CN115096816A - Condensation sensor based on deep ultraviolet optical detection technology and working method thereof - Google Patents
Condensation sensor based on deep ultraviolet optical detection technology and working method thereof Download PDFInfo
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- CN115096816A CN115096816A CN202210713846.4A CN202210713846A CN115096816A CN 115096816 A CN115096816 A CN 115096816A CN 202210713846 A CN202210713846 A CN 202210713846A CN 115096816 A CN115096816 A CN 115096816A
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- ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
Abstract
The embodiment of the application provides a condensation sensor based on a deep ultraviolet optical detection technology and a working method thereof. The condensation sensor comprises a control unit, a deep ultraviolet light source, a deep ultraviolet photoelectric converter and deep ultraviolet transmitting glass; the control unit is electrically connected with the deep ultraviolet light source; the deep ultraviolet light source is provided with a first light window, and the deep ultraviolet photoelectric converter is provided with a second light window; the first light window and the second light window are arranged on the same side of the deep ultraviolet transmitting glass at intervals; the deep ultraviolet light source can emit ultraviolet light and irradiate the deep ultraviolet transmitting glass through the first light window, the deep ultraviolet transmitting glass can reflect the ultraviolet light, and the reflected light irradiates the deep ultraviolet photoelectric converter through the second light window; the deep ultraviolet photoelectric converter is electrically connected with a signal end of the control unit and sends a first electric signal representing the intensity of the reflected light to the control unit; the control unit judges the condensation state according to the first electric signal. The dew condensation sensor can accurately and timely detect the dew condensation state.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of a condensation sensor, in particular to the technical field of a condensation sensor based on a deep ultraviolet optical detection technology.
[ background ] A method for producing a semiconductor device
The traditional dewing sensor based on the resistance and capacitance principle has low precision and slow response, and cannot meet the requirement of a system for accurately and timely detecting dewing in many application scenes. For example, in a low-temperature and high-humidity environment, the optical system lens needs to be prevented from dewing by electric heating, and at this time, the dewing sensor performs closed-loop control on the electric heating unit; if the precision of the dew condensation sensor is not high enough and the response is not fast enough, the dew condensation removing effect of electric heating is influenced definitely, and the waste of electric energy is also caused.
[ summary of the invention ]
In view of this, the embodiment of the application provides a condensation sensor based on a deep ultraviolet optical detection technology and a working method thereof, and the condensation sensor utilizes an optical principle to realize reflective condensation detection and has the advantages of high detection precision and high response speed.
In order to achieve the above object, the embodiments of the present application provide the following technical solutions:
a dew condensation sensor based on a deep ultraviolet optical detection technology comprises a control unit, a deep ultraviolet light source, a deep ultraviolet photoelectric converter and deep ultraviolet transmitting glass; the control unit is electrically connected with the deep ultraviolet light source and provides a light-emitting power supply for the deep ultraviolet light source; the deep ultraviolet light source is provided with a first light window, and the deep ultraviolet photoelectric converter is provided with a second light window; the first light window and the second light window are arranged on the same side of the deep ultraviolet transmitting glass at intervals; the deep ultraviolet light source can emit ultraviolet light and irradiate the deep ultraviolet transmitting glass through the first light window, the deep ultraviolet transmitting glass can reflect the ultraviolet light, and the reflected light irradiates the deep ultraviolet photoelectric converter through the second light window; the deep ultraviolet photoelectric converter is electrically connected with a signal end of the control unit and sends a first electric signal representing the intensity of the reflected light to the control unit; the control unit judges the condensation state according to the first electric signal.
In one embodiment, the deep ultraviolet light source comprises a deep ultraviolet light emitting diode.
In one embodiment, the light emitted by the deep ultraviolet light emitting diode is ultraviolet light with the wavelength of 200-280 nm.
In one embodiment, the deep ultraviolet photoelectric converter includes a deep ultraviolet photodiode.
In one embodiment, the control unit includes a photocurrent determining module, which includes a sampling circuit, an amplifying circuit and a processing circuit, wherein the sampling circuit is electrically connected to the deep ultraviolet photoelectric converter and is configured to sample the first electrical signal to obtain a sampling signal; the sampling circuit is also electrically connected with the input end of the amplifying circuit, the sampling signal is sent to the amplifying circuit, and the amplifying circuit amplifies the sampling signal to obtain a second electric signal; the amplifying circuit is electrically connected with the processing circuit and sends the second electric signal to the processing circuit, and the processing circuit judges the condensation state according to the second electric signal.
