CN115112466A - Cooling structure and analytical instrument - Google Patents

Abstract

The invention relates to a cooling structure and an analytical instrument. The cooling structure comprises an input assembly, a shell and a cooling piece, wherein an air inlet channel is formed on the input assembly and used for exciting the sample gas so as to generate excited sample gas; an accommodating cavity is formed in the shell, the input assembly penetrates through the accommodating cavity, an exhaust port is formed in the shell, the air inlet channel is communicated with the exhaust port through the accommodating cavity, and the exhaust port is used for exhausting sample gas; the cooling piece is arranged in the accommodating cavity and sleeved on the input assembly, and the cooling piece can cool the excited sample gas in the gas inlet channel. The sample gas is in the gas inlet channel, generates excited state sample gas and generates a large amount of heat to enter the accommodating cavity through the gas inlet channel. The cooling member cools the input assembly. Avoid high temperature to melt the input assembly. And then reduce cooling structure's whole use cost, guarantee the cooling effect, further guarantee analytical instrument's normal use and working life.

Description

Cooling structure and analytical instruments

technical field

The invention relates to the technical field of detection and analysis equipment, in particular to a cooling structure and an analysis instrument.

Background technique

Inductively coupled plasma is a high-frequency electromagnetic field generated by a high-frequency current through an induction coil, so that the working gas forms plasma and presents a flame-like discharge. The flame temperature ranges from 6000K to 10000K. It is a charge discharge, not a chemical flame. The sample is vaporized, decomposed, atomized, and ionized after the sample is brought into the plasma torch by the carrier gas. It is a superior excitation light source and ion source.

Inductively coupled plasma is a superior excitation light source and ion source. After the sample is brought into the plasma torch by the carrier gas, evaporation, decomposition, atomization and ionization will occur. Inductively coupled plasma ionization sources are generally equipped with spectral detectors or mass spectrometry detectors. Both can analyze multiple samples simultaneously with high precision and accuracy, and have a wide range of applications. However, the current existing inductively coupled plasma cooling structure has a relatively high overall use cost, and there is secondary discharge interference in the cooling process, resulting in poor cooling effect.

SUMMARY OF THE INVENTION

Based on this, it is necessary to provide a cooling structure and an analytical instrument with a better cooling effect in view of the above problems.

A cooling structure includes an input assembly, a casing and a cooling member, an air inlet channel is formed on the input assembly, the air inlet channel is used to excite a sample gas to generate an excited state sample gas; the casing is formed with an air inlet channel. An accommodating cavity, the input assembly is penetrated in the accommodating cavity, an exhaust port is opened on the housing, and the air intake passage communicates with the exhaust port through the accommodating cavity, so The exhaust port is used to discharge the sample gas; the cooling element is arranged in the accommodating cavity and sleeved on the input assembly, and the cooling element can excite the excited state in the air inlet channel. Sample gas cooling.

In one embodiment, the cooling element is sheathed on the outer wall of the input assembly in a spiral shape.

In one embodiment, the casing is further provided with a first air intake hole, the first air intake hole and the exhaust port are spaced apart and communicated with the accommodating cavity. The air inlet hole is used to input cooling gas into the accommodating cavity.

In one embodiment, a liquid inlet and a liquid outlet are further opened on the casing, the liquid inlet is used for inputting cooling liquid, the liquid outlet is used for flowing out cooling liquid, and the liquid inlet and The liquid outlets are spaced apart, a cooling channel is formed in the cooling member, and two ends of the cooling channel are respectively communicated with the liquid inlet and the liquid outlet.

In one embodiment, when the liquid inlet and the liquid outlet are metal structures, the liquid outlet is used for connecting a ground wire.

In one embodiment, the cooling member is a metal structural member.

In one embodiment, the input assembly includes an auxiliary member and an input member, an auxiliary cavity is formed in the auxiliary member, the input member is penetrated in the auxiliary cavity, and the input member is formed in the input member. an air passage, the air inlet passage communicates with the accommodating cavity through the auxiliary cavity, and the cooling element is sleeved on the auxiliary element.

