schematic structural diagram of a mode conversion device of a multimode output waveguide according to an embodiment of the present application, including an arrayed waveguide;
FIG. 2b is a schematic illustration of the multimode output waveguide of FIG. 2a coupled to a mode conversion device;
FIG. 2c is a schematic view of the alignment of the arrayed waveguide and the multimode output waveguide in the mode conversion device shown in FIG. 2 b;
FIG. 3a is a schematic structural diagram of a mode conversion device for a multimode output waveguide according to an embodiment of the present application, in which the depth of an etched groove of an arrayed waveguide has a step;
FIG. 3b is a schematic illustration of the depth of the etched trench of the arrayed waveguide of FIG. 3 a;
FIG. 3c is a schematic diagram of the structure of etched trenches of the arrayed waveguide of FIG. 3 a;
fig. 4a is a schematic structural diagram of a mode conversion device for a multimode output waveguide according to an embodiment of the present application, in which the depth of an etched groove of an array waveguide is increased in a step shape;
FIG. 4b is a schematic diagram of the array waveguide of FIG. 4a with the depth of the etched grooves increasing in a step-like manner;
fig. 5 is a schematic structural diagram of a mode conversion device of a multimode output waveguide according to an embodiment of the present application, including a transformer structure;
fig. 6 is a schematic end-face structure diagram of an optical waveguide mode-spot conversion device according to an embodiment of the present application, including an optical field converter.
The reference numbers in the figures have the meaning:
1-a multimode output waveguide; 11-a grating; 2-low order mode waveguide; 21-a high speed detector; 3-mode switching means; 31-arrayed waveguides; 311-a first waveguide; 312-etching a groove; 32-a transducer configuration; 33-a light field transformer; 331-a tapered waveguide; 332-slab waveguide; 333-tapered arrayed waveguide.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. In the description of the present invention, it is to be understood that the terms "upper", "top", "bottom", and the like refer to orientations or positional relationships based on orientations or positional relationships shown in the drawings, which are used for convenience in describing the present invention and to simplify the description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in other sequences than those illustrated or described herein.
First, an application scenario of the mode converting apparatus will be described by way of example.
Referring to fig. 1, fig. 1 is a diagram illustrating an application scenario of a mode conversion device of a multimode output waveguide according to an embodiment of the present application.
As shown in FIG. 1, the multimode output waveguide 1 is disposed on a grating 11 of a wavelength division multiplexer for realizing a large bandwidth (e.g., the multimode output waveguide 1 has a width W 0 ) In which higher order modes within the multimode output waveguide 1 are excited. The low-order mode waveguide 2 is connected to the high-speed detector 21, and the bandwidth of the low-order mode waveguide 2 is small, so that the high response speed required by the high-speed detector 21 can be met. The mode conversion device 3 is used for converting the light energy of the multimode output waveguide 1 into the low-order mode waveguide 2. The mode conversion device 3 shown in FIG. 1 has a wedge-shaped structure, and mode conversionThe large head end of the device 3 is coupled to the multimode output waveguide 1 and the small head end of the mode conversion device 3 is coupled to the low order mode waveguide 2.
As described above, since the tapered mode conversion device 3 is connected to the multimode output waveguide 1 and the low-order mode waveguide 2, respectively, since the small end of the tapered mode conversion device 3 does not support a desired high-order mode, there is a problem that a loss of the high-order mode is large when the multimode output waveguide 1 and the low-order mode waveguide 2 are connected directly by using the tapered mode conversion device 3.
In view of the above problems, embodiments of the present application provide a mode conversion device of a multimode output waveguide, where the mode conversion device includes a substrate, a waveguide layer; the waveguide layer is arranged on the substrate; the waveguide layer is provided with an array waveguide; the arrayed waveguide comprises a plurality of first waveguides side by side; the input end of the arrayed waveguide is used for aligning with the output end of the multimode output waveguide so as to receive the output light of the multimode output waveguide; the width of the etching groove between the first waveguides in the plurality of first waveguides is within a preset width range. The compatibility of the mode conversion device to high-order mode light can be improved; reducing high order mode optical losses.