In one embodiment, the deep ultraviolet transparent glass is composed of quartz glass.
The embodiment of the application further provides a working method of the condensation sensor, which is suitable for the condensation sensor based on the deep ultraviolet optical detection technology, and the working method comprises the following steps:
the control unit of the dew condensation sensor provides power to the deep ultraviolet light source of the dew condensation sensor;
the deep ultraviolet light source emits ultraviolet light, and the ultraviolet light irradiates the first side surface of the deep ultraviolet transmitting glass of the condensation sensor through the first light window;
the deep ultraviolet transmitting glass reflects the ultraviolet light, and the reflected ultraviolet light reaches a deep ultraviolet photoelectric converter of the condensation sensor through a second optical window;
the deep ultraviolet photoelectric converter converts the reflected ultraviolet light into a photocurrent signal and transmits the photocurrent signal to the control unit of the condensation sensor through a signal wire;
and the control unit judges the condensation state according to the magnitude of the photocurrent signal.
In one embodiment, the control unit determining the dew condensation state according to the magnitude of the photocurrent signal includes the following sub-steps:
acquiring a reference photocurrent signal value; the reference photocurrent signal is output by the deep ultraviolet photoelectric converter under the state of no dew condensation;
acquiring a detection photocurrent signal value; the detection photocurrent signal is output by the deep ultraviolet photoelectric converter when the dew condensation sensor works;
and judging the size of the detection photocurrent signal value and the reference photocurrent signal value, and if the detection photocurrent signal value is smaller than the reference photocurrent signal value, judging that condensation occurs.
In one embodiment, the determining the dew condensation state by the control unit according to the magnitude of the photocurrent signal further includes the substeps of: calculating the difference value of the reference photocurrent signal value and the detection photocurrent signal value; the larger the difference, the more severe the condensation.
The condensation sensor based on the deep ultraviolet optical detection technology comprises a control unit, a deep ultraviolet light source, a deep ultraviolet photoelectric converter and deep ultraviolet transmitting glass; the control unit is electrically connected with the deep ultraviolet light source, provides a light-emitting power supply for the deep ultraviolet light source and controls the deep ultraviolet light source to emit ultraviolet light; the deep ultraviolet light source is provided with a first light window, and the deep ultraviolet photoelectric converter is provided with a second light window; the first light window and the second light window are arranged on the same side of the deep ultraviolet transmitting glass at intervals; ultraviolet light emitted by the deep ultraviolet light source can be irradiated to the deep ultraviolet transmitting glass through the first light window, the deep ultraviolet transmitting glass can reflect the ultraviolet light, and the reflected light is irradiated to the deep ultraviolet photoelectric converter through the second light window; the deep ultraviolet photoelectric converter is electrically connected with a signal end of the control unit and sends a first electric signal representing the intensity of the reflected light to the control unit; the control unit judges the condensation state according to the first electric signal. The reflectivity of the deep ultraviolet glass to ultraviolet light in a condensation state is different from the reflectivity of the deep ultraviolet glass to ultraviolet light in a non-condensation state, so that whether condensation occurs or not can be judged according to the magnitude of the first electric signal.
The embodiment of the application also provides a working method of the dew condensation sensor, and the dew condensation sensor also has the advantages of high dew condensation detection precision and quick response.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive labor.
Fig. 1 is a schematic view of a dew sensor provided in an embodiment of the present application;
fig. 2 is a schematic optical path diagram of a dew condensation sensor provided in an embodiment of the present application under a condition of no dew condensation;
fig. 3 is a schematic optical path diagram of the dew condensation sensor provided in an embodiment of the present application under a dew condensation condition;
fig. 4 is a flowchart of an operating method of the dew condensation sensor according to the present application.
[ detailed description ] embodiments
In order to better understand the technical scheme of the invention, the following detailed description of the embodiments of the invention is made with reference to the accompanying drawings. It should be understood that the described embodiments are only some embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the examples of the present invention and the appended claims, the singular forms "a," "an," "the," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should be understood that the term "and/or" as used herein is merely a relationship that describes an associated object, meaning that three relationships may exist, e.g., A and/or B, may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship. In the following description, the appearances of the indicating orientation or positional relationship, such as the terms "inner", "outer", "upper", "lower", "left", "right", etc., are only for convenience in describing the embodiments and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the application.
