CN115096455A - Laser wavelength measuring device and method - Google Patents

Laser wavelength measuring device and method Download PDF

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Publication number
CN115096455A
CN115096455A CN202211002651.5A CN202211002651A CN115096455A CN 115096455 A CN115096455 A CN 115096455A CN 202211002651 A CN202211002651 A CN 202211002651A CN 115096455 A CN115096455 A CN 115096455A
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opening
laser
conductive
flow channel
liquid
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CN202211002651.5A
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CN115096455B (en
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于学成
陈家洛
陆翼森
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Dugen Laser Technology Suzhou Co Ltd
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Dugen Laser Technology Suzhou Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength

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  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)

Abstract

The invention provides a laser wavelength measuring device and a method, which relate to the technical field of semiconductor lasers, and the laser wavelength measuring device comprises: the clamp comprises a first conductive shunt structure and a second conductive shunt structure, wherein the first conductive shunt structure is provided with a first opening, a second opening, a third opening and a fourth opening, and a first flow passage communicated with the first opening and the second opening, a second flow passage communicated with the third opening and the fourth opening and a third flow passage communicated with the first flow passage and the second flow passage are arranged in the first conductive shunt structure; the second conductive shunting structure is provided with a fifth opening, a sixth opening and a fourth flow channel communicated with the fifth opening and the sixth opening; the first opening and the fourth opening are used for liquid inlet and liquid outlet, the second opening is used for being connected with a first interface of the laser, the third opening is used for being connected with a second interface of the laser, the fifth opening is used for being connected with a third interface of the laser, and the sixth opening is used for being connected with a fourth interface of the laser.

Description

Laser wavelength measuring device and method
Technical Field
The invention relates to the technical field of semiconductor lasers, in particular to a laser wavelength measuring device and method.
Background
When the existing laser product with small flow cooling is tested, the control of the liquid flow is realized by controlling and monitoring the real-time flow of the flowing product through a high-precision flowmeter; with the popularization and application of semiconductor lasers, more and more industries such as scientific research, industry and the like use lasers more and more, and the requirements on the parameter performance of laser products are higher and higher. The corresponding laser parameter testing requirements are more and more accurate.
At present, aiming at a laser cooled by micro-flow liquid, a flow meter with higher precision is usually used for measuring/monitoring the flow passing through a laser product (test fixture) during testing, but because the flow has certain fluctuation, the liquid passing through the laser product in the actual testing process has influence on test parameters due to smaller flow, and the relatively larger percentage of pipeline flow fluctuation causes relatively larger test errors. For example: the product needs 0.2L/min flow liquid cooling, the pipeline flow fluctuates by 0.02L/min, and the influence on the product flow is 10%.
Disclosure of Invention
The invention aims to provide a laser wavelength measuring device and method to solve the technical problem that in the wavelength test of the existing laser, the relatively large percentage of pipeline flow fluctuation influences test parameters, so that the test error is relatively large.
In a first aspect, an embodiment of the present invention provides a laser wavelength measuring device, including: the clamp comprises a first conductive shunt structure and a second conductive shunt structure, wherein one of the first conductive shunt structure and the second conductive shunt structure is used for being attached to the anode of the laser, and the other one of the first conductive shunt structure and the second conductive shunt structure is used for being attached to the cathode of the laser;
the first conductive shunting structure is provided with a first opening, a second opening, a third opening and a fourth opening, and a first flow passage communicated with the first opening and the second opening, a second flow passage communicated with the third opening and the fourth opening and a third flow passage communicated with the first flow passage and the second flow passage are arranged in the first conductive shunting structure;
the second conductive shunting structure is provided with a fifth opening, a sixth opening and a fourth flow channel communicated with the fifth opening and the sixth opening;
first opening and fourth opening are used for the feed liquor and go out the liquid, the second opening be used for with the first interface connection of laser instrument, the third opening be used for with the second interface connection of laser instrument, the fifth opening be used for with the third interface connection of laser instrument, the sixth opening be used for with the fourth interface connection of laser instrument, so that the inside water route of laser instrument is parallelly connected with third runner and fourth runner respectively.
Further, the first conductive shunt structure comprises a first conductive part and a first shunt part which are detachably connected, the first conductive part is attached to the laser, the first opening and the fourth opening are located on the first shunt part, the first shunt part is further provided with a seventh opening and an eighth opening, and the first shunt part is internally provided with a first branch flow channel which is communicated with the first opening and the seventh opening and a second branch flow channel which is communicated with the fourth opening and the eighth opening; the third flow channel is positioned in the first flow dividing part and is respectively communicated with the first branch flow channel and the second branch flow channel;
the second opening and the third opening are positioned on the first conductive part, and the first conductive part is also provided with a ninth opening and a tenth opening; a third branch flow channel communicated with the second opening and the ninth opening and a fourth branch flow channel communicated with the third opening and the tenth opening are arranged in the first conductive part;
the first branch flow channel and the third branch flow channel are communicated to form a first flow channel; and the second branch flow channel and the fourth branch flow channel are communicated to form a second flow channel.
