CN113841040B - Sensitivity adjustment plate and method for manufacturing sensor device - Google Patents
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 44
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
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Abstract
The sensitivity adjustment plate (20) is used for adjusting the sensitivity of the moisture sensor (10), the moisture sensor (10) detects moisture contained in the object, and the sensitivity adjustment plate (20) has light transmission characteristics simulating the light absorption characteristics of the moisture. The sensitivity adjustment plate (20) is disposed between the light reflection plate (30) and the moisture sensor (10) in the sensitivity adjustment step of the moisture sensor (10).
Description
Technical Field
The present invention relates to a sensitivity adjustment plate for adjusting sensitivity of a sensor device and a method for manufacturing the sensor device.
Background
Conventionally, a sensor device for measuring the moisture content by utilizing the absorption of infrared rays by moisture is known. Patent document 1 discloses a dryness sensor that can suppress variation in the water content detection result due to the difference in the material of the object, thereby improving the accuracy of dryness detection.
Prior art literature
Patent literature
Patent document 1: international publication No. 2018/155289
Disclosure of Invention
Problems to be solved by the invention
In addition, in the case of mass-producing a plurality of sensor devices, there is a problem in that sensitivity deviation is suppressed from occurring between the plurality of sensor devices.
The invention provides a sensitivity adjustment plate capable of suppressing sensitivity deviation of a plurality of sensor devices and a method for manufacturing the sensor devices.
Solution for solving the problem
A sensitivity adjustment plate according to an aspect of the present invention is a sensitivity adjustment plate for adjusting sensitivity of a sensor device that detects a specific component contained in an object, the specific component having an absorbance to light that is lower than an absorbance to light of a first wavelength band, the sensor device including: a light source that emits irradiation light including light of the first wavelength band and light of the second wavelength band toward the object; a first light receiving unit that converts light of the first wavelength band included in reflected light obtained by reflecting the irradiation light by an object into a first electric signal; a second light receiving unit that converts light of the second wavelength band included in the reflected light into a second electric signal; and a calculation unit that calculates an amount of the specific component contained in the object based on the first electrical signal and the second electrical signal, wherein the sensitivity adjustment plate has a light transmission characteristic that simulates a light absorption characteristic of the specific component, and wherein the sensitivity adjustment plate is disposed between the light reflection plate and the sensor device in the sensitivity adjustment step of the sensor device.
In a method for manufacturing a sensor device according to an aspect of the present invention, the sensor device includes: a light source that emits irradiation light including light of a first wavelength band and light of a second wavelength band toward an object; a first light receiving unit that converts light of the first wavelength band included in reflected light obtained by reflecting the irradiation light by the object into a first electric signal; a second light receiving unit that converts light of the second wavelength band included in the reflected light into a second electric signal; a storage section for storing coefficients; and an arithmetic unit that calculates an amount of the specific component contained in the object by an arithmetic operation using the first electric signal, the second electric signal, and the coefficient, wherein in the manufacturing method, a sensitivity adjustment plate having a light transmission characteristic that simulates a light absorption characteristic of the specific component is disposed between a light reflection plate and the sensor device, and the coefficient stored in the storage unit is rewritten based on the amount of the specific component calculated by the sensor device in a state where the sensitivity adjustment plate is disposed between the light reflection plate and the sensor device.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, a sensitivity adjustment plate capable of suppressing sensitivity variations of a plurality of sensor devices and a method for manufacturing the sensor devices are realized.
Drawings
Fig. 1 is an external perspective view of a moisture sensor according to an embodiment.
Fig. 2 is a diagram showing an internal structure of the water content sensor according to the embodiment.
Fig. 3 is a first diagram for explaining sensitivity adjustment using the sensitivity adjustment plate according to the embodiment.
Fig. 4 is a second diagram for explaining sensitivity adjustment using the sensitivity adjustment plate according to the embodiment.
Fig. 5 is a graph showing absorbance of water in an object corresponding to laundry with a laundry dryness of 75%.
Fig. 6 is a graph showing light transmission characteristics of the sensitivity adjustment plate according to the embodiment.
Fig. 7 is a flowchart of a method for manufacturing the water content sensor according to the embodiment.
Fig. 8 is a diagram showing modification 1 of the light transmission characteristics of the sensitivity adjustment plate according to the embodiment.
Fig. 9 is a diagram showing modification 2 of the light transmission characteristics of the sensitivity adjustment plate according to the embodiment.
Fig. 10 is a diagram showing modification 3 of the light transmission characteristics of the sensitivity adjustment plate according to the embodiment.
Detailed Description
The embodiments will be described below with reference to the drawings. Further, the embodiments described below each show a general or specific example. The numerical values, shapes, materials, components, arrangement positions and connection modes of the components, steps, order of the steps, and the like shown in the following embodiments are examples, and are not intended to limit the present invention. Among the constituent elements of the following embodiments, constituent elements not described in the independent claims are described as arbitrary constituent elements.