The deep ultraviolet light in the sunlight can be absorbed and blocked by an ozone layer when passing through the atmosphere, so that the ground can not receive the deep ultraviolet light. The deep ultraviolet light is used for detection, so that the complex influence of natural light can be avoided, the interference is reduced, the error is reduced, and the detection precision is improved, so that an ideal detection effect is obtained. If the optical principle of deep ultraviolet light can be reasonably utilized to realize the reflective condensation detection, the purpose of accurately and timely detecting the condensation condition can be achieved.
Based on this, the embodiment of the present application provides a dew condensation sensor based on a deep ultraviolet optical detection technology, as shown in fig. 1, including a control unit 11, a deep ultraviolet light source 12, a deep ultraviolet photoelectric converter 13, and a deep ultraviolet transparent glass 14. The control unit 11 is electrically connected to the deep ultraviolet light source 12 to provide a light emitting power source for the deep ultraviolet light source 12, specifically, the control unit 11 may be electrically connected to the deep ultraviolet light source 12 through a power line to provide the light emitting power source for the deep ultraviolet light source 12, and the deep ultraviolet light source 12 may reflect ultraviolet light after receiving the light emitting source. The deep ultraviolet light source 12 has a first optical window 121, and the deep ultraviolet photoelectric converter 13 has a second optical window 131. The first light window 121 and the second light window 131 are arranged on the same side of the deep ultraviolet transmitting glass at intervals; as shown in fig. 2 or 3, the deep ultraviolet light source 12 can emit ultraviolet light and irradiate the outer interface of the deep ultraviolet transmitting glass 14 through the first optical window 121, and the outer interface of the deep ultraviolet transmitting glass 14 can reflect the ultraviolet light and irradiate the reflected light to the deep ultraviolet photoelectric converter 13 through the second optical window 131. As shown in fig. 1, the deep ultraviolet photoelectric converter 13 is electrically connected to a signal end of the control unit 11, and the deep ultraviolet photoelectric converter 13 sends a first electrical signal representing the intensity of the reflected light to the control unit 11; the control unit 11 determines the dew condensation state based on the first electric signal. The dew condensation sensor provided by the embodiment breaks through the problems of low precision, slow response and the like of the traditional dew condensation sensor based on the resistance and capacitance principles, and realizes the accurate and timely detection of the dew condensation condition.
Further, in one embodiment, the deep ultraviolet light source 12 includes a deep ultraviolet light emitting diode. The light emitted by the deep ultraviolet light emitting diode is ultraviolet light with the wavelength of 200-280 nm. The deep ultraviolet photoelectric converter 13 includes a deep ultraviolet photodiode capable of converting received deep ultraviolet light into photocurrent.
In one embodiment, in order to further improve the detection accuracy, the control unit 11 is further configured to include a photocurrent determining module, where the photocurrent determining module includes a sampling circuit, an amplifying circuit, and a processing circuit; the sampling circuit is electrically connected with the deep ultraviolet photoelectric converter and is used for sampling the first electric signal to obtain a sampling signal; the sampling circuit is also electrically connected with the input end of the amplifying circuit, and sends the sampling signal to the amplifying circuit, and the amplifying circuit amplifies the sampling signal to obtain a second electric signal; the amplifying circuit is electrically connected with the processing circuit and sends the second electric signal to the processing circuit, and the processing circuit judges the condensation state according to the second electric signal. Specifically, the sampling circuit may include a sampling resistor, the sampling resistor is electrically connected to an output end of the deep ultraviolet photoelectric converter, and samples a first electrical signal output by the sampling resistor to obtain a sampling signal; the amplifying circuit comprises an operational amplifying circuit, such as a differential amplifying circuit, the operational amplifying circuit is electrically connected with the sampling signal output end, a second electric signal is obtained after the sampling signal is amplified, and then the second electric signal is output to the processing unit; the processing unit comprises a processing chip and can compare the second electric signal with a preset value or a preset table to judge whether the condensation occurs. The working principle of the dew condensation sensor provided by the application is explained as follows:
as shown in fig. 2, when there is no condensation, air exists outside the outer interface of the deep ultraviolet transparent glass 14, the interface has a reflectance of R1, the photocurrent output by the deep ultraviolet photoelectric converter 13 is I1, and I1 is the first electrical signal representing the intensity of the reflected light from the deep ultraviolet transparent glass 14. As shown in fig. 3, when dew condensation occurs, the outer interface of the deep ultraviolet transparent glass 14 is a water film formed by dew condensation, and at this time, the reflectance of the interface is R2, the photocurrent output by the deep ultraviolet photoelectric converter 13 is I2, and I2 is the first electrical signal representing the intensity of the reflected light of the deep ultraviolet transparent glass 14. It is clear from the definition of optical reflectivity that R2 is significantly smaller than R1.