Further, the second conductive shunt structure comprises a second conductive part and a second shunt part which are detachably connected, the second conductive part is attached to the laser, the fifth opening and the sixth opening are formed in the second conductive part, the second conductive part is further provided with an eleventh opening and a twelfth opening, and a fifth branch flow channel and a sixth branch flow channel are formed in the second conductive part and are communicated with the fifth opening and the eleventh opening;
a thirteenth opening and a fourteenth opening are formed in the second flow dividing part, and a seventh branch flow channel for communicating the thirteenth opening with the fourteenth opening is formed in the second flow dividing part;
the eleventh opening is connected with the thirteenth opening, and the twelfth opening is connected with the fourteenth opening, so that the fifth branch flow passage, the seventh branch flow passage and the sixth branch flow passage are sequentially communicated to form a fourth flow passage.
Further, the second conductive shunt structure further comprises a third conductive part, the third conductive part is connected with the second shunt part, and the third conductive part is used for connecting an external power line.
Further, the laser wavelength measuring device comprises a base and a first insulating structure, the first insulating structure is arranged between the base and the first conductive shunt structure, the base is provided with a liquid inlet, a liquid guide port, a liquid return port and a liquid discharge port, the liquid inlet is communicated with the liquid guide port, and the liquid return port is communicated with the liquid discharge port;
the first insulating structure is provided with a liquid inlet channel and a liquid return channel which penetrate through the opposite surfaces of the first insulating structure, one end of the liquid inlet channel is connected with the liquid guide port, and the other end of the liquid inlet channel is connected with the first opening; and one end of the liquid return channel is connected with the fourth opening, and the other end of the liquid return channel is connected with the liquid return opening.
Furthermore, a laser positioning structure is arranged on the first conductive shunt structure and used for positioning a laser.
Further, the laser positioning structure comprises a positioning groove corresponding to the laser profile.
Further, laser wavelength measuring device still includes moving mechanism and second insulation system, the electrically conductive reposition of redundant personnel of second passes through second insulation system is connected with moving mechanism, second insulation system is located between the electrically conductive reposition of redundant personnel of second structure and the moving mechanism, moving mechanism is used for the drive the electrically conductive reposition of redundant personnel of second structure to the motion of first electrically conductive reposition of redundant personnel structure, so that first electrically conductive reposition of redundant personnel structure and the electrically conductive reposition of redundant personnel of second structure will the laser instrument centre gripping is fixed.
Further, the laser wavelength measuring device further comprises a liquid source, a flowmeter, a first valve body, a three-way joint, a second valve body, a gas source, a pressure gauge and a third valve body;
the outlet of the liquid source, the first joint of the three-way joint, the third joint of the three-way joint, the first opening, the fourth opening and the inlet of the liquid source are sequentially connected in series through a first channel, wherein the flow meter is connected in series on the first channel and used for detecting the flow of the first channel; the pressure gauge is connected in series between the third joint of the three-way joint and the inlet of the liquid source; the first valve body is connected in series between an outlet of the liquid source and a first joint of the three-way joint; the third valve body is connected in series between the fourth opening and the pressure gauge;
and a second joint of the three-way joint is communicated with the air source through a second channel, and a second valve body is connected to the second channel and used for controlling the on-off of the second channel.
In a second aspect, the laser wavelength measuring method provided in the embodiments of the present invention is implemented by the above laser wavelength measuring apparatus, and includes the steps of:
s1, mounting a laser between a first conductive shunt structure and a second conductive shunt structure;
s2, closing the first valve body and the third valve body, opening the second valve body, and introducing gas with first pressure into the first opening by using a gas source;
s3, closing the second valve body, maintaining the preset time, and when the drop value of the pressure gauge is smaller than or equal to the preset pressure value, determining that the pipeline is qualified in sealing, and performing S4; when the drop value of the pressure gauge is greater than the preset pressure value, the pipeline is regarded as unqualified in sealing, and the step S1 is returned;
and step S4, closing the second valve body, opening the first valve body and the third valve body, introducing cooling liquid by using a liquid source, and acquiring the light wavelength by using a spectrometer.
And further, S5, replacing the first conductive shunt structure and/or the second conductive shunt structure with different shunt quantities to change the flow passing through the laser, and acquiring the spectrum by using a spectrometer to obtain the optical wavelength.