A specific embodiment of a mode conversion device for a multi-mode output waveguide according to the present invention is described below, and fig. 2a is a schematic structural diagram of a mode conversion device for a multi-mode output waveguide according to the present invention, which includes an array waveguide; FIG. 2b is a schematic illustration of the multimode output waveguide of FIG. 2a coupled to a mode conversion device; fig. 2c is a schematic view of the alignment of the arrayed waveguide and the multimode output waveguide in the mode conversion device shown in fig. 2 b. Specifically, the mode conversion device comprises a substrate and a waveguide layer.
The waveguide layer is arranged on the substrate; the waveguide layer is provided with an arrayed waveguide 31 shown in fig. 2 a; the arrayed waveguide 31 includes a plurality of first waveguides 311 side by side. The input end of the arrayed waveguide 31 is used for aligning with the output end of the multimode output waveguide 1 so as to receive the output light of the multimode output waveguide 1; the width of the etched groove 312 between the first waveguides 311 of the plurality of first waveguides 311 is within a preset width range.
In the present embodiment, by providing the arrayed waveguide 31 in the mode conversion device, the multimode output waveguide 1 having a higher-order mode is aligned in common by the first waveguides 311 of a plurality of lower-order modes in the arrayed waveguide 31, so that the conversion of the optical transmission mode is realized, and the compatibility of the mode conversion device to the higher-order mode is improved; the alignment of the low-order mode waveguide 2 with the first waveguide 311 improves the compatibility of the low-order mode waveguide 2 with the first waveguide 311, i.e., the compatibility when the mode converting device is aligned with the multimode output waveguide 1 and the low-order mode waveguide 2, respectively. By controlling the width of the etched groove 312 between the first waveguides 311 within a preset width range, the transmission loss of the mode light of each order from the multimode output waveguide 1 to the lower-order mode waveguide 2 can be reduced.
In some alternative embodiments, the number of first waveguides 311 in the plurality of first waveguides 311 ranges from 2 to 6. For example, the number of first waveguides 311 shown in fig. 2a is 4.
Since the greater the number of the first waveguides 311, the greater the total width of the etched grooves 312 between the first waveguides 311, the greater the optical energy loss. Controlling the number of the first waveguides 311 within a range of 2 to 6 can effectively reduce optical energy loss under the condition of improving compatibility with high-order mode light.
In some alternative embodiments, the depth of the etching groove 312 between the first waveguides 311 in the plurality of first waveguides 311 is in a range of 0.1 μm to 5.0 μm.
Since the optical energy loss is increased due to the etching depth, in order to secure the low-order mode performance of the first waveguide 311, it is necessary to control the depth of the etched groove 312 within a depth range of 0.1 μm to 5.0 μm.
In order to further reduce the optical loss, in some alternative embodiments, the depth of the etched trench 312 between the first waveguides 311 of the plurality of first waveguides 311 is gradually increased along a direction away from the multimode output waveguide. Thus, the optical field is gradually converted from the mode in the multimode output waveguide 1 to the mode in the first waveguide 311, and the optical loss of each order of modes is reduced.
In some alternative embodiments, the depth of the etching groove 312 between the first waveguides in the plurality of first waveguides gradually increases in a step shape.
FIG. 3a is a schematic structural diagram of a mode conversion device for a multimode output waveguide according to an embodiment of the present application, in which the depth of an etched groove of an arrayed waveguide has a step; FIG. 3b is a schematic illustration of the depth of the etched trench of the arrayed waveguide of FIG. 3 a.
The depth of the etched trench 312 of the arrayed waveguide 31 of fig. 3a has a step, and the depth of the etched trench 312 includes two different depths a and B. As shown in fig. 3B, the depth a of the etched trench 312 near the multimode output waveguide 1 is greater than the depth B of the etched trench 312 far from the multimode output waveguide 1. This causes the light energy to be gradually converted into the arrayed waveguide 31 of the depth a. After each low-order mode waveguide 2 is coupled with each first waveguide 311 in the arrayed waveguide 31, the photoelectric property of each first waveguide 311 can be detected.