The drawings are schematic and are not necessarily strictly illustrated. In the drawings, substantially the same structures are denoted by the same reference numerals, and overlapping description may be omitted or simplified.
(embodiment)
Summary
First, an outline of the water content sensor according to the embodiment will be described. Fig. 1 is an external perspective view of a moisture sensor according to an embodiment. Fig. 2 is a diagram showing an internal structure of the water content sensor according to the embodiment.
The moisture sensor 10 according to the embodiment is a moisture sensor that emits light to the object 40 and detects the moisture amount of the object 40 based on the reflected light from the object 40. The moisture sensor 10 detects, for example, moisture contained in the object 40 located at a position distant from the moisture sensor 10. The object 40 is, for example, clothing. The object 40 may be bedding such as a bed sheet or a pillow case, and is not particularly limited. The moisture sensor 10 is mounted on, for example, a clothes drying apparatus or the like, and confirms the drying condition of clothes. Such a moisture sensor 10 can prevent laundry damage or the like caused by excessive drying.
Specifically, the moisture sensor 10 includes a housing 11, a light source 12, a lens 13, a lens 14, a half mirror 15, a first band-pass filter 16a, a first light receiving unit 17a, a second band-pass filter 16b, a second light receiving unit 17b, a signal processing circuit 18, and a storage unit 19. Each constituent element of the water content sensor 10 will be described in detail below.
The housing 11 is a housing for accommodating the light source 12, the lens 13, the lens 14, the half mirror 15, the first band-pass filter 16a, the first light receiving unit 17a, the second band-pass filter 16b, the second light receiving unit 17b, the signal processing circuit 18, and the storage unit 19. The case 11 is made of a material having light shielding properties. This can suppress external light from entering the case 11. Specifically, the case 11 is formed of a resin material or a metal material having light shielding properties against light to be received by the first light receiving portion 17a and the second light receiving portion 17 b.
A plurality of openings are provided in the outer wall of the housing 11, and the lens 13 and the lens 14 are mounted in these openings.
The light source 12 emits irradiation light including light of a first wavelength band and light of a second wavelength band different from the first wavelength band toward the object 40. The first band is, for example, a band of 1420nm to 1530nm, and the second band is, for example, a band of 1530nm to 1630 nm. Specifically, the light source 12 is a light emitting module using an LED (Light Emitting Diode: light emitting diode) element that emits infrared light as a light emitting element.
The lens 13 is a condensing lens for condensing light emitted from the light source 12 onto the object 40. The lens 13 is, for example, a resin convex lens, but is not particularly limited.
The lens 14 is a condensing lens for condensing the reflected light reflected by the object 40 to the first light receiving portion 17a and the second light receiving portion 17 b. The lens 14 is fixed to the housing 11 such that the focal point is positioned on the light receiving surface of the first light receiving portion 17a and the light receiving surface of the second light receiving portion 17b, for example. The lens 14 is, for example, a resin convex lens, but is not particularly limited.
The half mirror 15 is an optical member that branches light entering the half mirror 15 through the lens 14 and emits the light to the first light receiving unit 17a and the second light receiving unit 17b, respectively. In the moisture sensor 10, light reflected by the half mirror 15 enters the first light receiving portion 17a, and light transmitted through the half mirror 15 enters the second light receiving portion 17 b.
Further, although an optical system that distributes coaxial incident light by the half mirror 15 is applied to the moisture sensor 10, an optical system that uses off-axis incident light in which 2 lenses are provided may be applied to the moisture sensor 10.
The first band-pass filter 16a is a band-pass filter that extracts light of a first band from light incident on the first band-pass filter 16 a. The first bandpass filter 16a is disposed between the lens 14 and the first light receiving unit 17a, and is located on the optical path of the light transmitted through the lens 14 and incident on the first light receiving unit 17 a. The first band-pass filter 16a transmits light of a first band and absorbs light of a band other than the first band.
The first light receiving unit 17a is a light receiving element that receives light of the first wavelength band reflected by the object 40 and transmitted through the first band-pass filter 16a, and converts the light into a first electric signal. The first light receiving unit 17a performs photoelectric conversion on the received light of the first wavelength band to generate a first electrical signal according to the light receiving amount (i.e., intensity) of the light. The generated first electrical signal is output to the signal processing circuit 18. The first light receiving unit 17a is, for example, a photodiode, but is not limited thereto. For example, the first light receiving unit 17a may be a phototransistor or an image sensor.
The second band-pass filter 16b is a band-pass filter that extracts light of a second band from light incident on the second band-pass filter 16 b. The second bandpass filter 16b is disposed between the lens 14 and the second light receiving unit 17b, and is located on the optical path of the light transmitted through the lens 14 and incident on the second light receiving unit 17 b. The second band-pass filter 16b transmits light of a second wavelength band and absorbs light of a wavelength band other than the second wavelength band.