The laser wavelength measuring device provided by the embodiment of the invention comprises: the clamp comprises a first conductive shunt structure and a second conductive shunt structure, wherein one of the first conductive shunt structure and the second conductive shunt structure is used for being attached to the anode of the laser, and the other one of the first conductive shunt structure and the second conductive shunt structure is used for being attached to the cathode of the laser; the first conductive shunting structure is provided with a first opening, a second opening, a third opening and a fourth opening, and a first flow passage communicated with the first opening and the second opening, a second flow passage communicated with the third opening and the fourth opening and a third flow passage communicated with the first flow passage and the second flow passage are arranged in the first conductive shunting structure; the second conductive shunting structure is provided with a fifth opening, a sixth opening and a fourth flow channel communicated with the fifth opening and the sixth opening; first opening and fourth opening are used for the feed liquor and go out the liquid, the second opening be used for with the first interface connection of laser instrument, the third opening be used for with the second interface connection of laser instrument, the fifth opening be used for with the third interface connection of laser instrument, the sixth opening be used for with the fourth interface connection of laser instrument, so that the inside water route of laser instrument is parallelly connected with third runner and fourth runner respectively. During testing, the laser to be tested can be clamped between the first conductive shunt structure and the second conductive shunt structure, the second opening is used for being connected with a first interface of the laser, the third opening is used for being connected with a second interface of the laser, the fifth opening is used for being connected with a third interface of the laser, and the sixth opening is used for being connected with a fourth interface of the laser. After the laser instrument connection finishes, can let in liquid to first opening, first opening can be followed in proper order to liquid, the second opening, first interface, the third interface, the fifth opening, the sixth opening, the fourth interface, the second interface, third opening and fourth opening circulation, and simultaneously, the inside water route of laser instrument is parallelly connected with third runner and fourth runner respectively, third runner and fourth runner play the reposition of redundant personnel effect, will make the flow of the liquid of flowing through the laser instrument reduce, reduce the percentage through laser instrument flow fluctuation, and then stabilize the stability through the laser instrument flow, finally reduce test parameter error. Meanwhile, when liquid passes through the first conductive shunting structure and the second conductive shunting structure, the liquid can cool the first conductive shunting structure and the second conductive shunting structure, and the first conductive shunting structure and the second conductive shunting structure are attached to the anode and the cathode of the laser, so that the temperature of the device per se is adjusted, the part in the device, which is in contact with the laser, is kept at the same temperature as the liquid more quickly, and the laser is better cooled.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic view of a fixture of a laser wavelength measuring device according to an embodiment of the present invention;
FIG. 2 is an enlarged view of a portion of the portion A of FIG. 1;
fig. 3 is an exploded sectional view of a holder of a laser wavelength measuring device according to an embodiment of the present invention;
fig. 4 is a cross-sectional view of a base of a laser wavelength measuring device provided in an embodiment of the present invention;
fig. 5 is a cross-sectional view of a first insulating block of a laser wavelength measuring device according to an embodiment of the present invention;
fig. 6 is a sectional view of a first splitter of a laser wavelength measuring device according to an embodiment of the present invention;
fig. 7 is a cross-sectional view of a first conductive part of a laser wavelength measuring device according to an embodiment of the present invention;
FIG. 8 is a cross-sectional view of a laser to be tested;
fig. 9 is a cross-sectional view of a second conductive part of the laser wavelength measuring device according to the embodiment of the present invention;
fig. 10 is a sectional view of a second splitter of a laser wavelength measuring device according to an embodiment of the present invention;
fig. 11 is a schematic diagram of a laser wavelength measuring device according to an embodiment of the present invention.
Icon: 100-a laser; 110 — a first interface; 120-a second interface; 130-a third interface; 140-a fourth interface;
200-a first split; 210-a first opening; 220-a fourth opening; 230-seventh opening; 240-eighth opening; 250-a first branch flow channel; 260-a second branch flow channel; 270-a third flow channel;
300-a first conductive portion; 310-a second opening; 320-a third opening; 330-ninth opening; 340-tenth opening; 350-a third branch flow channel; 360-a fourth branch flow channel;
400-a second conductive portion; 410-a fifth opening; 420-a sixth opening; 430-eleventh opening; 440-a twelfth opening; 450-a fifth branch flow channel; 460-a sixth branch flow channel;
500-a second split; 510-a thirteenth opening; 520-a fourteenth opening; 530-a seventh branched flow path;
600-a third conductive portion; 710-a base; 711-liquid inlet; 712-a drainage port; 713-liquid return port; 714-liquid drain port; 720-a first insulating structure; 721-liquid inlet channel; 722-liquid return channel; 723-a limiting block; 730-a positioning structure; 740 — a movement mechanism; 750-a second insulating structure.
810-a liquid source; 820-a flow meter; 830-a first valve body; 840-a three-way joint; 850-a second valve body; 860-a gas source; 870-pressure gauge; 880-a third valve body; 890-clamp.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 3, a laser wavelength measuring device provided by an embodiment of the present invention includes: the clamp 890 comprises a first conductive shunt structure and a second conductive shunt structure, wherein one of the first conductive shunt structure and the second conductive shunt structure is used for being attached to the anode of the laser 100, and the other conductive shunt structure is used for being attached to the cathode of the laser 100. For convenience of description of the structure, in this embodiment, the first conductive shunt structure is attached to the anode of the laser 100, and the second conductive shunt structure is in contact with the cathode of the laser 100.
The first conductive flow-splitting structure may be an integral structure or a split structure, and is provided with a first opening 210, a second opening 310, a third opening 320, and a fourth opening 220, and a first flow channel communicating the first opening 210 and the second opening 310, a second flow channel communicating the third opening 320 and the fourth opening 220, and a third flow channel 270 communicating the first flow channel and the second flow channel are arranged in the first conductive flow-splitting structure. The first and second flow channels may be vertically and parallel arranged, and the third flow channel 270 may be perpendicular to the first flow channel and transversely arranged between the first and second flow channels to form a split flow for the liquid.