In one embodiment, the auxiliary member is provided with a second air intake hole, the second air intake hole is communicated with the auxiliary cavity, and the second air intake hole is used for inputting input into the auxiliary cavity cooling gas.

In one embodiment, one end of the auxiliary member is penetrated in the accommodating cavity, the other end of the auxiliary member is located outside the accommodating cavity, and the second air inlet hole is opened in the accommodating cavity. on the other end of the accessory.

In one embodiment, the auxiliary member is a tubular structure, and the diameter of one end of the tubular auxiliary member close to the exhaust port tends to increase toward the exhaust port.

An analytical instrument includes a body and the above-mentioned cooling structure, wherein an installation cavity is formed in the body; the cooling structure is installed in the installation cavity.

In the above cooling structure and analysis instrument, the sample gas is input into the air inlet channel to generate the excited state sample gas. In the process of generating a large amount of excited state sample gas, a large amount of heat will be generated and enter the accommodating cavity through the gas inlet channel. The cooling element in the accommodating cavity cools the input component and the excited state sample gas in the air inlet channel, so as to prevent the input component from being melted by high temperature. Thus, the overall use cost of the cooling structure is reduced, the cooling effect is ensured, and the normal use and working life of the analytical instrument are further ensured.

Description of drawings

The accompanying drawings constituting a part of the present application are used to provide further understanding of the present invention, and the exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention.

In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative effort.

FIG. 1 is a schematic structural diagram of a cooling structure in an embodiment.

The components in the figure are marked as follows:

10, cooling structure; 100, input assembly; 110, input piece; 111, input channel; 120, auxiliary piece; 121, auxiliary cavity; 122, second air inlet; 200, housing; 210, accommodating cavity; 220 230, the first air inlet; 240, the liquid inlet; 250, the liquid outlet; 300, the cooling part; 310, the cooling channel.

Detailed ways

In order to make the above objects, features and advantages of the present invention more clearly understood, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

Referring to FIG. 1 , an analytical instrument in an embodiment includes a body and a cooling structure 10 , and an installation cavity is formed in the body; the cooling structure 10 is installed in the installation cavity. The cooling structure 10 includes an input assembly 100, a housing 200 and a cooling member 300, the input assembly 100 is formed with an intake channel, and the intake channel is used to excite a sample gas to generate an excited state sample gas; the shell An accommodating cavity 210 is formed in the housing 200 , the input assembly 100 is penetrated in the accommodating cavity 210 , the housing 200 is provided with an exhaust port 220 , and the air intake passage passes through the accommodating cavity 210 communicated with the exhaust port 220, the exhaust port 220 is used to discharge the sample gas; the cooling element 300 is arranged in the accommodating cavity 210, and is sleeved on the input assembly 100, The cooling member 300 can cool the excited state sample gas in the air inlet channel.

The sample gas is input into the inlet channel to generate excited sample gas. In the process of generating a large amount of excited state sample gas, a large amount of heat will be generated and enter the accommodating cavity 210 through the air inlet channel. The cooling element 300 in the accommodating cavity 210 cools the input assembly 100 and the excited state sample gas in the air inlet channel, so as to prevent the input assembly 100 from being melted by high temperature. Further, the overall use cost of the cooling structure 10 is reduced, the cooling effect is ensured, and the normal use and working life of the analytical instrument are further ensured.

Specifically, there is a plasma moment flame in the air inlet channel, which can vaporize, decompose, atomize and ionize the sample gas, so as to realize the excited state of the sample gas.

In one embodiment, the cooling member 300 is sheathed on the outer wall of the input assembly 100 in a spiral shape. The shape of the cooling member 300 is helical, and the helical cooling member 300 is sleeved on the outer wall of the input assembly 100 , or the input assembly 100 can pass through the helical cooling member 300 . The helical cooling member 300 can increase the contact area with the outer wall of the input assembly 100 , and at the same time ensures that the input assembly 100 can be cooled in an all-round way, so as to ensure uniform cooling. The cooling effect of the cooling element 300 on the input assembly 100 is further improved. Thereby improving the normal use and working life of the analytical instrument.