The second light receiving unit 17b is a light receiving element that receives light of the second wavelength band reflected by the object 40 and transmitted through the second band-pass filter 16b, and converts the light into a second electric signal. The second light receiving unit 17b performs photoelectric conversion on the received light of the second wavelength band to generate a second electric signal corresponding to the light receiving amount (i.e., intensity) of the light. The generated second electrical signal is output to the signal processing circuit 18. The second light receiving portion 17b is a light receiving element having the same shape as the first light receiving portion 17 a. That is, in the case where the first light receiving portion 17a is a photodiode, the second light receiving portion 17b is also a photodiode.
The signal processing circuit 18 performs light emission control of the light source 12. The signal processing circuit 18 includes an arithmetic unit 18a, and the arithmetic unit 18a calculates the moisture content by performing signal processing on the first electrical signal output from the first light receiving unit 17a and the second electrical signal output from the second light receiving unit 17 b.
The signal processing circuit 18 is accommodated in the case 11, for example, but may be mounted on the outer side surface of the case 11. The signal processing circuit 18 receives the first electrical signal and the second electrical signal through wired communication, but may also receive the first electrical signal and the second electrical signal through wireless communication. The signal processing circuit 18 is implemented, for example, by a microcomputer including an operational amplifier that amplifies the first electric signal and the second electric signal, a memory, an input/output port, a processor that executes a program, and the like.
The storage unit 19 is a storage device that stores a computer program (algorithm) for calculating the moisture content, an absorption coefficient αa described later, and the like, which are executed by the arithmetic unit 18 a. The memory 19 may also be implemented as part of the signal processing circuit 18. The storage unit 19 is implemented by, for example, a semiconductor memory.
[ method of calculating moisture content ]
Next, a calculation method in which the calculation unit 18a calculates the moisture content will be described. The calculation unit 18a compares the light energy Pd of the detection light included in the reflected light reflected by the object 40 with the light energy Pr of the reference light included in the reflected light reflected by the object 40, thereby detecting the component amount included in the object 40. The light energy Pd corresponds to the intensity of the first electrical signal output from the first light receiving unit 17a, and the light energy Pr corresponds to the intensity of the second electrical signal output from the second light receiving unit 17 b.
The light energy Pd is represented by the following formula (1).
(1) pd=pd0×gd×rd×td× Aad ×ivd
Here, pd0 is the light energy of the light forming the first wavelength band of the probe light among the lights emitted from the light source 12. Gd is a coupling efficiency (light collection ratio) of the first band of light to the first light receiving portion 17 a. Specifically, gd corresponds to a proportion of a part of the light emitted from the light source 12, which is a component diffusely reflected by the object 40 (i.e., the probe light included in the reflected light).
Rd is the reflectance of the probe light reflected by the object 40. Td is the transmittance of the detection light by the first band-pass filter 16 a. Ivd is the light receiving sensitivity of the first light receiving portion 17a to the detection light.
Aad is the absorptivity of the probe light absorbed by a specific component (moisture) contained in the object 40, and is expressed by the following (formula 2).
(2) Aad =10 -αa×Ca×D
Here, αa is the absorption coefficient, specifically, the absorption coefficient of the probe light absorbed by the component (moisture). Ca is the volume concentration of the component (moisture) contained in the object 40. D is a contribution thickness which is 2 times the thickness of the component contributing to absorption of the probe light per unit volume concentration.
More specifically, in the object 40 in which the moisture is uniformly dispersed, ca corresponds to the volume concentration contained in the components of the object 40 when light enters the object 40 and is reflected inside the object 40 and then is emitted from the object 40. D corresponds to the optical path length from the internal reflection of the object 40 to the emission from the object 40. For example, if the object 40 is a mesh-like solid such as a fiber or a porous solid such as a sponge, light is reflected by the surface of the solid. In this case, ca is the concentration of moisture contained in the liquid phase covering the solid object, for example. Further, D is a contribution thickness converted to an average thickness of the liquid phase covering the solid object.
Thus, αa×ca×d corresponds to the amount of components (moisture amount) contained in the object 40. From the above, it is understood that the light energy Pd corresponding to the intensity of the first electric signal varies according to the amount of moisture contained in the object 40. Further, the absorbance of moisture is extremely small compared with moisture, and therefore can be ignored.
Similarly, the light energy Pr of the reference light incident on the second light receiving portion 17b is expressed by the following (formula 3).
(3) pr=pr0×gr×rr×tr×ivr
As described above, the absorptance Aad is obtained from the difference between the absorption of the probe light in the first wavelength band by the component (moisture) contained in the object 40 and the absorption of the reference light in the second wavelength band by the component (moisture) contained in the object 40. Further, since the amount of absorption of the reference light by the component contained in the object 40 is very small compared with the measurement light, it can be considered that the reference light is not substantially absorbed, and therefore, as compared with (formula 1), it is clear that (formula 3) does not include an item corresponding to the absorption rate Aad of the reference light by moisture.