The second conductive shunt structure may be an integral structure or a split structure, and is provided with a fifth opening 410, a sixth opening 420, and a fourth flow channel communicating the fifth opening 410 and the sixth opening 420. The fourth flow channel also provides a flow splitting function for the flow channels within laser 100.
The first opening 210 and the fourth opening 220 are used for liquid inlet and outlet, the second opening 310 is used for being connected with the first interface 110 of the laser 100, the third opening 320 is used for being connected with the second interface 120 of the laser 100, the first interface 110 is used for being connected with the third interface 130 of the laser 100, and the second interface 120 is used for being connected with the fourth interface 140 of the laser 100. The laser 100 is connected to the first conductive shunt structure and the second conductive shunt structure in a sealing manner, and a sealing ring may be disposed at the corresponding opening and the corresponding interface to improve the sealing performance. It should be noted that the laser 100 includes an anode and a cathode which are arranged up and down, wherein the flow channel of the laser 100, the first interface 110, the second interface 120, the third interface 130 and the fourth interface 140 are all located on the anode, and the cathode of the laser 100 is provided with a first avoidance hole and a second avoidance hole for avoiding the third interface 130 and the fourth interface 140, and the aperture of the first avoidance hole and the aperture of the second avoidance hole are larger than the aperture of the third interface 130 and the aperture of the fourth interface 140; between third interface 130 and the first hole of dodging to and between fourth interface 140 and the second hole of dodging all can form an annular step, can place the elasticity sealing washer in annular step department, and fifth opening 410 and sixth opening 420 are all less than the internal diameter of elasticity sealing washer, through being connected with the elasticity sealing washer, realize fifth opening 410 and third interface 130 intercommunication, sixth opening 420 and fourth interface 140 intercommunication, and the lower surface of the electrically conductive reposition of redundant personnel structure of second can laminate with the negative pole of laser instrument 100.
During testing, the laser 100 to be tested may be clamped between the first conductive shunt structure and the second conductive shunt structure, and the second opening 310 is used for connecting with the first interface 110 of the laser 100, the third opening 320 is used for connecting with the second interface 120 of the laser 100, the first interface 110 is used for connecting with the third interface 130 of the laser 100, and the second interface 120 is used for connecting with the fourth interface 140 of the laser 100. After the laser 100 is connected, liquid can be introduced into the first opening 210, the liquid can sequentially circulate along the first opening 210, the second opening 310, the first interface 110, the third interface 130, the fifth opening 410, the sixth opening 420, the fourth interface 140, the second interface 120, the third opening 320 and the fourth opening 220, meanwhile, a water channel inside the laser 100 is respectively connected with the third flow channel 270 and the fourth flow channel in parallel, and the third flow channel 270 and the fourth flow channel play a role in shunting, so that the flow of the liquid flowing through the laser 100 is reduced, the percentage of flow fluctuation through the laser 100 is reduced, the stability of the flow through the laser 100 is further improved, and finally, the error of a test parameter is reduced. Meanwhile, when liquid passes through the first conductive shunting structure and the second conductive shunting structure, the first conductive shunting structure and the second conductive shunting structure can be cooled, and the first conductive shunting structure and the second conductive shunting structure are attached to the anode and the cathode of the laser 100, so that the temperature of the device per se is adjusted, the part, in contact with the laser 100, of the device is kept at the same temperature as the liquid more quickly, and the laser 100 is better cooled.
Supposing that the laser 100 needs 0.2L/min flow liquid cooling, through simulation and actual tests, the flow of the liquid entering the first opening 210 is 0.2L/min when passing through the laser 100 at 1.6L/min, the flow of the liquid passing through the third flow channel 270 is 0.7L/min, the flow of the liquid passing through the fourth flow channel is 0.7L/min, the fluctuation of the liquid flow is 0.02L/min at the moment, the influence on the flow of the laser 100 is 1.25%, and the stability of the liquid flow passing through a product is greatly improved.
As shown in fig. 6 to 8, the first conductive shunt structure includes a first conductive part 300 and a first shunt part 200 detachably connected, the first conductive part 300 is attached to the laser 100, the first opening 210 and the fourth opening 220 are located on the first shunt part 200, the first shunt part 200 is further provided with a seventh opening 230 and an eighth opening 240, and the first shunt part 200 has a first branch flow channel 250 communicating the first opening 210 and the seventh opening 230 and a second branch flow channel 260 communicating the fourth opening 220 and the eighth opening 240 therein; the third flow channel 270 is located in the first flow dividing part 200, and the third flow channel 270 is respectively communicated with the first branch flow channel 250 and the second branch flow channel 260; the second opening 310 and the third opening 320 are located on the first conductive part 300, and the first conductive part 300 further has a ninth opening 330 and a tenth opening 340; the first conductive part 300 has a third branch flow passage 350 communicating with the second opening 310 and the ninth opening 330 and a fourth branch flow passage 360 communicating with the third opening 320 and the tenth opening 340; the first branch flow channel 250 is communicated with the third branch flow channel 350 to form a first flow channel; the second branch flow passage 260 and the fourth branch flow passage 360 are communicated to form a second flow passage.