FIG. 3c is a schematic diagram of the structure of etched trenches of the arrayed waveguide of FIG. 3 a; the process flow for etching the trench 312 is described below with reference to fig. 3 c. Specifically, a silicon oxide hard mask is deposited on the waveguide layer, and then, a first pattern of the arrayed waveguide 31 is formed by photolithography; the silicon oxide is etched based on the first pattern and the photoresist is removed, etching the silicon to a depth B as shown in figure 3 c. On the basis of the etched groove with the depth of B, a second pattern is formed in the photoetching area, and silicon is etched to form the depth of A shown in figure 3 c. Etched trenches 312 of two depths a and B are finally formed.
Fig. 4a is a schematic structural diagram of a mode conversion device for a multimode output waveguide according to an embodiment of the present application, in which the depth of an etched groove of an array waveguide is increased in a step shape; fig. 4b is a schematic diagram of the array waveguide of fig. 4a in which the depth of the etched grooves increases in a step-like manner, wherein the abscissa x is the distance in the direction away from the multimode output waveguide 1 and the ordinate h is the etching depth.
For example, as shown in fig. 4a and 4b, the depth of the etched groove 312 of the arrayed waveguide 31 has a multi-step; for example, the depth of the etched groove 312 gradually increases in a step shape along the direction away from the multimode output waveguide 1, such as a plurality of different depths including a, C, D (the depth of a is greater than that of C, and the depth of C is greater than that of D), so that light in a high-order mode is gradually coupled into light in a low-order mode, and the optical loss is reduced.
In this embodiment, the depth of the etching groove 312 is gradually increased in a step shape, so that the difficulty of the etching process can be reduced.
In some alternative embodiments, the widths of the etching grooves 312 between the first waveguides of the plurality of first waveguides are uniformly distributed.
To further reduce optical losses, the present application provides a mode conversion device comprising a converter structure. Fig. 5 is a schematic structural diagram of a mode conversion device of a multimode output waveguide according to an embodiment of the present application, including a transformer structure. Specifically, the mode conversion device includes a transformer structure 32 shown in fig. 5, and the transformer structure 32 is disposed between the multimode output waveguide 1 and the arrayed waveguide 31.
As shown in fig. 5, the end face of the transformer structure 32 near the first end face of the multi-mode output waveguide is used to align the output end of the multi-mode output waveguide; a second end face of the transformer structure 32 remote from the multimode output waveguides for aligning with an end face of the input end of the array waveguide; the width of the second end face is larger than that of the first end face.
In this embodiment, in the case where the gap between the etched grooves between the first waveguides is constant, the coupling area between the low-order mode waveguide (first waveguide) and the multimode output waveguide can be increased by the converter structure 32, thereby reducing the optical loss.
Due to the large size difference between the multimode output waveguide 1 and the first waveguide 311, a large interface loss exists between the multimode output waveguide 1 and the first waveguide 311, thereby affecting optical loss. To further reduce optical losses, the present application provides a mode conversion device comprising an optical field converter. Fig. 6 is a schematic end-face structure diagram of an optical waveguide mode-spot conversion device according to an embodiment of the present application, including an optical field converter. Specifically, the optical field transformer 33 is disposed between the multimode output waveguide 1 and the arrayed waveguide 31; the optical field transformer 33 includes a tapered waveguide 331, a slab waveguide 332, and a tapered array waveguide 333. The tapered waveguide 331, the slab waveguide 332, and the tapered array waveguide 333 may be integrally formed by etching.
As shown in fig. 6, the tapered waveguide 331 is disposed on the slab waveguide 332 near a first end of the multimode output waveguide 1; the first planar end of the tapered waveguide 331 and the first end of the slab waveguide 332 are aligned with the output end of the multimode output waveguide 1;
the tapered array waveguide 333 is arranged on the slab waveguide 332 at a second end far away from the multimode output waveguide 1; the tapered waveguide 331 and the tapered arrayed waveguide 333 are disposed on the same side of the slab waveguide 332 (as shown in fig. 6, the tapered waveguide 331 and the tapered arrayed waveguide 333 are both disposed on the upper side of the slab waveguide 332); the tapered arrayed waveguide 333 includes a plurality of inverted tapered waveguides, and the second planar end of each inverted tapered waveguide in the plurality of inverted tapered waveguides is aligned with the input end of each first waveguide in the arrayed waveguide 31.