From this, it is found that the reflectance is smaller in the case of condensation than in the case of no condensation, the reflected energy is reduced, and the photocurrent I2 obtained by the photoelectric converter is smaller, that is: i1 > I2.
The difference between the two is that I is 1 -I 2 The control means determines dew condensation, and determines that dew condensation starts when Δ I exceeds a predetermined threshold, and the larger Δ I is, dew condensation is considered to be more serious.
In the above embodiment, the deep ultraviolet transmitting glass 14 may be composed of quartz glass, which still has a high spectral transmittance in the deep ultraviolet region.
Compared with the prior art, the dew condensation sensor based on the deep ultraviolet optical detection technology has the following advantages:
first, the invention realizes the reflective dew condensation detection by using the optical principle, and compared with the traditional dew condensation sensor based on the resistance and capacitance principles, the invention has high precision and quick response.
Secondly, the invention uses the deep ultraviolet light for detection, and the light source, the converter and the transparent glass of the optical system adopt devices in the deep ultraviolet wave band, thereby effectively avoiding the interference of sunlight.
Based on the above-mentioned condensation sensor based on deep ultraviolet optical detection technology, the embodiment of the present application further provides a working method of the condensation sensor, as shown in fig. 4, including the following steps:
s1: the control unit provides power to the deep ultraviolet light source of the dew sensor.
S2: the deep ultraviolet light source emits ultraviolet light, and the ultraviolet light irradiates the outer side interface of the deep ultraviolet transmitting glass of the condensation sensor through the first light window; the deep ultraviolet light source can emit ultraviolet light after obtaining the light-emitting light source provided by the control unit.
S3: the deep ultraviolet transmitting glass reflects the ultraviolet light, and the reflected ultraviolet light reaches the deep ultraviolet photoelectric converter of the condensation sensor through the second optical window.
S4: the deep ultraviolet photoelectric converter converts the reflected ultraviolet light into a photocurrent signal and transmits the photocurrent signal to a control unit of the condensation sensor through a signal wire.
S5: and the control unit judges the condensation state according to the magnitude of the photocurrent signal.
Further, in one embodiment, step S5: the control unit judges the dew state according to the magnitude of the photocurrent signal and comprises the following substeps:
s51: acquiring a reference photocurrent signal value; the reference photocurrent signal is output by the deep ultraviolet photoelectric converter under the state of no dew formation;
s52; acquiring a detection photocurrent signal value; the detection photocurrent signal is output by the deep ultraviolet photoelectric converter when the dew condensation sensor works;
s53: and judging the magnitude of the detection photocurrent signal value and the reference photocurrent signal value, and if the detection photocurrent signal value is smaller than the reference photocurrent signal value, judging that the condensation is formed. And if the detection photocurrent signal value is equal to the reference photocurrent signal value, indicating that condensation does not occur in the current state.
Further, in order to realize the judgment on the severity of dew, step S5 further includes the sub-steps of:
s54: calculating the difference value of the reference photocurrent signal value and the detection photocurrent signal value; the larger the difference, the more severe the condensation.
In the description of the specification, reference to the description of "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the specification. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present specification, "a plurality" means at least two, e.g., two, three, etc., unless explicitly defined otherwise.
The above description is only a preferred embodiment of the present disclosure, and should not be taken as limiting the present disclosure, and any modifications, equivalents, improvements, etc. made within the spirit and principle of the present disclosure should be included in the scope of the present disclosure.