In this embodiment, the first conductive shunting structure is a split structure, the first conductive part 300 and the first shunting part 200 can be split or combined, and the first conductive shunting part 200 can be replaced separately, so that the flows flowing through the laser 100 can be different, the first conductive shunting structure is not replaced as a whole, and the cost for preparing the first shunting part 200 with different flows is lower than that for preparing the first conductive shunting structure with different flows. The first conductive part 300 is attached to the positive electrode of the laser 100, and the first conductive part 300 may be connected to a positive power line of an external power supply.
Similarly, as shown in fig. 9 and fig. 10, the second conductive shunt structure includes a second conductive part 400 and a second shunt part 500 that are detachably connected, the second conductive part 400 is attached to the laser 100, the fifth opening 410 and the sixth opening 420 are disposed on the second conductive part 400, the second conductive part 400 is further provided with an eleventh opening 430 and a twelfth opening 440, and the second conductive part 400 is internally provided with a fifth branch flow channel 450 that communicates the fifth opening 410 and the eleventh opening 430, and a sixth branch flow channel 460 that communicates the sixth opening 420 and the twelfth opening 440; a thirteenth opening 510 and a fourteenth opening 520 are formed in the second flow dividing portion 500, and a seventh branch flow passage 530 communicating the thirteenth opening 510 and the fourteenth opening 520 is formed in the second flow dividing portion 500; the eleventh opening 430 is connected to the thirteenth opening 510, and the twelfth opening 440 is connected to the fourteenth opening 520, so that the fifth branch flow channel 450, the seventh branch flow channel 530 and the sixth branch flow channel 460 are sequentially communicated to form a fourth flow channel.
In this embodiment, the second conductive shunting structure is a split structure, the second conductive part 400 and the second shunting part 500 can be split or combined, and the different second shunting parts 500 can be replaced separately, so that the flows flowing through the laser 100 are different, thereby avoiding the need of replacing the second conductive shunting structure as a whole, and the cost for preparing the second shunting parts 500 with different flows is lower than that for preparing the second conductive shunting structures with different flows. The second conductive part 400 is attached to the negative electrode of the laser 100, and functions in conduction and cooling.
The second conductive shunt structure further includes a third conductive portion 600, the third conductive portion 600 is connected to the second shunt portion 500, and the third conductive portion 600 is used for connecting an external power line.
The second conductive part 400 is attached to the negative electrode of the laser 100, the second conductive part 400 is small in size and limited in installation position, an external power line is connected with the third conductive part 600 by additionally adding the third conductive part 600, so that the third conductive part 600, the second shunt part 500 and the second conductive part 400 are sequentially electrically connected, power supply to the laser 100 is achieved, and the installation structure is more reasonable.
As shown in fig. 3 to fig. 5, the laser wavelength measuring device includes a base 710 and a first insulating structure 720, the first insulating structure 720 is disposed between the base 710 and the first conductive shunting structure, the base 710 is provided with a liquid inlet 711, a liquid guide port 712, a liquid return port 713 and a liquid discharge port 714, the liquid inlet 711 is communicated with the liquid guide port 712, and the liquid return port 713 is communicated with the liquid discharge port 714; the first insulating structure 720 is provided with a liquid inlet channel 721 and a liquid return channel 722 which penetrate through the opposite surfaces of the first insulating structure, one end of the liquid inlet channel 721 is connected with the liquid guide port 712, and the other end is connected with the first opening 210; one end of the liquid return channel 722 is connected to the fourth opening 220, and the other end is connected to the liquid return opening 713.
The base 710 functions as a support and may be in communication with an external liquid source 810 or a gas source 860, the liquid enters the first conductive shunt structure through the liquid inlet 711, the liquid guide 712 and the first opening 210, and the liquid in the first conductive shunt structure may be discharged from the fourth opening 220, the liquid return 713 and the liquid discharge 714 back to the liquid source 810, and so on. The first insulating structure 720 can insulate and connect the first conductive shunt structure and the base 710, so as to ensure the smooth performance of the test.
As shown in fig. 2, the base 710 is connected with a limiting block 723, a slot is formed in a side surface of the limiting block 723, the slot is used for accommodating the first shunting part 200, and the first shunting part 200 with different shunting amounts can be replaced by plugging and unplugging the first shunting part 200.
The first conductive shunt structure may have a laser 100 positioning structure 730 disposed thereon for positioning the laser 100.
The positioning structure 730 is utilized to quickly and accurately position the laser 100 on the first conductive shunting structure, so that the first interface 110 is aligned and connected with the second opening 310, and the second interface 120 is aligned and connected with the third opening 320, thereby avoiding the deviation between the interfaces and the openings. Specifically, the positioning structure 730 of the laser 100 includes a positioning groove corresponding to the contour of the laser 100. The groove has a limiting effect on the laser 100, the laser 100 is placed in the groove, and the groove prevents the laser 100 from moving in the horizontal direction.
As shown in fig. 1, the laser wavelength measuring device further includes a moving mechanism 740 and a second insulating structure 750, the second conductive shunt structure is connected to the moving mechanism 740 through the second insulating structure 750, the second insulating structure 750 is located between the second conductive shunt structure and the moving mechanism 740, and the moving mechanism 740 is configured to drive the second conductive shunt structure to move towards the first conductive shunt structure, so that the first conductive shunt structure and the second conductive shunt structure clamp and fix the laser 100.