The end face structure of the first end of the multimode output waveguide 1 is aligned with the first planar end of the tapered waveguide 331 as shown by S1 in fig. 6; the cross-section of the first tip of the tapered waveguide 331 is shown as S2 (much less than S1) in FIG. 6; the cross-sectional view of the slab waveguide 332 is shown as S3 in fig. 6; the cross-sectional view of the second tip of the tapered arrayed waveguide 333 is schematically shown as S4 in fig. 6; the second planar end of the tapered arrayed waveguide 333 has a cross section aligned with the structure of the end face S5 (much larger than S4) on the side of the arrayed waveguide 31 close to the multimode output waveguide 1 as shown in fig. 6.
In the present embodiment, the output light of the multimode output waveguide 1 is gradually converted to the slab waveguide 332 by the tapered waveguide 331; and the light is gradually converted into light satisfying a low-order mode by the tapered arrayed waveguide 333, so that the interface loss between the multimode output waveguide 1 and the first waveguide 311 in the above-described embodiment can be eliminated, and the overall optical loss can be reduced.
In some alternative embodiments, the distance between the first tip of the tapered waveguide 331 and the second tip of the tapered array waveguide 333 satisfies a preset tip distance range.
In some alternative embodiments, the first tip width of the tapered waveguide 331 and the second tip width of the plurality of inversely tapered waveguides in the tapered array waveguide 333 satisfy a preset tip width range.
In this embodiment, the range of the tip widths of the tapered waveguide 331 and the tapered arrayed waveguide 333 is set so that the tapered waveguide 331 completely converts the output light of the multimode output waveguide 1 to the slab waveguide 332, and then the tapered arrayed waveguide 333 gradually converts the light from the slab waveguide 332 to the arrayed waveguide 31, so that the transmission loss of the mode light of each order from the multimode output waveguide 1 to the low-order mode waveguide 2 can be reduced.
In some alternative embodiments, the first extension length of the tapered waveguide 331 and the second extension length of the plurality of inversely tapered waveguides 333 satisfy a preset length range. Therefore, the transverse length of the optical field converter 33 can be reduced on the premise that the optical field meets the loss requirement, and the volume of the optical field converter 33 is further reduced.
In another aspect, the present application provides a high-speed detection system for a multimode output waveguide, the high-speed detection system comprising a plurality of high-speed detectors and the above-mentioned mode conversion device; an input end of each of the plurality of high speed detectors is connected to an output end of each of the plurality of first waveguides; each of the high-speed detectors is for detecting an electro-optic characteristic of each of the first waveguides.
In this embodiment, the mode conversion device converts the multimode output waveguide into the first waveguide of the low-order mode, and then the high-speed detector is aligned and coupled with the first waveguide through the low-order mode waveguide, so that compatibility is improved, and optical loss is reduced. And the high-speed detector detects the photoelectric characteristic of each first waveguide, and determines the electric performance of the multimode output waveguide based on the electric performance of the photoelectric characteristic of the first waveguide, so that the detection accuracy of the high-speed detector is improved.
In summary, the embodiment of the present application provides a mode conversion device of a multimode output waveguide and a high-speed detection system, where the mode conversion device includes a substrate and a waveguide layer; the waveguide layer is arranged on the substrate; the waveguide layer is provided with an array waveguide; the arrayed waveguide comprises a plurality of first waveguides side by side; the input end of the arrayed waveguide is used for aligning with the output end of the multimode output waveguide so as to receive the output light of the multimode output waveguide; the width of the etching groove between the first waveguides in the plurality of first waveguides is within a preset width range. The compatibility of the mode conversion device to high-order mode light can be improved; reducing high order mode optical losses.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Moreover, those of skill in the art will understand that although some embodiments described herein include some but not other features included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the application and form different embodiments. For example, in the claims, any of the claimed embodiments may be used in any combination.
Claims (9)
1. A mode conversion device for a multimode output waveguide, the mode conversion device comprising:
a substrate, a waveguide layer;
the waveguide layer is arranged on the substrate;
the waveguide layer is provided with an array waveguide; the arrayed waveguide comprises a plurality of first waveguides side by side; the input end of the arrayed waveguide is used for aligning with the output end of the multimode output waveguide so as to receive the output light of the multimode output waveguide; the width of the etching groove between the first waveguides in the plurality of first waveguides is within a preset width range; the depth of the etched groove between the first waveguides in the plurality of first waveguides is gradually increased along the direction far away from the multimode output waveguide.