In one embodiment, the housing 200 is further provided with a first air intake hole 230 , the first air intake hole 230 and the exhaust port 220 are spaced apart and communicated with the accommodating cavity 210 , the first air inlet hole 230 is used to input cooling gas into the accommodating cavity 210 . Therefore, the cooling gas can further cool the input assembly 100 in the accommodating cavity 210, further ensuring the cooling effect of the cooling structure 10, and improving the normal use and working life of the analytical instrument. Specifically, the cooling gas may be cooling argon gas, and the cooling argon gas enters the accommodating cavity 210 from the first air inlet 230 to provide ionized gas and play a cooling role. The input assembly 100 is protected from being melted by high temperature.

In one embodiment, the casing 200 is further provided with a liquid inlet 240 and a liquid outlet 250, the liquid inlet 240 is used to input cooling liquid, and the liquid outlet 250 is used to flow out the cooling liquid, so The liquid inlet 240 and the liquid outlet 250 are spaced apart, and a cooling channel 310 is formed in the cooling member 300, and two ends of the cooling channel 310 are respectively connected to the liquid inlet 240 and the liquid outlet 250. connected. The cooling liquid is input from the liquid inlet 240 and discharged from the liquid outlet 250 through the cooling channel 310 . The cooling liquid can perform heat exchange with the input assembly 100 in the cooling channel 310, and then the heat generated by the input assembly 100 can be taken away through the fluidity of the cooling liquid to ensure the cooling effect. In this embodiment, the height of the liquid inlet 240 in the vertical direction is higher than the height of the liquid outlet 250 in the vertical direction. The cooling liquid accelerates the flow rate under the action of gravity, which is convenient for quick replacement of the cooling liquid to take away most of the heat and ensure the cooling effect.

At the same time, in conjunction with the helical cooling member 300, the helical structure can extend the circulation path of the cooling liquid, so as to ensure that the cooling liquid has sufficient time for sufficient heat exchange. The shape of the cooling member 300 may also be other shapes, as long as it can be sleeved on the input assembly 100 and can ensure the heat exchange efficiency between the cooling liquid and the input assembly 100 .

In one embodiment, the number of cooling members 300 is at least two, and at least two cooling members 300 are sleeved on the input assembly 100 . At least two cooling elements 300 are interlaced with each other. They can also be arranged in parallel or stacked to further ensure the cooling effect of the cooling structure 10 . If at least two cooling elements 300 are intertwined with each other, a net-shaped cooling element 300 can be formed.

In one embodiment, the height of the liquid inlet 240 in the vertical direction is lower than or equal to the height of the liquid outlet 250 in the vertical direction. With this arrangement, the flow rate of the cooling liquid in the cooling channel 310 can be reduced, so as to ensure that the cooling liquid can sufficiently exchange heat with the input assembly 100 in the cooling channel 310 . The cooling effect of the cooling member 300 is further ensured.

The cooling liquid is used in conjunction with the cooling gas to further ensure the reliability and practicability of the cooling structure 10 . The cooling element 300 is used to cool the input assembly 100 through the cooling liquid. Using the cooling liquid can reduce the use of cooling argon gas, reduce the flow requirement of the cooling argon gas, and further reduce the use cost of the cooling argon gas.

In one embodiment, when the liquid inlet 240 and the liquid outlet 250 are metal structures, the liquid outlet 250 is used for connecting a ground wire. Thereby, it can be used to shield the discharge of electric charges and improve the safety and reliability of the cooling structure 10 .

In other embodiments, the liquid inlet 240 and the liquid outlet 250 may also be of a quartz structure or a ceramic structure.