In (formula 3), pr0 is the light energy of the light forming the second wavelength band of the reference light among the lights emitted from the light source 12. Gr is a coupling efficiency (condensing ratio) of the reference light emitted from the light source 12 to the second light receiving unit 17 b. Specifically, gr corresponds to the proportion of the reference light that is a part of the components diffusely reflected by the object 40 (i.e., the reference light included in the reflected light). Rr is the reflectance of the reference light reflected by the object 40. Tr is the transmittance of the second band-pass filter 16b to the reference light. Ivr is the light receiving sensitivity of the second light receiving portion 17b to the reflected light.
In the moisture sensor 10, since the probe light and the reference light, which are light emitted from the light source 12, are emitted coaxially and with the same spot size, the coupling efficiency Gd of the probe light is substantially equal to the coupling efficiency Gr of the reference light. Further, since the peak wavelength of the detection light is relatively close to the peak wavelength of the reference light, the reflectance Rd of the detection light is substantially equal to the reflectance Rr of the reference light.
Further, since the center wavelength of the reference light is a wavelength at which the absorbance absorbed by the water vapor is smaller than a predetermined value, it can be considered that the reference light is not absorbed by the water vapor in the space between the water content sensor 10 and the object 40.
Therefore, even if the influence of the water vapor contained in the space is not considered, the following (expression 4) can be derived by obtaining the ratio of (expression 1) to (expression 3).
(4) Pd/pr=z× Aad
Here, Z is a constant term, and is expressed by (formula 5).
(5)
Z＝(Pd0/Pr0)×(Td/Tr)×(Ivd/Ivr)
The light energies Pd0 and Pr0 are predetermined as initial outputs of the light sources 12, respectively. The transmittance Td and the transmittance Tr are predetermined based on the transmittance characteristics of the first band-pass filter 16a and the second band-pass filter 16b, respectively. The light receiving sensitivity Ivd and the light receiving sensitivity Ivr are predetermined according to the light receiving characteristics of the first light receiving portion 17a and the second light receiving portion 17b, respectively. Thus, Z shown in (formula 5) can be regarded as a constant.
The operation unit 18a calculates the light energy Pd of the probe light based on the first electrical signal, and calculates the light energy Pr of the reference light based on the second electrical signal. Specifically, the signal level (voltage level) of the first electric signal corresponds to the optical energy Pd, and the signal level (voltage level) of the second electric signal corresponds to the optical energy Pr.
Thus, the computing unit 18a can calculate the moisture absorption rate Aad of the object 40 based on (expression 4). Thus, the arithmetic unit 18a can calculate the moisture content based on (expression 2).
[ sensitivity adjustment Using reference sample ]
When the plurality of moisture sensors 10 are shipped after the plurality of moisture sensors 10 are manufactured, sensitivity adjustment is performed before shipment in order to suppress variation in the calculated values of the moisture amounts by the plurality of moisture sensors 10. For example, the plurality of moisture sensors 10 are each configured to calculate the moisture amount for the reference sample (i.e., the object 40 for sensitivity adjustment), and the moisture sensors whose calculated values are within a predetermined range are shipped as they are. On the other hand, the water content sensor 10 whose calculated value of the water content is outside the predetermined range is shipped after the value of the light absorption coefficient αa stored in the storage unit 19 is rewritten so that the calculated value of the water content is within the predetermined range.
Here, the reference sample for sensitivity adjustment changes in the amount of moisture contained in the reference sample due to drying or the like. In order to perform stable sensitivity adjustment, it is necessary to maintain the state of the reference sample in a fixed state, but this is difficult. That is, the management of the reference sample is troublesome. This is because if the sensitivity adjustment is performed by not properly managing the reference sample, the water content sensor 10 with a large calculation error of the water content is shipped.
[ sensitivity adjustment Using sensitivity adjustment plate ]
Therefore, a sensitivity adjustment method using the sensitivity adjustment plate 20 will be described below. Fig. 3 and 4 are diagrams for explaining the sensitivity adjustment using the sensitivity adjustment plate 20.
In the sensitivity adjustment using the sensitivity adjustment plate 20, the light reflection plate 30 is disposed at a position corresponding to the object 40, and the sensitivity adjustment plate 20 is disposed between the water content sensor 10 and the light reflection plate 30. Specifically, the sensitivity adjustment plate 20 is located between the lens 14 and the light reflection plate 30, and faces the lens 14 but not the lens 13. The sensitivity adjustment plate 20 may be disposed so as to face both the lens 14 and the lens 13. As the light reflection plate 30, for example, a white light diffusion plate or the like is used.
The sensitivity adjustment plate 20 has a light transmission characteristic that simulates the light absorption characteristic of moisture (or the light reflection characteristic of moisture). Fig. 5 is a graph showing absorbance (an example of the light absorption characteristic of moisture) of water in the object 40 corresponding to laundry with a laundry dryness of 75%, and fig. 6 is a graph showing the light transmission characteristic of the sensitivity adjustment plate 20. In fig. 5, the optical path length of water corresponding to ca×d of (formula 2) corresponds to 0.19mm. Absorbance may also be understood instead as absorbance of light.