The moving mechanism 740 may include a cylinder, and the second insulating structure 750 may prevent the cylinder from being electrically connected to the second conductive shunt structure. Through the flexible of cylinder, realize the oscilaltion action of the electrically conductive reposition of redundant personnel structure of second, place laser instrument 100 behind the recess, utilize the cylinder drive the electrically conductive reposition of redundant personnel structure downstream, because the laser instrument 100 has already been fixed a position with first electrically conductive reposition of redundant personnel structure and has been finished, so, when the electrically conductive reposition of redundant personnel structure of second pushes down, can make fifth opening 410 align with third interface 130 and be connected, sixth opening 420 align with fourth interface 140 and be connected.
As shown in fig. 11, the laser wavelength measuring device further comprises a liquid source 810, a flow meter 820, a first valve body 830, a three-way joint 840, a second valve body 850, a gas source 860, a pressure gauge 870 and a third valve body 880; an outlet of the liquid source 810, a first joint of the three-way joint 840, a third joint of the three-way joint 840, the first opening 210, the fourth opening 220, and an inlet of the liquid source 810 are sequentially connected in series through a first channel, wherein the flow meter 820 is connected in series on the first channel and is used for detecting the flow rate of the first channel, and specifically, the flow meter 820 may be disposed between the liquid source 810 and the three-way joint 840; the pressure gauge 870 is connected in series between the third joint of the three-way joint 840 and the inlet of the liquid source 810, and specifically between the fourth opening 220 and the inlet of the liquid source 810; the first valve body 830 is connected in series between the outlet of the liquid source 810 and the first fitting of the three-way fitting 840; the third valve body 880 is connected in series between the fourth opening 220 and the pressure gauge 870; the second connector of the three-way connector is communicated with the air source 860 through a second channel, and a second valve body 850 is connected to the second channel, wherein the second valve body 850 is used for controlling the on-off of the second channel.
During testing, the laser 100 is installed between the first conductive shunt structure and the second conductive shunt structure; the first valve body 830 and the third valve body 880 are closed, the second valve body 850 is opened, and gas with pressure of 0.6MPa or more can be introduced into the first opening 210 by using the gas source 860; closing the second valve body 850, maintaining for about 10 minutes, and when the numerical value drop value of the pressure gauge 870 is less than or equal to a preset pressure value, and the preset pressure value can be 0.005Mpa, determining that the pipeline is qualified for sealing, and performing subsequent steps; when the numerical value of the pressure gauge 870 is reduced to be larger than the preset pressure value, the pipeline sealing is determined to be unqualified, the laser 100 is reinstalled, after the pipeline sealing is qualified, the second valve body 850 is closed, the first valve body 830 and the third valve body 880 are opened, the liquid source 810 is used for introducing cooling liquid, the spectrometer is used for collecting spectra to obtain the wavelength of light, and under the condition that the total flow of the liquid source 810 and the flow split of the third flow channel 270 and the fourth flow channel are known, the flow value flowing through the laser 100 can be obtained, so that the relation between the flow value and the wavelength of light is determined.
During testing, the first conductive shunt structure and/or the second conductive shunt structure with different shunt quantities may be replaced, for example, the first conductive shunt structure is replaced, so that the flow flowing through the laser 100 is changed, and the spectrometer is used to collect a spectrum to obtain the wavelength of light. By this reciprocating, the first conductive shunt structure and/or the second conductive shunt structure are/is replaced until all the set flow values are tested, so that the corresponding relations between different flow rates and wavelengths in the laser 100 can be obtained. Nine test experiments were performed on two different lasers 100, with each test having a 0.05L/min flow transition through the laser 100, with the results shown in table 1.
TABLE 1
Figure T_220819110545137_137983001
The laser wavelength measuring method provided by the embodiment of the invention is implemented by the laser wavelength measuring device and comprises the following steps:
s1, installing a laser 100 between a first conductive shunt structure and a second conductive shunt structure; s2, closing the first valve body 830 and the third valve body 880, opening the second valve body 850, and introducing gas at a first pressure to the first opening 210 by using a gas source 860; s3, closing the second valve body 850, maintaining the preset time, and when the descending value of the pressure gauge 870 is smaller than or equal to the preset pressure value, determining that the pipeline is qualified in sealing, and performing S4; and when the drop value of the pressure gauge 870 is greater than the preset pressure value, the pipeline sealing is determined to be unqualified, the step S1 is returned, the step S4 is carried out, the second valve body 850 is closed, the first valve body 830 and the third valve body 880 are opened, the cooling liquid is introduced by using the liquid source 810, and the spectrometer is used for collecting the spectrum to obtain the wavelength of the light.