In one embodiment, the cooling member 300 is a metal structural member. Further, the cooling member 300 can be a hollow metal copper tube, and the copper tube has the characteristics of good electrical conductivity and thermal conductivity, and is the main material of the conductive fittings of electronic products and the heat dissipation fittings. The copper tube has strong corrosion resistance, is not easy to oxidize, and is not easy to chemically react with some liquid substances, and is easy to bend and shape. Alternatively, the cooling member 300 may also be other metal structural members that can facilitate heat exchange. As long as it can not be corroded by the coolant, and at the same time ensure the heat exchange rate.

In one embodiment, the input assembly 100 includes an auxiliary member 120 and an input member 110, an auxiliary cavity 121 is formed in the auxiliary member 120, the input member 110 is passed through the auxiliary cavity 121, and the input The air inlet passage is formed in the cooling member 110 , the air inlet passage communicates with the accommodating chamber 210 through the auxiliary chamber 121 , and the cooling member 300 is sleeved on the auxiliary member 120 . Further, the auxiliary member 120 is provided with a second air intake hole 122, the second air intake hole 122 is communicated with the auxiliary cavity 121, and the second air intake hole 122 is used for connecting to the auxiliary cavity. Cooling gas is input into 121.

Input 110 enables vaporization, decomposition, atomization and ionization of the sample gas to achieve excited states of the sample gas. The cooling gas is transported into the auxiliary cavity 121, and the heat generated on the input member 110 can be exchanged by the cooling gas to ensure that the structure of the input member 110 is stable and will not be melted by high temperature. At the same time, the cooling member 300 is sleeved on the auxiliary member 120. The cooling member 300 can further cool the auxiliary member 120 to ensure the structural stability of the auxiliary member 120 . The cooling gas in the auxiliary cavity 121 can also be indirectly heat exchanged to ensure the temperature of the cooling gas and the heat exchange efficiency. Using the cooling member 300 to cool the cooling gas can reduce the use of the cooling argon gas, reduce the flow rate requirement of the cooling argon gas, and further reduce the use cost of the cooling argon gas. At the same time, cooling gas is also input into the accommodating cavity 210 through the first air inlet hole 230 , and the accommodating cavity 210 is communicated with the auxiliary cavity 121 , so that there is a sufficient amount of cooling gas in the entire cooling structure 10 to ensure that the input member 110 heat exchange. However, after the cooling gas in the auxiliary cavity 121 is heated up by heat exchange, in addition to the cooling element 300 being able to cool the cooling gas in the auxiliary cavity 121, the cooling gas in the accommodating cavity 210 can also exchange the cooling gas in the auxiliary cavity 121 with the cooling gas in the accommodating cavity 210. . This further ensures the cooling effect on the input member 110 and prevents the input member 110 from being melted due to excessive temperature. Guarantee the working instructions and efficiency of the analytical instruments. It should be noted that the cooling member 300 is disposed in the accommodating cavity 210 , and the cooling member 300 can also perform heat exchange with the cooling gas in the accommodating cavity 210 . The practicality and reliability of the cooling structure 10 are further improved.

In one embodiment, one end of the auxiliary member 120 is penetrated in the accommodating cavity 210 , the other end of the auxiliary member 120 is located outside the accommodating cavity 210 , and the second air inlet hole 122 is opened on the other end of the auxiliary member 120 . Therefore, when the cooling gas is introduced into the second air inlet hole 122, it is not easily affected by the heat generated by the input member 110, so as to ensure the quality of the cooling gas. At the same time, it is also convenient for workers to add cooling gas through the second air inlet 122 to perform installation and maintenance operations. The practicality and structural rationality of the cooling structure 10 are further improved.

In one embodiment, the auxiliary member 120 is a tubular structure, and the diameter of one end of the tubular auxiliary member 120 close to the exhaust port 220 tends to increase toward the exhaust port 220 . The inner diameter of the auxiliary cavity 121 tends to increase toward the direction of the exhaust port 220 . Specifically, one end of the auxiliary member 120 close to the exhaust port 220 is trumpet-shaped. The communication efficiency between the auxiliary cavity 121 and the accommodating cavity 210 is improved, and the sample gas in the excited state can be fully flowed out to the exhaust port 220, thereby ensuring the working efficiency of the analytical instrument.