The light transmission characteristic of the sensitivity adjustment plate 20 shown in fig. 6 has a shape obtained by reversing up and down a portion of 1380nm to 1650nm of absorbance of water in fig. 5. In other words, the light transmittance characteristic of the sensitivity adjustment plate 20 shown in fig. 6 is obtained by subtracting the absorbance due to water from 100% because the light transmittance is fixed to be 100% irrespective of the wavelength. The broken line is a waveform obtained by faithfully replacing the transmittance due to absorbance, and the solid line is a waveform obtained by converting the absorbance to 0 and the transmittance to 100% in the wavelength region (1380 nm,1650 nm) at both ends of the range R. In the transmittance characteristic of the solid line, a region in which the transmittance is reduced is defined, and thus the sensitivity adjustment plate is easily manufactured.
As shown in fig. 3 and 4, if the sensitivity adjustment plate 20 is disposed between the moisture sensor 10 and the light reflection plate 30, the irradiation light emitted from the moisture sensor 10 is reflected by the light reflection plate 30 and transmitted through the sensitivity adjustment plate 20 to be incident on the lens 14. Since the light transmission characteristic of the sensitivity adjustment plate 20 is a light transmission characteristic simulating the absorbance of water in the object 40 corresponding to laundry with a laundry dryness of 75%, the incident light at this time has the same characteristic as the reflected light obtained by irradiating the object 40 corresponding to laundry with a laundry dryness of 75% with the irradiation light. That is, the sensitivity adjustment plate 20 and the light reflection plate 30 can be used as the substitute for the reference sample.
The sensitivity adjustment plate 20 is a so-called optical filter, and is formed by stacking a plurality of layers having different refractive indices on a light-transmissive substrate (in other words, a light-transmissive base material) such as a glass substrate. Therefore, the characteristics of the sensitivity adjustment plate 20 are not easily changed by the storage environment or the like, and are more easily controlled than those of the reference sample. The sensitivity adjustment plate 20 can easily suppress the variation of the calculated values of the water amount by the plurality of water amount sensors 10.
[ method for manufacturing Water content sensor ]
Next, a method for manufacturing the water content sensor 10 to which the sensitivity adjustment method described above is applied will be described. Fig. 7 is a flowchart of a method of manufacturing the moisture sensor 10.
First, the moisture sensor 10 is assembled (S11). The initial value of the light absorption coefficient αa is stored in the storage unit 19 of the assembled water content sensor 10.
Next, a sensitivity adjustment plate 20 is disposed between the light reflection plate 30 and the moisture sensor 10 (S12), and the sensitivity adjustment device is electrically connected to an external connection terminal (not shown) or the like of the moisture sensor 10 (S13). In other words, the sensitivity adjustment device is a device for manufacturing the moisture content sensor 10, and is realized by a personal computer or the like, for example.
Next, the moisture amount sensor 10 calculates the moisture amount (S14). The sensitivity adjustment device acquires a calculated value of the water content (S15), and determines whether the acquired calculated value of the water content is within a predetermined range (S16).
When it is determined that the calculated value of the moisture amount is out of the predetermined range (no in S16), the sensitivity adjustment device rewrites the initial value of the light absorption coefficient αa stored in the storage unit 19 of the moisture amount sensor 10 so that the calculated value of the moisture amount is within the predetermined range (S17). On the other hand, when it is determined that the calculated value of the water amount is within the above-described predetermined range (yes in S16), the initial value of the light absorption coefficient αa is not rewritten.
The coefficient rewritten in step S17 is not limited to the light absorption coefficient αa. For example, when ca×d is small in (formula 2), the absorptance Aad can be approximated as in (formula 6) below.
(6) Aad =10 -αa×Ca×D ≈1-ka×Ca
As shown in (formula 6), in step S17, the value of the absorption coefficient ka associated with the absorption coefficient αa may be rewritten instead of the absorption coefficient αa. That is, the coefficient to be adjusted in the sensitivity adjustment may be any coefficient related to the light absorption coefficient αa.
The sensitivity adjustment flow is an example, and the light absorption coefficient αa may be calculated and written based on data of the probe light and the reference light before and after the installation of the sensitivity adjustment plate.
This method for manufacturing the water content sensor 10 can easily suppress the variation in the calculated values of the water content by the plurality of water content sensors 10.
Modification 1 of sensitivity adjustment plate
The light transmission characteristics of the sensitivity adjustment plate 20 shown in fig. 6 are an example. The light transmission characteristic of the sensitivity adjustment plate 20 may be any characteristic that simulates the light absorption characteristic of moisture, and "simulate" herein is meant in a broad sense. The characteristic simulating the light absorption characteristic of moisture is, for example, a characteristic in which the first wavelength band having a large absorbance of moisture has a transmittance of a minimum value. The characteristic simulating the light absorption characteristic of moisture may be a characteristic in which the transmittance of the first wavelength band (in which the absorbance of moisture to light is large) is substantially lower than the transmittance of the second wavelength band (in which the absorbance of moisture to light is small).