During testing, as shown in fig. 11, the laser 100 is mounted between the first conductive shunt structure and the second conductive shunt structure; the first valve body 830 and the third valve body 880 are closed, the second valve body 850 is opened, and gas with pressure of 0.6MPa or more can be introduced into the first opening 210 by using the gas source 860; closing the second valve body 850, maintaining for about 10 minutes, and when the descending value of the pressure gauge 870 is less than or equal to a preset pressure value, and the preset pressure value can be 0.005Mpa, determining that the pipeline is qualified for sealing, and performing the subsequent steps; and after the pipeline is sealed qualified, closing the second valve body 850, opening the first valve body 830 and the third valve body 880, introducing cooling liquid by using the liquid source 810, acquiring the wavelength of light by using a spectrometer through spectrum acquisition, and obtaining the flow value flowing through the laser 100 under the condition that the total flow of the liquid source 810 and the flow split of the third flow channel 270 and the fourth flow channel are known so as to determine the relation between the flow value and the wavelength of light.
And S5, replacing the first conductive shunting structure and/or the second conductive shunting structure with different shunting amounts to change the flow passing through the laser 100, and acquiring the optical wavelength by a spectrum acquired by a spectrometer.
During testing, the first conductive shunt structure and/or the second conductive shunt structure with different shunt quantities may be replaced, for example, the first conductive shunt structure is replaced, so that the flow flowing through the laser 100 is changed, and the spectrometer is used to collect a spectrum to obtain the wavelength of light. By this reciprocating, the first conductive shunt structure and/or the second conductive shunt structure are/is replaced until all the set flow values are tested, so that the corresponding relations between different flow rates and wavelengths in the laser 100 can be obtained. Nine test experiments were performed on two different lasers 100, with each test having a 0.05L/min flow transition through the laser 100, with the results shown in table 1.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (11)

1. A laser wavelength measuring device, comprising: a clamp (890), the clamp (890) comprising a first and a second electrically conductive shunt structure, one of the first and second electrically conductive shunt structures for attaching to a positive electrode of the laser (100) and the other for attaching to a negative electrode of the laser (100);
the first conductive shunt structure is provided with a first opening (210), a second opening (310), a third opening (320) and a fourth opening (220), and a first flow channel communicated with the first opening (210) and the second opening (310), a second flow channel communicated with the third opening (320) and the fourth opening (220) and a third flow channel (270) communicated with the first flow channel and the second flow channel are arranged in the first conductive shunt structure;
the second conductive shunt structure is provided with a fifth opening (410), a sixth opening (420) and a fourth flow channel for communicating the fifth opening (410) with the sixth opening (420);
first opening (210) and fourth opening (220) are used for the feed liquor and go out the liquid, second opening (310) are used for being connected with first interface (110) of laser instrument (100), third opening (320) are used for being connected with second interface (120) of laser instrument (100), fifth opening (410) are used for being connected with third interface (130) of laser instrument (100), sixth opening (420) are used for being connected with fourth interface (140) of laser instrument (100), so that the inside water route of laser instrument (100) is parallelly connected with third runner (270) and fourth runner respectively.
2. The laser wavelength measurement device according to claim 1, wherein the first conductive shunt structure comprises a first conductive part (300) and a first shunt part (200) which are detachably connected, the first conductive part (300) is attached to the laser (100), the first opening (210) and the fourth opening (220) are located on the first shunt part (200), a seventh opening (230) and an eighth opening (240) are further disposed on the first shunt part (200), and the first shunt part (200) has a first branch flow channel (250) which communicates the first opening (210) and the seventh opening (230) and a second branch flow channel (260) which communicates the fourth opening (220) and the eighth opening (240); the third flow channel (270) is positioned in the first flow dividing part (200), and the third flow channel (270) is respectively communicated with the first branch flow channel (250) and the second branch flow channel (260);
the second opening (310) and the third opening (320) are located on the first conductive part (300), and the first conductive part (300) is further provided with a ninth opening (330) and a tenth opening (340); the first conductive part (300) is internally provided with a third branch flow channel (350) communicated with the second opening (310) and the ninth opening (330) and a fourth branch flow channel (360) communicated with the third opening (320) and the tenth opening (340);
the first branch flow channel (250) is communicated with the third branch flow channel (350) to form a first flow channel; the second branch flow channel (260) is communicated with the fourth branch flow channel (360) to form a second flow channel.
3. The laser wavelength measurement device according to claim 1, wherein the second conductive shunt structure comprises a second conductive part (400) and a second shunt part (500) which are detachably connected, the second conductive part (400) is attached to the laser (100), the fifth opening (410) and the sixth opening (420) are arranged on the second conductive part (400), the second conductive part (400) is further provided with an eleventh opening (430) and a twelfth opening (440), a fifth branch flow channel (450) which communicates the fifth opening (410) and the eleventh opening (430) and a sixth branch flow channel (460) which communicates the sixth opening (420) and the twelfth opening (440) are arranged inside the second conductive part (400);
a thirteenth opening (510) and a fourteenth opening (520) are formed in the second flow dividing part (500), and a seventh branch flow channel (530) communicating the thirteenth opening (510) and the fourteenth opening (520) is formed in the second flow dividing part (500);
the eleventh opening (430) is connected with the thirteenth opening (510), and the twelfth opening (440) is connected with the fourteenth opening (520), so that the fifth branch flow passage (450), the seventh branch flow passage (530) and the sixth branch flow passage (460) are sequentially communicated to form a fourth flow passage.