2. The mode conversion device of claim 1, wherein the depth of the etched trench between each of the plurality of first waveguides is gradually increased in a step shape.
3. The mode conversion apparatus according to claim 1 or 2, characterized by further comprising:
a transducer structure disposed between the multimode output waveguide and the arrayed waveguide; a first end face of the transformer structure proximate the multimode output waveguide for aligning with an end face of the output end of the multimode output waveguide; a second end face of the transformer structure remote from the multimode output waveguides for aligning with an end face of the input end of the array waveguide; the width of the second end surface is greater than the width of the first end surface.
4. The mode conversion apparatus according to claim 1 or 2, characterized by further comprising:
an optical field transducer disposed between the multimode output waveguide and the array waveguide; the optical field converter comprises a conical waveguide, a flat waveguide and a conical array waveguide;
the tapered waveguide is arranged on the flat waveguide and close to the first end of the multimode output waveguide; a first planar end of the tapered waveguide and the first end of the slab waveguide are co-aligned with the output end of the multimode output waveguide;
the tapered array waveguide is arranged on the second end of the flat waveguide far away from the multimode output waveguide; the tapered waveguide and the tapered array waveguide are arranged on the same side of the flat waveguide; the tapered arrayed waveguide comprises a plurality of inverted-tapered waveguides, and the second planar end of each inverted-tapered waveguide in the plurality of inverted-tapered waveguides is aligned with the input end of each first waveguide in the arrayed waveguide.
5. The mode conversion device of claim 4, wherein the first tip width of the tapered waveguide and the second tip width of the plurality of inverted tapered waveguides satisfy a predetermined range of tip widths.
6. The mode conversion device of claim 1 or 2, wherein the number of first waveguides in the plurality of first waveguides is in the range of 2-6.
7. The mode conversion device according to claim 1 or 2, wherein the depth of the etched trench between the first waveguides of the plurality of first waveguides is in a range of 0.1 μm to 5.0 μm.
8. The mode conversion device of claim 1 or 2, wherein the widths of the etched trenches between each of the plurality of first waveguides are uniformly distributed.
9. A high speed detection system for a multimode output waveguide, the high speed detection system comprising a plurality of high speed detectors and a mode conversion device according to any one of claims 1 to 8; an input end of each of the plurality of high-speed detectors is connected to an output end of each of the plurality of first waveguides; each of the high-speed detectors is for detecting an electro-optic characteristic of each of the first waveguides.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040019684A (en) * | 2002-08-29 | 2004-03-06 | 삼성전자주식회사 | Fabrication method of planar light waveguides circuit with verical taper structure |
| JP2015114548A (en) * | 2013-12-12 | 2015-06-22 | 日本電信電話株式会社 | Optical multiplexer/demultiplexer and optical communication system |
| CN110646881A (en) * | 2019-09-18 | 2020-01-03 | 东南大学 | Three-dimensional optical waveguide transition access device and preparation method thereof |
| CN114791648A (en) * | 2022-05-17 | 2022-07-26 | 南京邮电大学 | High-pass low-filtration type filter and preparation method thereof |
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| JP4127975B2 (en) * | 2001-02-16 | 2008-07-30 | 富士通株式会社 | Optical waveguide device |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040019684A (en) * | 2002-08-29 | 2004-03-06 | 삼성전자주식회사 | Fabrication method of planar light waveguides circuit with verical taper structure |
| JP2015114548A (en) * | 2013-12-12 | 2015-06-22 | 日本電信電話株式会社 | Optical multiplexer/demultiplexer and optical communication system |
| CN110646881A (en) * | 2019-09-18 | 2020-01-03 | 东南大学 | Three-dimensional optical waveguide transition access device and preparation method thereof |
| CN114791648A (en) * | 2022-05-17 | 2022-07-26 | 南京邮电大学 | High-pass low-filtration type filter and preparation method thereof |
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