In the following, a modification 1 of the light transmission characteristic that simulates the light absorption characteristic of moisture will be described. Fig. 8 is a diagram showing modification 1 of the light transmission characteristic of the sensitivity adjustment plate 20. Fig. 8 also shows a light transmission characteristic (broken line) that faithfully simulates the light absorption characteristic of moisture, as a comparison target of modification 1 (solid line) of the light transmission characteristic.
The light transmission characteristics of the sensitivity adjustment plate 20 shown in fig. 8 include a first band-stop characteristic 21 for at least a part of the first band and a second band-stop characteristic 22 for at least a part of the second band. That is, the light transmission characteristic of the sensitivity adjustment plate 20 shown in fig. 8 is configured by combining 2 band-stop characteristics (in other words, band-elimination characteristics or band-cut characteristics). The valley value of the light transmittance of the first band-stop characteristic 21 is lower than the valley value of the light transmittance of the second band-stop characteristic 22.
The sensitivity adjustment plate 20 having the light transmission characteristics shown in fig. 8 is formed as a single plate by stacking a plurality of layers having different refractive indices on a light-transmissive substrate (in other words, a light-transmissive base material), for example. The sensitivity adjustment plate 20 having the light transmission characteristic shown in fig. 8 may also be formed by overlapping a plate having the first band-stop characteristic 21 and a plate having the second band-stop characteristic 22.
The sensitivity adjustment plate 20 having the light transmission characteristics (solid line) shown in fig. 8 has the following advantages: the sensitivity adjustment plate 20 is easier to manufacture than a sensitivity adjustment plate 20 having light transmission characteristics (light transmission characteristics in which the light transmittance is smoothly and continuously changed, dotted lines in fig. 8) that faithfully simulate the light absorption characteristics of moisture.
Modification 2 of sensitivity adjustment plate
Modification 2 of the light transmission characteristic which simulates the light absorption characteristic of moisture will be described. Fig. 9 is a diagram showing modification 2 of the light transmission characteristic of the sensitivity adjustment plate 20. Fig. 9 also shows a light transmission characteristic (broken line) that faithfully simulates the light absorption characteristic of moisture, as a comparison target of modification 2 (solid line) of the light transmission characteristic.
The light transmission characteristics of the sensitivity adjustment plate 20 shown in fig. 9 include the band-stop characteristics 23 for at least a part of the first wavelength band, and do not include the band-stop characteristics for the second wavelength band. That is, the light transmission characteristic of the sensitivity adjustment plate 20 includes only 1 band-stop characteristic. When the portion of the band-stop characteristics 23 is removed, the light transmittance is fixed to a predetermined transmittance of less than 100% (in the example of fig. 9, about 96%). That is, in modification 2 of the light transmission characteristic of the sensitivity adjustment plate 20, the transmittance of light in the second wavelength band is fixed. In addition, the transmittance of light in at least a part of the second wavelength band may be fixed.
The sensitivity adjustment plate 20 having the light transmission characteristics shown in fig. 9 is formed by, for example, stacking a plurality of layers having different refractive indices on a light-transmissive substrate (in other words, a light-transmissive base material) having the above-described predetermined transmittance.
The sensitivity adjustment plate 20 having the light transmission characteristic shown in fig. 9 has the following advantages: the sensitivity adjustment plate 20 having the band-stop characteristic shown in fig. 8 is easier to manufacture than the sensitivity adjustment plate.
Modification 3 of sensitivity adjustment plate
Modification 3 of the light transmission characteristic which simulates the light absorption characteristic of moisture will be described. Fig. 10 is a diagram showing modification 3 of the light transmission characteristic of the sensitivity adjustment plate 20. Fig. 10 also shows a light transmission characteristic (broken line) that faithfully simulates the light absorption characteristic of moisture, as a comparison target of modification 3 (solid line) of the light transmission characteristic.
The light transmission characteristics of the sensitivity adjustment plate 20 shown in fig. 10 include the band-stop characteristics 24 for at least a part of the first wavelength band, and do not include the band-stop characteristics for the second wavelength band. That is, the light transmission characteristic of the sensitivity adjustment plate 20 includes only 1 band-stop characteristic. When the portion of the band-stop property 24 was removed, the light transmittance was fixed at 100%. That is, in modification 3 of the light transmission characteristic of the sensitivity adjustment plate 20, the transmittance of light in the second wavelength band is fixed at 100%. Further, the transmittance of light in at least a part of the second wavelength band may be fixed to 100%. 100% is not strictly 100% but essentially 100% (substantially transparent).
The sensitivity adjustment plate 20 having the light transmission characteristics shown in fig. 10 is formed by, for example, stacking a plurality of layers having different refractive indices on a substantially transparent (transmittance of 100%) substrate (in other words, a base material).
The sensitivity adjustment plate 20 having the light transmission characteristic shown in fig. 10 has an advantage that it can be easily manufactured using a transparent substrate.