Claims (9)
1. A dew condensation sensor based on a deep ultraviolet optical detection technology is characterized by comprising a control unit, a deep ultraviolet light source, a deep ultraviolet photoelectric converter and deep ultraviolet transmitting glass; the control unit is electrically connected with the deep ultraviolet light source and provides a light-emitting power supply for the deep ultraviolet light source; the deep ultraviolet light source is provided with a first light window, and the deep ultraviolet photoelectric converter is provided with a second light window; the first light window and the second light window are arranged on the same side of the deep ultraviolet transmitting glass at intervals; the deep ultraviolet light source can emit ultraviolet light and irradiate the deep ultraviolet transmitting glass through the first light window, the deep ultraviolet transmitting glass can reflect the ultraviolet light, and the reflected light irradiates the deep ultraviolet photoelectric converter through the second light window; the deep ultraviolet photoelectric converter is electrically connected with a signal end of the control unit and sends a first electric signal representing the intensity of the reflected light to the control unit; the control unit judges the condensation state according to the first electric signal.
2. The dew sensor based on deep ultraviolet optical detection technology as claimed in claim 1, wherein the deep ultraviolet light source comprises a deep ultraviolet light emitting diode.
3. The moisture condensation sensor based on the deep ultraviolet optical detection technology as claimed in claim 2, wherein the light emitted from the deep ultraviolet light emitting diode is ultraviolet light with a wavelength of 200 and 280 nm.
4. The deep ultraviolet optical detection technology based dew sensor of claim 1, wherein the deep ultraviolet photoelectric converter comprises a deep ultraviolet photodiode.
5. The condensation sensor based on the deep ultraviolet optical detection technology as claimed in claim 4, wherein the control unit comprises a photocurrent judgment module, the photocurrent judgment module comprises a sampling circuit, an amplifying circuit and a processing circuit, the sampling circuit is electrically connected with the deep ultraviolet photoelectric converter and is used for sampling the first electrical signal to obtain a sampling signal; the sampling circuit is also electrically connected with the input end of the amplifying circuit, the sampling signal is sent to the amplifying circuit, and the amplifying circuit amplifies the sampling signal to obtain a second electric signal; the amplifying circuit is electrically connected with the processing circuit and sends the second electric signal to the processing circuit, and the processing circuit judges the condensation state according to the second electric signal.
6. The dew condensation sensor based on deep ultraviolet optical detection technology according to any one of claims 1 to 5, characterized in that the deep ultraviolet transparent glass consists of quartz glass.
7. A method for operating a dew sensor, which is suitable for use in a dew sensor based on deep ultraviolet optical detection technology as claimed in any one of claims 1 to 6, the method comprising the steps of:
the control unit of the dew condensation sensor provides power to the deep ultraviolet light source of the dew condensation sensor;
the deep ultraviolet light source emits ultraviolet light, and the ultraviolet light irradiates the first side surface of the deep ultraviolet transmitting glass of the condensation sensor through the first light window;
the deep ultraviolet transmitting glass reflects the ultraviolet light, and the reflected ultraviolet light reaches a deep ultraviolet photoelectric converter of the condensation sensor through a second optical window;
the deep ultraviolet photoelectric converter converts the reflected ultraviolet light into a photocurrent signal and transmits the photocurrent signal to the control unit of the condensation sensor through a signal wire;
and the control unit judges the condensation state according to the magnitude of the photocurrent signal.
8. The operating method of the dew condensation sensor as claimed in claim 7, wherein the controlling unit determining the dew condensation state according to the magnitude of the photocurrent signal comprises the sub-steps of:
acquiring a reference photocurrent signal value; the reference photocurrent signal is output by the deep ultraviolet photoelectric converter under the state of no dew condensation;
acquiring a detection photocurrent signal value; the detection photocurrent signal is output by the deep ultraviolet photoelectric converter when the dew condensation sensor works;
and judging the size of the detection photocurrent signal value and the reference photocurrent signal value, and if the detection photocurrent signal value is smaller than the reference photocurrent signal value, judging that condensation occurs.
9. The operating method of the dew sensor as set forth in claim 8, wherein the step of determining the dew state by the control unit according to the magnitude of the photocurrent signal further comprises the substeps of: calculating the difference value of the reference photocurrent signal value and the detection photocurrent signal value; the larger the difference, the more severe the condensation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210713846.4A CN115096816A (en) | 2022-06-22 | 2022-06-22 | Condensation sensor based on deep ultraviolet optical detection technology and working method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210713846.4A CN115096816A (en) | 2022-06-22 | 2022-06-22 | Condensation sensor based on deep ultraviolet optical detection technology and working method thereof |
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| CN202210713846.4A Pending CN115096816A (en) | 2022-06-22 | 2022-06-22 | Condensation sensor based on deep ultraviolet optical detection technology and working method thereof |
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