In one embodiment, the helical cooling member 300 is sleeved on the auxiliary member 120 , and the inner diameter of the cooling member 300 increases as the diameter of the auxiliary member 120 increases. It is ensured that the cooling member 300 can effectively cool the auxiliary member 120 .

In one embodiment, a portion of the input member 110 is inserted through the auxiliary member 120 , and a portion of the auxiliary member 120 is inserted through the housing 200 . The first air inlet 230 and the liquid inlet 240 are spaced apart and located on the same side of the casing 200 . When the auxiliary member 120 is inserted into the housing 200 , the second air inlet 122 is located on the same side as the first air inlet 230 and the liquid inlet 240 . Therefore, it is convenient for the staff to operate, inspect and maintain later. The liquid outlet 250 is located on the side of the housing 200 opposite to the liquid inlet 240 . The exhaust port 220 is located between the liquid inlet port 240 and the liquid outlet port 250 .

Inductively coupled plasma is a high-frequency electromagnetic field generated by a high-frequency current through an induction coil, so that the working gas forms plasma and presents a flame-like discharge. The flame temperature ranges from 6000K to 10000K. It is a charge discharge, not a chemical flame. The sample is vaporized, decomposed, atomized, and ionized after the sample is brought into the plasma torch by the carrier gas. It is a superior excitation light source and ion source.

Inductively coupled plasma is a superior excitation light source and ion source. After the sample is brought into the plasma torch by the carrier gas, evaporation, decomposition, atomization and ionization will occur. Inductively coupled plasma ionization sources are generally equipped with spectral detectors or mass spectrometry detectors. Both can analyze multiple samples simultaneously with high precision and accuracy, and have a wide range of applications. Due to the different detectors, these two detection methods are somewhat different in use: Inductively coupled plasma spectrometer has high sensitivity, low detection limit, wide dynamic linear range and simultaneous analysis of multiple elements, usually used for trace and partial constants Qualitative and quantitative analysis of elements is also applied in a wide range of industries; inductively coupled plasma mass spectrometers have qualitative and quantitative analysis capabilities for elements, isotopes, and speciation analysis, and the lower detection limit level is better than inductively coupled plasma spectrometers. Because of its convenience, speed, high precision and high accuracy, it has a wide range of applications in formula analysis.

There are four main uses of inductively coupled plasma: for plasma spectroscopy diagnosis, inductively coupled plasma mass spectrometry technology, for reactive ion etching, and vapor deposition thin film technology. Inductively coupled plasma is used as excitation light source for inductively coupled plasma spectrometer, which can be used for qualitative and quantitative analysis of trace and some constant elements. Inductively coupled plasma is used as an ion source for inductively coupled plasma mass spectrometers, which can be used for qualitative and quantitative analysis of elements, isotopes, and species. Inductively coupled plasma is used for refinement etching as well as compound semiconductor etching. Inductively coupled plasma is used in chemical vapor deposition thin film technology.

The cooling structure 10 in the above embodiment is designed by the hollow helical cooling member 300, and can be applied to inductively coupled plasma spectrometers, inductively coupled plasma mass spectrometers, reactive ion etching, and vapor deposition thin film related fields. Cooling liquid can be added to the hollow part of the cooling member 300 to achieve cooling effect, and the flow rate of cooling gas, such as argon gas, can also be reduced correspondingly, which reduces the cost of using argon gas. In mass spectrometry applications, the helical design can also be replaced by metal, which can replace the current interference ion shielding design scheme and greatly reduce the design process and hardware cost.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " Back, Left, Right, Vertical, Horizontal, Top, Bottom, Inner, Outer, Clockwise, Counterclockwise, Axial , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the indicated device or Elements must have a particular orientation, be constructed and operate in a particular orientation and are therefore not to be construed as limitations of the invention.