[ Effect etc. ]
As described above, the sensitivity adjustment plate 20 is used to adjust the sensitivity of the moisture sensor 10 for moisture contained in the detection target 40. The absorption of moisture is lower for light in the second wavelength band than for light in the first wavelength band. The water content sensor 10 includes: a light source 12 that emits irradiation light including light of a first wavelength band and light of a second wavelength band toward an object 40; a first light receiving unit 17a that converts light of a first wavelength band included in reflected light obtained by reflecting the irradiation light by the object 40 into a first electric signal; a second light receiving unit 17b that converts light of a second wavelength band included in the reflected light into a second electric signal; and an arithmetic unit 18a for calculating the amount of water contained in the object 40 based on the first electrical signal and the second electrical signal. The sensitivity adjustment plate 20 has a light transmission characteristic that simulates the light absorption characteristic of moisture, and in the sensitivity adjustment step of the moisture sensor 10, the sensitivity adjustment plate 20 is disposed between the light reflection plate 30 and the moisture sensor 10. The moisture sensor 10 is an example of a sensor device, and moisture is an example of a specific component.
By such a sensitivity adjustment plate 20, the variation in the calculated value of the water amount by the plurality of water amount sensors 10 can be easily suppressed.
In modification 1, the light transmission characteristics of the sensitivity adjustment plate 20 include a first band-stop characteristic for at least a part of the first band and a second band-stop characteristic for at least a part of the second band.
Such a sensitivity adjustment plate 20 has the following advantages: the sensitivity adjustment plate 20 having light transmission characteristics that faithfully simulate the light absorption characteristics of moisture is easier to manufacture than the sensitivity adjustment plate 20.
In addition, in modification 2 and modification 3, the light transmission characteristics of the sensitivity adjustment plate 20 include the band-stop characteristics for at least a part of the first wavelength band, and do not include the band-stop characteristics for the second wavelength band.
Such a sensitivity adjustment plate 20 has the following advantages: the sensitivity adjustment plate 20 having the light transmission characteristic of modification 1 is easier to manufacture than the sensitivity adjustment plate.
In modification 3, the transmittance of the sensitivity adjustment plate 20 for the light of the second wavelength band is 100%. In addition, the transmittance of the sensitivity adjustment plate 20 may be 100% for at least a part of the second wavelength band.
Such a sensitivity adjustment plate 20 has an advantage that it can be easily manufactured using a transparent substrate.
The sensitivity adjustment plate 20 has a light transmission characteristic simulating the light absorption characteristic of moisture in a wavelength band of 1380nm or more and 1650nm or less.
Such a sensitivity adjustment plate 20 can easily suppress the variation in the calculated value of the water amount by the plurality of water amount sensors 10.
More specifically, the moisture content sensor 10 includes a storage unit 19 for storing the light absorption coefficient αa, and the calculation unit 18a calculates the moisture content in the object 40 by calculation using the first electric signal, the second electric signal, and the light absorption coefficient αa. In this method for manufacturing the moisture sensor 10, the sensitivity adjustment plate 20 having the light transmission characteristic simulating the light absorption characteristic of moisture is arranged between the light reflection plate 30 and the moisture sensor 10 (S12), and the coefficient associated with the light absorption coefficient αa stored in the storage unit 19 is rewritten based on the moisture amount calculated by the moisture sensor 10 in a state where the sensitivity adjustment plate 20 is arranged between the light reflection plate 30 and the moisture sensor 10 (S17).
According to this method for manufacturing the water content sensor 10, it is possible to easily suppress the variation in the calculated values of the water content by the plurality of water content sensors 10.
(other embodiments)
The embodiments have been described above, but the present invention is not limited to the above embodiments.
For example, although the above embodiment describes an example in which the sensitivity adjustment plate is used for the sensitivity adjustment of the moisture sensor, the sensitivity adjustment method using the sensitivity adjustment plate can be applied to other sensor devices in which a specific component other than moisture is the detection target. For example, the sensitivity adjustment method using the sensitivity adjustment plate may be applied to a sensor device for detecting a specific component (liquid component) such as oil or ethanol contained in an object, or may be applied to a sensor device for detecting a gas component as a specific component. In this case, the sensitivity adjustment plate may have a light transmission characteristic simulating the light absorption characteristic of the specific component. Further, the specific numerical ranges of the first band and the second band are different depending on the specific component of the detection object.
In the above embodiment, the case where the light source is a light emitting module using an LED element as a light emitting element has been described, but the light source may be a light source using a semiconductor laser element, an organic EL element, or the like as a light emitting element.
In the above embodiment, the single light source emits the irradiation light including the light of the first wavelength band and the light of the second wavelength band, but the sensor device may be provided with two light sources, that is, the light source emitting the light of the first wavelength band and the light source emitting the light of the second wavelength band.