4. The laser wavelength measurement device according to claim 3, wherein the second conductive shunt structure further comprises a third conductive part (600), the third conductive part (600) is connected with the second shunt part (500), and the third conductive part (600) is used for external power line connection.
5. The laser wavelength measuring device according to claim 1, wherein the laser wavelength measuring device comprises a base (710) and a first insulating structure (720), the first insulating structure (720) is disposed between the base (710) and the first conductive shunt structure, the base (710) is provided with a liquid inlet (711), a liquid guide port (712), a liquid return port (713) and a liquid discharge port (714), the liquid inlet (711) is communicated with the liquid guide port (712), and the liquid return port (713) is communicated with the liquid discharge port (714);
the first insulating structure (720) is provided with a liquid inlet channel (721) and a liquid return channel (722) which penetrate through the opposite surfaces of the first insulating structure, one end of the liquid inlet channel (721) is connected with the liquid guide port (712), and the other end of the liquid inlet channel is connected with the first opening (210); one end of the liquid return channel (722) is connected with the fourth opening (220), and the other end of the liquid return channel is connected with the liquid return opening (713).
6. The laser wavelength measurement device according to claim 1, wherein a laser (100) positioning structure (730) is arranged on the first electrically conductive shunt structure for positioning the laser (100).
7. The laser wavelength measurement device according to claim 6, wherein the laser (100) positioning structure (730) comprises a positioning groove corresponding to the laser (100) profile.
8. The laser wavelength measurement device according to claim 1, wherein the laser wavelength measurement device further comprises a moving mechanism (740) and a second insulating structure (750), the second conductive shunt structure is connected to the moving mechanism (740) through the second insulating structure (750), the second insulating structure (750) is located between the second conductive shunt structure and the moving mechanism (740), and the moving mechanism (740) is configured to drive the second conductive shunt structure to move towards the first conductive shunt structure, so that the first conductive shunt structure and the second conductive shunt structure clamp and fix the laser (100).
9. The laser wavelength measurement device according to any one of claims 1-8, further comprising a liquid source (810), a flow meter (820), a first valve body (830), a three-way joint (840), a second valve body (850), a gas source (860), a pressure gauge (870), and a third valve body (880);
an outlet of the liquid source (810), a first joint of the three-way joint (840), a third joint of the three-way joint, the first opening (210), a fourth opening (220) and an inlet of the liquid source (810) are sequentially connected in series through a first channel, wherein the flowmeter (820) is connected in series on the first channel and used for detecting the flow of the first channel; the pressure gauge (870) is connected in series between the third joint of the three-way joint and the inlet of the liquid source (810); the first valve body (830) is connected in series between an outlet of a liquid source (810) and a first joint of the three-way joint (840); the third valve body (880) is connected in series between the fourth opening (220) and the pressure gauge (870);
and a second joint of the three-way joint is communicated with an air source (860) through a second passage, a second valve body (850) is connected to the second passage, and the second valve body (850) is used for controlling the on-off of the second passage.
10. A laser wavelength measuring method implemented by the laser wavelength measuring device of claim 9, comprising the steps of:
s1, installing a laser (100) between a first conductive shunt structure and a second conductive shunt structure;
s2, closing the first valve body (830) and the third valve body (880), opening the second valve body (850), and introducing gas with first pressure into the first opening (210) by using a gas source (860);
s3, closing the second valve body (850), maintaining the preset time, and when the descending value of the pressure gauge (870) is less than or equal to the preset pressure value, determining that the pipeline is qualified in sealing, and performing S4; when the descending value of the pressure gauge (870) is larger than the preset pressure value, the pipeline is regarded as unqualified in sealing, and the step S1 is returned;
and step S4, closing the second valve body (850), opening the first valve body (830) and the third valve body (880), introducing cooling liquid by using the liquid source (810), and collecting the spectrum by using a spectrometer to obtain the wavelength of the light.
11. The laser wavelength measurement method according to claim 10, further comprising a step s5 of replacing the first conductive shunt structure and/or the second conductive shunt structure with different shunt quantities to change the flow rate passing through the laser (100) and collecting the spectrum by a spectrometer to obtain the wavelength of the light.
CN202211002651.5A 2022-08-22 2022-08-22 Laser wavelength measuring device and method Active CN115096455B (en)

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CN112234430A (en) * 2020-11-10 2021-01-15 苏州度亘光电器件有限公司 Semiconductor laser device
CN114142337A (en) * 2021-11-10 2022-03-04 中国电子科技集团公司第十一研究所 Semiconductor laser wavelength self-locking device and method

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* Cited by examiner, † Cited by third party
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JP2008064665A (en) * 2006-09-08 2008-03-21 V Technology Co Ltd Optical length measuring apparatus
CN101751048A (en) * 2008-12-11 2010-06-23 华为技术有限公司 Temperature control method and temperature control device for wavelength detecting device
CN104266691A (en) * 2014-10-13 2015-01-07 北京光电技术研究所 Flow rate measuring device for circulating liquid
CN107732652A (en) * 2017-09-30 2018-02-23 西安炬光科技股份有限公司 A kind of two-side radiation refrigerator and semiconductor devices
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