In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature delimited with "first", "second" may expressly or implicitly include at least one of that feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise expressly and specifically defined.

In the present invention, unless otherwise expressly specified and limited, the terms "installed", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between the two elements, unless otherwise specified limit. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

In the present invention, unless otherwise expressly specified and defined, a first feature "on" or "under" a second feature may be in direct conflict between the first and second features, or the first and second features may be indirectly through an intermediary conflict. Also, the first feature being "above", "over" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is level higher than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature has a lower level than the second feature.

It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or an intervening element may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for the purpose of illustration only and do not represent the only embodiment.

The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity, all possible combinations of the technical features in the above-described embodiments are not described. However, as long as there is no contradiction between the combinations of these technical features, All should be regarded as the scope described in this specification.

The above-mentioned embodiments only represent several embodiments of the present invention, and the descriptions thereof are specific and detailed, but should not be construed as a limitation on the scope of the invention patent. It should be pointed out that for those skilled in the art, without departing from the concept of the present invention, several modifications and improvements can be made, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims (10)

1. A cooling structure, wherein the cooling structure comprises: an input assembly, an air inlet channel is formed on the input assembly, and the air inlet channel is used to excite the sample gas to generate the excited state sample gas; A housing, an accommodating cavity is formed in the housing, the input assembly is penetrated in the accommodating cavity, an exhaust port is opened on the housing, and the air intake passage communicates with the accommodating cavity through the accommodating cavity. the exhaust port is in communication with the exhaust port for exhausting the sample gas; and A cooling element is provided in the accommodating cavity and sleeved on the input assembly, and the cooling element can cool the excited state sample gas in the air inlet channel. 2 . The cooling structure according to claim 1 , wherein the cooling element is sheathed on the outer wall of the input assembly in a spiral shape. 3 . 3 . The cooling structure according to claim 1 , wherein a first air intake hole is further opened on the casing, and the first air intake hole and the exhaust port are spaced apart and connected to the The accommodating cavities are communicated with each other, and the first air inlet hole is used to input cooling gas into the accommodating cavity. 4. The cooling structure according to any one of claims 1-3, wherein a liquid inlet and a liquid outlet are further opened on the casing, and the liquid inlet is used for inputting cooling liquid, so The liquid outlet is used to flow out the cooling liquid, the liquid inlet and the liquid outlet are spaced apart, a cooling channel is formed in the cooling member, and the two ends of the cooling channel are respectively connected with the liquid inlet and the liquid outlet. The liquid outlet is connected. 5. The cooling structure according to claim 4, wherein when the liquid inlet and the liquid outlet are metal structures, the liquid outlet is used to connect a ground wire; and/or The cooling member is a metal structural member. 6. The cooling structure according to any one of claims 1-3, wherein the input assembly comprises an auxiliary member and an input member, an auxiliary cavity is formed in the auxiliary member, and the input member penetrates through the In the auxiliary cavity, the input member is formed with the air intake channel, the air intake channel is communicated with the accommodating cavity through the auxiliary cavity, and the cooling member is sleeved on the auxiliary member . 7 . The cooling structure according to claim 6 , wherein the auxiliary member is provided with a second air intake hole, the second air intake hole is communicated with the auxiliary cavity, and the second air intake hole is open. 8 . The holes are used for feeding cooling gas into the auxiliary chamber. 8 . The cooling structure according to claim 7 , wherein one end of the auxiliary member is penetrated in the accommodating cavity, and the other end of the auxiliary member is located outside the accommodating cavity, so the The second air inlet hole is opened on the other end of the auxiliary piece. 9 . The cooling structure according to claim 8 , wherein the auxiliary member is a tubular structure, and the diameter of one end of the tubular auxiliary member close to the exhaust port tends toward the exhaust port. 10 . increase. 10. An analytical instrument, characterized in that the analytical instrument comprises: a fuselage having a mounting cavity formed therein; and The cooling structure of any one of claims 1-9, the cooling structure is mounted in the mounting cavity.

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