In addition, the general or specific embodiments of the present invention may also be realized by a recording medium such as a system, an apparatus, a method, an integrated circuit, a computer program, or a computer-readable CD-ROM. In addition, any combination of a system, an apparatus, a method, an integrated circuit, a computer program, and a recording medium may be used. For example, the present invention may be implemented as the sensitivity adjustment device of the above embodiment, or may be implemented as a manufacturing system (manufacturing apparatus) of a sensor device including the sensitivity adjustment device, the light reflection plate, and the sensitivity adjustment plate.
The order of the plurality of processes in the flow chart of the manufacturing method described in the above embodiment is an example. The order of the plurality of processes may be changed, and the plurality of processes may be executed in parallel.
Further, the present invention includes a mode in which various modifications, which are conceivable to those skilled in the art, are applied to each embodiment, or a mode in which constituent elements and functions in each embodiment are arbitrarily combined within a range not departing from the gist of the present invention.
Description of the reference numerals
10: a moisture amount sensor (sensor device); 12: a light source; 17a: a first light receiving section; 17b: a second light receiving section; 18a: an arithmetic unit; 19: a storage unit; 20: a sensitivity adjustment plate; 21: a first band-stop characteristic; 22: a second band-stop characteristic; 23. 24: band-stop characteristics; 30: a light reflection plate; 40: an object.
Claims (3)
1. A sensitivity adjustment plate, which comprises a plate body,
the sensitivity adjustment plate is used for adjusting the sensitivity of a sensor device which detects a specific component contained in an object,
regarding the absorptivity of the specific component to light, the absorptivity to light of the second wavelength band is lower than that to light of the first wavelength band,
the sensor device is provided with:
a light source that emits irradiation light including light of the first wavelength band and light of the second wavelength band toward the object;
a first light receiving unit that converts light of the first wavelength band included in reflected light obtained by reflecting the irradiation light by an object into a first electric signal;
a second light receiving unit that converts light of the second wavelength band included in the reflected light into a second electric signal; and
an arithmetic unit that calculates the amount of the specific component contained in the object based on the first electrical signal and the second electrical signal,
the sensitivity adjustment plate has a light transmission characteristic simulating the light absorption characteristic of the specific component, and in the sensitivity adjustment step of the sensor device, the sensitivity adjustment plate is disposed between the light reflection plate and the sensor device,
the first band is a band of 1420nm to 1530nm,
the second band is a band of 1530nm or more and 1630nm or less,
the light transmission characteristics of the sensitivity adjustment plate include a first band-stop characteristic for at least a portion of the first wavelength band and a second band-stop characteristic for at least a portion of the second wavelength band,
the trough of the light transmittance of the first band-stop characteristic is lower than the trough of the light transmittance of the second band-stop characteristic.
2. The sensitivity adjustment plate according to claim 1, characterized in that,
the specific component is water and the specific component is water,
the sensitivity adjustment plate has a light transmission characteristic simulating the light absorption characteristic of moisture in a wavelength band of 1380nm to 1650 nm.
3. A method of manufacturing a sensor device,
the sensor device is provided with:
a light source that emits irradiation light including light of a first wavelength band and light of a second wavelength band toward an object;
a first light receiving unit that converts light of the first wavelength band included in reflected light obtained by reflecting the irradiation light by the object into a first electric signal;
a second light receiving unit that converts light of the second wavelength band included in the reflected light into a second electric signal;
a storage section for storing coefficients; and
a calculation unit that calculates the amount of a specific component contained in the object by calculation using the first electrical signal, the second electrical signal, and the coefficient,
in the method of manufacture of the present invention,
a sensitivity adjustment plate having a light transmission characteristic simulating the light absorption characteristic of the specific component is disposed between the light reflection plate and the sensor device,
the coefficient stored in the storage section is rewritten based on the amount of the specific component calculated by the sensor device in a state where the sensitivity adjustment plate is arranged between the light reflection plate and the sensor device,
the first band is a band of 1420nm to 1530nm,
the second band is a band of 1530nm or more and 1630nm or less,
the light transmission characteristics of the sensitivity adjustment plate include a first band-stop characteristic for at least a portion of the first wavelength band and a second band-stop characteristic for at least a portion of the second wavelength band,
the trough of the light transmittance of the first band-stop characteristic is lower than the trough of the light transmittance of the second band-stop characteristic.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
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| JP2019114299 | 2019-06-20 | ||
| JP2019-114299 | 2019-06-20 | ||
| PCT/JP2020/022700 WO2020255797A1 (en) | 2019-06-20 | 2020-06-09 | Sensitivity adjustment plate and method for manufacturing sensor device |
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| CN113841040A CN113841040A (en) | 2021-12-24 |
| CN113841040B true CN113841040B (en) | 2024-03-22 |
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| JP (1) | JP7170237B2 (en) |
| CN (1) | CN113841040B (en) |
| WO (1) | WO2020255797A1 (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP7170237B2 (en) | 2022-11-14 |
| WO2020255797A1 (en) | 2020-12-24 |
| CN113841040A (en) | 2021-12-24 |
| JPWO2020255797A1 (en) | 2020-12-24 |
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